JP2008174389A - Apparatus for transporting plate-shaped work piece - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for transporting a plate-shaped work piece facilitated in manufacture thereof. <P>SOLUTION: The apparatus includes a blower unit 14 integrally provided with a dust-removal filter 12 to remove dust and a blowing means 13 to supply clean air through the dust-removal filter 12 to the undersurface 2a of a plate-shaped work piece 2, and a plurality of such blower units 14 are arranged in line in the transporting direction of the plate-shaped work piece 2 so as to constitute a blower type supporting means 3, and the clean air is supplied to the undersurface 2a of the plate-shaped work piece 2 transported horizontally or approximately in the horizontal condition, and the plate-shaped work piece 2 is supported without a contact. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a plate-like body conveying device provided with blower-type support means for supplying clean air toward the lower surface of a plate-like body to be conveyed and supporting the plate-like body in a non-contact state.

Such a plate-like body conveyance device is used for conveying a plate-like body such as a glass substrate for liquid crystal, and conventionally, as a device for conveying a plate-like body in a horizontal or substantially horizontal state, The propulsive force applying means for applying the propulsive force is configured to include a driving rotating body that applies propulsive force while supporting and supporting both ends of the plate-like body, and the both ends are contacted by the propulsive force applying means. The intermediate portion of the plate-like body that is supported and transported in a horizontal or substantially horizontal state is supported by the blower-type support means. The blower-type support means includes a large number of air ejection portions provided at predetermined intervals along the conveyance path of the plate-like body, and a supply source including a compression pump, and the compressed air from the supply source is supplied to the large number of air. A supply source and an air ejection part are connected by a supply pipe so as to be distributed and supplied to the ejection part, and compressed air ejected from the air ejection part is positioned between both ends of the plate-like body. The intermediate portion of the plate-like body is supported in a non-contact state (see, for example, Patent Document 1).
Further, as a means for conveying the plate-like body in a vertical posture or a posture close thereto, a propulsive force applying means for applying a propulsive force in the carrying direction applies a propulsive force while supporting and supporting the lower end portion of the plate-like body. It is configured with a drive rotating body, the lower end portion is contacted and supported by the propulsive force applying means, and the intermediate portion of the plate-like body conveyed in a vertical posture or a posture close thereto is supported by the blow type support means. It was. The blower-type support means includes a large number of air ejection portions provided at predetermined intervals along the conveyance path of the plate-like body and a supply source including an air blower and the like, and a large number of compressed air from the supply source is ejected. The supply source and the air ejection part are connected by a supply pipe so as to be distributed and supplied to the part, and the compressed air ejected from the air ejection part is supplied to the intermediate part of the plate-like body. It was comprised so that the intermediate part of this may be supported in a non-contact state (for example, refer patent document 2).

JP 2002-321820 A JP 2002-308423 A

In the conventional plate-shaped body conveyance device, the blower-type support means is configured to connect the supply source and a large number of air ejection portions arranged in the conveyance direction with a supply pipe, and thus the supply source and the large number of air ejection portions are connected. The complicated work of connecting the compressed air so that the compressed air does not leak is required, and the production of the plate-shaped body transporting apparatus has been complicated.
In addition, when the conveyance path of the plate-like body becomes longer, the number of air ejection portions provided at a predetermined interval along the conveyance direction increases. Therefore, a plurality of supply sources are provided at predetermined intervals along the conveyance direction. Compressed air is shared and supplied to a large number of air jets by the source. However, if a plurality of supply sources are provided in this way, the configuration becomes complicated accordingly, and the plurality of supply sources. This causes disadvantages such as the need for a space for arranging the.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a plate-shaped body conveyance device that can be easily manufactured.

According to claim 1, in the plate-shaped body conveyance device provided with blower-type support means for supplying clean air toward the lower surface of the plate-shaped body and supporting the plate-shaped body in a non-contact state, The blowing type support means includes a dust removing filter for removing dust, and a blowing means for supplying clean air through the dust removing filter toward the lower surface of the plate-like body.

  That is, the blowing type support means is provided with a dust removing filter for removing dust and a blowing means for supplying clean air to the lower surface of the plate-like body through the dust removal filter. Since the function of supplying clean air toward the lower surface is provided, the blower support means can supply clean air toward the lower surface of the plate-like body to support the plate-like body in a non-contact state. it can.

  Therefore, by making the dust filter large in the conveying direction of the plate-like body and in the lateral width direction orthogonal to the conveying direction, the air from the blowing means is made uniform using the resistance of the dust removing filter, and the lower surface of the plate-like body Since the number of dust removing filters to be connected can be reduced even if a ventilation path for connecting the blowing means and a number of dust removing filters is provided, the blowing means and the dust removing filter It is possible to provide a plate-like body transport device that can be easily installed and can be easily manufactured, for example, by reducing the number of locations where the slabs are connected and simplifying the work. It should be noted that normal air that is made more uniform by providing an air conditioning plate or the like on the lower side of the dust removal filter can be supplied to the lower surface of the plate-like body.

  According to claim 2, the propulsive force applying means for applying a propulsive force in the conveying direction to the plate-like body provides the propulsive force while supporting and supporting both ends of the plate-like body in a horizontal or substantially horizontal state. It is comprised including the drive rotation body to provide, The said ventilation type support means is comprised so that the intermediate part located between the both ends in the said plate-shaped body may be supported.

  That is, both end portions of the plate-like body are contacted and supported by the driving rotating body of the propulsion force applying means, and the intermediate portion located between the both end portions of the plate-like body is supported in a non-contact state by the blower-type support means. A propulsive force is applied to the plate-like body supported by the drive-rotating body and the blower-type support means by the drive-rotating body that contacts and supports both ends of the plate-like body.

