TWI334030B - Repair device and repair method - Google Patents

Description

1334030 IX. Description of the Invention: [Technical Field] The present invention relates to a composite device for detecting and repairing in a circuit wiring. The device is disposed on a liquid crystal display device (10), and an electrical display panel ^ Plasma Display Panel) 'and other flat panel displays (FpDs;

Display) on the substrate, etc. · 'anel ^ ^ [Prior Art] FPD substrates have recently increased in size and have become less expensive than the poor substrates that have appeared in the manufacturing process. The circuit wiring (repair device) is used to repair defects on the substrate. 、 , The following describes the manufacturing method before and after the repair of the money. In part of this process, defects are detected and used to test FpD on the entire substrate. Copen-circuit defect of the wiring and short-circuit defect electronic defect detection device (〇s (short) / Open circuit '^ tester' or automatic image inspection device (A0I device: Automatic optical inspection device) to determine its position: the results of detection and position measurement are stored in the computer as data. Based on this material, the shaft is repaired. 〇S measuring or automatic optical inspection and then confirming that the defect has been correctly repaired, thus making the process backward and the product yield is reduced. Recently, in order to increase the output, the safety has been developed. The repair device on the 〇s tester. However, in the manufacturing process, only a limited amount of space can be used to place the repair device, and the device has the need to reduce the volume. The device must also improve the yield. Low-cost. - The repair device disclosed in Japanese Patent Laid-Open Publication No. Hei 2 〇 2947 is an example of a conventional repair device. The conventional repair of the tester has three sets: a stand that supports an installed test unit, wherein the stand can be moved to the detection, set and repair position, and can be controlled to move on the three orthogonal axes. And rotating on a two-dimensional plane; a test device is set in each @不_ direction by applying power in the form of the detection bit 1334030. Therefore, in order to check all the paths and short-circuit defects, the feed probe head must be made 108 is in contact with all of the electrode pads. Therefore, in the above conventional device, the LCD substrate must be moved away from the support frame 1〇5 once and rotated, and then reinstalled on the repairing device. The LCD substrate has been moved away from the support frame 1〇5 and mounted on the repairing device at a rotation of 9 degrees. <Therefore, the above-mentioned prior art has the following disadvantages. In the above-mentioned prior art, on the FPD substrate The defect position is detected by the 0S job set in the previous step, and the repair county fixes the defect based on the detection (four) material, and fixes the defect. The repair result is returned to the previous step of the 0S tester to confirm the defect. Is it already Correctly repaired. However, this type has the following disadvantages: the repaired FPD substrate repaired = substrate) is returned to the previous step, which increases the working time and tact time. " 曰 - Some manufacturers have recently proposed to provide 修复 for the repair device, as shown in Figure 1 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The step of removing the i-base once and re-installing the substrate; the rotor device is required to be the device of the external rotation mechanism; the added cost _ increases the cost, and the working time is further increased. Contents] The purpose of the secret moon is to provide a repair device that can effectively enter the lcd substrate. The circuit has wiring, detects defects, and repairs defects without removing and reinstalling the base 2. The invention includes: a platform on which a substrate is mounted; a first and a second probe are moved in a first direction on a surface of the platform; and a second and a second are on the first and second elevated frames, And being movable in a second direction opposite to the direction of Guandi; and a repair unit, 7 1334030, a sheet of material, which is disposed at the first-high shelf so as to be capable of being at - - wherein the first and second probes Each of the sensor units and Force:: ίϊΓ; enough, moving in the second direction; - probe unit for; the test list 'and the sensor unit for detecting the flow to the current, both of which are listed on the platform portion; and the platform The rotating shaft of the driving unit is partially disposed in a direction orthogonal to the surface of the platform, wherein the upper portion is disposed on the scale-elevator and the second second probe sensor unit is disposed on the first-high frame The leaf:=;ΐThe second probe sensor unit is disposed on the elevated shelf of the second elevated frame: the unit is in the first-high shelf material ^, the second probe; the sensing probe sensor unit is respectively disposed in the first - and the "off" - the second of the intersecting directions to apply the applied voltage to the substrate of the test: each of the first -: - knife - moon is moved in the first direction; a probe unit , the early element, and a sensor unit for detecting the needle single and the sensor unit are both juxtaposed on the surface of one of the seats: two: moving the platform partially around The first probe-sensing unit is disposed in the first-high ;; the 'the second probe sensor unit is disposed on the The second high wood material, (4) on the 'the third Hehe boots in 8 3 &lt; between the and the repair order, the element is set in the f three elevated frame - and the second elevated - high structure: where the first ride The sensing 11 unit is left on the second overhead = truss side 'the second probe sensing, and the 11 unit system S is placed on the second high W frame side 'the second local frame is not located in the first The elevated frame and the two elevated frame=side ί, the repairing unit is disposed on the third elevated frame and the first and the fifth and the first 马* 口 马 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 The platform driving unit is configured to cooperate with the flat circuit: the measuring unit of the r substrate is the measuring unit that is disposed on the substrate, or the probe unit of the second unit 11 and the substrate The flow to this point 'and a voltage is applied between the two points to detect whether the current is measured early, and the straw detects a short circuit on the circuit wiring. The circuit of the substrate-measured substrate is disposed on the board of the substrate, and the probe unit and the base connected flow flow to the circuit connected to the tested unit of the substrate Wiring, thereby detecting an open circuit on the circuit wiring. =_The following structure: needle-level is solved by the solution; = lack = repair unit (four) - secret silk to more red short ϊ ΐ (4) The following structure. The towel-substrate test unit is the cell emission set on the substrate - The laser light green is the disconnected position of the unit under test, and the hunting is performed by chemical oxygen deposition (CVD). Substrate : =: base: The surface display substrate can be a substrate or an armor of a liquid crystal display device, and can be mined in a direction parallel to the sensor unit of the overhead. The probe can be moved in the k direction by applying a voltage to the substrate; the factory probe unit, the current flowing to the unit under test, both: two f-inductor unit 兀' for detecting the driving platform portion Around with: the table = face =: two

Wiring 2: The electric J touches the single substrate; the base substrate of the display device or the base substrate of the electric paddle display panel can also be displayed after the liquid crystal display = by the lower of the probe sensor unit of the sensing unit, ί The unit under test is in contact with two points, and a voltage is applied between the two points; a single order; when the scale is fine, the repair is performed.

Claims (1)

1334030 X. Patent application ffi: · 1. A repairing device comprising: a table on which a substrate is mounted; a first/first truss, in a first direction along a surface of the platform Moving; first and second probe sensor units respectively disposed on the first and second overheads and movable in a second direction intersecting the first direction about the overhead; a repairing unit for repairing the tested unit of the substrate, the first elevated frame being disposed to be movable in the second direction; wherein each of the first and second probe sensor units has: a platform portion capable of moving in the second direction; h second probe-needle unit and - induction 11 single former with externally applied electric dust to the base $丨^ early, the latter is used to detect flow to the measured The current of the unit, which is listed on the 5 hai platform part; A platform drive unit for driving the platform portion to rotate about a rotation axis in a direction orthogonal to the surface of the table. 2. The repairing device of claim 1, wherein: the repairing unit is disposed on the opposite side of the second elevated frame on the first elevated frame; the first probe sensor unit is disposed on The second elevated side of the first elevated frame and the second probe sensor unit are disposed on the first elevated side of the second elevated frame. 3. The repairing device of claim 1, wherein: the repairing device is disposed on the second elevated side of the first elevated frame; the first probe sensor unit is integrated with the repairing unit And the second probe sensor unit is disposed on the first elevated side 22 1334030 of the second elevated frame. 4. A repairing apparatus comprising: a table on which a substrate is mounted; first, second and third elevated frames movable in a first direction along a surface of the platform; first and second probe sensing Units are respectively disposed on the first and second overhead frames and are movable in a second direction intersecting the first direction of the overhead frame; and a repair unit for repairing the substrate to be tested a unit disposed on the third overhead to be movable in the second direction; wherein each of the first and second probe sensor units has: a platform portion movable in the second direction; a needle unit and a sensor unit, the former uses a voltage applied to the substrate under test, the latter is used to detect the current flowing to the unit under test, and the two are juxtaposed on the platform portion; and a platform driving unit And driving the platform portion to rotate about a rotation axis in a direction orthogonal to a surface of the one of the stages. 5. The repair device of claim 4, wherein: the first probe sensor unit is disposed on the second elevated side of the first elevated frame; the second probe sensor unit is disposed on The first elevated side of the second elevated frame; the third elevated frame is not located between the first elevated frame and the second elevated frame; and the repairing device is disposed on the first and the third elevated frame On the two elevated side. 6. The repairing device of claim 4, wherein: the first probe sensor unit is disposed on the second elevated side 23^34030 of the first elevated frame; the second probe sensor unit is The second elevated frame is disposed on the first elevated side of the second elevated frame, and the second elevated frame is not disposed on the first elevated shelf and the second elevated shelf. The repairing device is disposed on the third elevated shelf opposite to the first elevated shelf and the second elevated shelf. The repairing device according to any one of the first to sixth aspects of the invention, wherein the seat is provided with the seat, the second, the third and the third elevated; and the seat. Tsuruji Nine, use the financial and resignation shed in the first direction to move the 8. If you apply for patent scope! The repair device of any one of the six items, wherein: the unit to be tested is a circuit wiring disposed on the substrate; and the probe unit of the first or first pin sensor unit and the substrate are tested Touching the J point ' and applying a voltage between the two points to detect whether the current flows to the 7C again, thereby detecting a short circuit on the circuit wiring. 9. The repairing device of the invention of claim 6 to claim 6, wherein: the unit under test is a circuit wiring disposed on the substrate; and the two-probe sensing 11 single-handed-riding unit and the substrate The current is supplied, and the sense sensor of the probe sensor unit flows to the circuit wiring connected to the device under test of the substrate, and the circuit breaker is detected to be disconnected. The repairing device of any one of the items 1 to 6, wherein: the detecting unit is a circuit wiring disposed on the substrate; and the defective 5 y complex device emits a laser beam to a short-circuited position of the tested unit and The repairing device of any one of claims 1 to 6, wherein: the unit under test of the substrate is a circuit wiring disposed on the substrate; and the + repairing device emits a laser beam Repair to the disconnected position of the unit under test and by chemical black gas deposition. A repair apparatus in which the substrate 12 is a flat display substrate as in the first to sixth aspects of the patent application. In the repair device of claim 12, the towel data line and the gate line are connected by a metal wire in an array in the planar display substrate. H is the repair device of the patent item No. 12, and the flat substrate is the substrate of the liquid crystal display device or the substrate of the plasma display panel. 15·—- Kind of repair method, its _ such as the scope of the patent, the scope of the patent? The device is used to inspect the substrate towel miscellaneous path on the repairing wire, and the circuit wiring unit formed in the square direction has a plurality of circuit wiring units formed in the square direction, and the first and second probe sensing elements are used. To & in the first direction of the test circuit wiring, the lower part is judged to be broken: after the ___ second order; after the needle sensor unit, the - probe unit is current between the two points and two points Adding light, and detecting the shortness in the test circuit wiring in the first direction of the child between the two points. · Determining whether the short circuit exists: after rotating the second program to f sensor unit along the second direction, ???the probe unit and the two points between the two points are externally forceed and detected at the two points 25 1334030 26. The repair device of claim 23 or 24, wherein the substrate The unit under test is an electric/road arrangement provided on the substrate, and the probe unit 'transmits 1 to bundle the beam to the position where the solution element is rotated, and repairs 2 and 7 spears. 24 valves are thin, wherein the substrate is flat 28. The repair device of claim 27, wherein the metal wire is attached to the array of planar display substrates. And '', A-, and 29. The repairing device of claim 27, wherein the towel is a substrate of a liquid crystal display device or a substrate of a plasma display panel. , w soil 30 - a repair method, which uses a repair as in claim 23 or 24 to test and repair a short circuit in a substrate mounted on a table, the substrate having a plurality of Wherein the circuit wiring unit; the repair method includes moving the probe sensor unit to the unit under test;, &gt; when testing a short circuit in the circuit wiring in the first direction, whether the short circuit exists by =疋 by the following procedure After rotating the pick-up sensor unit located in the unit under test in the first direction, a probe unit is brought into contact with the unit under test on the substrate at two points, and a voltage is applied between the two points. And detecting a current flowing between the two points; when testing the short circuit in the circuit wiring in the second direction, the following procedure is used to determine whether the short circuit exists: rotating in the second direction After the probe of the unit under test is sensed as a unit, a probe unit is brought into contact with the unit under test of the substrate at two points, a voltage is applied between the two points, and electricity flowing between the two points is detected. 29 1334030 Stream And when the short circuit is detected, the repairing mobile device to fix the short-circuit and short-circuit position. Μ·. . The repair method of claim 30, wherein the substrate is a planar display substrate and the data lines and gate lines are connected to the array by metal lines. 32. The repair method of claim 31, wherein the voltage is applied between the two points is a neighboring/near electrode pad disposed at an end portion of the data line or the gate line, wherein the Two points are where the probe of the probe sensor unit contacts the unit under test of the substrate. XI. Schema: 30