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RU2010141751A - Элемент, покрытый твердым материалом - Google Patents

Элемент, покрытый твердым материалом Download PDF

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RU2010141751A
RU2010141751A RU2010141751/02A RU2010141751A RU2010141751A RU 2010141751 A RU2010141751 A RU 2010141751A RU 2010141751/02 A RU2010141751/02 A RU 2010141751/02A RU 2010141751 A RU2010141751 A RU 2010141751A RU 2010141751 A RU2010141751 A RU 2010141751A
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ДЕН БЕРГ Хендрикус ВАН (NL)
ДЕН БЕРГ Хендрикус ВАН
Хартмут ВЕСТФАЛЬ (DE)
Хартмут ВЕСТФАЛЬ
Фолькмар ЗОТТКЕ (DE)
Фолькмар ЗОТТКЕ
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Кеннаметал Инк. (US)
Кеннаметал Инк.
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Abstract

1. Элемент, покрытый твердым материалом и имеющий несколько слоев, нанесенных методом химического парофазного осаждения, отличающийся тем, что внешний слой содержит Ti1-xAlxN, Ti1-xAlxC и/или Ti1-xAlxCN, где 0,65≤x≤0,9, предпочтительно 0,7≤x≤0,9, причем этот слой имеет сжимающие напряжения в диапазоне от 100 до 1100 МПа, предпочтительно от 400 до 800 МПа, при этом под внешним слоем расположен слой TiCN или Al2O3. ! 2. Элемент по п.1, отличающийся тем, что слой Ti1-xAlxN, слой Ti1-xAlxC или слой Ti1-xAlxCN состоит из одной фазы и имеет кубическую структуру, или состоит из нескольких фаз и содержит наряду с кубической основной фазой другую фазу с вюрцитовой структурой, и/или содержит TiN. ! 3. Элемент по п.1 или 2, отличающийся тем, что во внешнем слое содержится до 30 мас.% аморфных компонентов слоя. ! 4. Элемент по п.1, отличающийся тем, что содержание хлора во внешнем слое находится в диапазоне от 0,01 до 3 ат.%. ! 5. Элемент по п.1, отличающийся тем, что внешний слой содержит несколько слоев, причем каждый из них имеет толщину от 1 до 5 нм и одинаковый или изменяющийся, предпочтительно, периодический состав, выбранный среди Ti1-xAlxN, Ti1-xAlxC или Ti1-xAlxCN, при этом этот внешний слой имеет общую толщину от 1 мкм до 5 мкм. ! 6.Элемент по п.1, отличающийся тем, что общая толщина всех слоев, нанесенных на тело подложки, сформированной из твердого сплава, металлокерамики или керамики, находится в диапазоне от 5 мкм до 25 мкм. ! 7. Элемент по п.1, отличающийся тем, что слой Ti1-xAlxN, слой Ti1-xAlxC или слой Ti1-xAlxCN содержит до 25% гексагонального AlN.

Claims (7)

1. Элемент, покрытый твердым материалом и имеющий несколько слоев, нанесенных методом химического парофазного осаждения, отличающийся тем, что внешний слой содержит Ti1-xAlxN, Ti1-xAlxC и/или Ti1-xAlxCN, где 0,65≤x≤0,9, предпочтительно 0,7≤x≤0,9, причем этот слой имеет сжимающие напряжения в диапазоне от 100 до 1100 МПа, предпочтительно от 400 до 800 МПа, при этом под внешним слоем расположен слой TiCN или Al2O3.
2. Элемент по п.1, отличающийся тем, что слой Ti1-xAlxN, слой Ti1-xAlxC или слой Ti1-xAlxCN состоит из одной фазы и имеет кубическую структуру, или состоит из нескольких фаз и содержит наряду с кубической основной фазой другую фазу с вюрцитовой структурой, и/или содержит TiN.
3. Элемент по п.1 или 2, отличающийся тем, что во внешнем слое содержится до 30 мас.% аморфных компонентов слоя.
4. Элемент по п.1, отличающийся тем, что содержание хлора во внешнем слое находится в диапазоне от 0,01 до 3 ат.%.
5. Элемент по п.1, отличающийся тем, что внешний слой содержит несколько слоев, причем каждый из них имеет толщину от 1 до 5 нм и одинаковый или изменяющийся, предпочтительно, периодический состав, выбранный среди Ti1-xAlxN, Ti1-xAlxC или Ti1-xAlxCN, при этом этот внешний слой имеет общую толщину от 1 мкм до 5 мкм.
6.Элемент по п.1, отличающийся тем, что общая толщина всех слоев, нанесенных на тело подложки, сформированной из твердого сплава, металлокерамики или керамики, находится в диапазоне от 5 мкм до 25 мкм.
7. Элемент по п.1, отличающийся тем, что слой Ti1-xAlxN, слой Ti1-xAlxC или слой Ti1-xAlxCN содержит до 25% гексагонального AlN.
RU2010141751/02A 2008-03-12 2009-01-20 Элемент для резания, покрытый твердым материалом RU2501887C2 (ru)

