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TW201805219A - Transport system - Google Patents

Transport system Download PDF

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Publication number
TW201805219A
TW201805219A TW106122098A TW106122098A TW201805219A TW 201805219 A TW201805219 A TW 201805219A TW 106122098 A TW106122098 A TW 106122098A TW 106122098 A TW106122098 A TW 106122098A TW 201805219 A TW201805219 A TW 201805219A
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TW
Taiwan
Prior art keywords
tray
robot
conveyor
liquid crystal
panel
Prior art date
Application number
TW106122098A
Other languages
Chinese (zh)
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TWI716611B (en
Inventor
荒井正
佐藤史朗
Original Assignee
日本電產三協股份有限公司
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Publication of TW201805219A publication Critical patent/TW201805219A/en
Application granted granted Critical
Publication of TWI716611B publication Critical patent/TWI716611B/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H10P72/30—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

本發明之進行對處理裝置15供給之顯示面板2之搬送及自處理裝置15排出之顯示面板2之搬送的搬送系統1具備：輸送機4、5，其等搬送堆疊成複數層且可收納顯示面板2之托盤3；托盤載台6、7，其等載置托盤3；機器人8，其於輸送機4、5與托盤載台6、7之間搬送托盤3；機器人9，其進行自載置於托盤載台6、7之托盤3搬出顯示面板2及向載置於托盤載台6、7之托盤3搬入顯示面板2；及資料讀取裝置56，其讀取記錄於顯示面板2之資料。該搬送系統1可抑制進行收納顯示面板2之托盤3之拆疊或層疊時之顯示面板2之損傷。The conveyance system 1 for conveying the display panel 2 supplied to the processing device 15 and the conveyance of the display panel 2 discharged from the processing device 15 according to the present invention includes conveyors 4 and 5, which are stacked in a plurality of layers and can accommodate a display Pallet 3 of panel 2; pallet carriers 6, 7, etc. for placing pallet 3; robot 8, which transports pallet 3 between conveyors 4, 5, and pallet carriers 6, 7; robot 9, which performs self loading The tray 3 placed on the tray carriers 6 and 7 is moved out of the display panel 2 and the tray 3 placed on the tray carriers 6 and 7 is moved into the display panel 2; and the data reading device 56 is read and recorded on the display panel 2 data. This conveying system 1 can suppress damage to the display panel 2 when the trays 3 storing the display panels 2 are disassembled or stacked.

Description

搬送系統Transportation system

本發明係關於搬送液晶面板等顯示面板之搬送系統。The present invention relates to a transport system for transporting a display panel such as a liquid crystal panel.

先前，已知有一種組入於可攜式機器等所使用之液晶顯示裝置之組裝線之搬送裝置(例如，參照專利文獻1)。專利文獻1所記載之搬送裝置具備5個搬送單元，且於各搬送單元分配有液晶顯示裝置之組裝步驟之各種組裝加工處理。又，該搬送裝置具備將收納於托盤之液晶顯示面板供給至搬送單元之自動裝載機(參照專利文獻1之圖19)。 [先前技術文獻] [專利文獻] 專利文獻1：國際公開第2012/120956號Conventionally, there has been known a transfer device incorporated in an assembly line of a liquid crystal display device used in a portable device or the like (for example, refer to Patent Document 1). The transporting device described in Patent Document 1 includes five transporting units, and various assembling processes for assembling steps of the liquid crystal display device are assigned to each transporting unit. Moreover, this conveyance apparatus is equipped with the automatic loader which supplies the liquid crystal display panel accommodated in a tray to a conveyance unit (refer FIG. 19 of patent document 1). [Prior Art Literature] [Patent Literature] Patent Literature 1: International Publication No. 2012/120956

[發明所欲解決之問題] 於使用專利文獻1記載之搬送裝置之液晶顯示裝置之組裝線中，一般供給至自動裝載機之前之托盤以堆疊成複數層之狀態(以層疊之狀態)暫時放置於架子，作業者以手動作業將層疊之托盤拆疊，並逐個供給至自動裝載機。於作業者以手動作業將托盤拆疊之情形時，作業者之作業容易產生差異，且於將托盤拆疊時，有對托盤中之液晶顯示面板施加碰撞，而損傷液晶顯示面板之虞。 因此，本發明之課題在於提供一種搬送系統，其可於進行供給至特定處理裝置之顯示面板之搬送及自特定處理裝置排出之顯示面板之搬送之至少任一者的搬送系統中，抑制進行收納有顯示面板之托盤之拆疊或層疊時顯示面板之損傷。 [解決問題之技術手段] 為了解決上述課題，本發明之搬送系統之特徵在於：其係進行對特定處理裝置供給之顯示面板之搬送及自特定處理裝置排出之顯示面板之搬送之至少任一者的搬送系統，且具備：輸送機，其搬送堆疊成複數層且可收納顯示面板之托盤；托盤載台，其載置托盤；第1搬送機器人，其於輸送機與托盤載台之間搬送托盤；第2搬送機器人，其進行自載置於托盤載台之托盤搬出顯示面板及向載置於托盤載台之托盤搬入顯示面板的至少任一者；及資料讀取裝置，其讀取記錄於顯示面板之資料；且資料讀取裝置讀取由第2搬送機器人自托盤搬出後之顯示面板之資料及由第2搬送機器人搬入托盤前之顯示面板之資料之至少任一者。 本發明之搬送系統具備：輸送機，其搬送堆疊成複數層且可收納顯示面板之托盤；托盤載台，其載置托盤；及第1搬送機器人，其於輸送機與托盤載台之間搬送托盤。因此，於本發明中，可藉由第1搬送機器人於輸送機與托盤載台之間搬送托盤，而進行收納有顯示面板之托盤之拆疊或層疊。即，於本發明中，可自動進行托盤之拆疊或層疊。因此，於本發明中，可抑制托盤之拆疊作業或層疊作業之差異，可使托盤之拆疊作業或層疊作業穩定。其結果，於本發明中，可抑制進行托盤之拆疊或層疊時顯示面板之損傷。又，於本發明中，由於自動進行托盤之拆疊或層疊，故可削減人事費。 又，本發明之搬送系統具備：第2搬送機器人，其進行自載置於托盤載台之托盤搬出顯示面板、及向載置於托盤載台之托盤搬入顯示面板之至少任一者；因此可自動將收納於拆疊後之托盤之顯示面板向處理裝置搬送，或自動將自處理裝置排出之顯示面板收納於托盤。 又，本發明之搬送系統進而具備：資料讀取裝置，其讀取由第2搬送機器人自托盤搬出後之顯示面板之資料、及由第2搬送機器人搬入托盤前之顯示面板之資料之至少任一者；因此可將個別資料與自托盤搬出之顯示面板建立關聯，可向處理裝置供給與個別資料建立關聯後之顯示面板。又，可將個別資料與自處理裝置排出之顯示面板建立關聯，可將與個別資料建立關聯後之顯示面板收納於托盤。 於本發明中，較佳為搬送系統作為輸送機具備：供給側輸送機，其向接近托盤載台之方向搬送托盤；及排出側輸送機，其向遠離托盤載台之方向搬送托盤；且第1搬送機器人進行自供給側輸送機向托盤載台搬送托盤、及自托盤載台向排出側輸送機搬送托盤。 若如此構成，則由於搬送系統具備供給側輸送機與排出側輸送機，故可個別地進行向接近托盤載台之方向搬送托盤與向遠離托盤載台之方向搬送托盤。因此，與藉由共通之輸送機進行向接近托盤載台之方向搬送托盤與向遠離托盤載台之方向搬送托盤之情形相比，可縮短搬送系統之週期。又，若如此構成，則由於第1搬送機器人進行自供給側輸送機向托盤載台搬送托盤、及自托盤載台向排出側輸送機搬送托盤，故與個別設置自供給側輸送機向托盤載台搬送托盤的機器人、與自托盤載台向排出側輸送機搬送托盤的機器人之情形相比，可簡化搬送系統之構成。 於本發明中，較佳為供給側輸送機具備：導引構件，其配置於與托盤之搬送方向及上下方向正交之左右方向之兩側，且限制托盤於左右方向之移動；及抵接構件，其配置於托盤之搬送方向之下游側，供托盤抵接；且於由第1搬送機器人向托盤載台搬送托盤前使托盤抵接於抵接構件。若如此構成，則可將由第1搬送機器人搬送至托盤載台前之托盤於供給側輸送機上對位。因此，可精度良好地將托盤載置於托盤載台。 於本發明中，較佳為搬送系統具備複數個托盤載台。若如此構成，則可一面由第2搬送機器人進行顯示面板之搬出或搬入，一面由第1搬送機器人進行托盤載台上之托盤之更換。因此，與搬送系統所具備之托盤載台之數量為1個之情形相比，可縮短搬送系統之週期。 於本發明中，較佳為搬送系統具備：對準裝置，其檢測由第2搬送機器人自托盤搬出之顯示面板之邊緣，且基於顯示面板之邊緣之檢測結果而進行顯示面板之對位。若如此構成，則可以資料讀取裝置讀取以對準裝置對位後之顯示面板之資料。因此，可藉由資料讀取裝置確實且正確地讀取由第2搬送機器人自托盤搬出後之顯示面板之資料。 於本發明中，較佳為搬送系統具備：層數檢測機構，其檢測輸送機上之托盤之層數；且層數檢測機構具備：感測器，其檢測托盤之有無；及升降機構，其使感測器升降。若如此構成，則藉由基於層數檢測機構之檢測結果使第1搬送機器人動作，可防止輸送機上之托盤與第1搬送機器人之碰撞、或輸送機上之托盤與第1搬送機器人搬送之托盤之碰撞。 於本發明中，較佳為輸送機係由在托盤之搬送方向經分割且可個別驅動之複數個分割輸送機而構成。若如此構成，則可將複數個層疊之托盤於托盤之搬送方向上個別搬送。因此，輸送機之易用性較佳。 於本發明中，較佳為搬送系統具備供設置第1搬送機器人之第1框架、及供設置第2搬送機器人之第2框架，且於第1框架，形成有供設置第1搬送機器人之設置面；第2框架具備配置於較設置面更上側，且供設置第2搬送機器人之設置部；第1搬送機器人以自設置面立起之方式設置於設置面，第2搬送機器人以懸垂於設置部之方式設置於設置部。若如此構成，則易於防止使第1搬送機器人與第2搬送機器人同時動作時第1搬送機器人與第2搬送機器人干涉。 於本發明中，較佳為第2搬送機器人具備例如：本體部；複數條連桿，其等之基端側可旋動地連結於本體部；複數個臂部，其等之基端側各者可旋動地連結於複數條連桿之末端側各者；可動部，其可旋動地連結於複數個臂部之末端側；面板固持部，其安裝於可動部且固持顯示面板；及複數個旋動驅動機構，其使複數條連桿各者旋動；且複數條連桿以向本體部之外周側以大致等角度間距大致放射狀地延伸之方式連結於本體部，臂部具備相互平行之直線狀之2條臂，且2條臂各者之基端側可旋動地連結於連桿之末端側，且可動部可旋動地連結於2條臂之末端側，本體部固定於設置部。即，第2搬送機器人係例如所謂之並行連接機器人。於該情形時，可以相對高速進行自托盤搬出顯示面板或向托盤搬入顯示面板。 於本發明中，較佳為搬送系統作為托盤載台具備：2個固定托盤載台，其等於與托盤之搬送方向及上下方向正交之左右方向鄰接配置；及2個可動托盤載台，其等可於托盤之搬送方向與左右方向移動；且具備：2個載台移動機構，其等使2個可動托盤載台個別地移動；且載台移動機構使可動托盤載台於在左右方向上與固定托盤載台並排之第1位置、與於托盤之搬送方向上與固定托盤載台之至少一部分重疊之第2位置之間移動。若如此構成，則即便使第1搬送機器人之可動範圍或第2搬送機器人之可動範圍較窄，亦可由第1搬送機器人於輸送機與可動托盤載台之間搬送托盤，且由第2搬送機器人搬出收納於可動托盤載台上之托盤之顯示面板，或將顯示面板搬入至可動托盤載台上之托盤。 [發明之效果] 如以上般，於本發明中，可於進行供給至特定處理裝置之顯示面板之搬送及自特定處理裝置排出之顯示面板之搬送之至少任一者的搬送系統中，抑制進行收納有顯示面板之托盤之拆疊或層疊時顯示面板之損傷。[Problems to be Solved by the Invention] In an assembly line of a liquid crystal display device using a conveying device described in Patent Document 1, generally trays before being supplied to an automatic loader are stacked in a plurality of layers (in a stacked state) temporarily. On the shelf, the operator unstacks the stacked trays manually and supplies them to the automatic loader one by one. When the operator disassembles the tray by manual operation, the operator's operation is easy to be different. When the pallet is disassembled, the liquid crystal display panel in the tray may be impacted and the liquid crystal display panel may be damaged. Therefore, an object of the present invention is to provide a transfer system capable of suppressing storage in at least one of a transfer system that performs transfer of a display panel supplied to a specific processing device and transfer of a display panel discharged from a specific processing device. Damage to the display panel when the tray with the display panel is unfolded or stacked. [Technical means to solve the problem] In order to solve the above-mentioned problems, the conveying system of the present invention is characterized in that it is at least one of conveying a display panel supplied to a specific processing device and conveying a display panel discharged from a specific processing device. And a transport system that includes: a conveyor that transports pallets stacked in a plurality of layers and can accommodate display panels; a pallet stage that places pallets; a first transport robot that transports pallets between the conveyor and the pallet stage ; A second transfer robot that performs at least one of carrying out the display panel from the tray placed on the tray carrier and loading the display panel into the tray placed on the tray carrier; and a data reading device whose reading record is The data of the display panel; and the data reading device reads at least one of the data of the display panel after the second transfer robot has been removed from the tray and the data of the display panel before the second transfer robot has been moved into the tray. The transfer system of the present invention includes: a conveyor that transfers trays stacked in a plurality of layers and that can accommodate a display panel; a tray stage that holds a tray; and a first transfer robot that transfers between the conveyor and the tray stage tray. Therefore, in the present invention, the first transfer robot can transfer the pallets between the conveyor and the pallet stage, so that the pallets containing the display panels can be disassembled or stacked. That is, in the present invention, the trays can be unstacked or stacked automatically. Therefore, in the present invention, it is possible to suppress the difference of the stacking operation or the stacking operation of the tray, and to stabilize the stacking operation or the stacking operation of the tray. As a result, in the present invention, damage to the display panel can be suppressed when the trays are detached or stacked. In addition, in the present invention, since the stacking or stacking of the trays is performed automatically, personnel costs can be reduced. In addition, the transfer system of the present invention includes at least one of a second transfer robot that carries out a display panel self-loaded from a tray placed on a tray stage, and carries in a display panel into a tray placed on the tray stage; The display panel stored in the unstacked tray is automatically conveyed to the processing device, or the display panel discharged from the processing device is automatically stored in the tray. Further, the transfer system of the present invention further includes a data reading device that reads at least one of the data of the display panel after the second transfer robot has been removed from the tray and the data of the display panel before the second transfer robot has been transferred into the tray. One; therefore, the individual data can be associated with the display panel carried out from the tray, and the processing device can be provided with the display panel associated with the individual data. In addition, the individual data can be associated with the display panel discharged from the processing device, and the display panel associated with the individual data can be stored in a tray. In the present invention, it is preferable that the conveying system as a conveyor includes: a supply-side conveyor that conveys the tray closer to the tray stage; and a discharge-side conveyor that conveys the tray away from the tray stage; and 1 A transfer robot transfers a pallet from a supply-side conveyor to a pallet stage, and transfers a pallet from a pallet stage to a discharge-side conveyor. With this configuration, since the conveying system includes the supply-side conveyor and the discharge-side conveyor, it is possible to individually carry out the tray toward the tray stage and the tray away from the tray stage. Therefore, compared with the case where the tray is moved toward the tray stage by a common conveyor and the tray is moved away from the tray stage, the cycle time of the transfer system can be shortened. In this configuration, since the first transfer robot transfers the tray from the supply-side conveyor to the tray stage and the tray from the tray stage to the discharge-side conveyor, it is separately provided from the supply-side conveyor to the tray. Compared with a robot that transports pallets from a pallet to a robot that transports pallets from a pallet stage to a discharge-side conveyor, the configuration of the transport system can be simplified. In the present invention, it is preferable that the supply-side conveyor includes: a guide member which is arranged on both sides of the left-right direction orthogonal to the conveying direction of the tray and the up-down direction, and restricts the movement of the tray in the left-right direction; The member is arranged on the downstream side of the tray in the conveying direction for the abutting of the tray; and the tray is abutted against the abutting member before the first transfer robot transfers the tray to the tray stage. With this configuration, the tray before being transferred by the first transfer robot to the tray stage can be aligned on the supply-side conveyor. Therefore, the tray can be placed on the tray stage with high accuracy. In the present invention, it is preferable that the transfer system includes a plurality of tray carriers. With this configuration, the display panel can be carried out or carried in by the second transfer robot, and the tray on the tray carrier can be replaced by the first transfer robot. Therefore, as compared with the case where the number of tray stages provided in the conveying system is one, the cycle time of the conveying system can be shortened. In the present invention, it is preferable that the transport system includes an alignment device that detects an edge of the display panel carried out from the tray by the second transport robot, and performs alignment of the display panel based on a detection result of the edge of the display panel. If so configured, the data can be read by the data reading device to align the data of the display panel after the device is aligned. Therefore, the data of the display panel after the second transfer robot has been unloaded from the tray can be accurately and accurately read by the data reading device. In the present invention, it is preferable that the conveying system includes: a layer number detecting mechanism that detects the number of trays on the conveyor; and the layer number detecting mechanism includes: a sensor that detects the presence or absence of a tray; and a lifting mechanism that Lift the sensor. With this configuration, the first transfer robot can be operated based on the detection result of the number-of-layers detection mechanism to prevent collision between the tray on the conveyor and the first transfer robot, or between the tray on the conveyor and the first transfer robot. Collision of pallets. In the present invention, it is preferable that the conveyor is constituted by a plurality of divided conveyors which are divided in the conveying direction of the tray and can be individually driven. With this configuration, a plurality of stacked trays can be individually transferred in the tray transfer direction. Therefore, the ease of use of the conveyor is better. In the present invention, it is preferable that the transfer system includes a first frame for installing the first transfer robot and a second frame for installing the second transfer robot, and the first frame is provided with a setting for installing the first transfer robot. The second frame is provided with an installation portion disposed above the installation surface and for installing the second transfer robot; the first transfer robot is installed on the installation surface so as to stand up from the installation surface, and the second transfer robot is suspended from the installation surface The system of the part is provided in the installation part. With this configuration, it is easy to prevent the first transfer robot from interfering with the second transfer robot when the first transfer robot and the second transfer robot are operated simultaneously. In the present invention, it is preferable that the second transfer robot includes, for example, a main body portion, a plurality of links, the base end sides of which are rotatably connected to the main body portion, and a plurality of arm portions, each of which has a base end side. Those are rotatably connected to each of the end sides of the plurality of links; the movable part is rotatably connected to the end sides of the plurality of arm parts; the panel holding part is mounted on the movable part and holds the display panel; and A plurality of rotation driving mechanisms that each rotate a plurality of links; the plurality of links are connected to the main body portion so as to extend radially at approximately equal angular intervals to the outer peripheral side of the main body portion, and the arm portion is provided with Two linear arms parallel to each other, and a base end side of each of the two arms is rotatably connected to a distal end side of the link, and a movable portion is rotatably connected to a distal end side of the two arms, and a main body part It is fixed to the installation part. That is, the second transfer robot is, for example, a so-called parallel connection robot. In this case, the display panel can be carried out from or into the display panel at a relatively high speed. In the present invention, it is preferable that the transfer system is provided as a tray carrier: 2 fixed tray carriers, which are arranged adjacent to each other in a left-right direction orthogonal to a tray transport direction and an up-down direction; and 2 movable tray carriers, which It can be moved in the pallet's conveying direction and left and right direction; and it has: 2 stage moving mechanisms that individually move the 2 movable tray stages; and the stage moving mechanism makes the movable tray stage in the left and right direction It moves between a first position juxtaposed with the fixed tray stage, and a second position that overlaps at least a part of the fixed tray stage in the transport direction of the tray. With this configuration, even if the movable range of the first transfer robot or the movable range of the second transfer robot is narrow, the tray can be transferred between the conveyor and the movable tray stage by the first transfer robot, and the second transfer robot can be used. Take out the display panel of the tray stored on the movable tray carrier, or move the display panel into the tray on the movable tray carrier. [Effects of the Invention] As described above, in the present invention, it is possible to suppress the progress in at least one of a conveyance system that conveys a display panel supplied to a specific processing device and a conveyance of a display panel discharged from a specific processing device Damage to the display panel during disassembly or stacking of trays containing the display panel.

以下，一面參照圖式，一面說明本發明之實施形態。 [實施形態1] (搬送系統之整體構成) 圖1係本發明之實施形態1之搬送系統1之側視圖。圖2係自圖1之E-E方向顯示搬送系統1之俯視圖。 本形態之搬送系統1組入於可攜式機器等所使用之小型液晶顯示器之製造線而加以使用。該搬送系統1搬送顯示面板即液晶面板2，並將液晶面板2供給至對液晶面板2進行特定處理之處理裝置15(參照圖2)。即，該搬送系統1搬送供給至處理裝置15之液晶面板2。又，搬送系統1搬送小型之液晶面板2(例如4吋之液晶面板2)。 液晶面板2形成為長方形之平板狀。於液晶面板2之超出顯示區域之部位，記錄有液晶面板2之檢查資料等資料。具體而言，於液晶面板2之超出顯示區域之部位，將檢查資料等資料記錄為二維碼或一維碼。即，於液晶面板2之超出顯示區域之部位，記錄有可光學讀取之資料。另，於以本形態之搬送系統1搬送之液晶面板2，可貼附偏光板(偏光薄膜)，亦可不貼附偏光板。又，於液晶面板2，可安裝FPC(Flexible Printed Circuit：可撓性印刷電路)或晶片，亦可不安裝FPC或晶片。 搬送系統1具備搬送可收納液晶面板2之托盤3之2個輸送機4、5。輸送機4、5將堆疊成複數層之托盤3(即，層疊之托盤3)向水平方向直線搬送。例如，輸送機4、5將層疊成20層之托盤3向水平方向直線搬送。 於以下之說明中，將輸送機4、5之搬送托盤3之方向(圖1等之X方向)設為「前後方向」，將與上下方向(鉛直方向)及前後方向正交之方向(圖1等之Y方向)設為「左右方向」。又，將前後方向之一側(圖1等之X1方向側)設為「前」側，將其相反側(圖1等之X2方向側)設為「後(後方)側」，將左右方向之一側(圖2等之Y1方向側)設為「右」側，將其相反側(圖2等之Y2方向側)設為「左」側。於本形態中，於搬送系統1之後側配置有處理裝置15。 又，搬送系統1具備：2個托盤載台6、7，其等載置托盤3；作為第1搬送機器人之機器人8，其於輸送機4、5與托盤載台6、7之間搬送托盤3；作為第2搬送機器人之機器人9，其自載置於托盤載台6、7之托盤3搬出液晶面板2；及供給單元10，其自機器人9接收液晶面板2並供給至處理裝置15。托盤載台6、7配置於較輸送機4、5更後側。供給單元10配置於較托盤載台6、7更後側。 又，搬送系統1具備設置有輸送機4、5、托盤載台6、7、機器人8及供給單元10之作為第1框架之本體框架11、及設置有機器人9之作為第2框架之本體框架12。本體框架11形成為前後方向細長、且高度較低的扁平長方體狀。本體框架11之上表面11a形成為與上下方向正交之平面狀，且於本體框架11之上表面11a設置有輸送機4、5、托盤載台6、7、機器人8及供給單元10。本形態之上表面11a為設置有機器人8之設置面。 本體框架12為形成為大致門型之門型框架。本體框架12之左右方向之寬度寬於本體框架11之左右方向之寬度，本體框架12之前後方向之寬度短於本體框架11之前後方向之長度。本體框架12之高度高於本體框架11之高度，本體框架12具備配置於較本體框架11之上表面11a更上側之上表面部12a。上表面部12a配置於較輸送機4、5、托盤載台6、7、機器人8及供給單元10更上側。 本體框架12以自前後方向觀察時跨越本體框架11之方式設置。即，本體框架12以於左右方向跨越本體框架11之方式設置。又，本體框架12以跨越本體框架11之後端側部分之方式設置。機器人9設置於本體框架12之上表面部12a。本形態之上表面部12a為設置有機器人9之設置部。 (輸送機之構成及動作) 圖3係圖1所示之分割輸送機20之立體圖。圖4係用以說明圖3所示之層數檢測機構29之構成及圖1所示之托盤固持部39之構成之概略圖。 輸送機4、5為具備複數個滾筒之滾筒輸送機。輸送機4與輸送機5於左右方向鄰接配置。輸送機4將層疊之托盤3向後側搬送，輸送機5將層疊之托盤3向前側搬送。即，輸送機4向接近托盤載台6、7之方向搬送托盤3，輸送機5向遠離托盤載台6、7之方向搬送托盤3。於由輸送機4搬送之托盤3收納有複數片液晶面板2。另一方面，於由輸送機5搬送之托盤3未收納液晶面板2，由輸送機5搬送之托盤3為空托盤。本形態之輸送機4係供給側輸送機，輸送機5係排出側輸送機。另，輸送機4、5亦可為皮帶輸送機等。 輸送機4由在前後方向分割之複數個分割輸送機16～20構成。本形態之輸送機4由5個分割輸送機16～20構成。分割輸送機16～20自前側朝向後側依序配置。同樣地，輸送機5由在前後方向分割之5個分割輸送機21～25構成。分割輸送機21～25自前側朝向後側依序配置。分割輸送機16～25各者具備馬達與將馬達之動力傳遞至滾筒之動力傳遞機構，且分割輸送機16～25可個別地驅動。前後方向之分割輸送機16～25之寬度寬於托盤3之前後方向之寬度。具體而言，前後方向之分割輸送機16～25之寬度略微寬於托盤3之前後方向之寬度。 於分割輸送機16，載置有由作業者自暫時放置用之架子(省略圖示)搬運來之層疊狀態之托盤3。載置於分割輸送機16之層疊狀態之托盤3由輸送機4向後側搬送。搬送至分割輸送機20之層疊狀態之托盤3如後述般由機器人8拆疊。又，於分割輸送機25，如後述般由機器人8將空托盤3層疊。當將托盤3層疊至特定層數時，層疊狀態之托盤3由輸送機5搬送至前側。搬送至分割輸送機21之層疊狀態之托盤3由作業者搬運至空托盤用之架子。 另，於將層疊狀態之托盤3載置於分割輸送機16時，通常於分割輸送機17～20之至少任一分割輸送機17～20載置有層疊狀態之托盤3。又，於在分割輸送機25層疊有空托盤3時，有時於分割輸送機21～24之至少任一分割輸送機21～24載置有層疊狀態之空托盤3。 輸送機4之配置於最後側之分割輸送機20具備限制左右方向之托盤3之移動之導引構件27(參照圖3)。導引構件27配置於分割輸送機20之左右方向之兩側。配置於右側之導引構件27之導引面與配置於左側之導引構件27之導引面之左右方向之距離與托盤3之左右方向之寬度大致相等。又，分割輸送機20具備供托盤3之後端抵接之抵接構件28。抵接構件28配置於分割輸送機20之後端。即，抵接構件28配置於輸送機4搬送托盤3之方向之下游端。 於本形態中，輸送機4於機器人8向托盤載台6、7搬送托盤3之前將托盤3搬送至後側並使托盤3抵接於抵接構件28。即，於進行機器人8向托盤載台6、7之托盤3之搬送時，每次皆於將托盤3搬送至後側直至抵接於抵接構件28後，進行機器人8向托盤載台6、7之托盤3之搬送。 於分割輸送機20安裝有檢測輸送機4上之托盤3之層數之層數檢測機構29。層數檢測機構29安裝於左右方向之分割輸送機20之兩端側。如圖3、圖4所示，層數檢測機構29具備檢測托盤3之有無之感測器30、及使感測器30升降之升降機構31。感測器30係反射型之光學式感測器，感測器30之發光元件向左右方向之分割輸送機20之中心射出光。升降機構31具備馬達32及將馬達32之旋轉運動轉換為上下方向之直線運動的滾珠螺桿(省略圖示)等。另，感測器30可為透過型之光學式感測器，亦可為接近感測器等。 於以層數檢測機構29檢測輸送機4上之托盤3之層數時，於使感測器30移動至上限位置後，使感測器30下降直至以感測器30檢測出托盤3。又，基於以感測器30檢測出托盤3時之馬達32之旋轉位置，檢測輸送機4上之托盤3之層數。另，於分割輸送機25未安裝層數檢測機構29，但亦可於分割輸送機25安裝層數檢測機構29。 (托盤載台之構成) 於托盤載台6、7載置有1個托盤3。托盤載台6、7固定於本體框架11。托盤載台6與托盤載台7以於左右方向上隔出特定間隔之狀態配置。托盤載台6於左右方向上配置於與輸送機4大致相同之位置，托盤載台7於左右方向上配置於與輸送機5大致相同之位置。又，托盤載台6配置於分割輸送機20之緊鄰後方，托盤載台7配置於分割輸送機25之緊鄰後方。托盤載台6、7之上表面形成為與上下方向正交之平面狀。該托盤載台6、7之上表面配置於較輸送機4、5之上表面更上側。 (機器人之構成及動作) 圖5係圖1所示之機器人9之立體圖。 機器人8為所謂之3軸正交機器人。該機器人8具備：本體框架35，其形成為門型；可動框架36，其以可相對於本體框架35向左右方向滑動之方式保持於本體框架35；可動框架37，其以可相對於可動框架36向前後方向滑動之方式保持於可動框架36；可動框架38，其以可相對於可動框架37向上下方向滑動之方式保持於可動框架37；及托盤固持部39，其安裝於可動框架38。又，機器人8具備使可動框架36向左右方向滑動之驅動機構、使可動框架37向前後方向滑動之驅動機構、及使可動框架38向上下方向滑動之驅動機構。 本體框架35之高度高於輸送機4、5之高度。本體框架35以於自前後方向觀察時跨越於左右方向鄰接配置之輸送機4、5之方式配置。即，本體框架35以於左右方向跨越輸送機4、5之方式配置。又，本體框架35以跨越分割輸送機19、24之後端側部分及分割輸送機20、25之前端側部分之方式配置。 可動框架36安裝於本體框架35之上表面側，且配置於較輸送機4、5更上側。又，可動框架36配置於較載置於輸送機4、5之層疊狀態之托盤3更上側。可動框架37安裝於可動框架36之右側。可動框架38安裝於可動框架37之後端側。又，本體框架35以自本體框架11之上表面11a立起之方式固定於上表面11a。即，機器人8以自上表面11a立起之方式設置於上表面11a。 托盤固持部39安裝於可動框架38之下端。該托盤固持部39如圖4所示，具備吸附托盤3之複數個吸附部40、用以自下側支持托盤3之爪部41、及使爪部41移動之爪移動機構42。吸附部40與托盤3之上表面接觸並真空吸附托盤3。爪部41配置於托盤固持部39之前後方向之中心位置且配置於左右方向之兩側。爪移動機構42係氣缸，且使爪部41向左右方向移動。於機器人8搬送托盤3時，將爪部41向左右方向之內側移動直至將爪部41配置於搬送之托盤3之下側。又，於機器人8搬送托盤3時，吸附部40吸附托盤3之上表面而加以固持。 機器人8進行自輸送機4向托盤載台6、7之托盤3之搬送、及自托盤載台6、7向輸送機5之托盤3之搬送。具體而言，機器人8將搬送至分割輸送機20之層疊狀態之托盤3逐個搬送至托盤載台6或托盤載台7，並將分割輸送機20上之層疊狀態之托盤3拆疊。又，機器人8將變空之1個托盤3自托盤載台6或托盤載台7搬送至分割輸送機25，並將托盤3層疊於分割輸送機25直至分割輸送機25上堆疊之托盤3之層數變為特定之層數。 機器人9係所謂之並行連接機器人。該機器人9具備：本體部45；3條連桿46，其等連結於本體部45；3個臂部47，其等連結於3條連桿46各者；作為可動部之頭單元48，其連結於3個臂部47；及面板固持部49，其安裝於頭單元48。本體部45固定於本體框架12之上表面部12a。又，機器人9配置於上表面部12a之下側。即，機器人9以懸垂於上表面部12a之方式設置於上表面部12a。又，本體部45配置於托盤載台6、7之上方，且配置於較機器人8之本體框架35更後側。 3條連桿46以向本體部45之外周側以大致等角度間距大致放射狀地延伸之方式連結於本體部45。即，3條連桿46以向本體部45之外周側以大致120°間距大致放射狀地延伸之方式連結於本體部45。又，3條連桿46之基端側可旋動地連結於本體部45。於本體部45與連桿46之連結部，配置有作為使連桿46旋動之旋動驅動機構之附減速機之馬達50。本形態之機器人9具備使3條連桿46各者旋動之3個馬達50。馬達50之輸出軸固定於連桿46之基端側。 臂部47之基端側可旋動地連結於連桿46之末端側。具體而言，臂部47具備相互平行之直線狀之2條臂52，且2條臂52各者之基端側可旋動地連結於連桿46之末端側。頭單元48可旋動地連結於3個臂部47之末端側。即，頭單元48可旋動地連結於6條臂52之末端側。 面板固持部49安裝於頭單元48之下端。該面板固持部49具備真空吸附液晶面板2之複數個吸附部，且藉由該吸附部吸附液晶面板2之上表面而固持液晶面板2。又，於頭單元48之上端安裝有馬達53。面板固持部49連結於馬達53，且可藉由馬達53之動力實現以上下方向為旋轉之軸向之旋轉。 於機器人9中，可藉由個別地驅動3個馬達50，而於特定之區域內使頭單元48朝上下方向、左右方向及前後方向之任意位置、且以頭單元48保持一定之姿勢不變之狀態(具體而言係以保持面板固持部49朝向下側之狀態)移動。 機器人9自載置於托盤載台6之托盤3或載置於托盤載台7之托盤3將液晶面板2逐片搬出。具體而言，機器人9自托盤3逐片搬出液晶面板2，直至載置於托盤載台6、7之托盤3變空。又，機器人9將自托盤3搬出之液晶面板2向後述之面板載台64搬送。 (供給單元之構成及動作) 圖6係圖1所示之供給單元10之立體圖。圖7係圖6所示之供給單元10之俯視圖。 供給單元10具備：資料讀取裝置56，其讀取記錄於液晶面板2之資料；對準裝置57，其於將液晶面板2之資料以資料讀取裝置56讀取之前進行液晶面板2之對位；機器人58，其將以資料讀取裝置56讀取資料後之液晶面板2向處理裝置15搬送；電離器(靜電去除裝置)59，其自向處理裝置15搬送之液晶面板2去除靜電；搬送裝置60，其將以對準裝置57對位後之液晶面板2向機器人58搬送；機器人61，其將以對準裝置57對位之液晶面板2搬送至搬送裝置60；及基底板62，其載置並固定該等構成。 對準裝置57載置於基底板62之左端側。機器人58載置於基底板62之右端側。資料讀取裝置56及電離器59載置於基底板62之左右方向之中心位置。搬送裝置60於左右方向上配置於對準裝置57與機器人58之間。機器人61鄰接配置於對準裝置57之右側。基底板62載置並固定於本體框架11之上表面11a之後端側部分。 對準裝置57具備：面板載台64，其載置由機器人9自托盤載台6、7上之托盤3搬出之液晶面板2；可動框架65，其可旋動地保持面板載台64；可動框架66，其以可向左右方向滑動之方式保持可動框架65；固定框架67，其以可向前後方向滑動之方式保持可動框架65；旋動機構，其使面板載台64相對於可動框架65旋動；驅動機構，其使可動框架65相對於可動框架66向左右方向滑動；及驅動機構，其使可動框架66相對於固定框架67向前後方向滑動。面板載台64具備真空吸附載置於面板載台64之上表面之液晶面板2之複數個吸附部。固定框架67固定於基底板62。 又，對準裝置57具備配置於面板載台64之上方之相機68及照明69。照明69係具有於前後方向排列之複數個LED(Light Emitting Diode：發光二極體)之條型照明。該照明69配置於較相機68更下側且配置於超出相機68之視野之位置。於本形態中，照明69配置於相機68之左下側。照明69向面板載台64照射間接光。 相機68檢測載置於面板載台64之液晶面板2之邊緣(具體而言係形成為長方形狀之液晶面板2之角部)。該相機68具備偏光薄膜。又，於面板載台64之上表面貼附有偏光板(偏光薄膜)。相機68之偏光薄膜之相位與面板載台64之偏光板之相位錯開90°，映現於相機68之面板載台64為黑色。因此，於本形態中，映現於相機68之液晶面板2之邊緣與面板載台64之上表面之對比度變高，而可利用相機68正確地檢測液晶面板2之邊緣。 對準裝置57於將由機器人9搬出之液晶面板2載置於面板載台64時，由相機68檢測液晶面板2之邊緣。又，對準裝置57基於相機68之液晶面板2之邊緣之檢測結果，進行面板載台64之旋動動作、可動框架65之向左右方向之滑動動作及可動框架66之向前後方向之滑動動作之至少任1個動作，而進行液晶面板2之對位。即，對準裝置57檢測液晶面板2之邊緣且基於液晶面板2之邊緣之檢測結果而進行液晶面板2之對位。 搬送裝置60具備：2個滑動載台70，其等載置液晶面板2；可動框架71，其固定2個滑動載台70；固定框架72，其以可向左右方向滑動之方式保持可動框架71；及驅動機構，其使可動框架71相對於固定框架72向左右方向滑動。2個滑動載台70於左右方向鄰接配置。滑動載台70具備真空吸附載置於滑動載台70之上表面之液晶面板2之複數個吸附部。固定框架72固定於基底板62。 機器人61具備：面板固持部73，其真空吸附並固持液晶面板2；可動框架74，其以可向上下方向滑動之方式保持面板固持部73；固定框架75，其以可向左右方向滑動之方式保持可動框架74；升降機構，其使面板固持部73相對於可動框架74升降；及驅動機構，其使可動框架74相對於固定框架75向左右方向滑動。固定框架75固定於基底板62。面板固持部73於前後方向上配置於與滑動載台70相同之位置。 機器人61將以對準裝置57對位後之液晶面板2自面板載台64搬送至滑動載台70。具體而言，機器人61以面板固持部73真空吸附並固持面板載台64上之液晶面板2之上表面，且將液晶面板2自面板載台64依序搬送至移動至左端側而停止之2個滑動載台70各者。又，於液晶面板2載置於2個滑動載台70各者時，搬送裝置60使滑動載台70向右方向移動，而將液晶面板2搬送至搬送裝置60之右端側。 面板固持部73配置於較相機68更後側。又，相機68之液晶面板2之邊緣之檢測於將面板載台64配置於相機68之正下方之狀態進行，面板固持部73之液晶面板2之真空吸附於將面板載台64配置於面板固持部73之正下方之狀態進行。於本形態中，對準裝置57於由相機68檢測液晶面板2之邊緣後，一面進行液晶面板2之對位，一面使面板載台64自相機68之正下方移動至面板固持部73之正下方。即，於本形態中，對準裝置57一面進行液晶面板2之對位，一面將液晶面板2搬送至由面板固持部73真空吸附之位置。 機器人58具備：2個面板固持部76，其等真空吸附並固持液晶面板2；可動框架77，其以可向上下方向滑動之方式保持面板固持部76；固定框架78，其以可向前後方向滑動之方式保持可動框架77；升降機構，其使面板固持部76相對於可動框架77升降；及驅動機構，其使可動框架77相對於固定框架78向前後方向滑動。2個面板固持部76於左右方向鄰接配置。左右方向之2個面板固持部76之間距與左右方向之2個滑動載台70之間距相等。固定框架78固定於基底板62。 機器人58將由搬送裝置60搬送至搬送裝置60之右端側之液晶面板2搬入處理裝置15。具體而言，機器人58以2個面板固持部76各者真空吸附並固持載置於2個滑動載台70各者之2個液晶面板2各者之上表面，並自滑動載台70將2片液晶面板2一起搬入至處理裝置15。 資料讀取裝置56具備：相機81，其讀取二維碼或一維碼等可光學讀取之資料；可動框架82，其安裝有相機81；可動框架83，其以可向上下方向滑動之方式保持可動框架82；可動框架84，其以可向左右方向滑動之方式保持可動框架83；固定框架85，其以可向前後方向滑動之方式保持可動框架84；升降機構，其使可動框架82相對於可動框架83升降；驅動機構，其使可動框架83相對於可動框架84向左右方向滑動；及驅動機構，其使可動框架84相對於固定框架85向前後方向滑動。固定框架85固定於基底板62。又，資料讀取裝置56具備將光照射至液晶面板2之照明。 如上所述，資料讀取裝置56載置於基底板62之左右方向之中心位置。資料讀取裝置56讀取記錄於在對準裝置57之位置調整後由搬送裝置60向右方向搬送之液晶面板2之資料。即，資料讀取裝置56讀取由機器人9自載置於托盤載台6、7之托盤3搬出後之液晶面板2之資料。於以資料讀取裝置56讀取資料時，搬送裝置60以將液晶面板2配置於相機81之下方之方式一次停止。以資料讀取裝置56讀取之液晶面板2之資料作為被讀取資料之液晶面板2之個別資料，與被讀取資料之液晶面板2建立關聯。 電離器59配置於搬送裝置60之上方。又，電離器59配置於較相機81更右側，且去除以資料讀取裝置56讀取資料後之液晶面板2之靜電。 (本形態之主要效果) 如以上說明般，於本形態中，機器人8將搬送至分割輸送機20之層疊狀態之托盤3逐個搬送至托盤載台6、7，並將分割輸送機20上之層疊狀態之托盤3拆疊。即，於本形態中，由機器人8自動進行托盤3之拆疊。因此，於本形態中，可抑制托盤3之拆疊作業之差異，可使托盤3之拆疊作業穩定。因此，於本形態中，可抑制進行托盤3之拆疊時液晶面板2之損傷。 又，於本形態中，載置於托盤載台6、7之托盤3中之液晶面板2由機器人9搬入至供給單元10，隨後，由機器人61、搬送裝置60及機器人58搬送而搬入至處理裝置15。即，於本形態中，自動自拆疊後之托盤3將液晶面板2搬送至處理裝置15。因此，於本形態中，可抑制液晶面板2之搬送作業之差異，可使液晶面板2之搬送作業穩定。因此，於本形態中，可抑制液晶面板2之搬送時液晶面板2之損傷。又，於本形態中，由於自動進行托盤3之拆疊或層疊，且自動自拆疊後之托盤3將液晶面板2搬送至處理裝置15，故可削減人事費。 於本形態中，以資料讀取裝置56讀取之液晶面板2之資料作為被讀取資料之液晶面板2之個別資料，與被讀取資料之液晶面板2建立關聯。又，於本形態中，將以資料讀取裝置56讀取資料後之液晶面板2向處理裝置15搬送。因此，於本形態中，可向處理裝置15供給與個別資料建立關聯後之液晶面板2，其結果，於處理裝置15中，可基於個別資料適當地處理液晶面板2。又，於本形態中，由於以資料讀取裝置56讀取液晶面板2之資料之前以對準裝置57將液晶面板2對位，故可以資料讀取裝置56確實且正確地讀取液晶面板2之資料。 於本形態中，個別地設置將層疊之托盤3向後側搬送之輸送機4、與將層疊之托盤3向前側搬送之輸送機5，且可個別地進行收納有液晶面板2之層疊狀態之托盤3之向後側之搬送、及層疊狀態之空托盤3之向前側之搬送。因此，於本形態中，與由共通之輸送機進行收納有液晶面板2之層疊狀態之托盤3之向後側之搬送、與層疊狀態之空托盤3之向前側之搬送之情形相比，可縮短搬送系統1之週期。 又，於本形態中，由於設置有2個托盤載台6、7，故例如可一面由機器人9進行自托盤載台6上之托盤3搬出液晶面板2，一面由機器人8自托盤載台7將空托盤3搬送至輸送機5且自輸送機4將收納有液晶面板2之托盤3搬送至托盤載台7。即，可一面由機器人9進行自托盤載台6上之托盤3搬出液晶面板2，一面由機器人8進行托盤載台7上之托盤3之更換。因此，於本形態中，與設置之托盤載台之數量為1個之情形相比，可縮短搬送系統1之週期。 於本形態中，機器人8以自本體框架11之上表面11a立起之方式設置於上表面11a，機器人9以懸垂於配置於較機器人8之上端更上側之本體框架12之上表面部12a之方式設置於上表面部12a。因此，於本形態中，易於防止使機器人8與機器人9同時動作時機器人8與機器人9干涉。又，於本形態中，由於機器人9為所謂之並行連接機器人，故可以相對高速進行自托盤3搬出液晶面板2。 於本形態中，機器人8進行自輸送機4向托盤載台6、7搬送托盤3、及自托盤載台6、7向輸送機5搬送托盤3。因此，於本形態中，與個別設置進行自輸送機4向托盤載台6、7搬送托盤3的機器人、與進行自托盤載台6、7向輸送機5搬送托盤3的機器人之情形相比，可簡化搬送系統1之構成。 於本形態中，分割輸送機20具備限制左右方向之托盤3之移動之導引構件27。又，於本形態中，分割輸送機20具備供托盤3之後端抵接之抵接構件28，輸送機4於機器人8向托盤載台6、7搬送托盤3前將托盤3搬送至後側並使托盤3抵接於抵接構件28。因此，於本形態中，可將由機器人8搬送至托盤載台6、7前之托盤3於輸送機4上對位。因此，於本形態中，可精度良好地將托盤3載置於托盤載台6、7。 於本形態中，將檢測輸送機4上之托盤3之層數之層數檢測機構29安裝於分割輸送機20。因此，於本形態中，可基於層數檢測機構29之檢測結果使機器人8動作，藉此防止機器人8之托盤固持部39與托盤3碰撞。又，於本形態中，由於輸送機4由可個別驅動之5個分割輸送機16～20構成，輸送機5由可個別驅動之5個分割輸送機21～25構成，故可於前後方向上個別地搬送複數個層疊之托盤3。因此，於本形態中，輸送機4、5之易用性較佳。 [實施形態2] (搬送系統之整體構成) 圖8係本發明之實施形態2之搬送系統91之側視圖。圖9係自圖8之F-F方向顯示搬送系統91之俯視圖。 本形態之搬送系統91與實施形態1之搬送系統1同樣地組入於小型液晶顯示器之製造線而使用。該搬送系統91搬送自處理裝置15排出之液晶面板2。又，搬送系統91搬送小型之液晶面板2。於本形態中，於處理裝置15之後側配置有搬送系統91。於以下之說明中，關於與實施形態1共通之構成，標註同一符號並將其說明省略或簡化。 搬送系統91具備搬送可收納液晶面板2之托盤3之4個輸送機94～97。輸送機94～97與實施形態1之輸送機4、5同樣，將堆疊成複數層之托盤3(層疊之托盤3)向前後方向搬送。又，搬送系統91與搬送系統1同樣地具備機器人8、9。另，本形態之機器人8之本體框架35之左右方向寬度長於實施形態1之機器人8之本體框架35之左右方向長度，本形態之可動框架36之左右方向之可動量大於實施形態1之可動框架36之可動量。然而，除了該點以外，本形態之機器人8與實施形態1之機器人8同樣構成。 又，搬送系統91具備載置托盤3之4個托盤載台98～101、及接收自處理裝置15排出之液晶面板2並交接至機器人9之排出單元102。托盤載台98～101配置於較輸送機94～97更前側。排出單元102配置於較托盤載台98～101更前側。再者，搬送系統91與搬送系統1同樣地具備本體框架11、12。 (輸送機之構成及動作) 與輸送機4、5同樣，輸送機94～97為具備複數個滾筒之滾筒輸送機。輸送機94、輸送機95、輸送機96及輸送機97自右側向左側依序配置，而於左右方向鄰接配置。輸送機94、95將層疊之托盤3向前側搬送，輸送機96、97將層疊之托盤3向後側搬送。即，輸送機94、95向接近托盤載台98～101之方向搬送托盤3，輸送機96、97向遠離托盤載台98～101之方向搬送托盤3。 於以輸送機94、95搬送之托盤3未收納液晶面板2，故以輸送機94、95搬送之托盤3為空托盤。另一方面，於以輸送機96、97搬送之托盤3收納有複數片液晶面板2。本形態之輸送機94、95係供給側輸送機，輸送機96、97係排出側輸送機。另，輸送機94～97可為皮帶輸送機等。 輸送機94、95由在前後方向分割之3個分割輸送機18～20構成。分割輸送機18～20自後側向前側依序配置。同樣地，輸送機96、97由在前後方向分割之3個分割輸送機23～25構成。分割輸送機23～25自後側向前側依序配置。如上所述，分割輸送機18～20、23～25各者具備馬達與將馬達之動力傳遞至滾筒之動力傳遞機構，且分割輸送機18～20、23～25可個別驅動。 於分割輸送機18，載置有由作業者自暫時放置用之架子(省略圖示)搬運來之層疊狀態之空托盤3。載置於分割輸送機18之層疊狀態之托盤3由輸送機94、95向前側搬送。搬送至分割輸送機20之層疊狀態之托盤3由機器人8拆疊。又，於分割輸送機25，由機器人8將收納有液晶面板2之托盤3層疊。於將托盤3層疊至特定層數時，層疊狀態之托盤3由輸送機96、97搬送至後側。搬送至分割輸送機23之層疊狀態之托盤3由作業者搬運至暫時放置用之架子。 另，於將層疊狀態之托盤3載置於分割輸送機18時，通常於分割輸送機19、20之至少任一分割輸送機19、20載置有層疊狀態之托盤3。又，於在分割輸送機25層疊有托盤3時，有時於分割輸送機23、24之至少任一分割輸送機23、24載置有層疊狀態之托盤3。 與實施形態1同樣，分割輸送機20具備導引構件27。又，分割輸送機20具備抵接構件28。抵接構件28配置於分割輸送機20之前端。即，抵接構件28配置於輸送機94、95搬送托盤3之方向之下游端。與實施形態1同樣，輸送機94、95於機器人8向托盤載台98～101搬送托盤3前將托盤3搬送至前側並使托盤3抵接於抵接構件28。又，於分割輸送機20，與實施形態1同樣，安裝有層數檢測機構29。 (托盤載台之構成及動作) 圖10係圖9所示之托盤載台98～101之立體圖。 於托盤載台98～101載置有1個托盤3。托盤載台98～101之上表面形成為正交於上下方向之平面狀。又，托盤載台98～101之上表面配置於較輸送機94～97之上表面更上側。托盤載台98、99固定於本體框架11。托盤載台98與托盤載台99於左右方向鄰接配置。於本形態中，將托盤載台98配置於右側，將托盤載台99配置於左側。 又，搬送系統91具備：載台移動機構105，其使托盤載台100向左右方向及前後方向移動；及載台移動機構106，其使托盤載台101向左右方向及前後方向移動。即，搬送系統91具備使2個托盤載台100、101個別移動之2個載台移動機構105、106。本形態之托盤載台98、99係固定托盤載台，托盤載台100、101係可於左右方向與前後方向移動之可動托盤載台。 載台移動機構105具備：可動框架107，其以可向左右方向滑動之方式保持托盤載台100；固定框架108，其以可向前後方向滑動之方式保持可動框架107；驅動機構，其使托盤載台100相對於可動框架107向左右方向滑動；及驅動機構，其使可動框架107相對於固定框架108向前後方向滑動。同樣地，載台移動機構106具備：可動框架109，其以可向左右方向滑動之方式保持托盤載台101；固定框架110，其以可向前後方向滑動之方式保持可動框架109；驅動機構，其使托盤載台101相對於可動框架109向左右方向滑動；及驅動機構，其使可動框架109相對於固定框架110向前後方向滑動。 載台移動機構105使托盤載台100於在托盤載台98之右側配置托盤載台100之第1位置(圖9之二點鏈線所示之位置)、與前後方向上於托盤載台98之右端側部分之前配置托盤載台100之左端側部分之第2位置(圖9之實線所示之位置)之間移動。即，載台移動機構105使托盤載台100於左右方向上與托盤載台98並排之第1位置、與前後方向上與托盤載台98之一部分重疊之第2位置之間移動。 載台移動機構106使托盤載台101於在托盤載台99之左側配置托盤載台101之第1位置(圖9之二點鏈線所示之位置)、與前後方向上於托盤載台99之左端側部分之前配置托盤載台101之右端側部分之第2位置(圖9之實線所示之位置)之間移動。即，載台移動機構106使托盤載台101於左右方向上與托盤載台99並排之第1位置、與前後方向上與托盤載台99之一部分重疊之第2位置之間移動。 (機器人之構成及動作) 如上所述，本形態之機器人8之本體框架35之左右方向寬度長於實施形態1之機器人8之本體框架35之左右方向長度，本形態之可動框架36之左右方向之可動量大於實施形態1之可動框架36之可動量。本體框架35以於左右方向跨越輸送機94～97之方式設置。又，本體框架35以跨越分割輸送機19、24之前端側部分及分割輸送機20、25之後端側部分之方式配置。 機器人8進行自輸送機94、95向托盤載台98～101之托盤3之搬送、及自托盤載台98～101向輸送機96、97之托盤3之搬送。具體而言，機器人8將搬送至分割輸送機20之層疊狀態之空托盤3逐個搬送至托盤載台98～101，並將分割輸送機20上之層疊狀態之托盤3拆疊。又，機器人8將收納有特定個數之液晶面板2之1個托盤3自托盤載台98～101搬送至分割輸送機25，並將托盤3層疊於分割輸送機25直至分割輸送機25上堆疊之托盤3之層數變為特定之層數。 於本形態中，於由機器人8於輸送機94～97與托盤載台100之間進行托盤3之搬送時，托盤載台100配置於圖9之二點鏈線所示之第1位置。同樣地，於由機器人8於輸送機94～97與托盤載台101之間進行托盤3之搬送時，托盤載台101配置於圖9之二點鏈線所示之第1位置。另，於本形態中，配置於圖9之實線所示之第2位置之托盤載台100、101超出機器人8之動作範圍。 機器人9於載置於托盤載台98之托盤3、載置於托盤載台99之托盤3、載置於托盤載台100之托盤3或載置於托盤載台101之托盤3逐片搬入液晶面板2。具體而言，機器人9將自後述之面板載台113搬出之液晶面板2逐片搬入至載置於托盤載台98～101之托盤3。又，機器人9搬入液晶面板2直至將特定個數之液晶面板2收納於托盤3。 於本形態中，於由機器人9將液晶面板2搬入至載置於托盤載台100之托盤3時，托盤載台100配置於圖9之實線所示之第2位置。同樣地，於由機器人9將液晶面板2搬入至載置於托盤載台101之托盤3時，托盤載台101配置於圖9之實線所示之第2位置。另，於本形態中，配置於圖9之二點鏈線所示之第1位置之托盤載台100、101超出機器人9之動作範圍。 (排出單元之構成及動作) 圖11係圖8所示之排出單元102之立體圖。圖12係圖11所示之排出單元102之俯視圖。 排出單元102具備載置液晶面板2之面板載台111～113。本形態之排出單元102具備：一對(2個)面板載台111，其於左右方向鄰接配置；一對面板載台112，其於左右方向鄰接配置；及一對面板載台113，其於左右方向鄰接配置。面板載台111～113固定於基底板114之左端側。一對面板載台111～113自前側向後側依序且以一定之間距配置。又，一對面板載台111～113於左右方向上配置於相同位置。面板載台111～113具備真空吸附載置於面板載台111～113之上表面之液晶面板2之複數個吸附部。 又，排出單元102具備：資料讀取裝置116，其讀取記錄於液晶面板2之資料；機器人117，其將自處理裝置15排出之液晶面板2搬送至面板載台111；機器人118，其將載置於面板載台111之液晶面板2搬送至面板載台112、113；及電離器59，其自搬入至托盤3之液晶面板2去除靜電。該等構成載置並固定於基底板114。基底板114載置並固定於本體框架11之上表面11a之前端側部分。電離器59配置於面板載台111之上方，去除載置於面板載台111之液晶面板2之靜電。 機器人117具備：2個面板固持部121，其等真空吸附並固持液晶面板2；可動框架122，其以可向上下方向滑動之方式保持面板固持部121；固定框架123，其以可向左右方向滑動之方式保持可動框架122；升降機構，其使面板固持部121相對於可動框架122升降；及驅動機構，其使可動框架122相對於固定框架123向左右方向滑動。 固定框架123固定於基底板114。2個面板固持部121以於左右方向上隔出特定間隔之狀態配置。2個面板固持部121於前後方向上配置於與面板載台111相同之位置。機器人117以面板固持部121真空吸附並固持自處理裝置15排出之2片液晶面板2，且搬送至面板載台111。另，自處理裝置15排出之液晶面板2由設置於處理裝置15內部之對準機構對位。 機器人118具備：2個面板固持部124，其等真空吸附並固持液晶面板2；2個面板固持部125，其等真空吸附並固持液晶面板2；可動框架126，其以可向上下方向滑動之方式保持面板固持部124、125；固定框架127，其以可向前後方向滑動之方式保持可動框架126；升降機構，其使面板固持部124、125相對於可動框架126升降；及驅動機構，其使可動框架126相對於固定框架127向前後方向滑動。固定框架127固定於基底板114。 2個面板固持部124以於左右方向上隔出特定間隔之狀態配置，2個面板固持部125以於左右方向上隔出特定間隔之狀態配置。面板固持部124與面板固持部125以於前後方向上隔出特定間隔之狀態配置。於本形態中，將面板固持部124配置於前側，將面板固持部125配置於後側。前後方向之面板固持部124與面板固持部125之間距與前後方向之面板載台111～113之間距相等。又，面板固持部124、125於左右方向上配置於與面板載台111～113相同之位置。 機器人118將載置於面板載台111之液晶面板2依序搬送至面板載台112、面板載台113。具體而言，面板固持部124將載置於面板載台111之液晶面板2搬送至面板載台112，面板固持部125將載置於面板載台112之液晶面板2搬送至面板載台113。載置於面板載台113之液晶面板2由機器人9搬送至載置於托盤載台98～101之托盤3。 資料讀取裝置116具備：2個相機81；2個可動框架129，其等以可向上下方向滑動之方式保持2個相機81各者；可動框架130，其以可向左右方向滑動之方式保持2個可動框架129；可動框架131，其以可向前後方向滑動之方式保持可動框架130；固定框架132，其以可向左右方向滑動之方式保持可動框架131；升降機構，其使2個相機81各者相對於2個可動框架129各者升降；驅動機構，其使2個可動框架129各者相對於可動框架130向左右方向滑動；驅動機構，其使可動框架130相對於可動框架131向前後方向滑動；及驅動機構，其使可動框架131相對於固定框架132向左右方向滑動。固定框架132固定於基底板114。又，資料讀取裝置116具備將光照射至液晶面板2之照明。 資料讀取裝置116載置於基底板114之前後方向之中心位置，且讀取載置於面板載台112之液晶面板2所記錄之資料。即，資料讀取裝置116讀取由機器人9搬入托盤載台98～101上之托盤3前之液晶面板2之資料。以資料讀取裝置116讀取之液晶面板2之資料作為被讀取資料之液晶面板2之個別資料，與被讀取資料之液晶面板2建立關聯。 (本形態之主要效果) 如以上說明般，於本形態中，機器人8將收納有液晶面板2之1個托盤3自托盤載台98～101搬送至分割輸送機25，並將托盤3層疊於分割輸送機25。即，於本形態中，由機器人8自動進行托盤3之層疊。因此，於本形態中，可抑制托盤3之層疊作業之差異，可使托盤3之層疊作業穩定。因此，於本形態中，可抑制進行托盤3之層疊時液晶面板2之損傷。 於本形態中，托盤載台100、101可於圖9之二點鏈線所示之第1位置、與圖9之實線所示之第2位置之間移動。因此，於本形態中，即便配置於第2位置之托盤載台100、101超出機器人8之動作範圍，且配置於第1位置之托盤載台100、101超出機器人9之動作範圍，亦可由機器人8於輸送機94～97與托盤載台100、101之間搬送托盤3，且由機器人9將液晶面板2搬入至托盤載台100、101上之托盤3。即，於本形態中，即便使機器人8之可動範圍或機器人8之可動範圍較窄，亦可由機器人8於輸送機94～97與托盤載台100、101之間搬送托盤3，且由機器人9將液晶面板2搬入至托盤載台100、101上之托盤3。 又，於本形態中，可獲得與實施形態1同樣之效果。例如，於本形態中，自處理裝置15排出之液晶面板2由機器人117、118搬送至托盤載台113後，由機器人9搬入至托盤載台98～101上之托盤3，因此可抑制液晶面板2之搬送作業之差異，可使液晶面板2之搬送作業穩定。因此，於本形態中，可抑制液晶面板2之搬送時液晶面板2之損傷。 又，例如，於本形態中，以資料讀取裝置116讀取之液晶面板2之資料作為被讀取資料之液晶面板2之個別資料，與被讀取資料之液晶面板2建立關聯，並將以資料讀取裝置116讀取資料後之液晶面板2搬入托盤載台98～101上之托盤3，因此可將與個別資料建立關聯後之液晶面板2收納於托盤3。 [實施形態1之變化例] 圖13係實施形態1之變化例之供給單元140之立體圖。圖14係圖13所示之供給單元140之俯視圖。 於實施形態1之搬送系統1中，搬送小型之液晶面板2，但於搬送系統1中，亦可搬送中型之液晶面板2(例如15吋之液晶面板2)。於以搬送系統1搬送之液晶面板2為小型之情形時，與以搬送系統1搬送之液晶面板2為中型之情形相比，一般供給單元10中所要求之週期縮短。供給單元10係為了縮短供給單元10之週期，而具備面板載台64、可動框架65、66、固定框架67、及機器人61。 相對於此，於以搬送系統1搬送之液晶面板2為中型之情形時，可代替供給單元10而設置供給單元140，且該供給單元140不具備相當於面板載台64之構成、相當於可動框架65、66之構成、相當於固定框架67之構成及相當於機器人61之構成。以下，說明供給單元140之構成。另，於以下之說明中，關於與實施形態1共通之構成，標註同一符號並將其說明省略或簡化。 供給單元140具備：資料讀取裝置146，其讀取記錄於液晶面板2之資料；機器人148，其將以資料讀取裝置146讀取資料後之液晶面板2向處理裝置15搬送；電離器59，其自向處理裝置15搬送之液晶面板2去除靜電；及搬送裝置150，其將以資料讀取裝置146讀取資料後之液晶面板2向機器人148搬送。 資料讀取裝置146、機器人148、電離器59及搬送裝置150載置並固定於基底板152。資料讀取裝置146載置於基底板152之左端側。機器人148載置於基底板152之右端側。電離器59載置於基底板152之左右方向之中心位置。搬送裝置150於左右方向上配置於資料讀取裝置146與機器人148之間。基底板152載置並固定於本體框架11之上表面11a之後端側部分。 又，供給單元140具備：2個相機68及2個照明69，其等用以於以資料讀取裝置146讀取液晶面板2之資料前進行液晶面板2之對位。相機68及照明69配置於搬送裝置150之前側。又，相機68及照明69於自上下方向觀察時配置於托盤載台6與托盤載台7之間。又，相機68及照明69載置於固定於本體框架11之上表面11a之基底板153，相機68自液晶面板2之下側檢測液晶面板2之邊緣。 相機68係為了檢測形成為長方形狀之液晶面板2之一對角線上之2個角部，而載置於基底板153之右前端側、與基底板153之左後端側之2個部位。2個照明69配置於前後方向之2個相機68之間。照明69以向下側射出光之方式配置，於以相機68檢測液晶面板2之邊緣時，由基底板153反射之光(即間接光)照射至液晶面板2。 資料讀取裝置146具備相機81、及固定相機81之固定框架154。固定框架154固定於基底板152。又，資料讀取裝置146具備將光照射至液晶面板2之照明。相機81自液晶面板2之下側讀取記錄於液晶面板2之資料。 搬送裝置150具備：滑動載台155，其載置液晶面板2；固定框架156，其以可向左右方向滑動之方式保持滑動載台155；及驅動機構，其使滑動載台155相對於固定框架156向左右方向滑動。滑動載台155具備真空吸附載置於滑動載台155之上表面之液晶面板2之複數個吸附部。固定框架156固定於基底板152。 機器人148具備：面板固持部158，其真空吸附並固持液晶面板2；可動框架159，其以可向上下方向滑動之方式保持面板固持部158；可動框架160，其以可向左右方向滑動之方式保持可動框架159；固定框架161，其以可向前後方向滑動之方式保持可動框架160；升降機構，其使面板固持部158相對於可動框架159升降；驅動機構，其使可動框架159相對於可動框架160向左右方向滑動；及驅動機構，其使可動框架160相對於固定框架161向前後方向滑動。固定框架161固定於基底板152。 於該變化例中，機器人9將自托盤載台6、7上之托盤3搬出之液晶面板2直接搬送至相機68之上方。若由相機68檢測到液晶面板2之邊緣，則機器人9基於液晶面板2之邊緣之檢測結果，一面進行液晶面板2之對位，一面將液晶面板2搬送至資料讀取裝置146。於該變化例中，由機器人9、相機68、及照明69構成進行液晶面板2之對位之對準裝置，該對準裝置檢測液晶面板2之邊緣且基於液晶面板2之邊緣之檢測結果而進行液晶面板2之對位。 又，於將液晶面板2搬送至資料讀取裝置146之上方時，相機81讀取液晶面板2之資料。於由相機81讀取到液晶面板2之資料時，機器人9將液晶面板2搬送至移動至左端側而停止之滑動載台155並將液晶面板2載置於滑動載台155。於液晶面板2載置於滑動載台155時，搬送裝置150使滑動載台155向右方向移動，並將液晶面板2搬送至搬送裝置150之右端側。機器人148以面板固持部158真空吸附並固持由搬送裝置150搬送至搬送裝置150之右端側之液晶面板2，且自滑動載台155將液晶面板2搬入至處理裝置15。電離器59配置於搬送裝置150之上方，並去除以搬送裝置150搬送之液晶面板2之靜電。 [實施形態2之變化例] 圖15係實施形態2之變化例之排出單元172之立體圖。圖16係圖15所示之排出單元172之俯視圖。 於實施形態2之搬送系統91中，搬送小型之液晶面板2，但於搬送系統91中，亦可搬送中型之液晶面板2。於液晶面板2為小型之情形時，與液晶面板2為中型之情形相比，一般排出單元102中所要求之週期縮短。因此，於以搬送系統91搬送之液晶面板2為中型時所設置之排出單元172之構成可與實施形態2之排出單元102之構成不同。以下，說明排出單元172之構成。另，於以下之說明中，關於與實施形態1、2共通之構成，標註同一符號並將其說明省略或簡化。 排出單元172具備載置液晶面板2之面板載台173。面板載台173固定於基底板174之左後端側。面板載台173具備真空吸附載置於面板載台173之上表面之液晶面板2之複數個吸附部。又，排出單元172具備：資料讀取裝置175，其讀取記錄於液晶面板2之資料；機器人176、搬送裝置177及機器人178，其等將自處理裝置15排出之液晶面板2搬送至面板載台173；及電離器59，其自搬入至托盤3之液晶面板2去除靜電。該等構成載置並固定於基底板174。 資料讀取裝置175配置於面板載台173之緊鄰後側。機器人176載置於基底板174之右端側，機器人178載置於基底板174之左端側。電離器59載置於基底板174之左右方向之中心位置。搬送裝置177於左右方向上配置於機器人176與機器人178之間。基底板174載置並固定於本體框架11之上表面11a之前端側部分。 資料讀取裝置175具備相機81、及固定相機81之固定框架179。固定框架179固定於基底板174。又，資料讀取裝置175具備將光照射至液晶面板2之照明。相機81自液晶面板2之下側讀取記錄於液晶面板2之資料。 搬送裝置177具備：滑動載台180，其載置液晶面板2；固定框架181，其以可向左右方向滑動之方式保持滑動載台180；及驅動機構，其使滑動載台180相對於固定框架181向左右方向滑動。滑動載台180具備真空吸附載置於滑動載台180之上表面之液晶面板2之複數個吸附部。固定框架181固定於基底板174。 機器人176具備：面板固持部184，其真空吸附並固持液晶面板2；可動框架185，其以可向上下方向滑動之方式保持面板固持部184；固定框架186，其以可向左右方向滑動之方式保持可動框架185；升降機構，其使面板固持部184相對於可動框架185升降；及驅動機構，其使可動框架185相對於固定框架186向左右方向滑動。 固定框架186固定於基底板174。面板固持部184於前後方向上配置於與滑動載台180相同之位置。機器人176以面板固持部184真空吸附並固持自處理裝置15排出之液晶面板2，且將液晶面板2搬送至移動至右端側而停止之滑動載台180並將液晶面板2載置於滑動載台180。 機器人178具備：面板固持部187，其真空吸附並固持液晶面板2；可動框架188，其以可向上下方向滑動之方式保持面板固持部187；固定框架189，其以可向前後方向滑動之方式保持可動框架188；升降機構，其使面板固持部187相對於可動框架188升降；及驅動機構，其使可動框架188相對於固定框架189向前後方向滑動。 固定框架188固定於基底板174。面板固持部187於左右方向上配置於與面板載台173相同之位置。機器人178以面板固持部187真空吸附並固持載置於移動至左端側而停止之滑動載台180之液晶面板2，且搬送至面板載台173。 於該變化例中，機器人9將載置於面板載台173之液晶面板2搬送至資料讀取裝置175之上方。於將液晶面板2搬送至資料讀取裝置175之上方時，相機81讀取液晶面板2之資料。於由相機81讀取到液晶面板2之資料時，機器人9直接將液晶面板2搬送至載置於托盤載台98～101之托盤3。電離器59配置於搬送裝置177之上方，並去除以搬送裝置177搬送之液晶面板2之靜電。 [其他實施形態] 上述之形態係本發明之較佳之形態之一例，但並非限定於此，於不變更本發明主旨之範圍內可實施各種變化。 於上述之形態中，搬送系統1搬送供給至處理裝置15之液晶面板2，搬送系統91搬送自處理裝置15排出之液晶面板2，但應用本發明之搬送系統亦可搬送供給至處理裝置15之液晶面板2且搬送自處理裝置15排出之液晶面板2。該情形之搬送系統具備機器人8、9，且與搬送系統91同樣具備4個輸送機94～97、4個托盤載台98～101、及2個載台移動機構105、106。又，該情形之搬送系統具備例如相機68、照明69及資料讀取裝置56等。 又，於該情形時，輸送機94～97搬送收納有液晶面板2之層疊狀態之托盤3。機器人8於輸送機94～97與托盤載台98～101之間搬送收納有液晶面板2之托盤3。即，機器人8進行收納有液晶面板2之托盤3之拆疊與層疊。機器人9進行自托盤載台98～101上之托盤3搬出液晶面板2、與向托盤載台98～101上之托盤3搬入液晶面板2。又，例如，資料讀取裝置56讀取由機器人9自托盤3搬出後之液晶面板2(供給至處理裝置15之液晶面板2)之資料、及由機器人9搬入至托盤3之液晶面板2(自處理裝置15排出之液晶面板2)之資料。 又，於該情形時，較佳將載置有空托盤3之托盤載台(空托盤載台)設置於機器人8之動作範圍內。於該空托盤載台，以層疊狀態載置有例如3個左右之空托盤3，機器人8根據需要自空托盤載台向托盤載台98～101搬送空托盤3。又，機器人8根據需要將托盤載台98～101上變空之托盤3搬送至空托盤載台。 於上述之形態中，於托盤載台6、7、98～101載置有1個托盤3，但亦可將複數個托盤3以相互不重疊之方式載置於托盤載台6、7、98～101。又，於上述之形態中，搬送系統1具備2個托盤載台6、7，搬送系統91具備4個托盤載台98～101，但亦可為搬送系統1具備4個托盤載台，搬送系統91具備2個托盤載台。又，搬送系統1、91所具備之托盤載台之數量可為3個，亦可為5個以上。又，搬送系統1、91所具備之托盤載台之數量亦可為1個。 於上述之形態中，搬送系統1具備2個輸送機4、5，搬送系統91具備4個輸送機94～97，但亦可為搬送系統1具備4個輸送機，搬送系統91具備2個輸送機。又，搬送系統1、91所具備之輸送機之數量可為3個，亦可為5個以上。又，搬送系統1、91所具備之輸送機之數量亦可為1個。 於實施形態2中，配置於圖9之實線所示之第2位置之托盤載台100、101超出機器人8之動作範圍，但配置於第2位置之托盤載台100、101亦可處於機器人8之動作範圍內。於該情形時，不需要載台移動機構105、106，且托盤載台100、101例如於第2位置固定。又，於實施形態2中，配置於圖9之二點鏈線所示之第1位置之托盤載台100、101超出機器人9之動作範圍，但配置於第1位置之托盤載台100、101亦可處於機器人9之動作範圍內。於該情形時，不需要載台移動機構105、106，且托盤載台100、101例如於第1位置固定。 於上述之形態中，輸送機4、5、94～97由複數個分割輸送機構成，但輸送機4、5、94～97亦可為一體型之輸送機。又，於實施形態1中，輸送機4與輸送機5於左右方向鄰接配置，但亦可以輸送機4與輸送機5於上下方向重疊之方式配置。同樣地，於實施形態2中，4個輸送機94～97於左右方向鄰接配置，但亦可以自4個輸送機94～97中選擇之任意2個輸送機94～97與剩餘之2個輸送機94～97於上下方向重疊之方式配置。 於上述之形態中，機器人8為可使托盤固持部39向上下方向、左右方向及前後方向移動之3軸正交機器人，但機器人8亦可為能使托盤固持部39向左右方向及前後方向移動之2軸正交機器人。於該情形時，滾筒輸送機即輸送機4、5、94～97具備使複數個滾筒升降之升降機構。又，機器人8亦可為水平多關節機器人。又，於上述之形態中，機器人9為並行連接機器人，但機器人9亦可為水平多關節機器人。於該情形時，機器人9可以自本體框架11之上表面11a立起之方式設置於上表面11a。 於上述之形態中，機器人8進行自輸送機4、94、95向托盤載台6、7、98～101之托盤3之搬送、及自托盤載台6、7、98～101向輸送機5、96、97之托盤3之搬送，但亦可個別設置進行自輸送機4、94、95向托盤載台6、7、98～101之托盤3之搬送的機器人、及自托盤載台6、7、98～101向輸送機5、96、97之托盤3之搬送的機器人。又，於上述之形態中，以搬送系統1、91搬送之顯示面板為液晶面板2，但以搬送系統1、91搬送之顯示面板亦可為液晶面板2以外之顯示面板。例如，以搬送系統1、91搬送之顯示面板亦可為有機EL(Electro Luminescence：電致發光)面板。the following, Referring to the drawings, An embodiment of the present invention will be described.  [Embodiment 1] (Overall configuration of transport system) Fig. 1 is a side view of a transport system 1 according to Embodiment 1 of the present invention. FIG. 2 is a plan view showing the conveying system 1 from the E-E direction in FIG. 1.  The conveyance system 1 of this form is incorporated in a small liquid crystal display manufacturing line used in a portable device or the like and used. This transport system 1 transports a liquid crystal panel 2 which is a display panel, The liquid crystal panel 2 is supplied to a processing device 15 (see FIG. 2) that performs a specific process on the liquid crystal panel 2. which is, This transport system 1 transports the liquid crystal panel 2 supplied to the processing device 15. also, The transport system 1 transports a small-sized liquid crystal panel 2 (for example, a 4-inch liquid crystal panel 2).  The liquid crystal panel 2 is formed in a rectangular flat plate shape. On the part of the LCD panel 2 beyond the display area, Information such as inspection data of the LCD panel 2 is recorded. in particular, On the part of the LCD panel 2 beyond the display area, Record inspection data and other data as two-dimensional code or one-dimensional code. which is, On the part of the LCD panel 2 beyond the display area, Recorded with optically readable data. another, The liquid crystal panel 2 transported by the transport system 1 of this form, Can attach polarizing plate (polarizing film), It is not necessary to attach a polarizing plate. also, In LCD panel 2, FPC (Flexible Printed Circuit: Flexible printed circuits) or wafers, There is no need to install FPC or chip.  The conveying system 1 includes two conveyors 4 for conveying a tray 3 capable of storing the liquid crystal panel 2, 5. Conveyor 4, 5 trays 3 (i.e., The stacked trays 3) are transported linearly in the horizontal direction. E.g, Conveyor 4, 5 The pallets 3 stacked in 20 layers are transported linearly in a horizontal direction.  In the following description, Put the conveyor 4, The direction of the transport tray 3 (X direction in FIG. 1 and the like) of 5 is set to the "back and forth direction", A direction orthogonal to the vertical direction (vertical direction) and the front-rear direction (Y direction in FIG. 1 and the like) is referred to as a "left-right direction". also, Set one side in the front-rear direction (the X1 direction side in FIG. 1 etc.) as the "front" side, Set the opposite side (the X2 direction side in Figure 1 etc.) as the "rear (rear) side", Set one side in the left-right direction (the Y1 direction side in Fig. 2 etc.) as the "right" side, The opposite side (the Y2 direction side in Fig. 2 and the like) is set to the "left" side. In this form, A processing device 15 is disposed on the rear side of the transport system 1.  