TWI460075B - Pressing machine - Google Patents

Description

Press machine

This invention relates to a press, and more particularly to a press for pressing a film onto a substrate.

At present, in the lithography process of semiconductor, the way of blocking the photoresist on the wafer can be roughly divided into wet type and dry type. In the wet type, the liquid photoresist is coated on the wafer by spin coating, and then The baking method is to dry the liquid photoresist. The dry type is a dry film resist made of a photoresist strip, and the dry film resist is attached to the wafer via a press machine, for example, the patent of Taiwan Patent No. 502310 (Application No. 090130837) The dry film photoresist press device disclosed in the case.

Since there are a plurality of different crystal grains or patterns on the surface of the wafer, the surface of the wafer is uneven, so how to conceive a dry film photo-resistive pressure and fill it in The design of the press-fit device on the surface of the wafer has become the subject of further improvement of the present invention.

SUMMARY OF THE INVENTION A primary object of the present invention is to provide a press for pressing a film onto a substrate and filling the film against the surface of the substrate.

Another object of the present invention is to provide a method of laminating a film sheet having a size equivalent to that of a substrate by first pressing a film onto a substrate.

The object of the present invention and the prior art problem are solved by the following technical means. The press machine according to the present invention comprises a feeding device. a resetting element, a height adjusting device, a pressing device, and a cutting element.

The feeding device provides a film; the recycling component is connected to one end of the film and can recover the film; the height adjusting device is disposed between the feeding device and the recycling component, and the height adjusting device comprises two movable rollers for winding the film, and two movable rollers The movable film is movable between a first height position and a second height position lower than the first height position; the pressing device comprises a bearing seat and a pressing plate, and the bearing seat is located under the film and is provided for The substrate is placed. When the film is at the second height position, the film is adjacent to the surface of the substrate; the pressure plate is located above the film and includes an elastic film disposed at the bottom end, and a film that can be inhaled or blown to the elastic film. The first gas flow path, the press-fit disc may be located at an initial position above the carrier and the film at a spacing, and between a press-fit position of the carrier and the elastic film pressing the film to adhere to the surface of the substrate. Reciprocating motion; the cutting element is disposed on one side of the pressing device, and the cutting element can cut a portion of the film attached to the surface of the substrate to form a film sheet having a size equivalent to the substrate.

The object of the present invention and solving the prior art problems can be further achieved by the following technical means.

The height adjusting device further comprises a fixed roller for winding the film, the movable roller and the fixed roller are at the same horizontal position, and the two movable rollers are movable relative to the fixed roller to drive the film to move between the first and second height positions. .

The film is wound around the fixed roller and the top of one of the movable rollers, and the film is wound around the bottom end of the other movable roller.

The carrier includes a fixing base for the substrate to be placed, and a pushing member disposed in the fixing body. The pushing member can extend the fixing body to carry the bearing position of the substrate, and the substrate is Reciprocating between the folded positions of the fixed seat.

The fixed seat body includes a top surface and a second gas flow path formed on the top surface, and the second gas flow path can inhale the substrate.

The fixing base further comprises a third gas flow passage formed on the top surface. When the pressing disc is in the pressing position, the third gas flow passage can inhale a chamber formed between the pressing disc and the bearing seat. .

The fixing base further comprises a mounting groove for mounting the pushing member, and an opening of the mounting groove is formed on the top surface. The pushing member includes a suction hole that can adsorb the substrate.

The fixing base further comprises a lower heating element capable of heating the substrate, the lower heating element comprises a heating part for generating a heat source, a heat conducting part disposed at the top end of the heating part and contacting the substrate, and a heating part The thermal insulation at the bottom of the section.

The carrier also includes a cooling element disposed on the fixed base for cooling the fixed seat.

The pressure plate further comprises an upper heating element capable of heating the elastic pressing film, wherein the upper heating element comprises a heating portion for generating a heat source, a heat conducting portion disposed between the bottom end of the heating portion and the elastic pressing film, and a setting The heat insulating portion at the top end of the heating portion.

The elastic film is made of silicone or rubber.

The pressing method according to the present invention is suitable for pressing a film onto a surface of a substrate placed on a carrier, the method comprising the steps of: (A) adjusting the height of the film downward to make the film adjacent to the surface of the substrate; (B) pressing a pressing plate on the carrier, blowing an elastic film against the pressing plate downward, and pressing the film with elastic film Laying it against the surface of the substrate; (C) inhaling the elastic film upward, separating the elastic film from the film, and moving away from the platen to separate from the carrier; and (D) cutting the film The surface portion of the substrate is formed to form a film sheet having a size equivalent to that of the substrate.

According to the above technical means, the advantages and effects of the photoresist strip press of the present invention are that, by the elastic lamination design of the press-disc, the first gas flow path will be elastically pressed when the press-disc is in the pressing position. When the film is blown downward, the elastic film presses down and presses the combination of the first protective layer and the photoresist layer of the film, so that the photoresist layer is pressed onto the surface of the substrate, so that the photoresist layer can be filled. The surface of the substrate, whereby the gap between the photoresist layer and the surface of the substrate can be reduced to improve the yield of the press. Furthermore, by first pressing the combination of the first protective layer and the photoresist layer of the film on the surface of the substrate, the combination of the first protective layer and the photoresist layer is cut to the size of the substrate. The way of the film sheet can increase the rate of the film pressing process to shorten the pressing time.

The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. The technical means and functions of the present invention for achieving the intended purpose can be more deeply and specifically understood by the description of the specific embodiments. However, the drawings are only for the purpose of reference and description, and are not intended to limit the invention. .

Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals.

As shown in FIG. 1 , FIG. 2 and FIG. 3 , a preferred embodiment of the press machine of the present invention is mainly used for pressing a film 1 onto a substrate 2 in the present embodiment. In the example, the film 1 is exemplified by a photoresist strip, and the substrate 2 is exemplified by a wafer. Of course, the film 1 can also be a protective film or other forms of film. 1 is a partial cross-sectional view of a film 1 including a photoresist layer 11, a first protective layer 12 attached to the top surface of the photoresist layer 11, and a second protective layer attached to the bottom surface of the photoresist layer 11. The material of the first protective layer 12 may be polyethylene terephthalate (PET), and the material of the second protective layer 13 may be polyethylene (PE), which is transmitted through the first protective layer 12 and the second protective layer. The arrangement of 13 can provide protection to the photoresist layer 11. 2 is a partial cross-sectional view of the substrate 2. Since the substrate 2 is provided with a plurality of protrusions 21 having different heights, the protrusions 21 may be grains or patterns, such that a surface 22 of the substrate 2 is In a state in which the unevenness is present, the press machine 300 of the present embodiment is to peel the second protective layer 13 of the film 1 away from the bottom surface of the photoresist layer 11, and then press the photoresist layer 11 of the film 1 against the substrate 2. Surface 22.

As shown in FIGS. 1 and 3, the press machine 300 includes a feeding device 3, a recovery member 4, a height adjusting device 5, a cutting member 6, and a pressing device 70. The feeding device 3 includes a supply roller 31, a recovery roller 32, and a tearing roller 33. The supply roller 31 is wound with a film 1 which is rotatably driven to output the film 1 along the arrow A1. . The tear-off roller 33 is disposed on the rear side of the supply roller 31, and can peel off the second protective layer 13 of the film 1 output from the supply roller 31, so that the film 1 forms a combination of the first protective layer and the photoresist layer. 14, and the second protective layer 13 which is torn off, through the rotation of the recovery roller 32, the second protective layer 13 which is torn off can be transported to the recovery roller 32 in the direction of the arrow A2 to The protective layer 13 is wound together. In addition, the assembly 14 of the first protective layer and the photoresist layer can be driven in the direction of the arrow A3 by the rotation of the supply roller 31 and the recovery member 4. In the embodiment, the recovery member 4 is a roller. The combination of the first protective layer and the photoresist layer 14 can be wound together by the rotation of the recycling member 4.

As shown in FIG. 3 and FIG. 4, the pressing device 70 includes a carrier 7 and a pressing plate 8. The carrier 7 is disposed between the tearing roller 33 and the recovery member 4 and is spaced apart from the first protection of the film 1. Below the assembly 14 of layers and photoresist layers, the press-disc discs 8 are spaced above the first protective layer of the film 1 and the combination of photoresist layers 14 and correspond to positions above the carrier 7. The carrier 7 includes a fixing body 71 and a pushing member 72 disposed in the fixing body 71. The fixing body 71 includes a body 710, and is disposed in the seat body 710 for the substrate 2 (eg 2) a heated lower heating element 716 comprising a heating portion 717 for generating a heat source, a heat conducting portion 718 disposed at the top end of the heating portion 717 and in contact with the substrate 2, and a heating portion 718 disposed at the heating portion The heat insulating portion 719 at the bottom end of the 717, a top surface 711 of the heat conducting portion 718 of the fixing base 71 can be placed on the substrate 2, and the heat conducting portion 718 can conduct the heat source generated by the heating portion 717 to the substrate 2, thereby being The substrate 2 is uniformly heated. In addition, the heat insulating portion 719 is configured to block the heat source generated by the heating portion 717 from being diverged downward, so that most of the heat source of the heating portion 717 can effectively pass through the heat conducting portion 718. The conduction of the substrate 2 is heated, whereby the loss of the heat source can be avoided.

The seat body 710 of the fixing base 71 and the lower heating element 716 together form a mounting groove 712 for mounting the pushing member 72. An opening 713 of the mounting groove 712 is formed on the top surface 711 and is permeable to the pushing member 72. . The bottom end of the pushing member 72 is connected to a driving mechanism (not shown), and the pushing member 72 can be driven by the driving mechanism to protrude from the top surface 711 of the fixing base 71 to carry the bearing position of the substrate 2 ( As shown in FIG. 7 and a reciprocating motion between the folded position of the substrate 2 attached to the top surface 711 (shown in FIG. 8). When the transfer mechanism (not shown) translates the substrate 2 to a distance above the spacer carrier 7, the pushing member 72 can be moved up to the carrying position to carry the substrate 2, whereby the pushing member 72 can be shortened The distance between the substrates 2 prevents the transfer mechanism from being damaged by the falling of the substrate 2 during the placement of the substrate 2 on the top surface 711 of the carrier 7. Preferably, the pushing member 72 includes an air suction hole 721. The air suction hole 721 includes a longitudinally extending hole portion 722 (shown in FIG. 7), and a plurality of holes are formed at the top end and communicate with the hole portion 722. The groove portion 723 has a circular ring shape and can adsorb the substrate 2, thereby avoiding the base when the pushing member 72 drives the substrate 2 to move between the carrying position and the folding position. The material 2 is shaken.

As shown in FIG. 3 and FIG. 5, the pressing plate 8 comprises a body 81, an elastic pressing film 82 and a pressing ring 83. The elastic pressing film 82 is made of silicone rubber or rubber material, and the outer periphery of the elastic pressing film 82 is transparent. The press ring 83 is press-fitted to the bottom surface of the seat body 81 so that the elastic press film 82 can be engaged between the seat body 81 and the pressure ring 83. The pressing plate 8 further includes an upper heating element 84 disposed in the base 81. The upper heating element 84 includes a heating portion 841 for generating a heat source. The heat conducting portion 842 disposed between the bottom end of the heating portion 841 and the elastic pressing film 82, and the heat insulating portion 843 disposed at the top end of the heating portion 841, the heat conducting portion 842 is in contact with the inner surface of the elastic pressing film 82 and the heating portion 841 can be The generated heat source is conducted to the elastic pressing film 82, whereby the elastic pressing film 82 can be uniformly heated. In addition, the heat insulating portion 843 is configured to block the heat source generated by the heating portion 841 from being diverged upward, so that most of the heat source of the heating portion 841 can effectively pass through the conduction of the heat conducting portion 842 to heat the elastic pressing film 82, thereby Can avoid the loss of heat source.

The pressure plate 8 further includes a first gas flow path 85 formed between the seat body 81 and the upper heating element 84. One end of the first gas flow path 85 is connected to a gas supply device (not shown), and the other One end is closed by the elastic pressing film 82, and the first gas flow path 85 can inhale or blow the elastic pressing film 82 by the control of the gas supply device, whereby the elastic pressing film 82 can be attached to the upper heating element. The heat conducting portion 842 of the 84 is separated from the heat conducting portion 842 and protrudes from the bottom surface of the pressing ring 83. In addition, the pressing plate 8 can be driven by the driving mechanism at an initial position (shown in FIG. 3) spaced above the carrier 7, and a pressing position pressed against the carrier 7 (as shown in FIG. 10). During the reciprocating motion, when the pressing plate 8 is in the pressing position, the elastic pressing film 82 is blown through the first gas flow path 85 so that the elastic pressing film 82 can press the combination of the first protective layer and the photoresist layer of the film 1. The body 14 is attached to the surface 22 of the substrate 2 (as shown in Figure 2).

The height adjusting device 5 includes movable rollers 51, 52 spaced apart from each other and adjacent to the tearing roller 33, and a fixed roller 53 adjacent to the recovery member 4, and two movable rollers 51, 52 and a fixed roller 53 for the film 1 The first protective layer and the combination of the photoresist layers 14 are wound, and the two movable rollers 51 and 52 can be phased. The fixed roller 53 is horizontally moved to drive the assembly 14 of the first protective layer and the photoresist layer of the film 1 at a first height position (as shown in FIG. 3), and a height lower than the first height position. Move between the two height positions (as shown in Figure 9). When in the first height position, the combination 14 of the first protective layer and the photoresist layer is spaced above the carrier 7, whereby the combination of the first protective layer and the photoresist layer 14 and the carrier 7 There is a space for the transfer mechanism to extend to perform the placement of the substrate 2. When in the second height position, the first protective layer and the combination of photoresist layers 14 are adjacent to the carrier 7 and adjacent to the surface 22 of the substrate 2.

In this embodiment, the two movable rollers 51, 52 and the fixed roller 53 are at the same horizontal position, and the first protective layer and the photoresist layer assembly 14 of the film 1 are wound around the top of the fixed roller 53 and one of the movable rollers 51. The top end enables the combination 14 of the first protective layer and the photoresist layer to be supported at the first height position. Since the first protective layer and the combination of the photoresist layers 14 pass between the two movable rollers 51, 52 and are wound around the bottom end of the other movable roller 52, and the bottom end of the movable roller 52 is adjacent to the fixed seat of the carrier 7. The top surface 711 of the 71, whereby the first protective layer and the photoresist layer assembly 14 are pressed down to be adjusted to the second position by moving the two movable rollers 51, 52 horizontally and approaching the fixed roller 53. Height position.

The following is a detailed description of the pressing method of the press machine 300: as shown in FIG. 3, FIG. 6 and FIG. 7, FIG. 6 is a flow chart of the pressing method of the film 1, and the main flow of FIG. 6 is as follows: The substrate 2 is carried through the carrier 7.

When the press machine 300 is used, the press plate 8 is placed at a space The initial position above the seat 7 (as shown in FIG. 7), and the two movable rollers 51, 52 are in a first position adjacent to the tear-off roller 33. At this time, the movable roller 51 and the fixed roller 53 can be first. The combination of the protective layer and the photoresist layer 14 is supported at the first height position, whereby a space between the assembly 14 of the first protective layer and the photoresist layer and the fixed seat 71 is movable for the pusher 72, and The transfer mechanism can be inserted to perform the placement of the substrate 2. In addition, the first gas passage 85 is sucked up and evacuated, so that the elastic laminate 82 can be held at a position on the heat conducting portion 842 of the upper heating member 84, thereby allowing the heat conducting portion 842 to heat. The heat source generated by the portion 841 is transmitted to the elastic pressing film 82 to heat the elastic pressing film 82.

After the driving mechanism drives the pushing member 72 to move upward from the folding position shown in FIG. 3 in the direction of the arrow I to the carrying position, the transfer mechanism can extend into the assembly 14 and the fixing seat of the first protective layer and the photoresist layer. Between the bodies 71, the substrate 2 is transferred to the pushing member 72 for carrying by the pushing member 72. The air suction hole 721 of the pushing member 72 is sucked downward so that the base material 2 can be attracted to the top surface of the pushing member 72 by the groove portion 723. Next, as shown in FIG. 8, the driving mechanism drives the pushing member 72 to move downward from the carrying position in the direction of the arrow II. Since the substrate 2 is adsorbed by the groove portion 723 of the air suction hole 721, during the downward movement, It is possible to avoid the situation in which the substrate 2 is shaken. When the pusher 72 is moved down to the collapsed position, the substrate 2 will be applied to the top surface 711 of the heating element 716 below the fixed seat 71. The fixed seat body 71 further includes a second gas flow path 715 formed on the seat body 710 and the lower heating element 716. The second gas flow path 715 includes a hole portion 720 connected to the gas supply device, and a plurality of holes 720 are formed on the gas supply device. a groove portion 724 of the top surface 711 and communicating with the hole portion 720, each groove portion 724 is round The ring is used for inhaling the substrate 2, so that the substrate 2 can be flatly attached to the top surface 711 of the fixing body 71, so as to prevent the substrate 2 from being lifted up only through the suction hole 721. The situation.

As shown in FIGS. 6 and 9, as in step 92, the height of the film 1 is adjusted downward so that the film 1 is adjacent to the surface 22 of the substrate 2.

The drive supply roller 31, the recovery roller 32, and the recovery member 4 are rotated, so that the first protective layer of the film 1 and the combination of the photoresist layers 14 can be transported to the recovery member 4 in the direction of the arrow A3. Then, the two movable rollers 51, 52 are driven to move horizontally in the direction of the arrow A3 by the first position, and the movable roller 52 gradually presses the first protective layer and the combination of the photoresist layers 14 during the moving process. When the rollers 51, 52 are moved to a second position adjacent to the fixed roller 53, as shown in FIG. 9, the movable roller 52 and the tear-off roller 33 jointly support the combination of the first protective layer and the photoresist layer 14 The second height position is such that the first protective layer and the photoresist layer assembly 14 can be adjacent to the surface 22 of the substrate 2 and at a distance from the surface 22, so that the first protective layer and the photoresist layer are pressed by the bonding pad 8. The assembly 14 is flatly pressed against the surface 22 of the substrate 2 to prevent wrinkles in the assembly 14 of the first protective layer and the photoresist layer during the pressing process.

As shown in FIG. 6 and FIG. 10, in step 93, the pressure-bonding disc 8 is pressed onto the carrier 7, and the elastic pressing film 82 of the pressing disc 8 is blown downward, and the elastic pressing film 82 presses the film 1 to stick it. Covering the surface 22 of the substrate 2.

The supply roller 31, the recovery roller 32 and the recovery element 4 are driven to stop rotating, and the first protective layer and the photoresist layer assembly 14 are kept in a stationary state. Then, the driving mechanism drives the pressure plate 8 in the direction of the arrow II. Move down, when pressed When the pressure ring 83 of the lap 8 presses the first protective layer of the film 1 and the combination 14 of the photoresist layer against the airtight ring 714 of the top surface 711 of the carrier 7, the pressure plate 8 and the carrier A chamber 9 formed between 7 is in an airtight state, wherein the airtight ring 714 is made of an elastic material such as rubber or silicone. In the airtight state, the heating portion 841 of the upper heating element 84 generates a heat source, so that the heat conducting portion 842 can heat the elastic pressing film 82, and the heating portion 717 of the lower heating element 716 also generates a heat source, so that the heat conducting portion 718 can The substrate 2 is heated.

Next, as shown in FIG. 11 and FIG. 12, the fixing base 71 further includes a third gas flow path 725 formed on the seat body 710, and the third gas flow path 725 includes a hole portion 726 connected to the gas supply device. And a groove portion 727 formed between the outer periphery of the lower heating element 716 and the seat body 710, each groove portion 727 being annularly shaped to inhale the chamber 9 downwardly, and at the same time, pressing the disk 8 The first gas flow path 85 blows the elastic pressure film 82 downward to release the vacuum state, whereby the elastic pressure film 82 presses down and presses the first protective layer of the film 1 and the combination of the photoresist layers 14 The photoresist layer 11 is applied to the surface 22 of the substrate 2. The first protective layer and the combination of the photoresist layers 14 of the film 1 are pressed against the carrier 7 by the pressing pad 8, so that the photoresist layer 11 is simultaneously attached to the top surface 711 of the fixing body 71 of the carrier 7. . Since the elastic pressing film 82 is elastic and plastically deformable, when the elastic pressing film 82 is adsorbed by the gas of the first gas flow path 85 and the groove portion 727 of the third gas flow path 725, the elastic pressing film 82 can The photoresist layer 11 is extruded into the concave portion 221 of the surface 22 of the substrate 2, so that the photoresist layer 11 can fill the uneven surface 22 of the substrate 2, whereby the photoresist layer 11 and the substrate 2 can be reduced. A gap between the surfaces 22.

As shown in FIG. 6, FIG. 13, and FIG. 14, as in step 94, the elastic pressing film 82 is sucked upward, the elastic pressing film 82 is separated from the film 1, and the pressing plate 8 is separated from the bearing block 7 to be separated from the carrier 7. .

The suction is stopped through the groove portion 727 of the third gas flow path 725, and the first gas flow path 85 is sucked upward, so that the elastic pressure film 82 can be adsorbed upward and combined with the first protective layer and the photoresist layer 14 The first protective layer 12 is separated, whereby the elastic laminate 82 can be returned to a position that is attached to the heat conducting portion 842 of the upper heating element 84. As shown in FIG. 15, the pressing mechanism 8 is moved upward in the direction of the arrow I by the driving mechanism, so that the pressing plate 8 is returned to the initial position where the spacing is above the carrier 7.

As shown in FIGS. 6, 16, and 17, in step 95, the dicing film 1 is attached to the surface 22 portion of the substrate 2 to form a film sheet 15 having a size equivalent to that of the substrate 2.

In this embodiment, the cutting element 6 is exemplified by all the knives, and the cutting member 6 is driven to move to the assembly 14 of the first protective layer and the photoresist layer by a transfer mechanism (not shown), and then driven. The combination of the cutting element 6 in the direction of the arrow III and cutting the first protective layer and the photoresist layer 14 is applied to the surface 22 portion of the substrate 2 to form a film sheet 15 having a size equivalent to that of the substrate 2. It should be noted that, in application, the cutting element 6 can also perform the cutting action of the combination of the first protective layer and the photoresist layer by laser, and is not limited to the form of the cutter.

As shown in FIGS. 6 and 18, as in step 96, the carrier 7 is cooled, and the height of the film 1 is adjusted upward to peel the film 1 from the carrier 7.

Since the elastic pressing film 82 presses the combination of the first protective layer and the photoresist layer 14 During the surface 22 of the substrate 2, it is heated by the upper and lower heating elements 84, 716 such that the photoresist layer 11 adheres to the surface 22 of the substrate 2 and the top surface 711 of the holder 71 of the carrier 7. Therefore, in order to facilitate the peeling of the photoresist layer 11 from the top surface 711 of the fixing body 71, the carrier 7 further includes a cooling element 73 disposed on the fixing body 71 for cooling the fixing body 71, which is cooled by the cooling element 73. The seat body 71 is fixed such that the temperature of the photoresist layer 11 adhered to the top surface 711 of the fixed seat body 71 can be lowered. Then, during the resetting of the second movable rollers 51, 52 by the second position in the direction of the arrow IV toward the first position, the two movable rollers 51, 52 are rotated and the combination of the first protective layer and the photoresist layer can be easily combined. The top surface 711 of the fixing base 71 is peeled off and simultaneously separated from the film sheet 15 attached to the surface 22 of the substrate 2. When the two movable rollers 51, 52 are reset to the first position, the first protective layer and the photoresist are The assembly 14 of the layer completely peels off the top surface 711 of the fixed seat 71 and is separated from the film sheet 15.

As shown in FIGS. 6 and 19, in step 97, the substrate 2 and the film sheet 15 attached to the surface 22 of the substrate 2 are lifted off the carrier 7.

The suction is stopped by the groove portion 724 of the second gas flow path 715, so that the substrate 2 is not adsorbed on the top surface 711, whereby when the driving mechanism drives the pushing member 72 to move upward in the direction of the arrow I, the base The material 2 can be easily pushed up by the pusher 72. After the pushing member 72 is moved up to the carrying position, the transfer mechanism can extend between the first protective layer and the combination of the photoresist layer 14 and the fixing body 71 to move the substrate 2 away from the pushing member 72. At the time, the press cooperation of the film 1 is completed. Thereafter, the press bonding of the film 1 and the next substrate 2 can be carried out by repeating steps 91 to 97.

In summary, the press machine 300 of the present embodiment is designed by the elastic pressing film 82 of the pressing plate 8. When the pressing plate 8 is in the pressing position, the first gas flow path 85 faces the elastic pressing film 82 downward. When the air is blown, the elastic pressing film 82 presses down and presses the first protective layer of the film 1 and the combination 14 of the photoresist layer, so that the photoresist layer 11 is pressed into the concave portion 221 of the surface 22 of the substrate 2, The photoresist layer 11 is allowed to fill the surface 22 of the substrate 2, whereby the gap between the photoresist layer 11 and the surface 22 of the substrate 2 can be reduced to improve the yield of the press. Furthermore, after the first protective layer 14 and the photoresist layer 14 are bonded to the surface 22 of the substrate 2, the first protective layer and the photoresist layer 14 are cut out. The manner of the film sheet 15 having the same size of the substrate 2 can increase the rate of the pressing process of the film 1 to shorten the working time of the pressing, so that the object of the present invention can be achieved.

