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GB2331846B - A semiconductor device and method for its manufacture - Google Patents

A semiconductor device and method for its manufacture

Info

Publication number
GB2331846B
GB2331846B GB9901696A GB9901696A GB2331846B GB 2331846 B GB2331846 B GB 2331846B GB 9901696 A GB9901696 A GB 9901696A GB 9901696 A GB9901696 A GB 9901696A GB 2331846 B GB2331846 B GB 2331846B
Authority
GB
United Kingdom
Prior art keywords
manufacture
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9901696A
Other versions
GB2331846A (en
GB9901696D0 (en
Inventor
Yoshihasa Matsubara
Ko Noguchi
Shinya Ito
Noriaki Oda
Akira Matsumoto
Takashi Ishigami
Masahiko Nakamae
Tadahiko Horiuchi
Kazuhiko Endo
Toru Tatsumi
Yoshinari Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP14801797A external-priority patent/JP3228183B2/en
Application filed by NEC Corp filed Critical NEC Corp
Publication of GB9901696D0 publication Critical patent/GB9901696D0/en
Publication of GB2331846A publication Critical patent/GB2331846A/en
Application granted granted Critical
Publication of GB2331846B publication Critical patent/GB2331846B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H10P14/6902—
    • H10P14/662—
    • H10P14/687—
    • H10P14/69433—
    • H10W20/071—
    • H10W20/075—
    • H10W20/077—
    • H10W20/081—
    • H10W20/425—
    • H10W20/48—
    • H10P14/6336—
GB9901696A 1996-12-02 1997-12-02 A semiconductor device and method for its manufacture Expired - Fee Related GB2331846B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP32169496 1996-12-02
JP14801797A JP3228183B2 (en) 1996-12-02 1997-06-05 Insulating film, semiconductor device having the insulating film, and method of manufacturing the same
GB9725525A GB2319891B (en) 1996-12-02 1997-12-02 An insulating film,asemiconductor device and methods for their manufacture

Publications (3)

Publication Number Publication Date
GB9901696D0 GB9901696D0 (en) 1999-03-17
GB2331846A GB2331846A (en) 1999-06-02
GB2331846B true GB2331846B (en) 1999-11-10

Family

ID=27269116

Family Applications (2)

Application Number Title Priority Date Filing Date
GB9911186A Expired - Fee Related GB2334818B (en) 1996-12-02 1997-12-02 An insulating film, a semiconductor device and methods for their manaufacture
GB9901696A Expired - Fee Related GB2331846B (en) 1996-12-02 1997-12-02 A semiconductor device and method for its manufacture

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB9911186A Expired - Fee Related GB2334818B (en) 1996-12-02 1997-12-02 An insulating film, a semiconductor device and methods for their manaufacture

Country Status (1)

Country Link
GB (2) GB2334818B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6784485B1 (en) * 2000-02-11 2004-08-31 International Business Machines Corporation Diffusion barrier layer and semiconductor device containing same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0696819A1 (en) * 1994-07-12 1996-02-14 International Business Machines Corporation Diamond-like carbon for use in VLSI and ULSI interconnect systems

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2956571B2 (en) * 1996-03-07 1999-10-04 日本電気株式会社 Semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0696819A1 (en) * 1994-07-12 1996-02-14 International Business Machines Corporation Diamond-like carbon for use in VLSI and ULSI interconnect systems

Also Published As

Publication number Publication date
GB2334818A (en) 1999-09-01
GB9911186D0 (en) 1999-07-14
GB2331846A (en) 1999-06-02
GB9901696D0 (en) 1999-03-17
GB2334818B (en) 2000-07-19

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20041202