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DE102008013966A DE102008013966A1 (de) 2008-03-12 2008-03-12 Hartstoffbeschichteter Körper
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PCT/EP2009/000310 WO2009112116A1 (de) 2008-03-12 2009-01-20 Hartstoffbeschichteter körper

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Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009046667B4 (de) * 2009-11-12 2016-01-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtete Körper aus Metall, Hartmetal, Cermet oder Keramik sowie Verfahren zur Beschichtung derartiger Körper
DE102011003766A1 (de) 2010-02-09 2011-08-11 Schaeffler Technologies GmbH & Co. KG, 91074 Klemmscheibe sowie Nockenverstelleinheit
AT510963B1 (de) * 2011-03-18 2012-08-15 Boehlerit Gmbh & Co Kg Beschichteter körper und verfahren zu dessen herstellung
JP5472529B2 (ja) * 2011-03-31 2014-04-16 日立ツール株式会社 硬質皮膜被覆部材及びそれを具備する刃先交換式回転工具
JP5838769B2 (ja) * 2011-12-01 2016-01-06 三菱マテリアル株式会社 表面被覆切削工具
AT511950B1 (de) * 2012-03-14 2013-04-15 Boehlerit Gmbh & Co Kg Beschichteter Körper und Verfahren zum Beschichten eines Körpers
CN103372764B (zh) * 2012-04-20 2017-03-01 三菱综合材料株式会社 硬质包覆层发挥优异的耐崩刀性的表面包覆切削工具
JP5946016B2 (ja) * 2012-05-22 2016-07-05 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP5946017B2 (ja) * 2012-05-30 2016-07-05 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP5939508B2 (ja) * 2012-07-25 2016-06-22 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP5939509B2 (ja) * 2012-07-25 2016-06-22 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6090063B2 (ja) 2012-08-28 2017-03-08 三菱マテリアル株式会社 表面被覆切削工具
JP6037113B2 (ja) * 2012-11-13 2016-11-30 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6206133B2 (ja) 2012-11-30 2017-10-04 三菱マテリアル株式会社 表面被覆切削工具
JP6044336B2 (ja) * 2012-12-27 2016-12-14 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP5618429B2 (ja) * 2012-12-28 2014-11-05 住友電工ハードメタル株式会社 表面被覆部材およびその製造方法
JP6143158B2 (ja) * 2012-12-28 2017-06-07 住友電工ハードメタル株式会社 表面被覆部材およびその製造方法
US9103036B2 (en) 2013-03-15 2015-08-11 Kennametal Inc. Hard coatings comprising cubic phase forming compositions
JP6268530B2 (ja) 2013-04-01 2018-01-31 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6150109B2 (ja) * 2013-04-18 2017-06-21 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
DE102013104254A1 (de) 2013-04-26 2014-10-30 Walter Ag Werkzeug mit CVD-Beschichtung
US9896767B2 (en) 2013-08-16 2018-02-20 Kennametal Inc Low stress hard coatings and applications thereof
US9168664B2 (en) 2013-08-16 2015-10-27 Kennametal Inc. Low stress hard coatings and applications thereof
DE102014103220A1 (de) * 2014-03-11 2015-09-17 Walter Ag TiAIN-Schichten mit Lamellenstruktur
JP6402662B2 (ja) * 2014-03-26 2018-10-10 三菱マテリアル株式会社 表面被覆切削工具及びその製造方法
JP6548071B2 (ja) 2014-04-23 2019-07-24 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6548073B2 (ja) * 2014-05-28 2019-07-24 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP5924507B2 (ja) 2014-09-25 2016-05-25 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
EP3000913B1 (en) 2014-09-26 2020-07-29 Walter Ag Coated cutting tool insert with MT-CVD TiCN on TiAI(C,N)
AT516062B1 (de) * 2015-01-15 2016-02-15 Boehlerit Gmbh & Co Kg Verfahren zum Beschichten eines Gegenstandes und damit hergestellte Beschichtung
WO2016148056A1 (ja) * 2015-03-13 2016-09-22 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6590255B2 (ja) 2015-03-13 2019-10-16 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
US9994717B2 (en) * 2015-04-13 2018-06-12 Kennametal Inc. CVD-coated article and CVD process of making the same
JP6726403B2 (ja) 2015-08-31 2020-07-22 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6931453B2 (ja) 2015-10-30 2021-09-08 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6931452B2 (ja) 2015-10-30 2021-09-08 三菱マテリアル株式会社 硬質被覆層がすぐれた耐摩耗性および耐チッピング性を発揮する表面被覆切削工具
CN108699686B (zh) * 2015-12-07 2021-01-26 Ihi伯尔纳股份公司 涂覆挤出工具
US11247276B2 (en) 2016-03-31 2022-02-15 Walter Ag Coated cutting tool with h-AlN and Ti1-xAlxCyNz layers
JP6045010B1 (ja) * 2016-04-14 2016-12-14 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
CN109477215B (zh) * 2016-07-07 2020-11-27 三菱日立工具株式会社 硬涂层、硬涂布的工具以及它们的生产方法
JP6905807B2 (ja) 2016-08-29 2021-07-21 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性、耐剥離性を発揮する表面被覆切削工具
JPWO2018047735A1 (ja) * 2016-09-06 2019-06-24 住友電工ハードメタル株式会社 切削工具およびその製造方法
US20190232386A1 (en) * 2016-09-06 2019-08-01 Sumitomo Electric Hardmetal Corp. Cutting Tool and Method for Manufacturing Same
JPWO2018047734A1 (ja) * 2016-09-06 2019-06-24 住友電工ハードメタル株式会社 切削工具およびその製造方法
CN106893975B (zh) * 2017-04-27 2019-04-19 济宁学院 AlC/AlCN叠层涂层刀具及其制备工艺
JP7063206B2 (ja) * 2017-09-29 2022-05-17 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
WO2019065682A1 (ja) * 2017-09-29 2019-04-04 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
DE102018103320A1 (de) * 2018-02-14 2019-08-14 Iwis Motorsysteme Gmbh & Co. Kg Hartstoffschicht auf Metallsubstrat
DE102019103363A1 (de) * 2019-02-11 2020-08-13 Oerlikon Surface Solutions Ag Beschichtetes Werkzeug für die Bearbeitung von schwer zu bearbeitenden Materialien
US11919092B2 (en) 2019-04-17 2024-03-05 Sumitomo Electric Hardmetal Corp. Cutting tool
CN116786788A (zh) * 2022-12-06 2023-09-22 常州艾恩希真空技术有限公司 一种带涂层的铝合金挤压模
CN120076888A (zh) 2023-06-22 2025-05-30 住友电工硬质合金株式会社 切削工具
KR20250068741A (ko) 2023-06-22 2025-05-16 스미또모 덴꼬오 하드메탈 가부시끼가이샤 절삭 공구
AT528040A1 (de) * 2024-02-28 2025-09-15 Boehlerit Gmbh & Co Kg Beschichtetes Objekt und Verfahren zu dessen Herstellung
US12404589B1 (en) 2024-03-01 2025-09-02 Sumitomo Electric Hardmetal Corp. Cutting tool

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3825399C5 (de) * 1988-07-23 2005-05-12 Cemecon Ag PVD- oder Plasma- CVD-Beschichtung
SE464818B (sv) * 1989-06-16 1991-06-17 Sandvik Ab Belagt skaer foer skaerande bearbetning
DE69007885T2 (de) * 1989-07-13 1994-07-28 Seco Tools Ab Mit mehreren Oxiden beschichteter Karbidkörper und Verfahren zu seiner Herstellung.
DE4115616C2 (de) * 1991-03-16 1994-11-24 Leybold Ag Hartstoff-Mehrlagenschichtsystem für Werkzeuge
JP2999346B2 (ja) * 1993-07-12 2000-01-17 オリエンタルエンヂニアリング株式会社 基体表面被覆方法及び被覆部材
SE502223C2 (sv) * 1994-01-14 1995-09-18 Sandvik Ab Sätt och alster vid beläggning av ett skärande verktyg med ett aluminiumoxidskikt
JPH07305181A (ja) * 1994-05-09 1995-11-21 Hitachi Tool Eng Ltd 被覆超硬合金
JP2793772B2 (ja) * 1994-05-13 1998-09-03 神鋼コベルコツール株式会社 密着性に優れた硬質皮膜被覆工具および硬質皮膜被覆部材
US5693417A (en) * 1995-05-22 1997-12-02 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Vacuum-coated compound body and process for its production
US5879823A (en) * 1995-12-12 1999-03-09 Kennametal Inc. Coated cutting tool
FR2745299B1 (fr) * 1996-02-27 1998-06-19 Centre Nat Rech Scient Procede de formation de revetements de ti1-xalxn
WO1998010120A1 (de) * 1996-09-03 1998-03-12 Balzers Aktiengesellschaft Verschleissschutz-beschichtetes werkstück
JP3705382B2 (ja) * 1996-09-03 2005-10-12 日立ツール株式会社 多層被覆硬質工具
JP3705381B2 (ja) * 1996-09-03 2005-10-12 日立ツール株式会社 多層被覆硬質工具
JPH10128602A (ja) * 1996-10-30 1998-05-19 Kyocera Corp 被覆切削工具
FR2767841B1 (fr) 1997-08-29 1999-10-01 Commissariat Energie Atomique PROCEDE DE PREPARATION PAR DEPOT CHIMIQUE EN PHASE VAPEUR (CVD) D'UN REVETEMENT MULTICOUCHE A BASE DE Ti-Al-N
SE521284C2 (sv) 1999-05-19 2003-10-21 Sandvik Ab Aluminiumoxidbelagt skärverktyg för metallbearbetning
DE10002861A1 (de) * 2000-01-24 2001-08-09 Walter Ag Zerspannungswerkzeug mit Carbonitrid-Beschichtung
US6572991B1 (en) 2000-02-04 2003-06-03 Seco Tools Ab Deposition of γ-Al2O3 by means of CVD
JP2001341008A (ja) * 2000-06-02 2001-12-11 Hitachi Tool Engineering Ltd 窒化チタンアルミニウム膜被覆工具及びその製造方法
DE10061436A1 (de) * 2000-12-09 2002-06-27 Plasmotec Gmbh & Co Kg Umformwerkzeug und Verfahren zu seiner Herstellung
WO2003085152A2 (de) 2002-04-11 2003-10-16 Cemecon Ag Beschichteter körper und ein verfahren zur beschichtung eines körpers
KR101168464B1 (ko) 2004-12-14 2012-07-26 스미또모 덴꼬오 하드메탈 가부시끼가이샤 표면 피복 절삭 공구
WO2006067956A1 (ja) 2004-12-22 2006-06-29 Sumitomo Electric Hardmetal Corp. 表面被覆切削工具
DE102005032860B4 (de) * 2005-07-04 2007-08-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung
JP4936211B2 (ja) * 2006-04-04 2012-05-23 三菱マテリアル株式会社 硬質被覆層が高速切削ですぐれた耐摩耗性を発揮する表面被覆切削工具
JP2008126334A (ja) 2006-11-17 2008-06-05 Mitsubishi Heavy Ind Ltd 耐摩耗性皮膜およびこれを備えた工具
JP2008137129A (ja) * 2006-12-04 2008-06-19 Mitsubishi Materials Corp 表面被覆切削工具
JP2008149390A (ja) * 2006-12-14 2008-07-03 Mitsubishi Materials Corp 表面被覆切削工具
DE102007000512B3 (de) 2007-10-16 2009-01-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung

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JP5832748B2 (ja) 2015-12-16
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US20110003126A1 (en) 2011-01-06
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RU2501887C2 (ru) 2013-12-20
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MX2010009889A (es) 2010-09-30
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