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GB1358817A - None-crucible zone melting of rods of crystalline material - Google Patents

None-crucible zone melting of rods of crystalline material

Info

Publication number
GB1358817A
GB1358817A GB453173A GB453173A GB1358817A GB 1358817 A GB1358817 A GB 1358817A GB 453173 A GB453173 A GB 453173A GB 453173 A GB453173 A GB 453173A GB 1358817 A GB1358817 A GB 1358817A
Authority
GB
United Kingdom
Prior art keywords
rod
coil
ring
molten zone
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB453173A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1358817A publication Critical patent/GB1358817A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

1358817 Zone melting SIEMENS AG 30 Jan 1973 [19 May 1972] 4531/73 Heading B1S In a process of zone melting a rod of crystalline material using an induction heating coil surrounding the rod, the part of the rod supplied to the molten zone and/or the part of the rod recrystallised from the molten zone is, or are subjected to secondary heating by a graphite ring or rings surrounding the rod adjacent to the coil on one, or other, or both sides of the coil, which ring or rings is or are movable with the coil and heated by it. As shown in Fig. 1, in a silicon rod 2, a molten zone 4 is formed by induction heating coil 3. By means of graphite rings 5 and 6 arranged around the rod, in the upper region of the molten zone the preheating produced by ring 5 gives rise to a reduction in the temperature gradient whilst in the lower region of the molten zone the heated ring 6 produces a flattening in the isotherms whereby thermal stresses in the recrystallized portion of the rod are reduced to a miniumum.
GB453173A 1972-05-19 1973-01-30 None-crucible zone melting of rods of crystalline material Expired GB1358817A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722224685 DE2224685A1 (en) 1972-05-19 1972-05-19 DEVICE FOR CRUCIBLE-FREE ZONE MELTING OF A ROD-SHAPED BODY MADE OF CRYSTALLINE MATERIAL, IN PARTICULAR OF SEMICONDUCTOR MATERIAL

Publications (1)

Publication Number Publication Date
GB1358817A true GB1358817A (en) 1974-07-03

Family

ID=5845439

Family Applications (1)

Application Number Title Priority Date Filing Date
GB453173A Expired GB1358817A (en) 1972-05-19 1973-01-30 None-crucible zone melting of rods of crystalline material

Country Status (7)

Country Link
JP (1) JPS4942505A (en)
BE (1) BE799753A (en)
DE (1) DE2224685A1 (en)
FR (1) FR2184582B1 (en)
GB (1) GB1358817A (en)
IT (1) IT987446B (en)
NL (1) NL7306998A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103451727A (en) * 2013-08-19 2013-12-18 浙江晶盛机电股份有限公司 Zone melting furnace polycrystalline rod heat preservation device and heat preservation method thereof

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7950908B2 (en) 2005-01-26 2011-05-31 Seiko Epson Corporation Fluid transporting device of a peristalic type with tube and push pin arrangement
JP4946974B2 (en) * 2008-05-27 2012-06-06 セイコーエプソン株式会社 Fluid transport device and fluid transporter
DE102011080866A1 (en) 2011-08-12 2013-02-14 Wacker Chemie Ag Manufacturing monocrystalline rod made of silicon, comprises continuously melting a polycrystalline rod by coupling an induction coil, and introducing the molten material having a monocrystalline seed crystal and re-crystallizing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1486156A (en) * 1965-07-10 1967-06-23 Siemens Ag Device for melting zone without crucible

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103451727A (en) * 2013-08-19 2013-12-18 浙江晶盛机电股份有限公司 Zone melting furnace polycrystalline rod heat preservation device and heat preservation method thereof
CN103451727B (en) * 2013-08-19 2016-10-12 浙江晶盛机电股份有限公司 Zone melting furnace polycrystalline rod attemperator and heat preserving method thereof

Also Published As

Publication number Publication date
FR2184582A1 (en) 1973-12-28
BE799753A (en) 1973-09-17
FR2184582B1 (en) 1978-05-26
NL7306998A (en) 1973-11-21
JPS4942505A (en) 1974-04-22
DE2224685A1 (en) 1973-11-29
IT987446B (en) 1975-02-20

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees