JP1818031S - Semiconductor substrate holder - Google Patents
Semiconductor substrate holderInfo
- Publication number
- JP1818031S JP1818031S JP2025015334F JP2025015334F JP1818031S JP 1818031 S JP1818031 S JP 1818031S JP 2025015334 F JP2025015334 F JP 2025015334F JP 2025015334 F JP2025015334 F JP 2025015334F JP 1818031 S JP1818031 S JP 1818031S
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- semiconductor substrate
- product
- substrate
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
本物品は、半導体ウエハ等の基板を保持するために用いられる半導体基板保持具である。本物品は、使用状態を示す参考図に示すように、基板処理装置のチャンバーの処理室等に取り付けられ、突起部で基板を保持する。This product is a semiconductor substrate holder used to hold substrates such as semiconductor wafers. As shown in the reference diagram showing the state of use, this product is attached to the processing chamber of a substrate processing apparatus, and holds the substrate with its protrusions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025015334F JP1818031S (en) | 2025-08-01 | 2025-08-01 | Semiconductor substrate holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025015334F JP1818031S (en) | 2025-08-01 | 2025-08-01 | Semiconductor substrate holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1818031S true JP1818031S (en) | 2026-01-28 |
Family
ID=98564002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025015334F Active JP1818031S (en) | 2025-08-01 | 2025-08-01 | Semiconductor substrate holder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1818031S (en) |
-
2025
- 2025-08-01 JP JP2025015334F patent/JP1818031S/en active Active
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