DE1160266B - Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances - Google Patents
Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substancesInfo
- Publication number
- DE1160266B DE1160266B DES57521A DES0057521A DE1160266B DE 1160266 B DE1160266 B DE 1160266B DE S57521 A DES57521 A DE S57521A DE S0057521 A DES0057521 A DE S0057521A DE 1160266 B DE1160266 B DE 1160266B
- Authority
- DE
- Germany
- Prior art keywords
- vapor deposition
- metal
- condensation
- insulating material
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 title claims description 10
- 238000007740 vapor deposition Methods 0.000 title claims description 8
- 239000000126 substance Substances 0.000 title claims description 6
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 239000011810 insulating material Substances 0.000 title claims 2
- 239000003990 capacitor Substances 0.000 claims description 3
- 238000010025 steaming Methods 0.000 claims description 2
- 239000004215 Carbon black (E152) Substances 0.000 claims 1
- 229930195733 hydrocarbon Natural products 0.000 claims 1
- 150000002430 hydrocarbons Chemical class 0.000 claims 1
- 239000011888 foil Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000000699 topical effect Effects 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
- H01G13/06—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/002—Inhomogeneous material in general
- H01B3/004—Inhomogeneous material in general with conductive additives or conductive layers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Physical Vapour Deposition (AREA)
Description
In dem Hauptpatent 1134 566 wird eine Vorrichtung zur Bedampfung von Isolierstoffbändern, die vorzugsweise zur Herstellung selbstheilender Kondensatoren verwendet werden, mit einem kondensationsverhindernden Stoff beschrieben, und zwar zur Bedampfung solcher Teile dieser Isolierstoffbänder, die bei einer nachfolgenden Bedampfung mit Metall nicht metallisiert werden sollen. Diese Vorrichtung, die Gegenstand des älteren Patents ist, besteht aus einem Vorratsgefäß für den kondensationsverhindernden Stoff, einer Verdampferdüse, die über ein Rohr mit dem Vorratsgefäß verbunden ist, einem Docht, der in den kondensationsverhindernden Stoff eintaucht und der etwa vor der Verdampferdüse endet, und aus einer Heizvorrichtung, die mindestens einen Teil des Dochtes, der aus dem kondensationsverhindernden Stoff herausragt, erhitzt.In the main patent 1134 566 a device for the vapor deposition of insulating tapes, which are preferably used for the production of self-healing capacitors are used, described with a condensation-preventing substance, namely for vaporization those parts of these insulating tapes that are not in a subsequent vapor deposition with metal are to be metallized. This device, which is the subject of the earlier patent, consists of one Storage vessel for the condensation-preventing substance, an evaporator nozzle, which is connected via a pipe with is connected to the storage vessel, a wick that is immersed in the condensation-preventing substance and which ends about in front of the evaporator nozzle, and from a heating device that has at least part of the Wick protruding from the anti-condensation fabric is heated.
Es hat sich nun gezeigt, daß bei der Anwendung dieser Vorrichtung zur Erzeugung isolierender Streifen zwischen kondensierten Metallschichten die Isolierstreifenbänder noch eine gewisse Unscharfe aufweisen. Fernerhin ist die Breite dieser isolierenden Streifen nicht immer konstant, sondern schwankt um einen Mittelwert. Diese Schwankung wirkt sich insbesondere bei selbstheilenden Kondensatoren, für welche isolierende Streifen von konstanter Breite mit möglichst scharfen Rändern gefordert werden, sehr ungünstig aus.It has now been shown that when using this device for producing insulating strips between condensed metal layers, the insulating strips still have a certain blurring. Furthermore, the width of these insulating strips is not always constant, but fluctuates around one Average. This fluctuation affects especially self-healing capacitors, for which insulating strips of constant width with edges that are as sharp as possible are required, which is very unfavorable the end.
Zur Erzielung randscharfer isolierender Streifen wird nun vorgeschlagen, bei der nach Hauptpatent 1134 566 bekannten Vorrichtung erfindungsgemäß zwischen der Düse des Verdampfers 1 und der auf einer Umlaufrolle 3 umlaufenden Trägerfolie 2 eine Blende 4 anzuordnen, welche vorzugsweise eine quadratische oder rechteckige Blendenöffnung 5 aufweist. Die in einem möglichst geringen Abstand von der Folie 2 angebrachte Blende 4 ist aus möglichst dünnem Blech, z. B. von 0,1 mm Stärke, gefertigt, was zur Erzeugung randscharfer isolierender Streifen auf den Folien sehr wesentlich ist. Selbstverständlich empfiehlt es sich, eine das Austauschen der Blenden ermöglichende Halterung für diese anzubringen.In order to achieve insulating strips with sharp edges, it is now proposed in the case of the main patent 1134 566 known device according to the invention between the nozzle of the evaporator 1 and the on a revolving roll 3 revolving carrier film 2 to arrange a screen 4, which is preferably a square or rectangular aperture 5 has. The closest possible distance from the Foil 2 attached panel 4 is made of the thinnest possible sheet metal, for. B. 0.1 mm thick, manufactured what to generate sharp-edged insulating strips on the foils is very essential. Of course I recommend it is a matter of attaching a holder that enables the panels to be replaced.
Zur weiteren Erläuterung können die Figuren dienen. Fig. 1 zeigt eine Vorrichtung zur Erzeugung randscharfer isolierender Streifen, bestehend aus einer Blende 4 mit einer Blendenöffnung 5, die zwischen der Düse des Verdampfers 1 und der zu bedampfenden Folie 2 angeordnet ist. Die Folie 2 wird hierbei über eine Umlenkrolle 3 geleitet, um dieser eine definierte Lage zu geben. Die Blende 4 wird in möglichst kleinem Abstand α von der Folie 2 angeordnet, der z. B. 0,2 mm betragen kann, um einen möglichst Vorrichtung zum HerstellenThe figures can be used for further explanation. Fig. 1 shows a device for producing sharp-edged insulating strips, consisting of a screen 4 with a screen opening 5, which is arranged between the nozzle of the evaporator 1 and the film 2 to be vaporized. The film 2 is guided over a deflection roller 3 in order to give it a defined position. The diaphragm 4 is arranged at the smallest possible distance α from the film 2, the z. B. can be 0.2 mm in order to produce a device as possible
von Isolierstoffbändern durch Bedampfenof insulating tapes by vapor deposition
mit Metall unter Anwendung einer örtlichwith metal using a topical
begrenzten Vorbedampfung mit konden-limited pre-steaming with condensate
sationshindernden StoffenStationary substances
Zusatz zum Patent 1134 566Addendum to patent 1134 566
Anmelder:Applicant:
Siemens & Halske Aktiengesellschaft,Siemens & Halske Aktiengesellschaft,
Berlin und München,
München 2, Wittelsbacherplatz 2Berlin and Munich,
Munich 2, Wittelsbacherplatz 2
Dipl.-Phys. Gerhard Mayer, München,
ist als Erfinder genannt wordenDipl.-Phys. Gerhard Mayer, Munich,
has been named as the inventor
scharfen Rand der Abdeckung zu erzielen. In Fig. 2 ist eine Frontalansicht der Blende 4 dargestellt. Die Breite b der Bandöffnung 5 ist je nach der gewünschten Isolierstreifenbreite zu bestimmen. Die Öffnungshöhe h muß so gewählt werden, daß die Entfernung der oberen und unteren Begrenzung der Öffnung 5 nicht zu weit von der Folie 2 entfernt ist. Sie hängt auch vom Durchmesser der Umlenkrolle 3 ab.to achieve a sharp edge of the cover. In Fig. 2 is a front view of the panel 4 is shown. The width b of the tape opening 5 is to be determined depending on the desired width of the insulating strip. The opening height h must be chosen so that the distance between the upper and lower boundaries of the opening 5 is not too far away from the film 2. It also depends on the diameter of the pulley 3.
Blenden bei Aufdampfvorrichtungen zu verwenden, ist an sich bekannt. Die Vorrichtung des Hauptpatents sollte dazu dienen, die zur Abdeckung des Metalldampfstrahls bisher nötigen Blenden zu vermeiden, d. h. diese zu ersetzen. Es ist daher nicht ohne weiteres selbstverständlich, bei der die Blenden im Metalldampfstrahl ersetzenden Vorrichtung zusätzlich Blenden beim Ölaufdampfen anzuwenden. Daß dies sinnvoll ist, zeigt der Erfolg, nämlich die Möglichkeit, völlig randscharfe Niederschlage zu erzeugen. Die erfindungsgemäß benutzten Blenden bedürfen im übrigen keiner zeitraubenden Reinigung, da das kondensierende Öl abläuft.Using diaphragms in vapor deposition devices is known per se. The device of the main patent should serve to avoid the screens previously required to cover the metal vapor jet, d. H. to replace them. It is therefore not a matter of course that the apertures in the Metal vapor jet replacing device to use additional screens for oil vapor deposition. That this makes sense, shows the success, namely the possibility of generating completely sharp-edged precipitate. the In addition, diaphragms used according to the invention do not require any time-consuming cleaning, since the condensing Oil is draining.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES57521A DE1160266B (en) | 1957-02-13 | 1958-03-25 | Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES52322A DE1134566B (en) | 1957-02-13 | 1957-02-13 | Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances |
| DES57521A DE1160266B (en) | 1957-02-13 | 1958-03-25 | Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1160266B true DE1160266B (en) | 1963-12-27 |
Family
ID=25995347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DES57521A Pending DE1160266B (en) | 1957-02-13 | 1958-03-25 | Device for the production of strips of insulating material by vapor deposition with metal using a locally limited pre-vapor deposition with condensation-preventing substances |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE1160266B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1008668A4 (en) * | 1997-03-19 | 2004-04-28 | Matsushita Electric Industrial Co Ltd | METHOD AND DEVICE FOR PRODUCING THIN FILM, LAMINATED THIN FILM AND ELECTRONIC COMPONENTS |
-
1958
- 1958-03-25 DE DES57521A patent/DE1160266B/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1008668A4 (en) * | 1997-03-19 | 2004-04-28 | Matsushita Electric Industrial Co Ltd | METHOD AND DEVICE FOR PRODUCING THIN FILM, LAMINATED THIN FILM AND ELECTRONIC COMPONENTS |
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