TWI858150B - How to remove the cutting blade - Google Patents

Abstract

Provided is a processing device that can suppress damage to a cutting blade during replacement.

A processing device has a flange mechanism. The flange mechanism includes: a fixed flange having a boss portion formed with a male screw, and a support surface protruding from the boss portion in a radial direction to support a cutting blade; a pressing flange that clamps the cutting blade installed on the boss portion between the fixed flange; and a fixing nut that fixes the cutting blade through the pressing flange by tightening with the boss portion. The fixed flange includes: a suction hole formed on the support surface and attracting and fixing the cutting blade; a suction portion that connects the suction hole and a suction source; a switch valve formed in the suction path; and a control device that turns the switch valve on and off, and the control device opens the switch valve when the pressing flange is removed.

Description

How to remove the cutting blade

The present invention relates to a processing device having a flange mechanism.

There is a known processing device that uses a cutting blade to cut various plate-shaped workpieces such as semiconductor substrates or resin package substrates, ceramic substrates, etc. made of silicon, gallium arsenide, SiC (silicon carbide), sapphire, etc. (see, for example, Patent Documents 1 and 2). The processing device shown in Patent Document 1 uses a cutting blade of a so-called washer-type blade composed only of a cutting edge to cut the workpiece.

The processing device shown in Patent Document 2 is equipped with a blade replacement mechanism, which attracts and holds the pressing flange that clamps and fixes the cutting blade between the fixing flange and the cutting blade, and replaces the cutting blade and the pressing flange together.

Prior art literature Patent Literature

Patent document 1: Japanese Patent Publication No. 2016-144838

Patent document 2: Japanese Patent Publication No. 2016-64450

However, in the processing device shown in Patent Document 2, when the pressing flange is removed from the fixed flange, there is a concern that the washer-type blade that has been attracted and retained together with the pressing flange may fall from the pressing flange and be damaged. In particular, the processing device shown in Patent Document 2 is a processing device that is equipped with a blade replacement mechanism, and the aforementioned problem is easily caused when the pressing flange is removed.

Accordingly, the purpose of the present invention is to provide a processing device that can suppress the damage of the cutting blade during replacement.

According to the present invention, a processing device can be provided, the processing device having a flange mechanism, the flange mechanism is used to install a disc-shaped cutting blade having a mounting hole in the center on a main shaft serving as a rotating shaft, and the processing device is characterized in that: the flange mechanism has: a fixed flange portion having a boss portion with a male screw formed at the front end, and a supporting surface protruding from the boss portion in the radial direction to support the cutting blade; a pressing flange portion having a mounting hole that can be installed on the boss portion, and can clamp the fixed flange portion and the fixed flange portion to hold the cutting blade installed on the boss portion. The cutting blade of the part is fixed on the convex seat; and a fixing nut is formed with a female screw on the inner circumference and is screwed with the male screw of the convex seat, and the cutting blade is fixed through the pressing flange part by being tightly fixed with the convex seat. The fixing flange part includes: a suction hole formed on the supporting surface and attracting and fixing the cutting blade; a suction path that connects the suction hole with the suction source; a valve formed on the suction path; and a control part that controls the suction by switching the valve. When the pressing flange part is removed, the control part opens the valve to attract the cutting blade so as not to cause the cutting blade to fall.

It can also be: in the aforementioned processing device, there is further provided a cutting blade replacement mechanism for loading and unloading the cutting blade on the flange mechanism, and the cutting blade replacement mechanism comprises: a nut loading and unloading part for loading and unloading the fixing nut; a blade loading and unloading part for loading and unloading the cutting blade; and a pressing flange loading and unloading part for loading and unloading the pressing flange part.

The present invention can exert the effect of suppressing the damage of the cutting blade during replacement.

1: Processing equipment

2: Processing area

3: Move in and move out area

4: Device body

5: Support frame

6: Cutting blade replacement mechanism

10: Workbench

11: Keep the face

12: Clamping Department

20: Cutting unit

21: Cutting blade

211: Cutting Edge

212,271: Installation hole

22: Spindle housing

221: Front end

222: screw hole

23: Main axis

231: screw hole

24: Swivel joint

241: flange

242: convex seat

243:Through hole

244: Suction tube

25: Flange mechanism

26: Fixed flange (fixed flange part)

27: Press the flange (press the flange part)

272: Clamping surface

273: Chimeric groove

28:Fixing nut

281: Female screw

282: Pin fitting hole

291: Gasket

292:Fixing screws

30: Mobile unit

31: X-axis moving unit

32: Y-axis moving unit

33: Z-axis moving unit

34: Rotational movement unit

40,857:Switch valve (valve)

41: Attraction source

43: convex seat

431: Drop section

432: Cone

433: Blade support boss

434: Male screw

44: flange

441: Support surface

442: Supporting protrusion

443,835,845,855: End face

45: Suction hole

46: Attraction channel

47,856: Attraction Road

70: Blade storage

71: Storage body

72: Blade holding part

80: Blade loading and unloading unit

81:Unit body

82: Loading and unloading side moving unit

83: Press flange assembly and disassembly section

831,841,851: Shell

832,842,852: Rods

833,843,853: Support base

834,844: Claws

84: Nut loading and unloading department

846:Matching pin

85: Blade loading and unloading part

854: Attraction groove

858: Attraction source

859: Boss intrusion hole

100: Control device (control unit)

200:Workpiece

201: Front

202: Split the scheduled line

203: Devices

204: Back

205: Ring frame

206: Adhesive tape

X,Y,Z: Direction

FIG1 is a three-dimensional diagram showing an example of the structure of a processing device of embodiment 1.

FIG2 is a three-dimensional diagram showing the disassembled cutting unit of the processing device shown in FIG1.

Figure 3 is a cross-sectional view of the main parts of the cutting unit shown in Figure 2.

FIG4 is a three-dimensional diagram showing the blade loading and unloading unit of the cutting blade loading and unloading mechanism of the processing device shown in FIG1.

FIG5 is a three-dimensional diagram showing the main parts of the pressing flange assembly and disassembly section of the blade assembly and disassembly unit shown in FIG4.

FIG6 is a three-dimensional diagram showing the main parts of the nut mounting and disassembly section of the blade mounting and disassembly unit shown in FIG4.

FIG. 7 is a three-dimensional diagram showing the main parts of the blade loading and unloading section of the blade loading and unloading unit shown in FIG. 4 .

FIG8 is a side view of the pressing flange assembly and disassembly section showing the cutting unit in cross section when the pressing flange of the processing device shown in FIG1 is being assembled and disassembled.

FIG9 is a side view of the blade loading and unloading portion of the cutting unit showing the cutting blade of the processing device shown in FIG1 in a state of loading and unloading.

The form used to implement the invention

The following is a detailed description of the implementation of the present invention with reference to the drawings. The present invention is not limited by the contents described in the following implementation. In addition, the components described below include components that can be easily conceived by a person with ordinary knowledge in the relevant technical field or are substantially the same. In addition, the components described below can be appropriately combined. In addition, various components can be omitted, replaced or changed without departing from the gist of the present invention.

[Implementation form 1]

The processing device of the embodiment 1 of the present invention is described according to the drawings. FIG. 1 is a three-dimensional diagram showing a configuration example of the processing device of the embodiment 1. FIG. 2 is a three-dimensional diagram showing the cutting unit of the processing device shown in FIG. 1 after being decomposed. FIG. 3 is a cross-sectional diagram of the main part of the cutting unit shown in FIG. 2.

(Processing equipment)

The processing device 1 of the embodiment 1 is a cutting device for cutting the workpiece 200 shown in FIG. 1. In the embodiment 1, the workpiece 200 is a wafer such as a circular plate-shaped semiconductor wafer or an optical device wafer with silicon, gallium arsenide, SiC (silicon carbide) or sapphire as a base material. The workpiece 200 has a device 203 formed in an area divided into a grid shape by a plurality of predetermined dividing lines 202 formed in a grid shape on the front side 201.

Furthermore, the workpiece 200 of the present invention may also be a so-called TAIKO (registered trademark) wafer thinned in the center and having a thick wall portion formed in the outer periphery. In addition to the wafer, it may also be a rectangular resin package substrate having a plurality of devices sealed by resin, a ceramic substrate, a ferrite substrate, or a substrate containing at least one of nickel and iron, a glass substrate, etc. In the first embodiment, the workpiece 200 is supported by the annular frame 205 by attaching the back surface 204 to the adhesive tape 206 having the annular frame 205 installed on the outer periphery.

The processing device 1 shown in FIG1 is a cutting device that holds the workpiece 200 with a work clamp 10 and performs cutting processing (equivalent to processing) with a cutting blade 21 along a predetermined dividing line 202. As shown in FIG1, the processing device 1 comprises: a work clamp 10 that attracts and holds the workpiece 200 with a holding surface 11; a cutting unit 20 that cuts the workpiece 200 held on the work clamp 10 with a cutting blade 21; a photographing unit (not shown) that photographs the workpiece 200 held on the work clamp 10; a cutting blade replacement mechanism 6; and a control unit, i.e., a control device 100.

As shown in FIG. 1 , the processing device 1 includes a moving unit 30 for moving the work table 10 and the cutting unit 20 relative to each other. The moving unit 30 at least comprises: an X-axis moving unit 31, which is a processing feeding unit for feeding the worktable 10 in the X-axis direction parallel to the horizontal direction; a Y-axis moving unit 32, which is a indexing feeding unit for feeding the cutting unit 20 in the Y-axis direction parallel to the horizontal direction and orthogonal to the X-axis direction; a Z-axis moving unit 33, which is a cutting feeding unit for feeding the cutting unit 20 in the Z-axis direction parallel to the vertical direction orthogonal to both the X-axis direction and the Y-axis direction; and a rotating moving unit 34, which rotates the worktable 10 around an axis parallel to the Z-axis direction.

The X-axis moving unit 31 is a unit that processes and feeds the worktable 10 and the cutting unit 20 relative to each other along the X-axis direction by moving the worktable 10 in the processing feed direction, i.e., the X-axis direction. The Y-axis moving unit 32 is a unit that indexes and feeds the worktable 10 and the cutting unit 20 relative to each other along the Y-axis direction by moving the cutting unit 20 in the indexing feed direction, i.e., the Y-axis direction. The Z-axis moving unit 33 is a unit that cuts and feeds the worktable 10 and the cutting unit 20 relative to each other along the Z-axis direction by moving the cutting unit 20 in the cutting feed direction, i.e., the Z-axis direction.

The X-axis moving unit 31, the Y-axis moving unit 32 and the Z-axis moving unit 33 all have a known ball screw, a known motor and a known guide rail. The ball screw is rotatably arranged around the axis, the motor rotates the ball screw around the axis, and the guide rail supports the work clamp 10 or the cutting unit 20 to be movable in the X-axis direction, the Y-axis direction or the Z-axis direction.

The work clamp 10 is in the shape of a disk, and has a holding surface 11 for holding the workpiece 200 formed by porous ceramics or the like. Furthermore, the work clamp 10 is arranged to be movable in the X-axis direction by an X-axis moving unit 31 in a form covering a processing area 2 and a loading and unloading area 3, and is arranged to be rotatable around an axis parallel to the Z-axis direction by a rotation moving unit 34. The aforementioned processing area 2 is an area below the cutting unit 20, and the aforementioned loading and unloading area 3 is an area for loading and unloading the workpiece 200 away from the bottom of the cutting unit 20. The work clamp 10 is connected to a vacuum suction source not shown in the figure, and sucks and holds the workpiece 200 placed on the holding surface 11 by suction with the vacuum suction source. In the first embodiment, the work clamp 10 attracts and holds the back side 204 of the workpiece 200 via the adhesive tape 206. Also, as shown in FIG. 1 , a plurality of clamping parts 12 for clamping the annular frame 205 are provided around the work clamp 10.

