[go: up one dir, main page]

TWI716611B - Transport system - Google Patents

Transport system Download PDF

Info

Publication number
TWI716611B
TWI716611B TW106122098A TW106122098A TWI716611B TW I716611 B TWI716611 B TW I716611B TW 106122098 A TW106122098 A TW 106122098A TW 106122098 A TW106122098 A TW 106122098A TW I716611 B TWI716611 B TW I716611B
Authority
TW
Taiwan
Prior art keywords
tray
robot
liquid crystal
pallet
stage
Prior art date
Application number
TW106122098A
Other languages
Chinese (zh)
Other versions
TW201805219A (en
Inventor
荒井正
佐藤史朗
Original Assignee
日商日本電產三協股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本電產三協股份有限公司 filed Critical 日商日本電產三協股份有限公司
Publication of TW201805219A publication Critical patent/TW201805219A/en
Application granted granted Critical
Publication of TWI716611B publication Critical patent/TWI716611B/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H10P72/30—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

本發明之進行對處理裝置15供給之顯示面板2之搬送及自處理裝置15排出之顯示面板2之搬送的搬送系統1具備：輸送機4、5，其等搬送堆疊成複數層且可收納顯示面板2之托盤3；托盤載台6、7，其等載置托盤3；機器人8，其於輸送機4、5與托盤載台6、7之間搬送托盤3；機器人9，其進行自載置於托盤載台6、7之托盤3搬出顯示面板2及向載置於托盤載台6、7之托盤3搬入顯示面板2；及資料讀取裝置56，其讀取記錄於顯示面板2之資料。該搬送系統1可抑制進行收納顯示面板2之托盤3之拆疊或層疊時之顯示面板2之損傷。The conveying system 1 of the present invention for conveying the display panel 2 supplied to the processing device 15 and conveying the display panel 2 discharged from the processing device 15 includes: conveyors 4, 5, which are conveyed and stacked into multiple layers and can store displays Pallet 3 of panel 2; Pallet carriers 6, 7, etc., which carry pallets 3; Robot 8, which transports pallets 3 between conveyors 4, 5 and pallet carriers 6, 7; Robot 9, which carries out self-loading The tray 3 placed on the tray stages 6 and 7 moves out the display panel 2 and the tray 3 placed on the tray stages 6 and 7 moves into the display panel 2; and a data reading device 56 which reads records on the display panel 2 data. The conveying system 1 can suppress damage to the display panel 2 when unfolding or stacking the tray 3 storing the display panel 2.

Description

搬送系統Transport system

本發明係關於搬送液晶面板等顯示面板之搬送系統。The present invention relates to a conveying system for conveying display panels such as liquid crystal panels.

先前，已知有一種組入於可攜式機器等所使用之液晶顯示裝置之組裝線之搬送裝置(例如，參照專利文獻1)。專利文獻1所記載之搬送裝置具備5個搬送單元，且於各搬送單元分配有液晶顯示裝置之組裝步驟之各種組裝加工處理。又，該搬送裝置具備將收納於托盤之液晶顯示面板供給至搬送單元之自動裝載機(參照專利文獻1之圖19)。 [先前技術文獻] [專利文獻] 專利文獻1：國際公開第2012/120956號Previously, there has been known a conveying device incorporated in an assembly line of a liquid crystal display device used in a portable device or the like (for example, refer to Patent Document 1). The conveying device described in Patent Document 1 includes five conveying units, and various assembly processes of the assembly steps of the liquid crystal display device are allocated to each of the conveying units. Moreover, this conveyance apparatus is equipped with the autoloader (refer FIG. 19 of patent document 1) which supplies the liquid crystal display panel accommodated in a tray to a conveyance unit. [Prior Art Document] [Patent Document] Patent Document 1: International Publication No. 2012/120956

[發明所欲解決之問題] 於使用專利文獻1記載之搬送裝置之液晶顯示裝置之組裝線中，一般供給至自動裝載機之前之托盤以堆疊成複數層之狀態(以層疊之狀態)暫時放置於架子，作業者以手動作業將層疊之托盤拆疊，並逐個供給至自動裝載機。於作業者以手動作業將托盤拆疊之情形時，作業者之作業容易產生差異，且於將托盤拆疊時，有對托盤中之液晶顯示面板施加碰撞，而損傷液晶顯示面板之虞。 因此，本發明之課題在於提供一種搬送系統，其可於進行供給至特定處理裝置之顯示面板之搬送及自特定處理裝置排出之顯示面板之搬送之至少任一者的搬送系統中，抑制進行收納有顯示面板之托盤之拆疊或層疊時顯示面板之損傷。 [解決問題之技術手段] 為了解決上述課題，本發明之搬送系統之特徵在於：其係進行對特定處理裝置供給之顯示面板之搬送及自特定處理裝置排出之顯示面板之搬送之至少任一者的搬送系統，且具備：輸送機，其搬送堆疊成複數層且可收納顯示面板之托盤；托盤載台，其載置托盤；第1搬送機器人，其於輸送機與托盤載台之間搬送托盤；第2搬送機器人，其進行自載置於托盤載台之托盤搬出顯示面板及向載置於托盤載台之托盤搬入顯示面板的至少任一者；及資料讀取裝置，其讀取記錄於顯示面板之資料；且資料讀取裝置讀取由第2搬送機器人自托盤搬出後之顯示面板之資料及由第2搬送機器人搬入托盤前之顯示面板之資料之至少任一者。 本發明之搬送系統具備：輸送機，其搬送堆疊成複數層且可收納顯示面板之托盤；托盤載台，其載置托盤；及第1搬送機器人，其於輸送機與托盤載台之間搬送托盤。因此，於本發明中，可藉由第1搬送機器人於輸送機與托盤載台之間搬送托盤，而進行收納有顯示面板之托盤之拆疊或層疊。即，於本發明中，可自動進行托盤之拆疊或層疊。因此，於本發明中，可抑制托盤之拆疊作業或層疊作業之差異，可使托盤之拆疊作業或層疊作業穩定。其結果，於本發明中，可抑制進行托盤之拆疊或層疊時顯示面板之損傷。又，於本發明中，由於自動進行托盤之拆疊或層疊，故可削減人事費。 又，本發明之搬送系統具備：第2搬送機器人，其進行自載置於托盤載台之托盤搬出顯示面板、及向載置於托盤載台之托盤搬入顯示面板之至少任一者；因此可自動將收納於拆疊後之托盤之顯示面板向處理裝置搬送，或自動將自處理裝置排出之顯示面板收納於托盤。 又，本發明之搬送系統進而具備：資料讀取裝置，其讀取由第2搬送機器人自托盤搬出後之顯示面板之資料、及由第2搬送機器人搬入托盤前之顯示面板之資料之至少任一者；因此可將個別資料與自托盤搬出之顯示面板建立關聯，可向處理裝置供給與個別資料建立關聯後之顯示面板。又，可將個別資料與自處理裝置排出之顯示面板建立關聯，可將與個別資料建立關聯後之顯示面板收納於托盤。 於本發明中，較佳為搬送系統作為輸送機具備：供給側輸送機，其向接近托盤載台之方向搬送托盤；及排出側輸送機，其向遠離托盤載台之方向搬送托盤；且第1搬送機器人進行自供給側輸送機向托盤載台搬送托盤、及自托盤載台向排出側輸送機搬送托盤。 若如此構成，則由於搬送系統具備供給側輸送機與排出側輸送機，故可個別地進行向接近托盤載台之方向搬送托盤與向遠離托盤載台之方向搬送托盤。因此，與藉由共通之輸送機進行向接近托盤載台之方向搬送托盤與向遠離托盤載台之方向搬送托盤之情形相比，可縮短搬送系統之週期。又，若如此構成，則由於第1搬送機器人進行自供給側輸送機向托盤載台搬送托盤、及自托盤載台向排出側輸送機搬送托盤，故與個別設置自供給側輸送機向托盤載台搬送托盤的機器人、與自托盤載台向排出側輸送機搬送托盤的機器人之情形相比，可簡化搬送系統之構成。 於本發明中，較佳為供給側輸送機具備：導引構件，其配置於與托盤之搬送方向及上下方向正交之左右方向之兩側，且限制托盤於左右方向之移動；及抵接構件，其配置於托盤之搬送方向之下游側，供托盤抵接；且於由第1搬送機器人向托盤載台搬送托盤前使托盤抵接於抵接構件。若如此構成，則可將由第1搬送機器人搬送至托盤載台前之托盤於供給側輸送機上對位。因此，可精度良好地將托盤載置於托盤載台。 於本發明中，較佳為搬送系統具備複數個托盤載台。若如此構成，則可一面由第2搬送機器人進行顯示面板之搬出或搬入，一面由第1搬送機器人進行托盤載台上之托盤之更換。因此，與搬送系統所具備之托盤載台之數量為1個之情形相比，可縮短搬送系統之週期。 於本發明中，較佳為搬送系統具備：對準裝置，其檢測由第2搬送機器人自托盤搬出之顯示面板之邊緣，且基於顯示面板之邊緣之檢測結果而進行顯示面板之對位。若如此構成，則可以資料讀取裝置讀取以對準裝置對位後之顯示面板之資料。因此，可藉由資料讀取裝置確實且正確地讀取由第2搬送機器人自托盤搬出後之顯示面板之資料。 於本發明中，較佳為搬送系統具備：層數檢測機構，其檢測輸送機上之托盤之層數；且層數檢測機構具備：感測器，其檢測托盤之有無；及升降機構，其使感測器升降。若如此構成，則藉由基於層數檢測機構之檢測結果使第1搬送機器人動作，可防止輸送機上之托盤與第1搬送機器人之碰撞、或輸送機上之托盤與第1搬送機器人搬送之托盤之碰撞。 於本發明中，較佳為輸送機係由在托盤之搬送方向經分割且可個別驅動之複數個分割輸送機而構成。若如此構成，則可將複數個層疊之托盤於托盤之搬送方向上個別搬送。因此，輸送機之易用性較佳。 於本發明中，較佳為搬送系統具備供設置第1搬送機器人之第1框架、及供設置第2搬送機器人之第2框架，且於第1框架，形成有供設置第1搬送機器人之設置面；第2框架具備配置於較設置面更上側，且供設置第2搬送機器人之設置部；第1搬送機器人以自設置面立起之方式設置於設置面，第2搬送機器人以懸垂於設置部之方式設置於設置部。若如此構成，則易於防止使第1搬送機器人與第2搬送機器人同時動作時第1搬送機器人與第2搬送機器人干涉。 於本發明中，較佳為第2搬送機器人具備例如：本體部；複數條連桿，其等之基端側可旋動地連結於本體部；複數個臂部，其等之基端側各者可旋動地連結於複數條連桿之末端側各者；可動部，其可旋動地連結於複數個臂部之末端側；面板固持部，其安裝於可動部且固持顯示面板；及複數個旋動驅動機構，其使複數條連桿各者旋動；且複數條連桿以向本體部之外周側以大致等角度間距大致放射狀地延伸之方式連結於本體部，臂部具備相互平行之直線狀之2條臂，且2條臂各者之基端側可旋動地連結於連桿之末端側，且可動部可旋動地連結於2條臂之末端側，本體部固定於設置部。即，第2搬送機器人係例如所謂之並行連接機器人。於該情形時，可以相對高速進行自托盤搬出顯示面板或向托盤搬入顯示面板。 於本發明中，較佳為搬送系統作為托盤載台具備：2個固定托盤載台，其等於與托盤之搬送方向及上下方向正交之左右方向鄰接配置；及2個可動托盤載台，其等可於托盤之搬送方向與左右方向移動；且具備：2個載台移動機構，其等使2個可動托盤載台個別地移動；且載台移動機構使可動托盤載台於在左右方向上與固定托盤載台並排之第1位置、與於托盤之搬送方向上與固定托盤載台之至少一部分重疊之第2位置之間移動。若如此構成，則即便使第1搬送機器人之可動範圍或第2搬送機器人之可動範圍較窄，亦可由第1搬送機器人於輸送機與可動托盤載台之間搬送托盤，且由第2搬送機器人搬出收納於可動托盤載台上之托盤之顯示面板，或將顯示面板搬入至可動托盤載台上之托盤。 [發明之效果] 如以上般，於本發明中，可於進行供給至特定處理裝置之顯示面板之搬送及自特定處理裝置排出之顯示面板之搬送之至少任一者的搬送系統中，抑制進行收納有顯示面板之托盤之拆疊或層疊時顯示面板之損傷。[Problem to be solved by the invention] In the assembly line of the liquid crystal display device using the conveying device described in Patent Document 1, the tray before being supplied to the autoloader is generally placed in a state of being stacked in multiple layers (in a stacked state). On the shelf, the operator manually unfolds the stacked pallets and supplies them to the automatic loader one by one. When the operator manually unfolds and stacks the trays, the operator's work is likely to be different, and when unfolding the trays, there is a risk of impact on the liquid crystal display panel in the tray, which may damage the liquid crystal display panel. Therefore, the subject of the present invention is to provide a transport system that can suppress storage in at least any one of the transport of the display panel supplied to a specific processing device and the transport of the display panel discharged from the specific processing device The display panel is damaged when the tray with the display panel is unstacked or stacked. [Technical Means for Solving the Problem] In order to solve the above-mentioned problems, the transport system of the present invention is characterized in that it performs at least any of the transport of the display panel supplied to the specific processing device and the transport of the display panel discharged from the specific processing device The conveying system of, and equipped with: conveyor, which conveys the pallets stacked in multiple layers and can store the display panel; the pallet carrier, which holds the pallet; the first conveying robot, which conveys the pallet between the conveyor and the pallet carrier ; The second transport robot, which carries out at least any one of the display panel from the tray placed on the tray carrier and the display panel to the tray placed on the tray carrier; and the data reading device, which reads and records in The data of the display panel; and the data reading device reads at least any one of the data of the display panel after being unloaded from the tray by the second transfer robot and the data of the display panel before being transferred into the tray by the second transfer robot. The transport system of the present invention is provided with: a conveyor that transports trays stacked in multiple layers and capable of accommodating display panels; a tray carrier for placing trays; and a first transport robot that transports between the conveyor and the tray carrier tray. Therefore, in the present invention, the first transport robot can transport the pallets between the conveyor and the pallet stage to unstack or stack the pallets containing the display panel. That is, in the present invention, the unstacking or stacking of trays can be automatically performed. Therefore, in the present invention, the difference in the stacking operation or stacking operation of the pallets can be suppressed, and the stacking operation or stacking operation of the pallets can be stabilized. As a result, in the present invention, damage to the display panel during unfolding or stacking of trays can be suppressed. In addition, in the present invention, since the unstacking or stacking of trays is automatically performed, personnel costs can be reduced. In addition, the transport system of the present invention includes: a second transport robot that carries out at least any one of the display panel from the tray placed on the tray stage and the display panel is transported to the tray placed on the tray stage; therefore, it can The display panel stored in the unfolded tray is automatically transported to the processing device, or the display panel discharged from the processing device is automatically stored in the tray. In addition, the conveying system of the present invention further includes: a data reading device that reads at least any of the data of the display panel after being unloaded from the pallet by the second conveying robot and the data of the display panel before being conveyed into the pallet by the second conveying robot One; therefore, individual data can be associated with the display panel carried out from the pallet, and the processing device can be supplied with the display panel associated with the individual data. In addition, individual data can be associated with the display panel discharged from the processing device, and the display panel associated with the individual data can be stored in the tray. In the present invention, it is preferable that the conveying system as the conveyor includes: a supply side conveyor that conveys the pallets in a direction approaching the pallet carrier; and a discharge side conveyor that conveys the pallets in a direction away from the pallet carrier; and 1 The transfer robot performs the transfer of the pallets from the supply side conveyor to the pallet stage and the transfer of the pallets from the tray stage to the discharge side conveyor. With this configuration, since the conveying system includes a supply-side conveyor and a discharge-side conveyor, it is possible to separately convey the pallet in a direction approaching the tray stage and a direction away from the pallet stage. Therefore, the cycle of the conveying system can be shortened compared with the case where the pallet is conveyed in the direction closer to the pallet stage and the pallet is conveyed in the direction away from the pallet stage by a common conveyor. In addition, if configured in this way, since the first transfer robot performs the transfer of the pallets from the supply side conveyor to the pallet stage and the transfer of the pallets from the tray stage to the discharge side conveyor, it is separately installed from the supply side conveyor to the tray. Compared with the robot that transports pallets from the tray carrier to the discharge side conveyor, the structure of the transport system can be simplified. In the present invention, it is preferable that the supply-side conveyor includes: guide members arranged on both sides of the left and right directions orthogonal to the conveying direction and the vertical direction of the pallet, and restrict the movement of the pallet in the left and right direction; and abutting The member is arranged on the downstream side of the conveying direction of the pallet for the pallet to abut; and the pallet abuts against the abutting member before the pallet is conveyed to the pallet stage by the first conveying robot. With this structure, the pallet transported by the first transport robot to the front of the pallet stage can be aligned on the supply side conveyor. Therefore, the tray can be accurately placed on the tray stage. In the present invention, it is preferable that the transport system includes a plurality of tray stages. With this structure, the second transport robot can carry out or carry in the display panel while the first transport robot can replace the pallet on the pallet stage. Therefore, compared with the case where the number of pallet stages provided in the conveying system is one, the cycle of the conveying system can be shortened. In the present invention, it is preferable that the conveying system includes an alignment device that detects the edge of the display panel carried out from the tray by the second conveying robot, and performs alignment of the display panel based on the detection result of the edge of the display panel. If constructed in this way, the data on the display panel after the alignment device can be read by the data reading device. Therefore, the data on the display panel after being unloaded from the tray by the second transfer robot can be read reliably and accurately by the data reading device. In the present invention, it is preferable that the conveying system includes: a layer number detection mechanism that detects the number of layers of the tray on the conveyor; and the layer number detection mechanism includes: a sensor that detects the presence or absence of the tray; and a lifting mechanism, which Lift the sensor. If configured in this way, by operating the first transport robot based on the detection result of the layer number detection mechanism, collision between the tray on the conveyor and the first transport robot, or the tray on the conveyor and the first transport robot can be prevented The collision of pallets. In the present invention, it is preferable that the conveyor is composed of a plurality of divided conveyors that are divided in the conveying direction of the pallet and can be driven individually. With this structure, a plurality of stacked trays can be individually transported in the transport direction of the trays. Therefore, the ease of use of the conveyor is better. In the present invention, it is preferable that the conveying system has a first frame for installing the first conveying robot, and a second frame for installing the second conveying robot, and the first frame is formed with a setting for installing the first conveying robot Surface; The second frame is equipped with a setting part arranged on the upper side of the installation surface and for the installation of the second transport robot; the first transport robot is installed on the installation surface in a manner to stand up from the installation surface, and the second transport robot is suspended on the installation The way of the part is set in the setting part. With such a configuration, it is easy to prevent interference between the first transport robot and the second transport robot when the first transport robot and the second transport robot are operated simultaneously. In the present invention, it is preferable that the second transport robot includes, for example, a main body; a plurality of links whose base ends are rotatably connected to the main body; and a plurality of arms whose base ends are each One is rotatably connected to the end sides of the plurality of links; the movable part is rotatably connected to the end sides of the plurality of arm parts; the panel holding part is installed on the movable part and holds the display panel; and A plurality of rotating drive mechanisms that rotate each of the plurality of links; and the plurality of links are connected to the main body in such a way that they extend radially to the outer peripheral side of the main body at substantially equal angular intervals, and the arm part is provided with Two parallel linear arms. The base end of each of the two arms is rotatably connected to the end side of the link, and the movable part is rotatably connected to the end side of the two arms. The body part Fixed to the setting part. That is, the second transfer robot is, for example, a so-called parallel connection robot. In this case, it is possible to carry out the display panel from the tray or the display panel into the tray at a relatively high speed. In the present invention, it is preferable that the conveying system as the pallet stage includes: two fixed pallet stages, which are arranged adjacent to the left and right directions orthogonal to the conveying direction and the vertical direction of the pallet; and two movable pallet stages, which It can move in the conveying direction of the pallet and the left and right directions; and equipped with: 2 stage moving mechanisms, which make the two movable tray stages move individually; and the stage moving mechanism makes the movable tray stage in the left and right directions It moves between the first position side by side with the fixed pallet carrier and the second position overlapping with at least a part of the fixed pallet carrier in the conveying direction of the pallet. With this configuration, even if the movable range of the first transfer robot or the movable range of the second transfer robot is narrow, the first transfer robot can transfer the pallet between the conveyor and the movable pallet stage, and the second transfer robot Unload the display panel of the tray stored on the movable tray carrier, or transfer the display panel into the tray on the movable tray carrier. [Effects of the Invention] As described above, in the present invention, it is possible to suppress progress in a conveying system that performs at least any of the conveyance of the display panel supplied to the specific processing device and the conveyance of the display panel discharged from the specific processing device. Damage to the display panel when the tray containing the display panel is unstacked or stacked.

以下，一面參照圖式，一面說明本發明之實施形態。 [實施形態1] (搬送系統之整體構成) 圖1係本發明之實施形態1之搬送系統1之側視圖。圖2係自圖1之E-E方向顯示搬送系統1之俯視圖。 本形態之搬送系統1組入於可攜式機器等所使用之小型液晶顯示器之製造線而加以使用。該搬送系統1搬送顯示面板即液晶面板2，並將液晶面板2供給至對液晶面板2進行特定處理之處理裝置15(參照圖2)。即，該搬送系統1搬送供給至處理裝置15之液晶面板2。又，搬送系統1搬送小型之液晶面板2(例如4吋之液晶面板2)。 液晶面板2形成為長方形之平板狀。於液晶面板2之超出顯示區域之部位，記錄有液晶面板2之檢查資料等資料。具體而言，於液晶面板2之超出顯示區域之部位，將檢查資料等資料記錄為二維碼或一維碼。即，於液晶面板2之超出顯示區域之部位，記錄有可光學讀取之資料。另，於以本形態之搬送系統1搬送之液晶面板2，可貼附偏光板(偏光薄膜)，亦可不貼附偏光板。又，於液晶面板2，可安裝FPC(Flexible Printed Circuit：可撓性印刷電路)或晶片，亦可不安裝FPC或晶片。 搬送系統1具備搬送可收納液晶面板2之托盤3之2個輸送機4、5。輸送機4、5將堆疊成複數層之托盤3(即，層疊之托盤3)向水平方向直線搬送。例如，輸送機4、5將層疊成20層之托盤3向水平方向直線搬送。 於以下之說明中，將輸送機4、5之搬送托盤3之方向(圖1等之X方向)設為「前後方向」，將與上下方向(鉛直方向)及前後方向正交之方向(圖1等之Y方向)設為「左右方向」。又，將前後方向之一側(圖1等之X1方向側)設為「前」側，將其相反側(圖1等之X2方向側)設為「後(後方)側」，將左右方向之一側(圖2等之Y1方向側)設為「右」側，將其相反側(圖2等之Y2方向側)設為「左」側。於本形態中，於搬送系統1之後側配置有處理裝置15。 又，搬送系統1具備：2個托盤載台6、7，其等載置托盤3；作為第1搬送機器人之機器人8，其於輸送機4、5與托盤載台6、7之間搬送托盤3；作為第2搬送機器人之機器人9，其自載置於托盤載台6、7之托盤3搬出液晶面板2；及供給單元10，其自機器人9接收液晶面板2並供給至處理裝置15。托盤載台6、7配置於較輸送機4、5更後側。供給單元10配置於較托盤載台6、7更後側。 又，搬送系統1具備設置有輸送機4、5、托盤載台6、7、機器人8及供給單元10之作為第1框架之本體框架11、及設置有機器人9之作為第2框架之本體框架12。本體框架11形成為前後方向細長、且高度較低的扁平長方體狀。本體框架11之上表面11a形成為與上下方向正交之平面狀，且於本體框架11之上表面11a設置有輸送機4、5、托盤載台6、7、機器人8及供給單元10。本形態之上表面11a為設置有機器人8之設置面。 本體框架12為形成為大致門型之門型框架。本體框架12之左右方向之寬度寬於本體框架11之左右方向之寬度，本體框架12之前後方向之寬度短於本體框架11之前後方向之長度。本體框架12之高度高於本體框架11之高度，本體框架12具備配置於較本體框架11之上表面11a更上側之上表面部12a。上表面部12a配置於較輸送機4、5、托盤載台6、7、機器人8及供給單元10更上側。 本體框架12以自前後方向觀察時跨越本體框架11之方式設置。即，本體框架12以於左右方向跨越本體框架11之方式設置。又，本體框架12以跨越本體框架11之後端側部分之方式設置。機器人9設置於本體框架12之上表面部12a。本形態之上表面部12a為設置有機器人9之設置部。 (輸送機之構成及動作) 圖3係圖1所示之分割輸送機20之立體圖。圖4係用以說明圖3所示之層數檢測機構29之構成及圖1所示之托盤固持部39之構成之概略圖。 輸送機4、5為具備複數個滾筒之滾筒輸送機。輸送機4與輸送機5於左右方向鄰接配置。輸送機4將層疊之托盤3向後側搬送，輸送機5將層疊之托盤3向前側搬送。即，輸送機4向接近托盤載台6、7之方向搬送托盤3，輸送機5向遠離托盤載台6、7之方向搬送托盤3。於由輸送機4搬送之托盤3收納有複數片液晶面板2。另一方面，於由輸送機5搬送之托盤3未收納液晶面板2，由輸送機5搬送之托盤3為空托盤。本形態之輸送機4係供給側輸送機，輸送機5係排出側輸送機。另，輸送機4、5亦可為皮帶輸送機等。 輸送機4由在前後方向分割之複數個分割輸送機16～20構成。本形態之輸送機4由5個分割輸送機16～20構成。分割輸送機16～20自前側朝向後側依序配置。同樣地，輸送機5由在前後方向分割之5個分割輸送機21～25構成。分割輸送機21～25自前側朝向後側依序配置。分割輸送機16～25各者具備馬達與將馬達之動力傳遞至滾筒之動力傳遞機構，且分割輸送機16～25可個別地驅動。前後方向之分割輸送機16～25之寬度寬於托盤3之前後方向之寬度。具體而言，前後方向之分割輸送機16～25之寬度略微寬於托盤3之前後方向之寬度。 於分割輸送機16，載置有由作業者自暫時放置用之架子(省略圖示)搬運來之層疊狀態之托盤3。載置於分割輸送機16之層疊狀態之托盤3由輸送機4向後側搬送。搬送至分割輸送機20之層疊狀態之托盤3如後述般由機器人8拆疊。又，於分割輸送機25，如後述般由機器人8將空托盤3層疊。當將托盤3層疊至特定層數時，層疊狀態之托盤3由輸送機5搬送至前側。搬送至分割輸送機21之層疊狀態之托盤3由作業者搬運至空托盤用之架子。 另，於將層疊狀態之托盤3載置於分割輸送機16時，通常於分割輸送機17～20之至少任一分割輸送機17～20載置有層疊狀態之托盤3。又，於在分割輸送機25層疊有空托盤3時，有時於分割輸送機21～24之至少任一分割輸送機21～24載置有層疊狀態之空托盤3。 輸送機4之配置於最後側之分割輸送機20具備限制左右方向之托盤3之移動之導引構件27(參照圖3)。導引構件27配置於分割輸送機20之左右方向之兩側。配置於右側之導引構件27之導引面與配置於左側之導引構件27之導引面之左右方向之距離與托盤3之左右方向之寬度大致相等。又，分割輸送機20具備供托盤3之後端抵接之抵接構件28。抵接構件28配置於分割輸送機20之後端。即，抵接構件28配置於輸送機4搬送托盤3之方向之下游端。 於本形態中，輸送機4於機器人8向托盤載台6、7搬送托盤3之前將托盤3搬送至後側並使托盤3抵接於抵接構件28。即，於進行機器人8向托盤載台6、7之托盤3之搬送時，每次皆於將托盤3搬送至後側直至抵接於抵接構件28後，進行機器人8向托盤載台6、7之托盤3之搬送。 於分割輸送機20安裝有檢測輸送機4上之托盤3之層數之層數檢測機構29。層數檢測機構29安裝於左右方向之分割輸送機20之兩端側。如圖3、圖4所示，層數檢測機構29具備檢測托盤3之有無之感測器30、及使感測器30升降之升降機構31。感測器30係反射型之光學式感測器，感測器30之發光元件向左右方向之分割輸送機20之中心射出光。升降機構31具備馬達32及將馬達32之旋轉運動轉換為上下方向之直線運動的滾珠螺桿(省略圖示)等。另，感測器30可為透過型之光學式感測器，亦可為接近感測器等。 於以層數檢測機構29檢測輸送機4上之托盤3之層數時，於使感測器30移動至上限位置後，使感測器30下降直至以感測器30檢測出托盤3。又，基於以感測器30檢測出托盤3時之馬達32之旋轉位置，檢測輸送機4上之托盤3之層數。另，於分割輸送機25未安裝層數檢測機構29，但亦可於分割輸送機25安裝層數檢測機構29。 (托盤載台之構成) 於托盤載台6、7載置有1個托盤3。托盤載台6、7固定於本體框架11。托盤載台6與托盤載台7以於左右方向上隔出特定間隔之狀態配置。托盤載台6於左右方向上配置於與輸送機4大致相同之位置，托盤載台7於左右方向上配置於與輸送機5大致相同之位置。又，托盤載台6配置於分割輸送機20之緊鄰後方，托盤載台7配置於分割輸送機25之緊鄰後方。托盤載台6、7之上表面形成為與上下方向正交之平面狀。該托盤載台6、7之上表面配置於較輸送機4、5之上表面更上側。 (機器人之構成及動作) 圖5係圖1所示之機器人9之立體圖。 機器人8為所謂之3軸正交機器人。該機器人8具備：本體框架35，其形成為門型；可動框架36，其以可相對於本體框架35向左右方向滑動之方式保持於本體框架35；可動框架37，其以可相對於可動框架36向前後方向滑動之方式保持於可動框架36；可動框架38，其以可相對於可動框架37向上下方向滑動之方式保持於可動框架37；及托盤固持部39，其安裝於可動框架38。又，機器人8具備使可動框架36向左右方向滑動之驅動機構、使可動框架37向前後方向滑動之驅動機構、及使可動框架38向上下方向滑動之驅動機構。 本體框架35之高度高於輸送機4、5之高度。本體框架35以於自前後方向觀察時跨越於左右方向鄰接配置之輸送機4、5之方式配置。即，本體框架35以於左右方向跨越輸送機4、5之方式配置。又，本體框架35以跨越分割輸送機19、24之後端側部分及分割輸送機20、25之前端側部分之方式配置。 可動框架36安裝於本體框架35之上表面側，且配置於較輸送機4、5更上側。又，可動框架36配置於較載置於輸送機4、5之層疊狀態之托盤3更上側。可動框架37安裝於可動框架36之右側。可動框架38安裝於可動框架37之後端側。又，本體框架35以自本體框架11之上表面11a立起之方式固定於上表面11a。即，機器人8以自上表面11a立起之方式設置於上表面11a。 托盤固持部39安裝於可動框架38之下端。該托盤固持部39如圖4所示，具備吸附托盤3之複數個吸附部40、用以自下側支持托盤3之爪部41、及使爪部41移動之爪移動機構42。吸附部40與托盤3之上表面接觸並真空吸附托盤3。爪部41配置於托盤固持部39之前後方向之中心位置且配置於左右方向之兩側。爪移動機構42係氣缸，且使爪部41向左右方向移動。於機器人8搬送托盤3時，將爪部41向左右方向之內側移動直至將爪部41配置於搬送之托盤3之下側。又，於機器人8搬送托盤3時，吸附部40吸附托盤3之上表面而加以固持。 機器人8進行自輸送機4向托盤載台6、7之托盤3之搬送、及自托盤載台6、7向輸送機5之托盤3之搬送。具體而言，機器人8將搬送至分割輸送機20之層疊狀態之托盤3逐個搬送至托盤載台6或托盤載台7，並將分割輸送機20上之層疊狀態之托盤3拆疊。又，機器人8將變空之1個托盤3自托盤載台6或托盤載台7搬送至分割輸送機25，並將托盤3層疊於分割輸送機25直至分割輸送機25上堆疊之托盤3之層數變為特定之層數。 機器人9係所謂之並行連接機器人。該機器人9具備：本體部45；3條連桿46，其等連結於本體部45；3個臂部47，其等連結於3條連桿46各者；作為可動部之頭單元48，其連結於3個臂部47；及面板固持部49，其安裝於頭單元48。本體部45固定於本體框架12之上表面部12a。又，機器人9配置於上表面部12a之下側。即，機器人9以懸垂於上表面部12a之方式設置於上表面部12a。又，本體部45配置於托盤載台6、7之上方，且配置於較機器人8之本體框架35更後側。 3條連桿46以向本體部45之外周側以大致等角度間距大致放射狀地延伸之方式連結於本體部45。即，3條連桿46以向本體部45之外周側以大致120°間距大致放射狀地延伸之方式連結於本體部45。又，3條連桿46之基端側可旋動地連結於本體部45。於本體部45與連桿46之連結部，配置有作為使連桿46旋動之旋動驅動機構之附減速機之馬達50。本形態之機器人9具備使3條連桿46各者旋動之3個馬達50。馬達50之輸出軸固定於連桿46之基端側。 臂部47之基端側可旋動地連結於連桿46之末端側。具體而言，臂部47具備相互平行之直線狀之2條臂52，且2條臂52各者之基端側可旋動地連結於連桿46之末端側。頭單元48可旋動地連結於3個臂部47之末端側。即，頭單元48可旋動地連結於6條臂52之末端側。 面板固持部49安裝於頭單元48之下端。該面板固持部49具備真空吸附液晶面板2之複數個吸附部，且藉由該吸附部吸附液晶面板2之上表面而固持液晶面板2。又，於頭單元48之上端安裝有馬達53。面板固持部49連結於馬達53，且可藉由馬達53之動力實現以上下方向為旋轉之軸向之旋轉。 於機器人9中，可藉由個別地驅動3個馬達50，而於特定之區域內使頭單元48朝上下方向、左右方向及前後方向之任意位置、且以頭單元48保持一定之姿勢不變之狀態(具體而言係以保持面板固持部49朝向下側之狀態)移動。 機器人9自載置於托盤載台6之托盤3或載置於托盤載台7之托盤3將液晶面板2逐片搬出。具體而言，機器人9自托盤3逐片搬出液晶面板2，直至載置於托盤載台6、7之托盤3變空。又，機器人9將自托盤3搬出之液晶面板2向後述之面板載台64搬送。 (供給單元之構成及動作) 圖6係圖1所示之供給單元10之立體圖。圖7係圖6所示之供給單元10之俯視圖。 供給單元10具備：資料讀取裝置56，其讀取記錄於液晶面板2之資料；對準裝置57，其於將液晶面板2之資料以資料讀取裝置56讀取之前進行液晶面板2之對位；機器人58，其將以資料讀取裝置56讀取資料後之液晶面板2向處理裝置15搬送；電離器(靜電去除裝置)59，其自向處理裝置15搬送之液晶面板2去除靜電；搬送裝置60，其將以對準裝置57對位後之液晶面板2向機器人58搬送；機器人61，其將以對準裝置57對位之液晶面板2搬送至搬送裝置60；及基底板62，其載置並固定該等構成。 對準裝置57載置於基底板62之左端側。機器人58載置於基底板62之右端側。資料讀取裝置56及電離器59載置於基底板62之左右方向之中心位置。搬送裝置60於左右方向上配置於對準裝置57與機器人58之間。機器人61鄰接配置於對準裝置57之右側。基底板62載置並固定於本體框架11之上表面11a之後端側部分。 對準裝置57具備：面板載台64，其載置由機器人9自托盤載台6、7上之托盤3搬出之液晶面板2；可動框架65，其可旋動地保持面板載台64；可動框架66，其以可向左右方向滑動之方式保持可動框架65；固定框架67，其以可向前後方向滑動之方式保持可動框架65；旋動機構，其使面板載台64相對於可動框架65旋動；驅動機構，其使可動框架65相對於可動框架66向左右方向滑動；及驅動機構，其使可動框架66相對於固定框架67向前後方向滑動。面板載台64具備真空吸附載置於面板載台64之上表面之液晶面板2之複數個吸附部。固定框架67固定於基底板62。 又，對準裝置57具備配置於面板載台64之上方之相機68及照明69。照明69係具有於前後方向排列之複數個LED(Light Emitting Diode：發光二極體)之條型照明。該照明69配置於較相機68更下側且配置於超出相機68之視野之位置。於本形態中，照明69配置於相機68之左下側。照明69向面板載台64照射間接光。 相機68檢測載置於面板載台64之液晶面板2之邊緣(具體而言係形成為長方形狀之液晶面板2之角部)。該相機68具備偏光薄膜。又，於面板載台64之上表面貼附有偏光板(偏光薄膜)。相機68之偏光薄膜之相位與面板載台64之偏光板之相位錯開90°，映現於相機68之面板載台64為黑色。因此，於本形態中，映現於相機68之液晶面板2之邊緣與面板載台64之上表面之對比度變高，而可利用相機68正確地檢測液晶面板2之邊緣。 對準裝置57於將由機器人9搬出之液晶面板2載置於面板載台64時，由相機68檢測液晶面板2之邊緣。又，對準裝置57基於相機68之液晶面板2之邊緣之檢測結果，進行面板載台64之旋動動作、可動框架65之向左右方向之滑動動作及可動框架66之向前後方向之滑動動作之至少任1個動作，而進行液晶面板2之對位。即，對準裝置57檢測液晶面板2之邊緣且基於液晶面板2之邊緣之檢測結果而進行液晶面板2之對位。 搬送裝置60具備：2個滑動載台70，其等載置液晶面板2；可動框架71，其固定2個滑動載台70；固定框架72，其以可向左右方向滑動之方式保持可動框架71；及驅動機構，其使可動框架71相對於固定框架72向左右方向滑動。2個滑動載台70於左右方向鄰接配置。滑動載台70具備真空吸附載置於滑動載台70之上表面之液晶面板2之複數個吸附部。固定框架72固定於基底板62。 機器人61具備：面板固持部73，其真空吸附並固持液晶面板2；可動框架74，其以可向上下方向滑動之方式保持面板固持部73；固定框架75，其以可向左右方向滑動之方式保持可動框架74；升降機構，其使面板固持部73相對於可動框架74升降；及驅動機構，其使可動框架74相對於固定框架75向左右方向滑動。固定框架75固定於基底板62。面板固持部73於前後方向上配置於與滑動載台70相同之位置。 機器人61將以對準裝置57對位後之液晶面板2自面板載台64搬送至滑動載台70。具體而言，機器人61以面板固持部73真空吸附並固持面板載台64上之液晶面板2之上表面，且將液晶面板2自面板載台64依序搬送至移動至左端側而停止之2個滑動載台70各者。又，於液晶面板2載置於2個滑動載台70各者時，搬送裝置60使滑動載台70向右方向移動，而將液晶面板2搬送至搬送裝置60之右端側。 面板固持部73配置於較相機68更後側。又，相機68之液晶面板2之邊緣之檢測於將面板載台64配置於相機68之正下方之狀態進行，面板固持部73之液晶面板2之真空吸附於將面板載台64配置於面板固持部73之正下方之狀態進行。於本形態中，對準裝置57於由相機68檢測液晶面板2之邊緣後，一面進行液晶面板2之對位，一面使面板載台64自相機68之正下方移動至面板固持部73之正下方。即，於本形態中，對準裝置57一面進行液晶面板2之對位，一面將液晶面板2搬送至由面板固持部73真空吸附之位置。 機器人58具備：2個面板固持部76，其等真空吸附並固持液晶面板2；可動框架77，其以可向上下方向滑動之方式保持面板固持部76；固定框架78，其以可向前後方向滑動之方式保持可動框架77；升降機構，其使面板固持部76相對於可動框架77升降；及驅動機構，其使可動框架77相對於固定框架78向前後方向滑動。2個面板固持部76於左右方向鄰接配置。左右方向之2個面板固持部76之間距與左右方向之2個滑動載台70之間距相等。固定框架78固定於基底板62。 機器人58將由搬送裝置60搬送至搬送裝置60之右端側之液晶面板2搬入處理裝置15。具體而言，機器人58以2個面板固持部76各者真空吸附並固持載置於2個滑動載台70各者之2個液晶面板2各者之上表面，並自滑動載台70將2片液晶面板2一起搬入至處理裝置15。 資料讀取裝置56具備：相機81，其讀取二維碼或一維碼等可光學讀取之資料；可動框架82，其安裝有相機81；可動框架83，其以可向上下方向滑動之方式保持可動框架82；可動框架84，其以可向左右方向滑動之方式保持可動框架83；固定框架85，其以可向前後方向滑動之方式保持可動框架84；升降機構，其使可動框架82相對於可動框架83升降；驅動機構，其使可動框架83相對於可動框架84向左右方向滑動；及驅動機構，其使可動框架84相對於固定框架85向前後方向滑動。固定框架85固定於基底板62。又，資料讀取裝置56具備將光照射至液晶面板2之照明。 如上所述，資料讀取裝置56載置於基底板62之左右方向之中心位置。資料讀取裝置56讀取記錄於在對準裝置57之位置調整後由搬送裝置60向右方向搬送之液晶面板2之資料。即，資料讀取裝置56讀取由機器人9自載置於托盤載台6、7之托盤3搬出後之液晶面板2之資料。於以資料讀取裝置56讀取資料時，搬送裝置60以將液晶面板2配置於相機81之下方之方式一次停止。以資料讀取裝置56讀取之液晶面板2之資料作為被讀取資料之液晶面板2之個別資料，與被讀取資料之液晶面板2建立關聯。 電離器59配置於搬送裝置60之上方。又，電離器59配置於較相機81更右側，且去除以資料讀取裝置56讀取資料後之液晶面板2之靜電。 (本形態之主要效果) 如以上說明般，於本形態中，機器人8將搬送至分割輸送機20之層疊狀態之托盤3逐個搬送至托盤載台6、7，並將分割輸送機20上之層疊狀態之托盤3拆疊。即，於本形態中，由機器人8自動進行托盤3之拆疊。因此，於本形態中，可抑制托盤3之拆疊作業之差異，可使托盤3之拆疊作業穩定。因此，於本形態中，可抑制進行托盤3之拆疊時液晶面板2之損傷。 又，於本形態中，載置於托盤載台6、7之托盤3中之液晶面板2由機器人9搬入至供給單元10，隨後，由機器人61、搬送裝置60及機器人58搬送而搬入至處理裝置15。即，於本形態中，自動自拆疊後之托盤3將液晶面板2搬送至處理裝置15。因此，於本形態中，可抑制液晶面板2之搬送作業之差異，可使液晶面板2之搬送作業穩定。因此，於本形態中，可抑制液晶面板2之搬送時液晶面板2之損傷。又，於本形態中，由於自動進行托盤3之拆疊或層疊，且自動自拆疊後之托盤3將液晶面板2搬送至處理裝置15，故可削減人事費。 於本形態中，以資料讀取裝置56讀取之液晶面板2之資料作為被讀取資料之液晶面板2之個別資料，與被讀取資料之液晶面板2建立關聯。又，於本形態中，將以資料讀取裝置56讀取資料後之液晶面板2向處理裝置15搬送。因此，於本形態中，可向處理裝置15供給與個別資料建立關聯後之液晶面板2，其結果，於處理裝置15中，可基於個別資料適當地處理液晶面板2。又，於本形態中，由於以資料讀取裝置56讀取液晶面板2之資料之前以對準裝置57將液晶面板2對位，故可以資料讀取裝置56確實且正確地讀取液晶面板2之資料。 於本形態中，個別地設置將層疊之托盤3向後側搬送之輸送機4、與將層疊之托盤3向前側搬送之輸送機5，且可個別地進行收納有液晶面板2之層疊狀態之托盤3之向後側之搬送、及層疊狀態之空托盤3之向前側之搬送。因此，於本形態中，與由共通之輸送機進行收納有液晶面板2之層疊狀態之托盤3之向後側之搬送、與層疊狀態之空托盤3之向前側之搬送之情形相比，可縮短搬送系統1之週期。 又，於本形態中，由於設置有2個托盤載台6、7，故例如可一面由機器人9進行自托盤載台6上之托盤3搬出液晶面板2，一面由機器人8自托盤載台7將空托盤3搬送至輸送機5且自輸送機4將收納有液晶面板2之托盤3搬送至托盤載台7。即，可一面由機器人9進行自托盤載台6上之托盤3搬出液晶面板2，一面由機器人8進行托盤載台7上之托盤3之更換。因此，於本形態中，與設置之托盤載台之數量為1個之情形相比，可縮短搬送系統1之週期。 於本形態中，機器人8以自本體框架11之上表面11a立起之方式設置於上表面11a，機器人9以懸垂於配置於較機器人8之上端更上側之本體框架12之上表面部12a之方式設置於上表面部12a。因此，於本形態中，易於防止使機器人8與機器人9同時動作時機器人8與機器人9干涉。又，於本形態中，由於機器人9為所謂之並行連接機器人，故可以相對高速進行自托盤3搬出液晶面板2。 於本形態中，機器人8進行自輸送機4向托盤載台6、7搬送托盤3、及自托盤載台6、7向輸送機5搬送托盤3。因此，於本形態中，與個別設置進行自輸送機4向托盤載台6、7搬送托盤3的機器人、與進行自托盤載台6、7向輸送機5搬送托盤3的機器人之情形相比，可簡化搬送系統1之構成。 於本形態中，分割輸送機20具備限制左右方向之托盤3之移動之導引構件27。又，於本形態中，分割輸送機20具備供托盤3之後端抵接之抵接構件28，輸送機4於機器人8向托盤載台6、7搬送托盤3前將托盤3搬送至後側並使托盤3抵接於抵接構件28。因此，於本形態中，可將由機器人8搬送至托盤載台6、7前之托盤3於輸送機4上對位。因此，於本形態中，可精度良好地將托盤3載置於托盤載台6、7。 於本形態中，將檢測輸送機4上之托盤3之層數之層數檢測機構29安裝於分割輸送機20。因此，於本形態中，可基於層數檢測機構29之檢測結果使機器人8動作，藉此防止機器人8之托盤固持部39與托盤3碰撞。又，於本形態中，由於輸送機4由可個別驅動之5個分割輸送機16～20構成，輸送機5由可個別驅動之5個分割輸送機21～25構成，故可於前後方向上個別地搬送複數個層疊之托盤3。因此，於本形態中，輸送機4、5之易用性較佳。 [實施形態2] (搬送系統之整體構成) 圖8係本發明之實施形態2之搬送系統91之側視圖。圖9係自圖8之F-F方向顯示搬送系統91之俯視圖。 本形態之搬送系統91與實施形態1之搬送系統1同樣地組入於小型液晶顯示器之製造線而使用。該搬送系統91搬送自處理裝置15排出之液晶面板2。又，搬送系統91搬送小型之液晶面板2。於本形態中，於處理裝置15之後側配置有搬送系統91。於以下之說明中，關於與實施形態1共通之構成，標註同一符號並將其說明省略或簡化。 搬送系統91具備搬送可收納液晶面板2之托盤3之4個輸送機94～97。輸送機94～97與實施形態1之輸送機4、5同樣，將堆疊成複數層之托盤3(層疊之托盤3)向前後方向搬送。又，搬送系統91與搬送系統1同樣地具備機器人8、9。另，本形態之機器人8之本體框架35之左右方向寬度長於實施形態1之機器人8之本體框架35之左右方向長度，本形態之可動框架36之左右方向之可動量大於實施形態1之可動框架36之可動量。然而，除了該點以外，本形態之機器人8與實施形態1之機器人8同樣構成。 又，搬送系統91具備載置托盤3之4個托盤載台98～101、及接收自處理裝置15排出之液晶面板2並交接至機器人9之排出單元102。托盤載台98～101配置於較輸送機94～97更前側。排出單元102配置於較托盤載台98～101更前側。再者，搬送系統91與搬送系統1同樣地具備本體框架11、12。 (輸送機之構成及動作) 與輸送機4、5同樣，輸送機94～97為具備複數個滾筒之滾筒輸送機。輸送機94、輸送機95、輸送機96及輸送機97自右側向左側依序配置，而於左右方向鄰接配置。輸送機94、95將層疊之托盤3向前側搬送，輸送機96、97將層疊之托盤3向後側搬送。即，輸送機94、95向接近托盤載台98～101之方向搬送托盤3，輸送機96、97向遠離托盤載台98～101之方向搬送托盤3。 於以輸送機94、95搬送之托盤3未收納液晶面板2，故以輸送機94、95搬送之托盤3為空托盤。另一方面，於以輸送機96、97搬送之托盤3收納有複數片液晶面板2。本形態之輸送機94、95係供給側輸送機，輸送機96、97係排出側輸送機。另，輸送機94～97可為皮帶輸送機等。 輸送機94、95由在前後方向分割之3個分割輸送機18～20構成。分割輸送機18～20自後側向前側依序配置。同樣地，輸送機96、97由在前後方向分割之3個分割輸送機23～25構成。分割輸送機23～25自後側向前側依序配置。如上所述，分割輸送機18～20、23～25各者具備馬達與將馬達之動力傳遞至滾筒之動力傳遞機構，且分割輸送機18～20、23～25可個別驅動。 於分割輸送機18，載置有由作業者自暫時放置用之架子(省略圖示)搬運來之層疊狀態之空托盤3。載置於分割輸送機18之層疊狀態之托盤3由輸送機94、95向前側搬送。搬送至分割輸送機20之層疊狀態之托盤3由機器人8拆疊。又，於分割輸送機25，由機器人8將收納有液晶面板2之托盤3層疊。於將托盤3層疊至特定層數時，層疊狀態之托盤3由輸送機96、97搬送至後側。搬送至分割輸送機23之層疊狀態之托盤3由作業者搬運至暫時放置用之架子。 另，於將層疊狀態之托盤3載置於分割輸送機18時，通常於分割輸送機19、20之至少任一分割輸送機19、20載置有層疊狀態之托盤3。又，於在分割輸送機25層疊有托盤3時，有時於分割輸送機23、24之至少任一分割輸送機23、24載置有層疊狀態之托盤3。 與實施形態1同樣，分割輸送機20具備導引構件27。又，分割輸送機20具備抵接構件28。抵接構件28配置於分割輸送機20之前端。即，抵接構件28配置於輸送機94、95搬送托盤3之方向之下游端。與實施形態1同樣，輸送機94、95於機器人8向托盤載台98～101搬送托盤3前將托盤3搬送至前側並使托盤3抵接於抵接構件28。又，於分割輸送機20，與實施形態1同樣，安裝有層數檢測機構29。 (托盤載台之構成及動作) 圖10係圖9所示之托盤載台98～101之立體圖。 於托盤載台98～101載置有1個托盤3。托盤載台98～101之上表面形成為正交於上下方向之平面狀。又，托盤載台98～101之上表面配置於較輸送機94～97之上表面更上側。托盤載台98、99固定於本體框架11。托盤載台98與托盤載台99於左右方向鄰接配置。於本形態中，將托盤載台98配置於右側，將托盤載台99配置於左側。 又，搬送系統91具備：載台移動機構105，其使托盤載台100向左右方向及前後方向移動；及載台移動機構106，其使托盤載台101向左右方向及前後方向移動。即，搬送系統91具備使2個托盤載台100、101個別移動之2個載台移動機構105、106。本形態之托盤載台98、99係固定托盤載台，托盤載台100、101係可於左右方向與前後方向移動之可動托盤載台。 載台移動機構105具備：可動框架107，其以可向左右方向滑動之方式保持托盤載台100；固定框架108，其以可向前後方向滑動之方式保持可動框架107；驅動機構，其使托盤載台100相對於可動框架107向左右方向滑動；及驅動機構，其使可動框架107相對於固定框架108向前後方向滑動。同樣地，載台移動機構106具備：可動框架109，其以可向左右方向滑動之方式保持托盤載台101；固定框架110，其以可向前後方向滑動之方式保持可動框架109；驅動機構，其使托盤載台101相對於可動框架109向左右方向滑動；及驅動機構，其使可動框架109相對於固定框架110向前後方向滑動。 載台移動機構105使托盤載台100於在托盤載台98之右側配置托盤載台100之第1位置(圖9之二點鏈線所示之位置)、與前後方向上於托盤載台98之右端側部分之前配置托盤載台100之左端側部分之第2位置(圖9之實線所示之位置)之間移動。即，載台移動機構105使托盤載台100於左右方向上與托盤載台98並排之第1位置、與前後方向上與托盤載台98之一部分重疊之第2位置之間移動。 載台移動機構106使托盤載台101於在托盤載台99之左側配置托盤載台101之第1位置(圖9之二點鏈線所示之位置)、與前後方向上於托盤載台99之左端側部分之前配置托盤載台101之右端側部分之第2位置(圖9之實線所示之位置)之間移動。即，載台移動機構106使托盤載台101於左右方向上與托盤載台99並排之第1位置、與前後方向上與托盤載台99之一部分重疊之第2位置之間移動。 (機器人之構成及動作) 如上所述，本形態之機器人8之本體框架35之左右方向寬度長於實施形態1之機器人8之本體框架35之左右方向長度，本形態之可動框架36之左右方向之可動量大於實施形態1之可動框架36之可動量。本體框架35以於左右方向跨越輸送機94～97之方式設置。又，本體框架35以跨越分割輸送機19、24之前端側部分及分割輸送機20、25之後端側部分之方式配置。 機器人8進行自輸送機94、95向托盤載台98～101之托盤3之搬送、及自托盤載台98～101向輸送機96、97之托盤3之搬送。具體而言，機器人8將搬送至分割輸送機20之層疊狀態之空托盤3逐個搬送至托盤載台98～101，並將分割輸送機20上之層疊狀態之托盤3拆疊。又，機器人8將收納有特定個數之液晶面板2之1個托盤3自托盤載台98～101搬送至分割輸送機25，並將托盤3層疊於分割輸送機25直至分割輸送機25上堆疊之托盤3之層數變為特定之層數。 於本形態中，於由機器人8於輸送機94～97與托盤載台100之間進行托盤3之搬送時，托盤載台100配置於圖9之二點鏈線所示之第1位置。同樣地，於由機器人8於輸送機94～97與托盤載台101之間進行托盤3之搬送時，托盤載台101配置於圖9之二點鏈線所示之第1位置。另，於本形態中，配置於圖9之實線所示之第2位置之托盤載台100、101超出機器人8之動作範圍。 機器人9於載置於托盤載台98之托盤3、載置於托盤載台99之托盤3、載置於托盤載台100之托盤3或載置於托盤載台101之托盤3逐片搬入液晶面板2。具體而言，機器人9將自後述之面板載台113搬出之液晶面板2逐片搬入至載置於托盤載台98～101之托盤3。又，機器人9搬入液晶面板2直至將特定個數之液晶面板2收納於托盤3。 於本形態中，於由機器人9將液晶面板2搬入至載置於托盤載台100之托盤3時，托盤載台100配置於圖9之實線所示之第2位置。同樣地，於由機器人9將液晶面板2搬入至載置於托盤載台101之托盤3時，托盤載台101配置於圖9之實線所示之第2位置。另，於本形態中，配置於圖9之二點鏈線所示之第1位置之托盤載台100、101超出機器人9之動作範圍。 (排出單元之構成及動作) 圖11係圖8所示之排出單元102之立體圖。圖12係圖11所示之排出單元102之俯視圖。 排出單元102具備載置液晶面板2之面板載台111～113。本形態之排出單元102具備：一對(2個)面板載台111，其於左右方向鄰接配置；一對面板載台112，其於左右方向鄰接配置；及一對面板載台113，其於左右方向鄰接配置。面板載台111～113固定於基底板114之左端側。一對面板載台111～113自前側向後側依序且以一定之間距配置。又，一對面板載台111～113於左右方向上配置於相同位置。面板載台111～113具備真空吸附載置於面板載台111～113之上表面之液晶面板2之複數個吸附部。 又，排出單元102具備：資料讀取裝置116，其讀取記錄於液晶面板2之資料；機器人117，其將自處理裝置15排出之液晶面板2搬送至面板載台111；機器人118，其將載置於面板載台111之液晶面板2搬送至面板載台112、113；及電離器59，其自搬入至托盤3之液晶面板2去除靜電。該等構成載置並固定於基底板114。基底板114載置並固定於本體框架11之上表面11a之前端側部分。電離器59配置於面板載台111之上方，去除載置於面板載台111之液晶面板2之靜電。 機器人117具備：2個面板固持部121，其等真空吸附並固持液晶面板2；可動框架122，其以可向上下方向滑動之方式保持面板固持部121；固定框架123，其以可向左右方向滑動之方式保持可動框架122；升降機構，其使面板固持部121相對於可動框架122升降；及驅動機構，其使可動框架122相對於固定框架123向左右方向滑動。 固定框架123固定於基底板114。2個面板固持部121以於左右方向上隔出特定間隔之狀態配置。2個面板固持部121於前後方向上配置於與面板載台111相同之位置。機器人117以面板固持部121真空吸附並固持自處理裝置15排出之2片液晶面板2，且搬送至面板載台111。另，自處理裝置15排出之液晶面板2由設置於處理裝置15內部之對準機構對位。 機器人118具備：2個面板固持部124，其等真空吸附並固持液晶面板2；2個面板固持部125，其等真空吸附並固持液晶面板2；可動框架126，其以可向上下方向滑動之方式保持面板固持部124、125；固定框架127，其以可向前後方向滑動之方式保持可動框架126；升降機構，其使面板固持部124、125相對於可動框架126升降；及驅動機構，其使可動框架126相對於固定框架127向前後方向滑動。固定框架127固定於基底板114。 2個面板固持部124以於左右方向上隔出特定間隔之狀態配置，2個面板固持部125以於左右方向上隔出特定間隔之狀態配置。面板固持部124與面板固持部125以於前後方向上隔出特定間隔之狀態配置。於本形態中，將面板固持部124配置於前側，將面板固持部125配置於後側。前後方向之面板固持部124與面板固持部125之間距與前後方向之面板載台111～113之間距相等。又，面板固持部124、125於左右方向上配置於與面板載台111～113相同之位置。 機器人118將載置於面板載台111之液晶面板2依序搬送至面板載台112、面板載台113。具體而言，面板固持部124將載置於面板載台111之液晶面板2搬送至面板載台112，面板固持部125將載置於面板載台112之液晶面板2搬送至面板載台113。載置於面板載台113之液晶面板2由機器人9搬送至載置於托盤載台98～101之托盤3。 資料讀取裝置116具備：2個相機81；2個可動框架129，其等以可向上下方向滑動之方式保持2個相機81各者；可動框架130，其以可向左右方向滑動之方式保持2個可動框架129；可動框架131，其以可向前後方向滑動之方式保持可動框架130；固定框架132，其以可向左右方向滑動之方式保持可動框架131；升降機構，其使2個相機81各者相對於2個可動框架129各者升降；驅動機構，其使2個可動框架129各者相對於可動框架130向左右方向滑動；驅動機構，其使可動框架130相對於可動框架131向前後方向滑動；及驅動機構，其使可動框架131相對於固定框架132向左右方向滑動。固定框架132固定於基底板114。又，資料讀取裝置116具備將光照射至液晶面板2之照明。 資料讀取裝置116載置於基底板114之前後方向之中心位置，且讀取載置於面板載台112之液晶面板2所記錄之資料。即，資料讀取裝置116讀取由機器人9搬入托盤載台98～101上之托盤3前之液晶面板2之資料。以資料讀取裝置116讀取之液晶面板2之資料作為被讀取資料之液晶面板2之個別資料，與被讀取資料之液晶面板2建立關聯。 (本形態之主要效果) 如以上說明般，於本形態中，機器人8將收納有液晶面板2之1個托盤3自托盤載台98～101搬送至分割輸送機25，並將托盤3層疊於分割輸送機25。即，於本形態中，由機器人8自動進行托盤3之層疊。因此，於本形態中，可抑制托盤3之層疊作業之差異，可使托盤3之層疊作業穩定。因此，於本形態中，可抑制進行托盤3之層疊時液晶面板2之損傷。 於本形態中，托盤載台100、101可於圖9之二點鏈線所示之第1位置、與圖9之實線所示之第2位置之間移動。因此，於本形態中，即便配置於第2位置之托盤載台100、101超出機器人8之動作範圍，且配置於第1位置之托盤載台100、101超出機器人9之動作範圍，亦可由機器人8於輸送機94～97與托盤載台100、101之間搬送托盤3，且由機器人9將液晶面板2搬入至托盤載台100、101上之托盤3。即，於本形態中，即便使機器人8之可動範圍或機器人8之可動範圍較窄，亦可由機器人8於輸送機94～97與托盤載台100、101之間搬送托盤3，且由機器人9將液晶面板2搬入至托盤載台100、101上之托盤3。 又，於本形態中，可獲得與實施形態1同樣之效果。例如，於本形態中，自處理裝置15排出之液晶面板2由機器人117、118搬送至托盤載台113後，由機器人9搬入至托盤載台98～101上之托盤3，因此可抑制液晶面板2之搬送作業之差異，可使液晶面板2之搬送作業穩定。因此，於本形態中，可抑制液晶面板2之搬送時液晶面板2之損傷。 又，例如，於本形態中，以資料讀取裝置116讀取之液晶面板2之資料作為被讀取資料之液晶面板2之個別資料，與被讀取資料之液晶面板2建立關聯，並將以資料讀取裝置116讀取資料後之液晶面板2搬入托盤載台98～101上之托盤3，因此可將與個別資料建立關聯後之液晶面板2收納於托盤3。 [實施形態1之變化例] 圖13係實施形態1之變化例之供給單元140之立體圖。圖14係圖13所示之供給單元140之俯視圖。 於實施形態1之搬送系統1中，搬送小型之液晶面板2，但於搬送系統1中，亦可搬送中型之液晶面板2(例如15吋之液晶面板2)。於以搬送系統1搬送之液晶面板2為小型之情形時，與以搬送系統1搬送之液晶面板2為中型之情形相比，一般供給單元10中所要求之週期縮短。供給單元10係為了縮短供給單元10之週期，而具備面板載台64、可動框架65、66、固定框架67、及機器人61。 相對於此，於以搬送系統1搬送之液晶面板2為中型之情形時，可代替供給單元10而設置供給單元140，且該供給單元140不具備相當於面板載台64之構成、相當於可動框架65、66之構成、相當於固定框架67之構成及相當於機器人61之構成。以下，說明供給單元140之構成。另，於以下之說明中，關於與實施形態1共通之構成，標註同一符號並將其說明省略或簡化。 供給單元140具備：資料讀取裝置146，其讀取記錄於液晶面板2之資料；機器人148，其將以資料讀取裝置146讀取資料後之液晶面板2向處理裝置15搬送；電離器59，其自向處理裝置15搬送之液晶面板2去除靜電；及搬送裝置150，其將以資料讀取裝置146讀取資料後之液晶面板2向機器人148搬送。 資料讀取裝置146、機器人148、電離器59及搬送裝置150載置並固定於基底板152。資料讀取裝置146載置於基底板152之左端側。機器人148載置於基底板152之右端側。電離器59載置於基底板152之左右方向之中心位置。搬送裝置150於左右方向上配置於資料讀取裝置146與機器人148之間。基底板152載置並固定於本體框架11之上表面11a之後端側部分。 又，供給單元140具備：2個相機68及2個照明69，其等用以於以資料讀取裝置146讀取液晶面板2之資料前進行液晶面板2之對位。相機68及照明69配置於搬送裝置150之前側。又，相機68及照明69於自上下方向觀察時配置於托盤載台6與托盤載台7之間。又，相機68及照明69載置於固定於本體框架11之上表面11a之基底板153，相機68自液晶面板2之下側檢測液晶面板2之邊緣。 相機68係為了檢測形成為長方形狀之液晶面板2之一對角線上之2個角部，而載置於基底板153之右前端側、與基底板153之左後端側之2個部位。2個照明69配置於前後方向之2個相機68之間。照明69以向下側射出光之方式配置，於以相機68檢測液晶面板2之邊緣時，由基底板153反射之光(即間接光)照射至液晶面板2。 資料讀取裝置146具備相機81、及固定相機81之固定框架154。固定框架154固定於基底板152。又，資料讀取裝置146具備將光照射至液晶面板2之照明。相機81自液晶面板2之下側讀取記錄於液晶面板2之資料。 搬送裝置150具備：滑動載台155，其載置液晶面板2；固定框架156，其以可向左右方向滑動之方式保持滑動載台155；及驅動機構，其使滑動載台155相對於固定框架156向左右方向滑動。滑動載台155具備真空吸附載置於滑動載台155之上表面之液晶面板2之複數個吸附部。固定框架156固定於基底板152。 機器人148具備：面板固持部158，其真空吸附並固持液晶面板2；可動框架159，其以可向上下方向滑動之方式保持面板固持部158；可動框架160，其以可向左右方向滑動之方式保持可動框架159；固定框架161，其以可向前後方向滑動之方式保持可動框架160；升降機構，其使面板固持部158相對於可動框架159升降；驅動機構，其使可動框架159相對於可動框架160向左右方向滑動；及驅動機構，其使可動框架160相對於固定框架161向前後方向滑動。固定框架161固定於基底板152。 於該變化例中，機器人9將自托盤載台6、7上之托盤3搬出之液晶面板2直接搬送至相機68之上方。若由相機68檢測到液晶面板2之邊緣，則機器人9基於液晶面板2之邊緣之檢測結果，一面進行液晶面板2之對位，一面將液晶面板2搬送至資料讀取裝置146。於該變化例中，由機器人9、相機68、及照明69構成進行液晶面板2之對位之對準裝置，該對準裝置檢測液晶面板2之邊緣且基於液晶面板2之邊緣之檢測結果而進行液晶面板2之對位。 又，於將液晶面板2搬送至資料讀取裝置146之上方時，相機81讀取液晶面板2之資料。於由相機81讀取到液晶面板2之資料時，機器人9將液晶面板2搬送至移動至左端側而停止之滑動載台155並將液晶面板2載置於滑動載台155。於液晶面板2載置於滑動載台155時，搬送裝置150使滑動載台155向右方向移動，並將液晶面板2搬送至搬送裝置150之右端側。機器人148以面板固持部158真空吸附並固持由搬送裝置150搬送至搬送裝置150之右端側之液晶面板2，且自滑動載台155將液晶面板2搬入至處理裝置15。電離器59配置於搬送裝置150之上方，並去除以搬送裝置150搬送之液晶面板2之靜電。 [實施形態2之變化例] 圖15係實施形態2之變化例之排出單元172之立體圖。圖16係圖15所示之排出單元172之俯視圖。 於實施形態2之搬送系統91中，搬送小型之液晶面板2，但於搬送系統91中，亦可搬送中型之液晶面板2。於液晶面板2為小型之情形時，與液晶面板2為中型之情形相比，一般排出單元102中所要求之週期縮短。因此，於以搬送系統91搬送之液晶面板2為中型時所設置之排出單元172之構成可與實施形態2之排出單元102之構成不同。以下，說明排出單元172之構成。另，於以下之說明中，關於與實施形態1、2共通之構成，標註同一符號並將其說明省略或簡化。 排出單元172具備載置液晶面板2之面板載台173。面板載台173固定於基底板174之左後端側。面板載台173具備真空吸附載置於面板載台173之上表面之液晶面板2之複數個吸附部。又，排出單元172具備：資料讀取裝置175，其讀取記錄於液晶面板2之資料；機器人176、搬送裝置177及機器人178，其等將自處理裝置15排出之液晶面板2搬送至面板載台173；及電離器59，其自搬入至托盤3之液晶面板2去除靜電。該等構成載置並固定於基底板174。 資料讀取裝置175配置於面板載台173之緊鄰後側。機器人176載置於基底板174之右端側，機器人178載置於基底板174之左端側。電離器59載置於基底板174之左右方向之中心位置。搬送裝置177於左右方向上配置於機器人176與機器人178之間。基底板174載置並固定於本體框架11之上表面11a之前端側部分。 資料讀取裝置175具備相機81、及固定相機81之固定框架179。固定框架179固定於基底板174。又，資料讀取裝置175具備將光照射至液晶面板2之照明。相機81自液晶面板2之下側讀取記錄於液晶面板2之資料。 搬送裝置177具備：滑動載台180，其載置液晶面板2；固定框架181，其以可向左右方向滑動之方式保持滑動載台180；及驅動機構，其使滑動載台180相對於固定框架181向左右方向滑動。滑動載台180具備真空吸附載置於滑動載台180之上表面之液晶面板2之複數個吸附部。固定框架181固定於基底板174。 機器人176具備：面板固持部184，其真空吸附並固持液晶面板2；可動框架185，其以可向上下方向滑動之方式保持面板固持部184；固定框架186，其以可向左右方向滑動之方式保持可動框架185；升降機構，其使面板固持部184相對於可動框架185升降；及驅動機構，其使可動框架185相對於固定框架186向左右方向滑動。 固定框架186固定於基底板174。面板固持部184於前後方向上配置於與滑動載台180相同之位置。機器人176以面板固持部184真空吸附並固持自處理裝置15排出之液晶面板2，且將液晶面板2搬送至移動至右端側而停止之滑動載台180並將液晶面板2載置於滑動載台180。 機器人178具備：面板固持部187，其真空吸附並固持液晶面板2；可動框架188，其以可向上下方向滑動之方式保持面板固持部187；固定框架189，其以可向前後方向滑動之方式保持可動框架188；升降機構，其使面板固持部187相對於可動框架188升降；及驅動機構，其使可動框架188相對於固定框架189向前後方向滑動。 固定框架188固定於基底板174。面板固持部187於左右方向上配置於與面板載台173相同之位置。機器人178以面板固持部187真空吸附並固持載置於移動至左端側而停止之滑動載台180之液晶面板2，且搬送至面板載台173。 於該變化例中，機器人9將載置於面板載台173之液晶面板2搬送至資料讀取裝置175之上方。於將液晶面板2搬送至資料讀取裝置175之上方時，相機81讀取液晶面板2之資料。於由相機81讀取到液晶面板2之資料時，機器人9直接將液晶面板2搬送至載置於托盤載台98～101之托盤3。電離器59配置於搬送裝置177之上方，並去除以搬送裝置177搬送之液晶面板2之靜電。 [其他實施形態] 上述之形態係本發明之較佳之形態之一例，但並非限定於此，於不變更本發明主旨之範圍內可實施各種變化。 於上述之形態中，搬送系統1搬送供給至處理裝置15之液晶面板2，搬送系統91搬送自處理裝置15排出之液晶面板2，但應用本發明之搬送系統亦可搬送供給至處理裝置15之液晶面板2且搬送自處理裝置15排出之液晶面板2。該情形之搬送系統具備機器人8、9，且與搬送系統91同樣具備4個輸送機94～97、4個托盤載台98～101、及2個載台移動機構105、106。又，該情形之搬送系統具備例如相機68、照明69及資料讀取裝置56等。 又，於該情形時，輸送機94～97搬送收納有液晶面板2之層疊狀態之托盤3。機器人8於輸送機94～97與托盤載台98～101之間搬送收納有液晶面板2之托盤3。即，機器人8進行收納有液晶面板2之托盤3之拆疊與層疊。機器人9進行自托盤載台98～101上之托盤3搬出液晶面板2、與向托盤載台98～101上之托盤3搬入液晶面板2。又，例如，資料讀取裝置56讀取由機器人9自托盤3搬出後之液晶面板2(供給至處理裝置15之液晶面板2)之資料、及由機器人9搬入至托盤3之液晶面板2(自處理裝置15排出之液晶面板2)之資料。 又，於該情形時，較佳將載置有空托盤3之托盤載台(空托盤載台)設置於機器人8之動作範圍內。於該空托盤載台，以層疊狀態載置有例如3個左右之空托盤3，機器人8根據需要自空托盤載台向托盤載台98～101搬送空托盤3。又，機器人8根據需要將托盤載台98～101上變空之托盤3搬送至空托盤載台。 於上述之形態中，於托盤載台6、7、98～101載置有1個托盤3，但亦可將複數個托盤3以相互不重疊之方式載置於托盤載台6、7、98～101。又，於上述之形態中，搬送系統1具備2個托盤載台6、7，搬送系統91具備4個托盤載台98～101，但亦可為搬送系統1具備4個托盤載台，搬送系統91具備2個托盤載台。又，搬送系統1、91所具備之托盤載台之數量可為3個，亦可為5個以上。又，搬送系統1、91所具備之托盤載台之數量亦可為1個。 於上述之形態中，搬送系統1具備2個輸送機4、5，搬送系統91具備4個輸送機94～97，但亦可為搬送系統1具備4個輸送機，搬送系統91具備2個輸送機。又，搬送系統1、91所具備之輸送機之數量可為3個，亦可為5個以上。又，搬送系統1、91所具備之輸送機之數量亦可為1個。 於實施形態2中，配置於圖9之實線所示之第2位置之托盤載台100、101超出機器人8之動作範圍，但配置於第2位置之托盤載台100、101亦可處於機器人8之動作範圍內。於該情形時，不需要載台移動機構105、106，且托盤載台100、101例如於第2位置固定。又，於實施形態2中，配置於圖9之二點鏈線所示之第1位置之托盤載台100、101超出機器人9之動作範圍，但配置於第1位置之托盤載台100、101亦可處於機器人9之動作範圍內。於該情形時，不需要載台移動機構105、106，且托盤載台100、101例如於第1位置固定。 於上述之形態中，輸送機4、5、94～97由複數個分割輸送機構成，但輸送機4、5、94～97亦可為一體型之輸送機。又，於實施形態1中，輸送機4與輸送機5於左右方向鄰接配置，但亦可以輸送機4與輸送機5於上下方向重疊之方式配置。同樣地，於實施形態2中，4個輸送機94～97於左右方向鄰接配置，但亦可以自4個輸送機94～97中選擇之任意2個輸送機94～97與剩餘之2個輸送機94～97於上下方向重疊之方式配置。 於上述之形態中，機器人8為可使托盤固持部39向上下方向、左右方向及前後方向移動之3軸正交機器人，但機器人8亦可為能使托盤固持部39向左右方向及前後方向移動之2軸正交機器人。於該情形時，滾筒輸送機即輸送機4、5、94～97具備使複數個滾筒升降之升降機構。又，機器人8亦可為水平多關節機器人。又，於上述之形態中，機器人9為並行連接機器人，但機器人9亦可為水平多關節機器人。於該情形時，機器人9可以自本體框架11之上表面11a立起之方式設置於上表面11a。 於上述之形態中，機器人8進行自輸送機4、94、95向托盤載台6、7、98～101之托盤3之搬送、及自托盤載台6、7、98～101向輸送機5、96、97之托盤3之搬送，但亦可個別設置進行自輸送機4、94、95向托盤載台6、7、98～101之托盤3之搬送的機器人、及自托盤載台6、7、98～101向輸送機5、96、97之托盤3之搬送的機器人。又，於上述之形態中，以搬送系統1、91搬送之顯示面板為液晶面板2，但以搬送系統1、91搬送之顯示面板亦可為液晶面板2以外之顯示面板。例如，以搬送系統1、91搬送之顯示面板亦可為有機EL(Electro Luminescence：電致發光)面板。Hereinafter, the embodiments of the present invention will be described with reference to the drawings. [Embodiment 1] (Overall structure of transport system) Fig. 1 is a side view of the transport system 1 of Embodiment 1 of the present invention. Fig. 2 is a top view showing the conveying system 1 from the E-E direction of Fig. 1. The conveying system 1 of this form is integrated into a manufacturing line of small liquid crystal displays used in portable equipment and the like and used. This conveying system 1 conveys the liquid crystal panel 2 which is a display panel, and supplies the liquid crystal panel 2 to the processing apparatus 15 which performs a specific process on the liquid crystal panel 2 (refer FIG. 2). That is, the conveying system 1 conveys the liquid crystal panel 2 supplied to the processing device 15. In addition, the transport system 1 transports a small liquid crystal panel 2 (for example, a 4-inch liquid crystal panel 2). The liquid crystal panel 2 is formed in a rectangular flat plate shape. In the part of the liquid crystal panel 2 beyond the display area, data such as inspection data of the liquid crystal panel 2 are recorded. Specifically, the inspection data and other data are recorded as a two-dimensional code or a one-dimensional code at a portion of the liquid crystal panel 2 beyond the display area. That is, in the portion of the liquid crystal panel 2 beyond the display area, optically readable data is recorded. In addition, a polarizing plate (polarizing film) may be attached to the liquid crystal panel 2 transported by the transport system 1 of this form, or the polarizing plate may not be attached. In addition, on the liquid crystal panel 2, an FPC (Flexible Printed Circuit) or chip may be installed, or no FPC or chip may be installed. The conveying system 1 is provided with two conveyors 4 and 5 for conveying the tray 3 capable of storing the liquid crystal panel 2. The conveyors 4 and 5 linearly convey the stacked trays 3 (ie, stacked trays 3) in the horizontal direction. For example, the conveyors 4 and 5 linearly convey the tray 3 stacked in 20 layers in the horizontal direction. In the following description, the direction of the conveying tray 3 of the conveyors 4 and 5 (the X direction in Fig. 1 etc.) is set to the "front and rear direction", and the direction orthogonal to the vertical direction (vertical direction) and the front and rear direction (Fig. 1st grade Y direction) is set to "left and right direction". Also, set one side in the front-rear direction (X1 direction side in Fig. 1 etc.) as the "front" side, and set the opposite side (X2 direction side in Fig. 1, etc.) as the "rear (rear) side", and set the left and right direction One side (the Y1 direction side in Fig. 2 etc.) is referred to as the "right" side, and the opposite side (the Y2 direction side in Fig. 2 etc.) is referred to as the "left" side. In this embodiment, the processing device 15 is arranged on the rear side of the conveying system 1. In addition, the conveying system 1 is equipped with: two pallet stages 6, 7 for placing pallets 3; a robot 8 as the first conveying robot, which conveys pallets between conveyors 4, 5 and the pallet stages 6, 7 3; The robot 9 as the second transfer robot, which carries out the liquid crystal panel 2 from the tray 3 placed on the tray stages 6, 7; and the supply unit 10, which receives the liquid crystal panel 2 from the robot 9 and supplies it to the processing device 15. The tray carriers 6 and 7 are arranged on the rear side of the conveyors 4 and 5. The supply unit 10 is arranged behind the tray stages 6 and 7. In addition, the transport system 1 includes a main body frame 11 as a first frame provided with conveyors 4, 5, tray stages 6, 7, a robot 8 and a supply unit 10, and a main body frame as a second frame provided with a robot 9 12. The main body frame 11 is formed in a flat rectangular parallelepiped shape elongated in the front-rear direction and low in height. The upper surface 11a of the main body frame 11 is formed in a plane shape orthogonal to the vertical direction, and the upper surface 11a of the main body frame 11 is provided with conveyors 4, 5, tray stages 6, 7, robots 8 and a supply unit 10. The upper surface 11a of this form is the installation surface on which the robot 8 is installed. The main body frame 12 is a door-shaped frame formed into a substantially door-shaped frame. The width in the left and right direction of the main body frame 12 is wider than the width in the left and right direction of the main body frame 11, and the width in the front and back direction of the main body frame 12 is shorter than the length in the front and back direction of the main body frame 11. The height of the main body frame 12 is higher than the height of the main body frame 11, and the main body frame 12 has an upper surface portion 12 a disposed on the upper side of the upper surface 11 a of the main body frame 11. The upper surface portion 12a is arranged above the conveyors 4 and 5, the tray stages 6, 7, the robot 8 and the supply unit 10. The main body frame 12 is arranged to straddle the main body frame 11 when viewed from the front-rear direction. That is, the main body frame 12 is provided so as to straddle the main body frame 11 in the left-right direction. In addition, the main body frame 12 is provided so as to straddle the rear end portion of the main body frame 11. The robot 9 is provided on the upper surface portion 12 a of the main body frame 12. The upper surface part 12a of this form is an installation part where the robot 9 is installed. (Conveyor structure and operation) Fig. 3 is a perspective view of the split conveyor 20 shown in Fig. 1. FIG. 4 is a schematic diagram for explaining the structure of the layer number detection mechanism 29 shown in FIG. 3 and the structure of the tray holding portion 39 shown in FIG. 1. The conveyors 4 and 5 are roller conveyors with a plurality of rollers. The conveyor 4 and the conveyor 5 are arranged adjacent to each other in the left-right direction. The conveyor 4 transports the stacked pallets 3 to the rear side, and the conveyor 5 transports the stacked pallets 3 to the front side. That is, the conveyor 4 conveys the tray 3 in a direction approaching the tray stages 6 and 7 and the conveyor 5 conveys the tray 3 in a direction away from the tray stages 6 and 7. A plurality of liquid crystal panels 2 are stored on the tray 3 conveyed by the conveyor 4. On the other hand, the tray 3 transported by the conveyor 5 does not contain the liquid crystal panel 2 and the tray 3 transported by the conveyor 5 is an empty tray. The conveyor 4 of this form is a supply side conveyor, and the conveyor 5 is a discharge side conveyor. In addition, the conveyors 4 and 5 may also be belt conveyors. The conveyor 4 is composed of a plurality of divided conveyors 16 to 20 divided in the front-rear direction. The conveyor 4 of this form is composed of five divided conveyors 16-20. The dividing conveyors 16 to 20 are arranged in order from the front side to the rear side. Likewise, the conveyor 5 is composed of five divided conveyors 21 to 25 divided in the front-rear direction. The dividing conveyors 21-25 are arranged in order from the front side to the rear side. Each of the split conveyors 16-25 is equipped with a motor and a power transmission mechanism that transmits the power of the motor to the drum, and the split conveyors 16-25 can be driven individually. The width of the dividing conveyors 16-25 in the front-rear direction is wider than the width of the tray 3 in the front-rear direction. Specifically, the width of the dividing conveyors 16-25 in the front-rear direction is slightly wider than the width of the tray 3 in the front-rear direction. On the dividing conveyor 16, the pallets 3 in a stacked state transported by the operator from a shelf (not shown) for temporary placement are placed. The pallets 3 placed in the stacked state of the dividing conveyor 16 are conveyed to the rear side by the conveyor 4. The stacked pallets 3 conveyed to the dividing conveyor 20 are unstacked by the robot 8 as described later. In addition, on the dividing conveyor 25, the empty pallets 3 are stacked by the robot 8 as described later. When the tray 3 is stacked to a specific number of layers, the tray 3 in the stacked state is transported to the front side by the conveyor 5. The stacked pallets 3 conveyed to the dividing conveyor 21 are conveyed to the shelf for empty pallets by the operator. In addition, when the tray 3 in the stacked state is placed on the split conveyor 16, the tray 3 in the stacked state is usually placed on at least any one of the split conveyors 17-20 of the split conveyors 17-20. In addition, when the empty trays 3 are stacked on the split conveyor 25, the empty trays 3 in the stacked state may be placed on at least any one of the split conveyors 21-24. The split conveyor 20 arranged on the rearmost side of the conveyor 4 is provided with a guide member 27 (refer to FIG. 3) that restricts the movement of the tray 3 in the left-right direction. The guide members 27 are arranged on both sides of the dividing conveyor 20 in the left-right direction. The distance between the guide surface of the guide member 27 arranged on the right side and the guide surface of the guide member 27 arranged on the left side in the left-right direction is approximately equal to the width of the tray 3 in the left-right direction. In addition, the dividing conveyor 20 includes abutting members 28 with which the rear end of the tray 3 abuts. The abutting member 28 is arranged at the rear end of the dividing conveyor 20. That is, the contact member 28 is arranged at the downstream end in the direction in which the conveyor 4 conveys the tray 3. In this form, the conveyor 4 transports the tray 3 to the rear side before the robot 8 transports the tray 3 to the tray stages 6 and 7 and makes the tray 3 abut against the contact member 28. That is, when the robot 8 transports the pallet 3 of the pallet stages 6, 7 each time the pallet 3 is transported to the rear side until it abuts against the abutting member 28, the robot 8 is moved to the pallet stage 6, 7 Transfer of pallet 3 of 7. A layer number detection mechanism 29 for detecting the number of layers of the tray 3 on the conveyor 4 is installed on the dividing conveyor 20. The layer number detection mechanism 29 is installed on both ends of the split conveyor 20 in the left-right direction. As shown in FIGS. 3 and 4, the layer number detection mechanism 29 includes a sensor 30 for detecting the presence or absence of the tray 3, and an elevating mechanism 31 for raising and lowering the sensor 30. The sensor 30 is a reflective optical sensor, and the light-emitting element of the sensor 30 emits light toward the center of the split conveyor 20 in the left-right direction. The lifting mechanism 31 includes a motor 32, a ball screw (not shown) that converts the rotational movement of the motor 32 into linear movement in the vertical direction, and the like. In addition, the sensor 30 may be a transmissive optical sensor, or a proximity sensor. When detecting the number of layers of the tray 3 on the conveyor 4 by the layer number detecting mechanism 29, after the sensor 30 is moved to the upper limit position, the sensor 30 is lowered until the tray 3 is detected by the sensor 30. Furthermore, based on the rotation position of the motor 32 when the pallet 3 is detected by the sensor 30, the number of layers of the pallet 3 on the conveyor 4 is detected. In addition, the layer number detection mechanism 29 is not installed in the division conveyor 25, but the layer number detection mechanism 29 may be installed in the division conveyor 25. (Configuration of the pallet stage) One tray 3 is placed on the pallet stages 6 and 7. The tray stages 6 and 7 are fixed to the body frame 11. The tray stage 6 and the tray stage 7 are arranged with a certain interval in the left-right direction. The pallet stage 6 is arranged at approximately the same position as the conveyor 4 in the left-right direction, and the pallet stage 7 is arranged at approximately the same position as the conveyor 5 in the left-right direction. In addition, the pallet carrier 6 is arranged immediately behind the dividing conveyor 20, and the pallet carrier 7 is arranged immediately behind the dividing conveyor 25. The upper surfaces of the tray stages 6, 7 are formed in a planar shape orthogonal to the up-down direction. The upper surfaces of the tray stages 6 and 7 are arranged above the upper surfaces of the conveyors 4 and 5. (Configuration and Action of Robot) Fig. 5 is a perspective view of the robot 9 shown in Fig. 1. The robot 8 is a so-called 3-axis orthogonal robot. The robot 8 includes: a main body frame 35 formed in a door shape; a movable frame 36 that is held by the main body frame 35 so as to be slidable in the left-right direction relative to the main body frame 35; and a movable frame 37 that is movable relative to the movable frame 36 is held by the movable frame 36 in a manner of sliding forward and backward; the movable frame 38 is held by the movable frame 37 so as to be slidable in the up and down directions relative to the movable frame 37; and the tray holding portion 39 is mounted on the movable frame 38. In addition, the robot 8 includes a drive mechanism that slides the movable frame 36 in the left and right directions, a drive mechanism that slides the movable frame 37 in the forward and backward directions, and a drive mechanism that slides the movable frame 38 in the vertical direction. The height of the main body frame 35 is higher than the height of the conveyors 4 and 5. The main body frame 35 is arranged so as to straddle the conveyors 4 and 5 arranged adjacently in the left-right direction when viewed from the front-rear direction. That is, the main body frame 35 is arranged so as to straddle the conveyors 4 and 5 in the left-right direction. Moreover, the main body frame 35 is arrange|positioned so that it may straddle the rear end side part of the division conveyor 19, 24, and the front end side part of the division conveyor 20, 25. The movable frame 36 is installed on the upper surface side of the main body frame 35 and is arranged on the upper side of the conveyors 4 and 5. In addition, the movable frame 36 is arranged above the pallet 3 placed on the conveyors 4 and 5 in a stacked state. The movable frame 37 is installed on the right side of the movable frame 36. The movable frame 38 is attached to the rear end side of the movable frame 37. In addition, the main body frame 35 is fixed to the upper surface 11a so as to stand up from the upper surface 11a of the main body frame 11. That is, the robot 8 is installed on the upper surface 11a so as to stand up from the upper surface 11a. The tray holding portion 39 is installed at the lower end of the movable frame 38. As shown in FIG. 4, the tray holding part 39 includes a plurality of suction parts 40 for sucking the tray 3, claws 41 for supporting the tray 3 from below, and a claw moving mechanism 42 for moving the claws 41. The suction part 40 contacts the upper surface of the tray 3 and vacuum suctions the tray 3. The claws 41 are arranged at the center position in the front and rear direction of the tray holding portion 39 and on both sides in the left and right direction. The claw moving mechanism 42 is an air cylinder, and moves the claw 41 in the left-right direction. When the robot 8 conveys the pallet 3, the claw 41 is moved inward in the left-right direction until the claw 41 is arranged below the pallet 3 to be conveyed. When the robot 8 transports the tray 3, the suction unit 40 sucks and holds the upper surface of the tray 3. The robot 8 transports the pallets 3 from the conveyor 4 to the pallet stages 6 and 7 and conveys the pallets 3 from the pallet stages 6 and 7 to the conveyor 5. Specifically, the robot 8 transports the stacked pallets 3 conveyed to the dividing conveyor 20 to the pallet stage 6 or the pallet stage 7 one by one, and unstacks the stacked pallets 3 on the dividing conveyor 20. In addition, the robot 8 transports the empty pallet 3 from the pallet carrier 6 or the pallet carrier 7 to the dividing conveyor 25, and stacks the pallets 3 on the dividing conveyor 25 until the pallets 3 stacked on the dividing conveyor 25 The number of layers becomes a specific number of layers. The robot 9 is a so-called parallel connection robot. The robot 9 includes: a main body 45; three links 46 connected to the main body 45; three arm parts 47 connected to each of the three links 46; a head unit 48 as a movable part, which Connected to the three arm portions 47; and the panel holding portion 49, which is mounted on the head unit 48. The body part 45 is fixed to the upper surface part 12a of the body frame 12. In addition, the robot 9 is arranged below the upper surface portion 12a. That is, the robot 9 is installed in the upper surface part 12a so that it may hang over the upper surface part 12a. In addition, the main body part 45 is arranged above the tray stages 6 and 7 and is arranged on the rear side of the main body frame 35 of the robot 8. The three links 46 are connected to the main body portion 45 so as to extend substantially radially at substantially equal angular intervals to the outer peripheral side of the main body portion 45. That is, the three links 46 are connected to the main body 45 so as to extend substantially radially at a pitch of approximately 120° toward the outer peripheral side of the main body 45. In addition, the base end sides of the three links 46 are rotatably connected to the main body 45. A motor 50 with a reducer as a rotating drive mechanism for rotating the connecting rod 46 is arranged at the connecting portion between the main body 45 and the connecting rod 46. The robot 9 of this form includes three motors 50 that rotate each of the three links 46. The output shaft of the motor 50 is fixed to the base end side of the connecting rod 46. The base end side of the arm 47 is rotatably connected to the distal end side of the link 46. Specifically, the arm portion 47 includes two linear arms 52 parallel to each other, and the base end side of each of the two arms 52 is rotatably connected to the distal end side of the link 46. The head unit 48 is rotatably connected to the end sides of the three arm parts 47. That is, the head unit 48 is rotatably connected to the end side of the six arms 52. The panel holding portion 49 is installed at the lower end of the head unit 48. The panel holding portion 49 includes a plurality of suction portions for vacuum suction of the liquid crystal panel 2, and the upper surface of the liquid crystal panel 2 is sucked by the suction portion to hold the liquid crystal panel 2. In addition, a motor 53 is attached to the upper end of the head unit 48. The panel holding portion 49 is connected to the motor 53 and can be rotated in the upper and lower directions as the axis of rotation by the power of the motor 53. In the robot 9, by individually driving the three motors 50, the head unit 48 can be moved to any position in the up-down direction, the left-right direction and the front-rear direction in a specific area, and the head unit 48 can maintain a certain posture. The state (specifically, the state in which the panel holding portion 49 is held toward the lower side) moves. The robot 9 carries out the liquid crystal panels 2 from the tray 3 placed on the tray stage 6 or the tray 3 placed on the tray stage 7 one by one. Specifically, the robot 9 unloads the liquid crystal panel 2 from the tray 3 one by one until the tray 3 placed on the tray stages 6 and 7 becomes empty. Moreover, the robot 9 conveys the liquid crystal panel 2 carried out from the tray 3 to the panel stage 64 mentioned later. (Configuration and Operation of Supply Unit) Fig. 6 is a perspective view of the supply unit 10 shown in Fig. 1. FIG. 7 is a top view of the supply unit 10 shown in FIG. 6. The supply unit 10 includes: a data reading device 56 that reads data recorded on the liquid crystal panel 2; an alignment device 57 that performs alignment of the liquid crystal panel 2 before reading the data of the liquid crystal panel 2 by the data reading device 56 Robot 58, which transports the liquid crystal panel 2 after reading the data with the data reading device 56 to the processing device 15; ionizer (static removal device) 59, which removes static electricity from the liquid crystal panel 2 transported to the processing device 15; The conveying device 60 conveys the liquid crystal panel 2 aligned by the alignment device 57 to the robot 58; the robot 61 conveys the liquid crystal panel 2 aligned by the alignment device 57 to the conveying device 60; and the base plate 62, It places and fixes these structures. The alignment device 57 is placed on the left end side of the base plate 62. The robot 58 is placed on the right end side of the base plate 62. The data reading device 56 and the ionizer 59 are placed at the center of the base plate 62 in the left-right direction. The transport device 60 is arranged between the alignment device 57 and the robot 58 in the left-right direction. The robot 61 is arranged adjacent to the right side of the alignment device 57. The base plate 62 is placed and fixed to the rear end portion of the upper surface 11 a of the main body frame 11. The alignment device 57 is provided with: a panel stage 64 on which the liquid crystal panel 2 carried out from the tray 3 on the tray stages 6 and 7 by the robot 9; a movable frame 65 which rotatably holds the panel stage 64; and movable Frame 66, which holds the movable frame 65 slidably to the left and right; fixed frame 67, which holds the movable frame 65 slidable in the forward and backward directions; rotating mechanism, which makes the panel carrier 64 relative to the movable frame 65 Rotation; drive mechanism, which makes the movable frame 65 slide in the left and right directions relative to the movable frame 66; and drive mechanism, which makes the movable frame 66 slide in the forward and backward directions relative to the fixed frame 67. The panel stage 64 includes a plurality of suction parts for vacuum suction of the liquid crystal panel 2 placed on the upper surface of the panel stage 64. The fixing frame 67 is fixed to the base plate 62. In addition, the alignment device 57 includes a camera 68 and an illumination 69 arranged above the panel stage 64. The lighting 69 is a strip-type lighting with a plurality of LEDs (Light Emitting Diodes) arranged in the front and rear directions. The illumination 69 is arranged on the lower side of the camera 68 and at a position beyond the field of view of the camera 68. In this form, the illumination 69 is arranged on the lower left side of the camera 68. The illumination 69 irradiates the panel stage 64 with indirect light. The camera 68 detects the edge of the liquid crystal panel 2 placed on the panel stage 64 (specifically, the corner of the liquid crystal panel 2 formed in a rectangular shape). The camera 68 includes a polarizing film. In addition, a polarizing plate (polarizing film) is attached to the upper surface of the panel stage 64. The phase of the polarizing film of the camera 68 and the phase of the polarizing plate of the panel stage 64 are shifted by 90°, which is reflected on the panel stage 64 of the camera 68 in black. Therefore, in this embodiment, the contrast between the edge of the liquid crystal panel 2 reflected on the camera 68 and the upper surface of the panel stage 64 becomes high, and the edge of the liquid crystal panel 2 can be accurately detected by the camera 68. When the alignment device 57 places the liquid crystal panel 2 carried out by the robot 9 on the panel stage 64, the camera 68 detects the edge of the liquid crystal panel 2. In addition, the alignment device 57 performs the rotating motion of the panel stage 64, the sliding motion of the movable frame 65 in the left and right directions, and the sliding motion of the movable frame 66 in the forward and backward directions based on the detection result of the edge of the liquid crystal panel 2 of the camera 68 At least any one action is required to align the liquid crystal panel 2. That is, the alignment device 57 detects the edge of the liquid crystal panel 2 and performs alignment of the liquid crystal panel 2 based on the detection result of the edge of the liquid crystal panel 2. The conveying device 60 includes: two sliding stages 70 on which the liquid crystal panel 2 is placed; a movable frame 71 that fixes the two sliding stages 70; and a fixed frame 72 that holds the movable frame 71 so as to be slidable in the left-right direction ; And a driving mechanism, which makes the movable frame 71 slide to the left and right relative to the fixed frame 72. The two sliding stages 70 are arranged adjacent to each other in the left-right direction. The sliding stage 70 is provided with a plurality of suction parts for vacuum suction of the liquid crystal panel 2 placed on the upper surface of the sliding stage 70. The fixing frame 72 is fixed to the base plate 62. The robot 61 is equipped with: a panel holding portion 73 that vacuum sucks and holds the liquid crystal panel 2; a movable frame 74 that holds the panel holding portion 73 so as to be slidable up and down; and a fixed frame 75 that is slidable in the left and right directions Holds the movable frame 74; an elevating mechanism that lifts and lowers the panel holding portion 73 relative to the movable frame 74; and a driving mechanism that makes the movable frame 74 slide in the left-right direction relative to the fixed frame 75. The fixing frame 75 is fixed to the base plate 62. The panel holding portion 73 is arranged at the same position as the sliding stage 70 in the front-rear direction. The robot 61 transfers the liquid crystal panel 2 aligned by the alignment device 57 from the panel stage 64 to the sliding stage 70. Specifically, the robot 61 vacuum sucks and holds the upper surface of the liquid crystal panel 2 on the panel stage 64 by the panel holding portion 73, and sequentially transports the liquid crystal panel 2 from the panel stage 64 to the 2 which moves to the left end side and stops. Each sliding stage 70 each. In addition, when the liquid crystal panel 2 is placed on each of the two sliding stages 70, the conveying device 60 moves the sliding stage 70 to the right to convey the liquid crystal panel 2 to the right end side of the conveying device 60. The panel holding portion 73 is arranged on the rear side of the camera 68. In addition, the detection of the edge of the liquid crystal panel 2 of the camera 68 is performed in a state where the panel stage 64 is arranged directly below the camera 68, and the liquid crystal panel 2 of the panel holding portion 73 is vacuum sucked to place the panel stage 64 on the panel holding The state directly below section 73 is performed. In this form, after the alignment device 57 detects the edge of the liquid crystal panel 2 by the camera 68, it aligns the liquid crystal panel 2 while moving the panel stage 64 from directly below the camera 68 to the front of the panel holding portion 73 Below. That is, in this embodiment, the alignment device 57 aligns the liquid crystal panel 2 while transporting the liquid crystal panel 2 to a position where it is vacuum sucked by the panel holding portion 73. The robot 58 is equipped with: two panel holding parts 76, which vacuum sucks and holds the liquid crystal panel 2, a movable frame 77 which holds the panel holding part 76 so as to be slidable up and down, and a fixed frame 78 which can be moved forward and backward. The movable frame 77 is held in a sliding manner; a lifting mechanism that lifts and lowers the panel holding portion 76 relative to the movable frame 77; and a driving mechanism that causes the movable frame 77 to slide in the forward and backward directions relative to the fixed frame 78. The two panel holding parts 76 are arranged adjacent to each other in the left-right direction. The distance between the two panel holding portions 76 in the left-right direction is equal to the distance between the two sliding stages 70 in the left-right direction. The fixing frame 78 is fixed to the base plate 62. The robot 58 transports the liquid crystal panel 2 transported by the transport device 60 to the right end side of the transport device 60 into the processing device 15. Specifically, the robot 58 vacuum sucks and holds the upper surface of each of the two liquid crystal panels 2 placed on each of the two sliding stages 70 with each of the two panel holding parts 76, and removes the two liquid crystal panels from the sliding stage 70. The liquid crystal panel 2 is carried into the processing device 15 together. The data reading device 56 is provided with: a camera 81, which reads optically readable data such as a two-dimensional code or one-dimensional code; a movable frame 82, which is equipped with a camera 81; and a movable frame 83, which can be slid up and down. The movable frame 82 is held in a manner; the movable frame 84 is slidable to the left and right to hold the movable frame 83; the fixed frame 85 is slidable to hold the movable frame 84 in the forward and backward directions; the lifting mechanism makes the movable frame 82 Lifting and lowering relative to the movable frame 83; a driving mechanism that slides the movable frame 83 in the left-right direction relative to the movable frame 84; and a driving mechanism that causes the movable frame 84 to slide in the front and rear directions relative to the fixed frame 85. The fixing frame 85 is fixed to the base plate 62. In addition, the data reading device 56 is provided with illumination for irradiating light to the liquid crystal panel 2. As described above, the data reading device 56 is placed at the center of the base plate 62 in the left-right direction. The data reading device 56 reads the data recorded on the liquid crystal panel 2 that is conveyed to the right by the conveying device 60 after the position of the alignment device 57 is adjusted. That is, the data reading device 56 reads the data of the liquid crystal panel 2 after being unloaded from the tray 3 placed on the tray stages 6 and 7 by the robot 9. When reading data by the data reading device 56, the conveying device 60 stops at a time in such a manner that the liquid crystal panel 2 is arranged under the camera 81. The data of the liquid crystal panel 2 read by the data reading device 56 is used as the individual data of the liquid crystal panel 2 of the read data, and is associated with the liquid crystal panel 2 of the read data. The ionizer 59 is arranged above the conveying device 60. Moreover, the ionizer 59 is arranged on the right side of the camera 81 and removes static electricity from the liquid crystal panel 2 after the data is read by the data reading device 56. (Main effects of this form) As explained above, in this form, the robot 8 transports the stacked pallets 3 that are transported to the dividing conveyor 20 to the pallet stages 6 and 7 one by one, and places them on the dividing conveyor 20. The stacked tray 3 is unstacked. That is, in this embodiment, the pallet 3 is automatically unstacked by the robot 8. Therefore, in this form, the difference in the stacking operation of the tray 3 can be suppressed, and the stacking operation of the tray 3 can be stabilized. Therefore, in this embodiment, damage to the liquid crystal panel 2 when the tray 3 is unfolded and stacked can be suppressed. In addition, in this form, the liquid crystal panel 2 placed on the tray 3 of the tray stages 6 and 7 is carried in by the robot 9 to the supply unit 10, and then transferred by the robot 61, the transfer device 60, and the robot 58 to the processing装置15。 Device 15. That is, in this embodiment, the liquid crystal panel 2 is automatically transported to the processing device 15 from the tray 3 after being unstacked. Therefore, in this aspect, the difference in the conveying operation of the liquid crystal panel 2 can be suppressed, and the conveying operation of the liquid crystal panel 2 can be stabilized. Therefore, in this aspect, damage to the liquid crystal panel 2 during the transportation of the liquid crystal panel 2 can be suppressed. In addition, in this embodiment, the tray 3 is automatically unstacked or stacked, and the liquid crystal panel 2 is automatically transported from the unstacked tray 3 to the processing device 15, so that personnel costs can be reduced. In this form, the data of the liquid crystal panel 2 read by the data reading device 56 is used as the individual data of the liquid crystal panel 2 of the read data, and is associated with the liquid crystal panel 2 of the read data. In addition, in this embodiment, the liquid crystal panel 2 after reading the data by the data reading device 56 is transported to the processing device 15. Therefore, in this embodiment, the liquid crystal panel 2 associated with the individual data can be supplied to the processing device 15. As a result, the processing device 15 can appropriately process the liquid crystal panel 2 based on the individual data. Furthermore, in this embodiment, the alignment device 57 aligns the liquid crystal panel 2 before the data reading device 56 reads the data of the liquid crystal panel 2, so the data reading device 56 can read the liquid crystal panel 2 reliably and accurately.的信息。 Information. In this form, the conveyor 4 that transports the stacked trays 3 to the back and the conveyor 5 that transports the stacked trays 3 to the front are separately provided, and the stacked trays with the liquid crystal panels 2 can be stored separately 3 to the rear side, and stacked empty tray 3 to the front side. Therefore, in this form, it can be shortened compared to the case where the tray 3 in the stacked state containing the liquid crystal panels 2 is transported to the rear side by a common conveyor, and the empty tray 3 in the stacked state is transported to the front side. The cycle of conveying system 1. Furthermore, in this embodiment, since two tray stages 6 and 7 are provided, for example, the robot 9 can carry out the removal of the liquid crystal panel 2 from the tray 3 on the tray stage 6 while the robot 8 carries out the liquid crystal panel 2 from the tray stage 7 The empty tray 3 is transferred to the conveyor 5 and the tray 3 containing the liquid crystal panel 2 is transferred to the tray stage 7 from the conveyor 4. In other words, while the robot 9 carries out the unloading of the liquid crystal panel 2 from the tray 3 on the tray stage 6, while the robot 8 carries out the replacement of the tray 3 on the tray stage 7. Therefore, in this form, the cycle of the conveying system 1 can be shortened compared to the case where the number of tray stages installed is one. In this form, the robot 8 is installed on the upper surface 11a so as to stand from the upper surface 11a of the main body frame 11, and the robot 9 is suspended from the upper surface portion 12a of the main body frame 12 disposed on the upper side of the upper end of the robot 8. The method is provided on the upper surface portion 12a. Therefore, in this form, it is easy to prevent the robot 8 and the robot 9 from interfering when the robot 8 and the robot 9 are operated at the same time. Furthermore, in this embodiment, since the robot 9 is a so-called parallel connection robot, the liquid crystal panel 2 can be carried out from the tray 3 at a relatively high speed. In this embodiment, the robot 8 carries out the transfer of the tray 3 from the conveyor 4 to the tray stages 6 and 7 and the transfer of the tray 3 from the tray stages 6 and 7 to the conveyor 5. Therefore, in this form, compared with the case where a robot that transfers the pallet 3 from the conveyor 4 to the pallet stages 6 and 7 is separately installed, and the robot that transfers the pallet 3 from the pallet stages 6 and 7 to the conveyor 5 is separately provided. , Can simplify the structure of the conveying system 1. In this form, the dividing conveyor 20 is equipped with the guide member 27 which restricts the movement of the tray 3 in the left-right direction. In addition, in this form, the dividing conveyor 20 is provided with an abutting member 28 for abutting the rear end of the tray 3, and the conveyor 4 transports the tray 3 to the rear side before the robot 8 transfers the tray 3 to the tray stages 6, 7 The tray 3 is brought into contact with the contact member 28. Therefore, in this aspect, the pallet 3 transported by the robot 8 to the front of the pallet stages 6 and 7 can be aligned on the conveyor 4. Therefore, in this aspect, the tray 3 can be accurately placed on the tray stages 6 and 7. In this form, a layer number detection mechanism 29 that detects the number of layers of the tray 3 on the conveyor 4 is installed on the dividing conveyor 20. Therefore, in this form, the robot 8 can be operated based on the detection result of the layer number detection mechanism 29, thereby preventing the tray holding portion 39 of the robot 8 from colliding with the tray 3. Furthermore, in this embodiment, since the conveyor 4 is composed of five divided conveyors 16 to 20 that can be driven individually, and the conveyor 5 is composed of five divided conveyors 21 to 25 that can be driven individually, it can be moved in the front-rear direction. Transport a plurality of stacked trays 3 individually. Therefore, in this form, the ease of use of the conveyors 4 and 5 is better. [Embodiment 2] (Overall structure of transport system) Fig. 8 is a side view of the transport system 91 of Embodiment 2 of the present invention. Fig. 9 is a top view showing the conveying system 91 from the F-F direction of Fig. 8. The conveying system 91 of this form is integrated and used in the manufacturing line of a small liquid crystal display similarly to the conveying system 1 of Embodiment 1. The conveying system 91 conveys the liquid crystal panel 2 discharged from the processing device 15. In addition, the transport system 91 transports the small liquid crystal panel 2. In this form, the conveyance system 91 is arrange|positioned behind the processing apparatus 15 side. In the following description, the same reference numerals are assigned to the same configuration as that of Embodiment 1, and the description is omitted or simplified. The transport system 91 includes four conveyors 94 to 97 that transport the tray 3 capable of storing the liquid crystal panel 2. The conveyors 94 to 97 convey the pallets 3 (stacked pallets 3) stacked in multiple layers in the forward and backward directions, similar to the conveyors 4 and 5 of the first embodiment. In addition, the transport system 91 includes robots 8 and 9 similar to the transport system 1. In addition, the lateral width of the main body frame 35 of the robot 8 of this embodiment is longer than the lateral length of the main body frame 35 of the robot 8 of the first embodiment, and the movable frame 36 of this embodiment has a greater amount of momentum in the lateral direction than the movable frame of the first embodiment. Momentum of 36. However, except for this point, the robot 8 of this embodiment has the same configuration as the robot 8 of the first embodiment. In addition, the transport system 91 includes four tray stages 98 to 101 on which the tray 3 is placed, and the liquid crystal panel 2 discharged from the processing device 15 and delivered to the discharge unit 102 of the robot 9. The tray stages 98-101 are arranged on the front side of the conveyors 94-97. The discharge unit 102 is arranged in front of the tray stages 98-101. In addition, the conveyance system 91 is equipped with main body frames 11 and 12 similarly to the conveyance system 1. (Conveyor configuration and operation) Like the conveyors 4 and 5, the conveyors 94 to 97 are roller conveyors equipped with a plurality of rollers. The conveyor 94, the conveyor 95, the conveyor 96, and the conveyor 97 are arranged in order from the right side to the left side, and are adjacently arranged in the left-right direction. The conveyors 94 and 95 transport the stacked trays 3 to the front side, and the conveyors 96 and 97 transport the stacked trays 3 to the rear side. That is, the conveyors 94 and 95 convey the tray 3 in a direction approaching the tray stages 98 to 101, and the conveyors 96 and 97 convey the tray 3 in a direction away from the tray stages 98 to 101. The tray 3 conveyed by the conveyors 94, 95 does not contain the liquid crystal panel 2, so the tray 3 conveyed by the conveyors 94, 95 is an empty tray. On the other hand, a plurality of liquid crystal panels 2 are stored in the tray 3 conveyed by the conveyors 96 and 97. The conveyors 94 and 95 of this form are supply side conveyors, and the conveyors 96 and 97 are discharge side conveyors. In addition, the conveyors 94 to 97 may be belt conveyors or the like. The conveyors 94 and 95 are composed of three divided conveyors 18 to 20 divided in the front-rear direction. The dividing conveyors 18-20 are arranged in order from the rear side to the front side. Similarly, the conveyors 96 and 97 are composed of three divided conveyors 23 to 25 divided in the front-rear direction. The dividing conveyors 23-25 are arranged in order from the rear side to the front side. As described above, each of the split conveyors 18-20 and 23-25 has a motor and a power transmission mechanism that transmits the power of the motor to the drum, and the split conveyors 18-20, 23-25 can be driven individually. On the dividing conveyor 18, the empty pallets 3 in a stacked state transported by the operator from a shelf (not shown) for temporary placement are placed. The pallets 3 placed on the split conveyor 18 in the stacked state are transported to the front side by the conveyors 94 and 95. The pallets 3 transported to the stacking state of the dividing conveyor 20 are unstacked by the robot 8. In addition, the robot 8 stacks the trays 3 containing the liquid crystal panels 2 on the dividing conveyor 25. When stacking the tray 3 to a specific number of layers, the tray 3 in the stacked state is transported to the rear side by the conveyors 96 and 97. The stacked pallets 3 conveyed to the dividing conveyor 23 are conveyed by the operator to a shelf for temporary placement. In addition, when the stacked trays 3 are placed on the split conveyor 18, the stacked trays 3 are usually placed on at least one of the split conveyors 19, 20 of the split conveyors 19, 20. Moreover, when the trays 3 are stacked on the split conveyor 25, the trays 3 in a stacked state may be placed on at least one of the split conveyors 23, 24 of the split conveyors 23, 24. As in the first embodiment, the dividing conveyor 20 includes a guide member 27. In addition, the dividing conveyor 20 includes abutting members 28. The abutting member 28 is arranged at the front end of the dividing conveyor 20. That is, the abutting member 28 is arranged at the downstream end in the direction in which the conveyors 94 and 95 convey the tray 3. As in the first embodiment, the conveyors 94 and 95 transport the tray 3 to the front side before the robot 8 transports the tray 3 to the tray stages 98 to 101 and bring the tray 3 into contact with the contact member 28. In addition, the dividing conveyor 20 is equipped with a layer number detection mechanism 29 as in the first embodiment. (Configuration and operation of the tray stage) Fig. 10 is a perspective view of the tray stages 98 to 101 shown in Fig. 9. One tray 3 is placed on the tray stages 98-101. The upper surfaces of the tray stages 98 to 101 are formed in a planar shape orthogonal to the vertical direction. In addition, the upper surfaces of the tray stages 98-101 are arranged above the upper surfaces of the conveyors 94-97. The tray stages 98 and 99 are fixed to the main body frame 11. The tray stage 98 and the tray stage 99 are arranged adjacent to each other in the left-right direction. In this aspect, the tray stage 98 is arranged on the right side, and the tray stage 99 is arranged on the left side. In addition, the transport system 91 includes a stage moving mechanism 105 that moves the tray stage 100 in the left-right direction and the front-rear direction, and a stage moving mechanism 106 that moves the tray stage 101 in the left-right direction and the front-rear direction. That is, the transport system 91 includes two stage moving mechanisms 105 and 106 that move the two tray stages 100 and 101 individually. The tray stages 98 and 99 of this form are fixed tray stages, and the tray stages 100 and 101 are movable tray stages that can move in the left-right direction and the front-rear direction. The stage moving mechanism 105 includes a movable frame 107 that holds the tray stage 100 so as to be slidable in the left and right directions; a fixed frame 108 that holds the movable frame 107 so as to be slidable in the forward and backward directions; and a drive mechanism that makes the tray slidable The stage 100 slides in the left-right direction with respect to the movable frame 107; and a driving mechanism which slides the movable frame 107 in the front and rear directions with respect to the fixed frame 108. Similarly, the stage moving mechanism 106 includes: a movable frame 109 that holds the tray stage 101 so as to be slidable in the left and right directions; a fixed frame 110 that holds the movable frame 109 so as to be slidable in the forward and backward directions; and a drive mechanism, It slides the tray stage 101 in the left-right direction with respect to the movable frame 109; and a driving mechanism which slides the movable frame 109 in the front and rear directions with respect to the fixed frame 110. The stage moving mechanism 105 places the tray stage 100 at the first position where the tray stage 100 is arranged on the right side of the tray stage 98 (the position shown by the two-dot chain line in FIG. 9), and the tray stage 98 is placed in the front and rear direction. The right end part is moved between the second position (the position indicated by the solid line in FIG. 9) of the left end part of the tray carrier 100 before the right end part. That is, the stage moving mechanism 105 moves the tray stage 100 between a first position parallel to the tray stage 98 in the left-right direction and a second position partially overlapped with the tray stage 98 in the front-rear direction. The stage moving mechanism 106 places the tray stage 101 at the first position where the tray stage 101 is arranged on the left side of the tray stage 99 (the position shown by the two-dot chain line in FIG. 9), and the tray stage 99 is placed in the front and rear direction. The left-end side part is moved between the second position (the position shown by the solid line in FIG. 9) of the right-end side part of the tray carrier 101 before the placement. That is, the stage moving mechanism 106 moves the tray stage 101 between a first position side by side with the tray stage 99 in the left-right direction and a second position partially overlapped with the tray stage 99 in the front-rear direction. (Configuration and operation of the robot) As described above, the width of the main body frame 35 of the robot 8 of this form is longer than the length of the main body frame 35 of the robot 8 of the first embodiment. Momentum is greater than that of the movable frame 36 of the first embodiment. The main body frame 35 is installed so as to straddle the conveyors 94 to 97 in the left-right direction. Moreover, the main body frame 35 is arrange|positioned so that it may straddle the front end side part of the dividing conveyors 19, 24, and the rear end side part of the dividing conveyors 20, 25. The robot 8 conveys the pallets 3 from the conveyors 94 and 95 to the pallet stages 98 to 101, and conveys the pallets 3 from the pallet stages 98 to 101 to the conveyors 96 and 97. Specifically, the robot 8 transports the empty trays 3 in the stacked state conveyed to the dividing conveyor 20 to the tray stages 98 to 101 one by one, and unstacks the stacked trays 3 on the dividing conveyor 20. In addition, the robot 8 transports one tray 3 containing a specified number of liquid crystal panels 2 from the tray stages 98 to 101 to the dividing conveyor 25, and stacks the trays 3 on the dividing conveyor 25 until they are stacked on the dividing conveyor 25 The number of layers of tray 3 becomes a specific number of layers. In this embodiment, when the robot 8 transports the pallet 3 between the conveyors 94 to 97 and the pallet stage 100, the pallet stage 100 is arranged at the first position shown by the two-dot chain line in FIG. 9. Similarly, when the robot 8 conveys the pallet 3 between the conveyors 94 to 97 and the pallet stage 101, the pallet stage 101 is arranged at the first position shown by the two-dot chain line in FIG. 9. In addition, in this embodiment, the tray stages 100 and 101 arranged at the second position shown by the solid line in FIG. 9 are out of the operating range of the robot 8. The robot 9 loads the tray 3 placed on the tray stage 98, the tray 3 placed on the tray stage 99, the tray 3 placed on the tray stage 100, or the tray 3 placed on the tray stage 101 one by one into the LCD Panel 2. Specifically, the robot 9 loads in the liquid crystal panels 2 carried out from the panel stage 113 described later to the tray 3 placed on the tray stages 98 to 101 one by one. In addition, the robot 9 carries in the liquid crystal panel 2 until the specified number of liquid crystal panels 2 are stored in the tray 3. In this embodiment, when the liquid crystal panel 2 is carried in by the robot 9 to the tray 3 placed on the tray stage 100, the tray stage 100 is arranged at the second position shown by the solid line in FIG. 9. Similarly, when the liquid crystal panel 2 is carried in by the robot 9 to the tray 3 placed on the tray stage 101, the tray stage 101 is arranged at the second position shown by the solid line in FIG. 9. In addition, in this form, the tray stages 100 and 101 arranged at the first position shown by the two-dot chain line in FIG. 9 are beyond the operating range of the robot 9. (Configuration and Operation of Discharge Unit) FIG. 11 is a perspective view of the discharge unit 102 shown in FIG. 8. FIG. 12 is a top view of the discharge unit 102 shown in FIG. 11. The discharge unit 102 includes panel stages 111 to 113 on which the liquid crystal panel 2 is placed. The discharge unit 102 of this form includes: a pair (2) of panel stages 111 which are arranged adjacent to each other in the left-right direction; a pair of panel stages 112 which are arranged adjacent to each other in the left-right direction; and a pair of panel stages 113 Adjacent to the left and right. The panel stages 111 to 113 are fixed to the left end side of the base plate 114. The pair of panel stages 111 to 113 are arranged in sequence from the front side to the rear side at a certain distance. In addition, the pair of panel stages 111 to 113 are arranged at the same position in the left-right direction. The panel stages 111-113 are provided with a plurality of suction parts for vacuum suction of the liquid crystal panel 2 placed on the upper surface of the panel stages 111-113. In addition, the ejection unit 102 includes: a data reading device 116 that reads data recorded on the liquid crystal panel 2; a robot 117 that transports the liquid crystal panel 2 ejected from the processing device 15 to the panel stage 111; and a robot 118 that The liquid crystal panel 2 placed on the panel stage 111 is conveyed to the panel stages 112 and 113; and an ionizer 59, which removes static electricity from the liquid crystal panel 2 carried into the tray 3. These structures are placed and fixed on the base plate 114. The base plate 114 is placed and fixed to the front end portion of the upper surface 11 a of the main body frame 11. The ionizer 59 is arranged above the panel stage 111 to remove static electricity from the liquid crystal panel 2 placed on the panel stage 111. The robot 117 is equipped with: two panel holding parts 121, which vacuum suction and hold the liquid crystal panel 2; a movable frame 122 which holds the panel holding part 121 in a manner that can slide up and down; and a fixed frame 123 which can move left and right. The movable frame 122 is held in a sliding manner; a lifting mechanism that lifts and lowers the panel holding portion 121 relative to the movable frame 122; and a driving mechanism that causes the movable frame 122 to slide in the left-right direction relative to the fixed frame 123. The fixing frame 123 is fixed to the base plate 114. The two panel holding portions 121 are arranged in a state with a certain interval in the left-right direction. The two panel holding parts 121 are arranged at the same position as the panel stage 111 in the front-rear direction. The robot 117 vacuum sucks and holds the two liquid crystal panels 2 discharged from the processing device 15 by the panel holding portion 121, and transports them to the panel stage 111. In addition, the liquid crystal panel 2 discharged from the processing device 15 is aligned by an alignment mechanism provided inside the processing device 15. The robot 118 is equipped with: two panel holding parts 124, which vacuum suction and hold the liquid crystal panel 2; two panel holding parts 125, which vacuum suction and hold the liquid crystal panel 2; and a movable frame 126 which can slide up and down. Way to hold the panel holding parts 124, 125; a fixed frame 127, which holds the movable frame 126 in a manner that can slide forward and backward; a lifting mechanism, which lifts the panel holding parts 124, 125 relative to the movable frame 126; and a driving mechanism, which The movable frame 126 is slid in the forward and backward directions relative to the fixed frame 127. The fixing frame 127 is fixed to the base plate 114. The two panel holding parts 124 are arranged in a state with a specific interval in the left and right direction, and the two panel holding parts 125 are arranged in a state with a specific interval in the left and right direction. The panel holding portion 124 and the panel holding portion 125 are arranged in a state separated by a specific interval in the front-rear direction. In this form, the panel holding portion 124 is arranged on the front side, and the panel holding portion 125 is arranged on the rear side. The distance between the panel holding portion 124 and the panel holding portion 125 in the front-rear direction is equal to the distance between the panel stages 111-113 in the front-rear direction. In addition, the panel holding portions 124 and 125 are arranged at the same positions as the panel stages 111 to 113 in the left-right direction. The robot 118 sequentially transports the liquid crystal panel 2 placed on the panel stage 111 to the panel stage 112 and the panel stage 113. Specifically, the panel holding portion 124 transfers the liquid crystal panel 2 placed on the panel stage 111 to the panel stage 112, and the panel holding portion 125 transfers the liquid crystal panel 2 placed on the panel stage 112 to the panel stage 113. The liquid crystal panel 2 placed on the panel stage 113 is transferred by the robot 9 to the tray 3 placed on the tray stages 98 to 101. The data reading device 116 is provided with: two cameras 81; two movable frames 129, which hold each of the two cameras 81 so as to be slidable up and down; and a movable frame 130, which is held so as to be slidable in the left and right directions Two movable frames 129; a movable frame 131, which holds the movable frame 130 in a manner that can slide in the forward and backward directions; a fixed frame 132, which holds the movable frame 131 in a manner that can slide in the left and right directions; a lifting mechanism, which enables two cameras 81 each raises and lowers with respect to each of the two movable frames 129; a driving mechanism which slides each of the two movable frames 129 in the left-right direction with respect to the movable frame 130; and a driving mechanism which causes the movable frame 130 to slide relative to the movable frame 131 Sliding in the front-rear direction; and a driving mechanism that makes the movable frame 131 slide in the left-right direction relative to the fixed frame 132. The fixing frame 132 is fixed to the base plate 114. In addition, the data reading device 116 is provided with illumination for irradiating light to the liquid crystal panel 2. The data reading device 116 is placed at the center of the front and back direction of the base plate 114 and reads the data recorded by the liquid crystal panel 2 placed on the panel carrier 112. That is, the data reading device 116 reads the data of the liquid crystal panel 2 before the tray 3 carried by the robot 9 into the tray stages 98-101. The data of the liquid crystal panel 2 read by the data reading device 116 is used as the individual data of the liquid crystal panel 2 of the data to be read, and is associated with the liquid crystal panel 2 of the data to be read. (Main effect of this form) As described above, in this form, the robot 8 transports one tray 3 containing the liquid crystal panel 2 from the tray stages 98 to 101 to the dividing conveyor 25, and stacks the tray 3 on Split conveyor 25. That is, in this embodiment, the stacking of the pallets 3 is automatically performed by the robot 8. Therefore, in this form, the difference in the stacking operation of the tray 3 can be suppressed, and the stacking operation of the tray 3 can be stabilized. Therefore, in this embodiment, damage to the liquid crystal panel 2 when the tray 3 is stacked can be suppressed. In this form, the tray stages 100 and 101 can move between the first position shown by the two-dot chain line in FIG. 9 and the second position shown by the solid line in FIG. 9. Therefore, in this form, even if the pallet stages 100 and 101 arranged in the second position exceed the operating range of the robot 8, and the pallet stages 100 and 101 arranged in the first position exceed the operating range of the robot 9, the robot can be 8 The pallet 3 is transported between the conveyors 94-97 and the pallet stages 100 and 101, and the liquid crystal panel 2 is carried in by the robot 9 to the pallet 3 on the pallet stages 100 and 101. That is, in this embodiment, even if the movable range of the robot 8 or the movable range of the robot 8 is narrowed, the robot 8 can transport the pallet 3 between the conveyors 94 to 97 and the pallet stages 100 and 101, and the robot 9 The liquid crystal panel 2 is carried into the tray 3 on the tray stage 100, 101. In addition, in this embodiment, the same effects as in Embodiment 1 can be obtained. For example, in this embodiment, the liquid crystal panel 2 discharged from the processing device 15 is transferred to the tray stage 113 by the robots 117 and 118, and then transferred to the tray 3 on the tray stage 98 to 101 by the robot 9, so that the liquid crystal panel can be suppressed The difference in the conveying operation of 2 can make the conveying operation of the LCD panel 2 stable. Therefore, in this aspect, damage to the liquid crystal panel 2 during the transportation of the liquid crystal panel 2 can be suppressed. Also, for example, in this form, the data of the liquid crystal panel 2 read by the data reading device 116 is used as the individual data of the liquid crystal panel 2 of the read data, and the liquid crystal panel 2 of the read data is associated, and The liquid crystal panel 2 after reading the data by the data reading device 116 is carried into the tray 3 on the tray carrier 98-101, so the liquid crystal panel 2 associated with the individual data can be stored in the tray 3. [Variation of Embodiment 1] FIG. 13 is a perspective view of a supply unit 140 of a variation of Embodiment 1. FIG. 14 is a top view of the supply unit 140 shown in FIG. 13. In the transport system 1 of the first embodiment, small liquid crystal panels 2 are transported, but in the transport system 1, medium-sized liquid crystal panels 2 (for example, 15-inch liquid crystal panels 2) can also be transported. When the liquid crystal panel 2 transported by the transport system 1 is small, the cycle required in the general supply unit 10 is shortened compared to the case where the liquid crystal panel 2 transported by the transport system 1 is medium-sized. In order to shorten the cycle of the supply unit 10, the supply unit 10 includes a panel stage 64, movable frames 65 and 66, a fixed frame 67, and a robot 61. On the other hand, when the liquid crystal panel 2 transported by the transport system 1 is medium-sized, a supply unit 140 can be provided instead of the supply unit 10, and the supply unit 140 does not have a configuration equivalent to the panel stage 64, which is equivalent to movable The structure of the frames 65 and 66 is equivalent to the structure of the fixed frame 67 and the structure of the robot 61. Hereinafter, the structure of the supply unit 140 will be described. In addition, in the following description, the same reference numerals are attached to the same configuration as that of Embodiment 1, and the description is omitted or simplified. The supply unit 140 includes: a data reading device 146 that reads the data recorded on the liquid crystal panel 2; a robot 148 that transfers the liquid crystal panel 2 after reading the data by the data reading device 146 to the processing device 15; and an ionizer 59 , Which removes static electricity from the liquid crystal panel 2 conveyed to the processing device 15; and a conveying device 150, which conveys the liquid crystal panel 2 after the data is read by the data reading device 146 to the robot 148. The data reading device 146, the robot 148, the ionizer 59, and the conveying device 150 are placed and fixed on the base plate 152. The data reading device 146 is placed on the left end side of the base plate 152. The robot 148 is placed on the right end side of the base plate 152. The ionizer 59 is placed at the center of the base plate 152 in the left-right direction. The conveying device 150 is arranged between the data reading device 146 and the robot 148 in the left-right direction. The base plate 152 is placed and fixed to the rear end portion of the upper surface 11 a of the main body frame 11. In addition, the supply unit 140 is provided with two cameras 68 and two lights 69, which are used to align the liquid crystal panel 2 before reading the data of the liquid crystal panel 2 by the data reading device 146. The camera 68 and the illumination 69 are arranged on the front side of the conveying device 150. In addition, the camera 68 and the illumination 69 are arranged between the tray stage 6 and the tray stage 7 when viewed from the vertical direction. In addition, the camera 68 and the illumination 69 are placed on the base plate 153 fixed on the upper surface 11 a of the main body frame 11, and the camera 68 detects the edge of the liquid crystal panel 2 from the lower side of the liquid crystal panel 2. The camera 68 is placed on the right front end side of the base plate 153 and the left rear end side of the base plate 153 in order to detect two corners on a diagonal of the liquid crystal panel 2 formed in a rectangular shape. The two illuminators 69 are arranged between the two cameras 68 in the front-rear direction. The illumination 69 is arranged to emit light downward. When the edge of the liquid crystal panel 2 is detected by the camera 68, the light reflected by the base plate 153 (ie, indirect light) illuminates the liquid crystal panel 2. The data reading device 146 includes a camera 81 and a fixing frame 154 for fixing the camera 81. The fixing frame 154 is fixed to the base plate 152. In addition, the data reading device 146 is provided with illumination for irradiating light to the liquid crystal panel 2. The camera 81 reads the data recorded on the liquid crystal panel 2 from the lower side of the liquid crystal panel 2. The conveying device 150 includes: a sliding stage 155 on which the liquid crystal panel 2 is placed; a fixed frame 156 that holds the sliding stage 155 so as to be slidable in the left-right direction; and a drive mechanism that makes the sliding stage 155 relative to the fixed frame 156 slides to the left and right. The sliding stage 155 is provided with a plurality of suction parts for vacuum suction of the liquid crystal panel 2 placed on the upper surface of the sliding stage 155. The fixing frame 156 is fixed to the base plate 152. The robot 148 is equipped with: a panel holding part 158 which vacuum sucks and holds the liquid crystal panel 2; a movable frame 159 which holds the panel holding part 158 so as to be slidable up and down; and a movable frame 160 which is slidable in the left and right directions Holding the movable frame 159; the fixed frame 161, which holds the movable frame 160 in a slidable manner in the front and rear directions; the lifting mechanism, which lifts and lowers the panel holding portion 158 relative to the movable frame 159; the driving mechanism, which causes the movable frame 159 to move relative to the movable frame 159 The frame 160 slides in the left and right directions; and a driving mechanism that makes the movable frame 160 slide in the forward and backward directions relative to the fixed frame 161. The fixing frame 161 is fixed to the base plate 152. In this modified example, the robot 9 directly transports the liquid crystal panel 2 carried out from the tray 3 on the tray carrier 6 and 7 to the top of the camera 68. If the edge of the liquid crystal panel 2 is detected by the camera 68, the robot 9 will perform the alignment of the liquid crystal panel 2 based on the detection result of the edge of the liquid crystal panel 2 while conveying the liquid crystal panel 2 to the data reading device 146. In this modified example, the robot 9, the camera 68, and the lighting 69 constitute an alignment device for positioning the liquid crystal panel 2. The alignment device detects the edge of the liquid crystal panel 2 and is based on the detection result of the edge of the liquid crystal panel 2. Align the LCD panel 2. In addition, when the liquid crystal panel 2 is transported above the data reading device 146, the camera 81 reads the data of the liquid crystal panel 2. When the data of the liquid crystal panel 2 is read by the camera 81, the robot 9 transports the liquid crystal panel 2 to the sliding stage 155 that has moved to the left end and stops, and places the liquid crystal panel 2 on the sliding stage 155. When the liquid crystal panel 2 is placed on the sliding stage 155, the conveying device 150 moves the sliding stage 155 to the right and conveys the liquid crystal panel 2 to the right end side of the conveying device 150. The robot 148 vacuum sucks and holds the liquid crystal panel 2 conveyed by the conveying device 150 to the right end of the conveying device 150 by the panel holding portion 158, and conveys the liquid crystal panel 2 to the processing device 15 from the sliding stage 155. The ionizer 59 is disposed above the conveying device 150 and removes static electricity from the liquid crystal panel 2 conveyed by the conveying device 150. [Variation of Embodiment 2] FIG. 15 is a perspective view of a discharge unit 172 of a variation of Embodiment 2. FIG. 16 is a top view of the discharge unit 172 shown in FIG. 15. In the transport system 91 of the second embodiment, the small-sized liquid crystal panel 2 is transported, but in the transport system 91, the medium-sized liquid crystal panel 2 can also be transported. When the liquid crystal panel 2 is small, the cycle required in the discharge unit 102 is generally shorter than when the liquid crystal panel 2 is medium. Therefore, the structure of the discharge unit 172 provided when the liquid crystal panel 2 conveyed by the conveying system 91 is medium-sized can be different from the structure of the discharge unit 102 of the second embodiment. Hereinafter, the structure of the discharge unit 172 will be described. In addition, in the following description, the same reference numerals are assigned to the configurations common to the first and second embodiments, and the description is omitted or simplified. The discharge unit 172 includes a panel stage 173 on which the liquid crystal panel 2 is placed. The panel carrier 173 is fixed on the left rear end side of the base plate 174. The panel stage 173 is provided with a plurality of suction parts for vacuum suction of the liquid crystal panel 2 placed on the upper surface of the panel stage 173. In addition, the discharging unit 172 includes: a data reading device 175 that reads data recorded on the liquid crystal panel 2; a robot 176, a conveying device 177, and a robot 178 that convey the liquid crystal panel 2 discharged from the processing device 15 to the panel mount Table 173; and ionizer 59, which removes static electricity from the liquid crystal panel 2 carried into the tray 3. These structures are placed and fixed to the base plate 174. The data reading device 175 is arranged immediately behind the panel stage 173. The robot 176 is placed on the right end side of the base plate 174, and the robot 178 is placed on the left end side of the base plate 174. The ionizer 59 is placed at the center of the base plate 174 in the left-right direction. The conveying device 177 is arranged between the robot 176 and the robot 178 in the left-right direction. The base plate 174 is placed and fixed to the front end portion of the upper surface 11 a of the main body frame 11. The data reading device 175 includes a camera 81 and a fixing frame 179 for fixing the camera 81. The fixing frame 179 is fixed to the base plate 174. In addition, the data reading device 175 is provided with illumination for irradiating light to the liquid crystal panel 2. The camera 81 reads the data recorded on the liquid crystal panel 2 from the lower side of the liquid crystal panel 2. The conveying device 177 includes: a sliding stage 180 on which the liquid crystal panel 2 is placed; a fixed frame 181 that holds the sliding stage 180 so as to be slidable in the left-right direction; and a driving mechanism that makes the sliding stage 180 relative to the fixed frame 181 slides to the left and right. The sliding stage 180 is provided with a plurality of suction parts for vacuum suction of the liquid crystal panel 2 placed on the upper surface of the sliding stage 180. The fixing frame 181 is fixed to the base plate 174. The robot 176 is equipped with: a panel holding part 184 that vacuum sucks and holds the liquid crystal panel 2; a movable frame 185 that holds the panel holding part 184 so as to be slidable up and down; and a fixed frame 186 that can be slid to the left and right. Holds the movable frame 185; a lifting mechanism which lifts the panel holding portion 184 relative to the movable frame 185; and a drive mechanism which slides the movable frame 185 in the left-right direction relative to the fixed frame 186. The fixing frame 186 is fixed to the base plate 174. The panel holding portion 184 is disposed at the same position as the sliding stage 180 in the front-rear direction. The robot 176 vacuum sucks and holds the liquid crystal panel 2 discharged from the processing device 15 by the panel holding portion 184, and transports the liquid crystal panel 2 to the sliding stage 180 that moves to the right end side and stops, and places the liquid crystal panel 2 on the sliding stage 180. The robot 178 is provided with: a panel holding part 187 which vacuum sucks and holds the liquid crystal panel 2; a movable frame 188 which holds the panel holding part 187 so as to be slidable up and down; and a fixed frame 189 which is slidable in the forward and backward directions Holds the movable frame 188; an elevating mechanism that lifts and lowers the panel holding portion 187 relative to the movable frame 188; and a driving mechanism that causes the movable frame 188 to slide in the forward and backward directions relative to the fixed frame 189. The fixing frame 188 is fixed to the base plate 174. The panel holding portion 187 is arranged at the same position as the panel carrier 173 in the left-right direction. The robot 178 vacuum sucks and holds the liquid crystal panel 2 placed on the sliding stage 180 that moves to the left end side and stops by the panel holding portion 187, and conveys it to the panel stage 173. In this modified example, the robot 9 transports the liquid crystal panel 2 placed on the panel stage 173 to above the data reading device 175. When the liquid crystal panel 2 is transported above the data reading device 175, the camera 81 reads the data of the liquid crystal panel 2. When the data of the liquid crystal panel 2 is read by the camera 81, the robot 9 directly transports the liquid crystal panel 2 to the tray 3 placed on the tray stages 98-101. The ionizer 59 is arranged above the conveying device 177 and removes static electricity from the liquid crystal panel 2 conveyed by the conveying device 177. [Other Embodiments] The above-mentioned embodiment is an example of a preferable embodiment of the present invention, but it is not limited to this, and various changes can be implemented without changing the gist of the present invention. In the above form, the conveying system 1 conveys the liquid crystal panel 2 supplied to the processing device 15, and the conveying system 91 conveys the liquid crystal panel 2 discharged from the processing device 15. However, the conveying system applying the present invention can also convey the liquid crystal panel 2 supplied to the processing device 15 The liquid crystal panel 2 and the liquid crystal panel 2 discharged from the processing device 15 are transported. The transport system in this case includes robots 8 and 9 and, like the transport system 91, includes four conveyors 94 to 97, four tray stages 98 to 101, and two stage moving mechanisms 105 and 106. In addition, the transport system in this case includes, for example, a camera 68, an illumination 69, a data reading device 56 and the like. In this case, the conveyors 94 to 97 transport the tray 3 in the stacked state in which the liquid crystal panels 2 are stored. The robot 8 transports the tray 3 containing the liquid crystal panel 2 between the conveyors 94-97 and the tray stages 98-101. That is, the robot 8 unfolds and stacks the tray 3 containing the liquid crystal panel 2. The robot 9 carries out the carrying out of the liquid crystal panel 2 from the tray 3 on the tray stages 98-101 and the carrying in of the liquid crystal panel 2 to the tray 3 on the tray stages 98-101. Also, for example, the data reading device 56 reads the data of the liquid crystal panel 2 (liquid crystal panel 2 supplied to the processing device 15) after being unloaded from the tray 3 by the robot 9, and the liquid crystal panel 2 carried into the tray 3 by the robot 9 ( Data of the liquid crystal panel 2) discharged from the processing device 15. Moreover, in this case, it is preferable to set the tray stage (empty tray stage) on which the empty tray 3 is placed within the operating range of the robot 8. On the empty tray stage, for example, about three empty trays 3 are placed in a stacked state, and the robot 8 transfers the empty trays 3 from the empty tray stage to the tray stages 98 to 101 as needed. In addition, the robot 8 transfers the empty tray 3 on the tray stages 98 to 101 to the empty tray stage as needed. In the above form, one tray 3 is placed on the tray stages 6, 7, 98 to 101, but a plurality of trays 3 may be placed on the tray stages 6, 7, 98 without overlapping each other. ~101. Furthermore, in the above-mentioned form, the conveying system 1 has two tray stages 6, 7, and the conveying system 91 has four tray stages 98-101, but the conveying system 1 may have four tray stages, and the conveying system 91 has 2 tray carriers. In addition, the number of pallet stages provided in the conveying systems 1, 91 may be 3 or 5 or more. In addition, the number of pallet stages provided in the conveying systems 1, 91 may also be one. In the above form, the conveying system 1 has two conveyors 4 and 5, and the conveying system 91 has four conveyors 94-97. However, the conveying system 1 may have four conveyors and the conveying system 91 may have two conveyors. machine. In addition, the number of conveyors provided in the conveying systems 1, 91 may be 3 or 5 or more. In addition, the number of conveyors provided in the conveying systems 1, 91 may also be one. In the second embodiment, the pallet stages 100 and 101 arranged at the second position shown by the solid line in FIG. 9 are beyond the operating range of the robot 8, but the pallet stages 100 and 101 arranged at the second position may also be in the robot 8 within the range of motion. In this case, the stage moving mechanisms 105 and 106 are not required, and the tray stages 100 and 101 are fixed at the second position, for example. In addition, in the second embodiment, the pallet stages 100 and 101 arranged at the first position shown by the two-dot chain line in FIG. 9 exceed the operating range of the robot 9, but the pallet stages 100 and 101 arranged at the first position It can also be within the motion range of the robot 9. In this case, the stage moving mechanisms 105 and 106 are not required, and the tray stages 100 and 101 are fixed at the first position, for example. In the above-mentioned form, the conveyors 4, 5, and 94 to 97 are composed of a plurality of divided conveyors, but the conveyors 4, 5, and 94 to 97 may also be integrated conveyors. In addition, in Embodiment 1, the conveyor 4 and the conveyor 5 are arranged adjacent to each other in the left-right direction, but the conveyor 4 and the conveyor 5 may be arranged so as to overlap in the vertical direction. Similarly, in the second embodiment, the four conveyors 94-97 are arranged adjacent to each other in the left-right direction, but any two conveyors 94-97 and the remaining two conveyors may be selected from the four conveyors 94-97. The machines 94-97 are arranged in a way that they overlap up and down. In the above form, the robot 8 is a 3-axis orthogonal robot that can move the tray holding portion 39 in the up-down, left-right, and front-rear directions, but the robot 8 may also be capable of moving the tray-holding portion 39 in the left-right and front-rear directions. Moving 2-axis orthogonal robot. In this case, the conveyors 4, 5, 94 to 97 that are roller conveyors are equipped with an elevating mechanism for raising and lowering a plurality of rollers. In addition, the robot 8 may be a horizontal articulated robot. Furthermore, in the above-mentioned form, the robot 9 is a parallel connection robot, but the robot 9 may be a horizontal articulated robot. In this case, the robot 9 can be installed on the upper surface 11a in a manner of standing up from the upper surface 11a of the main body frame 11. In the above form, the robot 8 transfers the pallets 3 from the conveyors 4, 94, 95 to the pallet stages 6, 7, and 98 to 101, and from the pallet stages 6, 7, 98 to 101 to the conveyor 5. , 96, 97 pallets 3, but can also be separately installed from the conveyor 4, 94, 95 to the pallet 6, 7, 98-101 pallet 3, and self-pallet 6, 7. Robots that transport pallets 3 of conveyors 5, 96, 97 from 98 to 101. Moreover, in the above-mentioned form, the display panel conveyed by the conveying system 1 and 91 is the liquid crystal panel 2, but the display panel conveyed by the conveying system 1, 91 may be a display panel other than the liquid crystal panel 2. For example, the display panels transported by the transport systems 1 and 91 may also be organic EL (Electro Luminescence) panels.

1‧‧‧搬送系統 2‧‧‧液晶面板(顯示面板) 3‧‧‧托盤 4‧‧‧輸送機(供給側輸送機) 5‧‧‧輸送機(排出側輸送機) 6‧‧‧托盤載台 7‧‧‧托盤載台 8‧‧‧機器人(第1搬送機器人) 9‧‧‧機器人(第2搬送機器人) 10‧‧‧供給單元 11‧‧‧本體框架(第1框架) 11a‧‧‧上表面(設置面) 12‧‧‧本體框架(第2框架) 12a‧‧‧上表面部(設置部) 15‧‧‧處理裝置 16～25‧‧‧分割輸送機 27‧‧‧導引構件 28‧‧‧抵接構件 29‧‧‧層數檢測機構 30‧‧‧感測器 31‧‧‧升降機構 32‧‧‧馬達 35‧‧‧本體框架 36‧‧‧可動框架 37‧‧‧可動框架 38‧‧‧可動框架 39‧‧‧托盤固持部 40‧‧‧吸附部 41‧‧‧爪部 42‧‧‧爪移動機構 45‧‧‧本體部 46‧‧‧連桿 47‧‧‧臂部 48‧‧‧頭單元(可動部) 49‧‧‧面板固持部 50‧‧‧馬達(旋動驅動機構) 52‧‧‧臂 53‧‧‧馬達 56‧‧‧資料讀取裝置 57‧‧‧對準裝置 58‧‧‧機器人 59‧‧‧電離器(靜電去除裝置) 60‧‧‧搬送裝置 61‧‧‧機器人 62‧‧‧基底板 64‧‧‧面板載台 65‧‧‧可動框架 66‧‧‧可動框架 67‧‧‧固定框架 68‧‧‧相機 69‧‧‧照明 70‧‧‧滑動載台 71‧‧‧可動框架 72‧‧‧固定框架 73‧‧‧面板固持部 74‧‧‧可動框架 75‧‧‧固定框架 76‧‧‧面板固持部 77‧‧‧可動框架 78‧‧‧固定框架 81‧‧‧相機 82‧‧‧可動框架 83‧‧‧可動框架 84‧‧‧可動框架 85‧‧‧固定框架 91‧‧‧搬送系統 94‧‧‧輸送機(供給側輸送機) 95‧‧‧輸送機(供給側輸送機) 96‧‧‧輸送機(排出側輸送機) 97‧‧‧輸送機(排出側輸送機) 98‧‧‧托盤載台(固定托盤載台) 99‧‧‧托盤載台(固定托盤載台) 100‧‧‧托盤載台(可動托盤載台) 101‧‧‧托盤載台(可動托盤載台) 102‧‧‧排出單元 105‧‧‧載台移動機構 106‧‧‧載台移動機構 107‧‧‧可動框架 108‧‧‧固定框架 109‧‧‧可動框架 110‧‧‧固定框架 111～113‧‧‧面板載台 114‧‧‧基底板 116‧‧‧資料讀取裝置 117‧‧‧機器人 118‧‧‧機器人 121‧‧‧面板固持部 122‧‧‧可動框架 123‧‧‧固定框架 124‧‧‧面板固持部 125‧‧‧面板固持部 126‧‧‧可動框架 127‧‧‧固定框架 129‧‧‧可動框架 130‧‧‧可動框架 131‧‧‧可動框架 132‧‧‧固定框架 140‧‧‧供給單元 146‧‧‧資料讀取裝置 148‧‧‧機器人 150‧‧‧搬送裝置 152‧‧‧基底板 153‧‧‧基底板 154‧‧‧固定框架 155‧‧‧滑動載台 156‧‧‧固定框架 158‧‧‧面板固持部 159‧‧‧可動框架 160‧‧‧可動框架 161‧‧‧固定框架 172‧‧‧排出單元 173‧‧‧面板載台 174‧‧‧基底板 175‧‧‧資料讀取裝置 176‧‧‧機器人 177‧‧‧搬送裝置 178‧‧‧機器人 179‧‧‧固定框架 180‧‧‧滑動載台 181‧‧‧固定框架 184‧‧‧面板固持部 185‧‧‧可動框架 186‧‧‧固定框架 187‧‧‧面板固持部 188‧‧‧可動框架 189‧‧‧固定框架 E-E‧‧‧方向 F-F‧‧‧方向 X‧‧‧托盤之搬送方向 X1‧‧‧前側 X2‧‧‧後側 Y‧‧‧左右方向 Y1‧‧‧右側 Y2‧‧‧左側 1‧‧‧Transportation system 2‧‧‧LCD panel (display panel) 3‧‧‧Tray 4‧‧‧Conveyor (supply side conveyor) 5‧‧‧Conveyor (discharge side conveyor) 6‧‧‧Tray carrier 7‧‧‧Tray carrier 8‧‧‧Robot (1st transfer robot) 9‧‧‧Robot (2nd transfer robot) 10‧‧‧Supply unit 11‧‧‧Ontology frame (1st frame) 11a‧‧‧Upper surface (setting surface) 12‧‧‧Ontology frame (2nd frame) 12a‧‧‧Upper surface part (setting part) 15‧‧‧Processing device 16～25‧‧‧Splitting conveyor 27‧‧‧Guiding member 28‧‧‧Abutment member 29‧‧‧Layer Count Testing Institution 30‧‧‧Sensor 31‧‧‧Lifting mechanism 32‧‧‧Motor 35‧‧‧Ontology frame 36‧‧‧movable frame 37‧‧‧movable frame 38‧‧‧movable frame 39‧‧‧Tray holding part 40‧‧‧Adsorption part 41‧‧‧Claw 42‧‧‧Claw moving mechanism 45‧‧‧Main body 46‧‧‧Connecting rod 47‧‧‧Arm 48‧‧‧Head unit (movable part) 49‧‧‧Panel holding part 50‧‧‧Motor (rotating drive mechanism) 52‧‧‧arm 53‧‧‧Motor 56‧‧‧Data reading device 57‧‧‧Alignment device 58‧‧‧Robot 59‧‧‧Ionizer (static removal device) 60‧‧‧Conveying device 61‧‧‧Robot 62‧‧‧Base plate 64‧‧‧Panel Stage 65‧‧‧movable frame 66‧‧‧movable frame 67‧‧‧Fixed frame 68‧‧‧Camera 69‧‧‧Lighting 70‧‧‧Sliding Stage 71‧‧‧movable frame 72‧‧‧Fixed frame 73‧‧‧Panel holding part 74‧‧‧movable frame 75‧‧‧Fixed frame 76‧‧‧Panel holding part 77‧‧‧movable frame 78‧‧‧Fixed frame 81‧‧‧Camera 82‧‧‧movable frame 83‧‧‧movable frame 84‧‧‧movable frame 85‧‧‧Fixed frame 91‧‧‧Transportation system 94‧‧‧Conveyor (supply side conveyor) 95‧‧‧Conveyor (supply side conveyor) 96‧‧‧Conveyor (discharge side conveyor) 97‧‧‧Conveyor (discharge side conveyor) 98‧‧‧Tray Stage (Fixed Pallet Stage) 99‧‧‧Tray Stage (Fixed Pallet Stage) 100‧‧‧Tray carrier (movable tray) 101‧‧‧Tray carrier (movable tray) 102‧‧‧Discharge unit 105‧‧‧Carrier moving mechanism 106‧‧‧Carrier moving mechanism 107‧‧‧movable frame 108‧‧‧Fixed frame 109‧‧‧movable frame 110‧‧‧Fixed frame 111～113‧‧‧Panel Stage 114‧‧‧Base plate 116‧‧‧Data reading device 117‧‧‧Robot 118‧‧‧Robot 121‧‧‧Panel holding part 122‧‧‧movable frame 123‧‧‧Fixed frame 124‧‧‧Panel holding part 125‧‧‧Panel holding part 126‧‧‧movable frame 127‧‧‧Fixed frame 129‧‧‧movable frame 130‧‧‧movable frame 131‧‧‧movable frame 132‧‧‧Fixed frame 140‧‧‧Supply unit 146‧‧‧Data reading device 148‧‧‧Robot 150‧‧‧Conveying device 152‧‧‧Base plate 153‧‧‧Base plate 154‧‧‧Fixed frame 155‧‧‧Sliding Stage 156‧‧‧Fixed frame 158‧‧‧Panel holding part 159‧‧‧movable frame 160‧‧‧movable frame 161‧‧‧Fixed frame 172‧‧‧Discharge unit 173‧‧‧Panel Stage 174‧‧‧Base plate 175‧‧‧Data reading device 176‧‧‧Robot 177‧‧‧Conveying device 178‧‧‧Robot 179‧‧‧Fixed frame 180‧‧‧Sliding Stage 181‧‧‧Fixed frame 184‧‧‧Panel holding part 185‧‧‧movable frame 186‧‧‧Fixed frame 187‧‧‧Panel holding part 188‧‧‧movable frame 189‧‧‧Fixed frame E-E‧‧‧ direction F-F‧‧‧direction X‧‧‧The conveying direction of the pallet X1‧‧‧Front side X2‧‧‧Back Y‧‧‧Left and right direction Y1‧‧‧right Y2‧‧‧Left

