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GB2313477B - Method of manufacturing a semiconductor device - Google Patents

Method of manufacturing a semiconductor device

Info

Publication number
GB2313477B
GB2313477B GB9710491A GB9710491A GB2313477B GB 2313477 B GB2313477 B GB 2313477B GB 9710491 A GB9710491 A GB 9710491A GB 9710491 A GB9710491 A GB 9710491A GB 2313477 B GB2313477 B GB 2313477B
Authority
GB
United Kingdom
Prior art keywords
manufacturing
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9710491A
Other versions
GB9710491D0 (en
GB2313477A (en
Inventor
Toshiyuki Hirota
Hirohito Watanabe
Fumiki Aiso
Shuji Fujiwara
Masanobu Zenke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of GB9710491D0 publication Critical patent/GB9710491D0/en
Publication of GB2313477A publication Critical patent/GB2313477A/en
Application granted granted Critical
Publication of GB2313477B publication Critical patent/GB2313477B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/60Capacitors
    • H10D1/68Capacitors having no potential barriers
GB9710491A 1996-05-21 1997-05-21 Method of manufacturing a semiconductor device Expired - Fee Related GB2313477B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8125689A JPH09309256A (en) 1996-05-21 1996-05-21 Rotary stamping device

Publications (3)

Publication Number Publication Date
GB9710491D0 GB9710491D0 (en) 1997-07-16
GB2313477A GB2313477A (en) 1997-11-26
GB2313477B true GB2313477B (en) 2001-01-17

Family

ID=14916260

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9710491A Expired - Fee Related GB2313477B (en) 1996-05-21 1997-05-21 Method of manufacturing a semiconductor device

Country Status (2)

Country Link
JP (1) JPH09309256A (en)
GB (1) GB2313477B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3024589B2 (en) * 1997-04-23 2000-03-21 日本電気株式会社 Method for manufacturing semiconductor device
JP3233113B2 (en) * 1998-11-11 2001-11-26 日本電気株式会社 Method for manufacturing semiconductor device
US7963221B2 (en) 2008-03-19 2011-06-21 Clearsnap Holding, Inc. Systems and methods for forming continuous ink images
WO2022204844A1 (en) 2021-03-29 2022-10-06 Yangtze Memory Technologies Co., Ltd. Ladder annealing process for increasing polysilicon grain size in semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5147826A (en) * 1990-08-06 1992-09-15 The Pennsylvania Research Corporation Low temperature crystallization and pattering of amorphous silicon films
EP0521644A1 (en) * 1991-06-21 1993-01-07 Nec Corporation Method of manufacturing polysilicon film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5147826A (en) * 1990-08-06 1992-09-15 The Pennsylvania Research Corporation Low temperature crystallization and pattering of amorphous silicon films
EP0521644A1 (en) * 1991-06-21 1993-01-07 Nec Corporation Method of manufacturing polysilicon film

Also Published As

Publication number Publication date
GB9710491D0 (en) 1997-07-16
JPH09309256A (en) 1997-12-02
GB2313477A (en) 1997-11-26

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20090521