The cutting unit 20 is a cutting assembly that is detachably mounted with a cutting blade 21, and the cutting blade 21 cuts the workpiece 200 held on the work fixture 10. The cutting unit 20 is movably arranged in the Y-axis direction by the Y-axis moving unit 32 relative to the workpiece 200 held by the work fixture 10, and is movably arranged in the Z-axis direction by the Z-axis moving unit 33.

As shown in FIG1 , the cutting unit 20 is disposed on a support frame 5 vertically disposed from the device body 4 through a Y-axis moving unit 32 and a Z-axis moving unit 33. The cutting unit 20 is capable of positioning the cutting blade 21 at any position on the holding surface 11 of the work clamp 10 through the Y-axis moving unit 32 and the Z-axis moving unit 33.

As shown in FIG2 , the cutting unit 20 includes a cutting blade 21, a spindle housing 22, a spindle 23 rotatably arranged on the spindle housing 22 around an axis, a rotary joint 24, and a flange mechanism 25.

The cutting blade 21 is an extremely thin cutting grindstone having a roughly annular shape. In the first embodiment, the cutting blade 21 is a so-called washer-type blade consisting only of a cutting edge 211. The cutting edge 211 is formed of abrasive grains such as diamond or CBN (cubic boron nitride) and a binder (bonding material) such as metal or resin, and is formed to a predetermined thickness. The cutting blade 21 is formed in a disc shape having a mounting hole 212 in the center of the cutting edge 211.

The spindle housing 22 is supported to be movable in the Z-axis direction by the Z-axis moving unit 33, and is supported to be movable in the Y-axis direction by the Y-axis moving unit 32 through the Z-axis moving unit 33. The spindle housing 22 accommodates the spindle 23 except the front end and the spindle motor (not shown), and supports the spindle 23 so that it can rotate around the axis.

The spindle 23 is a rotating shaft that is rotated by a spindle motor (not shown), and the front end portion protrudes further than the front end surface 221 of the spindle housing 22. The front end portion of the spindle 23 is gradually formed thinner toward the front end, and a screw hole 231 is provided that opens on the front end surface.

The swivel joint 24 is a structure for transmitting the attractive force of the fixing flange 26 for fixing the cutting insert 21 to the flange mechanism 25. The swivel joint 24 integrally includes an annular flange portion 241 through which the front end portion of the spindle 23 passes, and a cylindrical boss portion 242 vertically provided from the inner edge of the flange portion 241. The flange portion 241 is overlapped with the front end surface 221 of the spindle housing 22 in a state where the front end portion of the spindle 23 passes through on the inside. The swivel joint 24 is fixed to the spindle housing 22 by passing a screw (not shown) through a through hole 243 provided in the flange portion 241 and screwing it into a screw hole 222 provided in the front end surface 221. The rotary joint 24 is arranged coaxially with the main shaft 23.

In addition, a suction pipe 244 is installed on the boss portion 242 of the rotary joint 24. The suction pipe 244 is vertically arranged from the inner edge of the through hole penetrating the boss portion 242, and is connected to a suction source 41 composed of a vacuum pump or the like through a valve, that is, a switch valve 40. The switch valve 40 is a structure for switching the connection between the suction source 41 and the inner circumference of the boss portion 242 of the rotary joint 24.

The flange mechanism 25 is fixed to the spindle 23 and is used to install the cutting blade 21 on the front end of the spindle 23. As shown in Figures 2 and 3, the flange mechanism 25 has a fixed flange portion, i.e., a fixed flange 26, and a pressing flange portion, i.e., a pressing flange 27 and a fixing nut 28.

The fixed flange 26 has a cylindrical boss portion 43 and a flange portion 44 protruding from the central portion in the axial direction of the boss portion 43 toward the outer peripheral side in the radial direction. The boss portion 43 is fixed to the front end portion of the spindle 23. As shown in FIG. 3 , the boss portion 43 has a step portion 431 and a tapered portion 432 on the inner peripheral surface. The step portion 431 is provided at the front end side farther from the spindle housing 22 than the flange portion 44, and the inner diameter of the boss portion 43 is gradually reduced from the front end farther from the spindle housing 22 toward the base end side closer to the spindle housing 22. The surface of the step portion 431 is formed flat along a direction orthogonal to the axis of the boss portion 43, i.e., the fixed flange 26.

The conical portion 432 is formed to cover the base end from the center of the axial direction of the boss portion 43, and the inner diameter of the boss portion 43 is gradually expanded from the center of the axial direction toward the base end side. The fixing flange 26 is inserted into the base end side of the boss portion 43 for the front end of the main shaft 23, and is fixed to the front end of the main shaft 23 by screwing the fixing screw 292 in the washer 291 superimposed on the surface of the drop portion 431 and the screw hole 231 provided on the front end surface of the main shaft 23. When the fixing flange 26 is fixed to the front end of the main shaft 23, the conical portion 432 will be in close contact with the front end of the main shaft 23.

The boss portion 43 has a blade supporting boss portion 433, which protrudes from the axial center of the outer peripheral surface toward the outer peripheral direction and is integrated with the flange portion 44. The blade supporting boss portion 433 is arranged closer to the front end side than the flange portion 44, and the outer diameter is formed to be equal to the inner diameter of the mounting hole 212 of the cutting blade 21. The boss portion 43 is inserted into the mounting hole 212 of the cutting blade 21 from the front end side, and the cutting blade 21 is supported on the outer peripheral surface of the blade supporting boss portion 433. In addition, the boss portion 43 is formed with a male screw 434 at the front end of the outer peripheral surface.

The flange portion 44 is a circular ring-shaped component that protrudes outward in the radial direction from the central portion in the axial direction of the boss portion 43. The outer diameter of the flange portion 44 is smaller than the outer diameter of the cutting blade 21. The flange portion 44 has a supporting surface 441, and the aforementioned supporting surface 441 faces the cutting blade 21 supported by the boss portion 433 for blade support on the inner peripheral surface of the mounting hole 212. The supporting surface 441 is formed with a supporting protrusion 442 protruding toward the front end side (i.e., the cutting blade 21 side) around the entire circumference of the outer edge. The end face 443 of the supporting protrusion 442 is formed flat along a direction orthogonal to the axis of the fixed flange 26. The flange portion 44 supports the cutting blade 21 by making the cutting blade 21 fit closely against the end surface 443 of the supporting protrusion 442.

Furthermore, the fixed flange 26 includes a suction hole 45, a suction passage 46, the aforementioned switch valve 40 and a control device 100. The suction hole 45 is formed on the support surface 441 and is used to attract and fix the cutting blade 21 by the suction force from the suction source 41. In the embodiment 1, the suction hole 45 is opened on the support surface 441 closer to the inner peripheral side than the support protrusion 442, and a plurality of suction holes 45 are provided at equal intervals in the circumferential direction.

The suction passage 46 is formed in the fixed flange 26 and is a passage that connects the suction hole 45 with the inner periphery of the rotary joint 24. The suction passage 46 connects one end to the suction hole 45 and opens the other end to the outer peripheral surface of the boss portion 43 and faces the inner peripheral surface of the rotary joint 24. The suction passage 46 and the suction tube 244 of the rotary joint 24 constitute a suction passage 47 that connects the suction hole 45 with the suction source 41. Therefore, the switch valve 40 is formed in the suction passage 47. The fixed flange 26 includes the suction passage 47.

The fixed flange 26 is to attract and hold the cutting blade 21 on the end surface 443 of the supporting protrusion 442 of the supporting surface 441 by opening the switch valve 40 and sucking the suction hole 45 through the suction path 47 by the suction source 41.

The pressing flange 27 is formed into a circular ring having a mounting hole 271 in the center that can be mounted on the boss portion 43 of the fixed flange 26. The pressing flange 27 has an outer diameter smaller than the outer diameter of the cutting insert 21. The pressing flange 27 allows the front end side of the boss portion 43 of the fixed flange 26 to pass through the mounting hole 271, and has a clamping surface 272 that clamps the cutting insert 21 between the end surface 443 of the support protrusion 442 of the support surface 441 of the fixed flange 26 on the entire circumference of the outer edge. The clamping surface 272 is formed flat along a direction orthogonal to the axis of the pressing flange 27. The pressing flange 27 is to clamp the cutting blade 21 between the clamping surface 272 and the supporting protrusion 442 of the supporting surface 441 of the fixed flange 26. In addition, the pressing flange 27 is formed with a fitting groove 273 covering the entire circumference of the outer peripheral surface. Furthermore, the supporting surface 441 represents the area extending annularly from the outer periphery of the boss portion 43 to the end surface 443. Although in the embodiment 1, the suction hole 45 is opened on the inner side of the fixed flange 26 than the end surface of the supporting protrusion 442 of the supporting surface 441, it can also be opened in other places of the supporting surface 441, such as the end surface.

The fixing nut 28 is formed in a circular ring shape, and a female screw 281 is formed on the inner circumference thereof to be screwed with the male screw 434 of the boss portion 43. The fixing nut 28 is fastened to the boss portion 43 by screwing the male screw 434 of the boss portion 43 of the fixing flange 26 through the mounting hole 271 of the pressing flange 27, and the fixing nut 28 is fastened to the boss portion 43 by screwing the female screw 281 into the male screw 434 of the boss portion 43 of the fixing flange 26 that holds the cutting insert 21 between the end surface 443 of the supporting protrusion 442 and the clamping surface 272. The fixing nut 28 is fastened to the boss portion 43, and the cutting insert 21 is fixed between the fixing flange 26 and the pressing flange 27 via the pressing flange 27. As shown in FIG2 , the fixing nut 28 has four pin fitting holes 282 arranged at equal intervals on the end surface in the circumferential direction.

The cutting unit 20 constructed in this way has a rotating joint 24 fixed to the front end face 221 of the spindle housing 22, and allows the front end of the spindle 23 to pass through the inner side of the base end side of the boss portion 43, and the fixed flange 26 is fixed to the front end of the spindle 23 by means of fixing screws 292, and the inner peripheral surface of the mounting hole 212 of the cutting blade 21 is supported on the outer peripheral surface of the blade supporting boss portion 433. The cutting unit 20 allows the front end side of the boss portion 43 of the fixed flange 26 to pass through the inner side of the mounting hole 271 of the pressing flange 27, and allows the female screw 281 to be screwed into the male screw 434, and the pressing flange 27 and the cutting blade 21 are fixed to the front end of the spindle 23 by the fixing nut 28.

Furthermore, the axes of the main shaft 23, the rotary joint 24, the fixing flange 26, the cutting blade 21, the pressing flange 27 and the fixing nut 28 of the cutting unit 20 are set to be parallel to the Y-axis direction.

The photographing unit is fixed to the cutting unit 20 so as to move integrally with the cutting unit 20. The photographing unit has a photographing element for photographing the area for dividing the workpiece 200 held on the work fixture 10 before cutting. The photographing element may be, for example, a CCD (Charge-Coupled Device) photographing element or a CMOS (Complementary Metal Oxide Semiconductor) photographing element. The photographing unit photographs the workpiece 200 held on the work fixture 10 to obtain an image for completing calibration, etc., and outputs the obtained image to the control device 100, wherein the aforementioned calibration is to align the workpiece 200 with the cutting blade 21.