The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

1‧‧‧film

11‧‧‧Photoresist layer

12‧‧‧First protective layer

13‧‧‧Second protective layer

14‧‧‧Combination of first protective layer and photoresist layer

15‧‧‧film sheet

2‧‧‧Substrate

21‧‧‧ convex

22‧‧‧ Surface

221‧‧‧ recess

300‧‧‧Compression machine

3‧‧‧Feeding device

31‧‧‧Supply roller

32‧‧‧Recycling roller

33‧‧‧Tear off the roller

4‧‧‧Recycling components

5‧‧‧ Height adjustment device

51, 52‧‧‧ activity scroll wheel

53‧‧‧Fixed roller

6‧‧‧ cutting elements

70‧‧‧ Pressing device

7‧‧‧Hosting

71‧‧‧ fixed seat

710‧‧‧

711‧‧‧ top surface

712‧‧‧Installation slot

713‧‧‧ openings

714‧‧‧ airtight ring

715‧‧‧Second gas flow path

716‧‧‧ Lower heating element

717‧‧‧ heating department

718‧‧‧Transfer Department

719‧‧‧Insulation

720‧‧‧ Hole Department

72‧‧‧Pushing pieces

721‧‧‧ suction holes

722‧‧‧ Hole Department

723‧‧‧ Groove

724‧‧‧ Groove Department

725‧‧‧ third gas flow path

726‧‧‧ Hole Department

727‧‧‧ Groove Department

73‧‧‧ Cooling element

8‧‧‧Compression plate

81‧‧‧ body

82‧‧‧Elastic film

83‧‧‧ Pressure ring

84‧‧‧Upper heating element

841‧‧‧ heating department

842‧‧‧Transfer Department

843‧‧‧Insulation Department

85‧‧‧First gas flow path

9‧‧‧ chamber

A1, A2‧‧‧ arrows

A3‧‧‧ arrow

I, II‧‧‧ arrows

III, IV‧‧‧ arrows

1 is a partial cross-sectional view of a film of a preferred embodiment of the press machine of the present invention; FIG. 2 is a partial cross-sectional view of a substrate of a preferred embodiment of the press machine of the present invention; and FIG. 3 is a view of the press machine of the present invention. A schematic view of a preferred embodiment shows that the pusher is in the folded position, the press position is at the initial position, and the first protective layer and the photoresist layer of the film are at the first height position; Figure 4 is a plan view of a carrier of a preferred embodiment of the press machine of the present invention; Figure 5 is a bottom plan view of a press plate of a preferred embodiment of the press of the present invention; Figure 6 is a press machine of the present invention; FIG. 7 is a schematic view of a preferred embodiment of the press machine of the present invention, illustrating the pusher position in the carrying position; FIG. 8 is a press machine of the present invention. A schematic view of a preferred embodiment illustrates the pusher member being moved down to the collapsed position; and FIG. 9 is a schematic view of a preferred embodiment of the press machine of the present invention, illustrating the first protective layer and the photoresist layer of the film. Figure 2 is a schematic view of a preferred embodiment of the press machine of the present invention, illustrating the lowering of the press-fit disc to the press-fit position; Figure 11 is a schematic view of a preferred embodiment of the press machine of the present invention, illustrating The first gas flow channel blows the elastic pressing film downward, and the elastic pressing film presses the first protective layer and the photoresist layer of the film downward to adhere to the surface of the substrate; FIG. 12 is a press machine of the present invention. A partial cross-sectional view of a preferred embodiment illustrating the elastic laminate pressing the photoresist layer into the recess of the substrate surface Figure 13 is a schematic view of a preferred embodiment of the press machine of the present invention, illustrating a first gas flow path for inhaling the elastic film upward; Figure 14 is a partial cross-sectional view of a preferred embodiment of the press machine of the present invention, The photoresist layer is filled in the concave portion of the surface of the substrate; FIG. 15 is a schematic view of a preferred embodiment of the press machine of the present invention, illustrating The pressing plate is reset to the initial position; FIG. 16 is a schematic view of a preferred embodiment of the press machine of the present invention, illustrating the first protective layer and the photoresist layer of the cutting element for cutting the film; FIG. 17 is a press machine of the present invention. A schematic view of a preferred embodiment illustrating a first protective layer and a photoresist layer formed by cutting a film sheet; FIG. 18 is a schematic view of a preferred embodiment of the press machine of the present invention, illustrating a first protective layer and light of the film The resist layer is reset to the first height position; and FIG. 19 is a schematic view of a preferred embodiment of the press machine of the present invention, illustrating that the pusher pushes the substrate and the film sheet to the carrying position.

1‧‧‧film

13‧‧‧Second protective layer

14‧‧‧Combination of first protective layer and photoresist layer

300‧‧‧Compression machine

3‧‧‧Feeding device

31‧‧‧Supply roller

32‧‧‧Recycling roller

33‧‧‧Tear off the roller

4‧‧‧Recycling components

5‧‧‧ Height adjustment device

51, 52‧‧‧ activity scroll wheel

53‧‧‧Fixed roller

6‧‧‧ cutting elements

70‧‧‧ Pressing device

7‧‧‧Hosting

71‧‧‧ fixed seat

710‧‧‧

711‧‧‧ top surface

712‧‧‧Installation slot

713‧‧‧ openings

714‧‧‧ airtight ring

715‧‧‧Second gas flow path

716‧‧‧ Lower heating element

717‧‧‧ heating department

718‧‧‧Transfer Department

719‧‧‧Insulation

720‧‧‧ Hole Department

72‧‧‧Pushing pieces

721‧‧‧ suction holes

723‧‧‧ Groove

724‧‧‧ Groove Department

725‧‧‧ third gas flow path

726‧‧‧ Hole Department

727‧‧‧ Groove Department

73‧‧‧ Cooling element

8‧‧‧Compression plate

81‧‧‧ body

82‧‧‧Elastic film

83‧‧‧ Pressure ring

84‧‧‧Upper heating element

841‧‧‧ heating department

842‧‧‧Transfer Department

843‧‧‧Insulation Department

85‧‧‧First gas flow path

A1, A2‧‧‧ arrows

A3‧‧‧ arrow

Claims (10)

A press machine comprising: a feeding device for providing a film; a recycling member connected to one end of the film and recovering the film; and a height adjusting device disposed between the feeding device and the recycling member, The height adjustment device includes two movable rollers that are spaced apart and wound by the film, and the two movable rollers can drive the film to move between a first height position and a second height position lower than the first height position; a pressing device comprising: a carrier located below the film and disposed for a substrate, the film being adjacent to the surface of the substrate when the film is at the second height position; a pressure plate located at the Above the film, comprising an elastic pressing film disposed at the bottom end, and a first gas flow path for inhaling or blowing the elastic pressing film, the pressing plate being located at an interval above the bearing seat and the film An initial position, and a reciprocating motion between the pressing position of the carrier and the elastic pressing film pressing the film to adhere to the surface of the substrate; and a cutting element disposed on the side of the pressing device , the The cutting element can cut a portion of the film attached to the surface of the substrate to form a film sheet having a size corresponding to the substrate; the carrier includes a fixing body for the substrate, and a a cooling element on the fixing base for cooling the fixing base body, The pressure plate further comprises an upper heating element capable of heating the elastic pressing film, the upper heating element comprising a heating portion for generating a heat source, a heat conducting portion disposed between the bottom end of the heating portion and the elastic pressing film And a heat insulating portion provided at a top end of the heating portion. The press machine of claim 1, wherein the height adjusting device further comprises a fixed roller for winding the film, the two movable rollers are at the same level position as the fixed roller, and the two movable rollers The movable roller is movable relative to the fixed roller to move the film between the first and second height positions. The press machine of claim 2, wherein the film is wound around the fixed roller and one of the movable roller tips, and the film is wound around the bottom end of the other movable roller. The press machine of claim 3, wherein the carrier includes a pushing member disposed in the fixing body, and the pushing member can protrude from the fixing body to carry the base. The carrying position of the material and a reciprocating motion between the folded position of the substrate and the fixed seat. The press machine of claim 4, wherein the fixed seat body comprises a top surface, and a second gas flow path formed on the top surface, the second gas flow path can be the substrate Inhale. The press machine of claim 5, wherein the fixing base further comprises a third gas flow path formed on the top surface, the third when the pressing plate is in the pressing position The gas flow path can inhale a chamber formed between the pressure plate and the carrier. a press machine according to claim 5, wherein the fixing The base body further includes a mounting groove for mounting the pushing member, an opening of the mounting groove is formed on the top surface, and the pushing member comprises a suction hole for adsorbing the substrate. The press machine of claim 7, wherein the fixing base further comprises a lower heating element capable of heating the substrate, the lower heating element comprising a heating portion for generating a heat source, and a setting a heat conducting portion at the top end of the heating portion and in contact with the substrate, and a heat insulating portion disposed at a bottom end of the heating portion. The press machine according to claim 1, wherein the elastic film is made of silicone or rubber. The press machine of claim 1, wherein the carrier comprises a fixing base for the substrate, and a pushing member disposed in the fixing body, the pushing member is A protruding protrusion protrudes from the fixing body to carry the bearing position of the substrate, and a reciprocating motion between the folding position of the substrate and the fixing body.