TWI898029B - Cutting device and method for cutting workpiece - Google Patents

Abstract

[Question] Provide a cutting device and a method for cutting a workpiece that can reduce the vibration of a cutting blade more than conventional methods. [Solution] A cutting device comprises a workpiece holder for holding the workpiece, a cutting unit for cutting the workpiece held on the workpiece holder using a cutting blade secured to the front end of a spindle via a mounting base, and a nozzle for supplying cutting water to the cutting blade. The cutting blade is secured to the mounting base with a thickness of 0.2 mm or less and an aspect ratio (cutting edge projection/blade thickness) of 30 or greater. The cutting device includes a nozzle for supplying cutting water from the outer periphery toward the outer peripheral surface of the cutting blade in a direction parallel to the side surface of the cutting blade. The nozzle includes a partition plate internally for rectifying the flow of the cutting water.

Description

Cutting device and method for cutting workpiece

The present invention relates to a cutting device and a method for cutting a workpiece.

A known cutting device and workpiece cutting method employs a cutting blade fixed to the tip of a high-speed rotating spindle to separate various plate-shaped workpieces, such as wafers with semiconductor devices formed thereon, resin package substrates, ceramic substrates, and glass substrates, into chips or to form grooves therein (see, for example, Patent Document 1). Prior Art Documents Patent Documents

Patent Document 1: Japanese Patent Application Publication No. 2015-023222

Invention problem to be solved

A higher aspect ratio (expressed as the amount of blade tip protruded/edge thickness) of a cutting blade increases its tendency to vibrate, causing the cutting groove to meander or leaving saw marks on the sides of the cut wafer. Therefore, the aspect ratio must be appropriately adjusted to suit the rigidity of the cutting blade. However, by narrowing the cutting groove width, the intended separation line (slice street) can be made thinner, increasing the number of wafers that can be collected. Therefore, processing based on a high aspect ratio has long been a common requirement. Furthermore, compared to mechanically securing the cutting insert to the mounting seat using a nut, etc., the so-called vacuum flange, which secures the cutting insert to the mounting seat using a vacuum force (negative pressure), has presented the following problems: there is a concern that the cutting insert is more likely to vibrate, and this concern is exacerbated under conditions of a high aspect ratio.

This invention was developed in light of the aforementioned problems, and its object is to provide a cutting device and a method for cutting a workpiece that can reduce the vibration of the cutting blade more than conventional methods. Means for Solving the Problem

In order to solve the above-mentioned problems and achieve the purpose, the cutting device of the present invention has a work clamp for holding the workpiece, a cutting unit for cutting the workpiece held on the work clamp using a cutting blade fixed to the front end of the main spindle through a mounting seat, and a nozzle for supplying cutting water to the cutting blade. The cutting blade is fixed to the mounting seat with a thickness of less than 0.2 mm and an aspect ratio expressed as the tip extension/blade thickness of 30 or more. The above-mentioned cutting device is characterized in that it has a nozzle, and the above-mentioned nozzle supplies cutting water from the outer periphery toward the outer peripheral surface of the cutting blade in a manner parallel to the side surface of the cutting blade. The nozzle has a partition plate inside to rectify the flow of cutting water.

Alternatively, the mounting seat may include: a supporting mounting seat engaged with the front end of the spindle and supporting the cutting blade; and a fixing mounting seat for fixing the cutting blade supported by the supporting mounting seat to the supporting mounting seat. The support mount has an internal suction path extending from the rear side of the spindle housing that rotatably supports the spindle to a support surface facing the fixed mount. Negative pressure from a rotary joint located at the front of the spindle housing acts on the fixed mount through the suction path of the support mount, attracting and securing the fixed mount to the support surface of the support mount. The cutting insert is thereby clamped between the support mount and the fixed mount.

To solve the above-mentioned problems and achieve the objectives, the present invention provides a method for cutting a workpiece using any of the aforementioned cutting devices. The method comprises supplying cutting water from a nozzle toward the outer peripheral surface of the cutting blade from the outer periphery in a manner parallel to the side surface of the cutting blade, while cutting the workpiece held by the worktable with the cutting blade. The method also reduces vibration of the cutting blade caused by the cutting water supplied from the nozzle while cutting the workpiece. Effects of the Invention

The present invention can reduce the vibration of the cutting blade more than before.

