AU2002316240A1 - Improved method and apparatus for bi-directionally polishing a workpiece - Google Patents

Improved method and apparatus for bi-directionally polishing a workpiece

Info

Publication number: AU2002316240A1
Authority: AU; Australia
Prior art keywords: directionally; polishing; workpiece; improved method; improved
Prior art date: 2001-06-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002316240A

Inventor

Jalal Ashjaee

Bernard M. Frey

Mark Henderson

Vulf Perlov

Homayoun Talieh

Efrain Velazquez

Konstantin Volodarsky

Douglas W. Young

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

ASM Nutool Inc

Original Assignee

ASM Nutool Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-06-12

Filing date

2002-06-12

Publication date

2002-12-23

2001-06-12 Priority claimed from US09/880,730 external-priority patent/US6464571B2/en

2002-04-18 Priority claimed from US10/126,469 external-priority patent/US6634935B2/en

2002-04-18 Priority claimed from US10/126,464 external-priority patent/US6589105B2/en

2002-06-12 Application filed by ASM Nutool Inc filed Critical ASM Nutool Inc

2002-12-23 Publication of AU2002316240A1 publication Critical patent/AU2002316240A1/en

Status Abandoned legal-status Critical Current

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/18—Accessories
- B24B21/22—Accessories for producing a reciprocation of the grinding belt normal to its direction of movement
- H10P52/00—

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Mechanical Treatment Of Semiconductor (AREA)

AU2002316240A 2001-06-12 2002-06-12 Improved method and apparatus for bi-directionally polishing a workpiece Abandoned AU2002316240A1 (en)

Applications Claiming Priority (7)

Application Number	Priority Date	Filing Date	Title
US09/880,730		2001-06-12
US09/880,730 US6464571B2 (en)	1998-12-01	2001-06-12	Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
US10/126,469		2002-04-18
US10/126,469 US6634935B2 (en)	1998-12-01	2002-04-18	Single drive system for a bi-directional linear chemical mechanical polishing apparatus
US10/126,464		2002-04-18
US10/126,464 US6589105B2 (en)	1998-12-01	2002-04-18	Pad tensioning method and system in a bi-directional linear polisher
PCT/US2002/018827 WO2002100594A1 (en)	2001-06-12	2002-06-12	Improved method and apparatus for bi-directionally polishing a workpiece

Publications (1)

Publication Number	Publication Date
AU2002316240A1 true AU2002316240A1 (en)	2002-12-23

Family

ID=27383427

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002316240A Abandoned AU2002316240A1 (en)	2001-06-12	2002-06-12	Improved method and apparatus for bi-directionally polishing a workpiece

Country Status (7)

Country	Link
EP (1)	EP1395392A1 (en)
JP (1)	JP2004528998A (en)
KR (1)	KR100665748B1 (en)
CN (1)	CN1638919A (en)
AU (1)	AU2002316240A1 (en)
TW (1)	TW552177B (en)
WO (1)	WO2002100594A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2009158665A1 (en)	2008-06-26	2009-12-30	3M Innovative Properties Company	Polishing pad with porous elements and method of making and using the same
KR101011220B1 (en) *	2010-07-02	2011-01-26	연세대학교 산학협력단	Steel girder with improved load carrying capacity and usability
CN102490111B (en) *	2011-11-24	2014-06-11	上海华力微电子有限公司	Fixed abrasive chemical-mechanical grinding device
CN102699796B (en) *	2012-05-14	2014-12-03	宁波霍思特精密机械有限公司	Grinding device for gate of high temperature alloy casting
CN103722470A (en) *	2014-01-26	2014-04-16	福建长江工业有限公司	Method for guaranteeing consistency of polishing performances of products and grinding and polishing equipment
TWI574778B (en) *	2015-02-11	2017-03-21	國立勤益科技大學	Polishing machine
CN109015306B (en) *	2018-09-10	2020-05-22	安徽鑫艺达抛光机械有限公司	Feeding device of polishing equipment
CN111941201B (en) *	2020-08-21	2021-12-07	许昌学院	High-precision manufacturing device for Fabry-Perot interferometer mirror plate
CN115284140B (en) *	2022-08-17	2023-11-17	昆山新莱洁净应用材料股份有限公司	BPE sanitary pipe fitting batch polishing device and polishing method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3844249C2 (en) *	1988-09-19	1994-02-24	Marunaga & Co Ltd	Belt grinder
DE69206685T2 (en) *	1991-06-06	1996-07-04	Commissariat Energie Atomique	Polishing machine with a tensioned fine grinding belt and an improved workpiece carrier head
US5938504A (en) *	1993-11-16	1999-08-17	Applied Materials, Inc.	Substrate polishing apparatus
US6103628A (en) *	1998-12-01	2000-08-15	Nutool, Inc.	Reverse linear polisher with loadable housing
US6464571B2 (en) *	1998-12-01	2002-10-15	Nutool, Inc.	Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
JP3825220B2 (en) *	1999-02-04	2006-09-27	アプライドマテリアルズインコーポレイテッド	Chemical mechanical polishing using moving abrasive sheet
US6520833B1 (en) *	2000-06-30	2003-02-18	Lam Research Corporation	Oscillating fixed abrasive CMP system and methods for implementing the same

2002
- 2002-06-12 CN CNA028153898A patent/CN1638919A/en active Pending
- 2002-06-12 EP EP02746526A patent/EP1395392A1/en not_active Withdrawn
- 2002-06-12 AU AU2002316240A patent/AU2002316240A1/en not_active Abandoned
- 2002-06-12 KR KR1020037016337A patent/KR100665748B1/en not_active Expired - Fee Related
- 2002-06-12 TW TW091112816A patent/TW552177B/en not_active IP Right Cessation
- 2002-06-12 WO PCT/US2002/018827 patent/WO2002100594A1/en not_active Ceased
- 2002-06-12 JP JP2003503399A patent/JP2004528998A/en active Pending

Also Published As

Publication number	Publication date
CN1638919A (en)	2005-07-13
KR100665748B1 (en)	2007-01-09
WO2002100594A1 (en)	2002-12-19
WO2002100594A8 (en)	2003-02-20
EP1395392A1 (en)	2004-03-10
JP2004528998A (en)	2004-09-24
TW552177B (en)	2003-09-11
KR20040025689A (en)	2004-03-24

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Legal Events

Date	Code	Title	Description
2004-03-11	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase