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GB1364269A - Apparatus for examining reflecting surfaces - Google Patents

Apparatus for examining reflecting surfaces

Info

Publication number
GB1364269A
GB1364269A GB5770371A GB5770371A GB1364269A GB 1364269 A GB1364269 A GB 1364269A GB 5770371 A GB5770371 A GB 5770371A GB 5770371 A GB5770371 A GB 5770371A GB 1364269 A GB1364269 A GB 1364269A
Authority
GB
United Kingdom
Prior art keywords
spot
detector
successive elements
examining
reflecting surfaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5770371A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1364269A publication Critical patent/GB1364269A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB5770371A 1971-01-15 1971-12-13 Apparatus for examining reflecting surfaces Expired GB1364269A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712101689 DE2101689A1 (de) 1971-01-15 1971-01-15 Anordnung zur Durchführung eines Verfahrens zum berühungslosen optischen Prüfen und Messen von Oberflächen

Publications (1)

Publication Number Publication Date
GB1364269A true GB1364269A (en) 1974-08-21

Family

ID=5795922

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5770371A Expired GB1364269A (en) 1971-01-15 1971-12-13 Apparatus for examining reflecting surfaces

Country Status (3)

Country Link
DE (1) DE2101689A1 (de)
FR (1) FR2122142A6 (de)
GB (1) GB1364269A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3037622C2 (de) * 1980-10-04 1987-02-26 Theodor Prof. Dr.-Ing. 1000 Berlin Gast Einrichtung zur Bestimmung der Oberflächengüte
DE8303856U1 (de) * 1983-02-11 1985-11-14 Optische Werke G. Rodenstock, 8000 Muenchen Vorrichtung zur Ermittlung einer Oberflächenstruktur, insbesondere der Rauheit
DE3307639C2 (de) * 1983-03-04 1986-10-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Optisches Potentiometer
DE3319320A1 (de) * 1983-05-27 1984-11-29 Siemens AG, 1000 Berlin und 8000 München Einrichtung zur erfassung einer ortskoordinate eines lichtpunktes
JPS6153510A (ja) * 1984-08-23 1986-03-17 Canon Inc 位置検知装置
DE3503858A1 (de) * 1985-02-05 1986-08-21 Daimler-Benz Ag, 7000 Stuttgart Vorrichtung zur ermittlung von gestaltsfehlern niedriger ordnung

Also Published As

Publication number Publication date
DE2101689A1 (de) 1972-07-20
FR2122142A6 (de) 1972-08-25

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee