TWI465381B - Plate body conveying device - Google Patents

Description

Plate body conveying device Field of invention

The present invention relates to a plate-shaped body conveying device provided with a blowing-type supporting mechanism, a driving force applying mechanism, and a supporting body, which supplies clean air to the lower surface of the plate-like body, and the plate-shaped body In a non-contact state, the urging force applying mechanism is provided with a plurality of rotating rollers arranged to contact an end portion of the lower surface of the supporting plate-like body perpendicularly intersecting the conveying direction in the conveying direction, and is driven by the driving mechanism Rotating and driving the plurality of rotating rollers, and applying a pushing force to the conveying direction to the plate-shaped body supported by the air-supply supporting mechanism, the supporting system positioning the plurality of rotating rollers at the width of the plurality of rotating rollers The state in which the air supply type support mechanism is located in the direction is supported to be rotatable.

Background of the invention

The plate-shaped body conveying device supports the plate-shaped body in a non-contact state by a blowing-type supporting mechanism, and contacts the supporting plate-like body with the urging force applying mechanism, and thereby urging the force applying mechanism to apply and transport the plate-shaped body The direction of the driving force, and the plate-shaped body is transported along the transport direction. In other words, when the glass substrate for liquid crystal is used as the plate-like body, the glass substrate is supported in a non-contact state by the air supply type supporting mechanism, and the glass substrate is supported by the driving force applying mechanism. At the time of the transformation, the part is cut off, and the driving force is applied, and the driving force is applied while supporting the part where the conveying object is not suitable for contact support in a non-contact manner.

Further, it is conventionally known that the urging force applying mechanism is configured to have a plurality of rotating rollers arranged to contact the end portions of the width direction of the lower surface of the supporting plate-like body in the conveying direction, and to rotationally drive the plurality of rotating rollers by the driving mechanism. The driving force supporting the conveying direction by the plate-shaped body supported by the air supply supporting mechanism, the supporting body supporting the plurality of rotating rollers is arranged to support the plurality of rotating rollers to rotate freely on the side of the air supply supporting mechanism in the width direction. This support is located at the same height as the lower side of the plate-shaped body to be conveyed (for example, refer to Patent Document 1).

Advanced technical literature Patent literature

Patent Document 1 Japanese Patent Laid-Open Publication No. 2005-29360

Summary of invention

The air supplied to the lower surface of the plate body by the air supply type supporting mechanism flows along the lower surface of the plate body, and a part thereof flows in the width direction along the lower surface of the plate body. Further, since the support body is provided at the same height as the lower surface of the plate-shaped body to be conveyed, the air flowing under the plate-like body in the width direction hits the support body, and the support rolls are passed between the rotary rolls arranged in the transport direction. The gap between the plate-like bodies is hoisted onto the plate-like body. In this way, the dust generated by the rotating roller or the like is hoisted together by the air being hoisted to the plate-like body, and the dust is attached to the upper surface of the plate-like body to contaminate the plate-like body.

The present invention has been made in view of the above circumstances, and an object of the invention is to provide a plate-shaped object conveying apparatus capable of suppressing contamination of a plate-shaped body.

The plate-shaped body conveying device of the present invention is provided with a blower-type support mechanism, a urging force applying mechanism, and a plate-shaped body conveying device that supports the clean air to the lower surface of the plate-shaped body. The plate-like body is supported in a non-contact state, and the urging force applying mechanism is provided with a plurality of rotating rollers arranged to contact the end portion of the lower surface of the supporting plate-like body that is orthogonal to the conveying direction in the conveying direction, and The driving mechanism rotationally drives the plurality of rotating rollers, and the supporting system applies the pushing force of the conveying direction to the plate-shaped body supported by the air blowing type supporting mechanism, wherein the supporting system places the plurality of rotating rollers at the plurality of rotating rollers The plate-shaped body conveying device is formed to be rotatable in a state in which the air-feeding type support mechanism in the width direction is located, and the plate-shaped body conveying device is formed with an introduction portion that makes the inside of the support body in the width direction and the opposite side of the opposite side. Connecting, the air flowing in the width direction along the lower surface of the plate-shaped body to be conveyed is between the plurality of rotating rolls, and Following the same height in conveying the plate-like body, the width direction of flow from the inside of the support member to the outside of the person.

In other words, the introduction portion is formed such that the inner side and the outer side in the width direction of the support body communicate with each other, and the air flowing in the width direction along the lower surface of the conveyed plate-like body is between the plurality of rotating rolls, and The same height below the plate-shaped body to be conveyed flows from the inside to the outside in the width direction of the support body, so that the air flowing in the width direction along the lower surface of the plate-like body can flow from the inside of the support body to the introduction portion to the introduction portion. Outside.

Further, the air flowing in the width direction along the lower side of the plate-like body on the inner side in the width direction of the support body is guided from the introduction portion on the downstream side of the flow. When it flows in, it flows to the outer side of the width direction of the support body, and the air which flows in the width direction to the edge part of the lower surface of a plate-shaped body can be suppressed, and the air is swelled from the gap of a support body and a plate-form body. Therefore, it is possible to suppress the dust from being hoisted to the plate-like body as the air is hoisted, and the plate-like body is contaminated. In this way, it is possible to provide a plate-shaped body conveying device capable of suppressing contamination of the plate-like body.

In the embodiment of the plate-shaped body conveying device of the present invention, the first feature structure covers a side edge of the installation space in which the air supply type support mechanism and the urging force applying mechanism are provided, and is located in the installation space. The cover of the side of the transport path of the upper plate-shaped body is preferably disposed on the outer side in the width direction of the support body, and the air supply type support mechanism is configured to attract the air below the air supply support mechanism, and The plate-shaped body conveying device is configured to discharge the clean air, and the plate-shaped body conveying device is formed with a lead-out portion that communicates the inner side of the support body in the width direction with the outer side, and is located below the introduction portion. Air is caused to flow from the outer side in the width direction of the support body to the inner side, and the space above the air supply type support mechanism and the space below the air supply type support mechanism are communicated inside the width direction of the support body. The inner flow path is formed by a space formed between the support body and the air supply type support mechanism, and has the foregoing guide In the inlet portion and the lead-out portion, an outer flow path that communicates with a space above the air supply type support mechanism and the inner flow path communicates with the outer side in the width direction of the support body is formed in a space between the support body and the cover body Formed.

That is, the air supply type support mechanism is configured to suck the air below the air supply type support mechanism and eject it toward the upper side of the air supply type support mechanism. Further, the air introduced from the introduction portion flows through the outer flow path, and then is led out from the lead-out portion to the inner flow path, and flows into the space below the air-sending support mechanism together with the air flowing through the inner flow path. That is, when the outlet is led out to the side of the lid, the air that has been drawn is hoisted onto the glass substrate by the flow of the surrounding airflow, and is configured to be introduced from the introduction portion as described above. The air flows to the space below the air supply type support mechanism, so that the air introduced from the introduction portion flows below the air supply type support mechanism, and the air derived from the lead portion does not easily flow to the plate body, and can effectively Inhibition of contamination of the plate.

In the embodiment of the plate-shaped body conveying device of the present invention, the driving mechanism is preferably constituted by a plurality of electric motors that are provided separately for the plurality of rotating rollers, and the plurality of electric motors are supported by the support body so as to be located in the width direction. The outer side is disposed outside the outer flow path.

That is, the drive mechanism is constituted by a plurality of electric motors that are individually provided for a plurality of rotating rollers, and the driving mechanism is configured as compared with a gear-type interlocking device having a single electric motor and connecting the single electric motor to a plurality of rotating rollers. At this time, it is difficult to generate dust from the drive mechanism. Therefore, even if a drive mechanism composed of a plurality of electric motors is disposed in the outer flow path, the circulating air is less likely to be contaminated. Therefore, the space of the drive mechanism can be provided to form an external flow path.

In the embodiment of the plate-shaped body conveying device of the present invention, in the second or third characteristic structure, it is preferable that the introduction portion is formed by a gap between the upper edge portion of the support body and the lid body, and the lower edge of the support body The gap between the portion and the cover body forms the lead-out portion.

That is, the support body is formed only by forming a gap between the upper edge portion of the support body and the cover body or between the lower edge portion of the support body and the cover body, so that the introduction portion or the lead-out portion can be formed without forming the introduction portion or The lead-out portion is provided with a member that communicates with the inner side and the outer side of the support body, so that the introduction portion and the lead-out portion are easily formed.

In a fourth aspect of the present invention, in the fourth aspect, the gap between the upper edge of the support and the cover, and the gap between the lower edge of the support and the cover are preferably formed as The transport direction is at the same position.

In other words, the gap between the upper edge portion of the support body and the lid body and the gap between the lower edge portion of the support body and the lid body are formed at the same position in the transport direction, and the introduction portion and the lead-out portion formed below the transport portion are transported. Since the direction is located at the same position, the air introduced from the introduction portion is easily led out from the outlet portion, and the air introduced from the introduction portion can be smoothly discharged from the outlet portion.

In the fourth or fifth aspect of the present invention, in the fourth or fifth aspect, the lower end portion of the support body is preferably connected to the lid body, and the lid body is supported by a single support, and the support is supported by the lid body. A gap between the upper portion of the body and the lid body is formed to be continuous along the transport direction.

That is, since the support body can be supported by the lid body by connecting the lower end portion thereof to the lid body, the support body is easily coupled to the lid body. Further, since the gap between the upper portion of the support body and the lid body is formed to be continuous along the conveyance direction, the introduction portion can be formed to have a large width in the conveyance direction, and the air can be easily introduced from the introduction portion, so that the impact support can be effectively suppressed. The air caused by the body is hoisted.

In the fourth or fifth aspect of the invention, in the fourth or fifth aspect of the invention, the upper end portion and the lower end portion of the support body are preferably connected to the lid body, and the lid body is supported by the lid body in a double support shape.

That is, by attaching the upper end portion and the lower end portion of the support body to the cover body, the cover body can stably support the support body, and the support body stably supported by the support body can be rotatably rotated to stabilize the plate body. Ground and driving force.

In the embodiment of the plate-shaped body conveying device of the present invention, the lower end of the introduction portion is preferably located lower than the height of the abutting point of the rotating roller with respect to the plate-like body, and the upper end of the leading portion is located lower than the rotating roller. The position of the center of rotation.

Simple illustration

Fig. 1 is a plan view showing a plate-shaped object conveying device of the first embodiment.

Fig. 2 is a front view of the plate-shaped body conveying device of the first embodiment.

Fig. 3 is a front elevational view showing the drive mechanism and the support of the first embodiment.

Fig. 4 is a perspective view showing the drive mechanism and the support of the first embodiment.

Fig. 5 is a view showing the flow of air in the first embodiment.

Fig. 6 is a front elevational view showing the drive mechanism and the support of the second embodiment.

Fig. 7 is a perspective view showing the drive mechanism and the support of the second embodiment.

Fig. 8 is a view showing the flow of air in the second embodiment.

Form for implementing the invention

Hereinafter, the plate-shaped body conveying device of the present invention will be described based on the drawings. Combinations of features of one embodiment and features of another embodiment are also included in the scope of the invention.

First embodiment

As shown in Fig. 1 and Fig. 2, the plate-shaped body conveying device H is provided with a blower type support mechanism that supplies clean air to the lower surface of the liquid crystal glass substrate 1 as a plate-like body, and supports the glass substrate 1 in a non-contact state. 2. The driving force applying mechanism 3 for applying the driving force to the conveying direction of the glass substrate 1 and the cover air supply supporting mechanism 2, the driving force applying mechanism 3, and the glass substrate 1 to be conveyed are contacted. The cover 4 is constructed. In addition, the glass substrate 1 is conveyed by a plurality of plate-shaped plate conveying apparatuses H, and the plate-shaped body conveying apparatus H is arranged in a plurality of rows in the conveying direction.

Further, as shown in Fig. 2, the plate-shaped body conveying device H is configured such that the glass substrate 1 is supported in a non-contact state by the air blowing type supporting mechanism 2, and the glass substrate 1 is supported in a contact state by the urging force applying mechanism 3. Further, the urging force applying mechanism 3 applies a urging force to the glass substrate 1 in the transport direction, and the glass substrate 1 can be transported in the transport direction.

The air supply type support mechanism 2 is equipped with a dust removal filter 6 for removing dust, and a blower fan 7 as a blower mechanism that supplies clean air to the lower surface of the glass substrate 1 via the dust filter. In addition, the fan filter unit 8 configured by integrally assembling one of the blower fans 7 that rotates around the vertical axis and the plate-shaped dust filter that covers the upper of the one of the blower fans 7 is spaced apart in the width direction. Two sets are arranged in a state in which two transport units are arranged in a state in which the transport direction is not spaced apart, and the air supply type support mechanism 2 is configured by a plurality of fan filter units 8 arranged in the width direction and the transport direction.

Further, the air supply type support mechanism 2 is configured to suck the air below the air supply type support mechanism 2 by the air blowing action of the air blowing fan 7, and to discharge the air passing through the dust removing filter 7 as clean air toward the upper side of the air blowing type supporting mechanism 2, By purging the clean air in this manner, the clean air can be supplied to the lower surface of the conveyed glass substrate 1, and the glass substrate 1 can be supported in a horizontal or horizontal posture. Further, the air supply support mechanism 2 can be depressurized by the suction of the air support mechanism 2, and the air above the air supply support mechanism 2 can be pressurized by the air blow of the air support mechanism 2.

As shown in FIGS. 1 and 2, the urging force applying mechanism 3 is configured to arrange a plurality of rotating rollers 10 having end portions in the width direction perpendicular to the conveying direction perpendicularly contacting the supporting glass substrate 1 in the conveying direction, The driving mechanism 11 rotationally drives the plurality of rotating rolls 10 to apply a pushing force to the glass substrate 1 supported by the air blowing type supporting mechanism 2 in the conveying direction. Further, the drive mechanism 11 is composed of a plurality of electric motors 12 that are individually provided for a plurality of rotating rollers 10.

Further, the urging force applying mechanism 3 is provided at both end portions in the width direction of the lower surface of the support glass substrate 1, and is provided with one end side urging force applying mechanism 3 and contact which contact one end portion of the lower surface of the glass substrate 1 in the width direction. The other end side of the other end portion in the width direction of the lower surface of the glass substrate 1 is provided to urge the force applying mechanism 3 to the driving force applying mechanism 3. Incidentally, the air supply support mechanism 2 is disposed between the pair of urging force applying mechanisms 3 to supply the clean air to the intermediate portion in the width direction of the lower surface of the glass substrate 1, and is supported in a non-contact state.

The cover body 4 is configured to cover the side of the installation space for providing the air supply type support mechanism 2 and the urging force application mechanism 3, and the glass base above the installation space. The side of the transport path of the board 1 and the transport path of the glass substrate 1 located above and below the installation space. In addition, as shown in FIG. 3 and FIG. 4, the cover body 4 is attached to the side of the installation space and the glass substrate 1 in a combination frame 14 in which a plurality of frame materials are arranged at intervals in the vertical direction and the horizontal direction. The pair of plate-shaped side wall members 15 on the side of the transport path, and the plate-shaped upper wall member 16 covering the installation space and the upper side of the transport path of the glass substrate 1 are closed, and the left and right sides and the upper side are closed, and the front is closed. Rear and below.

Further, the frame member of the combination frame 14 is provided with a main frame member 14a disposed at four corners in the conveyance direction along the conveyance direction, and the side wall member 15 is disposed between the upper left main frame member 14a and the lower left main frame member 14a. And between the upper right main frame material 14a and the lower left main frame material 14a to close the space, the upper wall member 16 is disposed between the upper left main frame material 14a and the upper right main frame material 14a to close the space. Further, the upper left main frame member 14a and the upper right main frame member 14a are referred to as an upper main frame member 14a, and the lower left main frame member 14a and the lower right main frame member 14a are referred to as a lower main frame member 14a.

Then, as shown in FIG. 3, the support body 18 supporting the urging force applying mechanism 3 is supported by the combination frame 14 of the cover body 4 in a state of being located between the side wall member 15 of the cover body 4 and the air supply type support mechanism 2. The support body 18 is configured to rotatably support a plurality of rotating rollers 10 in a state in which a plurality of rotating rollers 10 are located inside the air supply supporting mechanism 2 in the width direction, and support the electric motor 12 in a plurality of electric motors 12 The air supply type support mechanism 2 in the width direction does not have an outer side.

Incidentally, as shown in FIG. 4, a hole through which the output shafts of the plurality of electric motors 12 are inserted is formed in the support body 18, and the plurality of electric motors 12 are supported by the support body 18 in a state in which the output shaft is inserted through the holes, respectively. Outside. Then, the rotating roller 10 is fixedly rotated integrally with the output shaft of the electric motor 12 projecting from the hole of the support body 18 to the inner side, and the rotating roller 10 is also supported by the support body 18 by the electric motor 12.

Further, the shape of the support body 18 will be described. As shown in FIGS. 3 and 4, a plurality of electric motors 12 are supported, and a support portion through which the output shaft is inserted and which extends in the vertical direction is formed. 18a. The connecting portion 18b connected to the cover 4 and the first connecting portion 18c connecting the supporting portion 18a and the connecting portion 18b and the second connecting portion 18d connecting the adjacent supporting portion 18a are formed. A vent hole surrounded by the support portion 18a and the second connecting portion is formed at a lower portion of the support body 18. Further, the support portion 18a, the connecting portion 18b, the first connecting portion 18c, and the second connecting portion 18d are formed in a plate shape, respectively.

Then, the connecting portion 18b is provided in the assembled frame 14 in a state of protruding from the lower main frame 14a to the inner side in the width direction, and the supporting portion 18a and the second connecting portion 18d are provided from the side wall member 15 of the cover 4, The lower main frame 14a and the upper main frame 14a are spaced apart from each other in the width direction, and are spaced apart from the upper wall member 16 of the lid 4 or the upper main frame 14a to the lower side, from the lower main frame 14a. Pull apart to the upper side. In this manner, the lower end portion of the support body 18 is coupled to the lid body 4, and the lid body 4 is formed in a single support shape, and the entire upper portion of the support body and the lid body 4 are spaced apart from each other in the vertical direction and the width direction.

Further, the rotating roller 10 is constituted by a pulley to which an O-ring is attached, and has an O-ring to mount the small-diameter portion 10a of the supporting glass substrate 1 and is located outside in the width direction thereof to abut against the side surface of the glass substrate 1. The large diameter portion 10b that restricts the movement of the glass substrate 1 in the width direction. Incidentally, it is considered to form an O-ring by NBR (nitrile rubber), a pulley made of nylon, or an O-ring made of urethane rubber, and a pulley made of ABS resin.

The plate-shaped body conveying device H is formed with an introduction portion 23 and a lead-out portion 24 that communicate with the inside of the width direction of the support body 18 and the other side of the opposite side thereof, and are transported between the plurality of rotating rolls 10 and The height of the lower surface of the glass substrate 1 is such that the air flowing in the width direction along the lower surface of the conveyed glass substrate 1 flows from the inner side in the width direction of the support body 18 to the outside, and the lead-out portion makes the width of the support body 18 The inner side of the direction communicates with the outer side, and the air introduced from the introduction portion 23 flows from the outer side in the width direction of the support body 18 to the inner side below the introduction portion 23.

Further, as shown in FIG. 5, the plate-shaped body conveying device H is formed with an inner flow path 21 and an outer flow path 22, and the inner flow path is such that the space above the air supply type support mechanism 2 and the air supply type support mechanism 2 are provided. The lower space communicates with the inside of the width direction of the support body 18, and the outer flow path has the introduction portion 23 and the lead-out portion 24, so that the space above the air supply type support mechanism 2 and the inner flow path 21 are at the width of the support body 18. Connected to the outside of the direction.

First, the introduction portion 23 and the lead-out portion 24 will be described. The introduction portion 23 is formed by the gap between the upper edge portion of the support body 18 and the lid body 4, and the vent hole formation and discharge portion 24 is formed on the lower edge portion of the support body 18. That is, the entire upper portion of the support body 18 is spaced apart from the lid body 4 in the up-and-down direction and the width direction, thereby being formed by the separation interval, and forming a series (ie, continuous) of the upper portion of the support body 18 along the transport direction. The gap of the lid body 4 forms the introduction portion 23. Further, a lower vent hole is formed in the lower portion of the support body 18 at a lower portion of the support body 18 along the transport direction, and a plurality of vent hole forming and deriving portions 24 are formed along the transport direction. Further, the lower end of the introduction portion 23 is located lower than the height of the abutment point of the rotating roller 10 to the plate-like body, and the upper end of the lead-out portion 24 is located lower than the rotation center of the rotating roller 10.

Then, a part of a series of gaps is formed between the upper portion of the support body 18 and the cover body 4 along the transport direction, and a plurality of vent holes are formed in the lower direction of the support body 1 along the transport direction to be viewed in the width direction. The direction in which the directions are arranged is formed, and the introduction portion 23 and the lead portion 24 formed by the gaps and the vent holes are also formed in a state of being aligned in the vertical direction in the width direction.

Next, the inner flow path 21 and the outer flow path 22 will be described. As shown in Fig. 5, the support body 18 is provided in a state in which the air supply type support mechanism 2 is opened to the outer side in the width direction, thereby providing the air supply type support. The space between the mechanism 2 and the support 18 forms the inner flow path 21. Further, the support body 18 is provided in a state in which the side wall portion 15 is opened to the inner side in the width direction, whereby the space between the support body 18 and the side wall portion 15 forms the outer flow path 22. Incidentally, above the air supply type support mechanism 2, the air supply type support mechanism 2 is sprayed and pressurized, and under the air supply type support mechanism 2, the air supply type support mechanism 2 is sucked and decompressed, and the air supply is connected. The space above the support mechanism 2 and the inner flow path 21 of the space below the air supply support mechanism 2 generate airflow from the upper space side of the air supply support mechanism 2 to the lower space side of the air supply support mechanism 2. In the same manner, in the outer flow path 22, the air flow from the upper space side to the inner side flow path 21 side of the air supply type support mechanism 2 is generated.

Further, a plurality of rotating rolls 10 located inside the width direction of the support body 18 are disposed in the inner flow path 21, and a plurality of electric motors 12 located outside the width direction of the support body 18 are disposed in the outer flow path 22. Further, as shown in Fig. 2, the space between the fan filter units 8 arranged in the width direction forms the width of the space above the air supply type support mechanism 2 and the space below the air supply type support mechanism 2 in the width of the air supply type support mechanism 2. The internal flow path 20 that communicates with the central portion of the direction.

Therefore, as shown in FIG. 5, the air supplied to the lower surface of the glass substrate 1 by the air supply type supporting mechanism 2 flows in the width direction along the lower surface of the glass substrate 1, and the inside flow path is indicated by the arrow a. 21 flows or as indicated by arrow b, flows through the outer flow path 22, and flows to the space below the air supply support mechanism 2 to circulate the air. In particular, in the air flowing along the lower surface of the glass substrate 1 to the outside in the width direction, the air passing between the rotating rolls 10 arranged in the conveying direction is introduced from the introduction portion 23 to the outside of the support body 18 as indicated by the arrow b. The outer flow path 22 is led out from the lead portion 24 to the inner flow path 21 . In other words, the introduction portion 23 is formed between the plurality of rotating rolls 10 and at the same height as the lower surface of the glass substrate 1 to be conveyed, and the air between the rotating rolls 10 arranged in the conveying direction does not easily collide with the supporting body 18, and The air can be suppressed from being rolled up above the glass substrate 1.

Second embodiment

Next, a second embodiment of the plate-shaped body conveying device will be described. Further, in the second embodiment, the shape of the lid body and the support body is different from that of the first embodiment, and the method of forming the inner channel, the outer channel, the introduction portion, and the lead portion is different, and the first embodiment is different from the first embodiment. The same components as those of the first embodiment or the components having the same functions are denoted by the same reference numerals, and the description thereof will be omitted. The configuration different from the first embodiment will be mainly described.

As shown in Fig. 6, the cover body 4 is assembled and covered by the side wall frame 26 covering the side of the installation space where the air supply type support mechanism 2 and the urging force imparting mechanism 3 are provided and the side of the transport path of the glass substrate 1. In the space and the plate-shaped upper wall member (not shown) above the transport path of the glass substrate 1, the left and right sides and the upper side are sealed, and the front, the rear, and the lower side are opened as in the first embodiment.

Further, the upper portion of the side wall frame 26 is formed in the transport direction by the vertical wall portion 26a, the upper wall portion 26b, and the lower wall portion 26c, and is open inside. In the zigzag shape, the support body 18 is provided by the upper wall portion 26b and the lower wall portion 26c of the side wall frame 26, and a space surrounded by the vertical wall portion 26a, the upper wall portion 26b, the lower wall portion 26c, and the support body 18 is formed. That is, the plate-shaped support body 18 supporting the urging force applying mechanism 3 is supported by the frame for the side wall of the cover body 4 in a state of being located between the vertical wall portion 26a of the side wall frame 26 of the cover body 4 and the air supply type support mechanism 2. 26.

As shown in Fig. 7, the support body 18 has a plurality of electric motors 12 supported thereon, and a support portion 18e for forming a hole through which the output shaft is inserted, a connecting portion 18f connected to the upper wall portion 26b, and a lower portion are connected to the lower portion A portion 18g below the wall portion 26c and a connecting portion 18h connecting the adjacent support portions 18e are formed, and a plurality of slits are formed in the lower portion and the upper portion of the support body 18, respectively. Then, the support body 18 is formed in a flat shape, and the support portion 18e and the joint portion 18h are provided so as to be separated from the side wall portion 26a of the frame body 26 by the side wall portion 26a of the cover body 4 to the inner side in the width direction, and are pulled away from the upper wall portion 26b. The interval is downward, and the interval is pulled from the lower wall portion 26c to the upper side. In this manner, the upper end portion and the lower end portion of the support body 18 are coupled to the lid body 4, and the lid body 4 is formed in a double support shape. The upper portion and the lower portion of the support body 18 are formed with slits, and the portion and the lid body 4 are vertically oriented and widthwise. The direction is pulled apart.

The introduction portion 23 and the lead portion 24 will be described. The upper edge portion of the support body 18 and the upper wall portion 26b of the lid body 4 are spaced apart in the up-and-down direction, and the portion and the vertical wall portion 26a of the cover body 4 are wide. The direction is pulled apart, and the introduction portion 23 is formed by the gap between the upper portion of the support body 18 and the lid body 4 which is formed by the separation interval and which is dispersed along the conveyance direction. Further, the lower portion of the support body 18 is spaced apart from the lower wall portion 26c of the cover body 4 in the up-and-down direction, and a portion is spaced apart from the vertical wall portion 26a of the cover body 4 in the width direction, thereby being pulled apart. The lead-out portion 24 is formed by a gap formed between the lower portion of the support body 18 and the lid body 4 which are formed at intervals and dispersed in the transport direction.

Then, a gap formed between the upper portion of the support body 18 and the lid body 4 in the transport direction and a gap formed between the lower portion of the support body 18 and the lid body 4 in the transport direction are formed to be the same in the transport direction. At the position, the introduction portion 23 and the lead portion 24 formed by the equal gap are also formed at the same position in the transport direction.

Next, the inner flow path 21 and the outer flow path 22 will be described, and the support body 18 is provided in a state in which the air supply type support mechanism 2 is opened to the outer side in the width direction, whereby the air supply type support mechanism 2 and the support body 8 are interposed therebetween. The space forms the inner flow path 21. Moreover, the support body 18 is provided in a state in which the space is opened from the vertical wall portion 26a to the inner side in the width direction, and the outer flow path 22 is formed by the space between the support body 18 and the vertical wall portion 26a.

Then, as shown in Fig. 8, as shown in Fig. 8, the air supply branch mechanism 2 supplies the space below the glass substrate 1 in the width direction along the lower surface of the glass substrate 1, and then by the arrow a As shown in the inner flow path 21 or as indicated by an arrow b, the outer flow path 22 flows, and flows into a space below the air supply type support mechanism 2 to circulate air. In particular, in the air flowing along the lower surface of the glass substrate 1 to the outside in the width direction, the air passing between the rotating rolls 10 arranged in the conveying direction is introduced from the introduction portion 23 to the outside of the support body 18 as indicated by the arrow b. The outer flow path 22 is led out from the lead portion 24 to the inner flow path 21 . In other words, the introduction portion 23 is formed between the plurality of rotating rolls 10 and at the same height as the lower surface of the glass substrate 1 to be conveyed, and the air between the rotating rolls 10 arranged in the conveying direction does not easily collide with the supporting body 18, and The air can be suppressed from being rolled up above the glass substrate 1.

Other embodiments

(1) In the first and second embodiments, the upper space of the air supply type support mechanism 2 is communicated with the inner flow path 21 by the outer flow path 22, and the outer flow path 22 may be provided above the air supply type support mechanism 2. The space communicates with the outer side in the width direction of the lid body 4 or the space above the air supply type support mechanism 2 communicates with the space below the lid body 4 without connecting the outer side flow path 22 to the inner side flow path 21. Further, the lead-out portion 24 may be provided in a filter for removing dust or a suction fan for sucking air from the introduction portion 23 when air is taken out from the lead-out portion 24.

(2) In the first and second embodiments described above, the plurality of circuit motors 12 that are provided separately for the plurality of rotating rollers 10 constitute the driving mechanism 11, and the driving mechanism 11 may be a single electric motor and the electric motor 12 The interlocking device is connected with a plurality of rotating rollers. Moreover, the drive mechanism 11 is disposed in the outer flow path 22, and a space for disposing the drive mechanism 11 may be separately provided, and the drive mechanism 11 may be disposed outside the outer flow path 22.

(3) In the first and second embodiments, the gap between the upper portion of the support body 18 and the lid body 4 and the gap between the upper portion of the support body 18 and the lid body 4 are aligned in the vertical direction. Further, the gap between the upper portion of the support body 18 and the lid body 4 and the gap between the upper portion of the support body 18 and the lid body 4 may be formed in a zigzag shape in the conveyance direction, and may be formed in a state in which the width direction is not aligned in the vertical direction.

(4) In the first embodiment, the lower end portion of the support body 18 is coupled to the lid body 4 and supported by the lid body 4 in a single support shape. In the second embodiment, the upper end portion of the support body 18 is The lower end portion is coupled to the lid body 4 and supported by the lid body 4 in a double support shape, and the upper end portion of the support body 18 may be coupled to the lid body 4 to be supported by the lid body 4 in a single support shape. Incidentally, at this time, the gap between the lower portion of the support portion 18 and the lid body 4 is formed in a series in the conveying direction.

(5) In the first and second embodiments, the introduction portion 23 is formed by the gap between the upper end portion of the support body 18 and the lid body 4, and the vent hole for forming the introduction portion of the support body 18 may be formed. The vent hole forms the introduction portion 23.

Further, in the first embodiment, the outlet portion forming vent hole is formed in the lower portion of the support body 18, and the outlet portion 24 is formed by the vent hole, and the gap between the lower portion of the support body 18 and the lid body 4 may be derived. Department 24.

Further, in the second embodiment, the lead-out portion 24 is formed by the gap between the lower portion of the support body 18 and the lid body 4, and the vent hole for forming the lead-out portion can be formed in the support body 18, and the vent hole can be formed as the lead-out portion 24 .

(6) In the first and second embodiments, the rectangular plate substrate 1 is exemplified as the plate-shaped body, and may be another plate-like body such as a semiconductor wafer, or may be a plate-like body having another shape such as a circular shape. .

(7) In the first and second embodiments, the lid body 4 is configured to cover the installation space in which the air supply type support mechanism 2 and the urging force applying mechanism 3 are provided, and the glass substrate 1 located above the installation space. In the first embodiment, the cover member 4 is configured to cover only the side of the installation space and the side of the transport path of the glass substrate 1 without providing the upper wall member 15 or the like. Further, in the first embodiment, a lower wall member or the like is provided between the lower main frames 14a, and the lid body 4 is configured to cover the side of the installation space and the glass substrate 1 located above the installation space. Side, top and bottom of the path.

(8) In the first and second embodiments described above, the glass substrate 1 is supported in a non-contact state by the air supply type support mechanism 2 in a horizontal or horizontal posture, or may be configured to have the air supply mechanism 2 at a width. The direction in which the direction is inclined is set, and the glass substrate 1 is supported by the air supply type supporting mechanism 2 in an inclined posture inclined in the width direction. Incidentally, at this time, in order to tilt the urging force applying mechanism 3 (the plurality of rotating rollers 10) in accordance with the inclination of the air blowing type supporting mechanism 2, the support body 18 may be inclined in the width direction. .

1. . . glass substrate

2. . . Air supply support mechanism

3. . . Driving force and institution

4. . . Cover

6. . . Dust filter

7. . . Air supply fan

8. . . Fan filter unit

10. . . Rotating roller

10a. . . Small diameter department

10b. . . Large diameter department

11. . . Drive mechanism

12. . . electric motor

14. . . Combination frame

14a. . . Main frame

15. . . Side wall member

16. . . Upper wall member

18. . . Support

18a. . . Support part

18b. . . Link part

18c. . . First connection part

18d. . . Second connection part

18e. . . Support part

18f. . . Upper link

18g. . . Lower link

18h. . . Connecting part

20. . . Internal flow path

twenty one. . . Medial flow path

twenty two. . . Lateral flow path

twenty three. . . Import department

twenty four. . . Export department

26. . . Side wall frame

26a. . . Vertical wall

26b. . . Upper wall

26c. . . Lower wall

a, b. . . Arrow

H. . . Plate body conveying device

Fig. 1 is a plan view showing a plate-shaped object conveying device of the first embodiment.

Fig. 2 is a front view of the plate-shaped body conveying device of the first embodiment.

Fig. 3 is a front elevational view showing the drive mechanism and the support of the first embodiment.

Fig. 4 is a perspective view showing the drive mechanism and the support of the first embodiment.

Fig. 5 is a view showing the flow of air in the first embodiment.

Fig. 6 is a front elevational view showing the drive mechanism and the support of the second embodiment.

Fig. 7 is a perspective view showing the drive mechanism and the support of the second embodiment.

Fig. 8 is a view showing the flow of air in the second embodiment.

1‧‧‧ glass substrate

2‧‧‧Air supply support mechanism

3‧‧‧ Driving force and institution

4‧‧‧ cover

8‧‧‧Fan filter unit

10‧‧‧Rotating roller

11‧‧‧Drive mechanism

12‧‧‧Electric motor

14‧‧‧Combined framework

14a‧‧‧Main frame material

15‧‧‧ sidewall components

16‧‧‧Upper wall components

18‧‧‧Support

21‧‧‧Inside flow path

22‧‧‧Outer flow path

23‧‧‧Importing Department

24‧‧‧Derivation Department

a, b‧‧‧ arrows

Claims (8)

A plate-shaped body conveying device is provided with a blowing-type supporting mechanism, and supplies clean air to the lower surface of the plate-like body to support the plate-shaped body in a non-contact state; a pushing force applying mechanism, and a contact supporting plate shape is arranged in the conveying direction a plurality of rotating rolls at the end portion in the width direction orthogonal to the conveying direction, and a plurality of rotating rolls are rotatably driven by a driving mechanism, and the plate-shaped body supported by the air blowing type supporting mechanism is applied to the conveying direction And a support body, wherein the plurality of rotating rollers are rotatably supported in a state in which the plurality of rotating rollers are located inside the air supply supporting mechanism in the width direction; and the width of the support body is formed An introduction portion that communicates with the inner side of the direction and the outer side of the opposite side, the introduction portion causes air flowing in the width direction along the lower surface of the plate-shaped body to be conveyed, and between the plurality of rotating rollers and the plate shape to be conveyed The same height below the body flows from the inner side in the width direction of the support body to the outer side. The plate-shaped body conveying device of the first aspect of the invention, wherein a side wall for providing the installation space of the air supply type supporting mechanism and the driving force applying mechanism, and a plate body located above the installation space The cover body on the side of the transport path is disposed on the outer side in the width direction of the support body, and the air supply type support mechanism is configured to attract the air supply type support The air below the mechanism ejects clean air toward the air supply supporting mechanism, and a lead-out portion is formed. The lead-out portion communicates the inner side and the outer side of the width direction of the support body, and is lower than the introduction portion. Air is caused to flow from the outer side in the width direction of the support body to the inner side, and a space above the air supply type support mechanism and a space below the air supply type support mechanism are communicated inside the width direction of the support body. The flow path is formed by a space formed between the support body and the air supply type support mechanism, and has the introduction portion and the lead-out portion, and a space above the air supply support mechanism and the inner flow path are in the support body The outer flow path that communicates with the outer side in the width direction is formed by a space formed between the support body and the cover body. The plate-shaped body conveying device according to claim 2, wherein the driving mechanism is configured by a plurality of electric motors that are provided separately for the plurality of rotating rollers, and the plurality of electric motors are supported by the support body so as to be located in the foregoing The outer side of the width direction is disposed in the outer side flow path. The plate-shaped body conveying device according to claim 2, wherein the introduction portion is formed by a gap between the upper edge portion of the support body and the cover body, and a gap between the lower edge portion of the support body and the cover body is obtained. The aforementioned deriving portion is formed. The plate-shaped body conveying device of claim 4, wherein a gap between the upper portion of the support body and the cover body and a lower portion of the support body are The gap between the lids is formed at the same position in the conveying direction. The plate-shaped body conveying device according to claim 4, wherein the lower end portion of the support body is coupled to the lid body, and the lid body is supported by a single support shape, and a gap between the upper portion of the support body and the lid body is formed. It is continuous along the aforementioned conveying direction. The plate-shaped body conveying device according to the fourth aspect of the invention, wherein the upper end portion and the lower end portion of the support body are coupled to the lid body, and the lid body is supported in a double support shape. The plate-shaped body conveying device of the second aspect of the invention, wherein the lower end of the introduction portion is located lower than a height of the abutting point of the rotating roller with respect to the plate-shaped body, and the upper end of the guiding portion is located lower than the rotation The position of the center of rotation of the roller.