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AU2001271923A1 - Apparatus and method for processing a microelectronic workpiece using metrology - Google Patents

Apparatus and method for processing a microelectronic workpiece using metrology

Info

Publication number
AU2001271923A1
AU2001271923A1 AU2001271923A AU7192301A AU2001271923A1 AU 2001271923 A1 AU2001271923 A1 AU 2001271923A1 AU 2001271923 A AU2001271923 A AU 2001271923A AU 7192301 A AU7192301 A AU 7192301A AU 2001271923 A1 AU2001271923 A1 AU 2001271923A1
Authority
AU
Australia
Prior art keywords
metrology
processing
microelectronic workpiece
microelectronic
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001271923A
Inventor
Steve L. Eudy
Paul R. Mchugh
Thomas L. Ritzdorf
Gregory J. Wilson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semitool Inc
Original Assignee
Semitool Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semitool Inc filed Critical Semitool Inc
Publication of AU2001271923A1 publication Critical patent/AU2001271923A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H10P72/0456—
    • H10P72/0432—
    • H10P72/0468—
    • H10P72/0472—
    • H10P72/0604—
    • H10P72/0612—
AU2001271923A 2000-07-08 2001-07-09 Apparatus and method for processing a microelectronic workpiece using metrology Abandoned AU2001271923A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/612,176 US6747734B1 (en) 2000-07-08 2000-07-08 Apparatus and method for processing a microelectronic workpiece using metrology
US09612176 2000-07-08
PCT/US2001/021579 WO2002004886A1 (en) 2000-07-08 2001-07-09 Apparatus and method for processing a microelectronic workpiece using metrology

Publications (1)

Publication Number Publication Date
AU2001271923A1 true AU2001271923A1 (en) 2002-01-21

Family

ID=24452047

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001271923A Abandoned AU2001271923A1 (en) 2000-07-08 2001-07-09 Apparatus and method for processing a microelectronic workpiece using metrology

Country Status (4)

Country Link
US (2) US6747734B1 (en)
AU (1) AU2001271923A1 (en)
TW (1) TWI225547B (en)
WO (1) WO2002004886A1 (en)

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Also Published As

Publication number Publication date
US20050107971A1 (en) 2005-05-19
WO2002004886A1 (en) 2002-01-17
TWI225547B (en) 2004-12-21
US7161689B2 (en) 2007-01-09
US6747734B1 (en) 2004-06-08

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