[go: up one dir, main page]

EP1129231B1 - Procede pour appliquer un revetement sous vide sur des pieces metalliques - Google Patents

Procede pour appliquer un revetement sous vide sur des pieces metalliques Download PDF

Info

Publication number
EP1129231B1
EP1129231B1 EP99959190A EP99959190A EP1129231B1 EP 1129231 B1 EP1129231 B1 EP 1129231B1 EP 99959190 A EP99959190 A EP 99959190A EP 99959190 A EP99959190 A EP 99959190A EP 1129231 B1 EP1129231 B1 EP 1129231B1
Authority
EP
European Patent Office
Prior art keywords
metal components
oxide layer
vacuum coating
coating metal
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99959190A
Other languages
German (de)
English (en)
Other versions
EP1129231A2 (fr
Inventor
Lutz Wolkers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP1129231A2 publication Critical patent/EP1129231A2/fr
Application granted granted Critical
Publication of EP1129231B1 publication Critical patent/EP1129231B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising

Definitions

  • metal components with an oxide layer it is often necessary to have metal components with an oxide layer to provide in order to determine the components on their surface impart mechanical or chemical properties; oxide layers are also used as an adhesion promoter layer Metal components often required, so in further process steps Coatings made on the metal components can be.
  • US 5,763,107 discloses a method of making a Thermal insulation layer for superalloys, in which below the Thermal insulation layer a platinum-enriched aluminum layer is present, on which a thin oxide layer is applied becomes.
  • the thin oxide layer is preferably created by easy heating in an oxygen-containing The atmosphere.
  • the invention has for its object a method for Propose creating a homogeneous oxide layer on metal components, with which the oxide layer is controlled and reproducible can be applied.
  • a method for producing a homogeneous oxide layer on metal components in which the metal components are heated uniformly in all their areas in a vacuum chamber and after reaching a predetermined temperature with an oxygen-argon mixture for a predetermined period of time about 10 minutes with a predetermined pressure between 1x10 -3 and 8x10 -2 mbar.
  • the turbine blades are accommodated in a chamber which is evacuated.
  • the described method can be modified in such a way that the metal components to be provided with an oxide layer via special gas showers with the oxygen-argon mixture component-specific to a particular to produce a homogeneous oxide layer.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Claims (1)

  1. Procédé pour appliquer un revêtement sous vide à des pièces métalliques, dans lequel
    on préchauffe uniformément à une température d'environ 800°C les pièces métalliques dans toutes leurs parties dans une chambre sous vide au moyen d'une exposition à des électrons,
       caractérisé en ce que
    après obtention de la température prescrite pour obtenir une couche homogène d'oxyde sur des pièces revêtues de McrAIY ou de PtAl, on les alimente en un mélange d'oxygène et d'argon pendant une durée de 10 minutes environ et sous une pression comprise entre 1 x 10-3 et 8 x 10-2 mbar.
EP99959190A 1998-09-30 1999-09-30 Procede pour appliquer un revetement sous vide sur des pieces metalliques Expired - Lifetime EP1129231B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19845803 1998-09-30
DE19845803A DE19845803C2 (de) 1998-09-30 1998-09-30 Verfahren zum Vakuumbeschichten von Metallbauteilen
PCT/DE1999/003236 WO2000018977A2 (fr) 1998-09-30 1999-09-30 Procede pour appliquer un revetement sous vide sur des pieces metalliques

Publications (2)

Publication Number Publication Date
EP1129231A2 EP1129231A2 (fr) 2001-09-05
EP1129231B1 true EP1129231B1 (fr) 2002-11-20

Family

ID=7883452

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99959190A Expired - Lifetime EP1129231B1 (fr) 1998-09-30 1999-09-30 Procede pour appliquer un revetement sous vide sur des pieces metalliques

Country Status (5)

Country Link
US (1) US6589608B2 (fr)
EP (1) EP1129231B1 (fr)
JP (1) JP2002525435A (fr)
DE (2) DE19845803C2 (fr)
WO (1) WO2000018977A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003028428A2 (fr) 2001-09-10 2003-04-10 University Of Virginia Patent Foundation Procede et appareil d'application de revetements d'alliages metalliques
DE10232289B4 (de) * 2002-07-16 2005-04-14 Von Ardenne Anlagentechnik Gmbh Verfahren und Anordnung zur Erzeugung einer homogenen Oxidschicht auf einem Metallbauteil
US20050123783A1 (en) * 2003-07-31 2005-06-09 Gregory Otto J. Composite used for thermal spray instrumentation and method for making the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047348B2 (ja) * 1980-07-04 1985-10-21 株式会社東芝 熱処理装置
US5514482A (en) * 1984-04-25 1996-05-07 Alliedsignal Inc. Thermal barrier coating system for superalloy components
JPS61194168A (ja) * 1985-02-20 1986-08-28 Ishikawajima Harima Heavy Ind Co Ltd ステンレス鋼管の不働態化処理方法
JP2768952B2 (ja) * 1988-08-04 1998-06-25 忠弘 大見 金属酸化処理装置及び金属酸化処理方法
US5262245A (en) * 1988-08-12 1993-11-16 United Technologies Corporation Advanced thermal barrier coated superalloy components
JP3037768B2 (ja) * 1991-02-18 2000-05-08 大阪酸素工業株式会社 不動態化処理装置
GB9426257D0 (en) * 1994-12-24 1995-03-01 Rolls Royce Plc Thermal barrier coating for a superalloy article and method of application
DE19703338C2 (de) * 1996-12-27 1998-11-12 Ardenne Anlagentech Gmbh Verfahren zur Vorwärmung von Werkstücken bei der Vakuumbeschichtung

Also Published As

Publication number Publication date
JP2002525435A (ja) 2002-08-13
US20010031314A1 (en) 2001-10-18
DE19845803A1 (de) 2000-04-20
WO2000018977A2 (fr) 2000-04-06
US6589608B2 (en) 2003-07-08
WO2000018977A3 (fr) 2000-06-08
DE59903499D1 (de) 2003-01-02
DE19845803C2 (de) 2002-10-17
EP1129231A2 (fr) 2001-09-05

Similar Documents

Publication Publication Date Title
DE2527739C3 (de) Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer
DE69210146T2 (de) Verfahren zur Herstellung einer porenfreien, harten Schicht
DE19807636C1 (de) Verfahren zum Herstellen einer korrosions- und oxidationsbeständigen Schlickerschicht
DE3243283C2 (fr)
DE2621753A1 (de) Verfahren zur herstellung von aluminid-ueberzuegen auf nickel-, kobalt- und eisen-basislegierungen
DE2113437A1 (de) Plattierter Metallformkoerper und Verfahren zu seiner Herstellung
WO1999027147A2 (fr) Structure couche superficielle resistante a l'usure, a haute capacite de charge mecanique et a faibles frottements destinee au titane ou a ses alliages et procede de production correspondant
DE59703543D1 (de) Verfahren zum Beschichten von Kohlenstoffsubstraten oder nichtmetallischen, kohlenstoffhaltigen Substraten sowie Substrat beschichtet nach dem Verfahren
EP1129231B1 (fr) Procede pour appliquer un revetement sous vide sur des pieces metalliques
DE19824792A1 (de) Verfahren zum Herstellen einer korrosions- und oxidationsbeständigen Schicht
DE102004002303B4 (de) Verfahren zur Herstellung eines beschichteten Kohlenstoff/Kohlenstoff-Verbundwerkstoffes und danach hergestellter beschichteter Kohlenstoff/Kohlenstoff-Verbundwerkstoff
DE3627775A1 (de) Verfahren zur herstellung von targets
DE2737227A1 (de) Formkoerper aus keramik, insbesondere siliciumkeramik und verfahren zu seiner herstellung
EP2065107B1 (fr) Procédé de fabrication d'un composant doté d'une surface durcie
DE3726073C1 (de) Verfahren zur Herstellung von duennwandigem Halbzeug und dessen Verwendungen
DE3810851C2 (de) Verfahren zur Herstellung von Formteilen
WO1988004698A2 (fr) Procede pour la fabrication et/ou le redimensionnement de pieces, et piece ainsi realisee
DE19960353A1 (de) Verfahren zur Herstellung einer Diffusionsbarriere zur Lebensdauererhöhung von Hochtemperatur-Schutzschichten
EP1367144A1 (fr) Procédé d'enlèvement des parties d'un composant métallique
EP1230429B1 (fr) Procede de realisation d'un element recouvert d'une couche
DD244150A1 (de) Verfahren zur herstellung einer hochverschleissfesten oberflaeche
DE4141366C2 (de) Verfahren zur Modifizierung der Oberfläche von Siliciumnitridsinterkörpern
KR0184417B1 (ko) 고온상에서의 가압공정이 첨가된 스프레이법에 의한 분말소결층 형성방법
DE3590390T1 (de) Verfahren zum Aufbringen von Hartbeschichtungen u. dgl. auf Metalle und dabei erhaltenes Produkt
DE102011011200A1 (de) Verfahren zur Erzeugung von Diffusionsschichten ohne Aktivator über Metallfolien

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20010220

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

17Q First examination report despatched

Effective date: 20011218

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE FR GB IT LI

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: SIEMENS SCHWEIZ AG

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: GERMAN

REF Corresponds to:

Ref document number: 59903499

Country of ref document: DE

Date of ref document: 20030102

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 20030211

ET Fr: translation filed
REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

Ref document number: 1129231E

Country of ref document: IE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20030821

REG Reference to a national code

Ref country code: CH

Ref legal event code: PCAR

Free format text: SIEMENS SCHWEIZ AG;INTELLECTUAL PROPERTY FREILAGERSTRASSE 40;8047 ZUERICH (CH)

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20101119

Year of fee payment: 12

Ref country code: CH

Payment date: 20101207

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20110915

Year of fee payment: 13

Ref country code: FR

Payment date: 20111005

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20110927

Year of fee payment: 13

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 59903499

Country of ref document: DE

Effective date: 20120403

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110930

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120403

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110930

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20120930

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20130531

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20121001

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120930