Form used to implement the invention

The forms for implementing the present invention (embodiments) are described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. Furthermore, the constituent elements described below include constituent elements that can be easily conceived by a person having ordinary knowledge in the relevant technical field and substantially the same constituent elements. In addition, the constituent elements described below can be appropriately combined. Furthermore, various omissions, substitutions, or changes in the constituent elements can be made without departing from the gist of the present invention.

[Embodiment] A cutting device 1 according to an embodiment of the present invention will be described with reference to the drawings. FIG1 is a perspective view showing an example configuration of the cutting device 1 according to the embodiment. As shown in FIG1 , the cutting device 1 according to the embodiment includes a worktable 10 , a cutting unit 20 , a nozzle 30 , and a control unit 40 .

In this embodiment, as shown in FIG1 , the object to be processed by the cutting device 1, i.e., the workpiece 100, is a disk-shaped semiconductor wafer or optical device wafer, for example, made of a base material such as silicon, sapphire, silicon carbide (SiC), or gallium arsenide. The workpiece 100 has wafer-sized devices 103 formed in areas demarcated by a plurality of predetermined dividing lines (slicing streets) 102 formed in a grid pattern on its flat front surface 101. In this embodiment, although an adhesive tape 105 is attached to the back surface 104 of the workpiece 100, which is the back side of the front surface 101, and an annular frame 106 is attached to the outer edge of the adhesive tape 105, the present invention is not limited thereto. Furthermore, in the present invention, the workpiece 100 may be a rectangular package substrate, a ceramic plate, a glass plate, or the like having a plurality of devices sealed with resin.

The work clamp 10 has a disc-shaped frame with a recessed portion and a disc-shaped suction portion embedded in the recessed portion. The suction portion of the work clamp 10 is formed of a porous ceramic having a plurality of porous holes and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction portion of the work clamp 10 is a holding surface 11 that can carry the workpiece 100 and attracts and holds the placed workpiece 100. The holding surface 11 and the upper surface of the frame of the work clamp 10 are arranged on the same plane and are formed parallel to the horizontal plane, that is, the XY plane. The work clamp 10 is movably provided in one horizontal direction, namely the X-axis direction, by an X-axis moving unit (not shown), and is rotatably provided around a Z-axis which is a vertical direction and perpendicular to the XY plane by a rotation drive source (not shown).

The cutting unit 20 uses a cutting blade 21 to cut the workpiece 100 held on the work clamp 10. As shown in Figure 1, the cutting unit 20 is movably mounted in the Y-axis direction relative to the workpiece 100 held on the work clamp 10 by a Y-axis moving unit and movably mounted in the Z-axis direction by a Z-axis moving unit. The cutting device 1 rotates the cutting blade 21 of the cutting unit 20 while moving the cutting blade 21 of the cutting unit 20 relative to the workpiece 100 held on the work clamp 10 along the predetermined dividing line 102 through the X-axis moving unit, the Y-axis moving unit, and the Z-axis moving unit, thereby cutting the workpiece 100 to form a cutting groove 200 along the predetermined dividing line 102 (see Figure 7).

As shown in FIG1 , the cutting device 1 further includes a cassette carrier 91, a cleaning unit 92, and a conveying unit (not shown). The cassette carrier 91 is a carrier for carrying a cassette 95, which is a container for accommodating a plurality of workpieces 100, and enables the carried cassette 95 to be raised and lowered in the Z-axis direction. The cleaning unit 92 cleans the workpiece 100 after cutting and removes foreign matter such as cutting chips attached to the workpiece 100. The conveying unit (not shown) conveys the workpiece 100 before cutting from the cassette 95 to the work clamp 10, and conveys the workpiece 100 after cutting from the work clamp 10 to the cleaning unit 92, and conveys the cleaned workpiece 100 from the cleaning unit 92 to the cassette 95.

Figure 2 is a cross-sectional view showing an example of the structure of the cutting unit 20 of Figure 1. Figure 3 is a front view showing the cutting unit 20 of Figure 1. As shown in Figures 2 and 3, the cutting unit 20 includes a cutting insert 21, a spindle 22, a spindle housing 23, a mounting seat 24, a rotary joint 25, and a blade cover 26.

The cutting blade 21 is fixed to the front end of the main spindle 22 via a mounting seat 24 and rotates around an axis parallel to the Y-axis, which is perpendicular to the X-axis and is another direction from the horizontal direction, as the main spindle 22 rotates. In this embodiment, the cutting blade 21 is a so-called hubless blade and has a disc-shaped (annular) cutting edge 21-1. The cutting blade 21 has a hole in the center, namely a mounting hole 21-2, for fixing the cutting blade 21 to the mounting seat 24. The outer peripheral surface of the cutting edge 21-1 has a predetermined thickness along its axial length and serves as a cutting surface when the cutting blade 21 is used for cutting. The side surfaces 21-3 on either side of the cutting edge 21-1 are parallel to each other and perpendicular to the outer peripheral surface of the cutting edge 21-1. The cutting edge 21-1 is formed of abrasive grains such as diamond or CBN (cubic boron nitride) and a binder such as metal or resin, and is formed to a predetermined thickness.

The spindle 22 is supported by the spindle housing 23 and housed within the spindle housing 23, with its distal end exposed externally. The spindle 22 is rotatable about an axis parallel to the Y-axis. As shown in Figure 2, the distal end of the spindle 22 is partially tapered, with the outer diameter gradually decreasing toward the distal end. A motor (not shown) is connected to the base of the spindle 22 to rotate the spindle 22.

As shown in FIG2 , the mounting seat 24 includes a supporting mounting seat 50 and a fixed mounting seat 60. The supporting mounting seat 50 is fitted into the front end of the spindle 22 and supports the cutting blade 21 from the spindle housing 23 side, i.e., the rear side (+Y direction side). The supporting mounting seat 50 includes a boss portion 51, a supporting flange portion 52, and a cylindrical portion 53. The boss portion 51 is formed into a cylindrical shape extending in the direction of the rotation axis of the spindle 22, i.e., the Y-axis direction. The supporting flange portion 52 is formed into a disc shape (ring shape) extending outward from the rear side of the boss portion 51 in the radial direction of the boss portion 51. The cylindrical portion 53 is formed to protrude from the rear side of the supporting flange portion 52. The boss portion 51, the supporting flange portion 52 and the cylindrical portion 53 are integrally formed, and their respective central axes overlap with each other and are arranged along the Y-axis direction.

The support mount 50 has a mounting hole 54 formed inside. The mounting hole 54 is partially tapered, with the inner diameter gradually decreasing toward the front end. It fits seamlessly into the outer periphery of the front end of the spindle 22. The support mount 50 is secured to the front end of the spindle 22 by inserting the front end of the spindle 22 into the mounting hole 54 and threading and locking the lock nut 27, which has a threaded groove formed on its inner periphery, into the threaded groove 22-1 formed at the front end of the spindle 22 from the front side (-Y direction) of the spindle 22.

The boss portion 51 can be inserted into the mounting hole 61 of the fixed mounting seat 60 and supports the fixed mounting seat 60 from the inner circumference of the mounting hole 61 with its outer circumference. The cylindrical portion 53 is fitted into the receiving hole 25-1 of the rotary joint 25 without any gap in a manner that allows rotation around the Y axis.

The supporting flange 52 includes a forward-facing supporting surface 52-1 and an annular recess 52-2. The supporting surface 52-1 surrounds the annular recess 52-2 and is formed in an annular shape radially outward of the forward-facing surface of the supporting flange 52. It supports the rearward surface of the cutting insert 21. The annular recess 52-2 surrounds the boss 51 and is recessed further rearward than the supporting surface 52-1. It is intended to engage with the annular protrusion 63 of the mounting seat 60.

The support mount 50 has a suction passage 55 formed internally, extending from the support flange 52 to the cylindrical portion 53. The front side of the suction passage 55 connects to the bottom surface 52-3 of the annular recess 52-2 and to the support surface 52-1. Furthermore, when the cylindrical portion 53 of the support mount 50 is engaged with the receiving hole 25-1 of the swivel joint 25, the rear side of the suction passage 55 connects to the suction passage 25-2 of the swivel joint 25.

The fixed mount 60 covers the cutting insert 21 supported on the support surface 52-1 of the support mount 50 from the front and is mounted on the outer periphery of the boss portion 51, thereby securing the cutting insert 21 to the support mount 50. The fixed mount 60 has a mounting hole 61 formed on its inner side. The mounting hole 61 fits seamlessly into the outer periphery of the boss portion 51 of the support mount 50.

The fixed mount 60 has a rearward-facing support surface 62 and an annular protrusion 63. The support surface 62 is formed in an annular shape radially outward of the rearward-facing surface of the fixed mount 60, surrounding the annular protrusion 63. It supports the front surface of the cutting insert 21. The annular protrusion 63 is formed to protrude further rearward than the support surface 62. When the fixed mount 60 is mounted on the supporting mount 50, it surrounds the boss 51 and fits into the mounting hole 21-2 of the cutting insert 21 and the annular recess 52-2 of the supporting mount 50.

When the fixed mount 60 is mounted on the supporting mount 50 with the cutting blade 21 sandwiched therebetween, the supporting surface 52-1 of the supporting mount 50 and the supporting surface 62 of the fixed mount 60 face each other in the Y-axis direction, with the cutting blade 21 interposed therebetween. Furthermore, when the fixed mount 60 is similarly mounted on the supporting mount 50, the bottom surface 52-3 of the annular recess 52-2 of the supporting mount 50 and the convex surface 64 of the annular convex portion 63 of the fixed mount 60 face each other in the Y-axis direction, forming a closed space 75.

The rotary joint 25 is located in front of the spindle housing 23. A receiving hole 25-1 is formed on the inner side of the rotary joint 25. The cylindrical portion 53 of the support mount 50 engages with the receiving hole 25-1 from the front. The rotary joint 25 extends radially outward to form a suction path 25-2. The outer circumference of the suction path 25-2 is connected to the suction source 79 that introduces negative pressure into the suction path 25-2. When the cylindrical portion 53 of the support mount 50 engages with the receiving hole 25-1 of the rotary joint 25, the inner circumference of the suction path 25-2 communicates with the suction path 55 of the support mount 50.

The mounting seat 24 allows the negative pressure from the rotating joint 25 to act on the fixed mounting seat 60 through the suction path 55 of the supporting mounting seat 50 and the enclosed space 75, thereby attracting and fixing the fixed mounting seat 60 toward the side (rear side) of the supporting mounting seat 50, thereby clamping the cutting blade 21 with the supporting surface 52-1 of the supporting mounting seat 50 and the supporting surface 62 of the fixed mounting seat 60.

Furthermore, the mounting seat 24 in the present invention is not limited to the above-described configuration. In the present invention, the mounting seat 24 may also be configured, for example, in such a manner that a fixed mounting seat 60 covers the lock nut 27 and the boss portion 51 of the support mounting seat 50 from the front. Furthermore, in the present invention, the mounting seat 24 may be configured such that a hub-type blade having a cutting edge 21-1 and a base disposed on the inner periphery of the cutting edge 21-1 is held between the support mounting seat 50 and the fixed mounting seat 60, both having the same configuration as described above. Furthermore, in the present invention, the mounting seat 24 is not limited to a so-called vacuum flange structure in which the cutting insert 21 is fixed to the front end of the spindle 22 by negative pressure from the rotary joint 25, but may be a structure in which the cutting insert 21 is fixed to the front end of the spindle 22 only by tightening a nut screwed into a male screw provided at the front end of the boss portion 51.

The cutting edge 21-1 of the cutting insert 21 is secured to the mounting seat 24 under the following conditions: an aspect ratio (a dimensionless quantity) of 30 or greater, expressed as the value of the blade tip projection 71 divided by the blade thickness 72. The blade tip projection 71 is the radial length of the cutting edge 21-1 of the cutting insert 21 protruding from the outer periphery of the member supporting the cutting edge 21-1. As shown in FIG2 , in the case of a hubless cutting insert as in the present embodiment, the blade tip projection 71 is the radial length from the outer periphery of the mounting seat 24 to the outer periphery of the cutting edge 21-1. Furthermore, the outer periphery of the mounting seat 24 refers to the outer periphery located on the outer periphery between the outer periphery of the support surface 52-1 that clamps the cutting blade 21 and the outer periphery of the support surface 62. In addition, in the case where the cutting blade 21 is a hub-type blade, the tip extension 71 is the length in the radial direction from the outer periphery of the base to the outer periphery of the cutting edge 21-1. As shown in Figure 2, the blade thickness 72 is the thickness of the portion of the cutting blade 21 from which the tip of the cutting edge 21-1 protrudes. In this embodiment, the blade thickness 72 is less than 0.2 mm. The aspect ratio is calculated in the following manner: the units of the tip extension 71 and the blade thickness 72 are made consistent, and then the value of the tip extension 71 is divided by the value of the blade thickness 72.

As shown in FIG3 , the blade cover 26 is mounted on the front side of the spindle housing 23 and covers the cutting blade 21 and at least a portion of the front side of the spindle 22. The blade cover 26 has a plurality of water channels 26-1 and 26-2 formed therein.

As shown in Figure 3, the nozzle 30 includes a nozzle 31 and a nozzle 32. The nozzle 31 is generally cylindrical and has a generally circular supply port 31-1 formed at the tip thereof, which supplies cutting water. The nozzle 31 is located at the lower end of the water channel 26-1, sandwiching the rotating portion 36 and the rotating portion 37. The nozzle 31 supplies cutting water from a cutting water supply source 39 at the upper end of the water channel 26-1 through a cutting water supply portion 33, and supplies cutting water parallel to the side surface 21-3 of the cutting blade 21 from the outer periphery toward the outer peripheral surface of the cutting blade 21. The nozzle 32 is located at the lower end of the water channel 26-2 and supplies cutting water from a cutting water supply source 39 at the upper end of the water channel 26-2 through a cutting water supply portion 34, and supplies cutting water to the side of the cutting edge 21-1 of the cutting blade 21. The cutting water is, for example, pure water.

Here, the nozzle 31 supplies cutting water from the outer periphery toward the outer peripheral surface of the cutting insert 21 in a manner parallel to the side surface 21-3 of the cutting insert 21. This means that, as shown in Figure 3 , cutting water is supplied along a radial component 81 extending from the outer periphery of the cutting insert 21 toward the center of the cutting insert 21, toward the outer peripheral surface of the cutting edge 21-1, or along a circumferential component 82 extending along the circumferential direction of the cutting insert 21, toward the outer peripheral surface of the cutting edge 21-1 of the cutting insert 21. Here, the cutting water supply direction 80 is orthogonal to the surface of the supply port 31-1 of the nozzle 31. Furthermore, the cutting water supply direction 80 intersects the outer peripheral surface of the cutting edge 21-1 of the cutting insert 21. The nozzle 31 can change the supply direction 80 of cutting water within a predetermined plane parallel to the side surface 21 - 3 of the cutting edge 21 - 1 of the cutting insert 21 by the rotating parts 36 and 37 .

Figure 4 is a partial cross-sectional view of the nozzle 31 shown in Figure 3 . Figure 4 shows a cross-section of the nozzle 31 in Figure 3 , taken along a plane passing through the center of the supply port 31-1 and including the supply direction 80 , at the front end region near the supply port 31-1. Figure 5 is a cross-sectional view of the nozzle 31 in Figure 3 . Figure 5 is a cross-sectional view of the nozzle 31 in Figure 3 , taken along line V-V in Figure 4 , at the front end region of the nozzle 31 in Figure 3 . As shown in Figures 4 and 5 , the nozzle 31 includes a partition plate 38 . The partition plate 38 is provided within the nozzle 31 , in the front end region near the supply port 31-1, where the cutting water flows, and straightens the flow of the cutting water immediately before it is supplied from the supply port 31-1 toward the supply direction 80 . The partition plate 38 is one or more thin plate-shaped members extending along the cutting water supply direction 80. In the example shown in FIG. 5 , the partition plate 38 is seven cylindrical members inserted into the nozzle 31 and extending along the cutting water supply direction 80.

FIG6 illustrates the positional relationship between the supply port 31-1 of the nozzle 31 and the cutting insert 21 in FIG3 . FIG6 shows the supply port 31-1 of the nozzle 31 as viewed from a direction opposite to the supply direction 80, across the cutting edge 21-1 of the cutting insert 21. As shown in FIG6 , the supply port 31-1 of the nozzle 31 is positioned so as to straddle the outer peripheral surface of the cutting edge 21-1 of the cutting insert 21 in the thickness direction, and to face the outer peripheral surface of the cutting edge 21-1 of the cutting insert 21, as viewed from the supply direction 80. In the example shown in FIG6 , the supply port 31-1 of the nozzle 31 is positioned so that the supply direction 80 intersects the center portion of the outer peripheral surface of the cutting edge 21-1 of the cutting insert 21 in the thickness direction.

The control unit 40 controls the operation of the various components of the cutting device 1, causing the cutting device 1 to perform a cutting process on the workpiece 100. The control unit 40 controls the rotating parts 36 and 37 to control the direction of the supply port 31-1 of the nozzle 31, that is, the supply direction 80 of cutting water from the nozzle 31. The control unit 40 controls the supply amount and supply pressure of cutting water from the nozzles 31 and 32 by controlling the supply amount and supply pressure of cutting water from the cutting water supply source 39.

In this embodiment, the control unit 40 includes a computer system. The computer system included in the control unit 40 has a processing device, a memory device, and an input/output interface device. The processing device includes a microprocessor such as a CPU (Central Processing Unit), and the memory device includes memory such as ROM (Read Only Memory) or RAM (Random Access Memory). The processing device of the control unit 40 performs processing according to a computer program stored in the memory device of the control unit 40 and outputs control signals for controlling the cutting device 1 to the various components of the cutting device 1 via the input/output interface device of the control unit 40.

Next, this specification describes a method for cutting a workpiece according to an embodiment with reference to the drawings. The method for cutting a workpiece according to the embodiment is implemented using a cutting device 1 according to the embodiment. FIG7 is a cross-sectional view showing an example of the method for cutting a workpiece according to the embodiment.

As shown in FIG7 , in the embodiment of the workpiece cutting method, cutting water is supplied from the nozzle 31 from the periphery toward the outer peripheral surface of the cutting blade 21 in a manner parallel to the side surface 21-3 of the cutting blade 21, and the rotating cutting blade 21 is moved relative to the workpiece 100 held by the holding surface 11 of the work clamp 10 along the predetermined dividing line 102 (in FIG7 , along the X-axis direction), thereby cutting the workpiece 100 to form a cutting groove 200 along the predetermined dividing line 102. In the embodiment of the workpiece cutting method, a partition plate 38 is provided inside the nozzle 31 to rectify the cutting water supplied from the nozzle 31. Therefore, the shaking generated by the cutting water supplied from the nozzle 31 to the outer peripheral surface of the cutting edge 21-1 of the cutting blade 21 can be suppressed. In this way, the workpiece 100 can be cut while suppressing the vibration of the cutting blade 21 caused by the cutting water supplied from the nozzle 31.

The cutting device 1 of the embodiment having the above-described structure has a partition plate 38 disposed within the nozzle 31, which supplies cutting water from the outer periphery toward the outer peripheral surface of the cutting blade 21 in a manner parallel to the side surface 21-3 of the cutting blade 21. This rectifies the cutting water supplied from the nozzle 31. Therefore, even under conditions where the cutting blade 21 is less than 0.2 mm thick and has an aspect ratio of 30 or greater, which would conventionally cause the cutting blade 21 to vibrate, the vibration of the cutting blade 21 caused by the cutting water supplied from the nozzle 31 is reduced. Consequently, the cutting device 1 of the embodiment achieves the following effects: it suppresses meandering of the cutting groove 200 and prevents saw marks from forming on the side surfaces of the cut wafer.

Furthermore, the cutting device 1 of the embodiment has the following effects: even if the mounting seat 24 has a so-called vacuum flange structure in which the negative pressure from the rotating joint 25 acts on the fixed mounting seat 60, and the cutting blade 21 is clamped by the supporting surface 52-1 of the supporting mounting seat 50 and the supporting surface 62 of the fixed mounting seat 60, which would have made the cutting blade 21 more likely to vibrate in the past, the vibration of the cutting blade 21 caused by the cutting water supplied from the nozzle 31 can still be reduced.

Next, the inventors of the present invention have verified the effects of the cutting device 1 and the workpiece cutting method according to the embodiment. FIG8 is a diagram illustrating the effects of the cutting device 1 and the workpiece cutting method according to the embodiment. FIG8 summarizes the results obtained when verifying the effects.

FIG8 shows a cutting device 1 of an embodiment or a cutting device substantially equivalent to the conventional cutting device after the partition plate 38 inside the nozzle 31 of the cutting device 1 of the embodiment is removed, wherein a metal blade with a thickness of 50 μm is used as the cutting blade 21, a resin-bonded trimming plate is used as the workpiece 100, the relative speed of the rotating cutting blade 21 to the workpiece 100, i.e., the machining feed speed is set to 10 mm/s, and the aspect ratio represented by the tip extension 71/the blade thickness 72 of the cutting blade 21 is set to 25, 30, 40, and 45, respectively, and each shows the results of the meandering evaluation of the cutting groove 200 formed by the cutting blade 21. Furthermore, the metal blade used as the cutting blade 21 is as susceptible to vibration as a conventional blade containing abrasive grains used for cutting wafers, etc. Furthermore, the machinability of a resin-bonded trimming plate used as the workpiece 100 by a metal blade is comparable to the machinability of a conventional wafer as a base material by a blade containing abrasive grains.

The "Nozzle with Partition Plate" row in FIG8 shows the results when using the cutting apparatus 1 of the embodiment, which includes a nozzle 31 equipped with a partition plate 38. The "Nozzle without Partition Plate" row in FIG8 shows the results when using a conventional cutting apparatus with the partition plate 38 removed from the nozzle 31. "○" in FIG8 indicates a result where the meandering of the cutting groove 200 is below a predetermined threshold, while "×" in FIG8 indicates a result where the meandering of the cutting groove 200 exceeds the predetermined threshold. Here, the predetermined threshold used in the snaking evaluation of the cutting groove 200 is a threshold determined based on the current evaluation standard. The aforementioned current evaluation standard is to cut the resin-bonded trimming plate used as the workpiece 100, and evaluate whether the cut surface is qualified or unqualified as a product under the assumption that the small piece obtained by the cutting process is treated as a product.

As shown in FIG8 , when the cutting device 1 of the embodiment is used, the meandering of the cutting groove 200 is below a predetermined threshold value when the aspect ratio is 25, 30, or 40, but the meandering of the cutting groove 200 exceeds the predetermined threshold value when the aspect ratio is 45. On the other hand, when a cutting device equivalent to the conventional method is used, the meandering of the cutting groove 200 is below the predetermined threshold value when the aspect ratio is 25, but the meandering of the cutting groove 200 exceeds the predetermined threshold value when the aspect ratio is 30, 40, or 45.

As can be seen from this, in the embodiment shown in FIG8 , when the aspect ratio is 30 to 40, the use of the cutting device 1 having the nozzle 31 provided with the partition plate 38 can sufficiently suppress the meandering of the cutting groove 200 to a desired level, compared to the case where a conventional cutting device is used. Furthermore, as can be seen from this, when the aspect ratio is 30 to 40, the use of the cutting device 1 having the nozzle 31 provided with the partition plate 38 can sufficiently suppress the vibration of the cutting insert 21, compared to the case where a conventional cutting device is used.

Furthermore, the present invention is not limited to the above-described embodiments. In other words, various modifications can be made within the scope of the present invention.

