CN1321756C - Optical treatment device - Google Patents

Abstract

An optical treatment device, wherein two sheets of lamp houses (12) are disposed so as to close the upper surface of a body (11), a transfer device is installed in the body (1) to transfer a glass substrate, the left side lamp house (12) is provided with both longitudinal end parts at the left side edge thereof supported on the body (11) through a hinge mechanism (16) and the right side lamp house (12) is provided with both longitudinal end parts at the right side edge thereof supported on the body (11) through a hinge mechanism (16), each hinge mechanism (16) is provided with a longitudinally extending lateral rotating shaft (163), each lamp house (12) is openable in both lateral directions, and lamps (19) are fixed to each lamp house (12) and the base parts (191) of the lamps (9) are arranged in one row at the front side of the lamp house.

Description

light processing device

technical field

The present invention relates to a photoprocessing device such as an ultraviolet treatment device used for cleaning or polishing of organic matter.

Background technique

For example, a color filter constituting a color liquid crystal display panel is manufactured by coating a red, green, and blue resist on a glass substrate, and cleaning is performed during the manufacturing process. In order to make the cleaning effect better, the wet cleaning method using pure water and the UV/O ₃ cleaning method are used for cleaning. The UV/O ₃ cleaning method removes organic matter by using ultraviolet light to degrade organic matter, and ultraviolet light to cause oxygen in the air to generate ozone and oxygen active groups to remove organic matter. It is an ultraviolet treatment method.

FIG. 10 is a schematic structural view of an example of a cleaning device for performing the above-mentioned cleaning step, and FIG. 11 is a perspective view of an opened state of an ultraviolet treatment device used in the cleaning device. This cleaning device is facing the front of the ultraviolet treatment device 50, and the infrared preheating treatment device 60 and the cooling treatment device 70 are arranged continuously on the left and right sides, and the wet cleaning treatment is arranged continuously on the right side of the cooling treatment device 70. The conveyor conveying processing device constituted by the device 80 is connected to the left and right processing devices for performing other processes to form a continuous production line.

As shown in Figure 11, in the body 51 of the ultraviolet treatment device 50, a conveying device with a plurality of conveying rollers 52 is provided, so that a plurality of glass substrates (not shown) as objects to be processed can be placed on the conveying The rollers 52 are conveyed sequentially in the direction of the arrows in FIGS. 10 and 11 . The opening on the upper surface of the body 51 can be opened or closed through the lamp chamber 53, and the lamp chamber 53 is provided with a plurality of ultraviolet lamp tubes 54 for ultraviolet treatment. The lamp chamber 53 is mounted on the rear wall of the main body 51 through a hinge 55 so that it can be opened and closed freely from the front of the main body 51 backward. between the front edge and the front wall of the body 51 .

However, such a light processing device requires periodic cleaning, inspection, and replacement of the transport rollers 52 and lamp tubes 54, and these maintenance operations are performed with the lamp chamber 53 opened as shown in FIG. 11 . In addition, when the conveying roller 52 made of resin that is less likely to damage the glass substrate to be processed is used, it is easily degraded by ultraviolet rays, heat, ozone, etc., and thus has to be replaced frequently.

Moreover, in the existing light processing device, the lamp chamber 53 is opened from the front to the rear, so the maintenance work can only be carried out from the front side of the main body 51 . Especially in recent years, along with the increase in size of glass substrates for liquid crystal panels, the overall size of optical processing equipment is also increasing. Faced with such development, if you can only work from the front of the equipment, your hands will not be able to reach the equipment. The rear part of the machine brings great difficulties to the maintenance work. In addition, the pole 56 for keeping the lamp chamber 53 in an open state straddles the upper portion of the object conveyance area, and therefore, there is a problem that dust falling from the pole 56 adheres to the object to be processed.

Contents of the invention

The present invention aims to solve the above problems, and an object of the present invention is to provide an optical processing device that facilitates maintenance operations such as cleaning and inspection of the interior and replacement of parts, even though the main body is bulky.

To this end, the present invention provides a light irradiation device, which has a body having an opening thereon, a lamp chamber covering the opening, a lamp tube installed in the lamp chamber, and a device for receiving light from the lamp tube. The conveying device for the object to be processed is characterized in that the lamp chamber is opened and closed around the rotation axis, the direction of the rotation axis is perpendicular to the direction of conveying the object to be processed, and the direction of the rotation axis is parallel to the The surface of the object to be processed.

According to such a structure, the lamp chamber can be opened laterally, so maintenance work can be performed from the back of the device body without being blocked by the lamp chamber, and maintenance is easy even if the device is large in size. In addition, since the maintenance work can be performed from the front and back of the main body, even if other processing devices are arranged on the left and right sides of the optical processing device, it is possible to form a production line that does not affect the ease of maintenance work.

Description of drawings

FIG. 1 is an overall front view of a glass substrate cleaning device.

Fig. 2 is a perspective view of the light processing device according to the present embodiment in a state where the lamp chamber is opened.

Fig. 3 is a partial side view of the light processing device in an open state of the lamp housing.

Fig. 4 is an enlarged side view of the hinge mechanism.

Fig. 5 is a front view of the light processing device in an open state of the lamp house.

Fig. 6 is a partially enlarged cross-sectional view of the lamp chamber in a closed state.

Fig. 7 is a partially enlarged cross-sectional view showing the installation structure of the end of the lamp tube.

Fig. 8 is a partially enlarged sectional view showing a closed state of a lamp housing of another embodiment.

Fig. 9 is a partial side view of a light processing device in an open state of a lamp house showing still another embodiment.

Fig. 10 is an overall front view of a conventional cleaning device.

Fig. 11 is a perspective view of a conventional optical processing device.

Detailed ways

Next, the present invention will be described, taking an embodiment adopted in an ultraviolet polishing device 10 for cleaning a glass substrate for liquid crystal display as an example, and will be described with reference to FIGS. 1 to 7 .

As shown in Figure 1, the cleaning production line is viewed from the front of the ultraviolet polishing device 10, and the infrared preheating device 31 is continuously arranged on the left side, and the cooling device 32 is continuously arranged on the right side, and then on the right side of the cooling device 32 The wet cleaning device 33 is arranged continuously on the side, and the unillustrated glass substrate corresponding to the object to be processed is sequentially conveyed from the left to the right as shown by the arrow in the figure.

The main body 11 of the ultraviolet polishing device 10 is box-shaped, with an opening on its top, and two lamp chambers 12 that can close the openings are disposed. In the inside of the main body 11, along its front wall 111 and rear wall 112, two conveyor frame walls 13 arranged in parallel are arranged in pairs, and a plurality of conveyor shafts extending along the front-to-back direction between the conveyor frame walls 13 14 is rotatably supported by bearings not shown. On each conveyor shaft 14, a plurality of rollers 15 made of fluororesin, for example, are respectively installed, and by driving the conveyor shaft 14 to rotate with a driving device provided in the main body 11, the objects placed on the rollers 15 can be transported. Glass base board.

Viewed from the front of the main body 11, the lamp chamber 12 on the left is shown in Figure 3, the front and rear ends of the left edge are supported by the front wall 111 and the rear wall 112 of the main body 11 through the hinge mechanism 16, the main body 11 The left half of the upper opening of the lamp housing 12 can be opened and closed to the left. The hinge mechanism 16, as shown in FIG. The horizontal rotation shaft 163 is connected and constituted, therefore, the left side lamp chamber 12 can be centered on the horizontal rotation shaft 163 in the closed position shown by the two-dot chain line in FIG. 5 and the solid line in the figure. Open and close by turning along the arrow direction 121 between the open positions shown. In addition, a lubricating member 164 is inserted between the lateral rotation shaft 163 and the support arm 162 .

On the other hand, the same is true for the lamp chamber 12 positioned on the right side as viewed from the front of the body 11. The front and rear ends of the right side edge are supported by the front wall 111 and the rear wall 112 of the body 11 through the hinge mechanism 16. The right half of the upper opening of 11 can be opened and closed laterally through the lamp housing 12 . The hinge mechanism 16, like the hinge mechanism on the left side, has a transverse rotation axis 163 extending in the front-rear direction of the main body 11. Therefore, the lamp chamber 12 on the right side can be centered on the transverse rotation axis 163 and double-sided in FIG. 5 . Between the closed position shown by the dashed-dotted line and the open position shown by the solid line in the figure, it is opened and closed by turning in the direction of the arrow 122 .

In addition, in the middle part of the left-right direction of the opening of the main body 11 and on the side of the hinge mechanism 16 of the two lamp chambers 12, there are respectively provided with detachable middle rods 17 extending in the front-rear direction, as shown in FIG. Two sealing elements 171 extending forward and backward are provided on the left and right sides of the top surface of these intermediate rods 17 . When each lamp house 12 is rotated to the closed position, its bottom panel 123 will be in close contact with the sealing member 171 of each middle rod 17 (for the middle rod 17 in the middle, its enlarged view is shown in FIG. 6 ). In addition, with respect to the bottom panel 123 of this lamp house 12, the sealing material (not shown) arrange|positioned at the top surface of the two conveyor frame walls 13 is also in close contact with it. In this way, the space below the lamp tube 19 (transportation space for the glass substrate) can be sealed to prevent leakage of ultraviolet rays, ozone, and the like.

In addition, between the front and rear ends of each lamp chamber 12 and the front wall 111 and the rear wall 112 of the main body 11 , struts 18 are respectively provided. The strut 18 is a well-known gas damping strut formed by the shaft 182 slidably accommodated in the cylinder 181, and always exerts an active force in the direction in which the shaft 182 protrudes outward from the cylinder 181, This active force helps the lamp housing 12 to turn in the opening direction, and can keep the lamp housing 12 in an open state.

A plurality of lamp tubes 19 for irradiating ultraviolet rays are arranged on a portion of the lamp house 12 that becomes the bottom surface when it is in the closed position. The lamp tube 19, as shown in Figures 2 and 3, is in the shape of a long bar whose length is approximately equal to the distance between the conveyor frame walls 13 as a whole, and the lamp head part 191 is positioned at the front side of the body 11. After the glass tube part 192 is bent back in the rear side of the main body 11 , it is bent back in the front side again, and then bent back in the back side to form an M-shaped zigzag lamp. Its lamp cap part 191 is fastened on the fixing part 20 that is arranged on the lamp house 12 by screws, and the rear end of the glass tube part 192 is shown in Figure 7, and is fixed on the lamp house 12 by the fixing clip 21 that is fastened by screws. on the bottom panel 123. A pair of wires (not shown) connected to the lamp head part 191 are concentrated on the front side of the lamp chamber 12, and after passing through the flexible snakeskin tube 22 arranged between the front end of the lamp chamber 12 and the body 11, It is connected to an unillustrated power supply unit inside the main body 11 .

In addition, a cooling water passage 23 is provided in the lamp chamber 12. As shown in FIG. part, and connected to the unshown cooling water supply device in the main body 11.

As the optical processing device 10 of the present embodiment configured as above, the glass substrate for liquid crystal display to which the resist is adhered as the object to be processed can be transported from the left side to the right side in FIG. 1 by driving the transport device. The glass substrate is heated when it moves to the infrared preheating device 31 , and the heated glass substrate enters the optical processing device 10 to which the present invention is applied, and polishes the resist therein. Next, the polished glass substrate enters the cooling device 32 for wet cleaning. In addition, in the light processing apparatus 10 of this embodiment, an ozone generator for supplying high-concentration ozone may also be provided, thereby performing polishing with higher efficiency. In addition, in order to improve the processing capability of the optical processing device, a heating function of active groups that promote the heating of the glass substrate and the generation of oxygen from ozone may be provided at the same time.

For this light processing device 10, the maintenance work of the conveying device, for example, the repair and inspection of the bearing of the conveyor shaft 14, the replacement of the conveying roller 15, etc., and the replacement of the lamp tube 19 are carried out by opening the lamp chamber 12. of. Each lamp house 12 is opened by rotating around the horizontal rotation shaft 163 extending forward and backward of the hinge mechanism 16, and therefore, is in a laterally opened state in which it is opened left and right as shown in FIG. 2 . Therefore, when maintaining the bearings and rollers 15 on the front side, the operator can stand on the front side of the main body 11 to perform operations; Work from the rear.

In addition, at the front end portion of each lamp chamber 12, screw holes for fixing the cap portion 191 of the lamp tube 19 on the lamp chamber 12 are arranged on the fixing portion 20 in a direction perpendicular to the transverse rotation axis 16 of the lamp chamber 12. , The lamp tube 19 is fixed on the fixing part by mounting screws. Therefore, as this device, even if the device is large in size, the lamp tube 19 can be easily replaced. For example, when the size of the glass substrate as the object to be processed is a conveying width of 1 m, for the existing device shown in FIG. The opposite side of 55 is arranged parallel to the opening and closing axis 55 and fixed with screws. Therefore, when the lamp house 50 is opened, the height of the screw part becomes higher (even if the opening angle is 30 degrees to 45 degrees, it reaches about 1.9m~ 2.5m), so it is necessary to set a footboard; in contrast, as this device, even if the opening angle of the lamp chamber 12 is 90 degrees, the position of the screw is only about 1.5m.

As described above, the apparatus of the present invention is particularly suitable as a processing apparatus capable of processing objects to be processed conveyed by a wide conveyor.

In addition, the optical processing device of this embodiment is different from the conventional structure shown in FIG. And the top of the rear wall 112, therefore, even if the grinding powder or lubricating oil mist of the shaft 182 falls from the support rod 18, it will not adhere to the object to be processed. Moreover, compared with the situation of installing across the conveying path in the past, it also has the advantage of being able to design the strut 18 regardless of the width of the conveying path. Therefore, in this embodiment, it is possible to use a strut 18 whose length is shorter than that of the existing device. pole. In addition, the connection position of the strut 18 on the body 11 can be any position of the front wall 111 and the rear wall 112 , and can also be fixed on the conveyor frame wall 13 . In addition, the pole 18 may be installed at both the front and rear of the lamp house 12 as in the present embodiment, or may be installed at only one of the front side and the rear side.

In addition, in the above-mentioned embodiment, the two lamp chambers 12 are arranged in pairs left and right, and the middle rod 17 extending forward and backward is provided on the body 11 so that it is on the opposite side of the lamp chamber 12 from the hinge mechanism 16. The side ends of the main body 11 are in contact with each other, therefore, the lamp chamber 12 can completely seal the upper opening of the main body 11 . Therefore, phenomena such as the leakage of ozone supplied into the conveyance path of the main body 11 and the leakage of ultraviolet rays emitted from the lamp tube 19 to the outside can be reliably prevented.

In addition, the lamp tube 19 in this embodiment uses an M-shaped zigzag lamp tube, therefore, all the lamp caps 191 of a plurality of lamp tubes 19 can be arranged near one end. As a result, the electrical wiring part can be arranged collectively at one end of the lamp house 12, and the cooling water supply and drainage pipeline can be arranged at the other end, thereby achieving a safe and rational design in which the electrical wiring part and the water circulation part are separated. .

This invention is not limited to the said Example, For example, it can implement various changes in the range which does not change the gist of this invention as follows.

(1) In the above-mentioned embodiment, two lamp chambers 12 are provided, but it is not limited thereto. It can also be made into a structure in which the entire body 11 is opened and closed with one lamp chamber, or can be made into more than three lamp chambers. The light chamber is opened and closed. The more the number of lamp chambers covering the same area, the smaller the width can be made, and thus the lower the height dimension in the open state can be. In addition, when a plurality of lamp chambers are provided, they may be opened in the same direction or may be opened in opposite directions. As a structure in which a plurality of lamp chambers are installed in this way, it is possible because the lamp chambers can be opened in the left and right directions.

(2) In the above-mentioned embodiment, two pieces of lamp chambers 12 are made into split type, and at the same time, an intermediate rod 17 is arranged between each lamp chamber 12, so that the bottom surface side of the lamp chamber 12 can be sealed; but for example Also as shown in FIG. 8 , for example, the bottom panel 123 of the lamp chamber 12 on the left side is made into a shape in which the lower half of the edge on the side opposite to the hinge mechanism 16 is completely removed along the front and rear, while the lamp chamber on the right side The bottom panel 123 of 12 is made into a shape in which the upper half of the edge on the opposite side of the hinge mechanism 16 is completely removed along the front and back, and a sealing member 17 extending along the front and back is configured on one or both of them. With such a structure, the area below the lamp chamber 12 (a space for transporting and processing glass substrates) can be sealed, thereby preventing leakage of ultraviolet rays and ozone.

(3) In the above-mentioned embodiment, the lamp tube 19 is an M-shaped tube, but it is not limited thereto. It may also be a U-shaped tube, or a straight tube with lamp caps at both ends. In addition, in this embodiment, the lamp cap portion 191 of the lamp tube 19 is fixed on the lamp housing 12 by screws, but it can also be fixed by installing hardware. The wavelength of the ultraviolet lamp varies depending on the application, but in the case of polishing and cleaning, it is appropriate to have a wavelength of 150-300nm. For example, a low-pressure mercury lamp with a wavelength of 185nm and 254nm and a shielding lamp with a wavelength of 172nm can be used. Type (bariya) discharge lamp. Thus, in the case of using such a lamp tube, the good maintainability of the device of the present invention can be brought into full play. In addition, when the power of the lamp tube is small, it is best to install a heating means for heating the object to be processed from the perspective of increasing the processing speed.

(3) The layout scheme of the lamp tubes 19 is not limited to the arrangement facing the same direction as shown in this embodiment, for example, they may also be arranged opposite to each other as shown in FIG. 9 . Here, the base portions 191 of the lamp tube 19 are located alternately at the front and back. In this way, it is possible to adapt to the width of the conveyance path which is about twice the tube length of the lamp tube 19, and even a particularly large glass substrate can be handled. Even if it is made into such a very wide structure, since the lamp cap portion 191 of the lamp tube 19 is positioned at the front end and the rear end of the lamp chamber 12, it is most suitable to adopt the structure of the present embodiment of the lamp chamber laterally open type and bring into play excellent performance. maintainability.

(4) In the above-mentioned embodiment, the present invention is applied to the ultraviolet polishing device that irradiates ultraviolet rays on the object to be processed for polishing, but the present invention can be widely used, no matter infrared rays, ultraviolet rays, or visible light, any Light is directly irradiated on the object to be processed or irradiated around the object to be processed, and the effect of the irradiated light is used to directly or indirectly process the object to be processed. For example, it can be applied to photolithography devices, thin film forming devices, In various devices such as ultraviolet cleaning equipment, ultraviolet curing equipment, and infrared heating equipment used in semiconductor manufacturing equipment, printing equipment, cleaning equipment, and oxidation equipment.

In particular, when the light treatment device is an ultraviolet treatment device for cleaning, polishing, surface material oxidation or activation, under the action of ultraviolet rays, the treatment chamber is prone to aging and other phenomena, and frequent maintenance operations are required, so it is suitable to use Device of the present invention. In addition, as an ultraviolet treatment device that uses an ultraviolet lamp and the action of ozone to treat the object to be treated, for example, with an ozone generator, aging is prone to occur in the treatment chamber due to the action of ozone, and frequent maintenance operations are required. The invented device is the most applicable.

(5) In the above-mentioned embodiment, the conveying device is constituted in the main body 11, and the processed object placed on the conveyor roller 15 is irradiated with ultraviolet rays while being conveyed, and the position where the processed object is placed is fixed or not It can be either a movable type or a movable type, but if the conveyor that transports the processed objects is directly used as a table for the processed objects, a more efficient production line can be constructed. In this case, as the light processing device of the present invention, it is preferable to dispose the conveyor so that the object to be processed can be transported in the left and right direction when viewed from the front facing the light processing device. Other processing units can be used to create production lines that are easy to maintain and highly efficient. In addition, as a conveyance means, it is not limited to a roller conveyor, A belt conveyor and a robot arm can also be used.

(6) The lamp house 12 is a support body for installing the lamp tube 19 used for irradiating light. Both can be like this embodiment, the structure in which the lamp tube 19 is installed in an exposed state, or a light irradiation window can be provided to form a whole lamp tube. Covered chamber structure. In the case of placing a plurality of lamp tubes, it is preferable to arrange the fixing parts for fixing the lamp tubes on the lamp housing such that they are aligned in the vertical direction with respect to the lateral rotation axis of the opening and closing lamp housing. This is because, by setting in this way, all the fixing parts of the lamp tube can be located on the front or rear side of the device, and the fixing part of the lamp tube is arranged at the position closest to the operator. Therefore, even if the device is large in size, the lamp tube Replacement work is also easy. Therefore, preferably, other fixing parts that need to be removed during maintenance, such as the irradiation window mounting screw holes, are arranged on the lamp house in a line vertically with respect to the lateral rotation axis of the lamp house.

(7) In the above embodiments, gas damping struts are used, but it is not limited to this, and oil damping struts can also be used. In addition, in the case of large volume and heavy weight of the lamp house, pneumatic damping can also be used. Cylinder for easy opening and closing operations. In addition, the struts are not limited to be arranged on the front and rear sides of the light chamber, and can also be arranged on only one of the front side and the rear side.

Possibility of industrial use

In the light processing device of the present invention, the lamp chamber is arranged to face the light processing device and can be opened and closed left and right with the axis of rotation as the axis of rotation. Therefore, maintenance can be performed from the front and rear of the device, even if it is a large-scale The device is also easy to perform maintenance operations such as the inside of the main body and the replacement of lamp house parts.

Claims (9)

1. light irradiation device, it has body, the lamp house that covers described peristome that peristome is arranged, the conveying device that is placed in the fluorescent tube in the described lamp house and carries light-struck object being treated of accepting described fluorescent tube in the above, it is characterized in that, described lamp house is the center folding with the rotating shaft, the direction of described rotating shaft is perpendicular to the direction of the throughput direction of described object being treated, and the direction of described rotating shaft is parallel to the face that makes described conveying device carry described object being treated.

2. light irradiation device as claimed in claim 1 is characterized in that, described lamp house can be that 90 modes of spending are opened with open angle.

3. light irradiation device as claimed in claim 1 is characterized in that, described light irradiation device also comprises the pole of the open mode that is used for keeping described lamp house, and described pole is not across above described conveying device.

4. light irradiation device as claimed in claim 3 is characterized in that, described pole be arranged between the antetheca of the leading edge portion of described lamp house and said body and/or be arranged on the rear edge portion of described lamp house and the rear wall of described body between.

5. light irradiation device as claimed in claim 1 is characterized in that, described light irradiation device has a plurality of described lamp houses, described a plurality of lamp houses with about paired mode be the clamshell type setting.

6. light irradiation device as claimed in claim 5, it is characterized in that, described light irradiation device has the intermediate bar of frame on described peristome, and when a pair of lamp house was closed, this marginal portion to a side opposite with described rotating shaft of lamp house all contacted with described intermediate bar.

7. light irradiation device as claimed in claim 5 is characterized in that, when a pair of lamp house was closed, this marginal portion to a side opposite with described rotating shaft of lamp house overlapped each other.

8. as each described light irradiation device in the claim 1 to 7, it is characterized in that described lamp house has a plurality of described fluorescent tubes, described fluorescent tube is the meander configuration fluorescent tube, and the cap part of described fluorescent tube is near an end setting of described lamp house.

9. as each described light irradiation device in the claim 1 to 7, it is characterized in that described lamp house has a plurality of described fluorescent tubes, described fluorescent tube chamber meander configuration fluorescent tube, the cap part alternate configurations of described fluorescent tube is in the both sides of described lamp house.

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