1379375 九、發明說明 【發明所屬之技術領域】 本發明是關於最適合顯示裝置製造等 業的搬運系統。 【先前技術】 液晶顯示器（LCD )、電漿顯示器（ 光顯示器（ELD )等顯示裝置的製造，是 埃或水分的附著，因此需要潔淨環境。潔 對各作業，對於連結各作業間的搬運裝置 夠達到潔淨環境。 通常，爲了達到上述潔淨環境，利用 無麈室，具備：具有腔室可使空氣流動在 具有和天花板相同腔室的地板；及可連通 流的風管。再加上，無塵室又具有利用特 除微細塵埃及其他污染物質的送風裝置， 風裝置是設置在天花板。淨化後的空氣是 天花板流下，藉此使內部達到潔淨環境。 淨化程度，及爲了防止濾器變差，潔淨空 而是聚集在地板的腔室，通過上述風管回 室，重覆通過送風裝置的濾器。 無塵室，具有上述特別的構造，因此 此外，爲了天花板及地板的腔室，需要不 大閒置空間。如顯示裝置製造等龐大作業 需要潔淨環境作 PDP)、電致發 需要避免微細塵 淨環境並不只針 也是相同期望能 無塵室。典型的 內部的天花板； 兩腔室使空氣回 別濾器從空氣去 典型的例如該送 利用送風裝置從 爲了維持高標準 氣並未流出外部 流至天花板的腔 無法容易構築。 設有裝置的龐 的裝置及該作業 -5- 1379375 此氣密連結著，再加上，各面板5、7、9、11的上端氣密 覆蓋著天花面板13。此外，各面板5、7'9、11的下 端，構成爲對地板面接觸成氣密。或者，腔室3的地板面 側也可不開放，由地板面板封閉著。各面板彼此的連結也 可不需要爲永久性，而是能夠拆卸。特別是，天花面板 1 3是以可拆卸爲佳。 後面板7和前面板5，分別具有玻璃基板W搬入和搬 出用的開口 15、21。腔室3，又具備有開口 15、21分別 封閉用的後遮板17和前遮板23，該後遮板17和前遮板 23是分別利用缸筒1 9、25的上下驅動成爲可開閉操作。 此外，遮板17、23，也可以具有左右方向活動性來取代 上下方向活動性。遮板17、23位於封閉位置時，構成爲 可封閉開口 15、21成氣密。 即，腔室3是設置在地板面上當各開口 15、21由遮 板1 7、2 3封閉時在其內部圍成密閉空間。另，如以上所 述’當設有地板面板時，僅由面板圍成密閉空間，地板面 也可以不參與成爲密閉空間包圍要素。 上述腔室3內，設有從搬入用開口 15延伸至搬出用 開口 21的支撐框架27。支撐框架27上，設有沿著其形 成排列，包含複數浮上裝置47的搬運裝置29。複數浮上 裝置47是排列形成在前後方向及左右方向的雙方。 搬運裝置29是在支撐框架27上的左端及右端附近， 具有分別排列形成在玻璃基板W搬運方向的複數滾輪 31 °各滾輪31是分別透過旋轉軸使其和蝸輪35成一體連 -8- 1379375 結著’各滾輪31是由托座33支撐成旋轉自如。一對驅動 軸37是配備成貫通在支撐框架27的前後方向，各驅動軸 37具備有可和各蝸輪35咬合成驅動的蝸桿39。各驅動軸 的前端，透過聯結器等連結有可驅動的馬達41輸出軸。 如此一來，各滾輪31，就會承接馬達41的驅動力，以相 同的旋轉速度進行旋轉。如第1圖所示，上述各滾輪31 的上端部，比上述浮上裝置47的上面還要稍微突出上 方’配置成一致位於單一的面上。玻璃基板W，即使是於 浮上裝置47使其上浮的狀態，如第1圖所示，還是能夠 接觸於承接有驅動力的滾輪31。 馬達41可以不需設置成一對，兩驅動軸37也可透過 鏈條等適宜的結合手段連結於單一馬達。此外，也可取代 滾輪，將可驅動的箝位器或輸送帶等搬運手段應用在搬運 裝置29。 於支撐框架27上在左右端附近的滾輪31之間，設有 具複數貫通孔45的鋼板43。各浮上裝置47是分別對應 貫通孔45設置在鋼板43上，各貫通孔45是分別連通於 浮上裝置47的內部。浮上裝置47分別具備有貫通在上面 的噴出孔49。即，從貫通孔45流入的空氣是經由浮上裝 置47的內部從噴出孔49噴出。 貫通孔49，最好是形成如第2圖所示從上方看時成 矩形的環狀，但並不限於此。橢圓形的環狀，或環的一部 份爲封閉的形狀等其他各種的形狀都可應用在該貫通孔 49。爲了讓噴出孔的寬度形成爲相同，噴出孔內也可設有 -9- 1379375 構件或突起。此外，噴出孔49，至少是於浮上裝置47 上面附近，具有朝內方成例如45 °的傾斜。 鋼板43的下方，配備有朝上方供應潔淨空氣的複 送風裝置51。各個送風裝置51，具備有：可從空氣去 微細塵埃及其他污染物質的濾器；及可吹出潔淨空氣的 風機。複數送風裝置51是彼此隔著間隔或是成鄰接沿 浮上裝置47 (即沿著搬運裝置29)排列，透過托座53 定在支撐框架27。利用上述的構造，可使送風裝置51 入外殼3所包圍的密閉空間內部的空氣，經由濾器淨化 朝上方即朝搬運裝置29及浮上裝置47供應。浮上裝 47是透過貫通孔45取入該潔淨空氣，然後從噴出孔 朝上方噴出 送風裝置，也可以是如第4圖所示的變形例。即， 器55是透過托座57固定在支撐框架27。鼓風機59是 定在濾器5 5下方，吸取密閉空間內部的空氣朝濾器5 5 風。 爲了增強浮上裝置47賦予玻璃基板W的浮力，也 在送風裝置51和浮上裝置47之間設有追加送風裝置等 壓手段。此外，爲了浮力的控制等的目的，無塵搬運系 1也可追加設有能夠靜態以至動態控制送風裝置能力的 制手段。 無塵搬運系統1，也可具備有能夠使內部密閉空間 干增壓的增壓手段。透過增壓能夠防止外部的塵埃侵入 若能夠適當管理塵埃的侵入，則降低外殼3的氣密程度 的 數 除 鼓 著 固 吸 後 置 49 濾 固 送 可 增 統 控 若 〇 亦 •10- 1379375 無妨。 本實施形態的無塵搬運系統1，其動作如以下所述。 首先，是由遮板17 '23封閉搬入和搬出用的開口 15、21。接著，啓動送風裝置51，吸取外殻3所包圍的 密閉空間內的空氣’將空氣淨化後供應至上方。潔淨空氣 是通過浮上裝置47供應至密閉空間內。密閉空間內的潔 淨空氣回流進入送風裝置51’更加以淨化，因此密閉空 間內的空氣潔淨度會逐漸提昇。最好是能夠讓潔淨度充分 上昇，此外可能的話’最好是搬運系統連絡用的前後裝置 的內部潔淨度也可與此相同。 當潔淨度已充分上昇時，就由缸筒19驅動後遮板 1 7，開啓搬入用的開口 1 5。搬運流程中是從上游側的裝 置’將玻璃基板W搬入至無塵搬運系統1內，使其位於 搬運裝置29上的區域A。由於空氣是從浮上裝置47噴 出，因此玻璃基板就成爲上浮狀態。若有需要則盡可能短 時間驅動前遮板17封閉開口 15。 接著，驅動馬達41使驅動軸37同步旋轉。透過蝸輪 35和蝸桿39的咬合，驅動軸37的旋轉會傳至各滾輪 31。玻璃基板W，是透過接觸於旋轉的滾輪31，使其以 上浮狀態朝搬出用的開口 21搬運。 當玻璃基板W接近搬出用的開口 21時，就由缸筒25 驅動前遮板23，開啓搬出用的開口 21。然後玻璃基板W 就會被搬出在無麈搬運系統1外，若有需要則盡可能短時 間驅動後遮板23封閉開口 21。 -11 - 1379375 根據本實施形態時，即使房間不具有無塵室的特別構 造即天花板及地板具備有腔室，還是能夠簡單實現局限於 無塵搬運系統內的潔淨環境。由於能夠節省腔室造成的閒 置空間，因此對於裝置的平面配置就能夠提供較大的自由 度。由於潔淨空氣不流出至外部，因此能夠追求高潔淨度 空氣的同時，有利於省能效率。由於不需要附加設有空氣 回流用的裝置，因此能夠使裝置全體規模變小。此外，運 轉中幾乎全部的期間都會回流有潔淨度高的空氣，因此能 夠抑制濾器變差。 本發明是參照最佳實施形態進行了說明，但本發明並 不限於上述實施形態。根據上述揭示內容，具有本技術領 域之通常技術的人貢’都可透過實施形態的修正或變形來 實施本發明。 [產業上之可利用性] • 提供一種直接設置在地板面就能夠簡易構築’能夠回 流潔淨空氣的無塵搬運系統。 【圖式簡單說明】 第1圖爲本發明一實施形態無塵搬運系統的橫剖面 圖。 