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TWI481541B - 板狀體搬送裝置及板狀體搬送方法 - Google Patents

板狀體搬送裝置及板狀體搬送方法 Download PDF

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Publication number
TWI481541B
TWI481541B TW100119961A TW100119961A TWI481541B TW I481541 B TWI481541 B TW I481541B TW 100119961 A TW100119961 A TW 100119961A TW 100119961 A TW100119961 A TW 100119961A TW I481541 B TWI481541 B TW I481541B
Authority
TW
Taiwan
Prior art keywords
sub
plate
tool
main
state
Prior art date
Application number
TW100119961A
Other languages
English (en)
Chinese (zh)
Other versions
TW201221455A (en
Inventor
中尾多通夫
辻起久
池田大介
齋田克彥
Original Assignee
大福股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大福股份有限公司 filed Critical 大福股份有限公司
Publication of TW201221455A publication Critical patent/TW201221455A/zh
Application granted granted Critical
Publication of TWI481541B publication Critical patent/TWI481541B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H10P72/36—

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Nonlinear Science (AREA)
  • Fluid Mechanics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW100119961A 2010-08-04 2011-06-08 板狀體搬送裝置及板狀體搬送方法 TWI481541B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010175564A JP5445863B2 (ja) 2010-08-04 2010-08-04 板状体搬送装置

Publications (2)

Publication Number Publication Date
TW201221455A TW201221455A (en) 2012-06-01
TWI481541B true TWI481541B (zh) 2015-04-21

Family

ID=45791508

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100119961A TWI481541B (zh) 2010-08-04 2011-06-08 板狀體搬送裝置及板狀體搬送方法

Country Status (4)

Country Link
JP (1) JP5445863B2 (ja)
KR (1) KR101268558B1 (ja)
CN (1) CN102372174B (ja)
TW (1) TWI481541B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6619762B2 (ja) * 2017-03-27 2019-12-11 平田機工株式会社 製造システムおよび製造方法
CN113247628B (zh) * 2021-06-01 2025-10-14 深圳市烽炀科技实业有限公司 一种复合悬浮垫

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006182560A (ja) * 2004-11-30 2006-07-13 Daihen Corp 基板搬送装置
TWI259550B (en) * 2004-01-30 2006-08-01 Tokyo Electron Ltd Surfacing type substrate transportation processing apparatus
CN1812071A (zh) * 2005-01-17 2006-08-02 大日本网目版制造株式会社 基板处理装置
TWI265905B (en) * 2003-08-20 2006-11-11 Shinko Electric Co Ltd Substrate installation/removal device, substrate installation/removal method, substrate carrier device, and substrate carrier method
JP2009032979A (ja) * 2007-07-27 2009-02-12 Ihi Corp 搬送方向転換装置及び浮上搬送システム
TW201021092A (en) * 2008-10-16 2010-06-01 Tokyo Electron Ltd Substrate carrier device and substrate carrier method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH693177A5 (fr) * 1998-09-02 2003-03-27 Bobst Sa Dispositif correcteur à rouleaux ou à bande pour l'alignement latéral, en cours de façonnage, d'articles en feuilles ou en plaques partiellement pliés dans une plieuse-colleuse.
JP3788296B2 (ja) * 2001-09-10 2006-06-21 株式会社ダイフク クリーンルーム用の物品保管設備
JP2003300618A (ja) * 2002-04-10 2003-10-21 Orc Mfg Co Ltd 基板搬送機構
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece
JP4244000B2 (ja) * 2003-08-29 2009-03-25 株式会社ダイフク 搬送装置
KR100924266B1 (ko) 2008-01-18 2009-10-30 주식회사 에스에프에이 기판 이송장치
CN101746622B (zh) * 2009-12-23 2013-01-02 浙江双友物流器械股份有限公司 板材进料机

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI265905B (en) * 2003-08-20 2006-11-11 Shinko Electric Co Ltd Substrate installation/removal device, substrate installation/removal method, substrate carrier device, and substrate carrier method
TWI259550B (en) * 2004-01-30 2006-08-01 Tokyo Electron Ltd Surfacing type substrate transportation processing apparatus
JP2006182560A (ja) * 2004-11-30 2006-07-13 Daihen Corp 基板搬送装置
CN1812071A (zh) * 2005-01-17 2006-08-02 大日本网目版制造株式会社 基板处理装置
JP2009032979A (ja) * 2007-07-27 2009-02-12 Ihi Corp 搬送方向転換装置及び浮上搬送システム
TW201021092A (en) * 2008-10-16 2010-06-01 Tokyo Electron Ltd Substrate carrier device and substrate carrier method

Also Published As

Publication number Publication date
JP2012035940A (ja) 2012-02-23
JP5445863B2 (ja) 2014-03-19
CN102372174B (zh) 2015-04-22
CN102372174A (zh) 2012-03-14
KR101268558B1 (ko) 2013-05-28
TW201221455A (en) 2012-06-01
KR20120013188A (ko) 2012-02-14

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