CN201426176Y - Silicon condenser microphone - Google Patents

Abstract

The utility model provides a silicon capacitor microphone, which comprises a base provided with a cavity, a supporting layer connected with the base, a back plate and a vibrating membrane arranged on the supporting layer, the back plate and the vibrating membrane are arranged oppositely, and respectively connected to the back plate The first electrode and the second electrode coupled with the diaphragm have sound holes on the back plate, the diaphragm is located between the base and the back plate, and an anti-adsorption device is arranged between the back plate and the diaphragm. The silicon capacitor microphone reduces the difficulty of the manufacturing process, and the cost of mass production is low. At the same time, it can prevent the back plate and the diaphragm from being adsorbed together.

Description

Silicon condenser microphone

technical field

The utility model relates to a silicon capacitor microphone, in particular to a micro-electromechanical microphone.

Background technique

With the development of wireless communication, there are more and more mobile phone users around the world. The requirements of users for mobile phones are not only satisfied with calls, but also to be able to provide high-quality call effects. Especially the current development of mobile multimedia technology, the mobile phone Call quality is more important. The microphone of a mobile phone is used as a voice pick-up device for the mobile phone, and its design directly affects the call quality.

Micro-Electro-Mechanical-System Microphone (MEMS for short) is currently the most widely used microphone with better performance. In related technologies, the backplane is located between the diaphragm and the base, so the manufacturing process is complicated. , and the cost of mass production is high, and the diaphragm and the backplane are easily adsorbed together. Therefore, it is necessary to provide a novel silicon condenser microphone.

Utility model content

The technical problem to be solved by the utility model is to provide a silicon capacitor microphone with reduced manufacturing process difficulty and low mass production cost.

According to the above-mentioned technical problems to be solved, a silicon condenser microphone is designed, which includes a base with a cavity, a support layer connected to the base, a back plate and a diaphragm arranged on the support layer, and the back plate and the diaphragm are arranged opposite to each other. , the first electrode and the second electrode respectively coupled with the back plate and the diaphragm, the back plate is provided with an acoustic hole, the diaphragm is located between the base and the back plate, and an anti- adsorption device.

Preferably, the anti-adsorption device is a first protrusion arranged on the plane of the back plate opposite to the diaphragm

Preferably, the anti-adsorption device is a second protrusion arranged on a plane where the diaphragm is opposite to the back plate.

The beneficial effect of the utility model is that: since the diaphragm is between the base and the backboard, the difficulty of the process is reduced, the process steps are reduced, and the cost of mass production is reduced; Adhered to the vibrating membrane.

Description of drawings

Fig. 1 is the three-dimensional exploded view of an embodiment of the utility model;

Fig. 2 is a sectional view of an embodiment of the utility model.

Detailed ways

Below in conjunction with accompanying drawing and embodiment the utility model is further described.

Referring to Fig. 1 and Fig. 2, in one embodiment provided by the utility model, the silicon condenser microphone 1 comprises the base 11 that is provided with cavity 16, the supporting layer 14 that is connected with base 11, the back plate that is arranged on the supporting layer 14 13 and the diaphragm 12, the back plate 13 is arranged opposite to the diaphragm 12, the back plate 13 is provided with an acoustic hole 131, the diaphragm 12 is located between the back plate 13 and the base 11, and the silicon condenser microphone 1 also includes a coupling with the back plate 13 A first electrode (not shown) and a second electrode (not shown) coupled with the diaphragm.

Wherein, an anti-adsorption device is provided between the back plate 13 and the diaphragm 12 to prevent the back plate 13 and the diaphragm 12 from being adsorbed together. The anti-adsorption device may be a protrusion 132 arranged on the plane of the back plate 13 opposite to the diaphragm 12 . The first protrusion 132 can prevent the vibrating membrane 12 and the back plate 13 from being adsorbed together. The anti-adsorption device can also be a second protrusion (not shown) arranged on the plane opposite to the diaphragm 12 and the back plate, or can be a groove respectively arranged on the diaphragm 12 or the back plate 13 .

The diaphragm 12 can be circular or rectangular. Other shapes are also possible.

Regardless of any of the above implementation manners, the diaphragm 12 may be made of polysilicon material.

What is described above is only a kind of embodiment of the present utility model, should point out here, for those of ordinary skill in the art, can also make improvement under the premise of not departing from the inventive concept of the present utility model, but these All belong to the protection scope of the present utility model.

Claims (3)

1. A silicon capacitor microphone, comprising a base provided with a cavity, a support layer connected to the base, a back plate and a diaphragm arranged on the support layer, the back plate and the diaphragm are relatively arranged, and are respectively connected to the back plate and the diaphragm The coupled first electrode and the second electrode are provided with acoustic holes on the back plate, and are characterized in that: the diaphragm is located between the base and the back plate, and an anti-adsorption device is arranged between the back plate and the diaphragm. 2. The silicon condenser microphone according to claim 1, characterized in that: the anti-adsorption device is a first protrusion arranged on the plane of the back plate opposite to the diaphragm 3. The silicon condenser microphone according to claim 1, wherein the anti-adsorption device is a second protrusion arranged on a plane where the diaphragm is opposite to the back plate.

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