[go: up one dir, main page]

FI20085314A0 - Värähtelevä mikromekaaninen kulmanopeusanturi - Google Patents

Värähtelevä mikromekaaninen kulmanopeusanturi

Info

Publication number
FI20085314A0
FI20085314A0 FI20085314A FI20085314A FI20085314A0 FI 20085314 A0 FI20085314 A0 FI 20085314A0 FI 20085314 A FI20085314 A FI 20085314A FI 20085314 A FI20085314 A FI 20085314A FI 20085314 A0 FI20085314 A0 FI 20085314A0
Authority
FI
Finland
Prior art keywords
angle sensor
vibrating micromechanical
micromechanical angle
vibrating
sensor
Prior art date
Application number
FI20085314A
Other languages
English (en)
Swedish (sv)
Other versions
FI20085314L (fi
FI122397B (fi
Inventor
Anssi Blomqvist
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Publication of FI20085314A0 publication Critical patent/FI20085314A0/fi
Priority to FI20085314A priority Critical patent/FI122397B/fi
Priority to EP09732877.7A priority patent/EP2269001B1/en
Priority to CN200980122679.9A priority patent/CN102066874B/zh
Priority to JP2011504493A priority patent/JP5620903B2/ja
Priority to KR1020107025612A priority patent/KR101641066B1/ko
Priority to HK11112534.5A priority patent/HK1158304B/xx
Priority to PCT/FI2009/050270 priority patent/WO2009127782A1/en
Priority to US12/385,655 priority patent/US8176779B2/en
Publication of FI20085314L publication Critical patent/FI20085314L/fi
Application granted granted Critical
Publication of FI122397B publication Critical patent/FI122397B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
FI20085314A 2008-04-16 2008-04-16 Värähtelevä mikromekaaninen kulmanopeusanturi FI122397B (fi)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FI20085314A FI122397B (fi) 2008-04-16 2008-04-16 Värähtelevä mikromekaaninen kulmanopeusanturi
KR1020107025612A KR101641066B1 (ko) 2008-04-16 2009-04-08 진동 마이크로-기계식 각속도 센서
CN200980122679.9A CN102066874B (zh) 2008-04-16 2009-04-08 振动型微机械角速度传感器
JP2011504493A JP5620903B2 (ja) 2008-04-16 2009-04-08 振動型マイクロメカニカル角速度センサ
EP09732877.7A EP2269001B1 (en) 2008-04-16 2009-04-08 Vibrating micro-mechanical sensor of angular velocity
HK11112534.5A HK1158304B (en) 2008-04-16 2009-04-08 Vibrating micro-mechanical sensor of angular velocity
PCT/FI2009/050270 WO2009127782A1 (en) 2008-04-16 2009-04-08 Vibrating micro-mechanical sensor of angular velocity
US12/385,655 US8176779B2 (en) 2008-04-16 2009-04-15 Vibrating micro-mechanical sensor of angular velocity

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20085314 2008-04-16
FI20085314A FI122397B (fi) 2008-04-16 2008-04-16 Värähtelevä mikromekaaninen kulmanopeusanturi

Publications (3)

Publication Number Publication Date
FI20085314A0 true FI20085314A0 (fi) 2008-04-16
FI20085314L FI20085314L (fi) 2009-10-17
FI122397B FI122397B (fi) 2011-12-30

Family

ID=39385942

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20085314A FI122397B (fi) 2008-04-16 2008-04-16 Värähtelevä mikromekaaninen kulmanopeusanturi

Country Status (7)

Country Link
US (1) US8176779B2 (fi)
EP (1) EP2269001B1 (fi)
JP (1) JP5620903B2 (fi)
KR (1) KR101641066B1 (fi)
CN (1) CN102066874B (fi)
FI (1) FI122397B (fi)
WO (1) WO2009127782A1 (fi)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI119895B (fi) * 2007-10-05 2009-04-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102007054505B4 (de) 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
DE102008002748A1 (de) * 2008-06-27 2009-12-31 Sensordynamics Ag Mikro-Gyroskop
DE102008043256A1 (de) * 2008-10-29 2010-05-06 Robert Bosch Gmbh Verfahren zum Betrieb einer Sensoranordnung und Sensoranordnung
JP2010190706A (ja) * 2009-02-18 2010-09-02 Panasonic Corp 慣性力センサ
DE102009001244A1 (de) * 2009-02-27 2010-09-02 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse
FR2945621B1 (fr) * 2009-05-15 2011-08-26 Commissariat Energie Atomique Structure de couplage pour gyrometre resonnant
US8534127B2 (en) * 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
US9097524B2 (en) * 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
DE102009045431B4 (de) * 2009-10-07 2025-08-21 Robert Bosch Gmbh Mikromechanische Struktur und Verfahren zum Betrieb einer mikromechanischen Struktur
FI124020B (fi) * 2011-03-04 2014-02-14 Murata Electronics Oy Jousirakenne, resonaattori, resonaattorimatriisi ja anturi
CN102306583B (zh) * 2011-08-31 2013-08-07 上海交通大学 三维多方向敏感的微型压力开关
US9863769B2 (en) 2011-09-16 2018-01-09 Invensense, Inc. MEMS sensor with decoupled drive system
US10914584B2 (en) 2011-09-16 2021-02-09 Invensense, Inc. Drive and sense balanced, semi-coupled 3-axis gyroscope
US9714842B2 (en) 2011-09-16 2017-07-25 Invensense, Inc. Gyroscope self test by applying rotation on coriolis sense mass
US8833162B2 (en) 2011-09-16 2014-09-16 Invensense, Inc. Micromachined gyroscope including a guided mass system
US9170107B2 (en) 2011-09-16 2015-10-27 Invensense, Inc. Micromachined gyroscope including a guided mass system
FR2985029B1 (fr) 2011-12-22 2014-10-24 Commissariat Energie Atomique Dispositif micro/nano capteur inertiel multiaxial de mouvements
EP2802884B1 (en) 2012-01-12 2016-06-08 Murata Electronics Oy Accelerator sensor structure and use thereof
JP6143789B2 (ja) 2012-01-12 2017-06-07 ムラタ エレクトロニクス オサケユキチュア 耐振動性の加速度センサー構造体
CN103424110B (zh) * 2012-05-15 2015-08-05 中国科学院上海微系统与信息技术研究所 微型角速度传感器
US9310202B2 (en) * 2012-07-09 2016-04-12 Freescale Semiconductor, Inc. Angular rate sensor with quadrature error compensation
KR101420534B1 (ko) * 2012-12-13 2014-07-16 삼성전기주식회사 각속도 센서
CN104236536B (zh) * 2013-06-07 2016-12-28 上海矽睿科技有限公司 一种微机械三轴角速度传感器
FI126199B (fi) 2013-06-28 2016-08-15 Murata Manufacturing Co Kapasitiivinen mikromekaaninen anturirakenne ja mikromekaaninen kiihtyvyysanturi
FI125696B (fi) * 2013-09-11 2016-01-15 Murata Manufacturing Co Gyroskooppirakenne ja gyroskooppi parannetulla kvadratuurikompensaatiolla
FI125695B (fi) * 2013-09-11 2016-01-15 Murata Manufacturing Co Parannettu gyroskooppirakenne ja gyroskooppi
EP3184961B1 (en) * 2013-09-30 2021-01-06 Invensense, Inc. Micromachined gyroscope including a guided mass system
US9958271B2 (en) 2014-01-21 2018-05-01 Invensense, Inc. Configuration to reduce non-linear motion
FI126071B (fi) * 2014-01-28 2016-06-15 Murata Manufacturing Co Parannettu gyroskooppirakenne ja gyroskooppi
EP3561451B1 (en) * 2014-11-27 2020-05-27 Goertek Inc. Triaxial micro-electromechanical gyroscope
FI127203B (fi) 2015-05-15 2018-01-31 Murata Manufacturing Co Värähtelevä mikromekaaninen sensori kulmanopeudelle
DE102015213450A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh MEMS Drehratensensor mit kombiniertem Antrieb und Detektion
EP3368923B1 (en) 2015-10-30 2023-12-27 TGS-NOPEC Geophysical Company Multi-axis, single mass accelerometer
DE102016213870A1 (de) * 2015-11-20 2017-05-24 Robert Bosch Gmbh Mikromechanischer Drehratensensor und Verfahren zu dessen Herstellung
KR101673362B1 (ko) * 2015-12-14 2016-11-07 현대자동차 주식회사 가속도 센서 및 그 제조 방법
US10254134B2 (en) * 2016-08-04 2019-04-09 Apple Inc. Interference-insensitive capacitive displacement sensing
CN112955752A (zh) 2018-09-13 2021-06-11 离子地球物理学公司 多轴线、单质量加速度计
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
TWI770605B (zh) * 2019-09-10 2022-07-11 昇佳電子股份有限公司 微機電陀螺儀
TWI872680B (zh) * 2022-09-02 2025-02-11 昇佳電子股份有限公司 三軸陀螺儀

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5377544A (en) * 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
JP3039364B2 (ja) * 1996-03-11 2000-05-08 株式会社村田製作所 角速度センサ
JPH09318649A (ja) * 1996-05-30 1997-12-12 Texas Instr Japan Ltd 複合センサ
DE19641284C1 (de) * 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
JP3753209B2 (ja) * 1997-08-27 2006-03-08 アイシン精機株式会社 角速度センサ
JP2001520385A (ja) * 1997-10-14 2001-10-30 アービン・センサーズ・コーポレイション 複数要素のマイクロジャイロ
JP3399336B2 (ja) * 1997-12-22 2003-04-21 株式会社豊田中央研究所 検出器
DE19844686A1 (de) * 1998-09-29 2000-04-06 Fraunhofer Ges Forschung Mikromechanischer Drehratensensor und Verfahren zur Herstellung
JP4126833B2 (ja) * 1999-03-12 2008-07-30 株式会社デンソー 角速度センサ装置
JP3659160B2 (ja) * 2000-02-18 2005-06-15 株式会社デンソー 角速度センサ
DE10108196A1 (de) * 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
DE10108198A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
JP2002296038A (ja) * 2001-03-30 2002-10-09 Mitsubishi Electric Corp 角速度センサ
US6722197B2 (en) * 2001-06-19 2004-04-20 Honeywell International Inc. Coupled micromachined structure
DE10360963B4 (de) * 2003-12-23 2007-05-16 Litef Gmbh Verfahren zur Messung von Drehraten/Beschleunigungen unter Verwendung eines Drehraten-Corioliskreisels sowie dafür geeigneter Corioliskreisel
US7377167B2 (en) * 2004-02-27 2008-05-27 The Regents Of The University Of California Nonresonant micromachined gyroscopes with structural mode-decoupling
JP2008514968A (ja) * 2004-09-27 2008-05-08 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 回転速度センサ
TWI245110B (en) * 2004-11-12 2005-12-11 Ind Tech Res Inst Apparatus of micro angular motion detector and fabrication method thereof
FI116543B (fi) * 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
FR2888318B1 (fr) * 2005-07-05 2007-09-14 Thales Sa Capteur gyrometrique micro-usine realisant une mesure differentielle du mouvement des masses vibrantes
US20070220973A1 (en) * 2005-08-12 2007-09-27 Cenk Acar Multi-axis micromachined accelerometer and rate sensor
JP4887034B2 (ja) * 2005-12-05 2012-02-29 日立オートモティブシステムズ株式会社 慣性センサ
CN101910789B (zh) * 2008-01-07 2012-02-29 株式会社村田制作所 角速度传感器

Also Published As

Publication number Publication date
FI20085314L (fi) 2009-10-17
JP2011517781A (ja) 2011-06-16
US20090260437A1 (en) 2009-10-22
HK1158304A1 (en) 2012-07-13
EP2269001A1 (en) 2011-01-05
WO2009127782A1 (en) 2009-10-22
JP5620903B2 (ja) 2014-11-05
CN102066874A (zh) 2011-05-18
FI122397B (fi) 2011-12-30
KR101641066B1 (ko) 2016-07-21
KR20110011625A (ko) 2011-02-08
US8176779B2 (en) 2012-05-15
CN102066874B (zh) 2014-08-27
EP2269001A4 (en) 2014-04-09
EP2269001B1 (en) 2016-11-30

Similar Documents

Publication Publication Date Title
FI20085314A0 (fi) Värähtelevä mikromekaaninen kulmanopeusanturi
EP2404139A4 (en) VIBRANT MICROMECHANICAL SENSOR OF ANGULAR SPEED
DE102008054533B8 (de) Ultraschallsensor
DK2264676T3 (da) Sensor
DE602008000899D1 (de) Kraftsensor
BRPI0812593A2 (pt) sensor de posição angular
BRPI0815935A2 (pt) sensor de posição
EP2306018A4 (en) PIEZOELECTRIC MICRO FAN
EP2312158A4 (en) PIEZOELECTRIC MICRO FAN
DK2338287T3 (da) Transducersystem
EP2245738A4 (en) MICROMECHANICAL RESONATOR
EP2327960A4 (en) MICROELECTROMECHANICAL SYSTEM
EP2405734A4 (en) STICK ANGLE SENSOR
EP2336788A4 (en) Inertia sensor
DE502007005051D1 (de) Beschleunigungssensor
BRPI0819415A2 (pt) Sensor de posição
BRPI0823002A8 (pt) sensor de ângulo de rotação
DE602007012995D1 (de) Mikromechanischer Drucksensor
DE102010039952B8 (de) Schwingungs-Winkelgeschwindigkeitssensor
EP2346083A4 (en) MEMS SENSOR
DE112008001742A5 (de) Sensoranordnung
EP2351982A4 (en) ANGULAR SPEED SENSOR
FI20075708A0 (fi) Värähtelevä mikromekaaninen kulmanopeusanturi
DE112008000345A5 (de) Sensoranordnung
EP2253933A4 (en) INERTIA FORCE SENSOR

Legal Events

Date Code Title Description
FG Patent granted

Ref document number: 122397

Country of ref document: FI

PC Transfer of assignment of patent

Owner name: MURATA ELECTRONICS OY

MM Patent lapsed