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HK1118384A - 曝光装置，曝光方法，及装置制造方法 - Google Patents

曝光装置，曝光方法，及装置制造方法 Download PDF

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Publication number
HK1118384A
HK1118384A HK08112383.2A HK08112383A HK1118384A HK 1118384 A HK1118384 A HK 1118384A HK 08112383 A HK08112383 A HK 08112383A HK 1118384 A HK1118384 A HK 1118384A
Authority
HK
Hong Kong
Prior art keywords
pattern
exposure
light
image
area
Prior art date
Application number
HK08112383.2A
Other languages
English (en)
Inventor
Hiroyuki Nagasaka
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1118384A publication Critical patent/HK1118384A/zh

Links

HK08112383.2A 2006-02-16 2007-02-15 曝光装置，曝光方法，及装置制造方法 HK1118384A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006039926 2006-02-16

Publications (1)

Publication Number Publication Date
HK1118384A true HK1118384A (zh) 2009-02-06

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