CN201345734Y - Silica-based microphone - Google Patents

Abstract

The utility model provides a silicon-based microphone, which comprises a base with a cavity inside, a back plate accommodated in the cavity of the base, and a vibrating membrane. The vibrating membrane includes a vibrating body and a The connection part in the central area is connected to the back plate, and the vibrating body is opposite to the back plate. Compared with the prior art, the periphery of the vibrating body of the vibrating membrane of the utility model is not fixed, but is fixed on the back plate through the connection part located in the central area of the vibrating body, and the vibrating body can vibrate up and down relative to the back plate. The structure design is unique, and the sensitivity of the obtained product is also high.

Description

silicon microphone

【Technical field】

The utility model relates to a microphone, in particular to a MEMS silicon-based microphone.

【Background technique】

With the development of wireless communication, there are more and more mobile phone users around the world. The requirements of users for mobile phones are not only satisfied with calls, but also to be able to provide high-quality call effects. Especially the current development of mobile multimedia technology, the mobile phone Call quality is more important. The microphone of a mobile phone is used as a voice pick-up device for the mobile phone, and its design directly affects the call quality.

Micro-Electro-Mechanical-System Microphone (MEMS for short) is currently the most widely used microphone with better performance, and its packaging volume is smaller than that of traditional electret microphones. MEMS microphones are made of silicon-based semiconductor materials, so they are also called silicon-based microphones. Silicon-based MEMS microphones have come a long way in recent years.

As shown in FIG. 1 , it is a schematic cross-sectional view of a conventional MEMS silicon-based microphone 1 . This type of microphone includes a substrate 10 with a cavity inside, a back plate 11 and a diaphragm 12 to realize the capacitive effect. The periphery of the diaphragm is fixed, opposite to the back plate and spaced a certain distance from the back plate. When the sound air flow is transmitted to the diaphragm, the diaphragm vibrates up and down to generate displacement, changing the capacitance of the capacitor, and the change of capacitance causes the output terminal of the capacitor to generate a corresponding alternating electric field, forming an electrical signal corresponding to the sound wave signal. Thereby completing the function of sound-electric conversion.

【Content of utility model】

The technical problem to be solved by the utility model is to provide a silicon-based microphone with unique structural design and high sensitivity.

According to the above-mentioned technical problems to be solved, a silicon-based microphone is designed, which has a base with a cavity inside, a back plate and a diaphragm accommodated in the cavity of the base, and the diaphragm includes a vibrating body and a vibrating body connected to the vibrating body. And the connecting part located in the central area of the vibrating body, the connecting part is connected with the back plate, and the vibrating main body is opposite to the back plate.

As a further improvement of the utility model, the vibrating body is in the shape of a flat cylinder, and the connection part is in the shape of a long cylinder extending from the central area of the vibrating body.

As a further improvement of the utility model, the cross-section of the diaphragm is T-shaped.

Compared with the prior art, the periphery of the diaphragm vibrating body of the utility model is not fixed, but is fixed on the back plate through the connection part located in the central area of the vibrating body. The vibrating body is opposite to the back plate and can be opposite to the back plate. Vibrate up and down. This kind of structural design is unique, and the sensitivity of the obtained product is also high.

【Description of drawings】

FIG. 1 is a schematic cross-sectional view of an existing common MEMS silicon-based microphone;

Fig. 2 is the three-dimensional schematic diagram of silicon-based microphone of the present invention;

Fig. 3 is a schematic cross-sectional view along the B-B direction in Fig. 2 .

【Detailed ways】

Below in conjunction with accompanying drawing and embodiment the utility model is further described.

As shown in FIG. 2 and FIG. 3 , it is a silicon-based microphone 2 according to an embodiment of the present invention, including a base 20 , a back plate 21 , and a diaphragm 22 . The base 20 is provided with a cavity 200 , and the back plate 21 is accommodated in the cavity 200 . Vent holes 210 are also provided on the back plate 21 .

The diaphragm 22 has a T-shaped cross section and includes a flat cylindrical vibrating body 220 and a connecting portion 221 connected to the vibrating body. The connecting part 221 is a long cylinder extending from the central area of the vibrating body. The vibrating body 220 is connected to the back plate 21 through the connecting portion 221 and is opposite to the back plate 21 . The vibrating body can vibrate up and down relative to the back plate and form a capacitive effect with the back plate. When the sound air flow is transmitted to the diaphragm, the vibrating body vibrates up and down to generate displacement, changing the capacitance of the capacitor, and the change of capacitance causes the output terminal of the capacitor to generate a corresponding alternating electric field, forming an electrical signal corresponding to the sound wave signal, thereby Complete the function of sound-electric conversion.

The periphery of the vibrating body of the vibrating membrane of the utility model is not fixed, but is fixed on the back plate through the connecting part located in the central area of the vibrating main body. Compared with the prior art, this structural design is unique, and the sensitivity of the obtained product is also high .

What has been described above is only the embodiment of the utility model, and it should be pointed out that for those of ordinary skill in the art, improvements can also be made without departing from the inventive concept of the utility model, but these all belong to Protection scope of the present utility model.

Claims (3)

1, a kind of silica-based microphone, comprise that inside is provided with the substrate of cavity, is contained in back pole plate, vibrating diaphragm in the substrate cavity, it is characterized in that: described vibrating diaphragm involving vibrations main body with link to each other with the vibration main body and be positioned at the connecting portion that vibrates the main body middle section, described connecting portion links to each other with back pole plate, and described vibration main body is relative with back pole plate.

2, silica-based microphone according to claim 1 is characterized in that: described vibration main body is oblate cylindricality, and connecting portion is served as reasons and vibrated the elongated cylindrical that the main body middle section extends.

3, silica-based microphone according to claim 1 and 2 is characterized in that: the cross section of described vibrating diaphragm is a T shape.

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