第2圖爲上述無塵搬運系統的平面剖面圖。 第3圖爲上述無塵搬運系統的縱剖面圖，圖中I·1剖 線爲表示第1圖的剖線’ Π-η爲第2圖的剖線。 -12- 1379375 第4圖爲無麈搬運系統變形例剖面圖。 . 【主要元件符號說明】 1 :無塵搬運系統 3 :外殼 5 :前面板 7 :後面板 Φ 9 :左面板 1 1 :右面板 13 :天花面板 1 5 :搬入用的開口 1 7 :後遮板 1 9 :缸筒 21 :搬出用的開口 23 :前遮板 ® 25 :缸筒 27 :支撐框架 . 29 :搬運裝置 31 :滾輪 33 :托座 35 :蝸輪 37 :驅動軸 39 :蝸桿 4 1 :馬達 -13- 1379375 4 3 :鋼板 45 :貫通孔 . 47 :浮上裝置 49 :噴出孔 51 :送風裝置 53 :托座 5 5 :濾器 # 57 :托座 59 :鼓風機 A :區域 FF :前方 FR :後方 L :左方 R :右方 W :玻璃基板 -141379375 IX. Description of the Invention [Technical Field of the Invention] The present invention relates to a transport system that is most suitable for the manufacture of display devices. [Prior Art] The manufacture of a display device such as a liquid crystal display (LCD) or a plasma display (ELD) is adhesion of moisture or moisture, so a clean environment is required. For each work, a transfer device for connecting the work spaces is provided. In order to achieve the clean environment, in general, in order to achieve the above-mentioned clean environment, the use of a chamber without a chamber has: a chamber having a chamber for allowing air to flow in the same chamber as the ceiling; and a duct that can communicate with the flow. The dust chamber has a blower that utilizes other dust and other pollutants, and the wind device is placed on the ceiling. The cleaned air flows down the ceiling, thereby bringing the interior to a clean environment. The degree of purification, and to prevent the filter from getting worse, Clean air is gathered in the chamber of the floor, and passes through the above-mentioned duct to return to the chamber, and repeatedly passes through the filter of the air supply device. The clean room has the above special structure, and therefore, for the ceiling and the floor chamber, it is not necessary Idle space. If a large operation such as display device manufacturing requires a clean environment for PDP, it is necessary to avoid fine Net environment is not only the needle can also expect the same clean room. Typical internal ceiling; two chambers allow the air to return to the filter from the air. Typical, for example, the air supply unit is not easily constructed to maintain a high standard of air without flowing out of the ceiling to the ceiling. The device having the device and the operation -5 - 1379375 are airtightly coupled, and the upper ends of the panels 5, 7, 9, and 11 are airtightly covered with the ceiling panel 13. Further, the lower ends of the panels 5, 7'9, and 11 are configured to be airtight to the floor surface. Alternatively, the floor side of the chamber 3 may not be open and closed by the floor panel. The connection of the panels to each other does not need to be permanent, but can be removed. In particular, the ceiling panel 1 3 is preferably detachable. The rear panel 7 and the front panel 5 have openings 15 and 21 for carrying in and unloading the glass substrate W, respectively. The chamber 3 is further provided with a rear shutter 17 and a front shutter 23 for closing the openings 15, 21, respectively, and the rear shutter 17 and the front shutter 23 are opened and closed by the upper and lower driving of the cylinders 19 and 25, respectively. operating. Further, the shutters 17 and 23 may have left-right direction mobility instead of vertical movement. When the shutters 17, 23 are in the closed position, they are configured to close the openings 15, 21 to be airtight. That is, the chamber 3 is provided on the floor surface, and when the respective openings 15, 21 are closed by the shutters 17 and 23, a closed space is enclosed therein. Further, as described above, when a floor panel is provided, only the panel is enclosed in a sealed space, and the floor surface may not participate in the enclosed space surrounding element. The chamber 3 is provided with a support frame 27 that extends from the loading opening 15 to the carry-out opening 21. The support frame 27 is provided with a transport device 29 which is arranged along the line and includes a plurality of floating devices 47. The plurality of floating devices 47 are arranged in the front-rear direction and the left-right direction. The conveying device 29 is provided in the vicinity of the left end and the right end of the support frame 27, and has a plurality of rollers 31 arranged in the conveying direction of the glass substrate W. The rollers 31 are respectively integrated with the worm wheel 35 through the rotating shaft -8 - 1379375 The 'roller 31' is supported by the bracket 33 so as to be rotatable. The pair of drive shafts 37 are provided so as to penetrate in the front-rear direction of the support frame 27, and each of the drive shafts 37 is provided with a worm 39 that is slidably coupled to the respective worm wheels 35. A front end of each drive shaft is coupled to a drive shaft 41 of the driveable motor 41 via a coupling or the like. As a result, each of the rollers 31 receives the driving force of the motor 41 and rotates at the same rotational speed. As shown in Fig. 1, the upper end portions of the respective rollers 31 are arranged slightly above the upper surface of the floating device 47 so as to be aligned on a single surface. The glass substrate W can be brought into contact with the roller 31 that receives the driving force as shown in Fig. 1 even in the state in which the floating device 47 is floated. The motor 41 need not be provided in a pair, and the two drive shafts 37 may be coupled to a single motor via a suitable coupling means such as a chain. Further, instead of the roller, a transport means such as a movable clamp or a conveyor belt may be applied to the transport device 29. A steel plate 43 having a plurality of through holes 45 is provided between the rollers 31 in the vicinity of the right and left ends on the support frame 27. Each of the floating devices 47 is provided on the steel plate 43 corresponding to the through hole 45, and each of the through holes 45 communicates with the inside of the floating device 47. Each of the floating devices 47 is provided with a discharge hole 49 penetrating therethrough. That is, the air that has flowed in from the through hole 45 is ejected from the discharge hole 49 via the inside of the floating device 47. The through hole 49 is preferably formed in a ring shape which is rectangular when viewed from above as shown in Fig. 2, but is not limited thereto. Other shapes such as an elliptical ring shape or a closed shape of the ring can be applied to the through hole 49. In order to make the width of the ejection holes the same, the ejection holes may also be provided with -9- 1379375 members or protrusions. Further, the discharge hole 49, at least in the vicinity of the upper surface of the floating device 47, has an inclination of, for example, 45° inward. Below the steel plate 43, a reconditioning device 51 for supplying clean air upward is provided. Each of the air blowing devices 51 is provided with a filter that can remove fine dust and other pollutants from the air, and a fan that can blow out clean air. The plurality of air blowing devices 51 are arranged at intervals or adjacent to each other along the floating device 47 (i.e., along the conveying device 29), and are fixed to the support frame 27 through the bracket 53. According to the above configuration, the air blown into the airtight space surrounded by the casing 3 by the air blowing device 51 can be supplied to the transporting device 29 and the floating device 47 upward through the filter. The floating upper unit 47 takes in the clean air through the through hole 45, and then ejects the air blowing device upward from the discharge hole, and may be a modification as shown in Fig. 4. That is, the device 55 is fixed to the support frame 27 through the bracket 57. The blower 59 is positioned below the filter 55 to draw air from the inside of the sealed space toward the filter 5 5 . In order to enhance the buoyancy of the glass substrate W by the floating device 47, an additional air blowing means is provided between the air blowing means 51 and the floating means 47. Further, for the purpose of buoyancy control or the like, the dust-free transport system 1 may be additionally provided with means capable of statically or dynamically controlling the air blowing device. The dust-free transportation system 1 may be provided with a supercharging means capable of dry-pressurizing the internal sealed space. By supercharging, it is possible to prevent external dust from entering. If the dust can be properly managed, the number of airtightness of the outer casing 3 can be reduced, and the number of airtightness of the outer casing 3 can be reduced. . The operation of the dust-free transport system 1 of the present embodiment is as follows. First, the openings 15 and 21 for loading and unloading are closed by the shutter 17'23. Next, the air blowing device 51 is started to suck the air in the sealed space surrounded by the outer casing 3, and the air is purified and supplied to the upper side. The clean air is supplied to the confined space by the floating device 47. The clean air in the confined space flows back into the air blowing device 51' to be further purified, so that the cleanliness of the air in the sealed space is gradually increased. It is preferable to be able to increase the cleanliness sufficiently, and if possible, it is preferable that the internal cleanliness of the front and rear devices for the handling system connection can be the same. When the cleanliness has risen sufficiently, the rear shutter 1 7 is driven by the cylinder 19 to open the opening 15 for loading. In the conveyance flow, the glass substrate W is carried into the dust-free conveyance system 1 from the upstream side device, and is placed in the area A of the conveyance device 29. Since the air is ejected from the floating device 47, the glass substrate is in an up floating state. If necessary, the front shutter 17 is driven to close the opening 15 as soon as possible. Next, the drive motor 41 rotates the drive shaft 37 in synchronization. Through the engagement of the worm wheel 35 and the worm 39, the rotation of the drive shaft 37 is transmitted to the respective rollers 31. The glass substrate W is conveyed by the roller 31 that is in contact with the rotation, and is conveyed to the opening 21 for carrying out in a floating state. When the glass substrate W approaches the opening 21 for carrying out, the front shutter 23 is driven by the cylinder 25 to open the opening 21 for carrying out. Then, the glass substrate W is carried out of the flawless conveyance system 1, and if necessary, the rear shutter 23 is driven to close the opening 21 as soon as possible. -11 - 1379375 According to the present embodiment, even if the room does not have a special configuration of the clean room, that is, the ceiling and the floor are provided with a chamber, it is possible to easily achieve a clean environment confined to the dust-free transportation system. Since the vacant space caused by the chamber can be saved, a large degree of freedom can be provided for the planar configuration of the device. Since clean air does not flow out to the outside, it is possible to pursue high cleanliness air while contributing to energy saving efficiency. Since it is not necessary to additionally provide a device for air recirculation, the overall scale of the device can be reduced. In addition, the clean air is returned to almost all of the time during the operation, so that the filter can be suppressed from deteriorating. The present invention has been described with reference to the preferred embodiments, but the present invention is not limited to the above embodiments. In view of the above disclosure, the present invention may be implemented by a modification or modification of the embodiments of the present invention. [Industrial Applicability] • Provides a dust-free transportation system that can be easily constructed by directly installing it on the floor surface. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a dust-free transport system according to an embodiment of the present invention. Fig. 2 is a plan sectional view showing the above-described dust-free conveying system. Fig. 3 is a longitudinal sectional view of the above-described dust-free conveyance system, and the line I·1 is a cross-sectional line 第-η of Fig. 1 which is a cross-sectional line of Fig. 2 in the drawing. -12- 1379375 Figure 4 is a cross-sectional view of a variant of a flawless handling system. [Main component symbol description] 1 : Dust-free handling system 3 : Housing 5 : Front panel 7 : Rear panel Φ 9 : Left panel 1 1 : Right panel 13 : Ceiling panel 1 5 : Opening for opening 1 7 : Back cover Plate 19: Cylinder 21: Opening 23 for carrying out: Front shutter® 25: Cylinder 27: Support frame. 29: Carrier 31: Roller 33: Bracket 35: Worm gear 37: Drive shaft 39: Worm 4 1 :Motor-13-1379375 4 3 : Steel plate 45 : Through hole. 47 : Floating device 49 : Spray hole 51 : Air supply unit 53 : Holder 5 5 : Filter # 57 : Holder 59 : Blower A : Area FF : Front FR : Rear L: Left R: Right W: Glass Substrate-14