WO2014030536A1 - Anisotropic conductive member - Google Patents

Description

Anisotropic conductive member

The present invention relates to an anisotropic conductive member used for IC inspection and the like.

When inspecting an IC having a large number of terminals, an inspection connected to each terminal of the IC and an inspection device (IC tester) for inspecting the IC while suppressing electrical connection between adjacent terminals in the IC. An anisotropic conductive member is used for electrically connecting the electrodes corresponding to the terminals on the circuit board.

The anisotropic conductive member is generally plate-shaped as a whole, and its electrical conductivity in the normal direction of its main surface is sufficiently high so that an electric signal can pass through it, but it is insulated in the in-plane direction of the main surface. And has the property of not conducting electricity. Based on this characteristic, the anisotropic conductive member has a structure including a large number of portions through which current passes in the normal direction of the main surface corresponding to the terminals of the IC to be inspected. In the present invention, a portion through which a current passes in the normal direction of the main surface corresponding to the terminal of the IC is referred to as an electric through portion.

The specific structure of the electric through-hole is arbitrary, a structure including conductive thin wires such as metal embedded in the member so as to be exposed from both main surfaces of the anisotropic conductive member, and between the two main surfaces. A structure comprising a group of filled conductive fine particles, a tubular body that is opened while being partially closed at both ends, a coil spring disposed inside the tubular body, and the above-mentioned partial while being urged by the coil spring Examples thereof include a probe pin composed of two contact members partially protruding from the tubular body in a state of being locked to a closed portion.

In use of the electric through-portion in use, the terminal of the IC and the inspection substrate and the end portion on the main surface of the electric through-hole portion of the anisotropic conductive member are in a predetermined state in order to stabilize the electrical contact between them. Contact with pressure. In many cases, a structure for generating a contact pressure using an elastic restoring force is provided in the electric through-hole so that the contact pressure is generated to such an extent that the electrical contact is stabilized.

For example, the electrical penetration part using the above-mentioned conductive thin wires and the electrical penetration part using a group of conductive fine particles have a structure in which these members are embedded in an elastic body. The contact pressure with the substrate is generated. In the probe pin, the coil spring urges the two contact members so as to separate the contact members, thereby generating contact pressure between the contact members and the IC terminals and the inspection substrate.

In addition to the above example, Patent Document 1 discloses that an elastic plate made of a nonconductive material having a through hole formed at a position corresponding to a contact terminal of an inspection object; A plunger composed of a plunger head part elastically supported by a plate and a plunger main body extending from the center of the lower surface of the plunger head part; and a receiving part contacting the plunger main body is depressed in the central part And a contact pin formed and coupled to the lower side of the through-hole.

JP 2008-180689 A

In the probe device for semiconductor chip inspection (corresponding to the “anisotropic conductive member” in the present specification) disclosed in Patent Document 1, an electrical penetration portion constituted by a movable member composed of a plunger and a contact pin is provided. The elastic plate is variably disposed in the thickness direction of the elastic plate by using an elastic restoring force of an elastic plate made of a non-conductive material (also referred to as “elastic socket” in this specification).
Such an anisotropic conductive member has a complicated structure of the through-hole provided in the elastic socket and is difficult to process, and the inner diameter of the through-hole is larger than the maximum outer diameter of the movable member, making it difficult to miniaturize it. There's a problem.

That is, in an anisotropic conductive member having a structure in which an elastic socket having a through hole and two movable members are provided, and at least one of the two movable members penetrates the through hole, the semiconductor is highly integrated and miniaturized, and inspection is performed. When the pitch between terminals of the target IC is narrow and the number of terminals increases, the following problems occur.
(Problem 1) The portion with the thinnest outer diameter in the movable member becomes insufficient in strength, and is bent during use of the anisotropic conductive member.
(Problem 2) When the movable member passing through the through-hole expands the inner diameter of the through-hole, the elastic body between the adjacent through-holes is compressed, and the distance between the through-holes increases due to the elastic repulsive force, and the IC terminal pitch Deviation occurs in the through hole.
(Problem 3) The protruding amount of the protruding portion of the movable member that compresses the elastic socket is relatively small with respect to the inner diameter of the through hole, and the movable member is buried in the through hole when the elastic socket is compressed.

Of the above problems, problem 1 will be described in detail using a semiconductor chip inspection probe device (anisotropic conductive member) disclosed in Patent Document 1.
FIG. 19 is a diagram conceptually showing a cross section of the movable member described in Patent Document 1. As shown in FIG. FIG. 20 shows a state where the movable member of FIG. 19 is in contact with a solder ball which is a terminal of the IC. In both cases, a cross section other than a movable member such as an elastic socket is omitted.

As shown in FIG. 20, ideally, the tip of the IC terminal (the solder ball in FIG. 20) is disposed on the central axis of the IC-side movable member, and the IC terminal and the IC-side movable member Based on the contact, the movable member on the IC side is pushed toward the other movable member. However, in practice, such contact is rarely made. Normally, the contact of the IC terminal is caused by the positional tolerance of the IC terminal, the positional deviation of the IC in the inspection apparatus, the displacement of the anisotropic conductive member, or the like. The tip is in contact with the center of the movable member on the IC side in an offset state. The contact in this offset state is shown in FIG.

In the case of contact in such an offset state, if the IC-side movable member cannot be inclined with respect to the other movable member as in the anisotropic conductive member shown in FIG. A lateral load is applied to the movable member in the offset direction. The IC-side movable member does not bend if it has a strength that does not cause plastic deformation with respect to the lateral load. However, if the IC-side movable member is thin and weak, the IC-side movable member bends. The two movable members will cause poor sliding.

Among the above problems, problems 2 and 3 are also problems that become apparent when the IC terminals are narrowed in pitch, and the anisotropic conductive member disclosed in Patent Document 1 has a sufficient pitch between the IC terminals. However, when the pitch between the IC terminals is narrowed, the gap between the IC terminal pitch and the through-hole due to the expansion of the through-holes becomes relatively large, Even when the contact with the movable member on the IC side is released, the problem that the movable member is buried in the elastic body becomes obvious.

The present invention solves the above problems and provides an anisotropic conductive member capable of inspecting a fine pitch IC.

The present invention provided to solve the above problems is as follows.

(1) An elastic plate-like elastic socket made of an insulator and a plurality of through holes provided in the elastic socket are provided corresponding to each of the plurality of through holes, and have portions through the through holes. An anisotropic conductive member having a plurality of electrical through portions that allow current to pass in the thickness direction, wherein the electrical through portions can be electrically connected and change the relative position in the thickness direction of the elastic socket. A first movable member and a second movable member, and the first movable member has an electrode contact portion for contacting an electrode attached to the inspection object on the side facing the inspection object. The second movable member includes a substrate contact portion for contacting the inspection substrate of the inspection apparatus at an end portion facing the inspection substrate, and the electrode contact portion and the substrate contact portion. In the thickness direction of the elastic socket The first and second movable members are arranged so that a part of the elastic socket can be compressed so that an elastic restoring force is generated in the elastic socket in a direction to separate them when an external force is applied. In the electrical penetration portion, the first sliding surface provided on the first movable member and the second sliding surface provided on the second movable member are mutually in the thickness direction of the elastic socket. A sliding contact structure that slides; the sliding contact structure allows the distance between the electrode contact portion and the substrate contact portion to be in the thickness direction of the elastic socket while maintaining electrical connection between these contact portions; The first movable member includes a cylindrical body portion that extends from the electrode contact portion in the thickness direction of the elastic socket and has a hollow, and the electrode contact portion side of the cylindrical body portion, The opposite end has an opening, and the cylindrical portion has the opening. At least a part of the inner side surface on the end side having the mouth forms the first sliding surface, and the end surface on the side having the opening of the cylindrical body portion is a main surface on the electrode contact portion side of the elastic socket. The first movable member is placed on the main surface of the elastic socket on the electrode contact portion side so that the second movable member extends from the substrate contact portion in the thickness direction of the elastic socket. An extended shaft body portion, and at least a part of the outer surface of the shaft body portion on the side opposite to the end on the substrate contact portion side forms the second sliding surface, and the shaft body A part including an end portion on the side having the outer surface forming the second sliding surface in the portion protrudes from the main surface on the electrode contact portion side of the elastic socket and enters the hollow of the first movable member. Inserted, the other part of the shaft body portion is disposed in the through hole of the elastic socket, In the first sliding surface, the length of the first sliding surface which is the length in the thickness direction of the elastic socket capable of sliding contact with the second sliding surface and the second sliding surface When one of the lengths of the second sliding surface, which is the length in the thickness direction of the elastic socket capable of sliding contact with the first sliding surface, is shorter than the other, the first movable The anisotropic conductive member, wherein the member can be inclined with respect to the thickness direction of the elastic socket without plastically deforming the shaft body portion.

(2) The anisotropic conductive member according to (1), wherein the length of the second sliding surface is shorter than the length of the first sliding surface.

(3) The shaft body portion of the second movable member has a large-diameter portion having a larger diameter than other portions, and an outer surface of the large-diameter portion forms the second sliding surface. An anisotropic conductive member as described in 2).

(4) The anisotropic conductive member according to (3), wherein the large diameter portion is provided so as to include an end portion of the shaft body portion on a side inserted into the cylindrical body portion.

