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AU2001282879A1 - Methods and apparatus for processing microelectronic workpieces using metrology - Google Patents

Methods and apparatus for processing microelectronic workpieces using metrology

Info

Publication number
AU2001282879A1
AU2001282879A1 AU2001282879A AU8287901A AU2001282879A1 AU 2001282879 A1 AU2001282879 A1 AU 2001282879A1 AU 2001282879 A AU2001282879 A AU 2001282879A AU 8287901 A AU8287901 A AU 8287901A AU 2001282879 A1 AU2001282879 A1 AU 2001282879A1
Authority
AU
Australia
Prior art keywords
metrology
methods
microelectronic workpieces
processing microelectronic
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001282879A
Inventor
Brian Aegerter
Curt Dundas
Steve L. Eudy
Paul R. Mchugh
Steven L. Peace
Thomas L. Ritzdorf
Robert A. Weaver
Gregory J. Wilson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semitool Inc
Original Assignee
Semitool Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/612,176 external-priority patent/US6747734B1/en
Priority claimed from US09/733,608 external-priority patent/US6780374B2/en
Priority claimed from US09/866,463 external-priority patent/US7160421B2/en
Priority claimed from US09/872,151 external-priority patent/US7264698B2/en
Application filed by Semitool Inc filed Critical Semitool Inc
Publication of AU2001282879A1 publication Critical patent/AU2001282879A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H10P72/0456—
    • H10P72/0432—
    • H10P72/0458—
    • H10P72/0462—
    • H10P72/0472—
    • H10P72/0476—
    • H10P72/3308—
AU2001282879A 2000-07-08 2001-07-09 Methods and apparatus for processing microelectronic workpieces using metrology Abandoned AU2001282879A1 (en)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US09/612,176 US6747734B1 (en) 2000-07-08 2000-07-08 Apparatus and method for processing a microelectronic workpiece using metrology
US09/612,176 2000-07-08
US09/733,608 2000-12-08
US09/733,608 US6780374B2 (en) 2000-12-08 2000-12-08 Method and apparatus for processing a microelectronic workpiece at an elevated temperature
US09/866,463 US7160421B2 (en) 1999-04-13 2001-05-24 Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
US09/866,463 2001-05-24
US09/872,151 US7264698B2 (en) 1999-04-13 2001-05-31 Apparatus and methods for electrochemical processing of microelectronic workpieces
US09/872,151 2001-05-31
PCT/US2001/021800 WO2002004887A1 (en) 2000-07-08 2001-07-09 Methods and apparatus for processing microelectronic workpieces using metrology

Publications (1)

Publication Number Publication Date
AU2001282879A1 true AU2001282879A1 (en) 2002-01-21

Family

ID=27505102

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001282879A Abandoned AU2001282879A1 (en) 2000-07-08 2001-07-09 Methods and apparatus for processing microelectronic workpieces using metrology

Country Status (3)

Country Link
US (1) US7102763B2 (en)
AU (1) AU2001282879A1 (en)
WO (1) WO2002004887A1 (en)

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