CN201355867Y - Silicon-based condenser microphone - Google Patents
Silicon-based condenser microphone Download PDFInfo
- Publication number
- CN201355867Y CN201355867Y CNU2008202357259U CN200820235725U CN201355867Y CN 201355867 Y CN201355867 Y CN 201355867Y CN U2008202357259 U CNU2008202357259 U CN U2008202357259U CN 200820235725 U CN200820235725 U CN 200820235725U CN 201355867 Y CN201355867 Y CN 201355867Y
- Authority
- CN
- China
- Prior art keywords
- connecting portion
- silicone base
- base capacitance
- vibrating diaphragm
- capacitance microphone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract description 4
- 229910052710 silicon Inorganic materials 0.000 title abstract description 4
- 239000010703 silicon Substances 0.000 title abstract description 4
- 229920001296 polysiloxane Polymers 0.000 claims description 16
- 230000037237 body shape Effects 0.000 claims description 2
- 230000000295 complement effect Effects 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 239000012528 membrane Substances 0.000 abstract 2
- 230000000903 blocking effect Effects 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000007812 deficiency Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
本实用新型提供了一种硅基电容式麦克风，包括背极板、内部设有空腔的支撑层、与背极板相对的振膜，振膜包括振动主体和与振动主体相连的连接部，振膜通过连接部支撑在支撑层上，所述硅基电容式麦克风还包括一挡盖，所述挡盖包括定位于振膜连接部上的固持部和与固持部相连且凸出固持部、位于振动主体边缘之上的挡块。该挡块能对振膜的振动主体边缘进行限位，防止振动主体边缘振幅过大，克服了现有技术的不足，有利于提高产品的灵敏度。
The utility model provides a silicon-based capacitive microphone, which includes a back plate, a support layer with a cavity inside, and a vibrating membrane opposite to the back plate. The vibrating film includes a vibrating body and a connecting part connected with the vibrating body The diaphragm is supported on the support layer through the connecting part, and the silicon-based condenser microphone also includes a cover, the blocking cover includes a holding part positioned on the connecting part of the diaphragm and a holding part that is connected to the holding part and protrudes, Stops located above the edge of the vibrating body. The stopper can limit the edge of the vibrating body of the vibrating membrane, prevent the edge of the vibrating body from being too large, overcome the shortcomings of the prior art, and help improve the sensitivity of the product.
Description
[technical field]
The utility model relates to a kind of microphone, relates in particular to a kind of silicone base capacitance microphone.
[background technology]
Development along with wireless telecommunications, Global Mobile Phone Users is more and more, the user not only is satisfied with conversation to the requirement of mobile phone, and want high-quality communication effect can be provided, especially at present the development of mobile multimedia technology, the speech quality of mobile phone becomes more important, and the microphone of mobile phone is as the voice pick device of mobile phone, and its design quality directly influences speech quality.
Use at present more and microphone better performances is microelectromechanical-systems microphone (Micro-Electro-Mechanical-System Microphone is called for short MEMS), its encapsulation volume is littler than traditional electret microphone.The MEMS microphone is based on silicon-based semiconductor material and makes, so claim silica-based microphone again.In recent years, silica-based MEMS microphone had been made significant headway.
As shown in Figure 3, be the schematic perspective view of the MEMS silica-based microphone 1 of dependency structure, it comprises supporting layer 10 and vibrating diaphragm 11, vibrating diaphragm 11 involving vibrations main bodys 110 and the connecting portion 111 that links to each other with vibration main body and supporting layer.Such microphone diaphragm is in when vibration, because vibrating diaphragm is supported on the supporting layer by connecting portion, the amplitude that the edge of vibration main body departs from can be bigger, thereby causes that the product damping descends significantly, the sensitivity reduction.
[utility model content]
The technical problem that the utility model need solve is to overcome above-mentioned deficiency, provides a kind of sensitivity improved silicone base capacitance microphone.
According to the above-mentioned technical problem that needs solution, designed a kind of silicone base capacitance microphone, comprise that back pole plate, inside are provided with the supporting layer of cavity, the vibrating diaphragm relative with back pole plate, vibrating diaphragm involving vibrations main body and the connecting portion that links to each other with the vibration main body, vibrating diaphragm is supported on the supporting layer by connecting portion, described silicone base capacitance microphone also comprises a door, and described door comprises the holding parts that is positioned on the vibrating diaphragm connecting portion and links to each other with holding parts and protrude holding parts, be positioned at the block on the vibration body rim.
Further improve as the utility model, the cross section of described door be "
" shape.
Further improve as the utility model, described door is complementary with the vibration body shape.。
Further improve as the utility model, described door is circular.
Further improve the outstanding circular vibration body rim of described connecting portion as the utility model.
Further improve as the utility model, described connecting portion is " ten " font and is supported on the supporting layer.
The block of the door that the utility model is provided with can carry out spacing to the vibration body rim of vibrating diaphragm, and it is excessive to prevent to vibrate the body rim amplitude, has overcome the deficiencies in the prior art, helps improving the sensitivity of product.
[description of drawings]
Fig. 1 is the schematic perspective view of the utility model silicone base capacitance microphone;
Fig. 2 is the cross-sectional schematic of B-B direction among Fig. 1;
Fig. 3 is the schematic diagram of dependency structure silicone base capacitance microphone.
[embodiment]
The utility model is described in further detail below in conjunction with drawings and embodiments.
As depicted in figs. 1 and 2, the utility model silicone base capacitance microphone 2 comprises supporting layer 20, back pole plate 21, vibrating diaphragm 22, the door 23 relative with back pole plate.Supporting layer covers in the substrate 24 that inside is provided with cavity, correspondingly, also forms cavity in the supporting layer.Back pole plate 21 is contained in the cavity of substrate 24, which is provided with hole 210.Back pole plate 21 is relative with vibrating diaphragm, and interval supporting layer 20 between the vibrating diaphragm 22.
Present embodiment vibrating diaphragm 22 comprise circular vibration main body 220 and link to each other with the vibration main body, and the outstanding circular connecting portion 221 that vibrates main body.This connecting portion quantity is four, is the edge of " ten " font equal distribution in the vibration main body.The vibration main body links to each other with supporting layer by connecting portion and is supported on the supporting layer.The connecting portion of the utility model vibrating diaphragm is not limited to the shape among four or the figure.
The form fit of present embodiment door 23 and vibration main body, for circular, its cross section be "
" shape, comprise holding parts 231 and link to each other with holding parts and protrude the block 230 of holding parts.Holding parts 231 is fixed positioned on the connecting portion 221, and connecting portion is stably linked to each other with supporting layer.Block 230 is positioned on the vibration body rim, vibrates the at interval certain required distance of body rim relatively, and it can carry out spacing to the vibration body rim, and it is excessive to prevent to vibrate the body rim amplitude, has overcome the deficiencies in the prior art, has improved the sensitivity of product.
The vibration main body of the utility model silicone base capacitance microphone is back pole plate up-down vibration and form capacity effect with back pole plate relatively.When the sound air-flow is delivered on the vibrating diaphragm, vibration main body up-down vibration changes the capacitance of capacitor to produce displacement, and the change of capacitance makes the output of capacitor produce corresponding alternating electric field, form the signal of telecommunication corresponding, thereby finish the function of acoustic-electric conversion with acoustic signals.
Above-described only is execution mode of the present utility model; should be pointed out that for the person of ordinary skill of the art at this, under the prerequisite that does not break away from the utility model creation design; can also make improvement, but these all belong to protection range of the present utility model.
Claims (6)
1, a kind of silicone base capacitance microphone, comprise that back pole plate, inside are provided with the supporting layer of cavity, the vibrating diaphragm relative with back pole plate, vibrating diaphragm involving vibrations main body and the connecting portion that links to each other with the vibration main body, vibrating diaphragm is supported on the supporting layer by connecting portion, it is characterized in that: described silicone base capacitance microphone also comprises a door, and described door comprises the holding parts that is positioned on the vibrating diaphragm connecting portion and links to each other with holding parts and protrude holding parts, be positioned at the block on the vibration body rim.
2, silicone base capacitance microphone according to claim 1 is characterized in that: the cross section of described door is
Shape.
3, silicone base capacitance microphone according to claim 1 is characterized in that: described door is complementary with the vibration body shape.
4, silicone base capacitance microphone according to claim 1 is characterized in that: described door is circular.
5, silicone base capacitance microphone according to claim 1 is characterized in that: the outstanding circular vibration body rim of described connecting portion.
6, silicone base capacitance microphone according to claim 5 is characterized in that: described connecting portion is " ten " font and is supported on the supporting layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202357259U CN201355867Y (en) | 2008-12-26 | 2008-12-26 | Silicon-based condenser microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202357259U CN201355867Y (en) | 2008-12-26 | 2008-12-26 | Silicon-based condenser microphone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201355867Y true CN201355867Y (en) | 2009-12-02 |
Family
ID=41412207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008202357259U Expired - Lifetime CN201355867Y (en) | 2008-12-26 | 2008-12-26 | Silicon-based condenser microphone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201355867Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI448164B (en) * | 2010-05-14 | 2014-08-01 | Nat Univ Tsing Hua | Micro electromechanical condenser microphones |
| CN104105041A (en) * | 2014-07-31 | 2014-10-15 | 歌尔声学股份有限公司 | Silicon-based MEMS (Micro Electro Mechanical System) microphone and manufacturing method thereof |
| CN107770707A (en) * | 2016-08-22 | 2018-03-06 | 上海微联传感科技有限公司 | A MEMS microphone |
| CN110545514A (en) * | 2019-08-16 | 2019-12-06 | 瑞声声学科技(深圳)有限公司 | Piezoelectric MEMS microphone |
-
2008
- 2008-12-26 CN CNU2008202357259U patent/CN201355867Y/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI448164B (en) * | 2010-05-14 | 2014-08-01 | Nat Univ Tsing Hua | Micro electromechanical condenser microphones |
| CN104105041A (en) * | 2014-07-31 | 2014-10-15 | 歌尔声学股份有限公司 | Silicon-based MEMS (Micro Electro Mechanical System) microphone and manufacturing method thereof |
| CN104105041B (en) * | 2014-07-31 | 2019-01-04 | 歌尔股份有限公司 | Silicon substrate MEMS microphone and preparation method thereof |
| CN107770707A (en) * | 2016-08-22 | 2018-03-06 | 上海微联传感科技有限公司 | A MEMS microphone |
| CN110545514A (en) * | 2019-08-16 | 2019-12-06 | 瑞声声学科技(深圳)有限公司 | Piezoelectric MEMS microphone |
| WO2021031105A1 (en) * | 2019-08-16 | 2021-02-25 | 瑞声声学科技(深圳)有限公司 | Piezoelectric mems microphone |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20091202 |
|
| CX01 | Expiry of patent term |