圖1係本發明之實施形態1之搬送系統之側視圖。 圖2係自圖1之E-E方向顯示搬送系統之俯視圖。 圖3係圖1所示之分割輸送機之立體圖。 圖4係用以說明圖3所示之層數檢測機構之構成及圖1所示之托盤固持部之構成之概略圖。 圖5係圖1所示之第2搬送機器人之立體圖。 圖6係圖1所示之供給單元之立體圖。 圖7係圖6所示之供給單元之俯視圖。 圖8係本發明之實施形態2之搬送系統之側視圖。 圖9係自圖8之F-F方向顯示搬送系統之俯視圖。 圖10係圖9所示之固定托盤載台及可動托盤載台之立體圖。 圖11係圖8所示之排出單元之立體圖。 圖12係圖11所示之排出單元之俯視圖。 圖13係實施形態1之變化例之供給單元之立體圖。 圖14係圖13所示之供給單元之俯視圖。 圖15係實施形態2之變化例之排出單元之立體圖。 圖16係圖15所示之排出單元之俯視圖。Fig. 1 is a side view of the conveying system according to the first embodiment of the present invention. Fig. 2 is a top view showing the conveying system from the direction E-E in Fig. 1. Figure 3 is a perspective view of the split conveyor shown in Figure 1. 4 is a schematic diagram for explaining the structure of the layer number detection mechanism shown in FIG. 3 and the structure of the tray holding portion shown in FIG. 1. Fig. 5 is a perspective view of the second transport robot shown in Fig. 1. Fig. 6 is a perspective view of the supply unit shown in Fig. 1. Fig. 7 is a top view of the supply unit shown in Fig. 6; Fig. 8 is a side view of the conveying system according to the second embodiment of the present invention. Fig. 9 is a top view showing the conveying system from the F-F direction of Fig. 8; Fig. 10 is a perspective view of the fixed tray carrier and the movable tray carrier shown in Fig. 9. Fig. 11 is a perspective view of the discharge unit shown in Fig. 8. Fig. 12 is a top view of the discharge unit shown in Fig. 11. Fig. 13 is a perspective view of a supply unit according to a modification of the first embodiment. Fig. 14 is a top view of the supply unit shown in Fig. 13. Fig. 15 is a perspective view of a discharge unit according to a modification of the second embodiment. Fig. 16 is a top view of the discharge unit shown in Fig. 15.

1‧‧‧搬送系統 1‧‧‧Transportation system

2‧‧‧液晶面板(顯示面板) 2‧‧‧LCD panel (display panel)

3‧‧‧托盤 3‧‧‧Tray

4‧‧‧輸送機(供給側輸送機) 4‧‧‧Conveyor (supply side conveyor)

5‧‧‧輸送機(排出側輸送機) 5‧‧‧Conveyor (discharge side conveyor)

6‧‧‧托盤載台 6‧‧‧Tray carrier

7‧‧‧托盤載台 7‧‧‧Tray carrier

8‧‧‧機器人(第1搬送機器人) 8‧‧‧Robot (1st transfer robot)

9‧‧‧機器人(第2搬送機器人) 9‧‧‧Robot (2nd transfer robot)

10‧‧‧供給單元 10‧‧‧Supply unit

11‧‧‧本體框架(第1框架) 11‧‧‧Ontology frame (1st frame)

12‧‧‧本體框架(第2框架) 12‧‧‧Ontology frame (2nd frame)

15‧‧‧處理裝置 15‧‧‧Processing device

16~25‧‧‧分割輸送機 16~25‧‧‧Splitting conveyor

35‧‧‧本體框架 35‧‧‧Ontology frame

36‧‧‧可動框架 36‧‧‧movable frame

37‧‧‧可動框架 37‧‧‧movable frame

38‧‧‧可動框架 38‧‧‧movable frame

39‧‧‧托盤固持部 39‧‧‧Tray holding part

47‧‧‧臂部 47‧‧‧Arm

48‧‧‧頭單元(可動部) 48‧‧‧Head unit (movable part)

56‧‧‧資料讀取裝置 56‧‧‧Data reading device

57‧‧‧對準裝置 57‧‧‧Alignment device

58‧‧‧機器人 58‧‧‧Robot

59‧‧‧電離器(靜電去除裝置) 59‧‧‧Ionizer (static removal device)

60‧‧‧搬送裝置 60‧‧‧Conveying device

61‧‧‧機器人 61‧‧‧Robot

62‧‧‧基底板 62‧‧‧Base plate

64‧‧‧面板載台 64‧‧‧Panel Stage

X‧‧‧托盤之搬送方向 X‧‧‧The conveying direction of the pallet

X1‧‧‧前側 X1‧‧‧Front side

X2‧‧‧後側 X2‧‧‧Back

Y‧‧‧左右方向 Y‧‧‧Left and right direction

Y1‧‧‧右側 Y1‧‧‧right

Y2‧‧‧左側 Y2‧‧‧Left

Claims (9)

一種搬送系統，其特徵在於，其係進行對特定處理裝置供給之顯示面板之搬送及自特定處理裝置排出之上述顯示面板之搬送之至少任一者的搬送系統，且具備：輸送機，其搬送堆疊成複數層且可收納顯示面板之托盤；托盤載台，其載置上述托盤；第1搬送機器人，其於上述輸送機與上述托盤載台之間搬送上述托盤；第2搬送機器人，其進行自載置於上述托盤載台之上述托盤搬出上述顯示面板、及向載置於上述托盤載台之上述托盤搬入上述顯示面板的至少任一者；及資料讀取裝置，其讀取記錄於上述顯示面板之資料；且上述資料讀取裝置讀取由上述第2搬送機器人自上述托盤搬出後之上述顯示面板之上述資料、及由上述第2搬送機器人搬入至上述托盤前之上述顯示面板之上述資料的至少任一者，其中上述搬送系統作為托盤載台，具備：2個固定托盤載台，其等於與上述托盤之搬送方向及上下方向正交之左右方向相鄰配置；及2個可動托盤載台，其等可於上述托盤之搬送方向與左右方向移動；且具備：2個載台移動機構，其等使2個上述可動托盤載台個別地移動；且上述載台移動機構使上述可動托盤載台於在左右方向上與上述固定托盤載台並排之第1位置、與於上述托盤之搬送方向上與上述固定托盤載台之至少一部分重疊之第2位置之間移動。 A conveying system characterized in that it is a conveying system that performs at least one of conveying a display panel supplied to a specific processing device and conveying the above-mentioned display panel discharged from the specific processing device, and includes: a conveyor, which conveys Trays stacked in multiple layers and capable of accommodating display panels; a pallet stage, which places the pallets; a first transfer robot, which transfers the pallets between the conveyor and the pallet stage; a second transfer robot, which carries At least any one of carrying out the display panel from the tray placed on the tray carrier, and carrying the display panel into the tray placed on the tray carrier; and a data reading device that reads and records in the above The data of the display panel; and the data reading device reads the data of the display panel after being unloaded from the tray by the second transfer robot, and the data of the display panel before being transferred to the tray by the second transfer robot At least any one of the materials, wherein the above-mentioned conveying system is used as a pallet stage, and includes: two fixed pallet stages, which are arranged adjacent to the left and right directions orthogonal to the conveying direction of the pallet and the vertical direction; and two movable pallets A stage, which can move in the conveying direction and the left and right directions of the pallet; and is equipped with: two stage moving mechanisms that move the two movable tray stages individually; and the stage moving mechanism makes the movable The pallet stage moves between a first position side by side with the fixed pallet stage in the left-right direction and a second position overlapping with at least a part of the fixed pallet stage in the conveying direction of the pallet. 如請求項1之搬送系統，其中作為上述輸送機，具備：供給側輸送 機，其向接近上述托盤載台之方向搬送上述托盤；及排出側輸送機，其向遠離上述托盤載台之方向搬送上述托盤；且上述第1搬送機器人進行自上述供給側輸送機向上述托盤載台搬送上述托盤、及自上述托盤載台向上述排出側輸送機搬送上述托盤。 Such as the conveying system of claim 1, which, as the above conveyor, is equipped with: supply side conveying A machine for transporting the tray in a direction approaching the tray carrier; and a discharge side conveyor for transporting the tray in a direction away from the tray carrier; and the first transport robot carries out from the supply side conveyor to the tray The carrier transports the tray, and transports the tray from the tray carrier to the discharge side conveyor. 如請求項2之搬送系統，其中上述供給側輸送機具備：導引構件，其配置於與上述托盤之搬送方向及上下方向正交之左右方向之兩側，且限制上述托盤於左右方向之移動；及抵接構件，其配置於上述托盤之搬送方向之下游側，供上述托盤抵接；且於由上述第1搬送機器人向上述托盤載台搬送上述托盤前使上述托盤抵接於上述抵接構件。 Such as the conveying system of claim 2, wherein the supply side conveyor is provided with: guide members arranged on both sides of the left and right directions orthogonal to the conveying direction and the vertical direction of the pallet, and restrict the movement of the pallet in the left and right direction And an abutting member arranged on the downstream side of the conveying direction of the pallet for the pallet to abut; and before the pallet is conveyed by the first conveying robot to the pallet stage, the pallet is abutted on the abutting member. 如請求項1至3中任一項之搬送系統，其中具備複數個上述托盤載台。 Such as the conveying system of any one of claims 1 to 3, which has a plurality of the above-mentioned tray carriers. 如請求項1至3中任一項之搬送系統，其中具備：對準裝置，其檢測由上述第2搬送機器人自上述托盤搬出之上述顯示面板之邊緣，且基於上述顯示面板之邊緣之檢測結果而進行上述顯示面板之對位。 The conveying system of any one of claims 1 to 3, including: an alignment device that detects the edge of the display panel carried out from the tray by the second conveying robot, and based on the detection result of the edge of the display panel The alignment of the above-mentioned display panel is performed. 如請求項1至3中任一項之搬送系統，其中具備：層數檢測機構，其檢測上述輸送機上之上述托盤之層數；且上述層數檢測機構具備：感測器，其檢測上述托盤之有無；及升降機構，其使上述感測器升降。 Such as the conveying system of any one of claims 1 to 3, which includes: a layer number detection mechanism that detects the number of layers of the tray on the conveyor; and the layer number detection mechanism includes: a sensor that detects the above The presence or absence of a tray; and a lifting mechanism that lifts and lowers the above-mentioned sensor. 如請求項1至3中任一項之搬送系統，其中上述輸送機係由在上述托盤之搬送方向經分割且可個別驅動之複數個分割輸送機而構成。 Such as the conveying system of any one of claims 1 to 3, wherein the conveyor is composed of a plurality of divided conveyors that are divided in the conveying direction of the tray and can be driven individually. 如請求項1至3中任一項之搬送系統，其中具備供設置上述第1搬送機器人之第1框架、及供設置上述第2搬送機器人之第2框架；且於上述第1框架，形成有供設置上述第1搬送機器人之設置面；上述第2框架具備：設置部，其配置於較上述設置面更上側，且供設置上述第2搬送機器人；上述第1搬送機器人以自上述設置面立起之方式設置於上述設置面；上述第2搬送機器人以懸垂於上述設置部之方式設置於上述設置部。 For example, the transport system of any one of claims 1 to 3, which includes a first frame for installing the first transport robot and a second frame for installing the second transport robot; and the first frame is formed with The installation surface on which the first transport robot is installed; the second frame is provided with: an installation portion arranged on the upper side of the installation surface and on which the second transport robot is installed; the first transport robot is erected from the installation surface It is installed on the installation surface in a raised manner; the second transport robot is installed on the installation portion in a manner of hanging over the installation portion. 如請求項8之搬送系統，其中上述第2搬送機器人具備：本體部；複數條連桿，其等之基端側可旋動地連結於上述本體部；複數個臂部，其等之基端側各者可旋動地連結於複數條上述連桿之末端側各者；可動部，其可旋動地連結於複數個上述臂部之末端側；面板固持部，其安裝於上述可動部且固持上述顯示面板；及複數個旋動驅動機構，其使複數條上述連桿各者旋動；且複數條上述連桿以向上述本體部之外周側以大致等角度間距大致放射狀地延伸之方式連結於上述本體部；上述臂部具備相互平行之直線狀之2條臂；且2條上述臂各者之基端側可旋動地連結於上述連桿之末端側，且上述可動部可旋動地連結於2條上述臂之末端側；上述本體部固定於上述設置部。 Such as the transport system of claim 8, wherein the second transport robot includes: a main body; a plurality of links whose base ends are rotatably connected to the main body; and a plurality of arms, and their base ends Each side is rotatably connected to each of the end sides of the plurality of the above-mentioned links; the movable part is rotatably connected to the end sides of the plurality of the above-mentioned arm parts; the panel holding part is installed on the above-mentioned movable part and Holding the display panel; and a plurality of rotating drive mechanisms that rotate each of the plurality of links; and the plurality of links extend substantially radially toward the outer peripheral side of the main body at substantially equal angular intervals The arm is connected to the main body part; the arm part has two straight arms parallel to each other; and the base end side of each of the two arms is rotatably connected to the end side of the link, and the movable part can It is rotatably connected to the end sides of the two arms; the main body is fixed to the installation portion.
TW106122098A 2016-06-30 2017-06-30 Transport system TWI716611B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP??2016-130226 2016-06-30
JP2016130226A JP6791665B2 (en) 2016-06-30 2016-06-30 Transport system
WOPCT/JP2017/022534 2017-06-19
??PCT/JP2017/022534 2017-06-19
PCT/JP2017/022534 WO2018003573A1 (en) 2016-06-30 2017-06-19 Conveyance system

Publications (2)

Publication Number Publication Date
TW201805219A TW201805219A (en) 2018-02-16
TWI716611B true TWI716611B (en) 2021-01-21

Family

ID=60786003

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106122098A TWI716611B (en) 2016-06-30 2017-06-30 Transport system

Country Status (4)

Country Link
JP (1) JP6791665B2 (en)
CN (1) CN109417044B (en)
TW (1) TWI716611B (en)
WO (1) WO2018003573A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI869999B (en) * 2022-09-01 2025-01-11 瑞士商巴柏斯特麥克斯合資公司 Alignment module for irregular edges

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7195080B2 (en) * 2018-07-31 2022-12-23 日本電産サンキョー株式会社 Conveyor system
JP2020155628A (en) * 2019-03-20 2020-09-24 日本電産サンキョー株式会社 Tray transfer device and panel transfer system
JP2020167256A (en) * 2019-03-29 2020-10-08 日本電産サンキョー株式会社 Panel transfer device and panel transfer system
JP2020164282A (en) * 2019-03-29 2020-10-08 日本電産サンキョー株式会社 Panel transfer system
JP7219172B2 (en) * 2019-06-14 2023-02-07 日本電産サンキョー株式会社 inspection system
CN110491161A (en) * 2019-07-04 2019-11-22 安徽鸿杰威尔停车设备有限公司 A kind of AGV intelligent three-dimensional parking positioning system
JP7443151B2 (en) * 2020-04-30 2024-03-05 ニデックインスツルメンツ株式会社 Conveyance system
CN112660828B (en) * 2020-12-29 2022-03-08 飞马智科信息技术股份有限公司 Liquid crystal panel detection control method replacing Map sensor
CN113602820B (en) * 2021-07-16 2023-05-16 索菲亚家居(成都)有限公司 Automatic tray removing device for wood plate stack
CN113639638A (en) * 2021-08-30 2021-11-12 苏州天准科技股份有限公司 Multi-parameter detection equipment and method for 3C product
CN115520667B (en) * 2022-11-03 2023-04-04 云南柔控科技有限公司 Automatic pile up neatly system of tearing open of multiunit turnover case travelling bogie
CN117775749A (en) * 2024-02-19 2024-03-29 迅得机械（东莞）有限公司 Full-automatic plate retracting and releasing machine

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4541762A (en) * 1981-12-24 1985-09-17 Kk Automation Klaus Th. Kramer Gmbh & Co. Apparatus for loading and/or unloading machine tools or the like
JPH05104363A (en) * 1991-10-18 1993-04-27 Sony Corp Assembly equipment
TW200507711A (en) * 2003-05-26 2005-02-16 Matsushita Electric Industrial Co Ltd Loader and unloader for workpiece
TW200521055A (en) * 2003-03-28 2005-07-01 Hirata Spinning Wafer transportation system
CN102770953A (en) * 2010-02-23 2012-11-07 村田机械株式会社 Mobile loading device and workpiece loading device
TW201443521A (en) * 2013-03-21 2014-11-16 Sumitomo Chemical Co Detector, laser light irradiation apparatus, and apparatus for manufacturing optical member sticking workpiece

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0562033A (en) * 1991-08-29 1993-03-12 Murata Mach Ltd Package processing system
JP3203340B2 (en) * 1992-02-17 2001-08-27 マツダエース株式会社 Sorting support device
JP4270434B2 (en) * 2002-11-29 2009-06-03 シャープ株式会社 Substrate transfer device, substrate removal method, and substrate storage method
JP2006176235A (en) * 2004-12-21 2006-07-06 Murata Mach Ltd Tray conveyance system
CN101589658B (en) * 2007-01-25 2012-06-13 松下电器产业株式会社 Stacking tray supply unit and supply method, and component mounting apparatus and method
WO2010021038A1 (en) * 2008-08-20 2010-02-25 株式会社アドバンテスト Electronic component handling apparatus and electronic component test system
US20110141448A1 (en) * 2009-11-27 2011-06-16 Nikon Corporation Substrate carrier device, substrate carrying method, substrate supporting member, substrate holding device, exposure apparatus, exposure method and device manufacturing method
JP5122675B2 (en) * 2011-03-10 2013-01-16 シャープ株式会社 Conveying device and assembly device
JP2013018604A (en) * 2011-07-11 2013-01-31 Shibuya Kogyo Co Ltd Article sorting apparatus
JP2015058487A (en) * 2013-09-17 2015-03-30 東邦工業株式会社 Assembly device
JP6191544B2 (en) * 2014-05-22 2017-09-06 株式会社ダイフク Transport device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4541762A (en) * 1981-12-24 1985-09-17 Kk Automation Klaus Th. Kramer Gmbh & Co. Apparatus for loading and/or unloading machine tools or the like
JPH05104363A (en) * 1991-10-18 1993-04-27 Sony Corp Assembly equipment
TW200521055A (en) * 2003-03-28 2005-07-01 Hirata Spinning Wafer transportation system
TW200507711A (en) * 2003-05-26 2005-02-16 Matsushita Electric Industrial Co Ltd Loader and unloader for workpiece
CN102770953A (en) * 2010-02-23 2012-11-07 村田机械株式会社 Mobile loading device and workpiece loading device
TW201443521A (en) * 2013-03-21 2014-11-16 Sumitomo Chemical Co Detector, laser light irradiation apparatus, and apparatus for manufacturing optical member sticking workpiece

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI869999B (en) * 2022-09-01 2025-01-11 瑞士商巴柏斯特麥克斯合資公司 Alignment module for irregular edges

Also Published As

Publication number Publication date
CN109417044B (en) 2023-04-28
TW201805219A (en) 2018-02-16
JP6791665B2 (en) 2020-11-25
WO2018003573A1 (en) 2018-01-04
CN109417044A (en) 2019-03-01
JP2018006518A (en) 2018-01-11

Similar Documents

Publication Publication Date Title
TWI716611B (en) Transport system
TWI732253B (en) Transport system
JP6512019B2 (en) Pallet separation equipment
CN110235192A (en) Alignment device
CN109313869B (en) Alignment device
JP4537411B2 (en) Substrate carry-in / out device and substrate carry-in / out method
TWI753999B (en) Handling system
TWI759410B (en) Panel handling robots and panel handling systems
WO2019065202A1 (en) Conveyance system
WO2018003578A1 (en) Alignment device
TWI720219B (en) Transport system
CN214022083U (en) Modularized screen optical detection compensation equipment
TW201806068A (en) Alignment device
TW201836953A (en) Data reading system and method for controlling data reading system

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees