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AU2001249336A1 - Movable processing apparatus and method for coating a substrate - Google Patents

Movable processing apparatus and method for coating a substrate

Info

Publication number
AU2001249336A1
AU2001249336A1 AU2001249336A AU4933601A AU2001249336A1 AU 2001249336 A1 AU2001249336 A1 AU 2001249336A1 AU 2001249336 A AU2001249336 A AU 2001249336A AU 4933601 A AU4933601 A AU 4933601A AU 2001249336 A1 AU2001249336 A1 AU 2001249336A1
Authority
AU
Australia
Prior art keywords
coating
substrate
processing apparatus
movable processing
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001249336A
Inventor
Rocky R. Arnold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shielding for Electronics Inc
Original Assignee
Shielding for Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shielding for Electronics Inc filed Critical Shielding for Electronics Inc
Publication of AU2001249336A1 publication Critical patent/AU2001249336A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Physical Vapour Deposition (AREA)
AU2001249336A 2000-03-21 2001-03-20 Movable processing apparatus and method for coating a substrate Abandoned AU2001249336A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US19092000P 2000-03-21 2000-03-21
US60190920 2000-03-21
US19877700P 2000-04-21 2000-04-21
US60198777 2000-04-21
PCT/US2001/009117 WO2001071057A1 (en) 2000-03-21 2001-03-20 Movable processing apparatus and method for coating a substrate

Publications (1)

Publication Number Publication Date
AU2001249336A1 true AU2001249336A1 (en) 2001-10-03

Family

ID=26886569

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001249336A Abandoned AU2001249336A1 (en) 2000-03-21 2001-03-20 Movable processing apparatus and method for coating a substrate

Country Status (3)

Country Link
US (2) US6833031B2 (en)
AU (1) AU2001249336A1 (en)
WO (1) WO2001071057A1 (en)

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US8287647B2 (en) * 2007-04-17 2012-10-16 Lam Research Corporation Apparatus and method for atomic layer deposition
US8031485B2 (en) * 2007-09-07 2011-10-04 Autosplice, Inc. Electronic shielding apparatus and methods
US7945344B2 (en) * 2008-06-20 2011-05-17 SAKT13, Inc. Computational method for design and manufacture of electrochemical systems
US9249502B2 (en) * 2008-06-20 2016-02-02 Sakti3, Inc. Method for high volume manufacture of electrochemical cells using physical vapor deposition
US20100157566A1 (en) * 2008-12-19 2010-06-24 Robert Bogursky Electronic shield assembly and methods
US8357464B2 (en) 2011-04-01 2013-01-22 Sakti3, Inc. Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells
US20120027953A1 (en) * 2010-07-28 2012-02-02 Synos Technology, Inc. Rotating Reactor Assembly for Depositing Film on Substrate
US9065080B2 (en) 2011-04-01 2015-06-23 Sakti3, Inc. Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells
US9127344B2 (en) 2011-11-08 2015-09-08 Sakti3, Inc. Thermal evaporation process for manufacture of solid state battery devices
US9627717B1 (en) 2012-10-16 2017-04-18 Sakti3, Inc. Embedded solid-state battery
US9627709B2 (en) 2014-10-15 2017-04-18 Sakti3, Inc. Amorphous cathode material for battery device
WO2016111512A1 (en) 2015-01-09 2016-07-14 Samsung Electronics Co., Ltd. Semiconductor package and method of manufacturing the same
DE102016101197A1 (en) * 2016-01-25 2017-07-27 Hella Kgaa Hueck & Co. Process for the surface coating of a component under vacuum and vacuum coating system for this purpose
US20190338410A1 (en) * 2018-05-03 2019-11-07 Vergason Technology, Inc. Alternating tangent mounted evaporative deposition source mechanism for rapid cycle coating

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US3756939A (en) * 1971-10-14 1973-09-04 Materials Research Corp Target mounting device for sequential sputtering
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US4102964A (en) * 1974-12-23 1978-07-25 Facetglas, Inc. Method for manufacturing rigid articles having a cushioned surface
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DE2844491C2 (en) 1978-10-12 1983-04-14 Leybold-Heraeus GmbH, 5000 Köln Vacuum coating system with a device for continuous substrate transport
US4342631A (en) * 1980-06-16 1982-08-03 Illinois Tool Works Inc. Gasless ion plating process and apparatus
US4960072A (en) * 1987-08-05 1990-10-02 Ricoh Company, Ltd. Apparatus for forming a thin film
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ES2103713T3 (en) * 1989-05-31 1997-10-01 Sfb Spezialfilter Und Anlagenb INSTALLATION AND PROCEDURE FOR THE MANUFACTURE OF FLAT PARTS AND COVERED WITH POWDER COATINGS, ESPECIALLY FLAT PLATE PIECES.
US4955341A (en) * 1989-09-18 1990-09-11 General Motors Corporation Idle control system for a crankcase scavenged two-stroke engine
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US5424097A (en) 1993-09-30 1995-06-13 Specialty Coating Systems, Inc. Continuous vapor deposition apparatus
US5565248A (en) 1994-02-09 1996-10-15 The Coca-Cola Company Method and apparatus for coating hollow containers through plasma-assisted deposition of an inorganic substance
JPH07316810A (en) 1994-05-27 1995-12-05 Fuji Xerox Co Ltd Sputtering device
US5811050A (en) 1994-06-06 1998-09-22 Gabower; John F. Electromagnetic interference shield for electronic devices
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JPH08311649A (en) * 1995-05-18 1996-11-26 Yamaha Corp Thin film forming device
DE19523319A1 (en) * 1995-06-27 1997-01-09 Tegometall Int Ag Device for spray coating workpieces with paint
US5536322A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device
JP3679485B2 (en) * 1996-01-17 2005-08-03 富士写真フイルム株式会社 Web curl measuring method and apparatus, curl correcting method and apparatus
JP3748473B2 (en) * 1996-12-12 2006-02-22 キヤノン株式会社 Deposited film forming equipment
US6047660A (en) 1997-09-06 2000-04-11 Lee; Brent W. Apparatus and method to form coated shielding layer for coaxial signal transmission cables
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DE19830223C1 (en) * 1998-07-07 1999-11-04 Techno Coat Oberflaechentechni Magnetron sputtering unit for multilayer coating of substrates especially in small to medium runs or in laboratories
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US6271465B1 (en) * 1999-08-31 2001-08-07 Nokia Mobile Phones Limited Low cost conformal EMI/RFI shield
WO2001054467A1 (en) * 2000-01-24 2001-07-26 Amesbury Group, Inc. Methods for producing emi shielding gasket

Also Published As

Publication number Publication date
WO2001071057A1 (en) 2001-09-27
US6833031B2 (en) 2004-12-21
US20020002945A1 (en) 2002-01-10
US20050202174A1 (en) 2005-09-15

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