(5) The diameter of the large-diameter portion is larger than the inner diameter of the through-hole of the elastic socket, the through-hole can be deformed by contact with the large-diameter portion, The anisotropic conductive member according to (3), wherein the anisotropic conductive member is inserted into the cylindrical body portion through the through hole by deformation.

(6) The shaft body portion includes a fine metal wire, and the large diameter portion includes a part of the fine metal wire and a plating layer formed on a part of the outer surface. Conductive member.

(7) When the step portion between the large-diameter portion and the other portion in the shaft body portion is locked to the edge of the opening of the through hole of the elastic socket, the second movable member passes through the through-hole. The anisotropic conductive member according to the above (5) or (6), which is prevented from being detached from the hole toward the substrate contact portion.

(8) The anisotropic conductive member according to (1), wherein the length of the first sliding surface is shorter than the length of the second sliding surface.

(9) The hollow of the cylindrical portion of the first movable member has a reduced diameter portion having an inner diameter smaller than that of other portions, and an inner surface of the reduced diameter portion forms the first sliding surface. The anisotropic conductive member according to (8) above.

(10) The anisotropic conductive member according to (9), wherein the reduced diameter portion is provided so as to include an end portion of the cylindrical body portion on the side having the opening.

(11) The anisotropic conductive member according to any one of (8) to (10), wherein the shaft body portion includes a thin metal wire.

(12) The substrate contact portion includes a part of the thin metal wire and a member separate from the thin metal wire, and the separate member from the thin metal wire is fixed to a part of the thin metal wire. 11) An anisotropic conductive member according to 11).

(13) The main surface on the electrode contact portion side of the elastic socket is provided with a countersink portion so as to include the opening of the through hole, and the elastic socket side of the first movable member in the countersink portion The anisotropic conductive member according to any one of (1) to (12), wherein an end of the is placed.

(14) The part disposed in the through hole in the shaft body part does not have a part whose outer diameter exceeds the inner diameter of the through hole, according to any one of (1) to (13). Anisotropic conductive member.

(15) In the above (14), the portion disposed in the through hole in the shaft body portion has a portion whose outer diameter is larger than that of the other portion proximal to the end portion on the substrate contact portion side. The anisotropic conductive member as described.

(16) At least a part of the portion disposed in the through hole in the shaft body portion has an outer diameter equal to or larger than the inner diameter of the through hole, and is press-fitted into the through hole. The anisotropic conductive member according to any one of (1) to (13).

(17) The substrate contact portion is configured to contact the substrate contact portion of the elastic socket so that at least a part of the end surface of the substrate contact portion on the shaft body portion side is in contact with the main surface of the elastic socket on the substrate contact portion side. The anisotropic conductive member according to any one of (1) to (16), wherein the anisotropic conductive member has a portion protruding in the in-plane direction of the main surface on the part side.

(18) The anisotropic conductive member further includes an electrode-side plate member made of a rigid material provided so that one main surface thereof faces the main surface on the electrode contact portion side in the elastic socket, The electrode side plate-like member has a through hole in an arrangement corresponding to the electrode contact portion, and the electrode contact portion protrudes from a main surface opposite to the side facing the elastic socket in the electrode side plate member. The anisotropically conductive member according to any one of (1) to (17), wherein the first movable member is inserted into the through hole of the electrode side plate member.

(19) The first movable member inserted in the through-hole of the electrode side plate-like member has an outer surface between the main surface on the electrode contact portion side of the elastic socket and the electrode side plate-like member. A diameter of a circumscribed circle having a cross-sectional shape of the first movable member on a surface including the locking protrusion, the locking socket having a locking protrusion protruding from a part of the elastic socket; The anisotropic conductive member according to the above (18), which is larger than the opening diameter of the through hole of the electrode side plate-like member at the end portion on the elastic socket side.

(20) The main surface of the electrode-side plate-like member on the elastic socket side is provided with a countersink portion so as to include the opening of the through-hole, and is inserted into the through-hole of the electrode-side plate-like member. One movable member has the latching protrusion part which protrudes from a part of the outer surface between the main surface by the side of the electrode contact part of the elastic socket, and the end face by the side of the through hole of the countersink part. The diameter of the circumscribed circle of the cross-sectional shape of the first movable member on the surface including the locking projection is normal to the thickness direction of the elastic socket, and the countersunk portion of the through hole of the electrode side plate member The anisotropic conductive member according to (18), wherein the anisotropic conductive member is larger than an opening diameter at a side end portion and smaller than an inner diameter of the countersink portion.

(21) The first movable member inserted in the through hole of the electrode side plate member has a step portion at a connection portion between the electrode contact portion and the cylindrical body portion, and the step portion is the engagement member. The anisotropic conductive member according to (19) or (20), wherein the anisotropic conductive member forms a stop protrusion.

(22) In a state before the electrode contact portion comes into contact with the electrode attached to the object to be inspected, a peripheral edge portion on the side facing the elastic socket of the through hole of the electrode side plate-like member is the locking projection portion. (19) to (21), in which an elastic restoring force is applied to the electrode contact portion and the substrate contact portion from the elastic socket by pushing the pin into the thickness direction center side of the elastic socket. An anisotropic conductive member according to any one of the above.

(23) When an external force that brings the electrode contact portion and the substrate contact portion close to each other in the thickness direction of the elastic socket is applied to the electrode contact portion, both the electrode contact portion and the substrate contact portion are elastic. The above-mentioned (17), wherein the elastic socket is attached to the inspection substrate so as to be variable in the thickness direction of the elastic socket so as to change toward the center of the elastic socket in the thickness direction of the socket. ) To (22).

(24) The reduced diameter portion of the first movable member includes one or more protrusions protruding from the inner surface of the cylindrical body portion toward the central axis side of the cylindrical body portion, and a protruding tip of the protruding portion. The anisotropic conductive member according to (9) or (10), wherein the surface of the portion constitutes the first sliding surface.

According to the present invention, since the length of the sliding surface of one movable member and the length of the sliding surface of the other movable member are different, the movable member having the shorter sliding surface is the longer sliding surface. It is possible to slide in a tilted state with respect to the movable member having. Therefore, even if the electrode contact portion of the first movable member contacts the electrode of the IC in an offset state, the first movable member and the second movable member can slide. Therefore, the present invention provides an anisotropic conductive member capable of inspecting a fine pitch IC.

It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on 1st embodiment of this invention. The anisotropic conductive member is connected so that the solder ball, which is an electrode attached to the inspection object, contacts the electrode contact portion of the anisotropic conductive member according to FIG. 1, and the inspection object and the inspection substrate are close to each other. It is an example of the state where external force was given to a member, and is a sectional view showing notionally the case where an electrode contact part and a solder ball are in ideal contact. The anisotropic conductive member is connected so that the solder ball, which is an electrode attached to the inspection object, contacts the electrode contact portion of the anisotropic conductive member according to FIG. 1, and the inspection object and the inspection substrate are close to each other. It is an example of the state where external force was given to the member, and is a sectional view showing notionally the case where the electrode contact portion and the solder ball are in contact in an offset state. It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on 2nd embodiment of this invention. The anisotropic conductive member is connected so that the solder ball, which is an electrode attached to the inspection object, contacts the electrode contact portion of the anisotropic conductive member according to FIG. 4 and the inspection object and the inspection substrate are close to each other. It is an example of the state where external force was given to a member, and is a sectional view showing notionally the case where an electrode contact part and a solder ball are in ideal contact. The anisotropic conductive member is connected to the electrode contact portion of the anisotropic conductive member according to FIG. 5 so that the solder ball, which is an electrode attached to the inspection target, is in contact with the inspection target and the inspection substrate. It is an example of the state where external force was given to the member, and is a sectional view showing notionally the case where the electrode contact portion and the solder ball are in contact in an offset state. It is a figure which shows notionally one part of one cross section of the specific example of the structure of the 2nd movable member of the anisotropically conductive member which concerns on 2nd embodiment of this invention. Regarding another specific example of the structure of the second movable member of the anisotropic conductive member according to the second embodiment of the present invention, (a) a state before use and (b) one of cross sections of the use state It is a figure which shows a part notionally. It is a figure which shows notionally a part of another one cross section of the specific example of the structure of the 2nd movable member of the anisotropically conductive member which concerns on 2nd embodiment of this invention. It is a figure which shows notionally a part of another one cross section of the specific example of the structure of the 2nd movable member of the anisotropically conductive member which concerns on 2nd embodiment of this invention. It is a figure which shows notionally one part of one cross section of the specific example of the structure of the 2nd movable member of the anisotropically conductive member which concerns on 1st embodiment of this invention. It is a figure which shows notionally one part of one cross section of the structural modification applicable to the anisotropically conductive member which concerns on this invention. It is a figure which shows notionally a part of another one cross section of the structural modification applicable to the anisotropic conductive member which concerns on this invention. It is a figure which shows notionally a part of another one cross section of the structural modification applicable to the anisotropically conductive member which concerns on this invention. Regarding yet another structural modification applicable to the anisotropic conductive member according to the present invention, (a) a state before use and (b) a part of a cross section in use. FIG. It is a figure which shows notionally a part of cross section of a preferable example of the anisotropically conductive member shown by FIG. It is a figure which shows notionally one part of another cross section of the structural modification applicable to the anisotropically conductive member which concerns on this invention. It is a figure which shows notionally one part of another cross section of the structural modification applicable to the anisotropic conductive member which concerns on this invention. It is a figure which shows notionally the cross section of the movable member described in patent document 1. FIG. It is a figure which shows the state which the movable member of FIG. 19 is contacting with the solder ball which is a terminal of IC in an ideal state. It is a figure which shows the state which the movable member of FIG. 19 is contacting in the offset state with the solder ball which is a terminal of IC.

