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RU2017126262A - ПОКРЫТИЕ НА ОСНОВЕ AlCrN, ОБЕСПЕЧИВАЮЩЕЕ ПОВЫШЕННУЮ УСТОЙЧИВОСТЬ К КРАТЕРНОМУ ИЗНОСУ - Google Patents

ПОКРЫТИЕ НА ОСНОВЕ AlCrN, ОБЕСПЕЧИВАЮЩЕЕ ПОВЫШЕННУЮ УСТОЙЧИВОСТЬ К КРАТЕРНОМУ ИЗНОСУ Download PDF

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RU2017126262A
RU2017126262A RU2017126262A RU2017126262A RU2017126262A RU 2017126262 A RU2017126262 A RU 2017126262A RU 2017126262 A RU2017126262 A RU 2017126262A RU 2017126262 A RU2017126262 A RU 2017126262A RU 2017126262 A RU2017126262 A RU 2017126262A
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coating
layers
multilayer film
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coating according
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Андерс Олоф ЭРИКССОН
Мирьям АРНДТ
Зебастиан ШТАЙН
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Ёрликон Серфис Сольюшнс Аг, Пфеффикон
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • C23C14/0647Boron nitride
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C23C14/14Metallic material, boron or silicon
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23C28/022Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer with at least one MCrAlX layer
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    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
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  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Gear Processing (AREA)

Claims (17)

1. Покрытие (210), нанесенное на поверхность подложки (201), содержащее многослойную пленку (216), состоящую из группы слоев А и группы слоев В, нанесенных чередующимися друг на друга и образующих структуру А/В/А/В/А…, в которой слои А содержат нитрид алюминийхромбора, а слои В содержат нитрид алюминийхрома и не содержат бора, и отличающееся тем, что:
многослойная пленка (216) содержит по меньшей мере первую часть (216а) и последнюю часть (216с), причем среднее содержание бора в первой части (216а) покрытия выше, чем среднее содержание бора в последней части (216с) покрытия, и
как в первой части (216а), так и в последней части (216с) покрытия присутствуют собственные напряжения сжатия, причем собственное напряжение сжатия в первой части (216а) ниже, чем в последней части (216с) покрытия.
2. Покрытие по п. 1, отличающееся тем, что среднее содержание бора в его первой части (216а) по меньшей мере в 1,2 раза выше, чем в его последней части (216с).
3. Покрытие по п. 2, отличающееся тем, что среднее содержание бора в его первой части (216а) по меньшей мере в 1,4 раза выше, чем в его последней части (216с).
4. Покрытие по одному из пп. 1-3, отличающееся тем, что среднее содержание бора в его первой части (216а) максимум в 6 раз выше, чем в его последней части (216с).
5. Покрытие по одному из предыдущих пунктов, отличающееся тем, что собственное напряжение сжатия в первой части (216а) покрытия составляет около 2,5 ГПа или ниже.
6. Покрытие по одному из предыдущих пунктов, отличающееся тем, что собственное напряжение сжатия в последней части (216с) покрытия составляет около 3 ГПа или выше.
7. Покрытие по одному из предыдущих пунктов, отличающееся тем, что собственное напряжение сжатия в последней части (216с) покрытия не превышает 8 ГПа.
8. Покрытие по одному из предыдущих пунктов, отличающееся тем, что слои А в многослойной пленке (216) имеют состав элементов, который без учета примесей описывается формулой (AlxCryBz)N, где х>0, y>0 и z>0 представляют собой соответственно концентрацию в атомных процентах алюминия, хрома и бора, если при оценке состава элементов в соответствующих слоях А учитываются только алюминий, хром и бор.
9. Покрытие по одному из предыдущих пунктов, отличающееся тем, что слои В в многослойной пленке (216) имеют состав элементов, который без учета примесей описывается формулой (AlvCrw)N, где v>0 и w>0 представляют собой соответственно концентрацию в атомных процентах алюминия и хрома, если при оценке состава элементов в соответствующих слоях В учитываются только алюминий и хром.
10. Покрытие по п. 7 или 8, отличающееся тем, что коэффициенты x, y и z в слоях А удовлетворяют условиям 1≤x/y≤4,5 и/или 0,01≤z≤30.
11. Покрытие по одному из пп.7-9, отличающееся тем, что коэффициенты v и w в слоях В удовлетворяют условию 1≤v/w≤4,5.
12. Покрытие по одному из предыдущих пунктов, отличающееся тем, что оно содержит несущий слой (212), собственное напряжение сжатия в котором равно соответствующему напряжению в первой части (216а) многослойной пленки (216) или ниже этого напряжения.
13. Покрытие по одному из предыдущих пунктов, отличающееся тем, что оно содержит наружный слой (220), собственное напряжение сжатия в котором равно соответствующему напряжению в последней части (216с) многослойной пленки (216) или выше этого напряжения.
14. Способ изготовления покрытия по одному из предыдущих пунктов, отличающийся тем, что по меньшей мере многослойную пленку (216) изготавливают с помощью методов физического осаждения из газовой фазы, предпочтительно с помощью метода электродугового ионного осаждения, а первую часть (216а) покрытия и последнюю часть (216с) покрытия в многослойной пленке (216) наносят, используя одну и ту же схему нанесения покрытия, включая одни и те же мишени и одни и те же параметры нанесения покрытия, за исключением потенциала смещения.
15. Способ по п. 14, отличающийся тем, что для нанесения первой части (216а) покрытия в многослойной пленке (216) используют отрицательный потенциал смещения, который по абсолютному значению ниже отрицательного потенциала смещения, используемого для нанесения последней части (216с) покрытия в многослойной пленке (216).
RU2017126262A 2014-12-22 2015-12-03 ПОКРЫТИЕ НА ОСНОВЕ AlCrN, ОБЕСПЕЧИВАЮЩЕЕ ПОВЫШЕННУЮ УСТОЙЧИВОСТЬ К КРАТЕРНОМУ ИЗНОСУ RU2712329C2 (ru)

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Application Number Priority Date Filing Date Title
DE102014018915.5A DE102014018915A1 (de) 2014-12-22 2014-12-22 AlCrN-basierte Beschichtung zur verbesserten Beständigkeit gegen Kolkverschleiß
DE102014018915.5 2014-12-22
PCT/EP2015/078553 WO2016102170A1 (en) 2014-12-22 2015-12-03 Alcrn-based coating providing enhanced crater wear resistance

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CN106191772B (zh) * 2016-08-09 2018-07-31 上海理工大学 一种含有多相AlCrN纳米插入层的高硬度CrAlN涂层及其制备方法
JP6766181B2 (ja) * 2017-01-16 2020-10-07 オーエスジー株式会社 工具
CN108504998A (zh) * 2018-04-17 2018-09-07 广东正德材料表面科技有限公司 一种制备自分层复合结构铬铝氮超硬膜的镀膜处理方法
CN108531869B (zh) * 2018-04-17 2020-06-16 广东正德材料表面科技有限公司 一种制备超硬Cr-Al-N涂层的镀膜处理方法
CN112055632B (zh) * 2018-05-30 2023-06-30 株式会社Moldino 包覆切削工具及其制造方法
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