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DE60116839D1 - Verfahren zur Herstellung einer Spiegelstruktur - Google Patents

Verfahren zur Herstellung einer Spiegelstruktur

Info

Publication number
DE60116839D1
DE60116839D1 DE60116839T DE60116839T DE60116839D1 DE 60116839 D1 DE60116839 D1 DE 60116839D1 DE 60116839 T DE60116839 T DE 60116839T DE 60116839 T DE60116839 T DE 60116839T DE 60116839 D1 DE60116839 D1 DE 60116839D1
Authority
DE
Germany
Prior art keywords
producing
mirror structure
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60116839T
Other languages
English (en)
Other versions
DE60116839T2 (de
Inventor
Michel Rosa
Eric Peeters
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of DE60116839D1 publication Critical patent/DE60116839D1/de
Application granted granted Critical
Publication of DE60116839T2 publication Critical patent/DE60116839T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/0065—Mechanical properties
    • B81C1/00666—Treatments for controlling internal stress or strain in MEMS structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
DE60116839T 2000-09-28 2001-09-07 Verfahren zur Herstellung einer Spiegelstruktur Expired - Lifetime DE60116839T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US675812 1991-03-27
US09/675,812 US6632374B1 (en) 2000-09-28 2000-09-28 Method for an optical switch on a silicon on insulator substrate

Publications (2)

Publication Number Publication Date
DE60116839D1 true DE60116839D1 (de) 2006-04-13
DE60116839T2 DE60116839T2 (de) 2006-08-10

Family

ID=24712069

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60116839T Expired - Lifetime DE60116839T2 (de) 2000-09-28 2001-09-07 Verfahren zur Herstellung einer Spiegelstruktur

Country Status (4)

Country Link
US (1) US6632374B1 (de)
EP (1) EP1193528B1 (de)
JP (1) JP2002162579A (de)
DE (1) DE60116839T2 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6706202B1 (en) * 2000-09-28 2004-03-16 Xerox Corporation Method for shaped optical MEMS components with stressed thin films
US6922500B2 (en) * 2001-10-24 2005-07-26 Intel Corporation Optical configuration for optical fiber switch
US6882769B1 (en) * 2001-10-24 2005-04-19 Intel Corporation Control system for an optical fiber switch
US7019434B2 (en) * 2002-11-08 2006-03-28 Iris Ao, Inc. Deformable mirror method and apparatus including bimorph flexures and integrated drive
US20040160118A1 (en) 2002-11-08 2004-08-19 Knollenberg Clifford F. Actuator apparatus and method for improved deflection characteristics
US7106924B2 (en) * 2002-12-24 2006-09-12 Sumitomo Electric Industries, Ltd. Optical switching device and optical transmission system
FR2859541B1 (fr) * 2003-09-08 2005-10-14 Commissariat Energie Atomique Micro-miroir actionnable electriquement en rotation
US7072090B2 (en) * 2004-04-22 2006-07-04 Micronic Laser Systems Ab Addressing of an SLM
US7771803B2 (en) 2004-10-27 2010-08-10 Palo Alto Research Center Incorporated Oblique parts or surfaces
US20060261436A1 (en) * 2005-05-19 2006-11-23 Freescale Semiconductor, Inc. Electronic device including a trench field isolation region and a process for forming the same
US7670895B2 (en) 2006-04-24 2010-03-02 Freescale Semiconductor, Inc Process of forming an electronic device including a semiconductor layer and another layer adjacent to an opening within the semiconductor layer
US7491622B2 (en) 2006-04-24 2009-02-17 Freescale Semiconductor, Inc. Process of forming an electronic device including a layer formed using an inductively coupled plasma
US7528078B2 (en) 2006-05-12 2009-05-05 Freescale Semiconductor, Inc. Process of forming electronic device including a densified nitride layer adjacent to an opening within a semiconductor layer
US20080137172A1 (en) * 2006-12-06 2008-06-12 Glimmerglass Networks, Inc. Array of graduated pre-tilted mems mirrors
US10317626B2 (en) * 2017-06-15 2019-06-11 Google Llc Inner and outer collimator elements for an optical circuit switch
US10690859B1 (en) * 2018-07-22 2020-06-23 Sam A Marshall Twisted Z optical Switch

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0756532B2 (ja) * 1984-07-31 1995-06-14 テキサス インスツルメンツ インコーポレイテツド 空間光変調器の製造方法
US4954789A (en) * 1989-09-28 1990-09-04 Texas Instruments Incorporated Spatial light modulator
US5633552A (en) * 1993-06-04 1997-05-27 The Regents Of The University Of California Cantilever pressure transducer
US5673139A (en) * 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US5753134A (en) * 1994-01-04 1998-05-19 Siemens Aktiengesellschaft Method for producing a layer with reduced mechanical stresses
US5613861A (en) * 1995-06-07 1997-03-25 Xerox Corporation Photolithographically patterned spring contact
JPH0990249A (ja) * 1995-09-25 1997-04-04 Olympus Optical Co Ltd 光偏向子及びその製造方法
US6061323A (en) 1996-07-30 2000-05-09 Seagate Technology, Inc. Data storage system having an improved surface micro-machined mirror
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
JPH1114933A (ja) * 1997-06-24 1999-01-22 Toshiba Corp ガルバノミラーおよびこれを用いた光ディスク装置
US6201629B1 (en) 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6392221B1 (en) * 1997-12-22 2002-05-21 Agere Systems Guardian Corp. Micro-electro-mechanical optical device
KR100703140B1 (ko) * 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US5979892A (en) * 1998-05-15 1999-11-09 Xerox Corporation Controlled cilia for object manipulation
JP2000164105A (ja) * 1998-11-25 2000-06-16 Omron Corp マイクロマシン、マイクロアクチュエータ及びマイクロリレー
JP2000162538A (ja) * 1998-11-30 2000-06-16 Mitsubishi Electric Corp マイクロミラー装置
US6091537A (en) * 1998-12-11 2000-07-18 Xerox Corporation Electro-actuated microlens assemblies
US6267605B1 (en) * 1999-11-15 2001-07-31 Xerox Corporation Self positioning, passive MEMS mirror structures
US6360036B1 (en) * 2000-01-14 2002-03-19 Corning Incorporated MEMS optical switch and method of manufacture
US20020071169A1 (en) * 2000-02-01 2002-06-13 Bowers John Edward Micro-electro-mechanical-system (MEMS) mirror device
WO2001077001A2 (en) * 2000-04-11 2001-10-18 Sandia Corporation Microelectromechanical apparatus for elevating and tilting a platform
US6283601B1 (en) 2000-04-14 2001-09-04 C Speed Corporation Optical mirror system with multi-axis rotational control
US6300665B1 (en) * 2000-09-28 2001-10-09 Xerox Corporation Structure for an optical switch on a silicon on insulator substrate

Also Published As

Publication number Publication date
EP1193528A2 (de) 2002-04-03
JP2002162579A (ja) 2002-06-07
DE60116839T2 (de) 2006-08-10
EP1193528A3 (de) 2003-08-13
US6632374B1 (en) 2003-10-14
EP1193528B1 (de) 2006-01-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition