TW200403014A - Method and device for treating flat and flexible work pieces - Google Patents

Abstract

The device in accordance with the invention and the method serve to treat flat and flexible work pieces 1 with a fluid, preferably in electroplating plants and etching facilities. The device and the method permit to place foil-type work pieces 1 in particular in such a manner into the fluid, a wet-chemical or electrochemical processing fluid for example, that the work pieces 1 will not deform or hit the side walls of a processing tank 3 or other built-in components. For this purpose, the processing tank 3 is assigned a protective carrier 5 into which the work pieces 1 are lowered, said carrier 5 being in a largely empty condition. For treatment, the protective carrier 5 is for example lowered into a tank 3 which is filled with processing fluid, said processing fluid flowing into the protective carrier 5. Means are provided on the protective carrier 5 by means of which the processing fluid is allowed to controlledly flow into the protective carrier 5.

Description

200403014 发明 、 Explanation of the invention ... The technical field to which the invention belongs The present device and method are used for processing flat plates and elastic workpieces in electroplating lines and etching facilities, and more specifically, during the wet chemical or electrochemical processing, The workpiece is immersed vertically in a processing tank. Prior art methods, particularly for processing thin workpieces such as printed circuit foils in wet chemical processing lines, plating lines and etching facilities, include, but are not limited to, method steps for cleaning, activating, electroplating, and post-processing the printed circuit foil. In a workpiece made of a non-conductive material inside, a printed circuit pattern and a through-plated hole are made in several processing steps. For specific applications, the foil thickness totals no more than 30 to 50 microns making these foils highly sensitive to mechanical stress. The surface of the workpiece is often soft, so the workpiece cannot be transferred between rollers. In this example, a vertical processing line such as a plating line is used. In these wires, the outer edge of the printed circuit foil is secured by clips, clips or screws for transport to a flight bar. Generally speaking, a plurality of foils are arranged on a step board in a side-by-side manner and sometimes also under each other. = For electrolytic deposition of the -conducting layer, connect the workpiece to the negative terminal of the -current source via the clip and the -ladder. To this end, a counter electrode (an anode in this example) is conductively connected to the positive electrode. The polarity is reversed during electrolytic etching. The workpiece is then subjected to anodic polarization. A conveyor slide, so that the workpieces in the work can be lowered into the respective immersion tanks, and the ladder plate which can fasten the workpieces is held and transported from one immersion tank to another immersion tank, and it is raised again after processing. Outside the dip tank

85747.DOC 200403014 The treatment tanks available for different processing operations are based on aqueous fluids. The fluid has a different surface tension depending on the composition. In order to lower a thin workpiece such as a foil into a processing tank, it needs to have the least rigidity and a surface that is as flat as possible. If this is not the case, when the foil is dropped into the fluid, for example in the horizontal direction, it will deviate due to the surface tension of the fluid, and it will collide with the outer edge of the tank or nearby components, such as anodes, heating devices, cooling devices, sensors and analog. Excessive deviation may cause the sensitive foil to deform or warp. Even the risk of short circuit in the electrolytic cell when the deviated foil touches an eiectric antipole. Therefore, the reason is the poor guiding effect of the clip or rack on the workpiece, or the lack of rigidity of the material. The foil's deviation can also be caused by the fluid in the tank caused by circulation pumps, air jets, and the like (opposite to the machine). Due to the constant need to reduce the thickness of the workpiece ', it is no longer immersed in, for example, a traditionally thicker workpiece. SUMMARY OF THE INVENTION An object of the present invention is to avoid the disadvantages of the conventional method. More specifically, the present invention provides a device for processing flat plates and elastic workpieces, which can ensure that the workpiece is lowered into a processing fluid without causing damage and without causing damage. method. The present invention provides a device according to the scope of the patent application and a method according to the scope of the patent application. It describes the preferred embodiment of the invention in the scope of the patent application according to the attached items. The disclosure and description of a process Before the present invention processes flat plates and elastic workpieces in a fluid without causing damage, please understand that the present invention is not limited to the specific devices, processing steps, and materials disclosed herein. These devices, processing steps, and

85747.DOC 200403014 Materials may vary slightly. It is also understood that because the scope of the present invention is limited only by the scope of the application, the terms herein are used to describe specific embodiments and: Limitation of tolerance. Therefore, it is possible to use various technical modifications and alternatives made by the technical device to fit the description of the following examples and drawings without departing from the scope of the present invention as defined by the scope of the patent application. = The device and the recipe according to the present invention, especially in the electric mine line and surname, sighed her with -fluid to process approximately vertically positioned flat plates and elastic workpieces. This device and method can put the shaped workpiece into the fluid, that is, the processing fluid (processing tank) without particularly deforming and / or significantly displacing it, so that it can be prevented from colliding with the processing groove (slot). Side walls or other built-in components. The device according to the invention comprises at least one protective carrier for holding a workpiece, which carrier can be received by a tank containing a fluid, and at least a device capable of flowing fluid into the protective carrier, so that at least During the filling process, the workpiece in the protective carrier is not deformed and / or significantly moved. The processing system is a processing fluid that can be used for wet etching and electrochemical processes. The fluid used can also be a gas, such as a heating machine for drying. For the sake of simplicity, the name "processing fluid" will be used in the following description to represent any fluid. To carry out the method according to the invention, for example, the workpiece is fastened to a ladder plate, which conveys the workpiece by a transport system To different processing tanks. According to the invention, the workpiece is therefore not lowered into the fluid but is first received in a protective carrier, such as the processing fluid that has been substantially evacuated. The protective carrier is transferred to the processing tank where it can be configured. Then , The method of protecting the carrier from filling the processing fluid will not substantially deform and / or shift the workpiece. Only then will the workpiece

85747.DOC 200403014 Exposure to processing fluid for processing. The protective carrier is composed of a material suitable for the chemical used and a predetermined cell temperature, such as a plastic material or a metal. The means for receiving the processing fluid in the protective carrier using gravity is at least one opening in the protective carrier. The protective carrier preferably includes side walls and a bottom wall, and the openings are evenly separated and distributed in these walls. The size of the openings allows the processing fluid to flow slowly into the carrier in a controlled manner without bending or pushing away from sensitive workpieces. The size of each opening (flow channel area) is preferably in the range of 1 to 500 square millimeters. In order to take into account specific requirements such as the different surface tension of the processing fluid used or the sensitivity of the workpiece, and where the surface tension may vary depending on the composition of the processing fluid, the openings in the protective carrier can be made different or accessible Be adjusted. For example, the flow channel area of the opening can be changed or adjusted by the displaceable baffle or orifice plate. Through the displacement of the baffle or the orifice plate relative to the opening, the position of the opening in the orifice plate relative to the opening position in the protective carrier wall can also be changed, so that the opening in the protective carrier is partially covered or closed. . As a result, the fluid entering the protective carrier and the volume flow rate of this fluid can be changed. The displacement of the baffle and orifice plate partially closes the openings in the protective carrier, reducing the inflow rate per unit time. The turbulence is, for example, a function of the flow velocity, and the turbulence occurs during the inflow of the processing fluid into the carrier in the processing fluid behind the openings protecting the carrier. In addition, the separated flow from the opening is directed towards the inside of the protective carrier and also creates turbulence when it meets. These turbulences can deform sensitive workpieces. The degree of influence of the turbulence on the workpiece depends, for example, on the orientation and distance of the workpiece relative to the turbulence or flow direction that occurs. In the case of the protective carrier, 85747.DOC -9- 200403014 ::: In the examples, the 'processing fluid only passes through the side walls of the protective carrier. In order to prevent bending of the workpiece which is particularly easy to deform, in this case, the flow of almost frontal impact on the workpiece will offset each other, so the worker will not deviate significantly from its position. in order to. For example, if the processing of the carrier during the raising process is quickly performed from the protective carrier, the bottom wall of the protective carrier may preferably be provided with a discharge blocking plate or a large-surface discharge gate and it may be raised by a lever or by a floating body, for example. It is automatically opened when the Bao-Zaizu is ascended and closed again when lowered into the tank. During the electrification process (by electroplating or electrochemical etching), the anode or cathode used for electroplating to form an electrolytic cell can be fastened to the carrier wall. More specifically, at this time, the Wait for the anode, for example, can't be ordered. The right protective carrier material has appropriate chemical resistance and electrochemical processing, and the wall itself can perform the function of an anode or a cathode. RIGHT This technique # Anode (opposite electrode) is fastened on the side of the groove next to the outer edge of the groove in a well-known manner. The protection carrier can also perform shielding in addition to protecting the workpiece from the manoeuvre. Due to the force of the electric field line, for this purpose, openings such as drill holes and the like in the protective carrier for receiving the processing fluid are preferably not provided in the peripheral regions of the protective carrier wall, or they can be compared in these regions. The medial ridge region of the wall has a smaller diameter and / or reduced number. In this way, the undesired concentration of the southern field line can be avoided in the peripheral area of the workpiece. In this example, since the electric field lines could not have penetrated into the carrier and reached the workpiece, the carrier material did not have conductive properties at least on its surface.

85747.DOC -10- 200403014 In order to fill the protective carrier after the workpiece has been received in the protective carrier or when it is introduced into the protective carrier, a hydrostatic gradient is generated to transport the processing fluid through different pool levels inside and outside the protective carrier To the protection carrier. There are various possibilities to generate this gradient by protecting the fluid levels inside and outside the carrier. The fluid in the processing tank, for example, can be displaced when the protective carrier is lowered into the tank. A processing slot may, for example, contain a static, i.e., securely mounted, protective carrier. In this example, a transport system is used to transfer the workpieces held on the pallets to the empty protective carriers in the empty slots. In this example, the process fluid is contained in a separate receptacle, for example, before the step is lowered into the empty slot, and after the step has been completely lowered into the processing slot and the workpiece has been deposited in the protective carrier, a A conveying system (a pump system or gravity) and a conduit convey the processing fluid to a slot space outside the protective carrier. When the wet chemical or electrochemical treatment is completed, the workpiece is lifted and transported from the tank to the next processing tank by a transport system. The process fluid is recirculated to the reservoir. The protective carrier is then ready to accept subsequent workpieces. In another embodiment, the protective carrier containing the workpiece can be lowered into the tank to obtain the fluid level difference in the tank, wherein the processing fluid is delivered to the tank only during or after the carrier is lowered. In this example, the process fluid is, for example, contained in a separate receptacle and the process fluid is pumped using a conveying system (a pump system or gravity) and a duct while the step containing the workpiece has been fully lowered into the tank or during its lowering. Conveyed to a trough space outside the protective carrier. The receptacle may be placed next to the processing tank as a separate unit or may be formed in or on the processing tank by a separate side compartment. A device such as a stirrer, heater, cold 85747.DOC -11-200403014 Cheryl or the like for processing this processing fluid may be installed in the receptacle. When the chemical or electrochemical treatment is completed, the pallets with workpieces are lifted out of the tank and the processing fluid can be recycled to the reservoir simultaneously. In another embodiment, the protective carrier may be lowered into a processing tank that already contains a workpiece to obtain a fluid level difference in the tank that has been filled with the processing fluid. The above method and device variants regarding alternative ways of delivering a protective carrier to a tank that has been or has not been filled with a processing fluid can be combined without limitation with the embodiments described below, which relate to the delivery of the protective carrier Way of entering and removing the processing tank. Various devices can be used to lower the protective carrier into, for example, a filled processing tank. The device preferably includes a static protective carrier sling associated with the trough to convey the protective carrier into the trough. In another preferred exemplary embodiment, a protection carrier spreader can transfer the protection carrier into the trough, and the protection carrier spreader is mounted to a transport carriage of a transport system for transporting a workpiece. In the case of a static protective carrier spreader, the K-Lift lifter lowers the protective carrier into a higher position when the ladder is lowered into the processing tank. In this position, the protective carrier has now been taken out of the processing tank and the processing fluid has been allowed to flow out to the extent that the workpiece will not be immersed in the processing fluid when lowered into the protective carrier. In order to allow the processing fluid to flow out quickly after processing, the discharge barrier or large surface discharge gate provided at the bottom of the protection carrier can be opened when the protection carrier is raised, for example, the discharge barrier or discharge gate is lifted by the lever. The movement may be automatically carried out through the floating body, and the movement may be automatically closed again through the lowering movement. Of course, the discharge blocking plate and the discharge gate can also be opened and closed by a motor or any other action such as a hand. 85747.DOC -12- 200403014 During processing, the protective carrier and the workpiece are preferably lowered into the processing tank simultaneously. Therefore, the degree of displacement of the fluid contained in the processing fluid can increase the fluid level in the tank, resulting in a difference in fluid level between the inside and outside of the protection carrier. As a result, it is possible to flow the processing fluid uniformly through the openings in the protective carrier without damaging the workpiece. Therefore, for example, a baffle can be used in the side wall of the protection carrier to change the area of the flow channel of the opening so that the area of the flow channel is matched with the spreader to reduce the speed of the workpiece, thereby controlling the inflow of the processing fluid in accordance with the nature of the workpiece Inflow. After processing, as is customary in such facilities, the workpiece is directly removed using a transport carriage spreader of the transport system. Then, the workpiece is transferred to the next processing tank by the movement of the destiny carriage. The protective carrier remains in the lower position in the processing tank until subsequent workpieces are ready to wait above the processing tank without hindering the movement of the transport carriage. In a specific embodiment of this variation of the present invention, a workpiece spreader that is usually mounted on a transport carriage can be eliminated. In this example, a spreader for protecting the carrier and the workpiece can be installed in each processing slot. After the spreader has raised the work piece outside the station and brought it to a higher position, the arriving transport carriage receives the work piece placed on the ladder. The raised protective carrier is lowered again by the spreader. At this time, the freely suspended ladder plate can be moved to the next processing slot, for example. Here, the protective carrier belonging to the tank is raised, receives the steps and lowers them into the processing tank. The transport carriage can then be moved to the next workstation. If a protective carrier sling is installed on the transport carriage, the protective carrier can be used to lower the protective carrier into and out of the processing tank. For this purpose, the transport carriage transports the processed workpieces to the processing tank. The protective carriers are stored in separate processing tanks before being loaded into the wet chemical bath. As is the case with this type of dip plant (85747.DOC -13- 200403014), the transport carriage arrives at the processing pond with the workpiece being raised. Unlike the prior art method of immediately lowering the ladder plate into the processing tank, the present invention proposes to first lift the protection carrier out of the processing tank with a protection carrier spreader to the extent that the workpiece is received by the protection carrier that is substantially emptied. Then, the steps and the protective carrier are slowly lowered at about the same speed as the processing fluid entering the processing station. Therefore, the processing flow system is uniformly transported to the protective carrier containing sensitive workpieces during the lowering into the groove without causing deviation or deformation of the workpieces. When removing it, only raise the ladder plate with the workpiece spreader. The protective carrier sling on the transport carriage and the protective carrier in the slot remain in the lower position and the transport carriage moves to the next processing station. In this second embodiment, a static spreader can be omitted on the processing station, and the overall height required almost corresponds to the requirements of the prior art dip plating plant. In a specific embodiment of this variation of the present invention, the protective carrier is fastened to the transport carriage so as to be vertically moved and moved along with the workpiece to respective processing stations. The structure of the protection carrier has at least two parts, and on the bottom and on two opposite side walls are provided with an automatically actuated blocking plate capable of opening the protection carrier at the bottom and sides as needed. Once the blocking plate is opened, the protective carrier is separated into two halves and it is suspended parallel to each other, fastened on the transport carriage and no longer completely surrounds the step plate with the workpiece. Preferably, the workpiece and the two halves are oriented approximately parallel to each other. In order to receive the workpiece, a foot lifting device or a ladder lifting device which is additionally arranged on the conveying carriage is used to pull the ladder holding the workpiece into the opened protection carrier when the ladder is raised. Once the ladder plate holding the workpiece has reached the higher position, the bottom and side barrier plates are closed and the two carrier halves merge to form a closed carrier. In this situation, the transport carriage moves to the next Canada

85747.DOC • 14- 200403014 The station and in which the closed protective carrier is lowered into the processing station along with the ladder and the workpiece. Once the processing fluid has completely entered the protective carrier, representing that the cell level is almost the same inside and outside the protective carrier, the bottom and side barriers are opened and the protective carrier is again raised by the protective carrier sling to a higher position and arrives. Protects the transport position of the carrier. The workpiece is processed and the transport carriage, together with the protective carrier, resumes movement to perform the next transport task. In order that the large turbulence in the pool fluid will not cause the sensitive workpiece to strongly deviate during the lifting process of the protection carrier, the side wall and the blocking plate must be constructed, for example, with 2 smooth edges, smooth surfaces and no protrusions to facilitate flow. In this embodiment, each processing station does not need to be provided with a protective carrier, but this characteristic has the disadvantage of bringing the processing fluid adhered to the protective carrier to the lower station separately. This defect can be mitigated, for example, by a sweeping or spraying device located on the transport carriage, which can remove or at least significantly reduce the amount of fluid that is stuck during the raising procedure. This embodiment is particularly suitable for cases where the pool fluid contained does not contain significant disadvantages, and it is, for example, transported from a flushing tank to the next tank, and transferring the workpiece to a multi-stage cleaning tank, for example, which has a very similar composition. The processing tank, or this embodiment is suitable for use even when the processing fluid "case" needs to be continuously withdrawn and it is, for example, to regenerate the tank composition. The closed baffle at the bottom of the protective carrier can be used as a drip tray during the carriage carriage movement. It is preferred that the processing flow system that has been shaken off by the movement action is collected by a closed baffle. The fluid is opened by the phase plate at the subsequent processing station. For this purpose, dregs can be provided for collection to prevent any residual flow in the processing station instead of, for example, directing to a wastewater treatment system. In another embodiment of the present invention, the protection carrier does not stay in place after processing

