201248139 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種可測試並量測一玻璃面板之一光 學檢測單元，以及具有該光學檢測單元之一陣列測試裝 置。 【先前技術】 就大眾所知，平面顯示器係一種輕薄型的影像顯示 器，它比傳統使用陰極射線管的顯示器更輕、更薄。平面 顯示器的種類繁多，目前已經被發展並使用的例如為液晶 顯示器、電漿顯示器、場發射顯示器、有機發光二極體顯 示器等。 其中，液晶顯示器具有複數液晶單元陣列設置，並依 據影像資料提供資料訊號至各液晶單元以控制各液晶單 元之光線穿透率進而顯示畫面。由於其薄型化、輕量化、 低耗電以及低操作電壓等優點，液晶顯示器已被廣泛的使 用。在液晶顯示面板的製造過程中，需要有一檢測程序來 檢驗一基板（以下皆稱為玻璃面板，其上設置有薄膜電晶 體及畫素電極）是否有缺陷存在，例如檢測設置於基板之 資料線或掃描線的電性連接是否良好、或是檢測晝素單元 之色彩的精確度。 一般係使用一陣列測試裝置來測試玻璃面板。陣列測 試裝置包含複數一測試單元、一載入單元以及一卸載單 元。測試單元係測試玻璃面板，載入單元係將玻璃面板載 201248139 入至測試單元，卸載單元係將玻^板從賴單元上卸載 下來。 此外，測試單70包含-光學檢剩單元，其係檢測玻璃 面板之外觀缺陷，例如玻璃面板上之一電路圖案之缺陷、 或表面缺陷。光學檢測單元包含一光學系統以及一攝像單 7G，光學系統包含複數透鏡，當坡璃面板經過光學系統 時’攝像單元對玻璃面板進行攝像。 較佳者係光學檢測單元之光學系統的放大倍率可改 變的範圍越大越好’如此玻璃面板可以在所需的解析度下 來檢測。特別地，光學系統可以在一較低的放大倍率以及 一較高的放大倍率將玻璃面板投影至攝像單元，好能夠在 玻璃面板上找到所要檢測之部分並將其放大。為此，就需 要使用一物鏡（object lens)更換方法，以更換面對玻璃面 板之物鏡、或是使用一鏡筒透鏡（tube lens )更換方法， 以更換位於物鏡與攝像單元之間之鏡筒透鏡。然而，上述 方法需要設置一驅動單元與物鏡或鏡筒透鏡連結，且驅動 單元之結構較複雜。此外，當驅動單元作動時，雜質 (foreign substance)會產生並污染光學系統或玻璃面板。 【發明内容】 有鑒於上述課題，本發明之一目的在於提供一種光學 檢測單元以及一種具有光學檢測單元之陣列測試裝置，以 簡化光學系統之放大倍率之一調整結構，並避免當調整光 學系統之放大倍率時產生雜質，進而避免光學系統或一玻 201248139 璃面板被雜質所污染。 為達上述目的，依據本發明之一種光學檢測單元包含 一物鏡、複數鏡筒透鏡、一攝像單元以及一切換單元。物 鏡係面對一玻璃面板設置。鏡筒透鏡具有不同放大倍率， 並且從物鏡穿出之光線係進入該等鏡筒透鏡。攝像單元係 攝取從該等鏡筒透鏡之其中之一穿出之光線之一影像。切 換單元係選擇性地切換光路徑，使得從該物鏡穿出之光線 進入所選定之一鏡筒透鏡。 為達上述目的，依據本發明之一種光學檢測單元包含 一物鏡、複數鏡筒透鏡、一攝像單元以及一切換單元。物 鏡係面對一玻璃面板設置。鏡筒透鏡具有不同放大倍率， 並且從物鏡穿出之光線係進入該等鏡筒透鏡；。攝像單元 係攝取從該等鏡筒透鏡穿出之其中一光線之一影像。切換 單元係選擇性地切換光路徑，使得從選定之該鏡筒透鏡穿 出之光線進入該攝像單元。 在一實施例中，藉由光阻擋元件之簡單的移動作業， 即可控制進入攝像單元之光線的放大倍率。因此，與習知 需要更換物鏡或鏡筒透鏡來控制影像的放大倍率相比 較，本發明之光學檢測單元之結構以及影像放大倍率之控 制更為簡單。 此外，本發明之光學檢測單元可包含複數穿透率轉換 單元，當被施加能量時，該等穿透率轉換單元係進入一第 一狀態以使光線通過，而當被中止施加能量時，該等穿透 率轉換單元係進入一第二狀態以阻擋光線通過。在此狀況 6 201248139 下’藉由施加能量給選定之穿透率轉換單元並且中止 能量給另-者，攝像單元所攝取之影像的放大倍率 地得到控制。此外，本發明之光學檢測單元在攝像^ 攝取之影像的放大倍率的控制上，不需要使—構件移= 驅動元件，因而能避免由於構件移動或驅動元件 產生的雜質’進而避免雜質污染光學系統或玻璃面板。 【實施方式】 以下將參照相關圖式，說明依據本發明較佳實 -種陣列測試裝置及其光學檢測單元，其中相同的 以相同的參照符號加以說明。 卞# 本發明較佳實施例之-種陣列測試裝置包含 =二載，S3。、—測試單心。以及單元二 Π 載人—玻璃面板P ’測試單元2G係測試載 入^璃面板P ’卸載單元4G係將測試單元2q所測試過 之玻璃面板P從載入單元30卸载下來。 測試單元20係測試玻璃面板p之電性缺陷， -透，支樓件2卜—測試模組22、—探針組件Μ以及一 控制早凡（圖未顯示）。玻璃面板？被載入單元3()載入並 3^光切件21上。測試 22制試位於透光支 樓件21上之玻璃面板p是否具有電性缺陷。探針轉η 施加電，位於透光支撐件21上之玻璃面板p之電 極。控制單元控制測試模組22與探針組件23。 此外，一測試模組支撐框架223設置於透光支撐件 201248139 之上’並沿一 γ軸方向延伸一預設長度。測試模組22設 置於測試模組支撐框架223並可沿Υ軸方向移動。本實施 例可包含複數測試模組22,其係設置於測試模組支撐框架 223’並沿測試模組支撐框架223所延伸之方向（γ軸方向） 排列。玻璃面板Ρ位於透光支撐件21上，測試模組22設 置於玻璃面板Ρ之上並測試玻璃面板ρ是否具有電性缺 陷。測試模組22各包含一調製器單元221以及一攝像單 元222。調製器單元221接近玻璃面板ρ。攝像單元222 對調製器單元221進行攝像。 陣列測試裝置可分為反光式與透光式。在反光式的態 樣中，一光源設置於測試模組21，並且一反射層（圖未顯 示）設置於測試模組22之調製器單元221 »因此，在光源 發出光線進入調製器單元221之後，藉由量測被調製器單 元221之反射層所反射之光量即可判斷玻璃面板ρ是否具 有缺陷。 測試單元20可分為反光式與透光式。在反光式的態 樣中，一光源設置於測試模組21，並且一反射層設置於透 光支撐件21。因此，在光源所發出光線被透光支撐件21 之反射層所反射之後，藉由量測穿透調製器單元221之光 量即可判斷玻璃面板Ρ是否具有缺陷。在透光式的態樣 中，一光源設置於透光支撐件21之下。因此，在光源發 出光線之後，藉由量測穿透調製器單元221之光量即可判 斷玻璃面板Ρ是否具有缺陷。反光式或透光式的態樣皆可 應用於本實施例之陣列測試裝置。 8 201248139 此外，測試單元20可更包含一光學檢測單元7〇，其 係檢測玻璃面板P之外觀缺陷，例如檢測玻面板p上之一 電路圖案或表面缺陷。光學檢測單元7〇設置於測試模組 22並可隨測試模組22沿Y軸方向移動，以檢測玻璃面板 P之外觀缺陷。光學檢測單元7〇可設置於各測試模組22、 或者僅設置於一些測試模組22。 測試模組22之調製器單元221具有一電光材料層， 其可依據在玻璃面板P與調製器單元221之間之電場強度 而變化反光率（在反光式態樣中）或透光率（在透光式態 樣中）。電光材料層係由具有特定物理特性之材料構成， 當施加電力給玻璃面板P與調製器單元221時，該材料之 物理特性係隨著所產生之電場大小而變化，以致進入調製 器單元221之光線的反射率或透光率產生變化。 探針組件23包含一探針組件支撐框架231以及複數 探針頭233。探針組件支撐框架231係沿γ軸方向延伸一 預設長度。探針頭233係沿探針組件支撐框架231之長軸 方向（γ轴方向）以蚊間距排列。各探針頭233具有複 數探針（圖未顯示）。 探針組件支撐框架231係與一 Χ軸驅動單元235連 結’使得探針組件支撐㈣加彳藉由χ轴驅動單元奶 =X軸方向移動，χ軸方向係與探針組件支樓框架231 =長轴方向（Υ軸方向）呈水平垂直。此外，—γ轴驅動 =236係設置於探針組件支樓框架加與探針頭⑶之 I Υ軸驅動單元236係使探針頭233沿¥轴方向移動。 201248139 多種線性驅動構件，例如一線性馬達、一滾珠絲杠構件 (ball screw)等等’可用來作為X軸驅動單元235及/或 Y軸驅動單元236。 載入單元30支撐待測試之玻璃面板P並將玻璃面板p 承載至測試單元20。卸载單元40支撐已測試過之玻璃面 板P並從測試單元20承載玻璃面板p而使其離開陣列測 試裝置。載入單元30與卸載單元4〇各包含複數支撐板50 以及一玻璃面板輸送單元60。支撐板50係以固定間距間 隔設置並支撐玻璃面板P於其上。玻璃面板輸送單元60 係承載玻璃面板P。 各支撐板50可具有複數吹氣孔51，以吹出氣體使玻 璃面板懸浮。吹氣孔51連接於一氣體供應單元（圖未顯 示），氣體供應單元係供應氣體至吹氣孔。 以下請參照圖2至圖6以說明本發明第一實施例之一 種光學檢測裝置。 如圖2與圖3所示，光學檢測單元70包含一物鏡71、 一發光單元72、複數鏡筒透鏡73、一攝像單元74、一光 分佈單元75、一導光單元76、一切換單元77以及一框體 80。物鏡71面對玻璃面板P而設置。發光單元72提供光 線至物鏡Ή ^該等鏡筒透鏡73具有不同放大倍率並間隔 設置，且設置的位置可使經過物鏡71之光線進入對應的 鏡筒透鏡乃。攝像單元74可對穿過任一鏡筒透鏡73之光 線進行攝像。光分佈單元75設置於物鏡71與鏡筒透鏡73 之間，以將經過物鏡71之光線分佈至鏡筒透鏡73。導光 201248139 單元76將經過其中一鏡筒透鏡73之光線導引至攝像單元 74。切換單元77可選擇性切換光路徑，使得經過物鏡71 之光線只能進入一鏡筒透鏡73。框體80至少容置並支樓 鏡筒透鏡73。 鏡筒透鏡73可包含一第一鏡筒透鏡731以及一第二 鏡筒透鏡732’第二鏡筒透鏡732鄰設第一鏡筒透鏡73卜 上述第一鏡筒透鏡731以及第二鏡筒透鏡732僅為舉例說 明，本發明之鏡筒透鏡73可包含三個以上之鏡筒透鏡。 鏡筒透鏡73具有不同的放大倍率。各鏡筒透鏡73較佳者 係具有複數光學透鏡排成一列。 攝像單元74可包含一照相機，其具有電荷耦合元件 (Charge Coupled Device，CCD) 〇 光分佈單元75包含一第一半反射鏡751以及一第一 反射鏡752。第一半反射鏡751設置於物鏡71與第一鏡筒 透鏡731之間。第一反射鏡752鄰設第一半反射鏡751並 將被第一半反射鏡751反射之光線反射至第二鏡筒透鏡 732。藉此，部分光線在穿透物鏡71之後，係經由第一半 反射鏡751而進入第一鏡筒透鏡731。其餘穿透物鏡71之 光線係被第一半反射鏡751與第一反射鏡752反射而進入 第二鏡筒透鏡732。 導光單元76包含一第二半反射鏡761以及一第二反 射鏡762。第一半反射鏡761設置於攝像單元74與第二鏡 筒透鏡732之間。第二反射鏡762鄰設第二半反射鏡761 並將穿過第一鏡筒透鏡731之光線反射至第二半反射鏡 11 201248139 76卜藉此，穿過第一鏡筒透鏡731之光線係被第二反射 鏡762與第二半反射鏡761反射而進入攝像單元74。穿過 第二鏡筒透鏡732之光線係經由第二半反射鏡761而入攝 像單元74。 發光單元72包含一光源721、一第三反射鏡722以及 一第二半反射鏡723。第三反射鏡722反射光源721所發 出之光線。第三半反射鏡723係將被第三反射鏡722反射 之光線反射至物鏡71。 如圖2至圖4所示，切換單元77包含一光阻檔元件 771以及一驅動單元772。光阻擋元件771可在物鏡71與 第一鏡筒透鏡731之間之一區域以及物鏡71與第二鏡筒 透鏡732之間之一區域之間來移動，以避免光線進入非選 定之第一鏡筒透鏡731或第二鏡筒透鏡732。驅動單元772 使光阻擋元件771移動。 細部來說，光阻擋元件771可選擇性地位於第一半反 射鏡751與第一鏡筒透鏡731之間或位於第一反射鏡752 與第二鏡筒透鏡732之間。因此，如圖5所示，當光阻擋 元件771位於第一反射鏡752與第二鏡筒透鏡732之間 時，穿過物鏡71之光線係進入第一鏡筒透鏡731但會被 阻擋而無法進入第二鏡筒透鏡732。反過來說’如圖6所 示，當光阻擋元件771位於第一半反射鏡751與第一鏡筒 透鏡731之間時，穿過物鏡71之光線係進入第二鏡筒透 鏡732但會被阻擋而無法進入第一鏡筒透鏡731。如此， 光阻擋元件771之位置可被調整，使得光線只進入所選定 12 201248139 之第一鏡筒透鏡731或第二鏡筒透鏡732，且第一鏡筒透 鏡731與第二鏡筒透鏡732具有不同的放大倍率。因此， 藉由s周整光阻擋元件771這樣簡單的作業，可控制攝像單 元74所攝之影像的放大倍率。 如圖4所示，驅動單元722包含一致動器773、一連 接元件774、一移動塊775、一連接桿776以及一導執777。 致動器773設置於框體8〇之一外表面。一狹縫81形成於 框體80之該外表面。連接元件774係穿過框體8〇之狹縫 81並連接光阻擂元件771。移動塊775連接於連接元件 774。連接桿776連接於移動塊775與致動器773之間。 導轨777位於框體80之該外表面，以導引移動塊7乃之 移動。致動器773可包含一氣壓或液壓缸體。在本發明中， 因為致動器773設置於框體80夕卜，因此即使雜質在致動 器773作動中產生，雜質也無法進入框體内。因此， 可避免光路徑被雜質所污染。另外，本發明不限於上述結 構，驅動單元722可具有多種變化態樣，例如線性馬達、 滚珠絲杠構件科祕驅動構件或其他可驅使光阻擔元 件爪線性移動者，皆可用以作為驅動單元瓜。 如上所述，在本發明第—實施例之光學檢測單元70 中，藉由光阻擋it件771之簡單的移動作業，即可控制進 入攝像單元74之光線的放大倍率。因此’ i習知需要更 換物鏡或鏡筒透鏡來控制影像的放大倍率相比較，本實施 光學檢測單元7G之結構以及影像放大倍率之控制更 13 201248139 此外，在本實施例之光學檢測單元70中，驅動光阻 擋元件771之驅動單元772係設置於框體80外，因此， 即使雜質在驅動單元772之作動中產生，雜質亦無法進入 框體80。因此，光學系統可被保護而免於被雜質污染。 以下，請參照圖7與圖8以說明本發明第二實施例之 一種光學檢測單元。在本實施例中，與第一實施例相同的 構件係使用與第一實施例相同的標號，並且就不加以詳細 說明。 如圖7與圖8所示，光學檢測單元70包含一物鏡7卜 一發光單元72、複數鏡筒透鏡73、一攝像單元74、一光 分佈單元75、一導光單元76、一切換單元77以及一框體 80。物鏡71面對玻璃面板P而設置。發光單元72提供光 線至物鏡71。該等鏡筒透鏡73具有不同放大倍率並間隔 設置，且設置的位置可使經過物鏡71之光線進入對應的 鏡筒透鏡73。攝像單元74可對穿過任一鏡筒透鏡73之光 線進行攝像。光分佈單元75設置於物鏡71與鏡筒透鏡73 之間，以將經過物鏡71之光線分佈至鏡筒透鏡73。導光 單元76將經過其中一鏡筒透鏡73之光線導引至攝像單元 74。切換單元77可選擇性切換光路徑，使得僅有穿過該 等鏡筒透鏡73之其中之一的光線進入攝像單元74。框體 80至少容置並支撐鏡筒透鏡73。 鏡筒透鏡73可包含一第一鏡筒透鏡731以及一第二 鏡筒透鏡732,第二鏡筒透鏡732鄰設第一鏡筒透鏡731。 上述第一鏡筒透鏡731以及第二鏡筒透鏡732僅為舉例說 201248139 明，本發明之鏡筒透鏡73可包含三個以上之鏡筒透鏡。 切換單元77包含一光阻檔元件771以及一驅動單元 772。光阻擋元件771可在攝像單元74與第一鏡筒透鏡731 之間的區域以及攝像單元74與第二鏡筒透鏡732之間的 區域之間滑動，使得僅從選定之第一鏡筒透鏡731或第二 鏡筒透鏡732穿出之光線進入攝像單元74。驅動單元772 使光阻擋元件771移動。 細部來說，光阻擋元件771可選擇性地位於第二半反 射鏡761與第二鏡筒透鏡732之間或位於第二反射鏡762 與第一鏡筒透鏡731之間。因此，如圖7所示，當光阻擋 元件771位於第二反射鏡762與第一鏡筒透鏡731之間 時，穿過第二鏡筒透鏡732之光線係進入攝像單元74，但 穿過第一鏡筒透鏡731之光線會被阻檔而無法進入攝像單 元74。反過來說，如圖8所示，當光阻擋元件771位於第 二半反射鏡761與第二鏡筒透鏡732之間時，穿過第一鏡 筒透鏡731之光線係進入攝像單元74,但穿過第二鏡筒透 鏡732之光線會被阻擋而無法進入攝像單元74。如此，光 阻擂元件771之位置可被調整，使得僅有所選定之從第一 鏡筒透鏡731穿出之光線、或從第二鏡筒透鏡732穿出之 光線能進入攝像單元74,並且第一鏡筒透鏡731與第二鏡 筒透鏡732具有不同的放大倍率。因此，藉由調整光阻擋 元件771這樣簡單的作業，可控制攝像單元74所攝之影 像的放大倍率。 第二實施例之驅動單元772可與第一實施例相同。 15 201248139 如上所述，在本實施例之光學檢測單元7〇中，藉由 調整光阻擋元件771這樣簡單的作業，可控制進入攝像單 元74之光線的放大倍率。因此，與習知需要更換物鏡或 鏡筒透鏡來控制影像的放大倍率相比較，本實施例之光學 檢測單元70之結構以及影像放大倍率之控制更為簡單。 以下’請參照圖9至圖11以說明本發明第三實施例 之一種光學檢測單元。在本實施例中，與第一實施例或第 二實施例相同的構件係使用相同的標號，並且就不加以詳 細說明。 如圖9所示，本實施例之光學檢測單元7〇包含一物 鏡71、一發光單元72、複數鏡筒透鏡73、一攝像單元74、 -光分佈單元75、一導光單元76以及一切換單元90。物 鏡71面對玻璃面板p而設置。發光單元72提供光線至物 鏡71 ^該等鏡筒透鏡73具有不同放大倍率並間隔設置’ 真設置的位置可使經過物鏡71之光線進入對應的鏡筒透 鏡73。攝像單元74可對穿過任一鏡筒透鏡73之光線進行 攝像。光分佈單元75設置於物鏡71與鏡筒透鏡73之間， 以將經過物鏡71之光線分佈至鏡筒透鏡73。導光單元76 將經過其中一鏡筒透鏡73之光線導引至攝像單元74。切 換單元90可選擇性切換光路徑’使得經過物鏡71之光線 一次只能進入其中一鏡筒透鏡73。 鏡筒透鏡73可包含一第一鏡筒透鏡731以及一第二 鏡筒透鏡732,第二鏡筒透鏡732鄰設第一鏡筒透鏡73卜 上述第一鏡筒透鏡731以及第二鏡筒透鏡732僅為舉例說 201248139 明，本發明之鏡筒透鏡73可包含三個以上之鏡筒透鏡。 切換單元90可包含複數穿透率轉換單元91、92，穿 透率轉換單元91、92分別對應一鏡筒透鏡73設置。細部 來說，在本實施例中’切換單元90包含一第一穿透率轉 換單元91、一第二穿透率轉換單元92以及一能量施加單 元93。第一穿透率轉換單元91設置於第一半反射鏡751 與第一鏡筒透鏡731之間，第二穿透率轉換單元92設置 於第一反射鏡7 5 2與第一鏡筒透鏡73 2之間，能量施加單 元93可選擇性地施加能量給第一穿透率轉換單元91與第 二穿透率轉換單元92。 能量施加單元93包含一能量供應器931、一連接線 932以及一切換器933。連接線932係將能量供應器931 連接至第一穿透率轉換單元91與第二穿透率轉換單元 92。切換器933設置於連接線932並可選擇性地施加能量 給第一穿透率轉換單元91與第二穿透率轉換單元92。 如圖10與圖11所示，第一穿透率轉換單元91與第 二穿透率轉換單元92各包含一對玻璃基板97、一穿透率 轉換元件99以及一電極層98。穿透率轉換元件99設置於 二玻璃面板97之間。二電極層98分別設置於穿透率轉換 元件99與玻璃基板97之間。穿透率轉換元件99可包含 一高分子分散液晶（polymer dispersed liquid crystal, PDLC )。高分子分散液晶係均勻分佈於一高分子基質 (polymer matrix)中。 如圖11所示，在穿透率轉換元件99中，當能量施加 17 201248139 給電極層98時，液晶藉由電場的作用而沿一方向轉向’ 該方向係對應高分子基質之折射率的排列。藉此穿透率轉 換元件99係進入一第一狀態’該第一狀態係使含有一物 體形狀之光線穿過穿透率轉換元件99。如圖10所示，當 能量中止施加給電極層98，穿透率轉換元件99係進入一 第二狀態，該第二狀態係避免光線穿過穿透率轉換元件 99。 此外，各穿透率轉換單元91、92使用高分子分散液 晶作為穿透率轉換元件99僅為舉例說明，並非用以限制 本發明。舉例而言，一液晶亦可使用作為穿透率轉換元件 99 ° 此外，各穿透率轉換單元91、92可有多種結構上的 變化態樣，例如液晶可為KDP (KH2P04)、ADP (NH4H2P04)、BSO (Bil2SiO20)、BTO (Bil2TiO20)或 LiNb03。並且光線之穿透與否可依據一些特定條件，例如 能量的施加或一電場的形成。 因此’當第一穿透率轉換單元91藉由施加能量而進 入第一狀態並且第一穿透率轉換單元92藉由中止施加能 量而進入第二狀態時，已穿過物鏡71之光線係進入第一 鏡筒透鏡731 ’但會被阻擋而無法進入第二鏡筒透鏡732。 在此狀況下，光路徑係如圖9之路徑A所示。反過來說， 當第一穿透率轉換單元91藉由中止施加能量而進入第二 狀態並且第二穿透率轉換單元92藉由施加能量而進入第 一狀態時，已穿過物鏡71之光線係進入第二鏡筒透鏡 201248139 在此狀況 732 ’但會被阻擋而無法進入第一鏡筒透鏡73l 下’光路徑係如圖9之路徑b所示。 如上所述’在本實施例之光學檢測單元7〇中 * 施加能量給第一或第二穿透率轉換單元91或# 藉由 4 %並且中 施加能量給另一者’可使得光線進入所選定夕笛 ^ 〜—鏡筒读 鏡731或第一鏡筒透鏡732，其中第一鏡筒透鏡乃1 二鏡筒透鏡732具有不同的放大倍率。因此，攝像單〔、第 所攝取的影像之放大倍率可輕易地得到控制。 疋74 此外，本實施例之光學檢測單元70在攝像單元^ 攝取之影像的放大倍率的控制上，不需要使一構件移動 驅動元件，因而能避免由於構件移動或驅動元件之作動所 產生的雜質，進而避免雜質污染光學系統或玻璃面板p。 以下，請參照圖12以說明本發明第四實施例之一種 光學檢測單元。在本實施例中，與第一、第二或第三實施 例相同的構件係使用相同的標號，並且就不加以詳細說 明。 如圖12所示，本實施例之光學檢測單元7〇包含一物 鏡71、一發光單元72、複數鏡筒透鏡73、一攝像單元74、 一光分佈單元75、一導光單元76以及一切換單元90。物 鏡71面對玻璃面板P而設置。發光單元72提供光線至物 鏡71。該等鏡筒透鏡73具有不同放大倍率並間隔設置， 且設置的位置可使經過物鏡71之光線進入對應的鏡筒透 鏡73。攝像單元74可對穿過任一鏡筒透鏡73之光線進行 攝像。光分佈單元75設置於物鏡71與鏡筒透鏡73之間， 19 201248139 以將經過物鏡71之光線分佈至鏡筒透鏡73。導光單元76 將經過其中一鏡筒透鏡73之光線導引至攝像單元74。切 換單元90可選擇性切換光路徑，使得僅有穿過該等鏡筒 透鏡73之其中之一的光線進入攝像單元74。 鏡筒透鏡73可包含一第一鏡筒透鏡731以及一第二 鏡筒透鏡732,第二鏡筒透鏡732鄰設第一鏡筒透鏡731。 上述第一鏡筒透鏡731以及第二鏡筒透鏡732僅為舉例說 明，本發明之鏡筒透鏡73可包含三個以上之鏡筒透鏡。 切換單元90可包含複數穿透率轉換單元91、92，穿 透率轉換單元91、92分別對應一鏡筒透鏡73設置。細部 來說，在本實施例中，切換單元90包含一第一穿透率轉 換單元91、一第二穿透率轉換單元92以及一能量施加單 元93。第一穿透率轉換單元91設置於第二反射鏡762與 第一鏡筒透鏡731之間，第二穿透率轉換單元92設置於 第二半反射鏡761與第二鏡筒透鏡732之間，能量施加單 元93可選擇性地施加能量給第一穿透率轉換單元9丨與第 二穿透率轉換單元92。第一穿透率轉換單元91、第二穿 透率轉換單元92與能量施加單元93係與第三實施例相 同。 因此，當第一穿透率轉換單元91藉由施加能量而進 入第一狀態並且第二穿透率轉換單元92藉由中止施加能 量而進入第二狀態時，已穿過第一鏡筒透鏡731之光線係 進入攝像單it 74,但穿過第二鏡筒透鏡732之光線係被阻 擋而無法進人攝像單元74。在此狀況下，光路徑係如圖 201248139 12之路徑A所示。反過來說，當第一穿透率轉換單元91 藉由中止施加能量而進入第二狀態並且第二穿透率轉換 單元92藉由施加能量而進入第一狀態時，已穿過第二鏡 筒透鏡732之光線係進入攝像單元74,但穿過第一鏡筒透 鏡731之光線係被阻擋而無法進入攝像單元74。在此狀況 下，光路徑係如圖12之路徑B所示。 如上所述，在本實施例之光學檢測單元70中，藉由 施加能量給第一或第二穿透率轉換單元91或92並且中止 施加能量給另一者，可使得僅有從選定之第一鏡筒透鏡 731或第二鏡筒透鏡732穿出之光線能夠進入攝像單元 74，其中第一鏡筒透鏡731與第二鏡筒透鏡732具有不同 的放大倍率。因此，攝像單元74所攝取的影像之放大倍 率可輕易地得到控制。 ° 此外，本實施例之光學檢測單元7〇在攝像單元74所 攝取之影像的放大倍率的控制丨，不需要使一構件移動之 驅動元件’因而能避免由於構件移動或驅動元件之作動所 產生的雜質’進而避免雜t污染光學线或玻璃面板卜 本發明所有實施例之技術特徵可單獨實施或合併實 施。此外’本發明之光學檢測單元可應用於多種裝置，例 裝置之_面板之測試裝置、辑導體基板之 以上所述僅為舉例性，而北 本發明之精神與_，㈣其進為”m者。任何未脫離 應包含於錢之申請專利範圍中。之等效修改或變更’均 21 201248139 【圖式簡單說明】 圖1為本發明較佳實施例之一種具有一光學檢測單元 之陣列測試裝置的立體示意圖； 圖2為本發明第一實施例之一種光學檢測單元的立體 不意圖， 圖3為圖2所示之光學檢測單元的示意圖； 圖4為圖2所示之光學檢測單元之一切換單元的示意 圖； 圖5與圖6為圖2所示之光學檢測單元的作動示意圖； 圖7與圖8為本發明第二實施例之一種光學檢測單元 的不意圖， 圖9為本發明第三實施例之一種光學檢測單元的示意 圖； 圖10與圖11為圖9所示之光學檢測單元之一穿透率 轉換單元的示意圖；以及 圖12為本發明第四實施例之一種光學檢測單元的示 意圖。 【主要元件符號說明】 10 :基座 20:測試單元’ 21 :透光支撐件 22 :測試模組 221 :調製器單元 22 201248139 222 :攝像單元 223 :測試模組支撐框架 23 :探針組件 231 :探針組件支撐框架 233 :探針頭 235 : X軸驅動單元 236 : Y軸驅動單元 30 :載入單元 40 :卸載單元 50 :支撐板 51 :吹氣孔 60 :玻璃面板輸送單元 70 :光學檢測單元 71 :物鏡 72 :發光單元 721 :光源 722 :第三反射鏡 723 :第三半反射鏡 73 :鏡筒透鏡 731 :第一鏡筒透鏡 732 :第二鏡筒透鏡 74 :攝像單元 75 :光分佈單元 751 :第一半反射鏡 201248139 752 :第一反射鏡 76 :導光單元 761 :第二半反射鏡 762 :第二反射鏡 77 :切換單元 771 :光阻擋元件 772 :驅動單元 773 :致動器 774 :連接元件 775 :移動塊 776 :連接桿 777 :導軌 80 :框體 81 :狹縫 90 :切換單元 91 :第一穿透率轉換單元 92 :第二穿透率轉換單元 93 :能量施加單元 931 :能量供應器 932 :連接線 933 :切換器 97 :玻璃基板 99 :穿透率轉換元件 98 :電極層 24 201248139 A :路徑 B :路徑 P :玻璃面板201248139 VI. Description of the Invention: [Technical Field] The present invention relates to an optical detecting unit capable of testing and measuring a glass panel, and an array testing device having the optical detecting unit. [Prior Art] As far as the public is concerned, a flat panel display is a thin and light image display device which is lighter and thinner than a conventional display using a cathode ray tube. A wide variety of flat panel displays have been developed and used, for example, liquid crystal displays, plasma displays, field emission displays, organic light emitting diode displays, and the like. The liquid crystal display has a plurality of liquid crystal cell arrays, and provides data signals to the liquid crystal cells according to the image data to control the light transmittance of each liquid crystal cell to display the image. Liquid crystal displays have been widely used due to their advantages of thinness, light weight, low power consumption, and low operating voltage. In the manufacturing process of the liquid crystal display panel, a detection program is required to inspect whether a substrate (hereinafter referred to as a glass panel on which a thin film transistor and a pixel electrode are provided) has defects, such as detecting a data line disposed on the substrate. Or whether the electrical connection of the scan line is good, or the accuracy of the color of the pixel unit is detected. An array test device is typically used to test the glass panel. The array test apparatus includes a plurality of test units, a load unit, and an unloading unit. The test unit is a test glass panel, and the loading unit carries the glass panel carrying 201248139 into the test unit, and the unloading unit unloads the glass plate from the Lai unit. In addition, test sheet 70 includes an optical inspection unit that detects defects in the appearance of the glass panel, such as defects in one of the circuit patterns on the glass panel, or surface defects. The optical detecting unit includes an optical system and a camera unit 7G. The optical system includes a plurality of lenses. When the glass panel passes through the optical system, the camera unit images the glass panel. Preferably, the magnification of the optical system of the optical detecting unit can be changed as much as possible. Thus, the glass panel can be detected at a desired resolution. In particular, the optical system can project the glass panel to the camera unit at a lower magnification and a higher magnification so that the portion to be detected can be found on the glass panel and enlarged. To do this, an object lens replacement method is required to replace the objective lens facing the glass panel, or a tube lens replacement method is used to replace the lens barrel between the objective lens and the image pickup unit. lens. However, the above method requires a driving unit to be coupled with the objective lens or the lens barrel lens, and the structure of the driving unit is complicated. In addition, foreign matter can create and contaminate the optical system or glass panel when the drive unit is actuated. SUMMARY OF THE INVENTION In view of the above problems, it is an object of the present invention to provide an optical detecting unit and an array testing device having an optical detecting unit, which simplifies the adjustment structure of one of the magnifications of the optical system, and avoids adjusting the optical system. Impurities are generated at the magnification, thereby preventing contamination of the optical system or a glass 201248139 glass panel by impurities. To achieve the above object, an optical detecting unit according to the present invention comprises an objective lens, a plurality of lens barrel lenses, an image pickup unit, and a switching unit. The objective system is placed facing a glass panel. The barrel lenses have different magnifications, and the light that exits the objective lens enters the barrel lenses. The camera unit picks up an image of light that is passed through one of the lens barrels. The switching unit selectively switches the light path such that light exiting the objective lens enters the selected one of the lens barrels. To achieve the above object, an optical detecting unit according to the present invention comprises an objective lens, a plurality of lens barrel lenses, an image pickup unit, and a switching unit. The objective system is placed facing a glass panel. The lens barrel lenses have different magnifications, and the light that exits the objective lens enters the lens barrel lenses; The camera unit picks up an image of one of the rays that are passed through the lens barrels. The switching unit selectively switches the light path such that light from the selected lens barrel enters the camera unit. In one embodiment, the magnification of the light entering the camera unit can be controlled by a simple moving operation of the light blocking element. Therefore, the structure of the optical detecting unit of the present invention and the control of the image magnification are simpler than conventionally required to replace the objective lens or the lens barrel to control the magnification of the image. Furthermore, the optical detecting unit of the present invention may comprise a plurality of transmittance conversion units that, when energized, enter a first state to pass light, and when energy is suspended, The equal transmittance conversion unit enters a second state to block the passage of light. In this case 6 201248139, the magnification of the image taken by the camera unit is controlled by applying energy to the selected transmittance conversion unit and aborting the energy to the other. In addition, the optical detecting unit of the present invention does not need to move the member to the driving element in the control of the magnification of the image captured, thereby avoiding impurities caused by the movement of the member or the driving member, thereby avoiding contamination of the optical system by impurities. Or glass panel. [Embodiment] Hereinafter, an array test apparatus and an optical detecting unit thereof according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings, wherein the same reference numerals will be used.