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TWI370507B - Apparatus for processing a substrate - Google Patents

Apparatus for processing a substrate

Info

Publication number
TWI370507B
TWI370507B TW097143759A TW97143759A TWI370507B TW I370507 B TWI370507 B TW I370507B TW 097143759 A TW097143759 A TW 097143759A TW 97143759 A TW97143759 A TW 97143759A TW I370507 B TWI370507 B TW I370507B
Authority
TW
Taiwan
Prior art keywords
substrate
processing
Prior art date
Application number
TW097143759A
Other languages
Chinese (zh)
Other versions
TW200931572A (en
Inventor
Park Gi-Hong
Original Assignee
Semes Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semes Co Ltd filed Critical Semes Co Ltd
Publication of TW200931572A publication Critical patent/TW200931572A/en
Application granted granted Critical
Publication of TWI370507B publication Critical patent/TWI370507B/en

Links

Classifications

    • H10P72/0414—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
    • B05B13/0405—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads
TW097143759A 2007-11-21 2008-11-12 Apparatus for processing a substrate TWI370507B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070118944A KR100930887B1 (en) 2007-11-21 2007-11-21 Apparatus for processing a substrate

Publications (2)

Publication Number Publication Date
TW200931572A TW200931572A (en) 2009-07-16
TWI370507B true TWI370507B (en) 2012-08-11

Family

ID=40726358

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097143759A TWI370507B (en) 2007-11-21 2008-11-12 Apparatus for processing a substrate

Country Status (4)

Country Link
JP (1) JP5179324B2 (en)
KR (1) KR100930887B1 (en)
CN (1) CN101441989B (en)
TW (1) TWI370507B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102529274B1 (en) * 2018-04-11 2023-05-08 주식회사 디엠에스 Apparatus for supplying fluid and assembling method thereof and substrate process system using the same
CN111451942B (en) * 2020-05-27 2025-05-16 东莞市欧莱溅射靶材有限公司 Automatic sandblasting method for planar target material
CN118002335B (en) * 2024-04-08 2024-07-09 山东智宏新材料科技有限公司 Aluminum alloy door and window leakproofness drenches water check out test set

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4251894B2 (en) * 2003-03-24 2009-04-08 大日本スクリーン製造株式会社 Substrate processing equipment
JP4393941B2 (en) * 2004-07-30 2010-01-06 大日本スクリーン製造株式会社 Substrate processing equipment
JP2006135162A (en) * 2004-11-08 2006-05-25 Fuji Photo Film Co Ltd Spraying method and apparatus
JP2006287159A (en) * 2005-04-05 2006-10-19 Nikon Corp Gas supply apparatus, exposure apparatus, and device manufacturing method

Also Published As

Publication number Publication date
TW200931572A (en) 2009-07-16
JP5179324B2 (en) 2013-04-10
CN101441989A (en) 2009-05-27
KR100930887B1 (en) 2009-12-10
JP2009130353A (en) 2009-06-11
CN101441989B (en) 2010-09-22
KR20090052446A (en) 2009-05-26

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