  Accordingly, the drive rotating body supports the both ends of the plate in contact with each other in a stable state, and a propulsive force is applied by the driving rotating body to be supported, so that it can be conveyed in a stable state. In addition, the blower support means can support the intermediate portion of the plate-like body so as to suppress the slackness of the plate-like body while suppressing the breakage of the plate-like body, so that the plate-like body is supported in a stable posture. Therefore, the plate-shaped body can be transported smoothly.

  According to a third aspect of the present invention, the blowing type support means is configured by arranging blower units in which the dust filter and the blower means are assembled together in the conveying direction of the plate-like body.

  That is, the blower unit is integrally assembled with a dust removing filter for removing dust and a blowing means for supplying clean air through the dust removing filter toward the lower surface of the plate member. Since the function of supplying clean air toward the lower surface of the plate is provided, the transport unit can supply clean air toward the lower surface of the plate-like body to support the plate-like body in a non-contact state. . And the ventilation type support means is comprised by arranging the ventilation unit which assembled | attached this ventilation means and the dust removal filter integrally in the conveyance direction of a plate-shaped object.

Therefore, by simply arranging the blower unit in which the blower and the dust removal filter are integrally assembled in the transport direction of the plate-like body, clean air is supplied toward the lower surface of the plate-like body to be transported to To provide a plate-like body transporting device that can be installed in a non-contact state and can be easily installed, and thus can be easily manufactured. Can do.

  According to a fourth aspect of the present invention, the blast type support means includes a plurality of the dust filters arranged in the transport direction, and a ventilation path that distributes and supplies the air from the blast means to the plurality of dust filters. It is characterized by being.

  That is, since the air from the air blowing means is distributed and supplied to the plurality of dust removing filters by the ventilation path, the air can be distributed and supplied to the dust removing filter by a few air blowing means, so the number of air blowing means is reduced. By being able to do so, the wiring with respect to a ventilation means can be reduced and it can be simplified, or a ventilation type support means can be reduced in weight.

  According to a fifth aspect of the present invention, there is provided a transfer case that covers a transfer space that houses the blower-type support means and the transfer path of the plate-like body in a sealed state or a substantially sealed state, and the blower means is provided in the transfer case. It is configured to circulate the air in the conveyance space in a form in which the air inside is sucked and the sucked air is supplied as clean air toward the lower surface of the plate-like body through the dust filter. It is characterized by.

  That is, dust may enter the transfer space from the outside by covering the transfer space in which the blow type support means and the transfer path of the plate-like body are stored in a sealed state or a substantially sealed state in the transfer case. Less. Therefore, by providing the transport case, even if the plate-shaped body transport device is provided in a place where there is a lot of dust and the cleanliness is not so high, the cleanliness in the transport space can be maintained high over a long period of time.

  According to claim 6, the transfer case includes an air discharge unit that discharges a part of the air in the transfer space, and an air introduction unit that introduces external air into the transfer space. It is characterized by that.

That is, ventilation in the transfer space can be performed by discharging part of the air in the transfer space from the air discharge unit and introducing external air into the transfer space from the air introduction unit. Accordingly, it is possible to suppress an increase in temperature in the conveyance space due to exhaust heat from the blower-type support means and the temperature in the conveyance space can be maintained at an external temperature or a temperature close thereto.
In addition, by introducing external air from the air introduction unit into the conveyance space by the blower unit, the inside of the conveyance case is pressurized by introduction of the external air, and the inside of the conveyance case is pressurized, so that the air discharge unit and Part of the air in the transfer space is discharged from the gap of the transfer case.
Accordingly, since the inside of the transfer space is pressurized by the blower unit, air outside the transfer case can be prevented from entering the transfer space through the gap between the air discharge part and the transfer case, and the clean space in the transfer space can be prevented. The degree can be maintained for a long time.

  According to a seventh aspect of the present invention, there is provided an external discharge unit that removes dust discharged from the air discharge unit and discharges the air to the outside.

  In other words, the air in the transfer space discharged from the air discharge unit is discharged after the dust is removed by the external discharge means, and the discharge of the dust generated from the blower-type support means in the transfer space is discharged to the outside. By preventing by means, it is possible to increase the cleanliness of the air discharged from the inside of the conveyance space to the outside. Therefore, since the air produced outside from the conveyance space has a high degree of cleaning, even if the plate-like body conveyance device is disposed in a place with a high degree of cleanliness such as a clean room, the degree of cleanliness can be maintained high. .

According to claim 8, a storage case that covers the storage space for storing the drive means for the drive rotating body in the propulsion force applying means in a substantially sealed state is provided in a state adjacent to the lateral side of the transfer case, The air discharge portion of the transfer case is configured to discharge the air in the transfer space into the storage space, and the external discharge means sucks the air in the storage space and removes the air. It is characterized by being configured to discharge to the outside.

That is, a part of the air in the conveyance space is discharged from the air discharge unit into the storage space and mixed with the air in the storage space, and the air in the storage space in which a part of the air in the transfer space is mixed In addition to the dust generated from the blower support means and the like in the transport space, the dust generated from the driving means and the like in the storage space by the external discharge means Since the discharge to the outside can be prevented, the cleanliness of the air discharged from the storage space can be increased, and the cleanliness of the outside of the clean room or the like can be further maintained at a high level.
Further, when the air inside the storage case is discharged to the outside by the external discharge means, the inside of the storage case is depressurized due to the discharge of the air, and the inside of the storage case is depressurized, so that the gap between the air discharge unit and the storage case Thus, air is introduced into the storage space. Accordingly, since the storage space is decompressed by the external discharge means, it is possible to prevent the air in the transfer case having a relatively large amount of dust from being discharged outside the storage space from the gap between the air discharge portion and the storage case. The cleanliness outside the transfer space and the storage space of the clean room can be maintained for a long time.

  According to claim 9, in the state in which the blowing type support means allows the flow of the clean air in the plate-like porous body that allows the clean air that has passed through the dust filter to flow and the ventilation holes of the porous body, It is characterized by comprising a shielding part that closes the vent hole in the air flow direction view.

That is, in the state in which the flow of the clean air in the air holes of the porous body is allowed at the shielding portion, the air blowing holes are blocked in the view of the flow direction of the clean air, so that the blowing type support means is moved in the flow direction of the clean air. When viewed, the dust removal filter cannot be seen from the ventilation hole, so that the appearance of the blower-type support means, and hence the appearance of the plate-like body conveying device, is improved.
In particular, when a liquid crystal glass substrate is transported as a plate-like body, in order to perform inspections such as defect inspection, characteristic inspection, and edge inspection of the transported glass substrate, The surface facing the lower surface of the glass substrate is required to be black, but in the blower-type support means, the transport surface can be easily made black by making the porous body and the shielding part black. .

  According to the tenth aspect of the present invention, the upper and lower two-stage conveyance sections that convey the plate-like body are provided, and the upper conveyance section of the upper and lower two-stage conveyance sections opens the upper side of the lower conveyance section. Therefore, it is configured to be swingable upward with one end side as a fulcrum.

Even if the transport unit for transporting the plate-like body is provided in two upper and lower stages, the upper part of the lower transport unit is opened by swinging the upper transport unit upward with one end side as a fulcrum. The maintenance of the lower conveyance unit can be easily performed.
In addition, when the transport unit is arranged in two upper and lower stages, the transport case may be provided in two upper and lower stages, and the upper transport unit and the lower transport unit may be individually accommodated in the transport case. You may store a lower conveyance part in one conveyance case.

[Embodiment 1]
Hereinafter, the plate-like body conveying device according to the present invention is applied to a glass substrate for liquid crystal as a plate-like body, and the glass substrate is to be conveyed in a horizontal or substantially horizontal state. The case where the ventilation type support apparatus as a support means is comprised is demonstrated based on drawing.

  As shown in FIG. 1, the plate-shaped body conveyance device H uses the plate-shaped body conveyance units 1 arranged side by side in the conveyance direction of the glass substrate 2, and automatically or artificially conveys the glass substrate 2 on the upper side. Is transferred to the plate-like body transfer unit 1 located at the position, and the transferred glass substrate 2 is supported by the blower-type support device 3 and the propulsion force applying means 4, and the propulsive force applying means 4 is used for the transfer. The glass substrate 2 is conveyed from the side toward the lower conveyance side, and the glass substrate 2 conveyed to the plate-like body conveyance unit 1 located on the lower conveyance side is transferred to another location by a transfer machine or the like.

  As shown in FIGS. 2 and 3, each of the plate-like body transport units 1 supplies clean air toward the lower surface 2 a of the glass substrate 2 that is transported in a horizontal or substantially horizontal state, and makes the glass substrate 2 non-conductive. A blower-type support device 3 that supports in a contact state and a driving roller 9 as a drive rotating body that applies propulsive force while contacting and supporting both ends 2b of the glass substrate 2 are provided in the transport direction with respect to the glass substrate 2. And a case body 7 that covers a conveyance space A and a storage space B, which will be described later, in a substantially sealed state.

  As shown in FIGS. 3 and 4, the blower-type support device 3 includes a dust removal filter 12 configured by a ULPA filter that removes dust, and clean air toward the lower surface 2 a of the glass substrate 2 through the dust removal filter 12. A fan filter unit 14 as a blower unit integrally assembled with a blower fan 13 as a blower means for supplying the glass plate 2 is arranged in the transport direction of the glass substrate 2. That is, the fan filter unit 14 in the blower-type support device 3 includes two blower fans 13 arranged in the width direction orthogonal to the conveyance direction of the glass substrate 2 and one dust filter 12 that covers the top of the two blower fans 13. And the air conditioning plate 16 as a plate-like porous body that allows the clean air that has passed through the dust removal filter 12 to flow therethrough, and the fan-type support device 3 is arranged by the fan filter unit 14 that is arranged along the conveying direction. Is configured. The blower fan 13 is configured to be electrically driven such that the fan is rotationally driven by an electric motor provided in the blower fan 13, and the air conditioning plate 16 is provided with a vent hole 16a formed by punching.

  And the ventilation fan 13 is comprised so that the air below may be attracted | sucked and the air may be supplied toward right above where the dust removal filter 12 is located, and the air supplied toward the right above is dust removal. It passes through the filter 12, passes through the ventilation holes 16 a of the air conditioning plate 16, and is directly supplied as clean air to the intermediate portion 2 c on the lower surface 2 a of the glass substrate 2, and supports the intermediate portion 2 c of the glass substrate 2 with the clean air. It is configured. Further, the fan filter unit 14 sucks air in the transport case 5 and supplies the sucked air as clean air toward the lower surface of the glass substrate 2 through the dust filter 12 in the transport space A. It is configured to circulate air.

  The case body 7 includes a unit frame body 15 having a substantially rectangular shape in plan view for mounting and supporting the fan filter unit 14 and a pair of left and right storage frames provided at both ends of the unit frame body 15 along the conveying direction. 8 and a transport cover 20 provided from the upper end of the right storage frame 8 to the upper end of the left storage frame 8. Each of the storage frames 8 is formed in a substantially U-shape when viewed in the transport direction provided with an upper wall 8c, a lower wall 8b, and an inner peripheral wall 8a on the transport space A side, and is stored on the side opposite to the transport space A side. A cover 8d is provided.

That is, as shown in FIG. 3, the blower-type support device 3, the propelling force applying means 4, and the transport path of the glass substrate 2 are constituted by the unit frame 15, the inner peripheral wall 8 a of the storage frame 8, and the transport cover 20. A transport case 5 that covers the storage transport space A in a substantially hermetically sealed state is configured, and the driving roller 9 in the propulsive force applying means 4 is constituted by the upper wall 8c, the lower wall 8b, and the storage cover 8d excluding the inner peripheral wall 8a of the storage frame 8. A storage case 6 is configured to cover the storage space B in which the electric motor 10 serving as a driving means is stored in a substantially sealed state. The transport space A and the storage space B are communicated with each other by the upper transport plate-side transport unit 1 and the lower transport plate transport unit 1 arranged side by side in the transport direction. In the apparatus H, the plate-like body transport unit 1 located closest to the transport upper side is closed at the transport upper side end of the transport space A and the storage space B by the transport case 5 and the storage case 6 and is located closest to the lower transport side. In the plate-like body transport unit 1, the transport lower side ends of the transport space A and the storage space B are closed by the transport case 5 and the storage case 6. Further, the transport space A is configured to be opened upward by removing the transport cover 20, and the storage space B is configured to be openable by removing the storage cover 8d.

  The unit frame 15 includes a support frame portion 15a assembled with a frame member, and an air introduction port 18 that is positioned below the support frame portion and serves as an air introduction portion that introduces external air into the transfer space A. It comprises a plate-like plate-like frame portion 15b provided. The inner peripheral wall 8 a of the storage frame 8 is provided with an air discharge port 17 as an air discharge portion that discharges a part of the air in the transport space A to the storage space B. In addition, the lower wall 8b of the storage frame 8 is provided with an external discharge port 24 for discharging the air in the storage space B to the outside. The external discharge port 24 has an external discharge unit having a blowing function and a dust removal function. Sub blower unit 23 is provided.

  The conveyance space A and the storage space B are communicated with each other through the air discharge port 17, and the air discharged from the air discharge port 17 is discharged into the storage space B through the air discharge port 17. Become. Further, the air discharge port 17 is provided with a backflow prevention valve 21 that allows air flow from the conveyance space A side to the storage space B side and prevents air flow from the storage space B side to the conveyance space A side. ing.

  That is, air is circulated in the transfer space A by the blowing action of the blower fan 13 and the blowing action of the blower fan 13, and external air is introduced into the transfer space A from the air introduction port 18. A part of the air circulating inside is discharged from the air discharge port 17 into the storage space B, and a part of the circulating air inside the transport space A is exchanged. The air discharged into the storage space B is sucked by the sub blower unit 23, the air is removed from the dust, and discharged from the external discharge unit 24 to the outside.

Therefore, in the transport space A, the air in the transport space A is sucked and the sucked air is supplied as clean air toward the lower surface 2a of the glass substrate 2 through the dust removal filter 12 and the air conditioning plate 16. The air in the conveyance space A circulates. Further, external air is introduced into the transfer space A from the air introduction port 11 and the inside of the transfer space A is pressurized, so that a part of the air circulating in the transfer space A is stored in the storage space from the air discharge port 18. Part of the circulating air in the transport space A is exchanged by being discharged to B or discharged to the outside through a gap between the storage frame 8 and the transport cover 20 or the like. Therefore, since the transport space A is in a pressurized state, entry of air in the storage space B from the air discharge port 17 and external air from the gap between the storage frame 8 and the transport cover 20 is prevented. In addition, by exchanging a part of the air in the transfer space A, the temperature rise in the transfer space A can be suppressed.
In the storage space B, the sub air blower unit 23 discharges the air in the storage space B to the outside from the external discharge port 24, and the pressure in the storage space B is reduced, whereby the upper wall 8c and the storage cover 8d Air is introduced into the storage space B from the gap or the air discharge port 17 and the like, and a part of the air in the storage space B is exchanged. Therefore, since the storage space B is in a decompressed state, it is possible to prevent the air from entering the storage space B from the air discharge port, the gap between the upper wall 8c and the storage cover 8d, or the like. The temperature rise in the storage space B can be suppressed by exchanging a part of the air in the storage space B.

  Next, the propelling force applying means 4 will be described in detail. As shown in FIGS. 5 to 7, the storage space B includes a plurality of transmission shafts 27 arranged in the transport direction and interlocked with each other by a coupling 31, and the electric motor 10, and a storage frame. A number of output shafts 26 projecting toward the storage space B side and the conveyance space A side are supported on the inner wall 8a of the image 8 so as to be rotatable along the conveyance direction. The drive roller 9 provided with a large-diameter portion 9a is provided in a portion of the output shaft 26 protruding toward the conveyance space A, and a portion of the output shaft 26 protruding toward the storage space B is provided with a screw gear. A configured input gear portion 30 is provided. Further, one of the many transmission shafts 27 is provided with a spur gear 28, and this spur gear 28 is engaged with a gear portion of the transmission motor 10, and the transmission shaft 27 has a large number of outputs. An output gear portion 29 configured as a screw gear is provided corresponding to each shaft 26, and the output gear portion 29 of the transmission shaft 27 and the input gear portion 30 of the output shaft 26 are meshed with each other.

  In other words, the propulsion force applying means 4 includes the electric motor 10, the output shaft 26, and the transmission shaft 27, and is configured such that the drive roller 9 is rotationally driven by the transmission motor 10. Although not described in detail, the output shaft 26 is provided with a collar member that rotates integrally with a key member, and the output shaft 26 is rotatably supported on the inner wall 8 a of the storage frame 8.

  Therefore, as shown in FIG. 3, the glass substrate 2 is supported by the driving roller 9 of the propulsive force support means 4 in a state where both ends 2 b are in contact with each other, and the intermediate portion 2 c is not cleaned by the clean air of the blower-type support device 3. The propulsive force is applied by the driving roller 9 that is supported in a contact state and is rotationally driven, so that the large-diameter portion 9a of the driving roller 9 is transported while restricting positional deviation in the direction intersecting the transporting direction. It is conveyed along the direction.

  As shown in FIG. 2, the plate-like body transport means H is provided with an upper and lower two-stage transport section M that transports the glass substrate 2, and the upper transport section M of the upper and lower two-stage transport section M is In order to open the upper side of the lower conveyance section M, the upper end is pivoted about one end side as a fulcrum. That is, each of the plate-like body transport units 1 is provided with a transport case 5 in two upper and lower stages, and each of the transport cases 5 includes a blower-type support device 3 and a propulsion force applying means 4. The part M is stored. Then, by swinging the upper transport case 5 upward about the axis P, the upper transport case M is also swung upward together with the upper transport case 5, and the upper transport case 5 is positioned above the lower transport case 5. Is opened, and the inside of the transfer space A can be maintained from above by removing the cover 20 of the lower transfer case 5. In addition, as a usage form of the upper and lower two-stage transport unit M, the transport direction of the upper transport unit M and the lower transport unit M is reversed, and the glass substrate 2 is moved from the transport source by the upper transport unit M. In the lower transfer unit M, the glass substrate 2 that performs the same process, the defective glass substrate 2 or the like is transferred from the transfer destination to the transfer source, or the upper transfer unit M and the lower transfer unit M are transferred to the transfer destination. There is a mode in which the conveyance direction with the conveyance unit M is the same direction, and the plate-like body is conveyed from the conveyance source to the conveyance destination by the upper conveyance unit M and the lower conveyance unit M.

  Although not shown, the predetermined plate-like body conveyance device 1 located on the lower conveyance side forms a gap between the fan filter units 14 arranged in the conveyance direction so that the support portion of the transfer machine can enter. It is. Further, the plate-like body conveyance device 1 is provided with an ionizer that neutralizes negative ions generated from the plate-like body conveyance device 1.

[Embodiment 2]
Hereinafter, the plate-like body transport device according to the present invention is applied to a glass substrate for liquid crystal as a plate-like body, and the glass substrate is transported in a horizontal or substantially horizontal state. A case will be described with reference to the drawings in which a ventilation passage is provided to be distributed and supplied to a plurality of dust removal filters, and the dust removal filter and the air blowing means are separately provided to constitute the air blowing support means.
In addition, about the thing comprised similarly to Embodiment 1, the same code | symbol as Embodiment 1 is attached | subjected and description is abbreviate | omitted.

  As shown in FIG. 12, the plate-shaped body transport device H uses a plate-shaped body transport mechanism h arranged in the transport direction of the glass substrate 2. A blower support mechanism 43 is provided as blower support means for supplying clean air toward the lower surface 2a of the substrate 2 and supporting the glass substrate 2 in a non-contact state.

  The blower support mechanism 43 will be described in detail. The blower support mechanism 43 is composed of nine dust removal filters 12 configured by ULPA filters for removing dust, and toward the lower surface 2a of the glass substrate 2 through the dust removal filter 12. A blower fan 13 that supplies clean air and an air passage 44 that distributes and supplies air from the blower fan 13 to the plurality of dust removal filters 12 are configured. Further, as shown in FIGS. 13 and 14, a plate-like air conditioning plate 16 is provided so as to flow clean air that has passed through the dust removal filters 12 so as to cover the top of the three dust removal filters 12.

And as shown in FIG. 12, the said ventilation path 44 is formed with the hard duct, and guides the air from the ventilation fan 13 to the horizontal direction and the horizontal ventilation path 45 which guides the air from the ventilation direction in the horizontal direction. And a vertical ventilation path 46.
The horizontal ventilation path 45 is connected to the side wall of the fan case 47 that houses the blower fan 13. The horizontal ventilation path 45 extends from the fan case 47 toward the upper conveyance side and the horizontal ventilation path 45 extends toward the conveyance lower side. One is provided. Nine vertical air passages 46 are provided to connect to the nine dust removal filters 12 respectively.
The four vertical air passages 46 connected to the four dust removal filters 12 located on the upper side in the transport direction are respectively connected to the horizontal ventilation passages 45 extending on the upper side of the transport, and the four dust removal filters located on the lower side in the transport direction. Four vertical air passages 46 connected to 12 are respectively connected to a horizontal ventilation passage 45 extending toward the lower conveyance side, and one vertical air passage 46 connected to the dust removal filter 12 located in the middle of the conveyance direction is provided as a fan case 47. Connected to the ceiling wall.
An inlet hole 47 a for introducing the air in the transfer space A into the fan case 47 is formed in the bottom wall of the fan case 47.

  As shown in FIGS. 13 and 14, each of the vertical air passages 46 is provided with an air volume adjusting valve 48 that can swing around the horizontal axis, and by swinging the air volume adjusting valve 48, The amount of air supplied to the dust filter 12 side can be adjusted. In addition, a chamber chamber C for storing air from the blower fan 13 is formed at the upper end portion of the vertical blower passage 47, that is, a portion connected to the peripheral wall portion of the dust removal filter, and the air supplied from the blower fan 13 is formed. Even if pulsation occurs, the pulsation can be suppressed by a cushioning action caused by the pressure in the chamber chamber C being increased or decreased.

  The blower-type support mechanism 43 is divided into three parts in the horizontal ventilation path 45 so that the number of the dust removal filters 12 is three, and one main body provided with the blower fan 13 as shown in FIG. It is comprised by the ventilation type support mechanism part 43a and the two sub ventilation type support mechanism parts 43b which are not equipped with the ventilation fan 13 as shown in FIG. Further, the plate-like body transport mechanism h is composed of three units, and as shown in FIG. 13, one main plate-like body transport unit 1a having a main air blow type support mechanism 43a, and FIG. As shown, it is composed of two slave plate-like body transport units 1b each having a slave air support mechanism 43b. When the main blower-type support mechanism 43a is assembled to the main plate-like body transport unit 1a, or when the blower-type support mechanism 43b is assembled to the sub-plate-like body transport unit 1b, a blower fan, a dust removal filter, a ventilation Each road is assembled individually. Each of the main plate-like body transport unit 1a and the slave plate-like body transport unit 1b is also provided with the propulsive force applying means 4 and the case body 7, but has the same configuration as that of the first embodiment. Therefore, detailed description is omitted.

Accordingly, the plate-like body transport mechanism h is assembled by connecting the sub-plate-like body transport unit 1b to the upper and lower transport sides of the main plate-like body transport unit 1a. By assembling h, the horizontal ventilation path 45 of the main ventilation type support mechanism 43a and the horizontal ventilation path 45 of the secondary ventilation type support mechanism 43b are connected, and the ventilation type support mechanism 43 is also assembled.
The plate-like body transport mechanism h is constituted by one unit of the main plate-like body transport unit 1a, or the main plate-like body transport unit 1a and the main plate-like body transport unit 1a on the one side in the transport direction. It may be configured by two units connected to the unit 1b. In this case, the end portion of the lateral ventilation path 45 which is not connected in the main plate-like body transport unit 1a is closed.

  The support of the plate-like body by the blower-type support mechanism 43 sucks the air in the conveyance space A below the blower fan 13 by the blower action of the blower fan 13 and takes it into the fan case 47 from the introduction hole 47a. The taken-in air is sent to the dust removal filter 13 side through the ventilation path 44, and is supplied to the intermediate portion 2c on the lower surface 2a of the glass substrate 2 through the dust removal filter 12 and the air conditioning plate 16 as clean air. The intermediate part 2c of the glass substrate 2 is supported by.

  In the main plate-shaped body conveyance unit 1a, the air is supplied to the lower surface 2a of the plate-shaped body 2 through the ventilation path 44, the dust removal filter 12, and the air conditioning plate 16 by the air blowing action of the blower fan 13, and in the main plate-shaped body conveyance unit 1a. Air circulates in Further, external air is introduced into the transport space A from the air introduction port 11 by the air blowing action of the blower fan 13 and the inside of the transport space A is pressurized, so that a part of the air circulating in the transport space A is A part of the air circulated in the conveyance space A is exchanged by being discharged to the outside through the air discharge port 17 or the gap between the storage frame 8 and the conveyance cover 20.

  Further, in the sub-plate-shaped body transport unit 1b, air is introduced from the main plate-shaped body transport unit 1a side through the ventilation path 44 to the sub-plate-shaped body transport unit 1b side by the blowing action of the blower fan 13. The introduced air is supplied to the lower surface 2c of the plate-like body 2 through the ventilation path 44, the dust filter 12, and the air conditioning plate 16, and the sub-plate-like conveyance unit is introduced by introducing air from the main plate-like conveyance unit 1a side. Since the inside of the conveyance space A of 1b is pressurized, a part of the air in the conveyance space A is discharged to the outside through the air discharge port 17, the gap between the storage frame 8 and the conveyance cover 20, and the like. A part of the air in the space A is exchanged.

  Therefore, in the transfer space A of the main plate-like body transfer unit 1a and the sub-plate-like body transfer unit 1b, the air discharge port 17 and the storage frame 8 and the transfer cover 20 are pressurized by introducing air. It is possible to prevent the outside air from entering from the gap between the two. Further, since the external air is introduced into the transfer space A, the temperature in the transfer space can be maintained at the external temperature or a temperature close thereto.

[Embodiment 3]
Hereinafter, the case where the plate-shaped body conveyance device according to the present invention is applied to a glass substrate for liquid crystal as a plate-shaped body and the glass substrate is conveyed in a posture close to a vertical posture will be described based on the drawings.
In addition, about the thing comprised similarly to Embodiment 1 or Embodiment 2, the same code | symbol as Embodiment 1 or Embodiment 2 is attached | subjected, and description is abbreviate | omitted.

As shown in FIGS. 8 and 9, the plate-shaped body transport device H uses the plate-shaped body vertical transport units 33 arranged side by side in the transport direction of the glass substrate 2. Each of the plate-like body vertical transport units 33 supplies the clean air toward the lower surface 2a of the glass substrate 2 that is transported in a posture close to the vertical posture, and supports the glass substrate 2 in a non-contact state. And a timing belt 34 as a driving rotating body that applies propulsive force while contacting and supporting the one end 2d of the glass substrate 2 and is conveyed to the glass substrate 2 And a vertical-position propulsive force applying means 35 for applying a propulsive force in the direction.

  Next, the vertical posture propulsive force applying means 35 will be described in detail. As shown in FIG. 9, the vertical-direction propulsive force applying means 35 includes a driving wheel 36 that is positioned on the lower conveyance side and is rotated by the electric motor 40, a rotatable driven wheel 37 that is positioned on the upper conveyance side, The timing belt 34 wound around the drive wheel 36 and the driven wheel 37, an inner support wheel 38 for supporting the feed path portion of the timing belt 34 from the inner peripheral surface side, and a return path portion of the timing belt 34 It is comprised by the outer support ring 39 supported from the outer peripheral surface side.

  Therefore, the glass substrate 2 is supported with the one end 2d in contact with the outer peripheral surface of the timing belt 35 in the vertical conveyance propulsion force support means 35, and the intermediate part 2c is not in contact with the clean air of the blower-type support means 4. The propulsive force is applied by the timing belt 35 that is supported in a state and rotationally driven, and is conveyed along the conveyance direction.

  In the third embodiment as well, as in the first and second embodiments, the conveyance space that houses the blower-type support means 3 and the conveyance path of the glass substrate 2 is sealed or substantially sealed. A covering case may be provided.

[Another Example]
(1) In the first to third embodiments, the blower unit is provided with a shielding portion that blocks the vent hole in the flow direction of the clean air in a state in which the flow of the clean air in the vent hole of the porous body is allowed. May be configured.

  That is, as shown in FIGS. 10 and 11, the blower unit 14 includes a shielding plate 19 as a shielding portion further above the air conditioning plate 16, and the shielding plate 19 has a ventilation hole 16 a of the shielding plate 16 and clean air. Ventilation holes 19a are formed by punching at positions that do not overlap when viewed in the flow direction.

  Further, the positional relationship between the air conditioning plate and the shielding plate may be reversed, and the shielding portion is a shielding plate, and the air conditioning plate and the shielding portion are separately provided. Alternatively, the shielding part is integrated with the wind regulation plate by, for example, providing a tongue piece as a shielding part that closes the ventilation hole as viewed in the flow direction of the clean air while allowing the flow of clean air through the ventilation hole of the wind regulation plate on the lower surface. It is good also as a structure formed in.

(2) Although the ventilation path is configured with a hard duct in the second embodiment, the whole or a part of the ventilation path may be configured with a soft hose or the like. In addition, the air volume control valve is configured to be swingable around the horizontal axis so that the air flow supplied to the dust filter can be adjusted. However, the air volume control valve slides in and out of the air path. It may be configured to be movable so that the amount of ventilation supplied to the dust filter side can be adjusted.

  That is, as shown in FIG. 15, the longitudinal ventilation path 46 in the ventilation path 44 is configured by a hose, and the opening amount of the opening formed to communicate with the longitudinal ventilation path 46 of the lateral ventilation path 45 is adjusted. An air volume control valve 48 is provided so as to be slidable on the horizontal air passage 45, and the air volume supplied to the dust filter side can be adjusted by adjusting the amount of air flow of the air volume adjustment valve 48 with respect to the air path. May be.

(3) In the first embodiment and the third embodiment, the air blowing type support means is configured by a plurality of air blowing units in which the dust removal filter and the air blowing means are integrally assembled. Even if a ventilation path for guiding the air blown by the blowing means to the dust removing filter is provided and the dust removing filter 5 and the blower fan 6 are separately assembled and configured, the blowing type support means may be configured. Good.

(4) In Embodiment 1 and Embodiment 2 above, the transport cases are provided in two upper and lower stages, the transport sections are accommodated in the respective transport cases, and the transport sections are provided in the two upper and lower stages. The transport unit of the stage may be stored in one storage case. In this case, the storage case is divided into upper and lower parts, and the upper part of the transport case is swung upward around the fulcrum on one end side. You may comprise so that an upper conveyance part may rock | fluctuate upwards with an upper conveyance case. Alternatively, one transport unit may be housed in one transport case to have a single transport unit.

(5) In the first embodiment and the second embodiment, the propulsive force applying means for applying the propulsive force in the conveying direction to the plate-like body is propelled while the both ends of the plate-like body are supported in contact with each other. It is configured to include a drive rotating body that applies force, and the blowing type support means is configured to support an intermediate portion located between both ends of the plate-like body, but the glass substrate is supported by the blowing type support. You may support in a non-contact state only with a means.

(6) In Embodiment 1 and Embodiment 2 described above, both ends of the plate-like body are supported in contact with the driving rotating body of the propulsive force support means, and the driving rotating body that supports the contact is rotated. By providing a propulsive force to the plate-like body, the plate-like body is configured to be conveyed along the conveyance direction, but both ends of the plate-like body are supported by a rotating body that freely rotates, In such a state, it is supported in a non-contact state only by the blower-type support means, and the plate-like body is automatically or artificially transferred to the plate-like body conveyance device positioned on the upper conveyance side without providing the propulsive force applying means. It may be configured to apply a propulsive force in the transport direction to the preceding plate-like body by pushing up the preceding plate-like body using a force to perform Providing propulsive force in the transport direction to the plate-like body with the supplied clean air It may form. Furthermore, you may comprise so that the conveyance direction of a plate-shaped object may be set to an inclination direction, and a propulsive force may be provided with the weight of a plate-shaped object.

(7) In the third embodiment, one end of the plate-like body is supported in a contact state by the drive rotating body of the vertical-direction propulsive force support means, and the drive rotating body that supports and supports the plate is rotated. The plate-shaped body is configured to be conveyed along the conveying direction by applying a propulsive force to the body. However, one end of the plate-shaped body is supported by a rotating body that freely rotates, and is used for vertical conveyance. By using a force to transfer the plate-like body to the plate-like body conveyance device located on the upper side of conveyance automatically or artificially without providing a propulsive force applying means, by pushing up the preceding plate-like body You may comprise so that the propulsive force in a conveyance direction may be provided with respect to the preceding plate-shaped object, and the conveyance direction of a plate-shaped object is set to an inclination direction, and propulsive force is set | placed by the weight of a plate-shaped object You may comprise so that it may provide.

(8) In the first embodiment and the second embodiment, the drive rotating body that applies propulsive force while supporting and supporting both ends of the plate-like body may be configured by an endless belt-like body such as a timing belt, In the second embodiment, the driving rotating body that applies a propulsive force while contacting and supporting one end of the plate-like body may be configured by a driving roller. Moreover, in the said Embodiment 2, you may provide the sub propulsive force provision means which provides a propulsive force, contacting and supporting the other end part with respect to the one end part of a plate-shaped object with a drive roller or an endless strip-shaped body.

(9) In Embodiment 3 described above, the plate-like body is transported in a posture close to the vertical posture, but clean air is supplied to the intermediate portions on both sides of the plate-like body so that the plate-like body is transported in the vertical posture. You may comprise.

(10) In Embodiment 1 and Embodiment 2 described above, the transfer case is provided with the air discharge portion and the air introduction portion, and the transfer space is substantially sealed, but the air discharge portion and the air introduction portion are provided. Alternatively, the transfer space may be sealed.

(11) In the first to third embodiments, the dust removal filter is configured by the ULPA filter, but may be configured by another filter such as a HEPA filter.

(12) In the first to third embodiments, a glass substrate for liquid crystal is used as the plate-like body. However, a semiconductor wafer or the like may be used, and the shape and size of the supported body are limited to the embodiment. It is not something.

The perspective view of the plate-shaped object conveyance apparatus in Embodiment 1. FIG. Front sectional view of plate-like body conveyance device according to Embodiment 1 The partially expanded view of the front cross section of the plate-shaped object conveyance apparatus in Embodiment 1 Side surface sectional drawing in the conveyance space in Embodiment 1 Side surface sectional drawing in the storage space in Embodiment 1 FIG. 3 is a front cross-sectional view of the propulsive force applying means in the first embodiment. Side surface sectional drawing of the propulsion force provision means in Embodiment 1 The perspective view of the plate-shaped object conveyance apparatus in Embodiment 3. Side view of plate-like body conveyance device in Embodiment 3. Partially enlarged side sectional view of a blower unit in another embodiment Partially enlarged plan view of a blower unit in another embodiment Side view of plate-like body transport mechanism according to Embodiment 2. Side view of main plate-like body conveyance unit in Embodiment 2. Side view of sub-plate-like body conveyance unit in the second embodiment Side view of main plate-like body conveyance unit in another embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 2 Plate-like body 3 Air blow type support means 4 Propulsion force provision means 5 Transport case 6 Storage case 9 Drive rotation body 10 Drive means 12 Dust removal filter 13 Air blow means 14 Air blow unit 16 Porous body 16a Ventilation hole 17 Air discharge part 18 Air introduction part 19 shielding part 22 external discharge means 44 ventilation path A conveyance space B storage space H plate-shaped object conveyance device

Claims (9)

A plate-shaped body transport device provided with blower-type support means for supplying clean air toward the lower surface of the transported plate-shaped body and supporting the plate-shaped body in a non-contact state,
The blower support means includes a dust removal filter for removing dust, and an electric blower fan as a blower means for supplying clean air to the lower surface of the plate-like body through the dust removal filter along the conveyance path. A plate-like body conveying device configured to be arranged along the conveyance direction of the plate-like body below the plate-like body to be conveyed. Propulsive force applying means for applying a propulsive force in the conveying direction to the plate-like body includes a drive rotating body for applying propulsive force while contacting and supporting both ends of the plate-like body in a horizontal or substantially horizontal state. Configured,
The plate-shaped body conveyance device according to claim 1, wherein the blower-type support means is configured to support an intermediate portion positioned between both end portions of the plate-shaped body.   The air blowing support means includes a plurality of the dust removal filters arranged in the transport direction, and a ventilation path that distributes and supplies the air from the air blowing means to the plurality of dust removal filters. 2. The plate-like body conveyance device according to 2. A transport case that covers the transport space that houses the blower-type support means and the transport path of the plate-like body in a sealed state or a substantially sealed state;
The air in the transfer space is circulated in such a form that the air blowing means sucks air in the transfer case and supplies the sucked air as clean air toward the lower surface of the plate-like body through the dust filter. The plate-shaped object conveyance apparatus of any one of Claims 1-3 comprised so that it may make.   The plate shape according to claim 4, wherein the transfer case includes an air discharge unit that discharges a part of the air in the transfer space and an air introduction unit that introduces external air into the transfer space. Body transport device.   6. The plate-like body conveyance device according to claim 5, further comprising external discharge means for removing dust discharged from the air discharge unit and discharging the air to the outside. A storage case for covering the storage space for storing the drive means for the drive rotating body in the propulsion force applying means in a substantially hermetically sealed state, provided in a state adjacent to the lateral side of the transfer case;
The air discharge part of the transfer case is configured to discharge air in the transfer space into the storage space;
The plate-shaped body conveyance device according to claim 6, wherein the external discharge unit is configured to suck air in the storage space, remove the dust, and discharge the air to the outside.   In the state in which the air flow support means allows the flow of clean air in the plate-like porous body that flows clean air that has passed through the dust filter and the air holes of the porous body, the flow direction of the clean air The plate-shaped material conveyance apparatus of any one of Claims 1-7 comprised including the shielding part which block | closes a vent hole. A transport unit having two upper and lower stages for transporting the plate-like body is provided,
The upper conveyance unit of the upper and lower two-stage conveyance units is configured to be swingable upward with one end side as a fulcrum so as to open the upper side of the lower conveyance unit. 9. The plate-like body conveyance device according to any one of items 8.

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