85747.DOC -15 · 200403014 in the pool. The protective carrier can be mounted to, for example, the π workpiece < ladder plate. To remove the workpiece for p, the protection carrier is on the side of I-μ, called one of the town-mounted halberds and the removal station. In this embodiment, the ladder plate is connected to the respective processing stations and is slowly moved into the pool, and the processing fluid flows into the protective carrier in a steadily manner. Put nails without deforming the workpiece. In this male example, the equipment cost is extremely low, but the other binding is called, and the amount of processing fluid from the residual flow that originally adhered to the openings and walls of the container was much larger. The Chinosaki belt factory can actually combine the different embodiments of the present invention together in a single key implementation. Figure 2 shows different processing stations 10 'and each of them contains a slot 3, 3, or 24β slot 3! Conduit 9 and one poly 8 contain,, e inverse demon king, and state 7. A static carrier 5 with an opening 6 that is firmly installed is connected to the groove 3. In contrast, a liftable protective carrier 5 having an opening 6 is connected to the groove 3. A processing system for the transportation workers is assigned to each processing station, and the transportation system is roughly composed of a carrying arm 23'-stair plate 2 and a holding device 4. In this example, the workpiece, which is a thin printed circuit, extends perpendicular to the drawing surface. For example, the ladder plate 2 which is a long-shaped copper rack is shown in the same way in the figure. It has a load arm 23, a transport processing station 10 for receiving the ladder plate 2 and sending it to the keypad. (Not pictured). The work 1 is fastened to the step plate 2 by the holding device 4. In this configuration, there is no protection carrier 5 connected to the tank 24, and the processing chain scheduled here may be performed in a gaseous environment, so the protection carrier 5 is generally not required. If there is a strong flow during this process, such as air circulation caused by a powerful fan

85747.DOC -16- 200403014 ’The protective load can also be used here, and I am 5 and the opening 6 is adjusted accordingly. Through the openings 6 and 6 in the side wall of the protective carrier 5, the processing fluid circulates to the protective carrier 5 at a controlled speed. The name is τ i. In the processing state, the grooves 3 and 3 'are filled with the processing fluid to the tank level 21 at the highest. Slot 3 "is loaded with the worker w during processing. When King King fluid is first contained in τ 7 for loading, the workpiece 1 is transferred to the processing tank 3 by a transport carriage, and the lowering is protected by emptying The carrier 5 neutralizes the groove. However, "moxibustion, pump 8 is used to pump the processing fluid from the reservoir 7 through the conduit 9 into the tank 3 ,. Tank 3 is filled with processing mud. At the same time, one of the internal and external fluids of the protective carrier 5 differs from each other to form a processed mud through the openings (5 into the protective carrier 5's heart. The speed of the fluid flowing into the protective carrier 5 is the output energy of the pump § It is a function and is determined by the size of the opening 6. In fact, it has a maximum value of (^ ⑹ to} meters / second. During the processing, the protection carrier 5 must also perform a strong current to keep away from the workpiece 1 Functional and strong currents are, for example, generated by filtering lines or stirring devices for uniformly distributing the temperature or for replenishing the solution. After processing, 'a spreader (not shown) will be used to hold the ladder plate holding the workpiece 1 firmly. 2 Lift out of the processing fluid, and the spreader is installed on the transport carriage and brought into a washing station, for example for subsequent processing. At the same time, the valve (not shown) is switched by the pump 8 or the tank 3 is used The height difference from the receptacle 7 causes the processing solution to be recirculated to the receptacle 7. In order to process the workpiece 1 in the tank 3, it is necessary to use a protective carrier hanger that is not shown and is static or mounted to a transport carriage First lift the protective carrier 5 out of the slot 3 and add After the fluid remaining in the tank 3. Increased protection and generally empty workpiece carrier 5 Shu has been received, the protection of the workpiece carrier 5 is lowered into a tank 3 with

85747.DOC -17- 200403014. Depending on the lowering speed of the S protection carrier 5, the processing flow system circulates to the protection carrier 5 in a controlled manner during the lowering process at a higher reduction speed by protecting the difference in fluid levels generated inside and outside the carrier 5. Fig. 2 shows a processing station 10 having a slot including-a static protection carrier 5 in a manner similar to Figure 1 (slot 3,), and the processing station 10 has-directly mounted to the slot < reservoir 25. Because the entire contents of the tank may not necessarily be pumped, the minimum amount of fluid contained in the reservoir 25 may be less than the actual capacity. According to the invention, in order to lower the workpiece 1 into the groove, only the processing fluid is pumped away from the center level of the remaining pool, and the level just reaches the lower edge of the workpiece 1 in the protection carrier 5. 3 shows an empty tank 24 and a processing station including a tank 3, wherein the tank 3 is not filled with processing fluid and is assigned a protective carrier 5. The processing station ⑺ is equipped with a protective carrier spreader (not shown), which is assigned to the slot 3 and can move the protective carrier 5 vertically up and down in the direction of arrow 26. The up and down poetry system approximately corresponds to the up and down movement of the ladder plate 2 holding the workpiece i. At this point, the ladder plate 2 is picked up by the transport carriage at its higher position. Then, the protective carrier 5 is raised at a higher position to receive the workpiece i inside it. At this time, there was almost no processing fluid in Protected Moon Bean 5. Then, the protective carrier $ and the workpiece 1 are lowered into the trough 3 slowly and almost simultaneously until they reach the predetermined position. In order to remove the work piece 1 after processing <, the protective carrier 5 is left in a lower position, and only the pallets 2 holding the work piece 1 leave the station by a spreader that transports the carriage. The processing station shown in Fig. 4 is rotated horizontally by ⑼ degrees compared to the previous figure, so the processing station can be seen from the loading side of the key 廒. The protective sling spreader is linked to a transport carriage shown in sections. In this embodiment, the protection carrier 5 is provided on both sides.

85747.DOC -18 · 200403014 A guide support 11 'is provided and the guide support u is leaned on the support surface 12 in a lowered position on the outer edge of the groove 3, thereby carrying the protective carrier 5. The carrying arm 17 is further mounted to the protective carrier 5 so that only the transport of the segments is shown = the protective carrier 5 is raised vertically by the receiving arm 18 and the traction system 2 (). In this embodiment, the carrying carriage has two A spreader, a workpiece spreader and a protective carrier spreader. This document does not exemplify general components of the spreader that are not described in detail in the operation of the present invention, such as a winding mandrel, a lifting gear Matanda, a guide for protecting the carrier, and the like. The workers are fastened to the ladder plate 2 by the holding device 4. The ladder board 2 has a load arm 23, so that the work piece and / or the ladder hanger can hold the ladder board 2 by the receiving arm 22 and raise or lower it. It is placed on the material support 13 on the ladder board and on the support surface 14 on the load-bearing device for protecting the carrier. The transport carriage is in a raised position to transport the workpiece 1 to a processing station containing a tank 3. Then, the protective carrier spreader raises the protective carrier 5 by a traction system 20 until the work piece is completely positioned therein, and the receiving arm 18 of the protective carrier spreader has been placed on the load bearing arm 10,000. The workpiece spreader has a lifting beam 15, and the protection carrier spreader is provided with a lifting beam 16. Arrow 26 represents the direction of pulling on the workpiece. When the protective carrier 5 is raised, the process flow system contained therein leaves the protective carrier 5 via the opening 6 and flows back into the tank 3. In order to quickly drain the fluid from the protective carrier 5, a 'discharge stopper plate 27 is provided at the bottom of the protective carrier and is automatically opened and raised during the lifting procedure, for example, by a lever (not shown) through a lifting action or by a floating body and Automatically closed again by lowering. The figure does not show how the discharge barrier is moved. After the protective carrier 5 has been emptied and reached a higher position, the carriage is transported

85747.DOC -19- 200403014 Use the workpiece spreader and the protective carrier spreader to slowly and simultaneously (that is, at almost the same speed) lower the protection carrier and the ladder plate into the groove 3 at the same time. When the processing fluid contained in the groove 3 is displaced, the pool level 21 rises out of the protection carrier $ and the fluid flows into the protection carrier 5 at a controlled speed according to the 6 groups of openings. Brief Description of the Drawings The device and method according to the present invention will be further described with reference to the drawings. The figure shows a separated processing station (slot) in a cut side view. In the figure: Figure 1 is a plating plant with and without a protective carrier and Side view of a slot containing a row of receptacles; Figure 2 is an enlarged side view of a slot containing a static protective carrier and a receptacle is directly mounted thereon; in a plating plant-slot opening Figure 3 contains a Schematic diagram of the static protection carrier spreader;

Protective carrier crane Schematic of a processing station in an eight-foot-one electroplating plant. Description of the representative symbols of the drawings 1 Work piece 2 Ladder plate 3 Slot for processing in a fluid (processing slot) 4 Slot for holding device for holding the workpiece on the step plate Receptacle

85747.DOC -20 · 200403014 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 Guide support on the carrier processing station support on the support surface on the processing station Guide support protection on the step board Lifting beam on the work surface of the carrier on the supporting device of the carrier. The lifting beam on the carrier of the carrier is protected by the lifting beam on the carrier. Protecting the load arm on the supporting device of the carrier-protecting the lifting beam of the carrier. Traction system for receiving the work piece spreader of the protection arm Traction system of the carrier spreader Pond position of the receiving arm of the lifting beam of the workpiece lifting beam The load bearing arm on the ladder plate for dry processing Slot container protection carrier and the movement direction of the ladder plate Emission blocking plate

85747.DOC -21-

Claims (1)