Hereinafter, an anisotropic conductive member according to the present invention will be described with reference to the drawings.
FIG. 1 is a view conceptually showing a part of a cross section in the thickness direction of an elastic socket of an anisotropic conductive member according to a first embodiment of the present invention.

The anisotropic conductive member 100 according to the present embodiment includes a plate-like elastic socket 101 made of an insulator and having elasticity. The material of the elastic socket is not particularly limited. Examples of the material include an insulating material having elasticity such as silicone rubber, fluororubber, or acrylic elastomer.

The elastic socket 101 includes a plurality of through holes 102. The method for forming the through hole is not particularly limited. It may be formed at the same time as the elastic socket is formed (for example, molding), or a through hole may be formed in a plate-like elastic member using a micro drill or the like.

A plurality of electrical through-holes 103 provided corresponding to each of the plurality of through-holes 102 provided in the elastic socket 101 and having a portion penetrating the through-hole 102 and passing a current in the thickness direction of the elastic socket 101, The anisotropic conductive member 100 according to the present embodiment is provided.

The electrical penetration portion 103 includes a first movable member 104 and a second movable member 105 that are electrically connected to each other and can change the relative position in the thickness direction of the elastic socket 101. Among these movable members, the first movable member 104 is an electrode (specifically, a solder ball or a metal bump) attached to an inspection object (specifically, an IC is exemplified). An electrode contact portion 106 for contact is provided at an end portion on the side (upper side in FIG. 1) facing the inspection object. On the other hand, the second movable member 105 includes a substrate contact portion 107 for contacting the inspection substrate of the inspection apparatus at an end portion (on the lower side in FIG. 1) facing the inspection substrate.

The first movable member 104, the second movable member 105, and the elastic socket 101 are arranged so as to satisfy the following relationship. That is, when an external force is applied to bring the electrode contact portion 106 and the substrate contact portion 107 close to each other in the thickness direction of the elastic socket 101 (specifically, in the state of use, the anisotropic conductive material placed on the inspection substrate is used. For example, the electrode contact portion 106 of the conductive member 100 is in contact with an electrode of an IC such as a solder ball while being applied with a force that comes close to the inspection substrate. The first movable member 104 and the second movable member 105 are arranged so that a part of the elastic socket 101 can be compressed so that an elastic restoring force is generated in the elastic socket 101 in a direction to separate the board 106 and the board contact portion 107. .

Specifically, in FIG. 1, the end surface 104 a of the first movable member 104 opposite to the electrode contact portion 106 is in contact with the main surface 101 a of the elastic socket 101 on the side facing the inspection object. In addition, a portion (hereinafter also referred to as a “hook portion”) 108 having the largest outer diameter of the second movable member 105 is in contact with the main surface 101b of the elastic socket 101 facing the inspection substrate. Therefore, the end surface 104a of the first movable member 104 and the flange portion 108 of the second movable member 105 are oriented so as to separate the electrode contact portion 106 and the substrate contact portion 107 by compressing the elastic socket 101 therebetween. An elastic restoring force can be generated in the elastic socket 101.

In the electrical penetration portion 103, the first sliding surface 109 provided on the first movable member 104 and the second sliding surface 110 provided on the second movable member 105 are in the thickness direction of the elastic socket 101. Are provided with sliding contact structures that slide relative to each other. With this sliding contact structure, the distance between the electrode contact portion 106 and the substrate contact portion 107 can be varied in the thickness direction of the elastic socket 101 while maintaining the electrical connection between the contact portions 106 and 107.

The first movable member 104 includes a cylindrical body portion 111 that extends from the electrode contact portion 106 to the center side of the elastic socket 101 in the thickness direction and has a hollow 111a. The end portion of the cylindrical body portion 111 opposite to the electrode contact portion 106 side has an opening 111b, and at least a part of the inner side surface of the cylindrical body portion having the opening 111b is a first sliding surface 109. I am doing. In the present embodiment, the inner surface of the hollow 111a of the cylindrical body portion 111 does not have a particular step, the inner surface has a constant diameter (inner diameter of the hollow 111a), and the entire inner surface (on the electrode contact portion 106). To the first sliding surface 109.

Further, the first movable member 104 has an electrode contact portion 106 side of the elastic socket 101 such that the end surface 104a on the side having the opening 111b of the cylindrical body portion is in contact with the main surface 101a on the electrode contact portion 106 side of the elastic socket 101. On the main surface 101a.

The second movable member 105 includes a shaft body portion 112 that extends from the substrate contact portion 107 toward the center of the elastic socket 101 in the thickness direction of the elastic socket 101. At least a part of the outer surface of the shaft body portion 112 on the side opposite to the end portion on the substrate contact portion 107 side (that is, the end portion proximal to the electrode contact portion 106) is the second sliding surface 110. There is no. In addition, a part of the shaft body portion 112 including the end portion on the side having the outer surface forming the second sliding surface 110 protrudes from the main surface 101a of the elastic socket 101 on the electrode contact portion 106 side, It is inserted into the hollow 111 a of the movable member 104. The other part of the shaft body part 112 (that is, the part including the end part proximal to the substrate contact part 107) is disposed in the through hole 102 of the elastic socket 101.

The anisotropic conductive member 100 according to the present embodiment has a first sliding surface that is the length in the thickness direction of the elastic socket 101 that can be in sliding contact with the second sliding surface 110 of the first sliding surface 109. The length d1 of the moving surface 109 and the length of the second sliding surface 110 which is the length in the thickness direction of the elastic socket 101 capable of sliding contact with the first sliding surface 109 in the second sliding surface 110. One of the lengths d2 is shorter than the other. By having such a relationship between the length d1 of the first sliding surface 109 and the length d2 of the second sliding surface 110, the first movable member 104 does not plastically deform the shaft body portion 112. The elastic socket 101 can be inclined with respect to the thickness direction.

In the anisotropic conductive member according to the first embodiment of the present invention shown in FIG. 1, the length d2 of the second sliding surface 110 is shorter than the length d1 of the first sliding surface 109. . Specifically, the shaft body portion 112 of the second movable member 105 has a large-diameter portion 113 having a larger diameter than the other portions so as to include an end portion 112a distal to the substrate contact portion 107. . The outer surface of the large diameter portion 113 forms the second sliding surface 110. The large-diameter portion 113 may include an end portion 112a distal to the substrate contact portion 107 as shown in FIG. 1, but is not limited thereto. What is necessary is just to be provided in the end 112a distal with respect to the board | substrate contact part 107 proximally.

If the large-diameter portion 113 whose outer surface forms the second sliding surface 110 is provided too far from the end portion 112a distal to the substrate contact portion 107, the end portion 112a and the electrode contact portion 106, and the movable range of the first movable member 104 is narrowed. Therefore, the large-diameter portion 113 is the end of the shaft body portion 112 on the side inserted into the cylindrical body portion 111 (ie, the substrate contact portion). 107 is preferably provided to include a distal end 112a).

Further, it is preferable that the diameter of the large diameter portion 113 is larger than the inner diameter of the through hole 102 of the elastic socket 101, and the through hole 102 can be deformed by contact with the large diameter portion 113. In this case, it is preferable that the large diameter portion 113 is inserted into the cylindrical portion 111 through the through hole 102 by deformation based on contact with the large diameter portion 113 of the through hole 102. At this time, if the step 112b between the large-diameter portion 113 and the other portion of the shaft body portion 112 is locked to the edge of the opening of the through hole 102 of the elastic socket 101, the second movable member 105 is particularly In a state where no load is applied, it is possible to prevent the elastic socket 101 from dropping off from the main surface 101b side facing the inspection substrate (side from which the substrate contact portion 107 protrudes). Therefore, there is no need to arrange a plate-like member corresponding to a substrate-side plate-like member 207, which will be described later, on the inspection substrate side, and the entire anisotropic conductive member can be made thin. Note that the stepped portion 112b may be provided with a tapered portion as shown in FIG. 1 due to processing limitations. The entire tapered portion may protrude from the through hole, or at least a part of the tapered portion may be disposed in the through hole.

Here, in addition to FIG. 1, basic operations of the anisotropic conductive member 100 according to the present embodiment will be described in detail with reference to FIGS. 2 and 3.
FIG. 2 shows that a solder ball, which is an electrode attached to an inspection object, is in contact with the electrode contact portion 106 of the anisotropic conductive member 100 according to FIG. 1 and that the inspection object and the inspection substrate are close to each other. FIG. 6 is a cross-sectional view conceptually showing an example in which an external force is applied to the anisotropic conductive member 100 and the electrode contact portion 106 and the solder ball are in ideal contact. . Here, ideal means that the tip of the solder ball is positioned on the extension line of the central axis of the first movable member 104 in the movable direction, and the external force applied from the solder ball to the first movable member 104 is elastic. It means a case where it is parallel to the thickness direction of the socket 101. At this time, the movable direction of the first movable member 104 and the movable direction of the second movable portion 105 are substantially parallel, and the first sliding surface 109 and the second sliding surface 110 are also substantially parallel to each other. While sliding. However, in reality, it is rare that the first sliding surface 109 and the second sliding surface 110 come into contact with each other in such an ideal state. Usually, an offset as shown in FIG. In contact.

FIG. 3 shows that a solder ball, which is an electrode attached to an inspection object, contacts the electrode contact portion 106 of the anisotropic conductive member 100 according to FIG. 1 and that the inspection object and the inspection substrate are close to each other. FIG. 6 is a cross-sectional view conceptually showing an example in which an external force is applied to the anisotropic conductive member 100 and the electrode contact portion 106 and the solder ball are in contact in an offset state. . As described above, in the anisotropic conductive member 100 according to the present embodiment, the shaft body portion 112 of the second movable member 105 having the large-diameter portion 113 so as to include the end portion 112a is the first movable member 104. Is inserted into the hollow 111a of the cylindrical body portion 111 through an opening 111b provided at one end of the cylindrical body portion 111. Therefore, the diameter of the opening 111b is equal to the inner diameter of the first sliding surface 109, and can be slid while maintaining electrical contact with the second sliding surface 110 formed by the outer surface of the large diameter portion 113. Therefore, it is larger by about 10 μm than the outer diameter of the large diameter portion 113. On the other hand, since the outer diameter of the portion other than the large diameter portion 113 in the shaft body portion 112 is thinner than the outer diameter of the large diameter portion 113, when contacting in an ideal state as shown in FIG. The inner surface of the opening 111b of the first movable member 104 and the shaft body portion 112 of the second movable member 105 have a sufficient clearance. Therefore, even when contact is made in an offset state as shown in FIG. 3, the clearance range between the inner surface of the opening 111 b of the first movable member 104 and the shaft body portion 112 of the second movable member 105. If it is inside, the 1st movable member 104 can maintain the state inclined with respect to the 2nd movable member 105. FIG. When there is no such clearance, that is, when the first sliding surface 109 and the second sliding surface 110 have substantially the same length, in other words, they are inserted into the first movable member 104. When the outer surface of the shaft body portion 112 of the second movable member 105 is almost entirely the second sliding surface 110, the first movable member 104 is inclined with respect to the second movable member 105. The contact point between the inner surface of the opening 111b of the first movable member 104 and the shaft body portion 112 of the second movable member 105 serves as a fulcrum, and the second movable member located in the first movable member 104 from the fulcrum. The shaft body portion 105 of 105 is plastically deformed and bent, and the electrical penetration portion 103 becomes unusable.

The material of the first movable member 104 and the second movable member 105 is arbitrary as long as they can form the electric through-hole 103. In general, most of the surfaces including the surface in contact with the electrode in the electrode contact portion 106, the first sliding surface 109, the second sliding surface 110, and the surface in contact with the substrate in the substrate contact portion 107 have conductivity. It is preferably made of a metal-based material. From the viewpoint of ease of processing, as shown in FIG. 1, the electrode contact portion 106 and the cylindrical portion 111 are configured as separate members and are electrically connected using means such as caulking and welding. It is preferably fixed in a state. The second movable member 105 may be a single body as shown in FIG. 1, or the substrate contact portion 303 and the shaft body portion 302 may be similar to a second movable member 301 shown in FIG. 7 described later. It is a separate body and may be fixed in an electrically connected state. As an example of the material used to form the electrode contact portion 106, beryllium copper having high conductivity and workability and high hardness, and SK material which is a steel material having a hardness higher than that of a copper-based metal and good workability. And a palladium alloy that causes little transfer of solder from the solder balls. Examples of the material used to form the cylindrical portion 104 include phosphor bronze having similar characteristics in addition to beryllium copper. In the case where the second movable member 105 is a single body as shown in FIG. 1, beryllium copper, phosphor bronze, and the like can be cited as examples of materials used to form the second movable member 105. . As shown in FIG. 7, when the substrate contact portion and the shaft body portion are separate, materials used for them will be described later.

Next, the electrode side plate-like member 114 and the locking projection 116 will be described with reference to FIG.
The anisotropic conductive member 100 is an electrode-side plate-like member made of a rigid material provided so that one main surface 114a faces the main surface 101a on the side where the electrode contact portion 106 is provided in the elastic socket 101. 114. In the present specification, the “rigid material” means a material that has rigidity compared to an elastic socket having elasticity, that is, a material that is not easily deformed even when an external force is applied. The electrode side plate-like member 114 has a through hole 115 in an arrangement corresponding to the electrode contact portion 106 of the first movable member 104. The first movable member 104 is electrode-side plate-like member 114 such that the electrode contact portion 106 of the first movable member 104 protrudes from the main surface 114b opposite to the side facing the elastic socket 101 in the electrode-side plate-like member 114. The through hole 115 is inserted.

Here, the through-hole 115 of the electrode side plate-like member 114 is generally formed by a micro drill, and the inner surface of the through hole 115 is somewhat rough and the sliding property is not so good. An appropriate clearance is required between the outer surface of the member 104 and the inner surface of the through hole 115 of the electrode side plate member 114. On the other hand, if the clearance is large, the inner diameter of the through-hole 115 is larger than the outer diameter of the locking projection 116, so the clearance is preferably about 10 to 30 μm.

The material of the electrode side plate member 114 is not particularly limited as long as it has a certain degree of rigidity. Since the first movable member 104 may come into contact with the inner surface of the through-hole 115 of the electrode side plate member 114, it is usually formed of an insulating material. Specific examples of such materials include thermosetting resins such as epoxy resins and phenolic resins, or resin-based materials mainly composed of thermoplastic resins such as polyethersulfone, polyetherimide, and liquid crystal polymer, glass and ceramics. And a composite material in which inorganic components such as glass fillers and ceramic particles are dispersed in the above-described resin material.

The relationship of the relative positions of the electrode side plate-like member 114 and the elastic socket 101 is arbitrary. For example, as shown in FIG. 1, the relative position in the thickness direction of the elastic socket 101 may be variable between the electrode side plate-like member 114 and the elastic socket 101. In this case, the electrode-side plate member 114 may be fixed at a relative position with respect to the inspection substrate. The fixing method is arbitrary. Here, when the electrode-side plate-like member 114 is fixed in a relative position with respect to the inspection substrate, the first movable member 104 is pushed in the direction of the inspection substrate by the electrode attached to the inspection object. In order to avoid contact of the electrode with the electrode-side plate member 114, the first movable member 104 is inspected for the electrode-side plate member 114 in an unloaded state before the electrode contact portion 106 contacts the electrode. It is preferable to protrude beyond the movable length from the main surface 114b on the object side. Further, the electrode-side plate-like member 114 may be capable of changing the relative position in the thickness direction of the elastic socket 101 with respect to the inspection substrate, and may be interlocked with the thickness direction of the first movable member 104 and the elastic socket 101. In such a configuration, the first movable member 104 only needs to slightly protrude from the main surface 114b on the inspection object side of the electrode-side plate member 114, and the unloaded state before the electrode contact portion 106 contacts the electrode. In this case, the first movable member 104 is prevented from being inclined, and the positional accuracy between the electrode contact portion 106 and the electrode attached to the inspection object can be improved.

In the anisotropic conductive member 100 according to the present embodiment, the first movable member 104 inserted through the through hole 115 of the electrode side plate-like member 114 is on the side where the electrode contact portion 106 of the elastic socket 101 is provided. Between the main surface 101a and the electrode side plate-like member 114, there is a locking projection 116 protruding from a part of the outer surface. The diameter of the circumscribed circle of the cross-sectional shape of the first movable member 104 on the surface including the locking projection 116 with the thickness direction of the elastic socket 101 as a normal line (in the locking projection 116 shown in FIG. Is equal to the outer diameter thereof) is larger than the opening diameter at the end of the through hole 115 of the electrode side plate member 114 on the elastic socket 101 side.

With this configuration, the first movable member 104 is separated from the elastic socket 101, the first movable member 104 is detached from the second movable member 105, and the first movable member 104 and the second movable member 105 are separated. The possibility of not being able to maintain the configuration of the electrical penetration portion with the member 105 is reduced. Further, the locking protrusion 116 shown in FIG. 1 protrudes like a bowl to increase the area of the end surface 104a of the first movable member 104, and cooperates with the substrate side contact portion 107 of the second movable member 105. This also contributes to generating a large elastic restoring force in the elastic socket 101. Further, since the first movable member 104 including the electrode contact portion 106 can be detached from the elastic socket, it can be easily replaced.

Next, the anisotropic conductive member according to the second embodiment of the present invention will be described with reference to FIGS. In the description of the anisotropic conductive member according to the second embodiment of the present invention, in describing the elements constituting the anisotropic conductive member, the elements constituting the anisotropic conductive member according to the first embodiment and In the case where the structural features are common, the reference numerals used in the description of the elements constituting the anisotropic conductive member according to the first embodiment are used as they are.

FIG. 4 is a diagram conceptually showing a part of a cross section in the thickness direction of the elastic socket of the anisotropic conductive member according to the second embodiment of the present invention.
The anisotropic conductive member 200 according to the second embodiment includes the anisotropic conductive member 100 according to the first embodiment, the length d1 of the first sliding surface, and the length of the second sliding surface. The relationship with d2 is different. That is, in the anisotropic conductive member 100, the length d2 of the second sliding surface 110 is shorter than the length d1 of the first sliding surface 109. The length d1 of the first sliding surface is shorter than the length d2 of the moving surface.

Specifically, the structures of the first movable member 201 and the second movable member 202 in the anisotropic conductive member 200 are the same as the first movable member 104 and the second movable member in the corresponding anisotropic conductive member 100. This is different from the structure 105. The hollow portion 204 of the cylindrical body portion 203 of the first movable member 201 has a reduced diameter portion 205 having an inner diameter smaller than that of other portions, and an inner side surface 205a of the reduced diameter portion 205 forms a first sliding surface. . In the present embodiment, the reduced diameter portion 205 is provided so as to include an end portion on the side having the opening of the cylindrical body portion 203. The reduced diameter portion 205 may be provided in any region of the cylindrical body portion 203 in the thickness direction of the elastic socket. However, if the reduced diameter portion 205 is provided too close to the electrode contact portion, the shaft of the second movable member 202 is provided. The gap between the end portion of the body portion 206 inserted into the cylindrical body portion 203 (that is, the end portion distal to the substrate contact portion 209) and the electrode contact portion is narrowed, and the first movable member 201 is movable. Since the range becomes narrow, it is preferable that the reduced diameter portion 205 is provided so as to include the end portion on the side having the opening of the cylindrical body portion 203.

On the other hand, the entire outer surface 206a of the shaft body portion 206 of the second movable member 202 forms a second sliding surface. When the anisotropic conductive member 201 according to the present embodiment is used, as shown in FIG. 5, the first sliding surface composed of the inner surface 205 a of the reduced diameter portion 205 of the first movable member 201 is the second The movable member 202 slides while facing a part of the second sliding surface formed by the outer surface 206a of the shaft body portion 206 of the movable member 202. At this time, in the hollow 204 of the first movable member 201, the inner side surface of the portion other than the reduced diameter portion 205 of the hollow 204 at the tip of the shaft body portion 206 of the second movable member 202 inserted into the hollow 204. And the outer surface of the shaft body portion 206 are sufficiently large.

Therefore, even when the electrode (for example, solder ball) attached to the inspection object and the electrode contact portion 106 are in contact with each other in an offset state as shown in FIG. 6, the shaft body portion 206 and the reduced diameter portion 205 The first movable member 201 is inclined with respect to the second movable member 202 without the tip of the shaft body portion 206 being in contact with the inner surface of the portion other than the reduced diameter portion 205 of the hollow 204 within a range based on the clearance of the second movable member 202. Can do.

In the anisotropic conductive member 200 according to the second embodiment, the shaft body portion 206 provided in the second movable member 202 is narrower than the inner diameter of the through hole 102 of the elastic socket 101, and the anisotropic conductive member 200 according to the first embodiment. A desorption stop such as the large-diameter portion 113 in the one-way conductive member 100 is not particularly provided. Therefore, in order to prevent the elastic socket 101 from dropping off due to its own weight from the elastic socket 101, the elastic socket 101 is made of a rigid material provided so that one main surface thereof faces the main surface on the inspection substrate side. A substrate-side plate member 207 may be added, and a part of the substrate contact portion 209 of the second movable member 202 may be inserted into the through hole 208 provided in the substrate-side plate member 207. In the specific example shown in FIG. 4, the substrate-side plate-like member 207 is placed on the inspection substrate 210, and a part of the substrate contact portion 209 of the second movable member 202, including its end, is included in the substrate-side plate-like member 207. Is disposed in a recess formed by the through-hole 208 and the inspection substrate 210 provided in.

The anisotropic conductive member 200 according to the second embodiment of the present invention has the structure as described above, so that the second portion of the anisotropic conductive member 200 can be used during use of the anisotropic conductive member 200 without the large diameter portion 113. In addition to preventing the movable member 202 from being bent, the first movable member 201 including the electrode contact portion 106 can be easily replaced because it is detachable from the elastic socket.

The method for manufacturing the second movable member 202 of the anisotropic conductive member 200 according to the second embodiment of the present invention is not particularly limited. Similarly to the second movable member 105 of the anisotropic conductive member 100 according to the first embodiment, it may be integrally processed by a lathe. When the second movable member 202 is manufactured by lathe processing, beryllium copper, phosphor bronze, or the like is exemplified as a material constituting the second movable member 202 as described above. However, when the second movable member 202 is machined by a lathe, if the diameter of the shaft body portion 206 is reduced, there is a high risk of occurrence of defects such as bending of the shaft body portion during machining. In such a case, a thin metal wire may be used for the shaft body.

7 to 11 are diagrams conceptually showing a part of cross sections of some specific examples of the structure of the second movable member of the anisotropic conductive member according to the second embodiment. The second movable member according to these examples is common in that the shaft body portion is composed of a thin metal wire.

In the anisotropic conductive member 300 of the example shown in FIG. 7, the second movable member 301 included in the anisotropic conductive member 300 includes a metal thin wire 302 and a part including one end of the metal thin wire 302. It is comprised from the cylindrical member 303 provided with the hole which can be received. A portion of the cylindrical member 303 and the thin metal wire 302 inserted into the cylindrical member 303 forms the substrate contact portion 209, and a portion of the thin metal wire 302 that is not inserted into the cylindrical member 303 is the second movable member. The shaft 301 of the member 301 is formed.

Here, the advantage of configuring the shaft body portion of the second movable member 301 with the thin metal wire 302 will be described. The lower limit of the shaft diameter at which the shaft body part can be processed by the lathe processing described above is approximately 80 μm. When the diameter of the shaft body portion becomes 80 μm (0.08 mm) or less, there is a high risk that the shaft body portion 206 is bent during the processing or in the plating step after the processing. In lathe processing, the outer periphery is cut while rotating the metal rod. Therefore, when the bending elastic modulus of the workpiece is low, the workpiece is removed from the cutter when the workpiece and the cutter come into contact with each other during machining. It will bend so as to escape, and it will not be possible to cut. For this reason, the member to be processed used for lathe processing has a high bending elastic modulus. However, a workpiece having a high flexural modulus has a narrow strain range for elastic deformation. Therefore, when the shaft diameter becomes thin, there is a risk that the shaft body portion may be plastically deformed (bent) in the plating process after processing or after processing. Get higher.

On the other hand, in the case where the shaft body portion of the second movable member 301 is composed of the thin metal wire 302, the shaft body portion 206 can be obtained by cutting a metal wire material processed in advance to the shaft diameter. . Therefore, in this case, the shaft body portion 206 can be easily obtained even if the diameter is 80 μm or less.

Here, the material (metal wire) constituting the metal thin wire 302 is not particularly limited, but in many cases, a material having a wide strain range (high elasticity) that is elastically deformed such as a material of a coil spring is used for the metal wire. . The reason is as follows. In general, a metal wire is gradually thinned while stretching a raw material, and finally processed into a metal wire having a predetermined diameter. Since such a machining process is performed, naturally, in the manufacturing process, the metal wire is wound around a reel or a bobbin. For this reason, a metal wire is comprised from the material provided with the elasticity of the grade which does not plastically deform at least even if wound up on a reel or bobbin.

Among the metal wires, spring materials and superelastic wires are particularly elastic and do not plastically deform even if they are curved to some extent. Specifically, the wire material for the coil spring is exemplified by piano wire, stainless steel wire, phosphor bronze wire, copper alloy wire, etc., and the superelastic wire is exemplified by a shape memory alloy metal wire material mainly composed of NiTi. The Super elastic wire is mainly used as fishing line. In addition, tungsten and molybdenum metal wires have elasticity and are used as springs.

Since metal wires are elastic in this way, they can be manufactured to fairly thin diameters, and spring materials and super-elastic wires can be easily obtained in the market up to those with a diameter of about 30 μm. is there. The shaft body portion of the second movable member 301 according to the present example uses a thin metal wire 302 obtained by cutting such a metal wire material as the second movable member 301, so that the diameter is thin to at least 30 μm. An anisotropic conductive member 300 having a shaft body portion is provided.

Here, the material of the metal wire with high elasticity such as spring material and superelastic wire is generally high in hardness. In particular, superelastic wires have NiTi as a main component and thus have a very high hardness. When a metal wire having such a high hardness is cut, burrs are often generated on the cut surface. In addition, the edge of the cut surface becomes a sharp edge. Even when such a wire is used, the end of the shaft body portion of the second movable member 301 according to this example on the side inserted into the cylindrical body portion 203 is in contact with the first sliding surface 205a. Therefore, the possibility that the first sliding surface 205a is damaged by burrs or sharp edges on the cut surface is reduced.

In the second movable member 301 of the anisotropic conductive member 300 according to this example, the method of fixing the cylindrical member 303 and the thin metal wire 302 maintains these electrical contacts and does not easily come off during use. If it is a method, it will not specifically limit. In the example shown in FIG. 7, the tubular member 303 and the thin metal wire 302 are fixed by caulking a part of the outer surface of the tubular member 303. Other examples include a method of fixing the tubular member 303 and the fine metal wire 302 by soldering or a method of fixing by a conductive adhesive.

