TWI335635B - Repair apparatus for substrate circuit of flat display panel - Google Patents

Description

1335635 IX. Description of the Invention: [Technical Field] The present invention relates to a repairing apparatus for a flat panel display panel, and more particularly to a repairing apparatus for a substrate circuit for a flat panel display panel, which is capable of repairing a substrate circuit and Also check if the circuit is broken/short circuit. [Prior Art]

Flat panel displays are classified into cathode ray tubes (CRTs), liquid crystal displays (LCDs, etc.) because they consume less power and are lighter in weight, so LCDs are particularly advantageous and attract more attention. A flat panel display panel (e.g., an LCD) is constructed using an array of substrates, a substrate, and a liquid crystal layer. The array substrate includes a plurality of pixel electrodes disposed in a matrix form, a plurality of scan lines disposed along a plurality of pixel electrodes arranged in columns, and a plurality of signal lines disposed along a plurality of pixel electrodes in a row.

However, the array substrate may be defective during manufacture. For example, the electrical signal lines overlap (ie, short). When an array of substrates has such a defect, the image cannot be properly produced. Therefore, the overlapping signal lines should be cut off to prevent overlap in the signal lines. This process is called "repair." Figure 1 shows a conventional repair device 1 for a flat panel display panel comprising: a platform for supporting a substrate to be repaired; a laser microscope 3' placed on the platform for obtaining a picture of the substrate and a defect area for repairing the substrate using a laser beam; a light source 5 for supplying light to the laser microscope 3; and a moving member (not shown) for use in the substrate Shaft and 5 1335635 move the platform in the Y-axis direction. The following describes a method for repairing a base village by using a feather t ^ ^ I repair device 1

law. The substrate is placed on the platform by a transfer robotic arm (not shown). When receiving the defective area information input by the external inspection device, the moving member (not shown) moves the platform based on the input information so that the defective area can be placed under the laser microscope 3. Here, while the position of the stage is being adjusted, when the light source 5 transmits light onto the defective area, the defective area is monitored by a laser microscope 3 monitor. When the position of the platform is determined on the substrate, a portion of the defective region is removed by a laser beam radiated from the laser microscope 3 to repair the substrate. After completing the repair process, the transfer robot arm transfers the substrate away from the platform. Thereafter, an inspection process is performed to verify whether the circuit of one of the substrates is open/short. However, conventional repair devices have the following disadvantages: When one of the calibration devices of the inspection device is not matched with the repair device, the repair device may not be able to read the defect information of the substrate from the inspection device, thereby transferring the defective substrate to the next platform. .

Since a substrate repair process and an inspection process for detecting the open/short circuit of the substrate circuit are performed individually, the process time is lengthened and X is reduced in productivity. SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a repairing apparatus for a substrate circuit of a flat display panel, which can simultaneously perform a defect detecting process, a repair process, And one inspection 6 1335635

The inspection probe is used to inspect the gate or the needle to simultaneously test the better horizontal and vertical lines, the moving member, which uses a probe unit; and the upward movement of the multi-exploration system. Process 'The device includes a repair unit' which includes a laser and an inspection unit, thereby reducing processing time and reducing equipment size. According to one aspect of the present invention, the above and other repairing devices for a flat panel display panel include: a repairing station; a platform on which an X-axis moving member is attached, which is attached to the repairing station The X-axis side #2 Y-axis moving members, each connected to each X-axis moving structure are not spaced apart from each other in the Y-axis direction; and one of the repairing single-two Y-axis moving members, the repairing unit is to be inspected An optical unit of a defect area of the substrate, a laser for use, and a test unit for inspecting the repaired substrate circuit. The first inspection unit comprises: a non-friction substrate; a single data pad: and - a multi-probe unit electrode assembly; and - a probe moving bird moving the multi-probe unit and a single probe movement of the invention The component is colored to move the multi-probe horizontal moving member in a vertical direction, the needle unit and the single probe unit, the repairing device further includes a first learning unit, _, reducing a defect rate, and the purpose can be raised by The device package inspects the substrate; - the upper surface of each other g. # one of the upper surface, the element is mounted on the first camera unit for detecting the open/short circuit of the defective area, Its needle unit 'which is used' has a complex probe member for a mobile unit. The ‘one probe vertically shifting probe unit and the single unit are used for horizontally 检验 inspection unit, which is mounted at another Y-axis moving member to which the repair unit is not mounted. [Embodiment] A preferred embodiment of the present invention will now be described in detail with reference to the accompanying drawings. Fig. 2 shows a repair apparatus for a flat panel display panel according to the present invention. As shown in Fig. 2, the 'repairing package includes: a repairing station 6〇〇; _ platform 700' is placed on the repairing station _ 600, and a substrate to be repaired is placed thereon; A repair unit comprising an optical unit 3 for detecting a defective area that may be formed on a substrate, and a mine for repairing a defective area thereon by emitting a laser beam onto the substrate Shooting 2〇〇, and a first inspection unit 1〇〇 for checking whether the repaired substrate circuit is open/short; a shaft moving member 400' is used to move the repair unit in the X-axis direction; A gamma-axis moving member 500 for moving the repairing unit in the γ-axis direction.

The repair station 600 is preferably configured to include a vibration control member (not shown) that is used to remove externally or internally generated vibrations. The cymbal moving member 400 is mounted on the upper surface of the 600 restoring table in the direction of the yaw axis. The method of configuring the shaft moving member 400 is such that the cymbal support members 41 are mounted spaced apart from each other in the X-axis direction of the repairing table 600; and the _ χ shaft holder 42 〇 is mounted on one of the X-axis supporting members 410 On the upper surface, the γ-axis support slides in the direction of the parent axis, which will be explained later. At the same time, the cymbal moving member 500 is placed on the upper surface of the cymbal support member 41 in the vertical direction of the parent shaft support member 41 (i.e., in the direction of the yaw axis). Each of the γ-axis moving members 500 includes a γ-axis support member 51, the two ends of which are coupled to the X-axis rail 420 to slide along the X-axis rail 420; the γ-axis rail 52〇, which is formed in the Y-axis direction at Y One side of the shaft support member 510; and a Y-axis rail block 530' are mounted on the stern rail 520 for sliding along the stern rail 520, and the repair unit is mounted thereon. The platform 700 for supporting the substrate is placed on one of the inner side surfaces of the repair table 600, which covers both the X-axis moving member 400 and the y-axis moving member 500. The optical unit 300 is for detecting a defective area that may be formed on a substrate of a flat display panel. The optical unit 300 includes a light source 310, a lens 320, and a sensor (not shown). When the light source 31 is emitted onto the substrate, the light is reflected from the substrate. Light reflected from the substrate is transferred through the lens 320 to the sensor. The sensor then checks for the presence of a defect by reading the difference in the amount of reflected light. By using the optical unit 300 of the present invention, it can be determined whether any defects have been produced on the substrate without the need to directly rub the substrate. Therefore, the substrate can be protected from damage that may be caused by friction. Similarly, the defect rate can be significantly reduced by removing errors due to inconsistencies in the coordinate system between the inspection device and the repairing device. The laser 200 is used to remove the defect laser 2 on the substrate of the flat display panel, including a laser oscillator for generating a laser beam, and a condenser lens 22Q for collecting the laser beam. And - a laser head 230 for providing a laser beam path. The laser beam generated from the laser oscillator 21 切除 removes the overlapping signal lines to repair the defective substrate. The first verification unit 1A is used to check whether the circuit of one of the repaired substrates is open/short. The first inspection _ 弟 兀 兀 〇 〇 a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a The probe unit detects a plurality of electrodes 塾; and a probe moving member, moving the multi-probe unit and the component unit of the single-probe unit 100a to show the structure shown in FIGS. 3 and 4 will be described in detail below.

As shown in Fig. 2, the optical unit 300, the laser 200, and the first checklist = l〇〇a are assembled into a repair unit. The repair unit is configured to be mounted on the ¥ axle of the Y-axis support 510. Block 53 is placed on one side of the platform to move along the Y-axis rail 520. Here, the repairing apparatus of the present invention is preferably configured to include a second inspection unit 100b installed at a γ-axis moving member 500 to which one of the repairing units is not mounted.

'The system is configured to check both vertical and horizontal. The first test of the present invention. The first inspection unit 10a can be mounted at the Y-axis rail block 530 of the y-axis support member 510 to which the repair unit is not mounted, thus repairing the movement of the unit as described above. 'The system moves in the X-axis and γ-axis directions. Here, the structure of the second inspection sheet & 1〇〇b is similar to the first inspection unit 10a installed at the repair unit. In this case, the inspection of the substrate is as follows: the first inspection unit 1 〇〇a, the probe unit friction corresponds to the pixel electrode of the repaired portion; the second inspection unit is a single probe unit of the 1 00b friction The pad or the data pad; and the resistance value is measured by the two probes, thus checking the open/short circuit of the substrate circuit. Therefore, when a repairing apparatus using two checklists of $100 a and 100b is provided, the test substrate can be more efficiently performed. 3 is an exploded view showing the components of the inspection unit according to the present invention, and FIG. 4 is a perspective view showing the assembled state of the inspection unit of the present invention. 10 Checking whether the probe rubs the substrate. ;-Single/machine single 兀110, which is used to test the gate pad or data pad; a multi-probe ten 疋160' is used to test the multiple probes of several electrode pads. 1150' It has been used for simultaneous ' And the probe moving member 140 is configured to move the probe early element 150 and the single probe early 160 in the vertical and horizontal directions. 1 The camera unit 110 is used to check the grinding and dismantling between the probe and the substrate. The camera unit 110 of the invention includes: - a her frictional shape I. The camera 112' is positioned on the single-needle unit 160 and the multi-probe unit 15〇, and is used to check the friction state between the probe and the substrate; and a camera transfer configuration, 4 doors ', is used to move the camera U2 in the horizontal direction, so that the camera 112 can take the transfer needles earlier than 150 and 160. The camera transfer member preferably includes a camera transfer rail 116; and a phase connection block 1 1 4, one side of which is coupled to the camera camera H2 and the other side to the camera shift rail 116 for transfer along the camera The rail 116 slides. The probe moving member 14 is connected to the multi-probe unit 15〇 and the single probe unit 160 to move the probe unit in the horizontal direction and the 1 1 lt _ ^ vertical direction. 150 and 160. The probe moving member 14〇12〇) preferably includes a probe vertical moving member that moves in the vertical direction, and the probe water is moved 70° and 丨60, and a probe water ten moving member 130, In the leather umbrella 丄 ^ ', move the probe in the direction of the water. The probe of the present invention is a vertical driving device. * Moving member "Ο can be implemented as - ball screw The probe horizontal movement i* of the present invention, » The piece 130 can be configured to include a horizontal rail 132 and a horizontal rail block 134. Thus, #4 i makes the second invention The member 140 (which can move the probe vertically and horizontally) at the same time can accurately inspect the desired portion of the substrate. Data 塾 or closed:: The probe unit 160 is equipped with a single 'probe 162, the friction A single probe „ from the open/short circuit of the test substrate circuit. Preferably, the probe-connecting probe 160 may further include a single probe frame 164 that will be attached to the probe moving member 丨4 单. The :5 diagram shows the detailed construction of the multi-probe unit 150. The plural: ^ needle unit 15G is used to simultaneously measure the regular arrangement of 152 on the substrate; the overnight probe 150 includes: a plurality of probes, 151 'which is in the normal state to accommodate the plurality of probes 152 and when = not The probe 152 is caused to protrude from the spindle starter (1), which is positioned at the upper surface of the probe 151, for occasionally requiring the probe 152 to protrude from the center 155', for checking whether the probe rubs the substrate . On the other hand, the multi-probe unit 15 of the present invention preferably includes more than one

The probe frame 1 5 7 is connected to each other by F έΒ from ΛΚ , d U , and the cow is attached to the probe moving member “〇 to allow the multi-probe unit 15 to be explored horizontally and vertically. Needle up

Mobile D A method of repairing a substrate using the repairing apparatus of the present invention will be described hereinafter. First, when the substrate is placed on the platform, an optical unit starts to operate. The repair unit then moves to verify if any defects have occurred on the substrate. The Y-axis rail block on which the repair unit is mounted moves along the γ-axis rail, and the y-axis support member having the γ-axis rail moves along the X-axis rail, thereby enabling inspection of each portion of the substrate "= 12 1335635 Light is incident on the sensor through the lens. From the base-sealed anti-π sensor, the presence of defects is checked by the difference in the amount of the measurement. + Go to Bo. Taking reflected light Tianhe detected that any of the materials were transferred to the next platform. In the case of a defect, however, when any defect is detected, 叮 the mobile repair I_ shot is applied to the defective area for repair. Thereafter, 711 performs the repair by locating the lightning beam in addition to the overlapping signal lines. Radiation

After the repair process is completed, the first inspection unit has a repaired portion of the pixel electrode pad, and the second inspection unit unit rubs the element to rub a gate pad or a data pad. The probe is used to check whether the substrate circuit is open/short. here,. The resistance value is the camera to check if the probe is rubbing the substrate. You can use the sensor and • use the camera to adjust the camera position until it is in the desired part. The needle moving member can precisely move the probe unit. Exploring the demand part of the inspection. For the purpose of - if no defects have been extracted from the test, the substrate is transferred to a platform β as described above. 'The invention includes a repair unit having an optical unit, a laser, and a test unit, At the same time, a defect extraction test; a process, a repair process, and an inspection process are performed. Therefore, the manufacturing time of the product can be shortened, the equipment installation space and product defect rate are reduced, and productivity is increased.

Similarly, the present invention includes a moving member that allows the device to move in the X-axis and gamma-axis directions, thereby allowing the device to inspect the substrate at any portion thereof. 13 1335635 In addition, the present invention is configured to include a multi-probe unit and a single probe unit in an inspection unit to enable the circuit breaker/short circuit test of the substrate circuit to be quickly implemented so that a different circuit can be simultaneously implemented. Inspection and adjacent pixels. Inspection of electrode pads. Furthermore, the present invention is configured to include a moving member for moving the repairing unit; a probe moving member for moving the probe in a vertical and horizontal direction; and a camera, thus allowing Repair and inspection at the exact location required. Although the preferred embodiment of the present invention has been disclosed for the purpose of illustration, those skilled in the art will appreciate that various modifications, additions and substitutions can be made without departing from the scope and spirit of the invention disclosed in the appended claims. Both are feasible. BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features and other advantages of the present invention will become more <RTIgt; The figure shows a perspective view of a repairing device according to the invention; Fig. 3 shows an exploded perspective view of the testing unit according to the invention; Fig. 4 shows a perspective view of the testing unit according to the invention, and Fig. 5 An exploded perspective view of a multi-probe unit in accordance with the present invention is shown. [Main component symbol description] Conventional repair equipment 3 Laser microscope 14 1335635

5 Light source 10 Repair device 100 Inspection unit 100a First-one verification check: Unit 100b Second i-unit 110 Camera unit 112 Camera 114 Camera connection block 116 Camera transfer rail 120 Probe vertical moving member 130 Probe horizontal moving member 132 Horizontal Rail 134 Horizontal Rail Block 140 Probe Moving Member 150 Multi-Probe Unit 15 1 Probe Assembly 152 Complex Probe 153 Shaft Actuator 155 Sensor 157 Probe Frame 160 Single - Probe Unit 162 Single - Probe 164 Single A probe frame 200 Laser 210 Laser oscillator 220 Converger lens 230 Laser head 300 Optical unit 3 10 Light source 320 Lens 400 X-axis moving member 4 10 X-axis support 420 X-axis rail 500 Y-axis moving member 5 10 Y support 520 Y-axis rail 530 Y-axis rail block 600 Repair station 700 Platform 15

Claims (1)

1335635 X. Patent application scope _· 1. A repairing device for a flat panel display panel, which comprises: a repairing station; a platform on which a substrate to be inspected is placed; and two X-axis moving members, Is spaced apart from each other in the X-axis direction of the repair table, and the two γ-axis moving members are each connected to an upper surface of each of the X-push moving members and spaced apart from each other in the γ-axis direction; a repairing unit mounted at one of the two gamma axis moving members, the repairing unit comprising an optical unit for detecting a defective area of the substrate to be inspected; a laser For repairing the defective area; and a first inspection unit for inspecting the open/short circuit of the repaired substrate circuit. 2. The repairing apparatus of claim 1, further comprising a second inspection unit mounted on the other γ-axis moving member to which the repair unit is not mounted. 3. The repairing apparatus according to claim 1, wherein the X-axis moving member comprises: a plurality of X-axis supporting members spaced apart from each other in the X-axis direction of the repairing table; and an X-axis Rails are mounted at the upper surface of the X-drawing supports. The repairing device of claim 1, wherein the y-axis moving member comprises: a y-axis support member, the two ends of which are coupled to the X-axis rail to slide along the X-axis rail; a γ-axis rail formed on one side of the γ-axis branch member in the γ-axis direction; and A ram shaft block is mounted at the gamma rail to slide along the yoke rail and the repair unit is mounted at the gamma rail block. 5. The repairing device of claim 1, wherein the first test unit comprises: a camera unit for checking whether the plurality of probes rub the substrate, a single probe unit, For testing multiple gate pads or multiple data pads; and A multi-probe unit having a plurality of probes ??? to simultaneously test a plurality of electrode rafts, and a probe moving member for moving the multi-probe unit and the single moving unit in horizontal and vertical directions. 6. The repairing device of claim 5, wherein the camera unit comprises: a camera for inspecting one of the probes between the substrates, a grinding state of 17 1335635; a camera transfer member It is used to move the camera up at this level. 7. The prosthetic device of claim 5, wherein the probe moving member comprises: a probe vertical moving member for displacing the multi-probe unit and the single probe in the vertical direction Unit; and A probe horizontal moving member for moving the multi-probe unit and the single probe unit in the horizontal direction. 8. The prosthetic device of claim 5, wherein the multi-probe unit comprises a probe assembly for projecting or receiving the plurality of probes; and an axial actuator positioned at One of the probe components on the upper surface for projecting the probes; and A sensor for checking whether the plurality of probes have been in contact with the substrate. 18