Furthermore, the processing device 1 has an X-axis direction position detection unit (not shown), a Y-axis direction position detection unit (not shown), and a Z-axis direction position detection unit. The X-axis direction position detection unit is used to detect the X-axis direction position of the work clamp 10, the Y-axis direction position detection unit is used to detect the Y-axis direction position of the cutting unit 20, and the Z-axis direction position detection unit is used to detect the Z-axis direction position of the cutting unit 20. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis direction position detection unit detects the Z-axis direction position of the cutting unit 20 using a motor pulse. The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the X-axis direction position of the worktable 10, the Y-axis direction or the Z-axis direction position of the cutting unit 20 to the control device 100. Furthermore, in the first embodiment, the X-axis direction, the Y-axis direction, and the Z-axis direction position of each component of the processing device 1 are set to be based on a predetermined reference position not shown in the figure.

The control device 100 is a device that controls each component of the processing device 1 to perform processing on the workpiece 200. That is, the control device 100 is also a device that controls the suction of the cutting blade 21 of the fixed flange 26 by turning the switch valve 40 on and off. Furthermore, the control device 100 is a computer having an operation processing device, a memory device, and an input-output interface device. The operation processing device has a microprocessor such as a CPU (central processing unit), and the memory device has a memory such as a ROM (read only memory) or a RAM (random access memory). The calculation processing device of the control device 100 performs calculation processing according to the computer program stored in the memory device, and outputs the control signal used to control the processing device 1 to each component of the processing device 1 through the input and output interface device.

The control device 100 can be connected to a display unit and an input unit (not shown). The display unit is composed of a liquid crystal display device that displays the status or image of the processing action, etc. The input unit is used when the operator logs in the processing content information, etc. The input unit is composed of at least one of an external input device such as a touch panel and a keyboard provided on the display unit.

(Cutting blade replacement mechanism)

FIG. 4 is a perspective view showing a blade loading and unloading unit of the cutting blade loading and unloading mechanism of the processing device shown in FIG. 1. FIG. 5 is a perspective view showing the main parts of the pressing flange loading and unloading part of the blade loading and unloading unit shown in FIG. 4. FIG. 6 is a perspective view showing the main parts of the nut loading and unloading part of the blade loading and unloading unit shown in FIG. 4. FIG. 7 is a perspective view showing the main parts of the blade loading and unloading part of the blade loading and unloading unit shown in FIG. 4.

The cutting blade replacement mechanism 6 is a mechanism for loading and unloading the cutting blade 21 to the fixed flange 26 of the flange mechanism 25 of the cutting unit 20. In the embodiment 1, as shown in FIG1, the cutting blade replacement mechanism 6 is arranged at a position aligned with the work clamp 10 positioned in the loading and unloading area 3 of the device body 4 in the Y-axis direction. The cutting blade replacement mechanism 6 has a blade storage 70 for holding the cutting blade 21 before and after replacement, and a blade loading and unloading unit 80 for loading and unloading the cutting blade 21 to the spindle 23 of the cutting unit 20 and transporting the cutting blade 21 between the blade storage 70 and the cutting unit 20.

The blade storage 70 includes a storage body 71 provided on the device body 4, and a blade holding portion 72 for holding the cutting blade 21. A plurality of blade holding portions 72 are provided on the storage body 71. In the first embodiment, the blade storage 70 includes two blade holding portions 72. Furthermore, the cutting blades 21 held by the blade holding portion 72 of the blade storage 70 include, in addition to unused blades, blades that have been used but have not reached the end of their service life and can be used, and blades of the same type and/or different types.

In the first embodiment, the axes of the two blade holding parts 72 of the blade storage 70 are arranged parallel to the Y-axis direction. The two blade holding parts 72 are arranged at intervals in the X-axis direction.

The blade attachment unit 80 is a unit for attaching the cutting blade 21 to the fixed flange 26 of the flange mechanism 25 of the cutting unit 20 and for detaching the cutting blade 21 from the fixed flange 26. As shown in FIG1 , the blade attachment unit 80 has a unit body 81, an attachment side moving unit 82 for moving the unit body 81 in the X-axis direction, a pressing flange attachment part 83, a nut attachment part 84, and a pair of blade attachment parts 85.

The loading and unloading side moving unit 82 has a screw shaft extending in the X-axis direction and screwed with a nut provided on the unit body 81, and a motor that moves the unit body 81 in the X-axis direction by rotating the screw shaft around the axis, and moves the unit body 81 (i.e., the pressing flange loading and unloading part 83, the nut loading and unloading part 84, and a pair of blade loading and unloading parts 85) in the X-axis direction. The loading and unloading side moving unit 82 moves in the X-axis direction by making the blade loading and unloading part 85 cover the position facing the blade holding part 72 along the Y-axis direction and the position facing the flange mechanism 25 of the cutting unit 20 in the Y-axis direction.

The pressing flange assembly and disassembly part 83 is composed of: holding the pressing flange 27, and installing the pressing flange 27 to the fixed flange 26 fixed to the front end of the spindle 23 of the cutting unit 20. The axis of the pressing flange assembly and disassembly part 83 is arranged to be parallel to the Y-axis direction. As shown in FIG5, the pressing flange assembly and disassembly part 83 has a housing 831 fixed to the unit body 81 and formed into a cylindrical appearance, a rod 832 flexibly arranged at the front end of the housing 831, a disc-shaped support base 833 mounted on the front end of the rod 832, and a claw 834 mounted on the support base 833.

The rod 832 is a rod of an air cylinder (not shown) disposed in the housing 831, and moves the support base 833 and the claw 834 in the Y-axis direction by extension and contraction. A plurality of claws 834 are arranged at intervals in the circumferential direction on the outer edge of the end surface 835 of the support base 833 facing the blade holding portion 72 of the blade storage 70. In the first embodiment, three claws 834 are arranged at equal intervals in the circumferential direction on the outer edge of the end surface 835 of the support base 833. The plurality of claws 834 are arranged to be movable in the radial direction of the end surface 835 by a driving mechanism (not shown) arranged in the supporting base 833, and they engage in the engaging groove 273 of the pressing flange 27 by approaching each other to hold the pressing flange 27, and release the holding of the pressing flange 27 by moving away from each other.

The nut attaching and detaching portion 84 is configured to attach and detach the fixing nut 28 to the boss portion 242 of the fixing flange 26. The axis of the nut attaching and detaching portion 84 is arranged parallel to the Y-axis direction. The nut attaching and detaching portion 84 is arranged with a gap between it and the pressing flange attaching and detaching portion 83 in the X-axis direction. As shown in FIG. 6 , the nut assembly and disassembly portion 84 includes: a housing 841 fixed to the unit body 81 and having a cylindrical appearance; a rod 842, which is freely retractable and rotatable at the front end of the housing 841; a disc-shaped support base 843, which is fixed to the front end of the rod 842; a claw 844, which is mounted on the support base 843; and a plurality of engaging pins 846, which are arranged on the end surface 845 of the support base 843 facing the blade holding portion 72 of the blade storage 70.

The rod 842 is a rod of an unillustrated cylinder disposed in the housing 841, and moves the support base 843, the claw 844, and the engaging pin 846 in the Y-axis direction by extension and contraction. In addition, the rod 842 is rotated around the axis by a motor (not shown) disposed in the housing 841.

The claws 844 are arranged in a plurality at intervals in the circumferential direction on the end surface 845 of the support base 843. In the first embodiment, four claws 844 are arranged at equal intervals in the circumferential direction on the end surface 845 of the support base 843. The plurality of claws 844 are arranged to be movable in the radial direction of the end surface 845 by a driving mechanism (not shown) arranged in the support base 843, and hold the outer peripheral surface of the fixing nut 28 by approaching each other, and release the holding of the fixing nut 28 by moving away from each other.

The engaging pin 846 protrudes from the end surface 845 and is freely supported by the supporting base 843. In the embodiment 1, four engaging pins 846 are provided at equal intervals in the circumferential direction of the end surface 845. When the engaging pin 846 protrudes from the end surface 845, it can be engaged with the pin engaging hole 282 of the fixing nut 28.

A pair of blade loading and unloading parts 85 is a structure for loading and unloading the cutting blade 21 on the fixed flange 26. In the first embodiment, the blade loading and unloading part 85 on one side removes and holds the replacement cutting blade 21 held in the blade storage 70 from the blade storage 70, and the blade loading and unloading part 85 on the other side removes the cutting blade 21 from the fixed flange 26 of the cutting unit 20 and holds the replacement cutting blade 21 removed from the cutting unit 20. In the first embodiment, the axis of the pair of blade loading and unloading parts 85 is arranged parallel to the Y-axis direction and is arranged at intervals in the X-axis direction. In addition, the height of the axis of the blade loading and unloading part 85 in the Z-axis direction is equal to the height of the axis of the two blade holding parts 72 of the blade storage 70 in the Z-axis direction.

As shown in FIG. 7 , the blade attachment and detachment section 85 includes a housing 851 fixed to the unit body 81 and having a cylindrical appearance, a rod 852 retractably disposed at the front end of the housing 851, and a disc-shaped support base 853 mounted on the front end of the rod 852.

The rod 852 is a rod of an air cylinder (not shown) disposed in the housing 851, and can move the support base 853 in the Y-axis direction by extension and contraction. The support base 853 has an annular suction groove 854 formed on the end face 855 facing the blade holding portion 72 of the blade storage 70. The suction groove 854 is connected to the suction source 858 through the suction path 856 and the switch valve 857 disposed in the support base 853. The blade loading and unloading portion 85 sucks the suction groove 854 by the suction source 858, and the cutting blade 21 is sucked and held on the end face 855 of the support base 853. In the first embodiment, the blade attachment and removal portion 85 is provided with a boss intrusion hole 859 in the center of the end surface 855, into which the front end side of the boss portion 43 can intrude.

(Processing action of processing equipment)

The processing device 1 is a device in which an operator logs processing content information into the control device 100, places the workpiece 200 before cutting processing on the holding surface 11 of the work clamp 10, and installs the replacement cutting blade 21 into the blade holding portion 72 of the blade storage 70 of the cutting blade replacement mechanism 6.

Afterwards, the processing device 1 starts the processing operation when the operator has instructed to start the processing operation. After the processing operation starts, the back side 204 of the workpiece 200 is sucked and held on the holding surface 11 of the work clamp 10 via the adhesive tape 206, and the annular frame 205 is clamped by the clamp part 12.

During the processing operation, the processing device 1 moves the work clamp 10 toward the processing area 2 by the X-axis moving unit 31, and the photographing unit photographs the workpiece 200, and the calibration is completed based on the image photographed by the photographing unit. The processing device 1 moves the workpiece 200 and the cutting unit 20 relative to each other along the predetermined dividing lines 202, and the cutting blade 21 cuts into each predetermined dividing line 202 to divide the workpiece 200 into individual devices 203. The processing device 1 moves the workpiece 200 divided into individual devices 203 toward the loading and unloading area 3, and releases the suction holding of the holding surface 11 and the clamping of the clamping part 12 in the loading and unloading area 3, thereby ending the processing operation.

(Loading and unloading of cutting blades)

FIG8 is a side view of the pressing flange mounting and disassembly section showing the cutting unit in a cross section when the pressing flange of the processing device shown in FIG1 is being mounted and disassembled. FIG9 is a side view of the blade mounting and disassembly section showing the cutting unit in a cross section when the cutting blade of the processing device shown in FIG1 is being mounted and disassembled.

In the embodiment 1, if the control device 100 determines that the cutting blade 21 of the cutting unit 20 is at the blade replacement time point during the processing action, the processing device 1 performs the loading and unloading action of the cutting blade 21. The blade replacement time point refers to the time point when the cutting blade 21 of the cutting unit 20 is replaced. The blade replacement time point is, for example, the time point when a predetermined number of workpieces 200 are cut or the wear amount of the cutting blade 21 exceeds the pre-set value, and is registered in the control device 100 as part of the processing content information. In addition, the blade replacement time point of the present invention can also be the time point when a workpiece 200 is being processed, or when a plurality of workpieces 200 are continuously processed to replace the workpiece 200.

The loading and unloading action is to remove the cutting blade 21 of the cutting unit 20 and install the replacement cutting blade 21 held in the blade storage 70 to the cutting unit 20. That is, the loading and unloading action of the cutting blade 21 is to replace the cutting blade 21 held in the blade storage 70 with the cutting blade 21 installed in the cutting unit 20.

During the loading and unloading operation, the processing device 1 stops the rotation of the spindle 23 of the cutting unit 20. At this time, the switch valve 40 is opened, and the cutting blade 21 is attracted and held on the fixed flange 26 by the suction force of the suction source 41. During the loading and unloading operation, the processing device 1 moves the blade loading and unloading unit 80 in the X-axis direction by the loading and unloading side moving unit 82, so that the blade loading and unloading portion 85 of the blade loading and unloading unit 80 faces the blade holding portion 72 of the blade storage 70 in the Y-axis direction.

The processing device 1 extends the rod 852 of the blade attachment part 85 on one side to make the support base 853 approach the blade holding part 72 in the Y-axis direction, and makes the end face 855 close to the cutting blade 21 held in the blade holding part 72, and opens the switch valve 857 to attract and hold the replacement cutting blade 21 in the blade attachment part 85 on one side. The processing device 1 shrinks the rod 852 of the blade attachment part 85 on one side to make the support base 853 move away from the blade holding part 72 in the Y-axis direction, and removes the cutting blade 21 from the blade holding part 72. The processing device 1 allows the control device 100 to control the loading and unloading side moving unit 82 and the moving unit 30, so that the nut loading and unloading part 84 of the blade loading and unloading unit 80 and the cutting unit 20 face each other in the Y-axis direction.

The processing device 1 extends the rod 842 of the nut mounting and dismounting portion 84 to move the support base 843 and the claw 844 toward the cutting unit 20 in the Y-axis direction, and holds the fixing nut 28 with the claw 844 of the nut mounting and dismounting portion 84, and rotates the rod 842 around the axis in the direction of removing the fixing nut 28 from the male screw 434. Then, the processing device 1 engages the engagement pin 846 with the pin engagement hole 282, and rotates the fixing nut 28 together with the support base 843 of the nut mounting and dismounting portion 84. After the processing device 1 rotates the rod 842 until the fixing nut 28 is removed from the male screw 434, the rod 842 is stopped from rotating and the rod 842 is retracted, so that the supporting base 843 and the claw 844 of the nut mounting and dismounting portion 84 are moved away from the cutting unit 20 in the Y-axis direction to remove the fixing nut 28 from the boss portion 43 of the fixing flange 26.

The processing device 1 allows the control device 100 to control the loading and unloading side moving unit 82 and the moving unit 30, so that the pressing flange loading and unloading part 83 of the blade loading and unloading unit 80 and the cutting unit 20 face each other in the Y-axis direction.

The processing device 1 extends the rod 832 of the pressing flange mounting and disassembly part 83 to make the support base 833 and the claw 834 approach the cutting unit 20 in the Y-axis direction, and fits the claw 834 of the pressing flange mounting and disassembly part 83 into the fitting groove 273, and holds the pressing flange 27 with the claw 834. The processing device 1 contracts the rod 832 of the pressing flange mounting and disassembly part 83 to make the support base 833 and the claw 834 move away from the cutting unit 20 in the Y-axis direction, and as shown in FIG. 8, removes the pressing flange 27 from the fixing flange 26 of the cutting unit 20. At this time, the control device 100 opens the switch valve 40 and attracts and holds the cutting blade 21 on the fixed flange 26. In this way, when the pressing flange 27 is removed, the control device 100 opens the switch valve 40 to prevent the cutting blade 21 from falling and attracts and holds the cutting blade 21 on the fixed flange 26.

The processing device 1 allows the control device 100 to control the loading and unloading side moving unit 82 and the moving unit 30, so that the blade loading and unloading part 85 on the other side of the blade loading and unloading unit 80 and the cutting unit 20 from which the fixing nut 28 and the pressing flange 27 have been removed face each other in the Y-axis direction.

The processing device 1 extends the rod 852 of the blade attachment part 85 on the other side to make the support base 853 approach the blade holding part 72 in the Y-axis direction, and makes the end face 855 close to the cutting blade 21 installed on the fixed flange 26, and opens the switch valve 857 to attract and hold the cutting blade 21 installed on the fixed flange 26 to the blade attachment part 85 on the other side. The processing device 1 closes the switch valve 40 to stop the attraction and holding of the cutting blade 21 on the fixed flange 26 of the cutting unit 20, and shrinks the rod 852 of the blade attachment part 85 on the other side to make the support base 853 move away from the cutting unit 20 in the Y-axis direction, and as shown in FIG. 9, the cutting blade 21 is removed from the cutting unit 20.

The processing device 1 allows the control device 100 to control the loading and unloading side moving unit 82 and the moving unit 30, so that the blade loading and unloading part 85 on one side holding the replacement cutting blade 21 and the cutting unit 20 from which the cutting blade 21 has been removed face each other in the Y-axis direction. The processing device 1 extends the rod 852 of the blade loading and unloading part 85 on one side to allow the supporting base 853 to approach the cutting unit 20 along the Y-axis direction, and sequentially allows the boss part 43 of the fixed flange 26 and the boss part 433 for blade support to pass through the mounting hole 212 of the replacement cutting blade 21, so that the replacement cutting blade 21 is in close contact with the end surface 443 of the supporting protrusion 442 of the fixed flange 26.

The processing device 1 allows the control device 100 to open the switch valve 40 to attract and hold the replacement cutting blade 21 on the fixed flange 26 of the cutting unit 20, and closes the switch valve 857 to release the attraction and holding of the replacement cutting blade 21 of the blade mounting portion 85 on one side. The processing device 1 shrinks the rod 852 of the blade mounting portion 85 on one side and moves the supporting base 853 of the blade mounting portion 85 on one side away from the cutting unit 20 along the Y-axis direction to install the replacement cutting blade 21 on the cutting unit 20. In this way, during the loading and unloading operation, the processing device 1 will be linked with the switch of the switch valve 40, 857, so that the cutting blade 21 of the blade loading and unloading unit 80 is installed on the fixed flange 26 and detached from the fixed flange 26.

The processing device 1 allows the control device 100 to control the loading and unloading side moving unit 82 and the moving unit 30, so that the pressing flange loading and unloading part 83 and the cutting unit 20 face each other in the Y-axis direction, and then perform an opposite action opposite to the action of removing the pressing flange 27, and install the pressing flange 27 on the cutting unit 20. The processing device 1 allows the control device 100 to control the loading and unloading side moving unit 82 and the moving unit 30, so that the nut loading and unloading part 84 and the cutting unit 20 face each other in the Y-axis direction, and then perform an opposite action opposite to the action of removing the fixing nut 28, and install the fixing nut 28 on the cutting unit 20, and fix the cutting blade 21 to the front end of the spindle 23 with the fixing nut 28.

The processing device 1 moves the blade loading and unloading unit 80 in the X-axis direction by the loading and unloading side moving unit 82, so that the blade loading and unloading portion 85 on the other side holding the replaced cutting blade 21 removed from the cutting unit 20 faces the blade holding portion 72 of the blade storage 70 in the Y-axis direction. The processing device 1 extends the lever 852 of the blade loading and unloading portion 85 on the other side so that the supporting base 853 of the blade loading and unloading portion 85 on the other side approaches the blade holding portion 72 along the Y-axis direction, and after holding the replaced cutting blade 21 in the blade holding portion 72, the switch valve 857 is closed to release the suction and holding of the replaced cutting blade 21 of the blade loading and unloading portion 85 on the other side. The processing device 1 shrinks the rod 852 of the blade loading and unloading part 85 on the other side, so that the supporting base 853 moves away from the blade holding part 72 along the Y-axis direction, thereby completing the loading and unloading action.

As described above, when the pressing flange 27 is removed from the fixed flange 26 of the cutting unit 20, the processing device 1 of the embodiment 1 opens the switch valve 40 to attract and hold the cutting blade 21 to the fixed flange 26. Therefore, when the pressing flange 27 is removed from the fixed flange 26 of the cutting unit 20, the processing device 1 can suppress the cutting blade 21 from falling off (dropping) from the cutting unit 20. As a result, the processing device 1 can exert the following effect: it can suppress the damage of the cutting blade 21 during replacement.

Furthermore, the present invention is not limited to the above-mentioned embodiments. In other words, various modifications can be made to implement the present invention without departing from the main points of the present invention.

20: Cutting unit

21: Cutting blade

211: Cutting Edge

212,271: Installation hole

23: Main axis

231: screw hole

25: Flange mechanism

26: Fixed flange (fixed flange part)

27: Press the flange (press the flange part)

272: Clamping surface

273: Chimeric groove

28:Fixing nut

281: Female screw

291: Gasket

292:Fixing screws

40: Switch valve (valve)

41: Attraction source

43: convex seat

431: Drop section

432: Cone

433: Blade support boss

434: Male screw

44: flange

441: Support surface

442: Supporting protrusion

443: End face

45: Suction hole

46: Attraction channel

47: Attraction Road

100: Control device

X,Y,Z: Direction

Claims (2)

A method for removing a cutting blade is a method for removing a cutting blade in a processing device, wherein the processing device has a flange mechanism, wherein the flange mechanism is used to install the disc-shaped cutting blade having a mounting hole at the center on a main shaft serving as a rotating shaft, and wherein the flange mechanism comprises: a fixed flange having a boss portion having a male screw formed at the front end, and a supporting surface protruding from the boss portion in a radial direction and capable of supporting the cutting blade; a pressing flange having a mounting hole that can be mounted on the boss portion and can hold the cutting blade mounted on the boss portion between the pressing flange portion and the fixed flange portion; and a fixing nut having a male screw formed on the inner circumference that is screwed with the boss portion. The female screw is fixed to the boss portion to fix the cutting blade through the pressing flange portion, and the fixed flange portion includes: a suction hole formed on the support surface and sucking and fixing the cutting blade; a suction path that connects the suction hole with a suction source; a valve formed on the suction path; and a control portion that controls the suction by switching the valve. The method for removing the cutting blade is characterized in that: when the pressing flange portion is removed, the valve is opened to prevent the cutting blade from falling and the cutting blade is sucked and held on the fixed flange portion, and after the pressing flange portion is removed, the valve is closed to stop the suction and holding of the cutting blade on the fixed flange portion and remove the cutting blade. A method for removing a cutting blade as claimed in claim 1, wherein the processing device is further provided with a cutting blade replacement mechanism for loading and unloading the cutting blade from the flange mechanism, and the cutting blade replacement mechanism comprises: a nut loading and unloading portion for loading and unloading the fixing nut; a blade loading and unloading portion for loading and unloading the cutting blade; and a pressing flange loading and unloading portion for loading and unloading the pressing flange portion.