1: Cutting device 10: Work clamp 11: Holding surface 20: Cutting unit 21: Cutting blade 21-1: Cutting edge 21-2, 54, 61: Mounting hole 21-3: Side surface 22: Spindle 22-1: Thread groove 23: Spindle housing 24: Mounting base 25: Rotary joint 25-1: Receiving hole 25-2, 55: Suction channel 26: Blade cover 26-1, 26-2: Water channel 27: Locking nut 30, 31, 32: Nozzle 31-1: Supply port 33, 34: Cutting water supply 36, 37: Rotating section 38: Partition plate 39: Cutting water supply source 40: Control unit 50: Support mount 51: Boss 52: Support flange 52-1, 62: Support surface 52-2: Annular recess 52-3: Bottom surface 53: Cylindrical portion 60: Fixed mount 63: Annular protrusion 64: Raised surface 71: Blade tip extension 72: Blade thickness 75: Enclosed space 79: Suction source 80: Supply direction 81: Radial component 82: Circumferential component 91: Cassette platform 92: Cleaning unit 95: Cassette 100: Workpiece 101: Front surface 102: Predetermined cutting line (cutting path) 103: Device 104: Back 105: Adhesive tape 106: Frame 200: Cutting groove V-V: Line X, Y, Z: Directions

Figure 1 is a perspective view showing an example of the configuration of a cutting device according to an embodiment. Figure 2 is a cross-sectional view of the cutting unit of Figure 1. Figure 3 is a front view of the cutting unit of Figure 1. Figure 4 is a partial cross-sectional view of the nozzle of Figure 3. Figure 5 is a cross-sectional view of the nozzle of Figure 3. Figure 6 illustrates the positional relationship between the feed port and the cutting blade of the nozzle of Figure 3. Figure 7 is a cross-sectional view showing an example of a method for cutting a workpiece according to an embodiment. Figure 8 illustrates the effects of the cutting device and method for cutting a workpiece according to an embodiment.

20: Cutting unit

21: Cutting blade

21-3: Side

22: Main axis

24: Mounting Seat

26: Blade cover

26-1,26-2:Waterway

27: Tighten the nut

30, 31, 32: Nozzle

31-1: Supply port

33,34: Cutting water supply

36,37: Rotating part

38: Divider

39: Cutting water supply source

50: Support mounting bracket

60: Fixed mounting base

80: Supply Direction

81: Radial component

82: Circumferential Component

X, Y, Z: Direction

Claims (3)

A cutting device comprises a work clamp for holding a workpiece, a cutting unit for cutting the workpiece held on the work clamp with a cutting blade fixed to the front end of a spindle through a mounting seat, and a nozzle for supplying cutting water to the cutting blade, wherein the cutting blade is fixed to the mounting seat with a thickness of less than 0.2 mm and an aspect ratio expressed as a tip extension amount/blade thickness of 30 or more, the cutting device is provided with a nozzle, and the nozzle supplies cutting water from the periphery toward the outer peripheral surface of the cutting blade in a manner parallel to the side surface of the cutting blade, and the nozzle has a partition plate inside for rectifying the flow of cutting water. The mounting seat includes: a supporting mounting seat, which is engaged with the front end of the main spindle and supports the cutting blade; and a fixed mounting seat, which fixes the cutting blade supported on the supporting mounting seat to the supporting mounting seat. The supporting mounting seat has an internal suction path that extends from the side of the main spindle housing that rotatably supports the main spindle, that is, the rear side, to the supporting surface facing the fixed mounting seat. The negative pressure from the rotary joint provided at the front of the main spindle housing acts on the fixed mounting seat through the suction path of the supporting mounting seat, and the fixed mounting seat is attracted and fixed to the supporting surface of the supporting mounting seat, thereby clamping the cutting blade by the supporting mounting seat and the fixed mounting seat. A cutting device as claimed in claim 1, wherein the nozzle is cylindrical, the partition plate is arranged inside the nozzle, and is 7 cylindrical components extending along the supply direction of the cutting water, and one of the 7 cylindrical components is arranged in the center of the nozzle and the remaining cylindrical components are arranged around the one. A method for cutting a workpiece using a cutting device as claimed in claim 1 or 2, characterized in that the following steps are performed: cutting water from the nozzle is supplied from the periphery toward the outer peripheral surface of the cutting blade in a manner parallel to the side surface of the cutting blade, and the workpiece held by the workpiece is cut with the cutting blade, while the vibration of the cutting blade caused by the cutting water supplied from the nozzle is suppressed while cutting the workpiece.