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DE19781528T1 - Testgerät für integrierte Schaltungselemente - Google Patents

Testgerät für integrierte Schaltungselemente

Info

Publication number
DE19781528T1
DE19781528T1 DE19781528T DE19781528T DE19781528T1 DE 19781528 T1 DE19781528 T1 DE 19781528T1 DE 19781528 T DE19781528 T DE 19781528T DE 19781528 T DE19781528 T DE 19781528T DE 19781528 T1 DE19781528 T1 DE 19781528T1
Authority
DE
Germany
Prior art keywords
pct
test head
integrated circuit
test device
circuit elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19781528T
Other languages
English (en)
Inventor
Toshiyuki Okayasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of DE19781528T1 publication Critical patent/DE19781528T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924—Voltage or current aspects, e.g. driver, receiver

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
DE19781528T 1996-11-15 1997-11-13 Testgerät für integrierte Schaltungselemente Withdrawn DE19781528T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8304933A JPH10142298A (ja) 1996-11-15 1996-11-15 集積回路デバイス試験装置
PCT/JP1997/004130 WO1998022829A1 (en) 1996-11-15 1997-11-13 Integrated circuit device tester

Publications (1)

Publication Number Publication Date
DE19781528T1 true DE19781528T1 (de) 1999-03-11

Family

ID=17939070

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19781528T Withdrawn DE19781528T1 (de) 1996-11-15 1997-11-13 Testgerät für integrierte Schaltungselemente

Country Status (7)

Country Link
US (1) US6157200A (de)
JP (1) JPH10142298A (de)
KR (1) KR100295548B1 (de)
DE (1) DE19781528T1 (de)
GB (1) GB2322203A (de)
TW (1) TW374847B (de)
WO (1) WO1998022829A1 (de)

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CN1293387C (zh) * 2001-05-11 2007-01-03 株式会社鼎新 支持多虚拟逻辑测试仪的半导体测试系统
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US7385385B2 (en) * 2001-10-03 2008-06-10 Nextest Systems Corporation System for testing DUT and tester for use therewith
JP3857099B2 (ja) 2001-10-09 2006-12-13 株式会社アドバンテスト データ伝送装置、光電変換回路、及び試験装置
US20040145381A1 (en) * 2001-12-28 2004-07-29 Jun Su Test fixture for die-level testing of planar lightwave circuits
KR100459701B1 (ko) * 2002-02-18 2004-12-04 삼성전자주식회사 접점 개폐 장치 제어 회로 및 이를 이용한 반도체 칩테스트 시스템 및 테스트 방법
US20040187049A1 (en) * 2003-02-27 2004-09-23 Nptest, Inc. Very small pin count IC tester
JP2005091041A (ja) * 2003-09-12 2005-04-07 Advantest Corp 半導体試験装置
US7317324B2 (en) * 2003-11-04 2008-01-08 Canon Kabushiki Kaisha Semiconductor integrated circuit testing device and method
US7336066B2 (en) * 2004-05-21 2008-02-26 Credence Systems Corporation Reduced pin count test method and apparatus
US20050289415A1 (en) * 2004-06-24 2005-12-29 Celerity Research, Inc. Intelligent probe chips/heads
JP2006153779A (ja) * 2004-11-30 2006-06-15 Advantest Corp 試験装置
JP4328713B2 (ja) * 2004-11-30 2009-09-09 株式会社アドバンテスト 試験装置、光接続部、及び製造方法
US7447964B2 (en) * 2005-01-03 2008-11-04 International Business Machines Corporation Difference signal path test and characterization circuit
JP2006234669A (ja) * 2005-02-25 2006-09-07 Advantest Corp 伝熱体、テストボード、及び試験装置
US7240264B2 (en) * 2005-04-28 2007-07-03 Lsi Corporation Scan test expansion module
JPWO2006129372A1 (ja) * 2005-06-03 2008-12-25 株式会社アドバンテスト 半導体試験装置
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JP4527078B2 (ja) * 2006-03-31 2010-08-18 住友電工デバイス・イノベーション株式会社 試験システム
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KR100736673B1 (ko) * 2006-08-01 2007-07-06 주식회사 유니테스트 반도체 소자 테스트 장치
JP2008118297A (ja) * 2006-11-01 2008-05-22 Matsushita Electric Ind Co Ltd デジタルビデオデータ検査システム及び半導体装置
TW200831923A (en) * 2007-01-19 2008-08-01 King Yuan Electronics Co Ltd Device and method for DC and system level test integration
JP4919039B2 (ja) * 2007-03-13 2012-04-18 横河電機株式会社 半導体試験装置
US8977912B2 (en) * 2007-05-07 2015-03-10 Macronix International Co., Ltd. Method and apparatus for repairing memory
TWM338356U (en) * 2008-04-08 2008-08-11 Princeton Technology Corp Circuit testing apparatus
JP5603705B2 (ja) 2010-08-06 2014-10-08 株式会社アドバンテスト デバイスインターフェイス装置および試験装置
KR20120066158A (ko) * 2010-12-14 2012-06-22 삼성전자주식회사 테스트 방법 및 이를 수행하기 위한 장치
TWI437243B (zh) * 2010-12-30 2014-05-11 Test Research Inc 電性連接缺陷模擬測試方法及其系統
KR101301949B1 (ko) 2011-11-07 2013-09-02 가부시키가이샤 어드밴티스트 디바이스 인터페이스 장치 및 시험 장치
US10055327B2 (en) * 2014-09-30 2018-08-21 International Business Machines Corporation Evaluating fairness in devices under test
US9568530B2 (en) * 2014-10-29 2017-02-14 Intel Corporation Active cable testing
CN104407254B (zh) * 2014-12-04 2018-01-30 中国人民解放军海军工程大学 一种电路板测试仪
US11442098B2 (en) 2019-06-20 2022-09-13 Teradyne, Inc. Generating a waveform based on digital pulses
US11604713B2 (en) * 2020-02-12 2023-03-14 International Business Machines Corporation Automated hardware for input/output (I/O) test regression apparatus
US11604219B2 (en) * 2020-12-15 2023-03-14 Teradyne, Inc. Automatic test equipement having fiber optic connections to remote servers
KR102820657B1 (ko) * 2023-05-19 2025-06-12 전남대학교산학협력단 시스템 온 칩을 위한 멀티-사이트 테스트 장치 및 방법
KR102599709B1 (ko) * 2023-09-05 2023-11-08 (주) 에이블리 반도체검사장비 핀 드라이버 장치 및 그 운용방법

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JPH0658395B2 (ja) * 1984-04-16 1994-08-03 横河電機株式会社 アナログｌｓｉテスタ
JPS61117472A (ja) * 1984-11-13 1986-06-04 Yokogawa Electric Corp テストシステム
JPH0266476A (ja) * 1988-08-31 1990-03-06 Nec Kyushu Ltd 半導体回路試験装置
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JPH11238395A (ja) * 1998-02-20 1999-08-31 Advantest Corp メモリ試験装置

Also Published As

Publication number Publication date
TW374847B (en) 1999-11-21
GB2322203A (en) 1998-08-19
KR100295548B1 (ko) 2001-08-07
WO1998022829A1 (en) 1998-05-28
KR19990076906A (ko) 1999-10-25
JPH10142298A (ja) 1998-05-29
US6157200A (en) 2000-12-05
GB9810225D0 (en) 1998-07-08

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Legal Events

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