also, The transport system 1 has: 2 pallet carriers6, 7, Their mounting trays 3; Robot 8 as the first transfer robot, Its on the conveyor 4, 5 and pallet carrier 6, Transfer tray 3 between 7; Robot 9 as the second transfer robot, It is self-loaded on the tray carrier 6. The tray 3 of 7 carries out the liquid crystal panel 2; And supply unit 10, It receives the liquid crystal panel 2 from the robot 9 and supplies it to the processing device 15. Tray carrier 6, 7 Configured on the conveyor 4. 5 more rear. The supply unit 10 is disposed on the tray stage 6, 7 more rear.  also, The transport system 1 includes a conveyor 4, 5. Tray carrier 6, 7. The main frame 11 of the robot 8 and the supply unit 10 as the first frame, And a body frame 12 as a second frame provided with the robot 9. The body frame 11 is formed to be slender in the front-back direction, And low-profile flat rectangular parallelepiped. The upper surface 11a of the main body frame 11 is formed in a flat shape orthogonal to the vertical direction. A conveyor 4 is provided on the upper surface 11a of the body frame 11. 5. Tray carrier 6, 7. Robot 8 and supply unit 10. The upper surface 11 a of this embodiment is a setting surface on which the robot 8 is installed.  The body frame 12 is a door-type frame formed in a substantially door-type. The width of the body frame 12 in the left-right direction is wider than the width of the body frame 11 in the left-right direction. The width of the body frame 12 in the front-rear direction is shorter than the length of the body frame 11 in the front-rear direction. The height of the body frame 12 is higher than the height of the body frame 11, The main body frame 12 includes an upper surface portion 12 a that is disposed on an upper side than the upper surface 11 a of the main body frame 11. The upper surface portion 12a is disposed more than the conveyor 4, 5. Tray carrier 6, 7. The robot 8 and the supply unit 10 are further up.  The main body frame 12 is provided so as to straddle the main body frame 11 when viewed from the front-rear direction. which is, The main body frame 12 is provided so as to straddle the main body frame 11 in the left-right direction. also, The main body frame 12 is provided so as to span the rear end portion of the main body frame 11. The robot 9 is provided on the upper surface portion 12 a of the main body frame 12. The upper surface part 12a of this form is a setting part in which the robot 9 is installed.  (Construction and Operation of Conveyor) FIG. 3 is a perspective view of the divided conveyor 20 shown in FIG. 1. FIG. 4 is a schematic diagram for explaining the structure of the layer number detecting mechanism 29 shown in FIG. 3 and the structure of the tray holding portion 39 shown in FIG. 1.  Conveyor 4, 5 is a roller conveyor with a plurality of rollers. The conveyor 4 and the conveyor 5 are arranged adjacent to each other in the left-right direction. The conveyor 4 transports the stacked trays 3 to the rear side, The conveyor 5 conveys the stacked trays 3 to the front side. which is, Conveyor 4 approaches pallet carrier 6, Carry tray 3 in the direction of 7, Conveyor 5 moves away from pallet carrier 6, Carry tray 3 in the 7 direction. A plurality of liquid crystal panels 2 are stored in a tray 3 carried by a conveyor 4. on the other hand, The liquid crystal panel 2 is not stored in the tray 3 carried by the conveyor 5, The pallet 3 carried by the conveyor 5 is an empty pallet. This type of conveyor 4 is a supply side conveyor, The conveyor 5 is a discharge-side conveyor. another, Conveyor 4, 5 can also be a belt conveyor.  The conveyor 4 is composed of a plurality of divided conveyors 16 to 20 divided in the front-rear direction. The conveyor 4 of this embodiment is composed of five divided conveyors 16-20. The split conveyors 16 to 20 are sequentially arranged from the front side toward the rear side. Similarly, The conveyor 5 is composed of five divided conveyors 21 to 25 divided in the front-rear direction. The divided conveyors 21 to 25 are sequentially arranged from the front side toward the rear side. Each of the divided conveyors 16 to 25 includes a motor and a power transmission mechanism that transmits the power of the motor to the drum. The split conveyors 16 to 25 can be driven individually. The width of the divided conveyors 16 to 25 in the front-back direction is wider than the width in the front-back direction of the tray 3. in particular, The width of the divided conveyors 16 to 25 in the front-back direction is slightly wider than the width in the front-back direction of the tray 3.  For dividing conveyor 16, The stacked trays 3 are carried by the operator from a temporary storage rack (not shown). The pallets 3 placed on the stacked conveyor 16 are conveyed to the rear by the conveyor 4. The pallets 3 transported to the stacked state of the split conveyor 20 are unstacked by a robot 8 as described later. also, For split conveyor 25, The empty trays 3 are stacked by the robot 8 as described later. When the trays 3 are stacked to a specific number of layers, The stacked trays 3 are transported to the front by the conveyor 5. The pallets 3 transported to the stacked state of the split conveyor 21 are carried by the operator to a rack for empty pallets.  another, When the stacked trays 3 are placed on the dividing conveyor 16, Usually, the stacked trays 3 are placed on at least one of the divided conveyors 17 to 20. also, When the empty trays 3 are stacked on the dividing conveyor 25, The stacked empty trays 3 may be placed on at least one of the divided conveyors 21 to 24.  The dividing conveyor 20 disposed on the rearmost side of the conveyor 4 includes a guide member 27 (see FIG. 3) that restricts movement of the tray 3 in the left-right direction. The guide members 27 are arranged on both sides in the left-right direction of the dividing conveyor 20. The left-right distance between the guide surface of the guide member 27 arranged on the right side and the guide surface of the guide member 27 arranged on the left side is substantially equal to the width of the tray 3 in the left-right direction. also, The dividing conveyor 20 includes a contact member 28 for contacting the rear end of the tray 3. The abutment member 28 is arranged at the rear end of the dividing conveyor 20. which is, The abutment member 28 is disposed at the downstream end in the direction in which the conveyor 3 transports the tray 3.  In this form, The conveyor 4 is from the robot 8 to the pallet stage 6, 7 Before the tray 3 is conveyed, the tray 3 is conveyed to the rear side and the tray 3 is brought into contact with the abutment member 28. which is, For the robot 8 to the pallet stage 6, When the tray 3 of 7 is transported, Each time the tray 3 is transported to the rear side until it comes into contact with the abutment member 28, Carry the robot 8 to the pallet stage 6, 7 for pallet 3  A layer number detecting mechanism 29 that detects the number of layers of the tray 3 on the conveyor 4 is installed on the dividing conveyor 20. The number-of-layers detection mechanism 29 is attached to both ends of the divided conveyor 20 in the left-right direction. Figure 3, As shown in Figure 4, The number of layers detection mechanism 29 includes a sensor 30 that detects the presence or absence of the tray 3, And a lifting mechanism 31 for lifting the sensor 30. Sensor 30 is a reflective optical sensor, The light emitting element of the sensor 30 emits light toward the center of the divided conveyor 20 in the left-right direction. The elevating mechanism 31 includes a motor 32 and a ball screw (not shown) that converts the rotational movement of the motor 32 into linear movement in the vertical direction. another, The sensor 30 may be a transmissive optical sensor. It may also be a proximity sensor or the like.  When the number of layers of the tray 3 on the conveyor 4 is detected by the layer number detecting mechanism 29, After moving the sensor 30 to the upper limit position, The sensor 30 is lowered until the tray 3 is detected by the sensor 30. also, Based on the rotation position of the motor 32 when the tray 3 is detected by the sensor 30, The number of layers of the tray 3 on the conveyor 4 is detected. another, No layer detection mechanism 29 is installed on the split conveyor 25, However, it is also possible to install a layer number detection mechanism 29 on the dividing conveyor 25.  (Structure of the pallet carrier) In the pallet carrier 6, 7 holds one tray 3. Tray carrier 6, 7 is fixed to the main body frame 11. The tray stage 6 and the tray stage 7 are arrange | positioned in the state which left | separated the specific space | interval in the left-right direction. The tray stage 6 is arranged at substantially the same position as the conveyor 4 in the left-right direction, The tray stage 7 is arranged at substantially the same position as the conveyor 5 in the left-right direction. also, The tray carrier 6 is arranged immediately behind the dividing conveyor 20, The tray stage 7 is arranged immediately behind the dividing conveyor 25. Tray carrier 6, 7 The upper surface is formed in a flat shape orthogonal to the vertical direction. The pallet carrier 6, 7 The upper surface is arranged on the conveyor. 5 The upper surface is more upside.  (Configuration and Action of Robot) FIG. 5 is a perspective view of the robot 9 shown in FIG. 1.  The robot 8 is a so-called 3-axis orthogonal robot. The robot 8 has: Ontology frame 35, It is formed into a gate shape; Movable frame 36, It is held on the body frame 35 in such a manner as to be slidable in the left-right direction relative to the body frame 35; Movable frame 37, It is held on the movable frame 36 in a manner capable of sliding forward and backward with respect to the movable frame 36; Movable frame 38, It is held on the movable frame 37 in a manner capable of sliding up and down relative to the movable frame 37; And the tray holding portion 39, It is mounted on the movable frame 38. also, The robot 8 includes a driving mechanism that slides the movable frame 36 in the left-right direction, A driving mechanism for sliding the movable frame 37 forward and backward, And a driving mechanism that slides the movable frame 38 in the vertical direction.  The height of the body frame 35 is higher than that of the conveyor 4, 5's height. The main body frame 35 is a conveyor 4 arranged adjacent to the left-right direction when viewed from the front-back direction. 5 way configuration. which is, The main body frame 35 crosses the conveyor 4 in the left-right direction, 5 way configuration. also, The main body frame 35 is to span the dividing conveyor 19, 24 Rear end side and split conveyor 20, 25 Front end side configuration.  The movable frame 36 is mounted on the upper surface side of the body frame 35, And is arranged on the conveyor 4, 5 more upside. also, The movable frame 36 is arranged on the conveyor 4, The stacked tray 5 of 5 is further up. The movable frame 37 is mounted on the right side of the movable frame 36. The movable frame 38 is attached to the rear end side of the movable frame 37. also, The main body frame 35 is fixed to the upper surface 11 a so as to stand from the upper surface 11 a of the main body frame 11. which is, The robot 8 is installed on the upper surface 11a so as to stand on the upper surface 11a.  The tray holding portion 39 is attached to the lower end of the movable frame 38. The tray holding portion 39 is shown in FIG. 4. A plurality of suction sections 40 having a suction tray 3, The claws 41 for supporting the tray 3 from below, And a claw moving mechanism 42 that moves the claw portion 41. The suction part 40 is in contact with the upper surface of the tray 3 and vacuum suctions the tray 3. The claw portions 41 are arranged at the center position in the front-rear direction of the tray holding portion 39 and at both sides in the left-right direction. Claw moving mechanism 42 series cylinder, Then, the claw portion 41 is moved in the left-right direction. When the robot 8 transports the tray 3, The claw portion 41 is moved to the inner side in the left-right direction until the claw portion 41 is arranged below the conveyed tray 3. also, When the robot 8 transports the tray 3, The suction unit 40 sucks and holds the upper surface of the tray 3.  The robot 8 moves from the conveyor 4 to the pallet stage 6, 7 for pallet 3, And from pallet carrier 6, 7 Transfer to pallet 3 of conveyor 5. in particular, The robot 8 transfers the stacked pallets 3 transferred to the split conveyor 20 to the pallet carrier 6 or the pallet carrier 7, The stacked trays 3 on the split conveyor 20 are unstacked. also, The robot 8 transports the empty one pallet 3 from the pallet carrier 6 or the pallet carrier 7 to the dividing conveyor 25, The trays 3 are stacked on the split conveyor 25 until the number of layers of the trays 3 stacked on the split conveyor 25 becomes a specific number.  The robot 9 is a so-called parallel connection robot. The robot 9 has: Main body 45; 3 connecting rods 46, They are connected to the body portion 45; 3 arms 47, These are connected to each of the three links 46; As the head unit 48 of the movable part, It is connected to 3 arms 47; And panel holding portion 49, It is mounted on the head unit 48. The main body portion 45 is fixed to the upper surface portion 12 a of the main body frame 12. also, The robot 9 is disposed below the upper surface portion 12a. which is, The robot 9 is provided on the upper surface portion 12a so as to hang on the upper surface portion 12a. also, The main body portion 45 is arranged on the tray stage 6, Above 7 It is arranged further behind the body frame 35 of the robot 8.  The three links 46 are connected to the main body portion 45 so as to extend substantially radially at approximately equal angular intervals to the outer peripheral side of the main body portion 45. which is, The three links 46 are connected to the main body portion 45 so as to extend substantially radially at an interval of approximately 120 ° toward the outer peripheral side of the main body portion 45. also, The base ends of the three links 46 are rotatably connected to the body portion 45. At the connecting portion of the main body portion 45 and the connecting rod 46, A speed reducer-equipped motor 50 is provided as a rotation drive mechanism that rotates the link 46. The robot 9 in this form includes three motors 50 that rotate each of the three links 46. The output shaft of the motor 50 is fixed to the base end side of the link 46.  The proximal end side of the arm portion 47 is rotatably connected to the distal end side of the link 46. in particular, The arm portion 47 includes two linear arms 52 that are parallel to each other, A proximal end side of each of the two arms 52 is rotatably connected to a distal end side of the link 46. The head unit 48 is rotatably connected to the distal ends of the three arm portions 47. which is, The head unit 48 is rotatably connected to the distal ends of the six arms 52.  The panel holding portion 49 is attached to the lower end of the head unit 48. The panel holding portion 49 includes a plurality of suction portions that vacuum-suck the liquid crystal panel 2. The upper surface of the liquid crystal panel 2 is adsorbed by the adsorption portion to hold the liquid crystal panel 2. also, A motor 53 is mounted on the upper end of the head unit 48. The panel holding portion 49 is connected to the motor 53, In addition, the rotation of the axial direction in which the up-down direction is a rotation can be achieved by the power of the motor 53.  In Robot 9, By driving 3 motors 50 individually, And in a specific area, the head unit 48 is directed upward and downward, Any position in the left-right direction and the front-back direction, The head unit 48 is moved in a state in which the head unit 48 maintains a fixed posture (specifically, a state in which the panel holding portion 49 is held to the lower side).  The robot 9 loads the liquid crystal panel 2 one by one from the tray 3 placed on the tray stage 6 or the tray 3 placed on the tray stage 7. in particular, The robot 9 carries out the liquid crystal panel 2 piece by piece from the tray 3, Until it is placed on the tray carrier 6, Tray 3 of 7 becomes empty. also, The robot 9 transfers the liquid crystal panel 2 carried out from the tray 3 to a panel stage 64 described later.  (Configuration and Operation of Supply Unit) FIG. 6 is a perspective view of the supply unit 10 shown in FIG. 1. FIG. 7 is a plan view of the supply unit 10 shown in FIG. 6.  The supply unit 10 includes: Data reading device 56, It reads the data recorded in the LCD panel 2; Alignment device 57, It performs alignment of the liquid crystal panel 2 before reading the data of the liquid crystal panel 2 with the data reading device 56; Robot 58, It will transport the liquid crystal panel 2 after the data is read by the data reading device 56 to the processing device 15; Ionizer (static removal device) 59, The static electricity is removed from the liquid crystal panel 2 carried by the processing device 15; Conveying device 60, It will carry the liquid crystal panel 2 aligned with the alignment device 57 to the robot 58; Robot 61, It transports the liquid crystal panel 2 aligned with the alignment device 57 to the transport device 60; And the base plate 62, It mounts and fixes these components.  The alignment device 57 is placed on the left end side of the base plate 62. The robot 58 is placed on the right end side of the base plate 62. The data reading device 56 and the ionizer 59 are placed at the center position in the left-right direction of the base plate 62. The transfer device 60 is arranged between the alignment device 57 and the robot 58 in the left-right direction. The robot 61 is disposed adjacent to the right side of the alignment device 57. The base plate 62 is placed on and fixed to the rear end portion of the upper surface 11 a of the main body frame 11.  The alignment device 57 includes: Panel carrier 64, Its placement is carried out by the robot 9 from the pallet stage 6, LCD panel 2 carried out from tray 3 on 7; Movable frame 65, It rotatably holds the panel carrier 64; Movable frame 66, It holds the movable frame 65 in a manner slidable to the left and right directions; Fixed frame 67, It holds the movable frame 65 in a manner that it can slide forward and backward; Rotary mechanism, It rotates the panel carrier 64 relative to the movable frame 65; Drive mechanism, It makes the movable frame 65 slide in the left-right direction relative to the movable frame 66; And driving mechanism, It causes the movable frame 66 to slide forward and backward with respect to the fixed frame 67. The panel stage 64 includes a plurality of adsorption sections that vacuum-suck the liquid crystal panel 2 placed on the upper surface of the panel stage 64. The fixing frame 67 is fixed to the base plate 62.  also, The alignment device 57 includes a camera 68 and an illumination 69 disposed above the panel stage 64. Lighting 69 is a series of LEDs (Light Emitting Diode: Light-emitting diode) strip lighting. The illumination 69 is disposed below the camera 68 and at a position beyond the field of view of the camera 68. In this form, The illumination 69 is arranged on the lower left side of the camera 68. The illumination 69 radiates indirect light to the panel stage 64.  The camera 68 detects edges of the liquid crystal panel 2 (specifically, corners of the liquid crystal panel 2 formed in a rectangular shape) placed on the panel stage 64. The camera 68 includes a polarizing film. also, A polarizing plate (polarizing film) is attached to the upper surface of the panel stage 64. The phase of the polarizing film of the camera 68 and the phase of the polarizing plate of the panel stage 64 are staggered by 90 °, The panel stage 64 appearing on the camera 68 is black. therefore, In this form, The contrast between the edge of the liquid crystal panel 2 reflected on the camera 68 and the upper surface of the panel stage 64 becomes higher, Instead, the camera 68 can be used to accurately detect the edges of the liquid crystal panel 2.  When the alignment device 57 places the liquid crystal panel 2 carried out by the robot 9 on the panel stage 64, The edge of the liquid crystal panel 2 is detected by the camera 68. also, The alignment device 57 is based on the detection result of the edge of the liquid crystal panel 2 of the camera 68, Rotate the panel stage 64, At least one of the sliding motion of the movable frame 65 in the left-right direction and the sliding motion of the movable frame 66 in the forward-backward direction, The alignment of the liquid crystal panel 2 is performed. which is, The alignment device 57 detects the edge of the liquid crystal panel 2 and performs alignment of the liquid crystal panel 2 based on the detection result of the edge of the liquid crystal panel 2.  The transfer device 60 includes: 2 slide carriers 70, The liquid crystal panel 2 is mounted thereon; Movable frame 71, It fixes 2 sliding carriers 70; Fixed frame 72, It holds the movable frame 71 in a manner slidable to the left and right directions; And driving mechanism, This causes the movable frame 71 to slide in the left-right direction with respect to the fixed frame 72. The two slide stages 70 are arranged adjacent to each other in the left-right direction. The slide stage 70 includes a plurality of suction sections that vacuum-suck the liquid crystal panel 2 placed on the upper surface of the slide stage 70. The fixing frame 72 is fixed to the base plate 62.  The robot 61 has: Panel holding section 73, It vacuum-sucks and holds the liquid crystal panel 2; Movable frame 74, It holds the panel holding portion 73 in a manner capable of sliding up and down; Fixed frame 75, It holds the movable frame 74 in a manner slidable to the left and right directions; Lifting mechanism, It raises and lowers the panel holding portion 73 relative to the movable frame 74; And driving mechanism, This causes the movable frame 74 to slide in the left-right direction with respect to the fixed frame 75. The fixing frame 75 is fixed to the base plate 62. The panel holding portion 73 is disposed at the same position as the slide stage 70 in the front-back direction.  The robot 61 transfers the liquid crystal panel 2 aligned with the alignment device 57 from the panel stage 64 to the slide stage 70. in particular, The robot 61 vacuum-sucks and holds the upper surface of the liquid crystal panel 2 on the panel stage 64 with the panel holding portion 73, The liquid crystal panel 2 is sequentially transferred from the panel stage 64 to each of the two slide stages 70 which are moved to the left end side and stopped. also, When the liquid crystal panel 2 is placed on each of the two slide stages 70, The transport device 60 moves the slide stage 70 to the right, On the other hand, the liquid crystal panel 2 is transported to the right end side of the transport device 60.  The panel holding portion 73 is disposed further rearward than the camera 68. also, The detection of the edge of the LCD panel 2 of the camera 68 is performed in a state where the panel stage 64 is disposed directly below the camera 68. The vacuum suction of the liquid crystal panel 2 of the panel holding portion 73 is performed in a state where the panel stage 64 is disposed directly below the panel holding portion 73. In this form, After the alignment device 57 detects the edge of the liquid crystal panel 2 by the camera 68, The alignment of the LCD panel 2 is performed on one side, On one side, the panel stage 64 is moved from directly below the camera 68 to directly below the panel holding portion 73. which is, In this form, The alignment device 57 performs the alignment of the liquid crystal panel 2 while The liquid crystal panel 2 is transported to a position where the liquid crystal panel 2 is vacuum-adsorbed by the panel holding portion 73.  The robot 58 has: 2 panel holding parts 76, The vacuum suction and holding of the liquid crystal panel 2; Movable frame 77, It holds the panel holding portion 76 in a manner capable of sliding up and down; Fixed frame 78, It holds the movable frame 77 in a manner that it can slide forward and backward; Lifting mechanism, It raises and lowers the panel holding portion 76 relative to the movable frame 77; And driving mechanism, This causes the movable frame 77 to slide forward and backward with respect to the fixed frame 78. The two panel holding portions 76 are arranged adjacent to each other in the left-right direction. The distance between the two panel holding portions 76 in the left-right direction is equal to the distance between the two slide stages 70 in the left-right direction. The fixing frame 78 is fixed to the base plate 62.  The robot 58 carries the liquid crystal panel 2 transferred from the transfer device 60 to the right end side of the transfer device 60 into the processing device 15. in particular, The robot 58 vacuum-sucks each of the two panel holding portions 76 and holds them on the upper surfaces of each of the two liquid crystal panels 2 of each of the two slide stages 70, The two liquid crystal panels 2 are carried into the processing device 15 together from the slide stage 70.  The data reading device 56 includes: Camera 81, It reads optically readable data such as two-dimensional code or one-dimensional code; Movable frame 82, It is equipped with a camera 81; Movable frame 83, It holds the movable frame 82 in a manner capable of sliding up and down; Movable frame 84, It holds the movable frame 83 in such a way that it can slide in the left and right directions; Fixed frame 85, It holds the movable frame 84 in a manner that it can slide forward and backward; Lifting mechanism, It raises and lowers the movable frame 82 relative to the movable frame 83; Drive mechanism, It causes the movable frame 83 to slide leftward and rightward relative to the movable frame 84; And driving mechanism, It causes the movable frame 84 to slide forward and backward with respect to the fixed frame 85. The fixing frame 85 is fixed to the base plate 62. also, The data reading device 56 is provided with illumination for irradiating light to the liquid crystal panel 2.  As mentioned above, The data reading device 56 is placed at the center position in the left-right direction of the base plate 62. The data reading device 56 reads the data recorded on the liquid crystal panel 2 conveyed to the right by the conveying device 60 after the position of the alignment device 57 is adjusted. which is, The data reading device 56 reads that the robot 9 is self-loaded on the tray carrier 6, Information of the LCD panel 2 after the tray 3 of 7 is carried out. When reading data with the data reading device 56, The conveyance device 60 is stopped at a time so that the liquid crystal panel 2 is disposed below the camera 81. The data of the liquid crystal panel 2 read by the data reading device 56 as the individual data of the liquid crystal panel 2 being read, It is associated with the liquid crystal panel 2 whose data is being read.  The ionizer 59 is disposed above the conveying device 60. also, The ionizer 59 is disposed further to the right than the camera 81, And the static electricity of the liquid crystal panel 2 after the data is read by the data reading device 56 is removed.  (The main effect of this form) As explained above, In this form, The robot 8 transfers the stacked pallets 3 transferred to the split conveyor 20 to the pallet carrier 6 one by one. 7, The stacked trays 3 on the split conveyor 20 are unstacked. which is, In this form, Unstacking of the pallet 3 is performed automatically by the robot 8. therefore, In this form, Can suppress the difference in the stacking operation of tray 3, The stacking operation of the tray 3 can be stabilized. therefore, In this form, It is possible to suppress damage to the liquid crystal panel 2 when the tray 3 is unstacked.  also, In this form, Placed on the pallet carrier 6, The liquid crystal panel 2 in the tray 3 of 7 is carried into the supply unit 10 by the robot 9, Then, By robot 61, The transfer device 60 and the robot 58 transfer and carry in the processing device 15. which is, In this form, The liquid crystal panel 2 is transported to the processing device 15 by the self-unstacking tray 3. therefore, In this form, It can suppress the difference in the transportation operation of the LCD panel 2. The transportation operation of the liquid crystal panel 2 can be stabilized. therefore, In this form, Damage to the liquid crystal panel 2 during transportation of the liquid crystal panel 2 can be suppressed. also, In this form, Since the stacking or stacking of the tray 3 is performed automatically, And the liquid crystal panel 2 is automatically transferred to the processing device 15 by the self-unstacking tray 3, Therefore, personnel costs can be reduced.  In this form, The data of the liquid crystal panel 2 read by the data reading device 56 as the individual data of the liquid crystal panel 2 being read, It is associated with the liquid crystal panel 2 whose data is being read. also, In this form, The liquid crystal panel 2 after the data is read by the data reading device 56 is conveyed to the processing device 15. therefore, In this form, The processing device 15 can be supplied with the liquid crystal panel 2 after being associated with individual data, the result, In the processing device 15, The liquid crystal panel 2 can be appropriately processed based on individual data. also, In this form, Since the data of the liquid crystal panel 2 is read by the data reading device 56, the liquid crystal panel 2 is aligned by the alignment device 57. Therefore, the data reading device 56 can accurately and accurately read the data of the liquid crystal panel 2.  In this form, Separately set a conveyor 4 that transports stacked trays 3 to the rear side, And the conveyor 5 that carries the stacked trays 3 to the front side, Moreover, it is possible to individually carry out the rearward transfer of the tray 3 in which the liquid crystal panel 2 is stacked, And the empty tray 3 in the stacked state is carried forward. therefore, In this form, With the common conveyor, the rear side of the tray 3 in which the liquid crystal panel 2 is stacked is stored. Compared with the case where the empty trays 3 in the stacked state are carried forward, The cycle time of the transport system 1 can be shortened.  also, In this form, Since there are two tray carriers 6, 7, Therefore, for example, the robot 9 can carry out the liquid crystal panel 2 from the tray 3 on the tray carrier 6. On the one hand, the robot 8 transports the empty pallet 3 from the pallet stage 7 to the conveyor 5 and the conveyor 4 transports the pallet 3 containing the liquid crystal panel 2 to the pallet stage 7. which is, The liquid crystal panel 2 can be carried out from the tray 3 on the tray stage 6 by the robot 9 at the same time. One side of the pallet 3 is replaced by the robot 8. therefore, In this form, Compared with the case where the number of tray carriers provided is one, The cycle time of the transport system 1 can be shortened.  In this form, The robot 8 is installed on the upper surface 11a so as to stand from the upper surface 11a of the main body frame 11, The robot 9 is installed on the upper surface portion 12 a so as to hang on the upper surface portion 12 a of the main body frame 12 disposed on the upper side than the upper end of the robot 8. therefore, In this form, It is easy to prevent the robot 8 and the robot 9 from interfering when the robot 8 and the robot 9 are operated simultaneously. also, In this form, Since the robot 9 is a so-called parallel connection robot, Therefore, the liquid crystal panel 2 can be carried out from the tray 3 at a relatively high speed.  In this form, The robot 8 moves from the conveyor 4 to the pallet stage 6, 7 Transfer tray 3, And from pallet carrier 6, 7 conveys the pallet 3 to the conveyor 5. therefore, In this form, With individual installation from conveyor 4 to pallet stage 6, 7 Robots that transport trays 3, And carried out from the tray carrier 6, Compared with the case of a robot that transfers the pallet 3 to the conveyor 5, The configuration of the transport system 1 can be simplified.  In this form, The dividing conveyor 20 includes a guide member 27 that restricts movement of the tray 3 in the left-right direction. also, In this form, The dividing conveyor 20 is provided with a contact member 28 for contacting the rear end of the tray 3, The conveyor 4 is from the robot 8 to the pallet stage 6, 7 Before the tray 3 is conveyed, the tray 3 is conveyed to the rear side and the tray 3 is brought into contact with the abutment member 28. therefore, In this form, Can be transported by robot 8 to pallet stage 6, The front tray 3 is aligned on the conveyor 4. therefore, In this form, The pallet 3 can be placed on the pallet stage 6 with high accuracy. 7.  In this form, A layer number detecting mechanism 29 that detects the number of layers of the tray 3 on the conveyor 4 is mounted on the dividing conveyor 20. therefore, In this form, The robot 8 can be operated based on the detection result of the layer number detecting mechanism 29, This prevents the pallet holding portion 39 of the robot 8 from colliding with the pallet 3. also, In this form, Since the conveyor 4 is composed of five divided conveyors 16 to 20 that can be driven individually, The conveyor 5 is composed of five divided conveyors 21 to 25 which can be driven individually. Therefore, a plurality of stacked trays 3 can be individually conveyed in the front-rear direction. therefore, In this form, Conveyor 4, 5 is easier to use.  [Embodiment 2] (Overall configuration of transport system) Fig. 8 is a side view of a transport system 91 according to Embodiment 2 of the present invention. FIG. 9 is a plan view showing the conveying system 91 from the F-F direction in FIG. 8.  The transport system 91 of this embodiment is used in the same manner as the transport system 1 of the first embodiment in a small liquid crystal display manufacturing line. This transport system 91 transports the liquid crystal panel 2 discharged from the processing device 15. also, The transport system 91 transports the small-sized liquid crystal panel 2. In this form, A transport system 91 is arranged behind the processing device 15. In the following description, Regarding the structure common to the first embodiment, Mark the same symbol and omit or simplify its description.  The transport system 91 includes four conveyors 94 to 97 that transport the tray 3 that can store the liquid crystal panel 2. Conveyors 94 to 97 and the conveyor 4 of the first embodiment, 5 Similarly, The pallets 3 (stacked pallets 3) stacked in a plurality of layers are carried forward and backward. also, The transport system 91 includes a robot 8 in the same way as the transport system 1. 9. another, The left-right width of the main body frame 35 of the robot 8 of this form is longer than the left-right length of the main body frame 35 of the robot 8 of Embodiment 1, The movable amount of the movable frame 36 in this embodiment in the left-right direction is larger than the movable amount of the movable frame 36 in the first embodiment. however, Apart from that, The robot 8 of this embodiment is configured in the same manner as the robot 8 of the first embodiment.  also, The transport system 91 includes four tray stages 98 to 101 on which the tray 3 is placed, And receives the liquid crystal panel 2 discharged from the processing device 15 and transfers it to the discharge unit 102 of the robot 9. The tray carriers 98 to 101 are arranged more forward than the conveyors 94 to 97. The discharge unit 102 is disposed more forward than the tray stages 98 to 101. Furthermore, The transport system 91 includes a main body frame 11 similarly to the transport system 1. 12.  (Construction and operation of conveyor) and conveyor 4, 5 Similarly, The conveyors 94 to 97 are roller conveyors having a plurality of rollers. Conveyor 94, Conveyor 95, The conveyor 96 and the conveyor 97 are sequentially arranged from the right to the left. However, they are arranged adjacent to each other in the left and right directions. Conveyor 94, 95 Transfer the stacked tray 3 to the front side, Conveyor 96, 97 The stacked trays 3 are conveyed to the rear side. which is, Conveyor 94, 95 transfers the tray 3 in a direction close to the tray carrier 98 to 101, Conveyor 96, 97 carries the tray 3 in a direction away from the tray carriers 98 to 101.  Yu with conveyor 94, The pallet 3 transported by 95 does not contain the liquid crystal panel 2, Therefore, the conveyor 94, The pallet 3 carried by 95 is an empty pallet. on the other hand, Yu with conveyor 96, A plurality of liquid crystal panels 2 are housed in the tray 3 carried in 97. Conveyor of this form 94, 95 series supply side conveyor, Conveyor 96, 97 series discharge side conveyor. another, The conveyors 94 to 97 may be belt conveyors or the like.  Conveyor 94, 95 is composed of three divided conveyors 18 to 20 divided in the front-rear direction. The split conveyors 18 to 20 are sequentially arranged from the rear side to the front side. Similarly, Conveyor 96, 97 is constituted by three divided conveyors 23 to 25 divided in the front-rear direction. The split conveyors 23 to 25 are sequentially arranged from the rear side to the front side. As mentioned above, Split conveyor 18-20, Each of 23 to 25 includes a motor and a power transmission mechanism that transmits the power of the motor to the drum. And divide the conveyor 18-20, 23 to 25 can be driven individually.  For dividing conveyor 18, The stacked empty trays 3 are carried by the operator from a shelf (not shown) for temporary placement. The stacked pallets 3 placed on the split conveyor 18 are conveyed by the conveyor 94, 95 is carried forward. The pallets 3 transported to the stacked state of the split conveyor 20 are unstacked by the robot 8. also, For split conveyor 25, The pallet 3 containing the liquid crystal panel 2 is stacked by the robot 8. When stacking the trays 3 to a specific number, The stacked tray 3 is conveyed by a conveyor 96, 97 to the rear. The pallets 3 transported to the stacked state of the split conveyor 23 are transported by the operator to a temporary storage rack.  another, When the stacked trays 3 are placed on the split conveyor 18, Usually on the split conveyor 19, At least one of the split conveyors 20, 19, 20 is placed with the stacked trays 3. also, When the trays 3 are stacked on the split conveyor 25, Sometimes on the split conveyor 23, At least one of the split conveyors 24, 24. The stacked trays 3 are placed.  Similar to the first embodiment, The dividing conveyor 20 includes a guide member 27. also, The dividing conveyor 20 includes a contact member 28. The abutment member 28 is arranged at the front end of the dividing conveyor 20. which is, The contact member 28 is arranged on the conveyor 94, 95 The downstream end in the direction of the transport tray 3. Similar to the first embodiment, Conveyor 94, 95 Before the robot 8 transfers the pallet 3 to the pallet stages 98 to 101, the pallet 3 is transported to the front side and the pallet 3 is brought into contact with the abutment member 28. also, For split conveyor 20, Similar to the first embodiment, A layer number detection mechanism 29 is installed.  (Structure and Operation of Pallet Stage) FIG. 10 is a perspective view of the pallet stages 98 to 101 shown in FIG.  One pallet 3 is placed on the pallet stages 98 to 101. The upper surfaces of the tray stages 98 to 101 are formed in a flat shape orthogonal to the vertical direction. also, The upper surfaces of the tray carriers 98 to 101 are arranged on the upper side than the upper surfaces of the conveyors 94 to 97. Tray carrier 98, 99 is fixed to the main body frame 11. The tray stage 98 and the tray stage 99 are arranged adjacent to each other in the left-right direction. In this form, Place the tray stage 98 on the right side, The tray stage 99 is arranged on the left side.  also, The transfer system 91 includes: Carrier moving mechanism 105, It moves the tray carrier 100 to the left-right direction and the front-back direction; And carrier moving mechanism 106, It moves the tray stage 101 to the left-right direction and the front-back direction. which is, The transport system 91 includes two tray stages 100, 101 two carrier moving mechanisms for individual movement 105, 106. Tray carrier 98 in this form 99 series fixed pallet carrier, Tray carrier 100, 101 is a movable tray carrier that can be moved in the left-right direction and the front-rear direction.  The carrier moving mechanism 105 includes: Movable frame 107, It holds the tray carrier 100 in such a way that it can slide in the left and right directions; Fixed frame 108, It holds the movable frame 107 in a manner capable of sliding forward and backward; Drive mechanism, It makes the tray carrier 100 slide in the left-right direction relative to the movable frame 107; And driving mechanism, It causes the movable frame 107 to slide forward and backward with respect to the fixed frame 108. Similarly, The carrier moving mechanism 106 includes: Movable frame 109, It holds the tray carrier 101 in such a manner that it can slide in the left and right directions; Fixed frame 110, It holds the movable frame 109 in a manner capable of sliding forward and backward; Drive mechanism, It makes the tray carrier 101 slide in the left-right direction relative to the movable frame 109; And driving mechanism, It causes the movable frame 109 to slide forward and backward with respect to the fixed frame 110.  The stage moving mechanism 105 positions the tray stage 100 at the first position of the tray stage 100 on the right side of the tray stage 98 (the position shown by the two-point chain line in FIG. 9), It moves from the 2nd position (position shown by the solid line of FIG. 9) of the left end side part of the tray stage 100 before the right end side part of the tray stage 98 in the front-back direction. which is, The stage moving mechanism 105 positions the tray stage 100 side by side with the tray stage 98 in the left-right direction, It moves with the 2nd position which overlaps with one part of the pallet stage 98 in the front-back direction.  The stage moving mechanism 106 positions the tray stage 101 at the first position of the tray stage 101 on the left side of the tray stage 99 (the position shown by the two-point chain line in FIG. 9), It moves from the 2nd position (position shown by the solid line of FIG. 9) of the right end side part of the tray stage 101 before the left end side part of the tray stage 99 in the front-back direction. which is, The stage moving mechanism 106 positions the tray stage 101 side by side with the tray stage 99 in the left-right direction, It moves with the 2nd position which overlaps with one part of the pallet stage 99 in the front-back direction.  (Structure and Operation of Robot) As mentioned above, The left-right width of the main body frame 35 of the robot 8 of this form is longer than the left-right length of the main body frame 35 of the robot 8 of Embodiment 1, The movable amount of the movable frame 36 in this embodiment in the left-right direction is larger than the movable amount of the movable frame 36 in the first embodiment. The main body frame 35 is provided so as to straddle the conveyors 94 to 97 in the left-right direction. also, The main body frame 35 is to span the dividing conveyor 19, 24Front end side and split conveyor 20, 25 rear end side way configuration.  Robot 8 performs self-conveyor 94, 95 transfer to pallet 3 of pallet carrier 98 to 101, And from the pallet carrier 98 to 101 to the conveyor 96, Transfer of tray 3 of 97. in particular, The robot 8 transfers the empty trays 3 stacked to the split conveyor 20 to the tray carriers 98 to 101 one by one, The stacked trays 3 on the split conveyor 20 are unstacked. also, The robot 8 transfers one tray 3 containing a specific number of the liquid crystal panels 2 from the tray carriers 98 to 101 to the dividing conveyor 25, The trays 3 are stacked on the split conveyor 25 until the number of layers of the trays 3 stacked on the split conveyor 25 becomes a specific number.  In this form, When the robot 3 carries the pallet 3 between the conveyors 94 to 97 and the pallet stage 100, The tray stage 100 is disposed at a first position shown by a two-dot chain line in FIG. 9. Similarly, When the robot 3 carries the pallet 3 between the conveyors 94 to 97 and the pallet stage 101, The tray stage 101 is arranged at a first position shown by a two-dot chain line in FIG. 9. another, In this form, The tray carrier 100 disposed at the second position shown by the solid line in FIG. 9 101 is beyond the motion range of the robot 8.  The robot 9 is placed on a tray 3 placed on a tray carrier 98. Tray 3 placed on the tray carrier 99, The tray 3 placed on the tray stage 100 or the tray 3 placed on the tray stage 101 is carried into the liquid crystal panel 2 piece by piece. in particular, The robot 9 carries in the liquid crystal panel 2 carried out from the panel stage 113 described later one by one to the trays 3 placed on the tray stages 98 to 101. also, The robot 9 carries in the liquid crystal panel 2 until a specific number of the liquid crystal panels 2 are stored in the tray 3.  In this form, When the liquid crystal panel 2 is carried into the tray 3 placed on the tray carrier 100 by the robot 9, The tray stage 100 is arranged at a second position shown by a solid line in FIG. 9. Similarly, When the liquid crystal panel 2 is carried into the tray 3 placed on the tray carrier 101 by the robot 9, The tray stage 101 is arranged at a second position shown by a solid line in FIG. 9. another, In this form, The pallet carrier 100 disposed at the first position shown by the two-point chain line in FIG. 9 101 is beyond the motion range of the robot 9.  (Configuration and Operation of the Discharge Unit) FIG. 11 is a perspective view of the discharge unit 102 shown in FIG. 8. FIG. 12 is a plan view of the discharge unit 102 shown in FIG. 11.  The discharge unit 102 includes panel stages 111 to 113 on which the liquid crystal panel 2 is placed. The discharge unit 102 of this form includes: One (2) panel mounts 111, It is arranged adjacent to the left and right directions; A pair of panel carriers 112, It is arranged adjacent to the left and right directions; And a pair of panel carriers 113, It is arranged adjacently in the left-right direction. The panel stages 111 to 113 are fixed to the left end side of the base plate 114. A pair of panel carriers 111 to 113 are arranged sequentially from the front side to the rear side at a certain interval. also, The pair of panel stages 111 to 113 are arranged at the same position in the left-right direction. The panel mounts 111 to 113 are provided with a plurality of suction units that vacuum-suck the liquid crystal panel 2 mounted on the upper surfaces of the panel mounts 111 to 113.  also, The discharge unit 102 includes: Data reading device 116, It reads the data recorded in the LCD panel 2; Robot 117, It transports the liquid crystal panel 2 discharged from the processing device 15 to the panel stage 111; Robot 118, It transports the liquid crystal panel 2 placed on the panel stage 111 to the panel stage 112, 113; And ionizer 59, It removes static electricity from the liquid crystal panel 2 carried into the tray 3. These components are placed on and fixed to the base plate 114. The base plate 114 is placed on and fixed to the front end portion of the upper surface 11 a of the main body frame 11. The ionizer 59 is disposed above the panel carrier 111, The static electricity of the liquid crystal panel 2 placed on the panel stage 111 is removed.  The robot 117 has: 2 panel holding parts 121, The vacuum suction and holding of the liquid crystal panel 2; Movable frame 122, It holds the panel holding portion 121 in a manner capable of sliding up and down; Fixed frame 123, It holds the movable frame 122 in a manner slidable to the left and right directions; Lifting mechanism, It raises and lowers the panel holding portion 121 relative to the movable frame 122; And driving mechanism, It slides the movable frame 122 in the left-right direction with respect to the fixed frame 123.  The fixing frame 123 is fixed to the base plate 114. The two panel holding portions 121 are arranged in a state of being spaced apart from each other in the left and right directions. The two panel holding portions 121 are arranged at the same position as the panel stage 111 in the front-rear direction. The robot 117 vacuum-absorbs and holds the two liquid crystal panels 2 discharged from the processing device 15 with the panel holding portion 121, And it is conveyed to the panel stage 111. another, The liquid crystal panel 2 discharged from the processing device 15 is aligned by an alignment mechanism provided inside the processing device 15.  The robot 118 has: 2 panel holding portions 124, The vacuum suction and holding of the liquid crystal panel 2; 2 panel holding parts 125, The vacuum suction and holding of the liquid crystal panel 2; Movable frame 126, It holds the panel holding portion 124 in a manner capable of sliding up and down. 125; Fixed frame 127, It holds the movable frame 126 in a manner capable of sliding forward and backward; Lifting mechanism, It makes the panel holding portion 124, 125 is raised and lowered relative to the movable frame 126; And driving mechanism, It causes the movable frame 126 to slide forward and backward with respect to the fixed frame 127. The fixing frame 127 is fixed to the base plate 114.  The two panel holding portions 124 are arranged in a state separated by a specific interval in the left-right direction. The two panel holding portions 125 are arranged in a state of being spaced apart from each other in the left and right directions. The panel holding portion 124 and the panel holding portion 125 are arranged in a state of being separated by a certain interval in the front-rear direction. In this form, The panel holding portion 124 is disposed on the front side, The panel holding portion 125 is arranged on the rear side. The distance between the panel holding portion 124 and the panel holding portion 125 in the front-back direction is equal to the distance between the panel stages 111 to 113 in the front-back direction. also, Panel holding section 124, 125 is arranged at the same position as the panel stage 111 to 113 in the left-right direction.  The robot 118 sequentially transfers the liquid crystal panel 2 placed on the panel stage 111 to the panel stage 112, 板载 台 113。 Panel carrier 113. in particular, The panel holding portion 124 transfers the liquid crystal panel 2 placed on the panel stage 111 to the panel stage 112, The panel holding section 125 transports the liquid crystal panel 2 placed on the panel stage 112 to the panel stage 113. The liquid crystal panel 2 placed on the panel stage 113 is carried by the robot 9 to the tray 3 placed on the tray stages 98 to 101.  The data reading device 116 includes: 2 cameras 81; 2 movable frames 129, They hold each of the two cameras 81 in such a way that they can slide up and down; Movable frame 130, It holds 2 movable frames 129 in a manner that can be slid to the left and right directions; Movable frame 131, It holds the movable frame 130 in a manner capable of sliding forward and backward; Fixed frame 132, It holds the movable frame 131 in such a way that it can slide in the left and right directions; Lifting mechanism, It raises and lowers each of the two cameras 81 relative to each of the two movable frames 129; Drive mechanism, It causes each of the two movable frames 129 to slide leftward and rightward relative to the movable frame 130; Drive mechanism, It makes the movable frame 130 slide forward and backward with respect to the movable frame 131; And driving mechanism, It slides the movable frame 131 in the left-right direction with respect to the fixed frame 132. The fixing frame 132 is fixed to the base plate 114. also, The data reading device 116 includes illumination for irradiating light to the liquid crystal panel 2.  The data reading device 116 is placed at the center position of the front and rear directions of the base plate 114. And the data recorded by the liquid crystal panel 2 mounted on the panel stage 112 is read. which is, The data reading device 116 reads the data of the liquid crystal panel 2 in front of the tray 3 carried by the robot 9 on the tray carriers 98 to 101. Taking the data of the liquid crystal panel 2 read by the data reading device 116 as the individual data of the liquid crystal panel 2 being read, It is associated with the liquid crystal panel 2 whose data is being read.  (The main effect of this form) As explained above, In this form, The robot 8 transfers one of the trays 3 containing the liquid crystal panel 2 from the tray carriers 98 to 101 to the dividing conveyor 25, The tray 3 is stacked on the dividing conveyor 25. which is, In this form, The stacking of the trays 3 is performed automatically by the robot 8. therefore, In this form, Can suppress the difference in stacking operation of tray 3, The stacking operation of the tray 3 can be stabilized. therefore, In this form, Damage to the liquid crystal panel 2 during stacking of the trays 3 can be suppressed.  In this form, Tray carrier 100, 101 can be in the first position shown by the two-dot chain line in Figure 9, Move to the second position shown by the solid line in FIG. 9. therefore, In this form, Even if the tray carrier 100 is arranged in the second position, 101 is beyond the motion range of robot 8, And the tray carrier 100 arranged at the first position, 101 is beyond the motion range of robot 9, The robot 8 can also be used on the conveyors 94 to 97 and the pallet stage 100, Transfer tray 3 between 101, And the robot 9 carries the liquid crystal panel 2 into the tray stage 100, 101 的 Pallet 3. which is, In this form, Even if the movable range of the robot 8 or the movable range of the robot 8 is narrowed, The robot 8 can also be used on the conveyors 94 to 97 and the pallet stage 100, Transfer tray 3 between 101, And the robot 9 carries the liquid crystal panel 2 into the tray stage 100, 101 的 Pallet 3.  also, In this form, The same effect as that of the first embodiment can be obtained. E.g, In this form, The liquid crystal panel 2 discharged from the processing device 15 is 118 is transferred to the tray carrier 113, The robot 9 carries the pallet 3 on the pallet carrier 98 to 101, Therefore, the difference in the transportation operation of the liquid crystal panel 2 can be suppressed, The transportation operation of the liquid crystal panel 2 can be stabilized. therefore, In this form, Damage to the liquid crystal panel 2 during transportation of the liquid crystal panel 2 can be suppressed.  also, E.g, In this form, Taking the data of the liquid crystal panel 2 read by the data reading device 116 as the individual data of the liquid crystal panel 2 being read, Associate with the LCD panel 2 with the data being read, The liquid crystal panel 2 read by the data reading device 116 is carried into the tray 3 on the tray carrier 98 to 101, Therefore, the liquid crystal panel 2 associated with individual data can be stored in the tray 3.  [Modification of Embodiment 1] FIG. 13 is a perspective view of a supply unit 140 according to a modification of Embodiment 1. FIG. FIG. 14 is a plan view of the supply unit 140 shown in FIG. 13.  In the transfer system 1 of Embodiment 1, Transport small LCD panels 2, But in the transport system 1, It is also possible to carry a medium-sized liquid crystal panel 2 (for example, a 15-inch liquid crystal panel 2). When the liquid crystal panel 2 transported by the transport system 1 is small, Compared with the case where the liquid crystal panel 2 transported by the transport system 1 is medium-sized, The period required in the general supply unit 10 is shortened. The supply unit 10 is to shorten the cycle of the supply unit 10, And with panel carrier 64, Movable frame 65, 66, Fixed frame 67, And robot 61.  In contrast, When the liquid crystal panel 2 transported by the transport system 1 is medium-sized, A supply unit 140 may be provided instead of the supply unit 10, In addition, the supply unit 140 does not have a structure equivalent to the panel stage 64, Equivalent to movable frame 65, 66 constitution, A structure corresponding to the fixed frame 67 and a structure corresponding to the robot 61. the following, The structure of the supply unit 140 will be described. another, In the following description, Regarding the structure common to the first embodiment, Mark the same symbol and omit or simplify its description.  The supply unit 140 includes: Data reading device 146, It reads the data recorded in the LCD panel 2; Robot 148, It will transport the liquid crystal panel 2 after the data is read by the data reading device 146 to the processing device 15; Ionizer 59, The static electricity is removed from the liquid crystal panel 2 carried by the processing device 15; And transfer device 150, The liquid crystal panel 2 that has been read by the data reading device 146 is transferred to the robot 148.  Data reading device 146, Robot 148, The ionizer 59 and the transfer device 150 are placed on and fixed to the base plate 152. The data reading device 146 is placed on the left end side of the base plate 152. The robot 148 is placed on the right end side of the base plate 152. The ionizer 59 is placed at the center position in the left-right direction of the base plate 152. The transfer device 150 is arranged between the data reading device 146 and the robot 148 in the left-right direction. The base plate 152 is placed on and fixed to the end side portion of the upper surface 11 a of the main body frame 11.  also, The supply unit 140 includes: 2 cameras 68 and 2 lighting 69, These are used to perform alignment of the liquid crystal panel 2 before reading the data of the liquid crystal panel 2 by the data reading device 146. The camera 68 and the illumination 69 are arranged on the front side of the transport device 150. also, The camera 68 and the illumination 69 are arranged between the tray stage 6 and the tray stage 7 when viewed from the vertical direction. also, The camera 68 and the illumination 69 are placed on a base plate 153 fixed to the upper surface 11a of the main body frame 11, The camera 68 detects the edge of the liquid crystal panel 2 from the lower side of the liquid crystal panel 2.  The camera 68 detects two corners on a diagonal line of one of the liquid crystal panels 2 formed in a rectangular shape. And placed on the right front side of the base plate 153, And two parts on the left rear side of the base plate 153. The two illuminations 69 are arranged between the two cameras 68 in the front-rear direction. The illumination 69 is arranged to emit light downward, When detecting the edge of the LCD panel 2 with the camera 68, The light (ie, indirect light) reflected by the base plate 153 is irradiated to the liquid crystal panel 2.  The data reading device 146 includes a camera 81, And a fixed frame 154 that fixes the camera 81. The fixing frame 154 is fixed to the base plate 152. also, The data reading device 146 is provided with illumination for irradiating light to the liquid crystal panel 2. The camera 81 reads data recorded on the liquid crystal panel 2 from the lower side of the liquid crystal panel 2.  The transfer device 150 includes: Sliding stage 155, It carries a liquid crystal panel 2; Fixed frame 156, It holds the slide carrier 155 in such a way that it can slide in the left and right directions; And driving mechanism, It slides the slide stage 155 with respect to the fixed frame 156 in the left-right direction. The slide stage 155 includes a plurality of suction portions that vacuum-suck the liquid crystal panel 2 placed on the upper surface of the slide stage 155. The fixing frame 156 is fixed to the base plate 152.  The robot 148 has: Panel holding section 158, It vacuum-sucks and holds the liquid crystal panel 2; Movable frame 159, It holds the panel holding portion 158 in a manner capable of sliding up and down; Movable frame 160, It holds the movable frame 159 in such a way that it can slide in the left and right directions; Fixed frame 161, It holds the movable frame 160 in a manner capable of sliding forward and backward; Lifting mechanism, It raises and lowers the panel holding portion 158 relative to the movable frame 159; Drive mechanism, It causes the movable frame 159 to slide in a left-right direction relative to the movable frame 160; And driving mechanism, It causes the movable frame 160 to slide forward and backward with respect to the fixed frame 161. The fixing frame 161 is fixed to the base plate 152.  In this variation, Robot 9 will move from pallet carrier 6, The liquid crystal panel 2 carried out from the tray 3 on 7 is directly carried above the camera 68. If the edge of the LCD panel 2 is detected by the camera 68, The robot 9 is based on the detection result of the edge of the liquid crystal panel 2. The alignment of the LCD panel 2 is performed on one side, The liquid crystal panel 2 is transported to the data reading device 146 at the same time. In this variation, By robot 9, Camera 68, And the illumination 69 constitute an alignment device for performing alignment of the liquid crystal panel 2, The alignment device detects an edge of the liquid crystal panel 2 and performs alignment of the liquid crystal panel 2 based on a detection result of the edge of the liquid crystal panel 2.  also, When the liquid crystal panel 2 is carried above the data reading device 146, The camera 81 reads the data of the liquid crystal panel 2. When the data of the LCD panel 2 is read by the camera 81, The robot 9 transports the liquid crystal panel 2 to a slide stage 155 that moves to the left end side and stops, and places the liquid crystal panel 2 on the slide stage 155. When the liquid crystal panel 2 is placed on the slide stage 155, The transport device 150 moves the slide stage 155 to the right, The liquid crystal panel 2 is transferred to the right end side of the transfer device 150. The robot 148 vacuum-sucks and holds the liquid crystal panel 2 transferred from the transfer device 150 to the right end side of the transfer device 150 with the panel holding portion 158 in vacuum, The liquid crystal panel 2 is carried into the processing device 15 from the slide stage 155. The ionizer 59 is disposed above the transfer device 150, The static electricity of the liquid crystal panel 2 transferred by the transfer device 150 is removed.  [Modification of Embodiment 2] FIG. 15 is a perspective view of a discharge unit 172 according to a modification of Embodiment 2. FIG. 16 is a plan view of the discharge unit 172 shown in FIG. 15.  In the transfer system 91 of Embodiment 2, Transport small LCD panels 2, But in the transfer system 91, It is also possible to carry a medium-sized liquid crystal panel 2. When the liquid crystal panel 2 is small, Compared with the case where the liquid crystal panel 2 is medium-sized, The period required in the general discharge unit 102 is shortened. therefore, The configuration of the discharge unit 172 provided when the liquid crystal panel 2 transferred by the transfer system 91 is medium-sized may be different from that of the discharge unit 102 of the second embodiment. the following, The configuration of the discharge unit 172 will be described. another, In the following description, About and Embodiment 1 2Common constitution, Mark the same symbol and omit or simplify its description.  The discharge unit 172 includes a panel stage 173 on which the liquid crystal panel 2 is placed. The panel stage 173 is fixed to the left rear end side of the base plate 174. The panel stage 173 includes a plurality of adsorption portions that vacuum-suck the liquid crystal panel 2 placed on the upper surface of the panel stage 173. also, The discharge unit 172 includes: Data reading device 175, It reads the data recorded in the LCD panel 2; Robot 176, Transfer device 177 and robot 178, They transport the liquid crystal panel 2 discharged from the processing device 15 to the panel stage 173; And ionizer 59, It removes static electricity from the liquid crystal panel 2 carried into the tray 3. These components are placed on and fixed to the base plate 174.  The data reading device 175 is disposed immediately behind the panel stage 173. The robot 176 is placed on the right end side of the base plate 174, The robot 178 is placed on the left end side of the base plate 174. The ionizer 59 is placed at a center position in the left-right direction of the base plate 174. The conveying device 177 is arranged between the robot 176 and the robot 178 in the left-right direction. The base plate 174 is placed on and fixed to the front end side portion of the upper surface 11 a of the main body frame 11.  The data reading device 175 includes a camera 81, And a fixed frame 179 that fixes the camera 81. The fixing frame 179 is fixed to the base plate 174. also, The data reading device 175 includes illumination for irradiating light to the liquid crystal panel 2. The camera 81 reads data recorded on the liquid crystal panel 2 from the lower side of the liquid crystal panel 2.  The transfer device 177 includes: Sliding stage 180, It carries a liquid crystal panel 2; Fixed frame 181, It maintains the sliding stage 180 in a manner capable of sliding in the left-right direction; And driving mechanism, It slides the slide stage 180 with respect to the fixed frame 181 in the left-right direction. The slide stage 180 includes a plurality of suction portions that vacuum-suck the liquid crystal panel 2 placed on the upper surface of the slide stage 180. The fixing frame 181 is fixed to the base plate 174.  The robot 176 has: Panel holding portion 184, It vacuum-sucks and holds the liquid crystal panel 2; Movable frame 185, It holds the panel holding portion 184 in a manner capable of sliding up and down; Fixed frame 186, It holds the movable frame 185 in a manner capable of sliding in the left-right direction; Lifting mechanism, It raises and lowers the panel holding portion 184 relative to the movable frame 185; And driving mechanism, This causes the movable frame 185 to slide in the left-right direction with respect to the fixed frame 186.  The fixing frame 186 is fixed to the base plate 174. The panel holding portion 184 is disposed at the same position as the slide stage 180 in the front-rear direction. The robot 176 vacuum-absorbs and holds the liquid crystal panel 2 discharged from the processing device 15 with the panel holding portion 184, The liquid crystal panel 2 is transported to the slide stage 180 which is moved to the right end side and stopped, and the liquid crystal panel 2 is placed on the slide stage 180.  The robot 178 has: Panel holding section 187, It vacuum-sucks and holds the liquid crystal panel 2; Movable frame 188, It holds the panel holding portion 187 in a manner capable of sliding up and down; Fixed frame 189, It holds the movable frame 188 in a manner that it can slide forward and backward; Lifting mechanism, It raises and lowers the panel holding portion 187 relative to the movable frame 188; And driving mechanism, It causes the movable frame 188 to slide forward and backward with respect to the fixed frame 189.  The fixing frame 188 is fixed to the base plate 174. The panel holding portion 187 is disposed at the same position as the panel stage 173 in the left-right direction. The robot 178 vacuum-sucks the panel holding portion 187 and holds the liquid crystal panel 2 placed on the slide stage 180 that moves to the left end side and stops, And it is conveyed to the panel stage 173.  In this variation, The robot 9 transports the liquid crystal panel 2 placed on the panel stage 173 above the data reading device 175. When the liquid crystal panel 2 is carried above the data reading device 175, The camera 81 reads the data of the liquid crystal panel 2. When the data of the LCD panel 2 is read by the camera 81, The robot 9 directly transfers the liquid crystal panel 2 to the trays 3 placed on the tray carriers 98 to 101. The ionizer 59 is disposed above the transfer device 177, The static electricity of the liquid crystal panel 2 transferred by the transfer device 177 is removed.  [Other Embodiments] The above embodiment is an example of a preferred embodiment of the present invention. But not limited to this, Various changes can be made without changing the gist of the present invention.  In the above form, The transport system 1 transports the liquid crystal panel 2 supplied to the processing device 15, The transport system 91 transports the liquid crystal panel 2 discharged from the processing device 15, However, the liquid crystal panel 2 supplied to the processing device 15 and the liquid crystal panel 2 discharged from the processing device 15 may be transferred using the transfer system of the present invention. The transfer system in this case is equipped with a robot 8, 9, It also has four conveyors 94 to 97 like the conveying system 91. 4 pallet carriers 98 to 101, And 2 carrier moving mechanisms 105, 106. also, The transport system in this case includes, for example, a camera 68, Lighting 69 and data reading device 56 and the like.  also, In that case, The conveyors 94 to 97 transport the trays 3 in which the liquid crystal panels 2 are stacked. The robot 8 transfers the tray 3 in which the liquid crystal panel 2 is stored between the conveyors 94 to 97 and the tray stages 98 to 101. which is, The robot 8 performs unstacking and stacking of the tray 3 containing the liquid crystal panel 2. The robot 9 carries out the liquid crystal panel 2 from the tray 3 on the tray stage 98 to 101. The liquid crystal panel 2 is carried into the tray 3 on the tray carriers 98 to 101. also, E.g, The data reading device 56 reads the data of the liquid crystal panel 2 (the liquid crystal panel 2 supplied to the processing device 15) after the robot 9 is carried out from the tray 3. And the data of the liquid crystal panel 2 (the liquid crystal panel 2 discharged from the processing device 15) carried into the tray 3 by the robot 9.  also, In that case, It is preferable to set a tray carrier (empty tray carrier) on which the empty tray 3 is placed within the motion range of the robot 8. On the empty pallet carrier, Place, for example, about three empty trays 3 in a stacked state, The robot 8 transfers the empty pallet 3 from the empty pallet stage to the pallet stages 98 to 101 as necessary. also, The robot 8 transfers the empty trays 3 on the tray carriers 98 to 101 to the empty tray carrier as needed.  In the above form, On the pallet carrier 6, 7. One tray 3 is placed from 98 to 101, However, it is also possible to place a plurality of trays 3 on the tray carrier 6 so as not to overlap each other. 7. 98 ~ 101. also, In the above form, The transport system 1 includes two pallet stages 6, 7, The transport system 91 includes four pallet stages 98 to 101, However, it is also possible to provide 4 pallet carriers for the transport system 1, The transport system 91 includes two tray stages. also, Transportation system1. The number of 91 pallet carriers can be 3, It may be 5 or more. also, Transportation system1. The number of pallet carriers provided in 91 can also be one.  In the above form, The transport system 1 includes two conveyors 4, 5, The transport system 91 includes four conveyors 94 to 97, However, it is also possible to provide 4 conveyors for the transport system 1, The transport system 91 includes two conveyors. also, Transportation system1. The number of 91 conveyors can be 3, It may be 5 or more. also, Transportation system1. The number of 91 conveyors can also be one.  In the second embodiment, The tray carrier 100 disposed at the second position shown by the solid line in FIG. 9 101 is beyond the motion range of robot 8, However, the tray carrier 100 disposed at the second position, 101 may also be within the motion range of the robot 8. In that case, No need for carrier moving mechanism 105, 106, And pallet carrier 100, 101 is fixed at the second position, for example. also, In the second embodiment, The pallet carrier 100 disposed at the first position shown by the two-point chain line in FIG. 9 101 is beyond the motion range of robot 9, However, the tray carrier 100 disposed at the first position, 101 may also be within the motion range of the robot 9. In that case, No need for carrier moving mechanism 105, 106, And pallet carrier 100, 101 is fixed at the first position, for example.  In the above form, Conveyor 4, 5. 94 to 97 are composed of a plurality of divided conveyors, But the conveyor 4, 5. 94 ~ 97 can also be an integrated conveyor. also, In the first embodiment, The conveyor 4 and the conveyor 5 are arranged adjacent to each other in the left-right direction. However, the conveyor 4 and the conveyor 5 may be arranged so as to overlap each other. Similarly, In the second embodiment, Four conveyors 94 to 97 are arranged adjacent to each other in the left-right direction. However, any two conveyors 94 to 97 selected from the four conveyors 94 to 97 and the remaining two conveyors 94 to 97 may be arranged in an overlapping manner in the vertical direction.  In the above form, The robot 8 allows the tray holding portion 39 to move up and down, A 3-axis orthogonal robot that moves in the left and right directions, However, the robot 8 may be a two-axis orthogonal robot capable of moving the tray holding portion 39 in the left-right direction and the front-back direction. In that case, The roller conveyor is the conveyor 4. 5. 94 to 97 are provided with a lifting mechanism for lifting a plurality of rollers. also, The robot 8 may be a horizontal articulated robot. also, In the above form, The robot 9 is a robot connected in parallel, However, the robot 9 may be a horizontal articulated robot. In that case, The robot 9 may be installed on the upper surface 11 a so as to stand from the upper surface 11 a of the main body frame 11.  In the above form, Robot 8 performs self-conveyor 4, 94, 95-direction pallet carrier 6, 7. Transfer of tray 3 from 98 to 101, And from pallet carrier 6, 7. 98 ～ 101 direction conveyor 5, 96, Transfer of 97's Tray 3, But it can also be set individually for self-conveyor 4. 94, 95-direction pallet carrier 6, 7. Robots for pallet 3 from 98 to 101, And from pallet carrier 6, 7. 98 ～ 101 direction conveyor 5, 96, Robot for the pallet 3 of 97. also, In the above form, To transfer system 1, The display panel transported by 91 is the LCD panel 2. But with the transport system 1, The display panel conveyed by 91 may be a display panel other than the liquid crystal panel 2. E.g, To transfer system 1, The display panel transported by 91 can also be an organic EL (Electro Luminescence: Electroluminescence) panel.

1‧‧‧搬送系統
2‧‧‧液晶面板(顯示面板)
3‧‧‧托盤
4‧‧‧輸送機(供給側輸送機)
5‧‧‧輸送機(排出側輸送機)
6‧‧‧托盤載台
7‧‧‧托盤載台
8‧‧‧機器人(第1搬送機器人)
9‧‧‧機器人(第2搬送機器人)
10‧‧‧供給單元
11‧‧‧本體框架(第1框架)
11a‧‧‧上表面(設置面)
12‧‧‧本體框架(第2框架)
12a‧‧‧上表面部(設置部)
15‧‧‧處理裝置
16～25‧‧‧分割輸送機
27‧‧‧導引構件
28‧‧‧抵接構件
29‧‧‧層數檢測機構
30‧‧‧感測器
31‧‧‧升降機構
32‧‧‧馬達
35‧‧‧本體框架
36‧‧‧可動框架
37‧‧‧可動框架
38‧‧‧可動框架
39‧‧‧托盤固持部
40‧‧‧吸附部
41‧‧‧爪部
42‧‧‧爪移動機構
45‧‧‧本體部
46‧‧‧連桿
47‧‧‧臂部
48‧‧‧頭單元(可動部)
49‧‧‧面板固持部
50‧‧‧馬達(旋動驅動機構)
52‧‧‧臂
53‧‧‧馬達
56‧‧‧資料讀取裝置
57‧‧‧對準裝置
58‧‧‧機器人
59‧‧‧電離器(靜電去除裝置)
60‧‧‧搬送裝置
61‧‧‧機器人
62‧‧‧基底板
64‧‧‧面板載台
65‧‧‧可動框架
66‧‧‧可動框架
67‧‧‧固定框架
68‧‧‧相機
69‧‧‧照明
70‧‧‧滑動載台
71‧‧‧可動框架
72‧‧‧固定框架
73‧‧‧面板固持部
74‧‧‧可動框架
75‧‧‧固定框架
76‧‧‧面板固持部
77‧‧‧可動框架
78‧‧‧固定框架
81‧‧‧相機
82‧‧‧可動框架
83‧‧‧可動框架
84‧‧‧可動框架
85‧‧‧固定框架
91‧‧‧搬送系統
94‧‧‧輸送機(供給側輸送機)
95‧‧‧輸送機(供給側輸送機)
96‧‧‧輸送機(排出側輸送機)
97‧‧‧輸送機(排出側輸送機)
98‧‧‧托盤載台(固定托盤載台)
99‧‧‧托盤載台(固定托盤載台)
100‧‧‧托盤載台(可動托盤載台)
101‧‧‧托盤載台(可動托盤載台)
102‧‧‧排出單元
105‧‧‧載台移動機構
106‧‧‧載台移動機構
107‧‧‧可動框架
108‧‧‧固定框架
109‧‧‧可動框架
110‧‧‧固定框架
111～113‧‧‧面板載台
114‧‧‧基底板
116‧‧‧資料讀取裝置
117‧‧‧機器人
118‧‧‧機器人
121‧‧‧面板固持部
122‧‧‧可動框架
123‧‧‧固定框架
124‧‧‧面板固持部
125‧‧‧面板固持部
126‧‧‧可動框架
127‧‧‧固定框架
129‧‧‧可動框架
130‧‧‧可動框架
131‧‧‧可動框架
132‧‧‧固定框架
140‧‧‧供給單元
146‧‧‧資料讀取裝置
148‧‧‧機器人
150‧‧‧搬送裝置
152‧‧‧基底板
153‧‧‧基底板
154‧‧‧固定框架
155‧‧‧滑動載台
156‧‧‧固定框架
158‧‧‧面板固持部
159‧‧‧可動框架
160‧‧‧可動框架
161‧‧‧固定框架
172‧‧‧排出單元
173‧‧‧面板載台
174‧‧‧基底板
175‧‧‧資料讀取裝置
176‧‧‧機器人
177‧‧‧搬送裝置
178‧‧‧機器人
179‧‧‧固定框架
180‧‧‧滑動載台
181‧‧‧固定框架
184‧‧‧面板固持部
185‧‧‧可動框架
186‧‧‧固定框架
187‧‧‧面板固持部
188‧‧‧可動框架
189‧‧‧固定框架
E-E‧‧‧方向
F-F‧‧‧方向
X‧‧‧托盤之搬送方向
X1‧‧‧前側
X2‧‧‧後側
Y‧‧‧左右方向
Y1‧‧‧右側
Y2‧‧‧左側1‧‧‧ transport system
2‧‧‧LCD panel (display panel)
3‧‧‧ tray
4‧‧‧Conveyor (supply-side conveyor)
5‧‧‧Conveyor (discharge side conveyor)
6‧‧‧Tray carrier
7‧‧‧Tray carrier
8‧‧‧ Robot (1st transfer robot)
9‧‧‧ robot (second transfer robot)
10‧‧‧ Supply Unit
11‧‧‧ Ontology Frame (Frame 1)
11a‧‧‧upper surface (setting surface)
12‧‧‧ Ontology frame (second frame)
12a‧‧‧upper surface part (installation part)
15‧‧‧treatment device
16 ～ 25‧‧‧dividing conveyor
27‧‧‧Guide members
28‧‧‧ abutment member
29‧‧‧layer detection agency
30‧‧‧Sensor
31‧‧‧Lifting mechanism
32‧‧‧ Motor
35‧‧‧ Ontology Frame
36‧‧‧ movable frame
37‧‧‧ movable frame
38‧‧‧ movable frame
39‧‧‧Tray holding section
40‧‧‧ Adsorption Department
41‧‧‧Claw
42‧‧‧Claw moving mechanism
45‧‧‧Body
46‧‧‧ connecting rod
47‧‧‧arm
48‧‧‧ head unit (movable part)
49‧‧‧ panel holding section
50‧‧‧motor (rotary drive mechanism)
52‧‧‧arm
53‧‧‧Motor
56‧‧‧Data reading device
57‧‧‧ alignment device
58‧‧‧ Robot
59‧‧‧Ionizer (static removal device)
60‧‧‧ transport device
61‧‧‧Robot
62‧‧‧ base plate
64‧‧‧ panel carrier
65‧‧‧ movable frame
66‧‧‧ movable frame
67‧‧‧Fixed frame
68‧‧‧ Camera
69‧‧‧lighting
70‧‧‧ Sliding stage
71‧‧‧ movable frame
72‧‧‧ fixed frame
73‧‧‧ panel holding section
74‧‧‧ movable frame
75‧‧‧ fixed frame
76‧‧‧ Panel holding section
77‧‧‧ movable frame
78‧‧‧ fixed frame
81‧‧‧ Camera
82‧‧‧ movable frame
83‧‧‧ movable frame
84‧‧‧ movable frame
85‧‧‧ fixed frame
91‧‧‧ transport system
94‧‧‧ conveyor (supply-side conveyor)
95‧‧‧ Conveyor (supply-side conveyor)
96‧‧‧ Conveyor (discharge side conveyor)
97‧‧‧Conveyor (discharge side conveyor)
98‧‧‧Tray carrier (fixed tray carrier)
99‧‧‧Tray carrier (fixed tray carrier)
100‧‧‧Tray carrier (movable tray carrier)
101‧‧‧Tray carrier (movable tray carrier)
102‧‧‧Discharge unit
105‧‧‧Carrier moving mechanism
106‧‧‧ Carrier moving mechanism
107‧‧‧ movable frame
108‧‧‧ fixed frame
109‧‧‧movable frame
110‧‧‧ fixed frame
111 ～ 113‧‧‧ Panel carrier
114‧‧‧ base plate
116‧‧‧Data reading device
117‧‧‧ Robot
118‧‧‧ Robot
121‧‧‧ panel holding section
122‧‧‧ movable frame
123‧‧‧Fixed frame
124‧‧‧ Panel holding section
125‧‧‧ panel holding section
126‧‧‧movable frame
127‧‧‧ fixed frame
129‧‧‧movable frame
130‧‧‧ movable frame
131‧‧‧movable frame
132‧‧‧ fixed frame
140‧‧‧supply unit
146‧‧‧Data reading device
148‧‧‧Robot
150‧‧‧ transfer device
152‧‧‧ substrate
153‧‧‧ substrate
154‧‧‧Fixed frame
155‧‧‧Sliding stage
156‧‧‧Fixed frame
158‧‧‧ panel holding section
159‧‧‧movable frame
160‧‧‧ movable frame
161‧‧‧Fixed frame
172‧‧‧Discharge unit
173‧‧‧ panel carrier
174‧‧‧ substrate
175‧‧‧Data reading device
176‧‧‧ Robot
177‧‧‧ transfer device
178‧‧‧ Robot
179‧‧‧ fixed frame
180‧‧‧ Sliding stage
181‧‧‧Fixed frame
184‧‧‧ panel holding section
185‧‧‧movable frame
186‧‧‧Fixed frame
187‧‧‧ panel holding section
188‧‧‧movable frame
189‧‧‧ fixed frame
EE‧‧‧direction
FF‧‧‧ direction
X‧‧‧ Tray Transfer Direction
X1‧‧‧ Front
X2‧‧‧ rear
Y‧‧‧left and right
Y1‧‧‧ right
Y2‧‧‧left

圖1係本發明之實施形態1之搬送系統之側視圖。 圖2係自圖1之E-E方向顯示搬送系統之俯視圖。 圖3係圖1所示之分割輸送機之立體圖。 圖4係用以說明圖3所示之層數檢測機構之構成及圖1所示之托盤固持部之構成之概略圖。 圖5係圖1所示之第2搬送機器人之立體圖。 圖6係圖1所示之供給單元之立體圖。 圖7係圖6所示之供給單元之俯視圖。 圖8係本發明之實施形態2之搬送系統之側視圖。 圖9係自圖8之F-F方向顯示搬送系統之俯視圖。 圖10係圖9所示之固定托盤載台及可動托盤載台之立體圖。 圖11係圖8所示之排出單元之立體圖。 圖12係圖11所示之排出單元之俯視圖。 圖13係實施形態1之變化例之供給單元之立體圖。 圖14係圖13所示之供給單元之俯視圖。 圖15係實施形態2之變化例之排出單元之立體圖。 圖16係圖15所示之排出單元之俯視圖。Fig. 1 is a side view of a transport system according to a first embodiment of the present invention. Fig. 2 is a plan view showing the conveying system from the direction E-E in Fig. 1. FIG. 3 is a perspective view of the split conveyor shown in FIG. 1. FIG. FIG. 4 is a schematic diagram for explaining the structure of the layer number detecting mechanism shown in FIG. 3 and the structure of the tray holding portion shown in FIG. 1. Fig. 5 is a perspective view of a second transfer robot shown in Fig. 1. FIG. 6 is a perspective view of the supply unit shown in FIG. 1. FIG. FIG. 7 is a plan view of the supply unit shown in FIG. 6. Fig. 8 is a side view of a transfer system according to a second embodiment of the present invention. Fig. 9 is a plan view showing the conveying system from the direction F-F in Fig. 8. FIG. 10 is a perspective view of the fixed tray carrier and the movable tray carrier shown in FIG. 9. FIG. 11 is a perspective view of the discharge unit shown in FIG. 8. FIG. FIG. 12 is a plan view of the discharge unit shown in FIG. 11. 13 is a perspective view of a supply unit according to a modification of the first embodiment. FIG. 14 is a plan view of the supply unit shown in FIG. 13. 15 is a perspective view of a discharge unit according to a modification of the second embodiment. FIG. 16 is a plan view of the discharge unit shown in FIG. 15.

1‧‧‧搬送系統 1‧‧‧ transport system

2‧‧‧液晶面板(顯示面板) 2‧‧‧LCD panel (display panel)

3‧‧‧托盤 3‧‧‧ tray

4‧‧‧輸送機(供給側輸送機) 4‧‧‧Conveyor (supply-side conveyor)

5‧‧‧輸送機(排出側輸送機) 5‧‧‧Conveyor (discharge side conveyor)

6‧‧‧托盤載台 6‧‧‧Tray carrier

7‧‧‧托盤載台 7‧‧‧Tray carrier

8‧‧‧機器人(第1搬送機器人) 8‧‧‧ Robot (1st transfer robot)

9‧‧‧機器人(第2搬送機器人) 9‧‧‧ robot (second transfer robot)

10‧‧‧供給單元 10‧‧‧ Supply Unit

11‧‧‧本體框架(第1框架) 11‧‧‧ Ontology Frame (Frame 1)

12‧‧‧本體框架(第2框架) 12‧‧‧ Ontology frame (second frame)

15‧‧‧處理裝置 15‧‧‧treatment device

16~25‧‧‧分割輸送機 16 ~ 25‧‧‧ split conveyor

35‧‧‧本體框架 35‧‧‧ Ontology Frame

36‧‧‧可動框架 36‧‧‧ movable frame

37‧‧‧可動框架 37‧‧‧ movable frame

38‧‧‧可動框架 38‧‧‧ movable frame

39‧‧‧托盤固持部 39‧‧‧Tray holding section

47‧‧‧臂部 47‧‧‧arm

48‧‧‧頭單元(可動部) 48‧‧‧ head unit (movable part)

56‧‧‧資料讀取裝置 56‧‧‧Data reading device

57‧‧‧對準裝置 57‧‧‧ alignment device

58‧‧‧機器人 58‧‧‧ Robot

59‧‧‧電離器(靜電去除裝置) 59‧‧‧Ionizer (static removal device)

60‧‧‧搬送裝置 60‧‧‧ transport device

61‧‧‧機器人 61‧‧‧Robot

62‧‧‧基底板 62‧‧‧ base plate

64‧‧‧面板載台 64‧‧‧ panel carrier

X‧‧‧托盤之搬送方向 X‧‧‧ Tray Transfer Direction

X1‧‧‧前側 X1‧‧‧ Front

X2‧‧‧後側 X2‧‧‧ rear

Y‧‧‧左右方向 Y‧‧‧left and right

Y1‧‧‧右側 Y1‧‧‧ right

Y2‧‧‧左側 Y2‧‧‧left

Claims (10)

一種搬送系統，其特徵在於，其係進行對特定處理裝置供給之顯示面板之搬送及自特定處理裝置排出之上述顯示面板之搬送之至少任一者的搬送系統，且具備： 輸送機，其搬送堆疊成複數層且可收納顯示面板之托盤；托盤載台，其載置上述托盤；第1搬送機器人，其於上述輸送機與上述托盤載台之間搬送上述托盤；第2搬送機器人，其進行自載置於上述托盤載台之上述托盤搬出上述顯示面板、及向載置於上述托盤載台之上述托盤搬入上述顯示面板的至少任一者；及資料讀取裝置，其讀取記錄於上述顯示面板之資料；且 上述資料讀取裝置讀取由上述第2搬送機器人自上述托盤搬出後之上述顯示面板之上述資料、及由上述第2搬送機器人搬入至上述托盤前之上述顯示面板之上述資料的至少任一者。A transfer system characterized in that it is a transfer system that performs at least one of transfer of a display panel supplied to a specific processing device and transfer of the display panel discharged from a specific processing device, and includes: a conveyor that transfers Pallets stacked in a plurality of layers and capable of accommodating display panels; a pallet carrier on which the aforementioned pallets are placed; a first transport robot that transports the pallets between the conveyor and the pallet carrier; a second transport robot that performs At least any one of carrying out the display panel from the tray placed on the tray carrier, and carrying in the display panel to the tray placed on the tray carrier; and a data reading device whose reading is recorded in the above Display panel information; and the data reading device reads the data of the display panel after the second transfer robot has been removed from the tray, and the display panel before the second transfer robot has been transferred to the tray. At least one of the materials. 如請求項1之搬送系統，其中作為上述輸送機，具備：供給側輸送機，其向接近上述托盤載台之方向搬送上述托盤；及排出側輸送機，其向遠離上述托盤載台之方向搬送上述托盤；且 上述第1搬送機器人進行自上述供給側輸送機向上述托盤載台搬送上述托盤、及自上述托盤載台向上述排出側輸送機搬送上述托盤。The conveyance system according to claim 1, wherein the conveyor includes the supply-side conveyor that conveys the tray closer to the tray stage and the discharge-side conveyor that moves away from the tray stage. The pallet; and the first transfer robot transports the pallet from the supply-side conveyor to the pallet stage, and transports the pallet from the pallet stage to the discharge-side conveyor. 如請求項2之搬送系統，其中上述供給側輸送機具備：導引構件，其配置於與上述托盤之搬送方向及上下方向正交之左右方向之兩側，且限制上述托盤於左右方向之移動；及抵接構件，其配置於上述托盤之搬送方向之下游側，供上述托盤抵接；且於由上述第1搬送機器人向上述托盤載台搬送上述托盤前使上述托盤抵接於上述抵接構件。The conveying system according to claim 2, wherein the supply-side conveyor includes: a guide member disposed on both sides of the left-right direction orthogonal to the conveying direction of the tray and the up-down direction, and restricting the tray from moving in the left-right direction ; And an abutment member, which is arranged on the downstream side of the tray in the conveying direction for the abutting of the tray; and makes the tray abut on the abutting before the first transfer robot transfers the tray to the tray carrier. member. 如請求項1至3中任一項之搬送系統，其中具備複數個上述托盤載台。The conveyance system according to any one of claims 1 to 3, which includes a plurality of the pallet carriers described above. 如請求項1至4中任一項之搬送系統，其中具備：對準裝置，其檢測由上述第2搬送機器人自上述托盤搬出之上述顯示面板之邊緣，且基於上述顯示面板之邊緣之檢測結果而進行上述顯示面板之對位。The conveyance system according to any one of claims 1 to 4, including: an alignment device that detects an edge of the display panel carried out by the second conveyance robot from the tray, and based on a detection result of the edge of the display panel The alignment of the display panel is performed. 如請求項1至5中任一項之搬送系統，其中具備：層數檢測機構，其檢測上述輸送機上之上述托盤之層數；且 上述層數檢測機構具備：感測器，其檢測上述托盤之有無；及升降機構，其使上述感測器升降。The conveying system according to any one of claims 1 to 5, including: a layer number detection mechanism that detects the number of layers of the tray on the conveyor; and the layer number detection mechanism that includes: a sensor that detects the above The presence or absence of a tray; and a lifting mechanism that lifts the above sensor. 如請求項1至6中任一項之搬送系統，其中上述輸送機係由在上述托盤之搬送方向經分割且可個別驅動之複數個分割輸送機而構成。The conveying system according to any one of claims 1 to 6, wherein the conveyor is constituted by a plurality of divided conveyors which are divided in the conveying direction of the pallet and can be individually driven. 如請求項1至7中任一項之搬送系統，其中具備供設置上述第1搬送機器人之第1框架、及供設置上述第2搬送機器人之第2框架；且 於上述第1框架，形成有供設置上述第1搬送機器人之設置面； 上述第2框架具備：設置部，其配置於較上述設置面更上側，且供設置上述第2搬送機器人； 上述第1搬送機器人以自上述設置面立起之方式設置於上述設置面； 上述第2搬送機器人以懸垂於上述設置部之方式設置於上述設置部。The transfer system according to any one of claims 1 to 7, including a first frame for installing the first transfer robot and a second frame for installing the second transfer robot; and the first frame is formed with the first frame The installation surface on which the first transfer robot is installed; the second frame includes: a setting portion that is disposed above the installation surface and is used to install the second transportation robot; and the first transportation robot is arranged to stand from the installation surface. The second transfer robot is installed on the installation portion so as to hang on the installation portion. 如請求項8之搬送系統，其中上述第2搬送機器人具備：本體部；複數條連桿，其等之基端側可旋動地連結於上述本體部；複數個臂部，其等之基端側各者可旋動地連結於複數條上述連桿之末端側各者；可動部，其可旋動地連結於複數個上述臂部之末端側；面板固持部，其安裝於上述可動部且固持上述顯示面板；及複數個旋動驅動機構，其使複數條上述連桿各者旋動；且 複數條上述連桿以向上述本體部之外周側以大致等角度間距大致放射狀地延伸之方式連結於上述本體部； 上述臂部具備相互平行之直線狀之2條臂；且 2條上述臂各者之基端側可旋動地連結於上述連桿之末端側，且上述可動部可旋動地連結於2條上述臂之末端側； 上述本體部固定於上述設置部。The transfer system according to claim 8, wherein the second transfer robot includes: a main body portion; a plurality of links, the base end sides of which are rotatably connected to the main body portion; a plurality of arm portions, and the base ends thereof Each side is rotatably connected to each of the end sides of the plurality of links; a movable portion is rotatably connected to the end sides of the plurality of arm portions; a panel holding portion is mounted to the above-mentioned movable portion and Holding the display panel; and a plurality of rotation driving mechanisms that rotate each of the plurality of links; and the plurality of links extending substantially radially at an approximately equal angular distance to the outer peripheral side of the body portion The arm portion is provided with two arms that are parallel to each other in a linear shape, and a base end side of each of the two arms is rotatably connected to a distal end side of the link, and the movable portion may be connected to the arm portion. The two arms are rotatably connected to the distal ends of the arms. The body portion is fixed to the installation portion. 如請求項1至9中任一項之搬送系統，其中作為托盤載台，具備：2個固定托盤載台，其等於與上述托盤之搬送方向及上下方向正交之左右方向相鄰配置；及2個可動托盤載台，其等可於上述托盤之搬送方向與左右方向移動；且具備：2個載台移動機構，其等使2個上述可動托盤載台個別地移動；且 上述載台移動機構使上述可動托盤載台於在左右方向上與上述固定托盤載台並排之第1位置、與於上述托盤之搬送方向上與上述固定托盤載台之至少一部分重疊之第2位置之間移動。The transfer system according to any one of claims 1 to 9, wherein as the tray carrier, there are: 2 fixed tray carriers, which are arranged adjacent to each other in a left-right direction orthogonal to the above-mentioned tray transport direction and up-down direction; and 2 movable tray carriers, which can be moved in the conveying direction and left-right direction of the tray; and equipped with: 2 carrier moving mechanisms which individually move the 2 movable tray carriers; and the carriers are moved The mechanism moves the movable tray stage between a first position juxtaposed with the fixed tray stage in a left-right direction, and a second position overlapping at least a part of the fixed tray stage in a transport direction of the tray.
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