TWI371064B - Substrate cleaning apparatus - Google Patents

Substrate cleaning apparatus

Info

Publication number: TWI371064B
Authority: TW; Taiwan
Prior art keywords: cleaning apparatus; substrate cleaning; substrate; cleaning
Prior art date: 2007-03-13

Application number

TW097108336A

Other languages

Chinese (zh)

Other versions

TW200842966A (en

Inventor

Young-Soon Yoon

Young-Min Yu

Original Assignee

Sfa Engineering Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-03-13

Filing date

2008-03-10

Publication date

2012-08-21

2007-03-13 Priority claimed from KR1020070024437A external-priority patent/KR100871135B1/en

2007-03-13 Priority claimed from KR1020070024438A external-priority patent/KR100879015B1/en

2008-03-10 Application filed by Sfa Engineering Corp filed Critical Sfa Engineering Corp

2008-11-01 Publication of TW200842966A publication Critical patent/TW200842966A/en

2012-08-21 Application granted granted Critical

2012-08-21 Publication of TWI371064B publication Critical patent/TWI371064B/en

Links

TW097108336A 2007-03-13 2008-03-10 Substrate cleaning apparatus TWI371064B (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
KR1020070024437A KR100871135B1 (en)	2007-03-13	2007-03-13	Substrate Cleaning Equipment
KR1020070024438A KR100879015B1 (en)	2007-03-13	2007-03-13	Substrate Cleaning Equipment

Publications (2)

Publication Number	Publication Date
TW200842966A TW200842966A (en)	2008-11-01
TWI371064B true TWI371064B (en)	2012-08-21

Family

ID=44822168

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW097108336A TWI371064B (en)	2007-03-13	2008-03-10	Substrate cleaning apparatus

Country Status (1)

Country	Link
TW (1)	TWI371064B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN105739243A (en) *	2016-04-22	2016-07-06	长葛市汇达感光材料有限公司	Fabrication method of light sensitive material plate
CN116237874A (en) *	2023-03-13	2023-06-09	宁波康强电子股份有限公司	Surface treatment method, polishing device and sandblasting device of lead frame board

2008
- 2008-03-10 TW TW097108336A patent/TWI371064B/en not_active IP Right Cessation

Also Published As

Publication number	Publication date
TW200842966A (en)	2008-11-01

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Legal Events

Date	Code	Title	Description
2019-05-21	MM4A	Annulment or lapse of patent due to non-payment of fees