卞# The array test apparatus of the preferred embodiment of the invention comprises = two loads, S3. , - test single heart. And the unit two 载 manned-glass panel P' test unit 2G is the test loading glass panel P'. The unloading unit 4G unloads the glass panel P tested by the testing unit 2q from the loading unit 30. The test unit 20 tests the electrical defects of the glass panel p, - through, the test piece 2 - the test module 22, the probe assembly Μ, and a control (not shown). Glass panel? It is loaded into unit 3 () and loaded onto 3^ light cutting member 21. Test 22 tests whether the glass panel p located on the light-transmitting building member 21 has an electrical defect. The probe is turned to η to apply electricity to the electrode of the glass panel p on the light-transmitting support member 21. The control unit controls the test module 22 and the probe assembly 23. In addition, a test module support frame 223 is disposed above the light-transmitting support member 201248139 and extends a predetermined length along a γ-axis direction. The test module 22 is placed in the test module support frame 223 and is movable along the x-axis direction. This embodiment may include a plurality of test modules 22 disposed in the test module support frame 223' and arranged along the direction in which the test module support frame 223 extends (the γ-axis direction). The glass panel Ρ is located on the light-transmissive support member 21, and the test module 22 is placed on the glass panel 并 to test whether the glass panel ρ has an electrical defect. The test modules 22 each include a modulator unit 221 and an imaging unit 222. The modulator unit 221 is close to the glass panel ρ. The imaging unit 222 images the modulator unit 221. The array test device can be classified into a reflective type and a light transmitting type. In the reflective aspect, a light source is disposed in the test module 21, and a reflective layer (not shown) is disposed in the modulator unit 221 of the test module 22. Therefore, after the light source emits light into the modulator unit 221 By measuring the amount of light reflected by the reflective layer of the modulator unit 221, it can be determined whether the glass panel ρ has a defect. The test unit 20 can be classified into a reflective type and a light transmitting type. In the retroreflective mode, a light source is disposed in the test module 21, and a reflective layer is disposed on the light transmissive support 21. Therefore, after the light emitted from the light source is reflected by the reflective layer of the light-transmitting support member 21, it is judged whether or not the glass panel has defects by measuring the amount of light passing through the modulator unit 221. In the light transmissive aspect, a light source is disposed below the light transmissive support member 21. Therefore, after the light source emits light, it is judged whether or not the glass panel defect is defective by measuring the amount of light passing through the modulator unit 221. Both the reflective or light transmissive aspects can be applied to the array test apparatus of this embodiment. 8 201248139 In addition, the test unit 20 may further include an optical detecting unit 7 that detects an appearance defect of the glass panel P, for example, detecting a circuit pattern or surface defect on the glass panel p. The optical detecting unit 7 is disposed in the test module 22 and is movable along the Y-axis direction with the test module 22 to detect the appearance defect of the glass panel P. The optical detecting unit 7 can be disposed in each test module 22 or only in some test modules 22. The modulator unit 221 of the test module 22 has a layer of electro-optic material which can change the reflectance (in the reflective state) or the transmittance according to the electric field strength between the glass panel P and the modulator unit 221 (in In the light transmission pattern). The electro-optic material layer is composed of a material having specific physical properties. When power is applied to the glass panel P and the modulator unit 221, the physical properties of the material vary with the magnitude of the generated electric field, so that the modulator unit 221 is entered. The reflectance or transmittance of the light changes. The probe assembly 23 includes a probe assembly support frame 231 and a plurality of probe heads 233. The probe assembly support frame 231 extends a predetermined length in the γ-axis direction. The probe heads 233 are arranged at a mosquito pitch in the long-axis direction (γ-axis direction) of the probe assembly supporting frame 231. Each probe head 233 has a plurality of probes (not shown). The probe assembly support frame 231 is coupled to a cymbal drive unit 235 so that the probe assembly supports (four) twisting by the cymbal drive unit milk = X-axis direction movement, the y-axis direction system and the probe assembly framing frame 231 = The long axis direction (the x-axis direction) is horizontal and vertical. Further, the - γ-axis drive = 236 is provided in the probe assembly fulcrum frame plus the probe head (3). The y-axis drive unit 236 moves the probe head 233 in the direction of the ¥ axis. 201248139 A variety of linear drive members, such as a linear motor, a ball screw, etc., can be used as the X-axis drive unit 235 and/or the Y-axis drive unit 236. The loading unit 30 supports the glass panel P to be tested and carries the glass panel p to the test unit 20. The unloading unit 40 supports the tested glass panel P and carries the glass panel p from the test unit 20 away from the array test apparatus. The loading unit 30 and the unloading unit 4 each include a plurality of support plates 50 and a glass panel transport unit 60. The support plate 50 is disposed at a fixed pitch and supports the glass panel P thereon. The glass panel transport unit 60 is a glass panel P. Each of the support plates 50 may have a plurality of blow holes 51 to blow out the gas to suspend the glass panel. The blow hole 51 is connected to a gas supply unit (not shown) which supplies a gas to the blow hole. Hereinafter, an optical detecting apparatus according to a first embodiment of the present invention will be described with reference to Figs. 2 to 6 . As shown in FIG. 2 and FIG. 3 , the optical detecting unit 70 includes an objective lens 71 , an illumination unit 72 , a plurality of barrel lenses 73 , an imaging unit 74 , a light distribution unit 75 , a light guiding unit 76 , and a switching unit 77 . And a frame 80. The objective lens 71 is disposed facing the glass panel P. The light-emitting unit 72 supplies light to the objective lens Ή. The lens barrels 73 have different magnifications and are spaced apart, and are disposed at positions such that light passing through the objective lens 71 enters the corresponding lens barrel. The imaging unit 74 can image the light passing through any of the lens barrels 73. The light distribution unit 75 is disposed between the objective lens 71 and the lens barrel 73 to distribute the light passing through the objective lens 71 to the lens barrel 73. Light Guide 201248139 The unit 76 directs light passing through one of the lens barrels 73 to the image pickup unit 74. The switching unit 77 can selectively switch the light path such that light passing through the objective lens 71 can enter only one barrel lens 73. The frame 80 houses and supports at least the lens barrel lens 73. The barrel lens 73 may include a first barrel lens 731 and a second barrel lens 732'. The second barrel lens 732 is adjacent to the first barrel lens 73. The first barrel lens 731 and the second barrel lens 732 is merely illustrative, and the lens barrel 73 of the present invention may include more than three lens barrels. The barrel lens 73 has a different magnification. Each of the barrel lenses 73 preferably has a plurality of optical lenses arranged in a line. The camera unit 74 can include a camera having a charge coupled device (CCD). The light distribution unit 75 includes a first half mirror 751 and a first mirror 752. The first half mirror 751 is disposed between the objective lens 71 and the first barrel lens 731. The first mirror 752 is adjacent to the first half mirror 751 and reflects the light reflected by the first half mirror 751 to the second barrel lens 732. Thereby, part of the light enters the first barrel lens 731 via the first half mirror 751 after penetrating the objective lens 71. The remaining light passing through the objective lens 71 is reflected by the first half mirror 751 and the first mirror 752 into the second barrel lens 732. The light guiding unit 76 includes a second half mirror 761 and a second reflecting mirror 762. The first half mirror 761 is disposed between the image pickup unit 74 and the second lens barrel 732. The second mirror 762 is adjacent to the second half mirror 761 and reflects the light passing through the first barrel lens 731 to the second half mirror 11 201248139 76. Thereby, the light system passing through the first barrel lens 731 The second mirror 762 and the second half mirror 761 are reflected and enter the imaging unit 74. Light passing through the second barrel lens 732 is incident on the image taking unit 74 via the second half mirror 761. The light unit 72 includes a light source 721, a third mirror 722, and a second half mirror 723. The third mirror 722 reflects the light emitted by the light source 721. The third half mirror 723 reflects the light reflected by the third mirror 722 to the objective lens 71. As shown in FIGS. 2 to 4, the switching unit 77 includes a photoresist element 771 and a driving unit 772. The light blocking member 771 is movable between an area between the objective lens 71 and the first barrel lens 731 and a region between the objective lens 71 and the second barrel lens 732 to prevent light from entering the unselected first mirror The barrel lens 731 or the second barrel lens 732. The driving unit 772 moves the light blocking member 771. In detail, the light blocking member 771 can be selectively positioned between the first half mirror 751 and the first barrel lens 731 or between the first mirror 752 and the second barrel lens 732. Therefore, as shown in FIG. 5, when the light blocking member 771 is located between the first mirror 752 and the second barrel lens 732, the light passing through the objective lens 71 enters the first barrel lens 731 but is blocked. The second lens barrel lens 732 is entered. Conversely, as shown in FIG. 6, when the light blocking member 771 is located between the first half mirror 751 and the first barrel lens 731, the light passing through the objective lens 71 enters the second barrel lens 732 but will be Blocked and unable to enter the first barrel lens 731. As such, the position of the light blocking element 771 can be adjusted such that light enters only the first barrel lens 731 or the second barrel lens 732 of the selected 12 201248139, and the first barrel lens 731 and the second barrel lens 732 have Different magnifications. Therefore, the magnification of the image captured by the image pickup unit 74 can be controlled by a simple operation of the s-week light blocking element 771. As shown in FIG. 4, the drive unit 722 includes an actuator 773, a connecting member 774, a moving block 775, a connecting rod 776, and a guide 777. The actuator 773 is disposed on an outer surface of the frame 8〇. A slit 81 is formed on the outer surface of the frame 80. The connecting member 774 passes through the slit 81 of the frame 8 and is connected to the photoresist member 771. Mobile block 775 is coupled to connection element 774. A connecting rod 776 is coupled between the moving block 775 and the actuator 773. A guide rail 777 is located on the outer surface of the frame 80 to guide the movement of the moving block 7. Actuator 773 can include a pneumatic or hydraulic cylinder. In the present invention, since the actuator 773 is disposed in the casing 80, even if impurities are generated in the actuation of the actuator 773, impurities cannot enter the casing. Therefore, it is possible to prevent the light path from being contaminated by impurities. In addition, the present invention is not limited to the above structure, and the driving unit 722 can have various variations, such as a linear motor, a ball screw member secret driving member, or other one that can drive the linear movement of the resistive member claw, and can be used as a driving unit. melon. As described above, in the optical detecting unit 70 of the first embodiment of the present invention, the magnification of the light entering the image capturing unit 74 can be controlled by the simple moving operation of the light blocking member 771. Therefore, it is known that the objective lens or the lens barrel lens needs to be replaced to control the magnification of the image. The structure of the optical detecting unit 7G and the control of the image magnification are further controlled. 13 201248139 In addition, in the optical detecting unit 70 of the present embodiment, The driving unit 772 that drives the light blocking element 771 is disposed outside the frame 80. Therefore, even if impurities are generated in the operation of the driving unit 772, impurities cannot enter the frame 80. Therefore, the optical system can be protected from contamination by impurities. Hereinafter, an optical detecting unit according to a second embodiment of the present invention will be described with reference to Figs. 7 and 8. In the present embodiment, the same members as those of the first embodiment are given the same reference numerals as those of the first embodiment, and will not be described in detail. As shown in FIG. 7 and FIG. 8 , the optical detecting unit 70 includes an objective lens 7 , a light emitting unit 72 , a plurality of lens barrels 73 , an image capturing unit 74 , a light distributing unit 75 , a light guiding unit 76 , and a switching unit 77 . And a frame 80. The objective lens 71 is disposed facing the glass panel P. The light emitting unit 72 supplies light to the objective lens 71. The lens barrels 73 have different magnifications and are spaced apart, and are disposed at positions such that light passing through the objective lens 71 enters the corresponding barrel lens 73. The imaging unit 74 can image the light passing through any of the lens barrels 73. The light distribution unit 75 is disposed between the objective lens 71 and the lens barrel 73 to distribute the light passing through the objective lens 71 to the lens barrel 73. The light guiding unit 76 guides the light passing through one of the lens barrels 73 to the image pickup unit 74. The switching unit 77 can selectively switch the light path such that only light passing through one of the lens barrels 73 enters the image pickup unit 74. The frame 80 houses and supports at least the lens barrel 73. The barrel lens 73 may include a first barrel lens 731 and a second barrel lens 732, and the second barrel lens 732 is adjacent to the first barrel lens 731. The first barrel lens 731 and the second barrel lens 732 are only described in the example of 201248139, and the barrel lens 73 of the present invention may include three or more barrel lenses. The switching unit 77 includes a photoresist element 771 and a driving unit 772. The light blocking member 771 is slidable between a region between the image pickup unit 74 and the first barrel lens 731 and a region between the image pickup unit 74 and the second barrel lens 732 such that only the selected first lens barrel 731 is selected. Or the light that the second barrel lens 732 passes out enters the imaging unit 74. The driving unit 772 moves the light blocking member 771. In detail, the light blocking member 771 can be selectively positioned between the second half mirror 761 and the second barrel lens 732 or between the second mirror 762 and the first barrel lens 731. Therefore, as shown in FIG. 7, when the light blocking member 771 is located between the second mirror 762 and the first barrel lens 731, the light passing through the second barrel lens 732 enters the imaging unit 74, but passes through the The light of one of the barrel lenses 731 is blocked and cannot enter the imaging unit 74. Conversely, as shown in FIG. 8, when the light blocking member 771 is located between the second half mirror 761 and the second barrel lens 732, the light passing through the first barrel lens 731 enters the imaging unit 74, but Light passing through the second barrel lens 732 is blocked from entering the imaging unit 74. As such, the position of the photoresist element 771 can be adjusted such that only selected light rays that are emitted from the first barrel lens 731 or light that is emitted from the second barrel lens 732 can enter the imaging unit 74, and The first barrel lens 731 and the second barrel lens 732 have different magnifications. Therefore, by the simple operation of adjusting the light blocking element 771, the magnification of the image taken by the image pickup unit 74 can be controlled. The driving unit 772 of the second embodiment can be the same as the first embodiment. 15 201248139 As described above, in the optical detecting unit 7 of the present embodiment, the magnification of the light entering the imaging unit 74 can be controlled by a simple operation of adjusting the light blocking element 771. Therefore, the structure of the optical detecting unit 70 of the present embodiment and the control of the image magnification are simpler than the conventional ones in which it is necessary to replace the objective lens or the lens barrel lens to control the magnification of the image. Hereinafter, an optical detecting unit according to a third embodiment of the present invention will be described with reference to Figs. 9 to 11 . In the present embodiment, the same members as those of the first embodiment or the second embodiment are given the same reference numerals and will not be described in detail. As shown in FIG. 9, the optical detecting unit 7 of the present embodiment includes an objective lens 71, an illumination unit 72, a plurality of barrel lenses 73, an imaging unit 74, a light distribution unit 75, a light guiding unit 76, and a switching. Unit 90. The objective lens 71 is disposed facing the glass panel p. The illumination unit 72 provides light to the objective lens 71. The lens barrels 73 have different magnifications and are spaced apart. The position of the true setting allows the light passing through the objective lens 71 to enter the corresponding barrel lens 73. The imaging unit 74 can image light passing through any of the lens barrels 73. The light distribution unit 75 is disposed between the objective lens 71 and the lens barrel 73 to distribute the light passing through the objective lens 71 to the lens barrel 73. The light guiding unit 76 guides the light passing through one of the lens barrels 73 to the imaging unit 74. The switching unit 90 can selectively switch the light path ' so that the light passing through the objective lens 71 can enter only one of the lens barrels 73 at a time. The barrel lens 73 may include a first barrel lens 731 and a second barrel lens 732. The second barrel lens 732 is adjacent to the first barrel lens 73, the first barrel lens 731 and the second barrel lens. 732 is only for example, 201248139. The lens barrel 73 of the present invention may include more than three lens barrels. The switching unit 90 may include a plurality of transmittance conversion units 91, 92, which are respectively disposed corresponding to a barrel lens 73. In the present embodiment, the switching unit 90 includes a first transmittance conversion unit 91, a second transmittance conversion unit 92, and an energy application unit 93. The first transmittance conversion unit 91 is disposed between the first half mirror 751 and the first barrel lens 731, and the second transmittance conversion unit 92 is disposed at the first mirror 725 and the first barrel lens 73. Between 2, the energy application unit 93 can selectively apply energy to the first transmittance conversion unit 91 and the second transmittance conversion unit 92. The energy application unit 93 includes an energy supply 931, a connection line 932, and a switch 933. The connection line 932 connects the energy supply 931 to the first transmittance conversion unit 91 and the second transmittance conversion unit 92. The switch 933 is disposed on the connection line 932 and can selectively apply energy to the first transmittance conversion unit 91 and the second transmittance conversion unit 92. As shown in Figs. 10 and 11, the first transmittance conversion unit 91 and the second transmittance conversion unit 92 each include a pair of glass substrates 97, a transmittance conversion element 99, and an electrode layer 98. The transmittance conversion element 99 is disposed between the two glass panels 97. The two electrode layers 98 are respectively disposed between the transmittance conversion element 99 and the glass substrate 97. The transmittance conversion element 99 may comprise a polymer dispersed liquid crystal (PDLC). The polymer dispersed liquid crystal system is uniformly distributed in a polymer matrix. As shown in FIG. 11, in the transmittance conversion element 99, when energy is applied to the electrode layer 98 at 201248139, the liquid crystal is turned in one direction by the action of the electric field, and the alignment of the refractive index corresponding to the polymer matrix is in the direction. . Thereby, the transmittance conversion element 99 enters a first state. The first state causes light having an object shape to pass through the transmittance conversion element 99. As shown in Fig. 10, when energy is applied to the electrode layer 98, the transmittance conversion element 99 enters a second state which prevents light from passing through the transmittance conversion element 99. Further, the use of the polymer dispersion liquid crystal as the transmittance conversion element 99 for each of the transmittance conversion units 91, 92 is merely illustrative and is not intended to limit the present invention. For example, a liquid crystal can also be used as the transmittance conversion element 99. In addition, each of the transmittance conversion units 91, 92 can have various structural changes, for example, the liquid crystal can be KDP (KH2P04), ADP (NH4H2P04). ), BSO (Bil2SiO20), BTO (Bil2TiO20) or LiNb03. And the penetration of light can be based on certain conditions, such as the application of energy or the formation of an electric field. Therefore, when the first transmittance conversion unit 91 enters the first state by applying energy and the first transmittance conversion unit 92 enters the second state by suspending the application of energy, the light rays that have passed through the objective lens 71 enter. The first barrel lens 731' is blocked but cannot enter the second barrel lens 732. In this case, the optical path is as shown by path A of FIG. Conversely, when the first transmittance conversion unit 91 enters the second state by suspending the application of energy and the second transmittance conversion unit 92 enters the first state by applying energy, the light that has passed through the objective lens 71 Entering the second barrel lens 201248139 in this condition 732 'but will be blocked from entering the first barrel lens 73l 'the light path is as shown by path b in FIG. As described above, 'applying energy to the first or second transmittance conversion unit 91 or # in the optical detecting unit 7 of the present embodiment by 4% and applying energy to the other' allows light to enter The eve flute is selected from the lens barrel 731 or the first barrel lens 732, wherein the first barrel lens has a different magnification. Therefore, the magnification of the image taken by the camera can be easily controlled. Further, the optical detecting unit 70 of the present embodiment does not need to move a driving member of a member in the control of the magnification of the image taken by the image capturing unit, thereby avoiding impurities generated by the movement of the member or the actuation of the driving member. In order to avoid impurities contaminating the optical system or the glass panel p. Hereinafter, referring to Fig. 12, an optical detecting unit according to a fourth embodiment of the present invention will be described. In the present embodiment, the same members as those of the first, second or third embodiment are given the same reference numerals and will not be described in detail. As shown in FIG. 12, the optical detecting unit 7 of the present embodiment includes an objective lens 71, an illumination unit 72, a plurality of barrel lenses 73, an imaging unit 74, a light distribution unit 75, a light guiding unit 76, and a switching. Unit 90. The objective lens 71 is disposed facing the glass panel P. The light emitting unit 72 supplies light to the objective lens 71. The barrel lenses 73 have different magnifications and are spaced apart, and are disposed at positions such that light passing through the objective lens 71 enters the corresponding barrel lens 73. The imaging unit 74 can image light passing through any of the lens barrels 73. The light distribution unit 75 is disposed between the objective lens 71 and the lens barrel 73, 19 201248139 to distribute the light passing through the objective lens 71 to the lens barrel 73. The light guiding unit 76 guides the light passing through one of the lens barrels 73 to the imaging unit 74. The switching unit 90 can selectively switch the light path such that only light passing through one of the barrel lenses 73 enters the imaging unit 74. The barrel lens 73 may include a first barrel lens 731 and a second barrel lens 732, and the second barrel lens 732 is adjacent to the first barrel lens 731. The first barrel lens 731 and the second barrel lens 732 are merely illustrative, and the barrel lens 73 of the present invention may include three or more barrel lenses. The switching unit 90 may include a plurality of transmittance conversion units 91, 92, which are respectively disposed corresponding to a barrel lens 73. In detail, in the present embodiment, the switching unit 90 includes a first transmittance conversion unit 91, a second transmittance conversion unit 92, and an energy application unit 93. The first transmittance conversion unit 91 is disposed between the second mirror 762 and the first barrel lens 731 , and the second transmittance conversion unit 92 is disposed between the second half mirror 761 and the second barrel lens 732 . The energy application unit 93 can selectively apply energy to the first transmittance conversion unit 9A and the second transmittance conversion unit 92. The first transmittance conversion unit 91, the second penetration ratio conversion unit 92, and the energy application unit 93 are the same as the third embodiment. Therefore, when the first transmittance conversion unit 91 enters the first state by applying energy and the second transmittance conversion unit 92 enters the second state by suspending the application of energy, the first lens barrel 731 has passed through. The light enters the camera sheet it 74, but the light passing through the second barrel lens 732 is blocked from entering the camera unit 74. In this case, the optical path is as shown in path A of 201248139 12. Conversely, when the first transmittance conversion unit 91 enters the second state by suspending the application of energy and the second transmittance conversion unit 92 enters the first state by applying energy, it has passed through the second lens barrel. The light of the lens 732 enters the imaging unit 74, but the light passing through the first barrel lens 731 is blocked from entering the imaging unit 74. In this case, the optical path is as shown by path B in FIG. As described above, in the optical detecting unit 70 of the present embodiment, by applying energy to the first or second transmittance conversion unit 91 or 92 and suspending the application of energy to the other, it is possible to make only the selected one The light that is passed through the one of the barrel lens 731 or the second barrel lens 732 can enter the imaging unit 74, wherein the first barrel lens 731 and the second barrel lens 732 have different magnifications. Therefore, the magnification of the image taken by the image pickup unit 74 can be easily controlled. In addition, the optical detecting unit 7 of the present embodiment controls the magnification of the image taken by the image capturing unit 74, and does not require a driving member that moves a member, thereby avoiding the movement of the member or the actuation of the driving member. Impurities 'and thus avoid miscellaneous t-contaminated optical lines or glass panels. The technical features of all embodiments of the invention may be implemented separately or in combination. In addition, the optical detecting unit of the present invention can be applied to various devices, and the above-mentioned device testing device and the conductor substrate are merely exemplified, and the spirit of the invention and the _, (4) Any equivalent modification or modification that should be included in the scope of the patent application of the invention. 21 201248139 [Simplified description of the drawings] FIG. 1 is an array test device with an optical detecting unit according to a preferred embodiment of the present invention. 2 is a perspective view of an optical detecting unit according to a first embodiment of the present invention, FIG. 3 is a schematic view of the optical detecting unit shown in FIG. 2; and FIG. 4 is one of the optical detecting units shown in FIG. FIG. 5 and FIG. 6 are schematic diagrams showing the operation of the optical detecting unit shown in FIG. 2. FIG. 7 and FIG. 8 are not intended to be an optical detecting unit according to the second embodiment of the present invention, and FIG. 9 is the first embodiment of the present invention. 3 is a schematic diagram of an optical detecting unit of FIG. 10; FIG. 10 and FIG. 11 are schematic diagrams showing a transmittance conversion unit of the optical detecting unit shown in FIG. 9; Schematic diagram of an optical detecting unit of the embodiment. [Description of main component symbols] 10: Base 20: Test unit '21: Light-transmitting support 22: Test module 221: Modulator unit 22 201248139 222: Camera unit 223: Test Module support frame 23: probe assembly 231: probe assembly support frame 233: probe head 235: X-axis drive unit 236: Y-axis drive unit 30: load unit 40: unloading unit 50: support plate 51: blow hole 60: glass panel conveying unit 70: optical detecting unit 71: objective lens 72: light emitting unit 721: light source 722: third mirror 723: third half mirror 73: barrel lens 731: first barrel lens 732: second Lens barrel lens 74: imaging unit 75: light distribution unit 751: first half mirror 201248139 752: first mirror 76: light guiding unit 761: second half mirror 762: second mirror 77: switching unit 771: Light blocking member 772: driving unit 773: actuator 774: connecting member 775: moving block 776: connecting rod 777: guide rail 80: frame 81: slit 90: switching unit 91: first transmittance conversion unit 92: Second transmittance conversion unit 93: energy Application unit 931 : Energy supply 932 : Connection line 933 : Switcher 97 : Glass substrate 99 : Transmissivity conversion element 98 : Electrode layer 24 201248139 A : Path B : Path P : Glass panel