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MY167435A - Fe-co alloy sputtering target material and method for producing same, and soft magnetic thin film layer and perpendicular magnetic recording medium using same - Google Patents

Fe-co alloy sputtering target material and method for producing same, and soft magnetic thin film layer and perpendicular magnetic recording medium using same

Info

Publication number
MY167435A
MY167435A MYPI2015000092A MYPI2015000092A MY167435A MY 167435 A MY167435 A MY 167435A MY PI2015000092 A MYPI2015000092 A MY PI2015000092A MY PI2015000092 A MYPI2015000092 A MY PI2015000092A MY 167435 A MY167435 A MY 167435A
Authority
MY
Malaysia
Prior art keywords
same
target material
sputtering target
thin film
recording medium
Prior art date
Application number
MYPI2015000092A
Other languages
English (en)
Inventor
Hiroyuki Hasegawa
Toshiyuki Sawada
Noriaki Matsubara
Original Assignee
Sanyo Special Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Special Steel Co Ltd filed Critical Sanyo Special Steel Co Ltd
Publication of MY167435A publication Critical patent/MY167435A/en

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/64Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/66Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
    • G11B5/667Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers including a soft magnetic layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C19/00Alloys based on nickel or cobalt
    • C22C19/07Alloys based on nickel or cobalt based on cobalt
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C33/00Making ferrous alloys
    • C22C33/02Making ferrous alloys by powder metallurgy
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/10Ferrous alloys, e.g. steel alloys containing cobalt
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851Coating a support with a magnetic layer by sputtering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H01F41/183Sputtering targets therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Powder Metallurgy (AREA)
  • Thin Magnetic Films (AREA)
MYPI2015000092A 2012-08-14 2013-08-12 Fe-co alloy sputtering target material and method for producing same, and soft magnetic thin film layer and perpendicular magnetic recording medium using same MY167435A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012179811A JP6050050B2 (ja) 2012-08-14 2012-08-14 Fe−Co系合金スパッタリングターゲット材およびその製造方法

Publications (1)

Publication Number Publication Date
MY167435A true MY167435A (en) 2018-08-28

Family

ID=50285930

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2015000092A MY167435A (en) 2012-08-14 2013-08-12 Fe-co alloy sputtering target material and method for producing same, and soft magnetic thin film layer and perpendicular magnetic recording medium using same

Country Status (6)

Country Link
JP (1) JP6050050B2 (zh)
CN (1) CN104508167B (zh)
MY (1) MY167435A (zh)
SG (1) SG11201408794VA (zh)
TW (1) TWI494443B (zh)
WO (1) WO2014027636A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6801168B2 (ja) * 2014-06-27 2020-12-16 三菱マテリアル株式会社 スパッタリングターゲット、光学機能膜、及び、積層配線膜
KR102152586B1 (ko) 2015-03-04 2020-09-07 제이엑스금속주식회사 자성재 스퍼터링 타깃 및 그 제조 방법
WO2016157922A1 (ja) * 2015-03-27 2016-10-06 日立金属株式会社 軟磁性膜および軟磁性膜形成用スパッタリングターゲット
JP6784733B2 (ja) * 2018-08-20 2020-11-11 山陽特殊製鋼株式会社 磁気記録媒体の軟磁性層用Co系合金
JPWO2024128075A1 (zh) * 2022-12-16 2024-06-20
CN119609133B (zh) * 2024-12-12 2025-12-02 先导薄膜材料(安徽)有限公司 一种FeCoNbW合金靶材及其热等静压制备方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4331182B2 (ja) * 2006-04-14 2009-09-16 山陽特殊製鋼株式会社 軟磁性ターゲット材
US20070253103A1 (en) * 2006-04-27 2007-11-01 Heraeus, Inc. Soft magnetic underlayer in magnetic media and soft magnetic alloy based sputter target
JP4907259B2 (ja) * 2006-08-16 2012-03-28 山陽特殊製鋼株式会社 Crを添加したFeCoB系ターゲット材
JP2008121071A (ja) * 2006-11-13 2008-05-29 Sanyo Special Steel Co Ltd 軟磁性FeCo系ターゲット材
JP5111835B2 (ja) * 2006-11-17 2013-01-09 山陽特殊製鋼株式会社 (CoFe)ZrNb/Ta/Hf系ターゲット材およびその製造方法
JP5253781B2 (ja) * 2007-09-18 2013-07-31 山陽特殊製鋼株式会社 垂直磁気記録媒体における軟磁性膜層用合金ターゲット材
JP5397755B2 (ja) * 2008-06-17 2014-01-22 日立金属株式会社 軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材
JP5726615B2 (ja) * 2010-11-22 2015-06-03 山陽特殊製鋼株式会社 磁気記録媒体のシード層用合金およびスパッタリングターゲット材
SG11201405335SA (en) * 2012-06-06 2014-11-27 Hitachi Metals Ltd Fe-co-based alloy sputtering target material, and method ofproducing same

Also Published As

Publication number Publication date
CN104508167A (zh) 2015-04-08
SG11201408794VA (en) 2015-02-27
JP6050050B2 (ja) 2016-12-21
WO2014027636A1 (ja) 2014-02-20
CN104508167B (zh) 2017-08-04
TWI494443B (zh) 2015-08-01
JP2014037569A (ja) 2014-02-27
TW201413003A (zh) 2014-04-01

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