In the anisotropic conductive member 300 of the example shown in FIG. 7, the end of the cylindrical member 303 opposite to the side where the hole opening is provided forms a portion that contacts the inspection substrate, and is illustrated in FIG. 4. Similarly to the anisotropic conductive member 200, a substrate-side plate member made of a rigid material is provided, and this substrate-side plate member facilitates the positioning of the second movable member 301. Further, a flange portion 304 protruding in a direction perpendicular to the central axis of the thin metal wire 302 (a direction parallel to the main surface of the elastic socket) at the end of the cylindrical member 303 on the side where the thin metal wire 302 is inserted. And an elastic restoring force is easily generated in the elastic socket during use.

In the anisotropic conductive member 400 of the example shown in FIG. 8, the second movable member 401 is composed of a fine metal wire 402, and the fine metal wire 402 is press-fitted into the through hole of the elastic socket. In a state before use, as shown in FIG. 8A, the portion 402 a protruding from the inspection board side main surface of the elastic socket in the metal thin wire 402 forms the substrate contact portion 107, and that portion 402 a in the metal thin wire 402. The other part forms the shaft body part 206. In the use state, as shown in FIG. 8B, the main surface of the elastic socket on the inspection substrate side is deformed so as to contact the inspection substrate, and this deformation generates an elastic restoring force in the elastic socket. . At this time, since the fine metal wire 402 is press-fitted into the through hole of the elastic socket, the frictional force between the outer side surface of the portion of the fine metal wire 402 press-fitted into the through hole of the elastic socket and the inner side surface of the through hole facing it. Thus, the metal thin wire 402 is held by the elastic socket, and the possibility that the substrate contact portion is buried in the through hole is reduced.

As described above, if a thin metal wire is used for the second movable member, a shaft body having a diameter of about 30 μm can be obtained. The diameter of the through hole of the elastic socket that penetrates such a thin second movable member may be about 35 μm, for example, but it is not easy to process such a thin through hole into an elastic socket. Accordingly, when it is not easy to process a through hole having a small diameter in the elastic socket, for example, a bottom hole is formed in the elastic socket with a thin needle, and the metal thin wire 402 is press-fitted into the bottom hole, thereby forming the elastic socket. An anisotropic conductive member 400 in which the second movable member 401 is inserted can be obtained. In the anisotropic conductive member 400 of the example shown in FIG. 8, the second movable member 401 is press-fitted into the elastic socket, so it is not movable with respect to the elastic socket, but with respect to the first movable member. Since the relative position can be changed, the second movable member 401 is also referred to in this case.

Further, even in the structure in which the shaft body portion is constituted by the fine metal wire and the fine metal wire is press-fitted into the through hole of the elastic socket in this way, the substrate contact portion is provided with the cylinder provided in the anisotropic conductive member 300 of the example shown in FIG. It is possible to further reduce the possibility that the substrate contact portion is buried in the through hole.

In the anisotropic conductive member 500 of the example shown in FIG. 9, the second movable member 501 is plated on the metal thin wire 502 and a portion of the metal thin wire 502 protruding from the main surface on the inspection board side of the elastic socket. And a plating layer 503 formed so as to cover the protruding portion. That is, in this example, the substrate contact portion is composed of the protruding portion and the plating layer 503 formed on the protruding portion. Further, by increasing the thickness of the plating layer 503, the area where the plating layer 503 contacts the main surface of the elastic socket on the inspection substrate side can be increased. By increasing this area, the elastic restoring force generated in the elastic socket at the time of use can be increased.

10, in the anisotropic conductive member 600 of the example shown in FIG. 10, the second movable member 601 is composed of a thin metal wire 602. In this example, the end of the metal thin wire 602 on the inspection substrate side is inserted into a through hole 603 provided in the inspection substrate, and is fixed to the through hole 603 of the inspection substrate by soldering. That is, in this example, the inspection substrate and the substrate contact portion are integrated.

Further, also in the anisotropic conductive member 100 according to the first embodiment shown in FIG. 1, the shaft body portion may be constituted by a thin metal wire, and the large diameter portion 113 may be constituted by a plating layer. In the anisotropic conductive member 700 of the example shown in FIG. 11, the second movable member 701 performs plating on the metal wire 702 and a portion of the metal wire 702 that protrudes from the main surface on the inspection target side of the elastic socket. The plating is applied to the inspection object side plating layer 703 formed so as to cover the protruding portion, and the metal socket 702 protruding from the main surface of the elastic socket on the inspection substrate side so as to cover the protruding portion. The substrate-side plating layer 704 is formed. That is, in this example, the large-diameter portion 113 includes a portion protruding from the main surface on the inspection target side of the elastic socket in the thin metal wire 702 and the inspection target side plating layer 703 formed on the protruding portion, and is in contact with the substrate. The portion includes a portion protruding from the main surface of the metal thin wire 702 on the inspection substrate side and a substrate side plating layer 704 formed on the protruding portion. In addition to this example, the large-diameter portion 113 may be configured by the inspection target side plating layer 703 and the substrate contact portion may include the cylindrical member 303 illustrated in FIG.

Subsequently, the structural modifications applicable to both the anisotropic conductive member according to the first embodiment and the anisotropic conductive member according to the second embodiment will be described. A direction conductive member will be described as a specific example.

FIG. 12 is a diagram conceptually showing a part of one cross section of a structural modification applicable to the anisotropic conductive member according to the present invention.
In the anisotropic conductive member 800 shown in FIG. 12, a countersink portion 803 is provided on the main surface 801 a on the electrode contact portion side of the elastic socket 801 so as to include the opening of the through hole 802 of the elastic socket 801. The end of the first movable member on the elastic socket side is placed in the counterbore 803. In FIG. 12, as a specific example, a locking projection 804 provided at the end of the first movable member on the elastic socket side is housed in the counterbore 803. The inner diameter of the counterbore 803 is slightly larger than or substantially equal to the outer diameter of the end of the first movable member on the elastic socket side (specifically, the locking projection 804), and the first movable member is mounted thereon. It is desirable that the counterbore 803 is not substantially expanded by being placed. Providing the counterbore part 803 can reduce the possibility that the first movable member is inclined and comes into contact with the adjacent first movable member when in contact, particularly in an offset state.

An anisotropic conductive member according to the present invention includes an anisotropic conductive member 100 according to the first embodiment, an anisotropic conductive member 200 according to the second embodiment, and an anisotropic conductive member 300 shown in FIG. 12 and the anisotropic conductive member 800 shown in FIG. 12, the portion of the shaft portion of the second movable member disposed in the through holes 102 and 802 of the elastic sockets 101 and 801 has an outer diameter. There is no portion exceeding the inner diameter of the through holes 102 and 802. When the second movable member has such a structure, the portion disposed in the elastic socket in the shaft body portion expands the inner side surface of the through hole, thereby causing the through holes 102 of the elastic sockets 101 and 801 to extend. , 802 is less likely to occur. The shaft body portion 502 of the anisotropic conductive member 500 shown in FIG. 9, the shaft body portion 602 of the anisotropic conductive member 600 shown in FIG. 10, and the shaft body portion of the anisotropic conductive member 700 shown in FIG. As for 702, the relationship between the outer diameters of the shaft bodies 502, 602, and 702 and the inner diameter of the through hole of the elastic socket may be the same as that of the anisotropic conductive member 100 or the like.

FIG. 13 is a diagram conceptually showing a part of another cross section of a structural modification applicable to the anisotropic conductive member according to the present invention.
The anisotropic conductive member 900 according to this example is similar to the anisotropic conductive member 100 described above, and the portion disposed in the through hole of the elastic socket in the shaft body portion 902 of the second movable member 901 is: Although the outer diameter does not have a portion exceeding the inner diameter of the through hole of the elastic socket, the outer diameter of the portion of the shaft body portion 902 of the second movable member 901 penetrating into the through hole of the elastic socket is A portion 903 larger than the other portions is provided proximal to the end on the substrate contact portion side. By having such a portion 903 having a large outer diameter, when the shaft body portion 902 of the second movable member 901 is penetrated into the through hole of the elastic socket, the portion 903 having a large outer diameter is the elastic socket. The possibility that the shaft body portion 902 of the second movable member 901 is displaced in the through hole of the elastic socket is reduced by being fitted into the through hole. From the viewpoint of satisfying this purpose, the outer diameter of the portion 903 having a larger outer diameter is preferably substantially equal to the inner diameter of the through hole of the elastic socket.

The anisotropic conductive member according to the present invention is similar to the anisotropic conductive member 400 shown in FIG. 8 in that at least a part of the portion disposed in the through hole of the elastic socket in the shaft body portion is The outer diameter may be equal to or greater than the inner diameter of the through hole of the elastic socket and may be press-fitted into the through hole of the elastic socket. However, in this case, attention should be paid so that the positional deviation of the through hole of the elastic socket caused by the shaft body portion expanding the inner surface of the through hole of the elastic socket is within an allowable range. .

FIG. 14 is a diagram conceptually showing a part of another cross section of a structural modification applicable to the anisotropic conductive member according to the present invention.
In the anisotropic conductive member 1000 according to this example, the anisotropic conductive member 100 according to the first embodiment and the state before use, that is, an electrode in which an electrode contact portion is attached to an inspection target (for example, a solder ball) The relationship between the elastic socket and the electrode-side plate-like member in the thickness direction of the elastic socket in a state before contacting with the electrode is different.
In the anisotropic conductive member 1000 according to this example, the elastic socket 1001 and the electrode-side plate-like member 1002 are closer to each other than the anisotropic conductive member 100 according to the first embodiment. For this reason, the peripheral edge of the electrode-side plate-like member 1002 on the side facing the elastic socket 1001 pushes the locking protrusion of the first movable member toward the center in the thickness direction of the elastic socket. The elastic socket 1001 is compressed in the thickness direction by the pressing of the locking projection by the electrode side plate member 1002, and an elastic restoring force against the pressing is applied from the elastic socket 1001 to the electrode contact portion and the substrate contact portion. . Thus, giving an elastic restoring force to an electrode contact part and a board | substrate contact part in the state before use is called preload.

By providing such a preload configuration, in the anisotropic conductive member 1000 according to this example, the substrate contact portion is always in contact with the inspection substrate at a pressure equal to or higher than a certain level. Foreign matter can be prevented from entering the gap, and occurrence of poor contact between the substrate contact portion and the inspection substrate is suppressed.

FIG. 15 is a partial cross-sectional view of (a) a state before use and (b) a state during use, regarding yet another structural example applicable to the anisotropic conductive member according to the present invention. FIG.

The anisotropic conductive member 1100 according to the example shown in FIG. 15 is characterized by a method of fixing the position of the elastic socket with respect to the inspection substrate. That is, as shown in FIG. 15B, when an external force is applied to the electrode contact portion so that the electrode contact portion and the substrate contact portion 1101 are close to each other in the thickness direction of the elastic socket, specifically, an inspection is performed. When an electrode (for example, a solder ball) attached to the object pushes the electrode contact portion toward the thickness direction center side of the elastic socket, both the electrode contact portion and the substrate contact portion 1101 are elastic sockets in the thickness direction of the elastic socket. The elastic socket is attached to the inspection substrate so as to change in the thickness direction of the elastic socket so as to change in the center direction. In such a configuration, the main surface on the electrode contact portion side of the elastic socket and the main surface on the substrate contact portion 1101 side can be compressed to the same extent. Therefore, the substrate contact portion 1101 provided in the anisotropic conductive member 1100 has a thickness of the elastic socket from the main surface of the elastic socket on the substrate contact portion 1101 side as compared to the substrate contact portion in the anisotropic conductive member described above. It protrudes long in the direction.

Rubber such as rubber or elastomer, which is a material constituting the elastic socket, is roughly in inverse proportion to the hardness of the elastic body, and the compression amount range in which the compression amount and elasticity change proportionally (hereinafter referred to as the “linear region”). When the compression is performed beyond the linear region, the amount of compression and elasticity change nonlinearly, and in this nonlinear region, the elasticity increases rapidly with respect to the amount of compression. For this reason, when the elastic socket is used in a non-linear region, the load applied between the electrode contact portion 1101 and the electrode (for example, a solder ball) attached to the inspection object in contact with the electrode contact portion 1101 rapidly increases. Problems such as damage.

In the anisotropic conductive member according to the present invention, when the elastic socket can be compressed from both main surfaces as in the anisotropic conductive member 1100 shown in FIG. 15, only from one main surface. Compared to a compressible configuration, it is possible to extend the movable range that is a linear region by a maximum of two times.

In the anisotropic conductive member 1100 according to the example shown in FIG. 15, the elastic socket is considerably compressed even on the main surface on the substrate contact portion 1101 side, so that the relative position of the substrate contact portion 1101 with respect to the inspection substrate is There may be concerns about instability. Therefore, as shown in FIG. 16, a board-side plate-like member 1102 made of a rigid material may be provided between the elastic socket and the inspection board 1104. The substrate-side plate member 1102 has a through hole 1103 in an arrangement corresponding to the substrate contact portion 1101, and at least a part of the substrate contact portion 1101 is arranged in the through hole 1103 of the substrate side plate member 1102. For this reason, it is difficult for the substrate contact portion 1101 to be displaced or inclined with respect to the inspection substrate 1104. In FIG. 16, the substrate side plate-like member 1102 is placed on the inspection substrate 1104, and the end of the substrate contact portion 1101 is located in the through hole 1103. This is an example, and the substrate side plate The shaped member 1102 may be provided at an arbitrary position between the elastic socket and the inspection substrate 1104.

FIG. 17 is a diagram conceptually showing a part of another cross section of a structural modification applicable to the anisotropic conductive member according to the present invention. The anisotropic conductive member 1200 according to the example shown in FIG. 17 is characterized by the first movable member 1201 and the electrode-side plate member 1202.

In the anisotropic conductive member according to the present invention, the electrode contact portion constituting the first movable member is formed separately from other portions (such as a cylindrical body portion), and these are fixed by a method such as caulking. Alternatively, the first movable member may be processed integrally. Also, as in the example shown in FIG. 1, when it is not easy to form the locking projection of the first movable member so as to project from a part of the outer surface of the cylindrical body, FIG. Like the anisotropic conductive member 1200 shown, the 1st movable member 1201 may be a structure which does not have a latching protrusion part which protrudes from a part of outer side surface of a cylinder part. In that case, a stepped portion 1205 may be provided at a connection portion between the electrode contact portion 1203 and another portion (cylindrical body portion 1204 in FIG. 17), and the stepped portion 1205 may function as a locking projection. . In this case, in the anisotropic conductive member 1200 shown in FIG. 17, as one specific example, the first movable member 1201 is long, so the electrode-side plate member 1202 has an opening on the elastic socket side in the through hole 1206. The counterbore part 1207 is provided so that it may be included. And the 1st movable member 1201 is latched because the level | step-difference part 1205 of the 1st movable member 1201 which makes a latching protrusion part with respect to the bottom part 1208 of this counterbore part 1207 contact | connects. In the case of such a configuration, the diameter of the circumscribed circle of the cross-sectional shape of the first movable member on the surface including the locking protrusions with the thickness direction of the elastic socket as a normal line (the first circle shown in FIG. 17). In the movable member, since the stepped portion 1207 forms a locking projection, this diameter is equal to the outer diameter of the cylindrical portion.) Is the opening diameter of the end portion on the counterbored portion side of the through hole 1206 of the electrode side plate-like member 1202. Larger than the inner diameter of the countersunk portion 1207.

FIG. 18 is a diagram conceptually showing a part of still another cross section of a structural modification applicable to the anisotropic conductive member according to the present invention. The anisotropic conductive member 1300 according to the example shown in FIG. 18 is characterized by the first sliding surface 1302 of the first movable member 1301. In the first movable member 1301 of the anisotropic conductive member 1300 according to this example, a protruding portion 1304 that protrudes from the inner surface of the hollow 1303 toward the central axis side of the cylindrical portion 1305 in the vicinity of the end portion on the elastic socket side. One or more (two in the example shown in FIG. 18) are provided, and the projection 1304 constitutes a reduced diameter portion, and the surface of the projecting tip portion of the projection 1304 constitutes the first sliding surface 1302. ing. In the example shown in FIG. 18, since a plurality of protrusions 1304 are formed in the thickness direction of the elastic socket, the first sliding surface 1302 of the first movable member 1301 is not aligned in the thickness direction of the elastic socket. It is composed of a plurality of continuous surfaces. Note that the length of the first sliding surface in such a case is the elastic socket side end of the surface most proximal to the elastic socket among the plurality of surfaces constituting the first sliding surface 1302; It shall mean the length of the elastic socket in the thickness direction between the elastic socket side and the opposite end of the surface farthest from the elastic socket.

In the example shown in FIG. 18, the protrusion 1304 is formed by caulking the outer surface of the cylindrical body 1305. Thus, when the protrusion 1304 is formed by caulking, it is easily realized that the first movable member 1301 includes a reduced diameter portion.

The specific shape of the protrusion 1304 is arbitrary. The protruding portion 1304 may be formed by deforming a part of the inner surface of the hollow 1303 of the first movable member 1301 in a ring shape (entire whole), or the hollow 1303 of the first movable member 1301. It may be formed by projecting a part of the inner surface of the lens in a bump shape or an arc shape. Here, the arc shape means that the shape of the protrusion 1304 is a gentle arc shape than the bump shape. When the protrusion 1304 is formed by caulking as in the example shown in FIG. 18, it may be caulked in a ring shape, or may be caulked at a plurality of points (for example, 3 points, 4 points, etc.). . In the case where the protrusion 1304 is formed by deforming a part of the inner surface of the hollow 1303 of the first movable member 1301 into a bump shape or an arc shape, the thickness direction of the elastic socket is a normal line, and the protrusion 1304 is The cross-sectional shape of the reduced-diameter portion in the including surface is not particularly limited, but for the surface including any protrusion 1304, the center of the inscribed circle of the cross-sectional shape on the surface substantially coincides with the center of the cylindrical portion 1305. It is preferable that the first movable member 1300 and the first movable member 1300 be displaced in the direction of movement.

In FIG. 18, the reduced diameter portion 1304 is configured by caulking the cylindrical body portion 1305 of the first movable member 1301, but the inner surface of the hollow 1303 of the first movable member 1301 is, for example, partially plated. A member protruding from the inner surface may be attached by a technique, and the reduced diameter portion 1304 may be configured by the member.

DESCRIPTION OF SYMBOLS 100 Anisotropic conductive member 101 Elastic socket 102 Elastic socket through-hole 103 Electrical penetration part 104 First movable member 105 Second movable member 106 Electrode contact part 107 Substrate contact part 108 Second movable member collar part 109 First One sliding surface 110 Second sliding surface

Claims (24)

An elastic plate-like elastic socket made of an insulator and a thickness direction of the elastic socket provided corresponding to each of the plurality of through holes of the elastic socket and having a portion that penetrates the through hole An anisotropic conductive member comprising a plurality of electrical through portions that allow current to pass through,
The electrical penetration portion includes a first movable member and a second movable member that are electrically connected and capable of changing a relative position in the thickness direction of the elastic socket.
The first movable member includes an electrode contact portion for contacting an electrode attached to the inspection object at an end portion on the side facing the inspection object,
The second movable member includes a substrate contact portion for contacting the inspection substrate of the inspection apparatus at an end portion facing the inspection substrate,
When the external force that brings the electrode contact portion and the substrate contact portion close to each other in the thickness direction of the elastic socket is applied, an elastic restoring force in a direction to separate them is generated in the elastic socket. Two movable members are arranged so that a part of the elastic socket can be compressed,
In the electrical penetration portion, a first sliding surface provided on the first movable member and a second sliding surface provided on the second movable member are mutually connected in the thickness direction of the elastic socket. The sliding contact structure has a sliding contact structure, so that the distance between the electrode contact portion and the substrate contact portion is the thickness of the elastic socket while maintaining the electrical connection between these contact portions. Can vary in direction,
The first movable member includes a cylindrical body portion that extends from the electrode contact portion in the thickness direction of the elastic socket and has a hollow, and an end portion of the cylindrical body portion opposite to the electrode contact portion side is An opening, and at least a part of an inner side surface of the cylindrical portion on the end portion side having the opening forms the first sliding surface, and an end surface of the cylindrical portion on the side having the opening is the elastic member. The first movable member is placed on the main surface of the elastic socket on the electrode contact portion side so as to contact the main surface of the socket on the electrode contact portion side,
The second movable member includes a shaft body portion extending from the substrate contact portion in the thickness direction of the elastic socket, and an end side opposite to the end of the shaft body portion on the substrate contact portion side At least a portion of the outer surface of the shaft portion forms the second sliding surface, and a portion including the end portion of the shaft body portion having the outer surface forming the second sliding surface is the portion of the elastic socket. Protruding from the main surface on the electrode contact portion side and inserted into the hollow of the first movable member, the other portion of the shaft body portion is disposed in the through hole of the elastic socket,
In the first sliding surface, the length of the first sliding surface which is the length in the thickness direction of the elastic socket capable of sliding contact with the second sliding surface and the second sliding surface When one of the lengths of the second sliding surface, which is the length in the thickness direction of the elastic socket capable of sliding contact with the first sliding surface, is shorter than the other, the first movable The anisotropic conductive member, wherein the member can be inclined with respect to the thickness direction of the elastic socket without plastically deforming the shaft body portion. The anisotropic conductive member according to claim 1, wherein the length of the second sliding surface is shorter than the length of the first sliding surface. The shaft body portion of the second movable member has a large-diameter portion having a larger diameter than other portions, and an outer surface of the large-diameter portion forms the second sliding surface. An anisotropic conductive member. The anisotropic conductive member according to claim 3, wherein the large-diameter portion is provided so as to include an end portion of the shaft body portion on a side inserted into the cylindrical body portion. The diameter of the large diameter portion is larger than the inner diameter of the through hole of the elastic socket, the through hole is deformable by contact with the large diameter portion, and the large diameter portion is deformed by the deformation of the through hole. The anisotropic conductive member according to claim 3, wherein the anisotropic conductive member is inserted into the cylindrical body portion through a through hole. 5. The anisotropic conductive member according to claim 4, wherein the shaft body portion includes a fine metal wire, and the large diameter portion includes a part of the fine metal wire and a plating layer formed on an outer surface of the part of the fine metal wire. . The step portion between the large diameter portion and the other portion in the shaft body portion is locked to the edge portion of the opening of the through hole of the elastic socket, so that the second movable member is moved from the through hole to the The anisotropic conductive member according to claim 5, wherein the anisotropic conductive member is prevented from being detached to the substrate contact portion side. The anisotropic conductive member according to claim 1, wherein the length of the first sliding surface is shorter than the length of the second sliding surface. The hollow of the cylindrical body portion of the first movable member has a reduced diameter portion whose inner diameter is smaller than other portions, and an inner surface of the reduced diameter portion forms the first sliding surface. The anisotropic conductive member according to 8. The anisotropic conductive member according to claim 9, wherein the reduced diameter portion is provided so as to include an end portion of the cylindrical body portion on the side having the opening. The anisotropic conductive member according to any one of claims 8 to 10, wherein the shaft body portion includes a thin metal wire. The said board | substrate contact part consists of a member separate from the said metal fine wire and a part of said metal fine wire, and the member separate from the said metal fine wire was fixed to a part of said metal fine wire. An anisotropic conductive member. On the main surface of the elastic socket on the electrode contact portion side, a countersink portion is provided so as to include the opening of the through hole, and the end portion on the elastic socket side of the first movable member in the countersink portion The anisotropically conductive member according to any one of claims 1 to 12, wherein is placed. The anisotropically conductive according to any one of claims 1 to 13, wherein a portion of the shaft body portion disposed in the through hole does not have a portion whose outer diameter exceeds the inner diameter of the through hole. Element. The anisotropic portion according to claim 14, wherein a portion of the shaft body portion disposed in the through hole has a portion whose outer diameter is larger than that of the other portion, proximal to the end portion on the substrate contact portion side. Conductive member. The at least part of the portion disposed in the through hole in the shaft body portion has an outer diameter equal to or larger than the inner diameter of the through hole, and is press-fitted into the through hole. The anisotropic conductive member according to claim 13. The substrate contact portion is arranged on the substrate contact portion side of the elastic socket so that at least a part of the end surface of the shaft contact portion side of the substrate contact portion is in contact with the main surface of the elastic socket on the substrate contact portion side. The anisotropically conductive member according to any one of claims 1 to 16, which has a portion protruding in an in-plane direction of the main surface. The anisotropic conductive member further includes an electrode-side plate member made of a rigid material provided so that one main surface thereof faces the main surface on the electrode contact portion side in the elastic socket, and the electrode-side plate-like member The member has a through hole in an arrangement corresponding to the electrode contact portion, and the electrode contact portion protrudes from a main surface opposite to the side facing the elastic socket in the electrode side plate member. The anisotropic conductive member according to any one of claims 1 to 17, wherein the movable member is inserted into a through hole of the electrode side plate member. The first movable member inserted into the through-hole of the electrode side plate-like member is partly from the outer surface between the electrode contact portion side main surface of the elastic socket and the electrode side plate-like member. The diameter of the circumscribed circle of the cross-sectional shape of the first movable member on the surface including the locking protrusion is normal to the thickness direction of the elastic socket. The anisotropic conductive member according to claim 18, wherein the anisotropic conductive member is larger than an opening diameter at an end portion of the through hole of the member at the elastic socket side. The main surface of the electrode-side plate-like member on the elastic socket side is provided with a countersink portion so as to include the opening of the through-hole, and the first movable member inserted through the through-hole of the electrode-side plate-like member. The member has a locking protrusion that protrudes from a part of the outer surface between a main surface of the elastic socket on the electrode contact portion side and an end surface of the countersink portion on the through-hole side. The diameter of the circumscribed circle of the cross-sectional shape of the first movable member on the surface including the locking projection is normal to the thickness direction of the socket, and the end of the through hole of the electrode side plate-like member The anisotropic conductive member according to claim 18, wherein the anisotropic conductive member is larger than an opening diameter in the case and smaller than an inner diameter of the counterbored portion. The first movable member inserted in the through hole of the electrode side plate-like member has a step portion at a connection portion between the electrode contact portion and the cylindrical body portion, and the step portion is the locking protrusion. The anisotropic conductive member according to claim 19 or 20, wherein: In a state before the electrode contact portion comes into contact with the electrode attached to the object to be inspected, the peripheral edge portion on the side facing the elastic socket of the through hole of the electrode side plate-like member causes the locking protrusion to be elastic. The elastic restoring force with respect to this pushing is provided to the said electrode contact part and the said board | substrate contact part from the said elastic socket by pushing in to the thickness direction center side of a socket, The any one of Claim 19 to 21 The anisotropic conductive member as described. When an external force that causes the electrode contact portion and the substrate contact portion to approach each other in the thickness direction of the elastic socket is applied to the electrode contact portion, both the electrode contact portion and the substrate contact portion are thicker than the elastic socket. The elastic socket is attached to the inspection substrate so as to be variable in the thickness direction of the elastic socket so as to change toward the elastic socket in the vertical direction. The anisotropic conductive member as described in any one of Claims. The reduced diameter portion of the first movable member includes one or more protrusions protruding from the inner surface of the cylindrical body portion toward the central axis of the cylindrical body portion, and the surface of the protruding tip portion of the protrusion portion The anisotropic conductive member according to claim 9 or 10, wherein said first sliding surface constitutes the first sliding surface.

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