DE60219937D1 - Mikroaktuator, mikroaktuatorvorrichtung, optischer schalter und optische schaltanordnung - Google Patents

Mikroaktuator, mikroaktuatorvorrichtung, optischer schalter und optische schaltanordnung

Info

Publication number: DE60219937D1
Authority: DE; Germany
Prior art keywords: optical switch; microactuator; switch assembly; assembly; microactuator device
Prior art date: 2001-09-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE60219937T

Other languages

English (en)

Other versions

DE60219937T2 (de

Inventor

Keiichi Akagawa

Junji Suzuki

Tohru Ishizuya

Yoshihiko Suzuki

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nikon Corp

Original Assignee

Nikon Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-09-17

Filing date

2002-09-05

Publication date

2007-06-14

2002-09-05 Application filed by Nikon Corp filed Critical Nikon Corp

2007-06-14 Application granted granted Critical

2007-06-14 Publication of DE60219937D1 publication Critical patent/DE60219937D1/de

2008-01-17 Publication of DE60219937T2 publication Critical patent/DE60219937T2/de

2022-09-06 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/053—Translation according to an axis perpendicular to the substrate
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12104—Mirror; Reflectors or the like
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3572—Magnetic force
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Mechanical Light Control Or Optical Switches (AREA)
Micromachines (AREA)

DE60219937T 2001-09-17 2002-09-05 Mikroaktuator, mikroaktuatorvorrichtung, optischer schalter und optische schaltanordnung Expired - Lifetime DE60219937T2 (de)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
JP2001282421		2001-09-17
JP2001282421		2001-09-17
JP2001368060A JP4089215B2 (ja)	2001-09-17	2001-12-03	マイクロアクチュエータ、並びに、これを用いたマイクロアクチュエータ装置、光スイッチ及び光スイッチアレー
JP2001368060		2001-12-03
PCT/JP2002/009023 WO2003024864A1 (en)	2001-09-17	2002-09-05	Micro-actuator, micro-actuator device, optical switch and optical switch array

Publications (2)

Publication Number	Publication Date
DE60219937D1 true DE60219937D1 (de)	2007-06-14
DE60219937T2 DE60219937T2 (de)	2008-01-17

Family

ID=26622373

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE60219937T Expired - Lifetime DE60219937T2 (de)	2001-09-17	2002-09-05	Mikroaktuator, mikroaktuatorvorrichtung, optischer schalter und optische schaltanordnung

Country Status (7)

Country	Link
US (2)	US6936950B2 (de)
EP (1)	EP1437325B1 (de)
JP (1)	JP4089215B2 (de)
KR (1)	KR100623469B1 (de)
CN (1)	CN1268537C (de)
DE (1)	DE60219937T2 (de)
WO (1)	WO2003024864A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4089215B2 (ja) *	2001-09-17	2008-05-28	株式会社ニコン	マイクロアクチュエータ、並びに、これを用いたマイクロアクチュエータ装置、光スイッチ及び光スイッチアレー
JP2003266391A (ja) *	2002-03-19	2003-09-24	Japan Aviation Electronics Industry Ltd	静電駆動デバイス
JP2004004649A (ja) *	2002-03-28	2004-01-08	Ntt Electornics Corp	光学装置
JP4300766B2 (ja) *	2002-08-01	2009-07-22	株式会社ニコン	立体構造素子およびその製造方法、光スイッチ、マイクロデバイス
JP3715611B2 (ja) *	2002-10-11	2005-11-09	エヌティティエレクトロニクス株式会社	マイクロアクチュエータ装置及びこれを用いた光スイッチシステム
JP4227531B2 (ja) *	2004-01-27	2009-02-18	Ｈｏｙａ株式会社	ヒンジ構造
KR100631835B1 (ko) *	2004-03-22	2006-10-09	삼성전기주식회사	컨티레버형 ｐｌｃ 광 감쇠기 및 그 제조방법
JP4569161B2 (ja) *	2004-04-30	2010-10-27	株式会社ニコン	マイクロアクチュエータアレー、光学装置及び光スイッチアレー
JP4525206B2 (ja) *	2004-06-24	2010-08-18	株式会社ニコン	マイクロアクチュエータアレー、光学装置及び光スイッチアレー
US7356880B2 (en) *	2004-07-26	2008-04-15	Pentax Corporation	Hinge structure of micromirror device
TWI304394B (en) *	2006-07-03	2008-12-21	Nat Univ Tsing Hua	Magnetic element and manufacturing process, driving structure and driving method therefor
DE102006052414B4 (de) *	2006-11-07	2015-10-01	Robert Bosch Gmbh	Mikromechanischer Aktor mit einer Welle
JP5446122B2 (ja) *	2008-04-25	2014-03-19	パナソニック株式会社	ミアンダ形振動子およびこれを用いた光学反射素子
JP5803615B2 (ja)	2011-11-29	2015-11-04	富士通株式会社	電子デバイスとその製造方法
CN105309056B (zh) *	2013-09-06	2018-04-03	株式会社村田制作所	多层基板
JP6778134B2 (ja) *	2017-03-14	2020-10-28	浜松ホトニクス株式会社	光モジュール及びその実装方法
WO2018168929A1 (ja) *	2017-03-14	2018-09-20	浜松ホトニクス株式会社	光モジュール
DE112018001385T5 (de) *	2017-03-14	2019-11-28	Hamamatsu Photonics K.K.	Lichtmodul
JP6782651B2 (ja) *	2017-03-14	2020-11-11	浜松ホトニクス株式会社	光モジュール
DE112018001349T5 (de)	2017-03-14	2019-11-21	Hamamatsu Photonics K.K.	Optisches Modul
WO2018168927A1 (ja) *	2017-03-14	2018-09-20	浜松ホトニクス株式会社	光モジュール
CN108726470B (zh) *	2017-04-21	2020-02-21	华为技术有限公司	Mems芯片及其电封装方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3814150A1 (de) *	1988-04-27	1989-11-09	Draegerwerk Ag	Ventilanordnung aus mikrostrukturierten komponenten
DE3914031C2 (de) *	1989-04-28	1993-10-28	Deutsche Aerospace	Mikromechanischer Aktuator
JP3109220B2 (ja)	1992-03-09	2000-11-13	株式会社ニコン	マイクログリッパー
JP3471380B2 (ja) *	1992-12-28	2003-12-02	松下電器産業株式会社	静電モータ
US5737302A (en) *	1994-11-10	1998-04-07	Kabushiki Kaisha Toshiba	Galvanomirror and optical disk drive using the same
US5945898A (en) *	1996-05-31	1999-08-31	The Regents Of The University Of California	Magnetic microactuator
US6201629B1 (en) *	1997-08-27	2001-03-13	Microoptical Corporation	Torsional micro-mechanical mirror system
DE69830153T2 (de) *	1998-01-20	2005-10-13	Seiko Epson Corp.	Optische schaltvorrichtung und bildanzeigevorrichtung
JP3552601B2 (ja) *	1998-11-16	2004-08-11	日本ビクター株式会社	光偏向子及びこれを用いた表示装置
EP1033601B1 (de) *	1999-03-04	2005-08-03	Japan Aviation Electronics Industry Limited	Optischer Schalter und Verfahren zur Herstellung eines solchen Schalters
JP2001076605A (ja) *	1999-07-01	2001-03-23	Advantest Corp	集積型マイクロスイッチおよびその製造方法
JP3500497B2 (ja)	1999-07-27	2004-02-23	日本航空電子工業株式会社	光スイッチ
US6658177B1 (en) *	1999-12-13	2003-12-02	Memlink Ltd.	Switching device and method of fabricating the same
US6396975B1 (en) *	2000-01-21	2002-05-28	Jds Uniphase Corporation	MEMS optical cross-connect switch
JP4089215B2 (ja) *	2001-09-17	2008-05-28	株式会社ニコン	マイクロアクチュエータ、並びに、これを用いたマイクロアクチュエータ装置、光スイッチ及び光スイッチアレー

2001
- 2001-12-03 JP JP2001368060A patent/JP4089215B2/ja not_active Expired - Fee Related
2002
- 2002-09-05 EP EP02767894A patent/EP1437325B1/de not_active Expired - Lifetime
- 2002-09-05 WO PCT/JP2002/009023 patent/WO2003024864A1/ja not_active Ceased
- 2002-09-05 DE DE60219937T patent/DE60219937T2/de not_active Expired - Lifetime
- 2002-09-05 KR KR1020047003910A patent/KR100623469B1/ko not_active Expired - Fee Related
- 2002-09-05 CN CNB028181301A patent/CN1268537C/zh not_active Expired - Fee Related
2004
- 2004-03-02 US US10/792,427 patent/US6936950B2/en not_active Expired - Lifetime
2005
- 2005-05-16 US US11/131,089 patent/US20050206986A1/en not_active Abandoned

Also Published As

Publication number	Publication date
WO2003024864A1 (en)	2003-03-27
KR100623469B1 (ko)	2006-09-19
US6936950B2 (en)	2005-08-30
EP1437325A4 (de)	2005-07-06
EP1437325A1 (de)	2004-07-14
CN1555339A (zh)	2004-12-15
DE60219937T2 (de)	2008-01-17
JP4089215B2 (ja)	2008-05-28
EP1437325B1 (de)	2007-05-02
US20040183395A1 (en)	2004-09-23
KR20040035804A (ko)	2004-04-29
US20050206986A1 (en)	2005-09-22
CN1268537C (zh)	2006-08-09
JP2003159698A (ja)	2003-06-03

Publication	Publication Date	Title
DE60219937D1 (de)	2007-06-14	Mikroaktuator, mikroaktuatorvorrichtung, optischer schalter und optische schaltanordnung
DE60220344D1 (de)	2007-07-12	Optischer Schalter
FI20010778L (fi)	2002-10-13	Optinen kytkentäjärjestely
NL1015055A1 (nl)	2000-10-31	Optische schakelaar.
DE60214958D1 (de)	2006-11-09	Schaltvorrichtung
DE60209398D1 (de)	2006-04-27	Optischer Schalter mit konvergierendem Element
DE60209577D1 (de)	2006-04-27	Schalter
DE60211930D1 (de)	2006-07-06	Polycarbonat-siloxan-copolymere
DE60231954D1 (de)	2009-05-28	Optische identifikationsvorrichtung
DE60311340T8 (de)	2007-10-31	Optischer Schalter
FR2825511B1 (fr)	2005-05-13	Commutateur coulissant
DE60239779D1 (de)	2011-06-01	Keramisches MEMS-Bauelement
DE60229699D1 (de)	2008-12-18	Schalter
DE60219799D1 (de)	2007-06-06	Verschiebbare sonnenblende
FR2831706B1 (fr)	2005-06-24	Commutateur
DE60101369D1 (de)	2004-01-15	Optische Schaltmatrix
DE60238005D1 (de)	2010-11-25	Schalter
DE60302374D1 (de)	2005-12-29	MEMS basierter optischer Schalter
DE602004006941D1 (de)	2007-07-26	Optisches Wellenleiterbauteil, variabler optischer Abschwächer und optischer Schalter
DE60207898D1 (de)	2006-01-19	Schaltvorrichtung
DE60211779D1 (de)	2006-07-06	Schalter
DE60132728D1 (de)	2008-03-27	Programmierbare optische Schaltvorrichtung
DE50200795D1 (de)	2004-09-16	Mikroventil
DE10196557T1 (de)	2003-08-07	Laserstrahlvorrichtung
DE60230730D1 (de)	2009-02-26	Optischer schalter

Legal Events

Date	Code	Title	Description
2008-05-21	8364	No opposition during term of opposition