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WO2009054369A1 - 磁気記録膜用スパッタリングターゲットおよびその製造方法 - Google Patents

磁気記録膜用スパッタリングターゲットおよびその製造方法 Download PDF

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Publication number
WO2009054369A1
WO2009054369A1 PCT/JP2008/069021 JP2008069021W WO2009054369A1 WO 2009054369 A1 WO2009054369 A1 WO 2009054369A1 JP 2008069021 W JP2008069021 W JP 2008069021W WO 2009054369 A1 WO2009054369 A1 WO 2009054369A1
Authority
WO
WIPO (PCT)
Prior art keywords
sputtering target
manufacturing
magnetic recording
recording film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/069021
Other languages
English (en)
French (fr)
Other versions
WO2009054369A9 (ja
Inventor
Kazuteru Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Kinzoku Co Ltd
Original Assignee
Mitsui Mining and Smelting Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Mining and Smelting Co Ltd filed Critical Mitsui Mining and Smelting Co Ltd
Priority to US12/739,261 priority Critical patent/US20100243435A1/en
Priority to CN2008801124235A priority patent/CN101835920B/zh
Publication of WO2009054369A1 publication Critical patent/WO2009054369A1/ja
Publication of WO2009054369A9 publication Critical patent/WO2009054369A9/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/07—Alloys based on nickel or cobalt based on cobalt
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C30/00—Alloys containing less than 50% by weight of each constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
    • C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
    • C22C32/0015—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
    • C22C32/0021—Matrix based on noble metals, Cu or alloys thereof
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
    • C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
    • C22C32/0015—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
    • C22C32/0026—Matrix based on Ni, Co, Cr or alloys thereof
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/04—Alloys based on a platinum group metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H01F41/183—Sputtering targets therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Powder Metallurgy (AREA)

Abstract

　本発明は、結晶粒の成長を抑制し、低透磁率かつ高密度とすることにより、成膜効率化および膜特性の向上が実現できる磁気記録膜用スパッタリングターゲット、およびその製造方法を提供することを目的とする。本発明は、ＣｏおよびＰｔを含むマトリックス相と、金属酸化物相とからなるスパッタリングターゲットであって、透磁率が６～１５、相対密度が９０％以上であることを特徴とする磁気記録膜用スパッタリングターゲットである。
PCT/JP2008/069021 2007-10-24 2008-10-21 磁気記録膜用スパッタリングターゲットおよびその製造方法 Ceased WO2009054369A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/739,261 US20100243435A1 (en) 2007-10-24 2008-10-21 Sputtering Target for Magnetic Recording Film and Method for Manufacturing the Same
CN2008801124235A CN101835920B (zh) 2007-10-24 2008-10-21 磁记录膜用溅射靶及其制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-276570 2007-10-24
JP2007276570A JP5204460B2 (ja) 2007-10-24 2007-10-24 磁気記録膜用スパッタリングターゲットおよびその製造方法

Publications (2)

Publication Number Publication Date
WO2009054369A1 true WO2009054369A1 (ja) 2009-04-30
WO2009054369A9 WO2009054369A9 (ja) 2010-02-04

Family

ID=40579474

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/069021 Ceased WO2009054369A1 (ja) 2007-10-24 2008-10-21 磁気記録膜用スパッタリングターゲットおよびその製造方法

Country Status (5)

Country Link
US (1) US20100243435A1 (ja)
JP (1) JP5204460B2 (ja)
CN (1) CN101835920B (ja)
TW (1) TW200930825A (ja)
WO (1) WO2009054369A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2467224A1 (de) * 2009-08-18 2012-06-27 MTU Aero Engines GmbH Dünnwandiges strukturbauteil und verfahren zu seiner herstellung
US20130112555A1 (en) * 2010-07-20 2013-05-09 Jx Nippon Mining & Metals Corporation Sputtering Target of Ferromagnetic Material with Low Generation of Particles
WO2013136962A1 (ja) * 2012-03-15 2013-09-19 Jx日鉱日石金属株式会社 磁性材スパッタリングターゲット及びその製造方法
US9103023B2 (en) 2009-03-27 2015-08-11 Jx Nippon Mining & Metals Corporation Nonmagnetic material particle-dispersed ferromagnetic material sputtering target

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011084804A (ja) * 2009-09-18 2011-04-28 Kobelco Kaken:Kk 金属酸化物−金属複合スパッタリングターゲット
SG175953A1 (en) 2010-01-21 2011-12-29 Jx Nippon Mining & Metals Corp Ferromagnetic-material sputtering target
JP5337331B2 (ja) * 2010-03-30 2013-11-06 山陽特殊製鋼株式会社 スパッタリングターゲット材の製造方法
JP5426030B2 (ja) * 2010-12-09 2014-02-26 Ｊｘ日鉱日石金属株式会社 強磁性材スパッタリングターゲット
CN103270554B (zh) * 2010-12-20 2016-09-28 吉坤日矿日石金属株式会社 分散有C粒子的Fe-Pt型溅射靶
JP5725610B2 (ja) 2011-04-29 2015-05-27 三菱マテリアル株式会社 スパッタリングターゲット及びその製造方法
JP5829747B2 (ja) * 2012-02-22 2015-12-09 Jx日鉱日石金属株式会社 磁性材スパッタリングターゲット及びその製造方法
JP2014034730A (ja) * 2012-08-10 2014-02-24 Mitsui Mining & Smelting Co Ltd 焼結体およびスパッタリングターゲット
JP2012246574A (ja) * 2012-09-18 2012-12-13 Mitsubishi Materials Corp スパッタリングターゲット及びその製造方法
MY185389A (en) * 2013-02-15 2021-05-17 Jx Nippon Mining & Metals Corp Sputtering target containing co or fe
CN104060229A (zh) * 2014-06-20 2014-09-24 贵研铂业股份有限公司 一种CoCrPt-氧化物磁记录靶材、薄膜及其制备方法
JP6504605B2 (ja) * 2015-11-27 2019-04-24 田中貴金属工業株式会社 スパッタリングターゲット
WO2018083951A1 (ja) * 2016-11-01 2018-05-11 田中貴金属工業株式会社 磁気記録媒体用スパッタリングターゲット
JP6698950B1 (ja) * 2018-07-27 2020-05-27 株式会社アルバック スパッタリングターゲット及びスパッタリングターゲットの製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11222671A (ja) * 1998-02-02 1999-08-17 Hitachi Metals Ltd スパッタリング用ターゲットおよびその製造方法
JP2000282229A (ja) * 1999-03-29 2000-10-10 Hitachi Metals Ltd ＣｏＰｔ系スパッタリングターゲットおよびその製造方法ならびにこれを用いた磁気記録膜およびＣｏＰｔ系磁気記録媒体
JP2001236643A (ja) * 2000-02-23 2001-08-31 Fuji Electric Co Ltd 磁気記録媒体製造用スパッタリングターゲット、それを用いた磁気記録媒体の製造方法および磁気記録媒体
JP2004339586A (ja) * 2003-05-19 2004-12-02 Mitsubishi Materials Corp 磁気記録膜形成用スパッタリングターゲットおよびその製造方法
WO2007080781A1 (ja) * 2006-01-13 2007-07-19 Nippon Mining & Metals Co., Ltd. 非磁性材粒子分散型強磁性材スパッタリングターゲット
WO2007114356A1 (ja) * 2006-03-31 2007-10-11 Mitsubishi Materials Corporation 垂直磁気記録媒体膜形成用スパッタリングターゲット及びその製造方法

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JPS6314864A (ja) * 1986-07-08 1988-01-22 Ulvac Corp Ｃｏ基合金スパツタタ−ゲツトおよびその製造法
EP0535314A1 (en) * 1991-08-30 1993-04-07 Mitsubishi Materials Corporation Platinum-cobalt alloy sputtering target and method for manufacturing same
JP2806228B2 (ja) * 1993-10-25 1998-09-30 株式会社神戸製鋼所 難加工性Ｃｏ合金の低透磁率化方法
US6176944B1 (en) * 1999-11-01 2001-01-23 Praxair S.T. Technology, Inc. Method of making low magnetic permeability cobalt sputter targets
JP2006313584A (ja) * 2005-05-06 2006-11-16 Hitachi Global Storage Technologies Netherlands Bv 磁気記録媒体の製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11222671A (ja) * 1998-02-02 1999-08-17 Hitachi Metals Ltd スパッタリング用ターゲットおよびその製造方法
JP2000282229A (ja) * 1999-03-29 2000-10-10 Hitachi Metals Ltd ＣｏＰｔ系スパッタリングターゲットおよびその製造方法ならびにこれを用いた磁気記録膜およびＣｏＰｔ系磁気記録媒体
JP2001236643A (ja) * 2000-02-23 2001-08-31 Fuji Electric Co Ltd 磁気記録媒体製造用スパッタリングターゲット、それを用いた磁気記録媒体の製造方法および磁気記録媒体
JP2004339586A (ja) * 2003-05-19 2004-12-02 Mitsubishi Materials Corp 磁気記録膜形成用スパッタリングターゲットおよびその製造方法
WO2007080781A1 (ja) * 2006-01-13 2007-07-19 Nippon Mining & Metals Co., Ltd. 非磁性材粒子分散型強磁性材スパッタリングターゲット
WO2007114356A1 (ja) * 2006-03-31 2007-10-11 Mitsubishi Materials Corporation 垂直磁気記録媒体膜形成用スパッタリングターゲット及びその製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9103023B2 (en) 2009-03-27 2015-08-11 Jx Nippon Mining & Metals Corporation Nonmagnetic material particle-dispersed ferromagnetic material sputtering target
EP2467224A1 (de) * 2009-08-18 2012-06-27 MTU Aero Engines GmbH Dünnwandiges strukturbauteil und verfahren zu seiner herstellung
US20130112555A1 (en) * 2010-07-20 2013-05-09 Jx Nippon Mining & Metals Corporation Sputtering Target of Ferromagnetic Material with Low Generation of Particles
US9181617B2 (en) * 2010-07-20 2015-11-10 Jx Nippon Mining & Metals Corporation Sputtering target of ferromagnetic material with low generation of particles
WO2013136962A1 (ja) * 2012-03-15 2013-09-19 Jx日鉱日石金属株式会社 磁性材スパッタリングターゲット及びその製造方法
JPWO2013136962A1 (ja) * 2012-03-15 2015-08-03 Jx日鉱日石金属株式会社 磁性材スパッタリングターゲット及びその製造方法
JP2015172244A (ja) * 2012-03-15 2015-10-01 Jx日鉱日石金属株式会社 磁性材スパッタリングターゲット及びその製造方法

Also Published As

Publication number Publication date
JP5204460B2 (ja) 2013-06-05
CN101835920A (zh) 2010-09-15
CN101835920B (zh) 2012-07-18
WO2009054369A9 (ja) 2010-02-04
US20100243435A1 (en) 2010-09-30
TW200930825A (en) 2009-07-16
JP2009102707A (ja) 2009-05-14

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