CN201403201Y - Silicon-based condenser microphone - Google Patents
Silicon-based condenser microphone Download PDFInfo
- Publication number
- CN201403201Y CN201403201Y CN2009201359497U CN200920135949U CN201403201Y CN 201403201 Y CN201403201 Y CN 201403201Y CN 2009201359497 U CN2009201359497 U CN 2009201359497U CN 200920135949 U CN200920135949 U CN 200920135949U CN 201403201 Y CN201403201 Y CN 201403201Y
- Authority
- CN
- China
- Prior art keywords
- diaphragm
- vibrating diaphragm
- condenser microphone
- silicon
- vibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract 8
- 229910052710 silicon Inorganic materials 0.000 title claims abstract 8
- 239000010703 silicon Substances 0.000 title claims abstract 8
- 230000000694 effects Effects 0.000 claims abstract description 7
- 230000000149 penetrating effect Effects 0.000 claims abstract 2
- 239000012528 membrane Substances 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 22
- 239000000377 silicon dioxide Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000013016 damping Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
Images
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- Telephone Set Structure (AREA)
Abstract
本实用新型提供了一种硅基电容麦克风，包括基底、平行于基底的背板、与背板相对形成电容效应的振膜，该振膜包括固定部和与固定部相连的振动部，在所述振膜上设置有至少两个贯通所述振膜的振膜扇片，所述振膜扇片包括第一端部、第二端部以及连接第一端部和第二端部的连接部，所述第一端部和第二端部分别自振膜的振动部延伸至振膜的固定部。该种麦克风能提高麦克风的低频特性。
The utility model provides a silicon-based capacitor microphone, which comprises a base, a back plate parallel to the base, and a vibrating film opposite to the back plate to form a capacitive effect. The vibrating film includes a fixed part and a vibrating part connected with the fixed part. The diaphragm is provided with at least two diaphragm segments penetrating the diaphragm, and the diaphragm segments include a first end, a second end, and a connecting portion connecting the first end and the second end , the first end portion and the second end portion respectively extend from the vibrating portion of the diaphragm to the fixed portion of the diaphragm. This type of microphone can improve the low-frequency characteristics of the microphone.
Description
Technical field
The utility model relates to a kind of silica-based condenser microphone, relates in particular to a kind of silica-based condenser microphone that is applied on the portable consumer electronic products such as mobile phone.
Background technology
Development along with wireless telecommunications, Global Mobile Phone Users is more and more, the user not only is satisfied with conversation to the requirement of mobile phone, and want high-quality communication effect can be provided, especially at present the development of mobile multimedia technology, the speech quality of mobile phone becomes more important, and the microphone of mobile phone is as the voice pick device of mobile phone, and its design quality directly influences speech quality.
And the microphone of using more and better performances at present is microelectromechanical-systems microphone (Micro-Electro-Mechanical-System Microphone is called for short MEMS), and its encapsulation volume is littler than traditional electret microphone.
In the silica-based condenser microphone related to the present invention, vibrating diaphragm be shaped as gear shape.This silica-based condenser microphone vibrating diaphragm slide-film damping is little, and low-frequency effects is poor.
The utility model content
The silica-based condenser microphone that provides a kind of low-frequency effects good is provided the technical problems to be solved in the utility model.
For solving the problems of the technologies described above, the technical scheme that the utility model provides is:
A kind of silica-based condenser microphone, comprise substrate, be parallel to the backboard of substrate, the relative vibrating diaphragm that forms capacity effect with backboard, this vibrating diaphragm comprises fixed part and the vibration section that links to each other with fixed part, described vibrating diaphragm is provided with at least two vibrating diaphragm fan sheets that connect described vibrating diaphragm, described vibrating diaphragm fan sheet comprises first end, the second end and the connecting portion that connects first end and the second end, and described first end and the second end self-vibration vibration of membrane portion respectively extend to the fixed part of vibrating diaphragm.
Preferably, this vibrating diaphragm fan sheet is about the center symmetry of described vibrating diaphragm.
Preferably, described vibrating diaphragm fan sheet is shaped as " several " font.
Preferably, described vibrating diaphragm is circular.
Preferably, described vibrating diaphragm is a rectangle.
Preferably, described vibrating diaphragm is oval.
The beneficial effects of the utility model are: because vibrating diaphragm is provided with vibrating diaphragm fan sheet, described vibrating diaphragm fan sheet comprises first end, the second end and the connecting portion that connects first end and the second end, described first end and the second end are crossed over the fixed part and the vibration section of vibrating diaphragm respectively, so in the course of processing, be not subjected to the influence of aligning accuracy, can improve machining accuracy, make the vibrating diaphragm slide-film damping increase, improve the low frequency characteristic of microphone.
Description of drawings
Fig. 1 is the cutaway view that the utility model provides the silica-based condenser microphone of an embodiment;
Fig. 2 is the plane graph of the silica-based condenser microphone vibrating diaphragm of an embodiment providing of the utility model.
Embodiment
The utility model is described in further detail below in conjunction with drawings and embodiments.
The silica-based condenser microphone 1 that the utility model provides is mainly used on the mobile phone, accepts sound and sound is converted into the signal of telecommunication.The invention that the utility model provides is by the effect that vibrating diaphragm fan sheet reaches the low frequency characteristic that improves microphone is set on vibrating diaphragm.
Referring to Fig. 1, the silica-based condenser microphone 1 that the utility model provides comprises substrate 10, places the backboard 12 in the substrate 10, the supporting layer 11 that is connected with backboard 12, vibrating diaphragms 13 relative with backboard 12 and that link to each other by supporting layer 11, this vibrating diaphragm 13 comprises fixed part 131 that links to each other with supporting layer 11 and the vibration section 132 that links to each other with fixed part 131, backboard 12 is provided with back plate aperture 121, leaves air-gap 15 between backboard 12 and the vibrating diaphragm 13.In the embodiment that the utility model provides, the fixed part 131 and the vibration section 132 of vibrating diaphragm 13 are integrated.
Certainly, vibrating diaphragm 13 is not limited to the mode shown in Fig. 1 with the position relation of backboard 12.Also can be that vibrating diaphragm 13 is between backboard 12 and substrate 10; Equally, the supporting layer among Fig. 1 neither be necessary.As long as it is just passable that vibrating diaphragm 13 and backboard 12 can form capacitor.
Referring to Fig. 1 and Fig. 2, vibrating diaphragm 13 is circular, and vibrating diaphragm 13 is provided with 4 vibrating diaphragms fan sheets 14 that connect vibrating diaphragms 13, and this vibrating diaphragm fan sheet 14 is about the center symmetry of vibrating diaphragm 13, promptly these 4 vibrating diaphragms fan sheet 14 five equilibriums vibrating diaphragm 13; Vibrating diaphragm fan sheet 14 comprises first end 141, the second end 142 and the connecting portion 143 that connects first end 141 and the second end 142, first end 141 and the second end 142 are crossed over the fixed part 131 and the vibration section 132 of vibrating diaphragm 13 respectively, be that first end 141 and the second end 142 are the fixed parts 131 that extend to vibrating diaphragm 13 respectively from the vibration section 132 of vibrating diaphragm 13, make vibrating diaphragm fan sheet 14 present " several " word shape.
Though among the embodiment that the utility model provides, vibrating diaphragm fan sheet 14 is 4, in fact, vibrating diaphragm fan sheet can be 2,3 or 5 or more, as long as vibrating diaphragm fan sheet 14 can be about the center symmetry of vibrating diaphragm 13.
Vibrating diaphragm 13 is not limited to circle, also can be rectangle, triangle, ellipse etc.
In the embodiment that the utility model provides, vibrating diaphragm fan sheet 14 presents " several " word shape, but in fact, the shape of vibrating diaphragm fan sheet 14 is not limited thereto.As long as satisfy first end 141 and the second end 142 fixed part 131 and the vibration section 132 of very fast vibrating diaphragm 13 respectively, connecting portion 143 couples together first end 141 and the second end 142 and gets final product.
Above-described only is execution mode of the present utility model; should be pointed out that for the person of ordinary skill of the art at this, under the prerequisite that does not break away from the utility model creation design; can also make improvement, but these all belong to protection range of the present utility model.
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201359497U CN201403201Y (en) | 2009-03-27 | 2009-03-27 | Silicon-based condenser microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201359497U CN201403201Y (en) | 2009-03-27 | 2009-03-27 | Silicon-based condenser microphone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201403201Y true CN201403201Y (en) | 2010-02-10 |
Family
ID=41663000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009201359497U Expired - Lifetime CN201403201Y (en) | 2009-03-27 | 2009-03-27 | Silicon-based condenser microphone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201403201Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109286883A (en) * | 2017-07-19 | 2019-01-29 | 上海微联传感科技有限公司 | Diaphragm and Microphone |
-
2009
- 2009-03-27 CN CN2009201359497U patent/CN201403201Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109286883A (en) * | 2017-07-19 | 2019-01-29 | 上海微联传感科技有限公司 | Diaphragm and Microphone |
| CN109286883B (en) * | 2017-07-19 | 2024-09-20 | 华景传感科技（无锡）有限公司 | Vibrating diaphragm and microphone |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170526 Address after: Singapore Ang Mo Kio 65 Street No. 10 techpoint Building 1 floor, No. 8 Co-patentee after: AAC Acoustic Technologies (Changzhou) Co., Ltd. Patentee after: AAC Technologies (Singapore) Co., Ltd. Address before: Wujin Nanxiashu town Jiangsu city Changzhou province 213167 Co-patentee before: AAC Acoustic Technologies (Shenzhen) Co., Ltd. Patentee before: AAC Acoustic Technologies (Changzhou) Co., Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20100210 |
|
| CX01 | Expiry of patent term |