200403014 Patent application scope: L — A device for processing flat plates and elastic workpieces with a fluid, including at least one protection carrier (5) for holding these workpieces (1), the The protective carrier (5) is suitable for being received by a tank (3) containing the fluid for processing; and 11. at least one device that allows the fluid to flow into the protective carrier (5), so that the workpieces ( 1) Does not significantly deform and / or shift after having been received in the protective carrier (5). 2. The device according to item 1 of the claim 1 patent, wherein the fluid is a wet chemical or electrochemical processing fluid. 3. The device according to item 2 of the scope of patent application, wherein the device for receiving the processing fluid into the protective carrier (5) comprises at least one opening (6) in the protective carrier (5). 4. The device according to item 3 of the scope of patent application, wherein the protective carrier (5) includes a side wall and a bottom wall. The openings (6) are evenly separated and distributed above the side wall and / or the bottom wall. 5. The device according to any one of claims 3 or 4, wherein the size of each opening (6) is in the range of 1 to 500 mm. 6. For example, the device of claim 5 in the patent scope, wherein the openings (6) are provided with a removable baffle and / or orifice plate for changing its size. 7. The device according to item 4 of the patent application, wherein the openings (6) are not provided in the border area of the wall of the child protection carrier (5), or where the openings (6) are in the border area of the child It has a smaller diameter than that in the central areas. 87547.DOC 200403014 and / or a smaller number of settings in the boundary areas to achieve an electrical shielding relative to a counter electrode. 8. The device according to item 4 of the patent application, wherein the bottom wall has at least one discharge blocking plate (27) or at least one discharge gate. 9. The device as claimed in any one of claims 2 and 3, wherein at least one device for providing a gap between the inside and the outside of the protective carrier (5) of the processing fluid level is provided, so that the processing The fluid flows into the protective carrier (5). 10. The device according to item 9 of the scope of patent application, wherein the device for generating a level difference of the processing fluid inside and outside the protective carrier (5) comprises at least one receptacle (7) and at least one conveying system, Thereby, the processing fluid can be circulated from the receptacle (7) to a groove space located in the groove (3) and outside the protective carrier (5). 11. The device according to item 9 of the scope of patent application, wherein the device for generating a processing fluid level gap between the inside and outside of the protective carrier (5) includes at least one static protective carrier associated with the groove (3) A spreader, so that the protective carrier (5) can be transferred into the slot (3). 12. The device according to item 9 of the scope of patent application, wherein the device for generating a processing fluid level gap between the protective carrier (5) and the Xibu Department includes at least one installation to a transport for the workpiece (1) The protective carrier sling of the carriage, so that the protective carrier (5) can be transferred into the slot (3). 13. The device according to item 12 of the patent application scope, wherein the protective carrier (5) is made of at least two parts, and the at least two parts include an automatically actuable and can be lifted out of the slot on the protective carrier (5) ( 3) One of the bottom resistance plates and two 85747.DOC 200403014 which were opened before 14. 15. 16. 17. 18. 19 The opposite side resistance plates, these workpieces (1) remain in the groove (3). A method for processing flat plates and elastic workpieces with a fluid in a tank (3), comprising the following method steps: i. Receiving the workpieces (1) in a protective carrier (5); η. The protective carrier (5) Transfer to the tank (3) or arrange the protective carrier (5) in the tank (3); then iii. Fill the protective carrier (5) with the fluid so that the workpieces (1) are not significant Ground deformation and / or displacement; then iv. Treat the workpieces with the fluid (1). For example, the method according to item 14 of the patent claims, wherein the fluid is a wet chemical or electrochemical processing fluid and is supplied to the protective carrier (5) through at least one opening (6) located therein. For example, the method of claim 15 in which a gap between the level of the processing fluid is generated inside and outside the protection carrier (5) in order to fill the protection carrier (5) with the processing fluid, and the gap causes the processing fluid Flow into the protective carrier (5). For example, the method of claim 16 of the patent scope, wherein the protective carrier (5) is transferred to the tank (3) or the protective carrier (5) is disposed in the tank while the processing fluid is supplied to the tank (3). In the groove (3), the level of the processing fluid inside and outside the protective carrier (5) is generated. For example, the method of claim 16 in which the protection carrier (5) is transferred to the tank (3) containing the processing fluid, thereby creating a gap between the level of the processing fluid inside and outside the protection carrier (5). For example, the method of any one of items 17 and 18 of the scope of patent application, wherein the protective carrier (5) is transferred to the tank (3) using a static protection carrier spreader 85747.DOC 200403014 associated with the tank (3) ). 20. A method as claimed in any of claims 17 and 18, wherein the protective carrier (5) is transferred to the slot using a protective carrier hanger mounted to a transport carriage for the workpiece (1) (3). 21. The method as claimed in any of claims 17 and 18, wherein the process flow system flows from a receptacle (7) to a trough located in the trough (3) and outside the protective carrier (5) Space. 22. The method according to any one of claims 15 and 16, wherein the processing flow system circulates through the opening (6) of the protective carrier (5), the protective carrier (5) comprising a side wall and a bottom wall And the openings (6) are evenly separated and distributed above the walls. 23. The method according to item 22 of the patent application, wherein the openings (6) are not provided in the boundary area of the side wall of the protective carrier (5), or wherein the openings (6) are in the boundary areas Has a smaller diameter and / or has a reduced number of settings in such boundary regions to achieve an electrical shielding relative to a counter electrode. 24. For the method of claim 22, in order to fill the protective carrier (5) with fluid, the processing fluid can be made to flow through the openings (6) in the two side walls of the protective carrier (5), and the The side walls are oriented parallel to the workpieces. 25. The method according to any one of claims 15 and 16, in order to fill the protective carrier (5) with fluid, according to the mechanical sensitivity of the workpieces (1), a displaceable baffle and / Or an orifice plate to adjust the size of at least one opening 85747.DOC -4- 200403014 hole (6). 26. The method of claim 22, wherein in order to quickly discharge the fluid from the protective carrier (5) after processing, the bottom wall of the protective carrier (5) is provided with an opening and allows the processing fluid to pass through The at least one discharge blocking plate (27) or at least one discharge gate that has left. 85747.DOC