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DE60120167D1 - Optische mikromekanische Schaltmatrix mit eingebetteten strahlführenden Kanälen und Betriebsverfahren - Google Patents

Optische mikromekanische Schaltmatrix mit eingebetteten strahlführenden Kanälen und Betriebsverfahren

Info

Publication number
DE60120167D1
DE60120167D1 DE60120167T DE60120167T DE60120167D1 DE 60120167 D1 DE60120167 D1 DE 60120167D1 DE 60120167 T DE60120167 T DE 60120167T DE 60120167 T DE60120167 T DE 60120167T DE 60120167 D1 DE60120167 D1 DE 60120167D1
Authority
DE
Germany
Prior art keywords
mirrors
optical
optical signal
switching matrix
operating methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60120167T
Other languages
English (en)
Other versions
DE60120167T2 (de
Inventor
Meichun Ruan
Jun Shen
Charles Wheeler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arizona State University ASU
Original Assignee
Arizona State University ASU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arizona State University ASU filed Critical Arizona State University ASU
Application granted granted Critical
Publication of DE60120167D1 publication Critical patent/DE60120167D1/de
Publication of DE60120167T2 publication Critical patent/DE60120167T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H67/00—Electrically-operated selector switches
    • H01H67/22—Switches without multi-position wipers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Use Of Switch Circuits For Exchanges And Methods Of Control Of Multiplex Exchanges (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
DE60120167T 2000-07-11 2001-07-11 Optische mikromekanische Schaltmatrix mit eingebetteten strahlführenden Kanälen und Betriebsverfahren Expired - Lifetime DE60120167T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21726500P 2000-07-11 2000-07-11
US217265P 2000-07-11
PCT/US2001/021856 WO2002005012A2 (en) 2000-07-11 2001-07-11 Optical mems switching array with embedded beam-confining channels and method of operating same

Publications (2)

Publication Number Publication Date
DE60120167D1 true DE60120167D1 (de) 2006-07-06
DE60120167T2 DE60120167T2 (de) 2007-05-24

Family

ID=22810321

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60120167T Expired - Lifetime DE60120167T2 (de) 2000-07-11 2001-07-11 Optische mikromekanische Schaltmatrix mit eingebetteten strahlführenden Kanälen und Betriebsverfahren

Country Status (11)

Country Link
EP (1) EP1299761B1 (de)
JP (1) JP2004503801A (de)
KR (1) KR20030015886A (de)
CN (1) CN100405121C (de)
AT (1) ATE328301T1 (de)
AU (1) AU2001275896A1 (de)
DE (1) DE60120167T2 (de)
DK (1) DK1299761T3 (de)
ES (1) ES2263639T3 (de)
PT (1) PT1299761E (de)
WO (1) WO2002005012A2 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6801682B2 (en) 2001-05-18 2004-10-05 Adc Telecommunications, Inc. Latching apparatus for a MEMS optical switch
US20030137374A1 (en) 2002-01-18 2003-07-24 Meichun Ruan Micro-Magnetic Latching switches with a three-dimensional solenoid coil
FR2835062B1 (fr) * 2002-01-18 2004-06-25 Teem Photonics Commutateur optique a micro-miroir et son procede de realisation
FR2838526B1 (fr) * 2002-04-11 2004-07-02 Memscap Matrice de commutateurs optiques et procede de fabrication d'une telle matrice
US6873398B2 (en) 2003-05-21 2005-03-29 Esko-Graphics A/S Method and apparatus for multi-track imaging using single-mode beams and diffraction-limited optics
US7246012B2 (en) 2003-07-18 2007-07-17 Cytokinetics, Inc. Characterizing biological stimuli by response curves
KR100631835B1 (ko) 2004-03-22 2006-10-09 삼성전기주식회사 컨티레버형 ｐｌｃ 광 감쇠기 및 그 제조방법
KR100724740B1 (ko) 2005-09-08 2007-06-04 삼성전자주식회사 미러 패키지 및 광 스캐너
JP4599256B2 (ja) * 2005-09-09 2010-12-15 株式会社東芝 磁気スイッチング素子及びこれを用いた信号処理装置
CN101168434B (zh) * 2006-10-24 2011-06-15 精工爱普生株式会社 Mems器件
DE102008001038B4 (de) * 2008-04-08 2016-08-11 Robert Bosch Gmbh Mikromechanisches Bauelement mit Schrägstruktur und entsprechendes Herstellungsverfahren
CN101719575B (zh) * 2010-01-13 2012-08-29 上海交通大学 电热驱动的面内双稳态射频微开关
CN103048783A (zh) * 2012-12-21 2013-04-17 无锡微奥科技有限公司 一种热驱动mems微镜
CN103905009A (zh) * 2012-12-27 2014-07-02 精工爱普生株式会社 振子、振荡器、电子设备、移动体和振子的制造方法
JP2014212410A (ja) * 2013-04-18 2014-11-13 セイコーエプソン株式会社 振動子、発振器、電子機器、移動体、および振動子の製造方法
KR102782757B1 (ko) * 2016-03-01 2025-03-14 매직 립, 인코포레이티드 상이한 파장들의 광을 도파관들로 입력하기 위한 반사성 스위칭 디바이스
CN105858590B (zh) * 2016-06-02 2017-08-25 苏州科技学院 Mems电磁力驱动器及其制备方法
US10825628B2 (en) 2017-07-17 2020-11-03 Analog Devices Global Unlimited Company Electromagnetically actuated microelectromechanical switch
CN109687059B (zh) * 2018-12-25 2023-10-24 苏州磁明科技有限公司 具有柔性限位带的同轴射频开关及限位带制造方法
CN111398014B (zh) * 2020-03-30 2020-12-08 河海大学 一种磁悬浮式土体剪切型断裂试验的矫正方法
CN111474633B (zh) * 2020-05-26 2022-06-03 上海工程技术大学 一种电磁式双反射镜mems光开关

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4496211A (en) * 1980-12-05 1985-01-29 Maurice Daniel Lightpipe network with optical devices for distributing electromagnetic radiation
US5048912A (en) * 1988-03-09 1991-09-17 Fujitsu Limited Optical fiber switching with spherical lens and method of making same
US5042889A (en) * 1990-04-09 1991-08-27 At&T Bell Laboratories Magnetic activation mechanism for an optical switch
JPH04275519A (ja) * 1991-03-04 1992-10-01 Nippon Telegr & Teleph Corp <Ntt> 光マトリックススイッチ
US5847631A (en) * 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
JP4001436B2 (ja) * 1998-07-23 2007-10-31 三菱電機株式会社 光スイッチ及び光スイッチを用いた光路切換装置

Also Published As

Publication number Publication date
DE60120167T2 (de) 2007-05-24
KR20030015886A (ko) 2003-02-25
EP1299761A2 (de) 2003-04-09
JP2004503801A (ja) 2004-02-05
AU2001275896A1 (en) 2002-01-21
ATE328301T1 (de) 2006-06-15
DK1299761T3 (da) 2006-10-02
WO2002005012A3 (en) 2002-06-27
CN1668957A (zh) 2005-09-14
ES2263639T3 (es) 2006-12-16
WO2002005012A2 (en) 2002-01-17
PT1299761E (pt) 2006-10-31
CN100405121C (zh) 2008-07-23
EP1299761B1 (de) 2006-05-31

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