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HK1118381A - 曝光装置，曝光方法，及装置制造方法 - Google Patents

曝光装置，曝光方法，及装置制造方法 Download PDF

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Publication number
HK1118381A
HK1118381A HK08112380.5A HK08112380A HK1118381A HK 1118381 A HK1118381 A HK 1118381A HK 08112380 A HK08112380 A HK 08112380A HK 1118381 A HK1118381 A HK 1118381A
Authority
HK
Hong Kong
Prior art keywords
exposure
pattern
area
substrate
image
Prior art date
Application number
HK08112380.5A
Other languages
English (en)
Inventor
Hiroyuki Nagasaka
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1118381A publication Critical patent/HK1118381A/zh

Links

HK08112380.5A 2006-02-16 2007-02-15 曝光装置，曝光方法，及装置制造方法 HK1118381A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006039832 2006-02-16

Publications (1)

Publication Number Publication Date
HK1118381A true HK1118381A (zh) 2009-02-06

Family

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