JP2010025844A - Contact probe and inspection socket - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a contact probe and an inspection socket which enable sliding property and electric resistance of the contact probe to be stabilized to improve productivity and enable inspection of an object to be inspected stably. <P>SOLUTION: A contact probe includes a first conductive member 14 having an electric contact part 18 and a plunger 17 integrally provided with the electric contact part, a cylinder part 19 having an electric contact part 20 and an through-hole 19a which is integrally provided with the electric contact part and into which the plunger is slidably inserted, and a coil spring which is interposed between the first conductive member and a second conductive member 15 and which biases in a direction where the electric contact part is separated when the plunger slides in the through-hole so that the electric contact part comes close. The electric contact part is contacted with a connecting terminal of a print wiring board 23, and is contacted with a connecting terminal of the object to be inspected. The plunger is made bent. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a contact probe and an inspection socket, and more particularly to a contact probe and an inspection socket for inspecting an IC package, an integrated circuit element, and the like.

  A plurality of contact probes are provided between a connection terminal of an IC package or an integrated circuit element to be tested and a connection terminal of a test circuit board which is an inspection device as an IC package or an integrated circuit element inspection. An inspection socket is known, and such an inspection socket as shown in FIG. 6 is known (see, for example, Patent Document 1).

  In FIG. 6, a test socket 10 has a contact probe 3 housed in a through hole 2 of a socket body 1, and the contact probe 3 includes an upper cylinder 4, a lower plunger 5, and a coil spring 6.

  The upper cylinder 4 includes a cylindrical portion 4b as a second electrical terminal portion in which a bottomed cylindrical insertion hole 4a is formed, an electrical contact portion 4c that is in contact with a connection terminal of an object to be inspected (not shown), A large-diameter cylindrical portion 4d provided between the cylindrical portion 4b and the electrical contact portion 4c and engaged with one end of the coil spring 6 is provided. The electrical contact portion 4c is an opening 2a at one end of the through hole 2. On the side.

  The lower plunger 5 is provided integrally with the columnar portion 5a as a first electric terminal portion that is slidably inserted into the insertion hole 4a of the cylindrical portion 4b of the upper cylinder 4, and a coil spring. A large-diameter cylindrical portion 5b that engages the other end of 6 and an electrical contact portion 5c that is provided integrally with the large-diameter cylindrical portion 5b and that contacts a connection terminal of a printed wiring board (not shown). The electrical contact portion 5 c is provided on the opening 2 b side of the other end of the through hole 2.

  When the electrical contact portion 4c is brought into contact with the connection terminal of the object to be inspected and the electrical contact portion 5c is brought into contact with the connection terminal of the printed wiring board, the inspection socket 10 having such a configuration has the cylindrical portion 5a. Slides with respect to the insertion hole 4a of the cylindrical portion 4b, so that the electrical contact portions 4c and 5c move in the approaching direction.

At this time, since the coil spring 6 is compressed, the electrical contact portions 4c and 5c are biased in a direction away from each other, so that the electrical contact portions 4c and 5c are connected to the connection terminals of the test object and the printed wiring board. The terminal can be brought into contact with a high contact pressure, and the connection terminal of the object to be inspected and the connection terminal of the printed wiring board can be electrically connected via the contact probe 3.
JP 2003-167001 A

  In such a conventional contact probe 3, since the column portion 5a of the lower plunger 5 is slidably inserted into the insertion hole 4a of the cylindrical portion 4b of the upper cylinder 4, the inside of the insertion hole 4a It was necessary to strictly manage the clearance between the peripheral portion and the cylindrical portion 5a to ensure appropriate electrical resistance and slidability.

  That is, when the clearance between the inner peripheral portion of the insertion hole 4a and the cylindrical portion 5a is small, the cylindrical portion 5a can be reliably brought into contact with the insertion hole 4a, so that a good initial electrical resistance can be obtained. The resistance increases, and sliding failure is likely to occur during operation (inspection) of the contact probe 3.

  On the other hand, if the clearance between the inner peripheral portion of the insertion hole 4a and the cylindrical portion 5a is large, the sliding resistance between the inner peripheral portion of the insertion hole 4a and the cylindrical portion 5a can be reduced, but the inner peripheral portion of the insertion hole 4a. It becomes difficult to stabilize and contact the cylindrical portion 5a, and it becomes difficult to stabilize electrical resistance due to occurrence of instantaneous interruption.

  Therefore, when the upper cylinder 4 and the lower plunger 5 are manufactured by cutting and performing surface treatment by plating or the like, the insertion hole 4a and the cylindrical portion 5a It is necessary to precisely control the clearance between the inner peripheral portion of the insertion hole 4a and the cylindrical portion 5a by processing the portion with high accuracy. For this reason, there is a limit in improving the yield of the contact probe 3, and the problem that productivity deteriorates will generate | occur | produce.

  Further, the contact probe 3 shown in Patent Document 1 has a central axis (insertion) of the upper cylinder 4 in order to stabilize electric resistance even when the clearance between the inner peripheral portion of the insertion hole 4a and the cylindrical portion 5a is increased. The central axis of the lower plunger 5 (the central axis of the cylindrical part 5a) is inclined with respect to the central axis of the hole 4a, and the tip of the cylindrical part 5a is brought into contact with the inner peripheral part of the insertion hole 4a. Yes.

  However, when the contact probe 3 is assembled to the socket body 1 so that the central axis of the lower plunger 5 is inclined with respect to the central axis of the upper cylinder 4, the center of the lower plunger 5 is relative to the central axis of the upper cylinder 4. In order to ensure a margin for tilting the shaft, a certain gap must be secured between the through hole 2 of the socket body 1 and the upper cylinder 4.

  For this reason, the tip of the columnar part 5a comes into contact with the inner peripheral part of the insertion hole 4a obliquely, and it is difficult to stably contact the cylindrical part 5a with the inner peripheral part of the insertion hole 4a. It is had.

  In general, the socket body 1 is made of an insulating resin, and the upper cylinder 4 and the lower plunger 5 are made of metal. For this reason, when the contact probe 3 is assembled to the socket body 1 so that the central axis of the lower plunger 5 is inclined with respect to the central axis of the upper cylinder 4, the electrical contact portions 4c and 5c are biased toward the openings 2a and 2b. Touching in a state of contact.

  For this reason, the openings 2a and 2b are partially worn during the operation of the contact probe 3, and the openings 2a and 2b are deformed. For this reason, the displacement between the connection terminal of the inspection object and the connection terminal of the printed wiring board and the electrical contact portions 4c and 5c occurs, and the inspection of the inspection object cannot be performed stably. A problem will occur.

  The present invention has been made to solve such problems, and can stabilize the slidability and electrical resistance of the contact probe, thereby improving the productivity and the object to be inspected. Provided are a contact probe and an inspection socket that can stably perform the inspection.

  In order to achieve the above object, a contact probe according to the present invention includes a first electrical contact portion and a first electrical terminal portion in the form of a rod provided integrally with the first electrical contact portion. And a second electrical contact portion which is provided integrally with the second electrical contact portion and the second electrical contact portion and has an insertion hole through which the first electrical terminal portion is slidably inserted. And the first electrical terminal portion is inserted between the first conductive member and the second conductive member so that the first electrical contact portion and the second electrical contact portion are close to each other. An urging member that urges the first electrical contact portion and the second electrical contact portion in a direction separating the first electrical contact portion when sliding in the hole; The contact terminal of the object or the connection terminal of the inspection device, and the second In the contact probe in which the air contact portion is brought into contact with either the connection terminal of the object to be inspected or the connection terminal of the inspection apparatus, the contact probe is formed by bending or bending the first electrical terminal portion. Yes.

  With this configuration, the first electrical terminal portion is bent or bent, so that when the first electrical terminal portion is inserted into the through hole of the second electrical terminal portion, the first electrical terminal portion is the original curve. Alternatively, the first electrical terminal portion is pressed against and contacted with the inner peripheral portion of the insertion hole by elastically deforming to return to the bent state.

  For this reason, it is not necessary to strictly manage the clearance between the first electrical terminal portion and the inner peripheral portion of the insertion hole of the second electrical terminal portion, and the sliding resistance between the first conductive member and the second conductive member is eliminated. The electrical resistance of the first conductive member and the second conductive member can be stabilized. As a result, the yield of contact probes can be improved and the productivity of contact probes can be improved.

  In addition, when the contact probe is attached to the socket body, there is no need to tilt the first conductive member and the second conductive member, so that the clearance between the through hole and the contact probe is increased in order to tilt the contact probe and store it in the socket body. The first electrical terminal portion can be prevented from contacting the inner peripheral portion of the insertion hole in an oblique state, and the electrical resistance of the first conductive member and the second conductive member can be stabilized. it can.

  In addition, when the contact probe is attached to the socket body, the first conductive member and the second conductive member do not need to be tilted. Therefore, the first electrical contact portion is disposed on the opening side of one end of the through hole of the socket body. When the second electrical contact portion is disposed on the opening side of the other end of the through hole, the first electrical contact portion and the second electrical contact portion and the opening portions at both ends of the through hole when the contact probe is operated Can be prevented from coming into contact with each other, and the opening of the socket body can be prevented from being unevenly worn.

  For this reason, it can prevent that position shift with the connection terminal of a to-be-inspected object and the connection terminal of a printed wiring board, a 1st electrical contact part, and a 2nd electrical contact part will generate | occur | produce, The inspection of the object can be performed stably.

  In addition, the contact probe according to the present invention is constituted by a throttle portion formed at a predetermined position in the axial direction of the first electrical terminal portion.

  With this configuration, since the throttle portion is formed in the first electrical terminal portion, when the first electrical terminal portion is inserted into the insertion hole of the second electrical terminal portion, the first electrical terminal portion is the original. The first electrical terminal portion can be further elastically deformed so as to return to the curved or bent state. Further, by adjusting the diameter of the throttle portion, the amount of elastic deformation of the first electrical terminal portion can be finely adjusted, and the sliding resistance of the first conductive member and the second conductive member can be adjusted.

  The inspection socket according to the present invention is an inspection socket configured to include a contact probe, and includes a socket body in which at least one or more through-holes in which the contact probe is accommodated are formed, The first electrical contact portion is disposed on the opening side of one end of the through hole, and the second electrical contact portion is disposed on the opening side of the other end of the through hole. .

  With this configuration, the inspection socket can reduce the sliding resistance between the first conductive member and the second conductive member without inclining the first conductive member and the second conductive member, and the first conductive member Since the contact probe capable of stabilizing the electrical resistance of the second conductive member is provided, it is not necessary to increase the clearance between the through hole of the socket body and the contact probe when the contact probe is attached to the socket body. It is possible to prevent the electrical terminal portion from contacting the inner peripheral portion of the insertion hole in an oblique state, and the electrical resistance of the first conductive member and the second conductive member can be stabilized.

  In addition, since it is not necessary to attach the first conductive member and the second conductive member to the socket body in an inclined state, when the contact probe is operated, the first electrical contact portion, the second electrical contact portion, and the through hole It can prevent that the opening part of a both ends contacts in the state where it biased, and can prevent that an opening part wears out unevenly.

  For this reason, it can prevent that position shift with the connection terminal of a to-be-inspected object and the connection terminal of a printed wiring board, and a 1st electrical contact part and a 2nd electrical contact part arises, and to-be-inspected object Inspection of things can be performed stably.

  As described above, the present invention can stabilize the slidability and electrical resistance of the contact probe, improve productivity, and stably inspect the object to be inspected. Contact probes and test sockets can be provided.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
1 to 3 are views showing a first embodiment of a contact probe and an inspection socket according to the present invention.

  First, the configuration will be described. In FIG. 1, the inspection socket 11 includes a contact probe 12 and a socket body 13, and the contact probe 12 includes a first conductive member 14, a second conductive member 15, and a coil spring 16 as an urging member. It has.

  The first conductive member 14 includes a rod-shaped plunger 17 as a first electrical terminal portion and an electrical contact portion 18 as a first electrical contact portion provided integrally with the plunger 17. The conductive member 15 includes a cylinder portion 19 as a hollow second electrical terminal portion in which an insertion hole 19a is formed, and an electrical contact portion 20 as a second electrical contact portion provided integrally with the cylinder portion 19. I have.

  The plunger 17 may be cylindrical or polygonal, and the insertion hole 19a may be round or polygonal. Here, when the plunger 17 is cylindrical, the insertion hole 19a is preferably a round hole, and when the plunger 17 is polygonal, the insertion hole 19a is preferably a polygonal hole.

  A through hole 21 is formed in the socket body 13, and the contact probe 12 is accommodated in the through hole 21. Although not shown, through holes are formed in the socket body 13 in parallel with each other at a predetermined pitch (a constant interval in the left-right direction in FIG. 1), and the contact probe 12 is accommodated in the through holes. Has been.

The electrical contact portion 18 is disposed on the side of the opening 21a below (one end) of the through-hole 21,
A contact portion 18a formed in a conical shape is formed in the electrical contact portion 18, and this contact portion 18a comes into contact with a connection terminal 23a of a printed wiring board 23 as an inspection device.

Further, the electrical contact portion 18 is formed with a flange portion 18b, and the lower end of the coil spring 16 is in contact with the flange portion 18b.
The electrical contact portion 20 is disposed on the opening 21b side above the other end of the through-hole 21, and
The electrical contact portion 20 is formed with a contact portion 20a formed in a crown shape in which triangular concave and convex portions are continuous, and the contact portion 20a comes into contact with the connection terminal 22a of the object 22 to be inspected. . The connection terminal 22a is composed of a solder ball.

The cylinder portion 19 is formed with a flange portion 19b, and the upper end of the coil spring 16 is in contact with the flange portion 19b.
The coil spring 16 of the present embodiment is interposed between the first conductive member 14 and the second conductive member 15, and the plunger 17 is a cylinder portion so that the electrical contact portion 18 and the electrical contact portion 20 are close to each other. When sliding in the 19 insertion holes 19 a, the electrical contact portion 18 and the electrical contact portion 20 are urged in a separating direction.

  The coil spring 16 has a predetermined initial spring load so that the contact portion 18a of the electrical contact portion 18 and the contact portion 20a of the electrical contact portion 20 protrude outward from the openings 21a and 21b. The first conductive member 14 and the second conductive member 15 are biased.

Further, the opening areas of the openings 21a and 21b are formed smaller than the inner peripheral area of the through-hole 21, and the annular engagement portions 21c and 21d are formed between the openings 21a and 21b and the through-hole 21. Yes.
When the flange portion 18b of the electrical contact portion 18 and the flange portion 19b of the cylinder portion 19 are engaged with the annular engagement portions 21c and 21d, respectively, the first conductive member 14 and the second conductive member 15 are removed from the socket body 13. It is designed not to escape.

  The socket body 13 includes a first socket body 24 and a second socket body 25 which are divided, and the socket body is obtained by accommodating the contact probe 12 in the through hole 21 and matching the divided surfaces P1 and P2. 13, the contact probe 12 is integrally held.

  On the other hand, the second conductive member 15 that frequently contacts and separates from the connection terminal 22a of the object 22 to be inspected is a hard metal material having high conductivity and high wear resistance, such as titanium (Ti) metal and carbon steel ( SK), and the first conductive member 14 that contacts the connection terminal 23a of the printed wiring board 23 is not required to be as hard as the second conductive member 15. For example, phosphor bronze, brass, beryllium copper, etc. Made of copper-based metal.

  The first conductive member 14 and the second conductive member 15 can be easily turned by using a material having free-cutting properties. In addition, the first conductive member 14 and the second conductive member 15 are subjected to plating treatment on the surfaces after cutting.

  The coil spring 16 can be formed of any cross-sectional shape and material (for example, a piano wire for spring, stainless steel wire, or plastic), and is more conductive than the first conductive member 14 and the second conductive member 15. Is a member that is not required.

  The coil spring 16 is a hollow elastic member. Here, the elastic member can be formed of not only a metal but also a viscoelastic material such as rubber, a plastic, or a composite product thereof.

  The socket body 13 is made of an insulating resin, for example, an engineer resin, and electrically fronts a plurality of contact probes 12 accommodated adjacent to the socket body 13.

  On the other hand, the plunger 17 is curved, and when the plunger 17 is inserted into the insertion hole 19a of the cylinder portion 19, the plunger 17 is elastically deformed so as to return to the original bent state, so that the plunger 17 is inserted. The inner periphery of the hole 19a is pressed and brought into contact. That is, the plunger 17 of the present embodiment has an elastic pressing force so as to contact the inner peripheral portion of the insertion hole 19a. The plunger 17 may be bent instead of curved.

Next, the operation will be described.
In the inspection socket 11 according to the embodiment, as shown in FIG. 2, the contact portion of the electrical contact portion 20 is connected to the connection terminal 22a of the inspection target object 22 such as a wafer in which an IC package to be tested or an integrated circuit is built. The inspection object 22 is inspected by bringing the contact portion 18a of the electrical contact portion 18 into contact with the connection terminal 23a of the printed wiring board 23 constituting the inspection device and the diagnostic device.
In addition, since the contact part 20a is formed in the crown shape, even if the connection terminal 23a of the printed wiring board 23 is a solder ball, the contact part 20a is stably in contact with the connection terminal 23a.

At this time, the plunger 17 slides with respect to the insertion hole 19a of the cylinder part 19 and moves in the direction in which the electrical contact parts 18 and 20 approach each other, and the coil spring 16 causes the first conduction by the both contact parts 18a and 20a. The displacements S1 and S2 of the member 14 and the second conductive member 15 are allowed.
Further, the coil spring 16 is compressed to generate a spring load, so that the electrical contact portions 18 and 20 are brought into contact with the connection terminal 22a of the test object 22 and the connection terminal 23a of the printed wiring board 23 with a high contact pressure. The connection terminal 22 a of the inspection object 22 and the connection terminal 23 a of the printed wiring board 23 can be electrically connected via the contact probe 12.

  The inspection socket 11 of the present embodiment has a socket body 13 in which a through hole 21 in which the contact probe 12 is accommodated is formed, and an electrical contact portion 18 is disposed on the opening 21 a side at the lower end of the through hole 21. In addition, since the electrical contact portion 20 is disposed on the opening 21b side of the upper end of the through hole 21 and the plunger 17 that is slidably inserted into the insertion hole 19a of the cylinder portion 19 is curved, When the plunger 17 is inserted into the insertion hole 19a, the plunger 17 is elastically deformed so as to return to the original bent state, so that the plunger 17 can be pressed and brought into contact with the inner peripheral portion of the insertion hole 19a. .

  For this reason, it is unnecessary to strictly manage the clearance between the plunger 17 and the inner peripheral portion of the insertion hole 19a of the cylinder portion 19, and if reduced, the first conductive member 14 and the second conductive member 15 are cut. When the surface treatment is performed, the processing of the plunger 17 and the insertion hole 19a can be facilitated, the sliding resistance between the first conductive member 14 and the second conductive member 15 can be reduced, and the first conductive member 14 and the first conductive member 14 can be reduced. The electric resistance of the two conductive members 15 can be stabilized. As a result, the yield of the contact probes 12 can be improved and the productivity of the contact probes 12 can be improved.

  Further, when the contact probe 12 is attached to the socket body 13, it is not necessary to incline the first conductive member 14 and the second conductive member 15 as in the prior art, so that the contact probe 12 is inclined and stored in the socket body 13. It is not necessary to increase the clearance between the through hole 21 and the contact probe 12, and the plunger 17 can be prevented from contacting the inner peripheral portion of the insertion hole 19a in an oblique state. The electric resistance of the conductive member 15 can be stabilized.

  Further, when the contact probe 12 is attached to the socket body 13, it is not necessary to incline the first conductive member 14 and the second conductive member 15. Therefore, when the contact probe 12 is operated, that is, the conduction of the object 22 to be inspected. When performing the inspection, the electrical contact portions 18 and 20 and the openings 21a and 21b at both ends of the through hole 21 are prevented from contacting in a biased state, and the openings 21a and 21b are unevenly worn. Can be prevented.

  For this reason, it can prevent that position shift with the connecting terminal 22a of the to-be-inspected object 22 and the connecting terminal 23a of the printed wiring board 23, and the electrical contact parts 18 and 20 arises, and to-be-inspected object 22 The inspection can be performed stably.

  In the present embodiment, the diameter of the plunger 17 is the same in the axial direction. However, as shown in FIG. 3, even if the throttle portion 17a is formed at a substantially central portion of the plunger 17 in the axial direction. Good. The throttle portion 17 a is a portion whose diameter is narrower than other portions of the plunger 17.

In this way, when the plunger 17 is inserted into the insertion hole 19a of the cylinder portion 19, the plunger 17 can be further elastically deformed so that the plunger 17 returns to the original curved state.
Further, by adjusting the diameter of the throttle portion 17a, the amount of elastic deformation of the plunger 17 can be finely adjusted, and the sliding resistance of the first conductive member 14 and the second conductive member 15 can be adjusted.

(Second Embodiment)
4 and 5 are diagrams showing a second embodiment of the contact probe and the inspection socket according to the present invention. The same components as those in the first embodiment are denoted by the same reference numerals and described. Omitted.

  In FIG. 4, the inspection socket 31 includes a contact probe 32 and a socket body 13, and the contact probe 32 includes a first conductive member 33, a second conductive member 34, and a coil spring 16 as an urging member. It has.

The first conductive member 33 includes a plunger 35 as a first electrical terminal portion and an electrical contact portion 36 as a first electrical contact portion provided integrally with the plunger 35, and the second conductive member 34 includes a cylinder portion 37 as a second electrical terminal portion in which an insertion hole 37 a is formed, and an electrical contact portion 38 as a second electrical contact portion provided integrally with the cylinder portion 37.
The plunger 35 may be cylindrical or polygonal, and the insertion hole 19a may be a round hole or a polygonal hole. Here, when the plunger 35 is cylindrical, the insertion hole 19a is preferably a round hole, and when the plunger 35 is polygonal, the insertion hole 19a is preferably a polygonal hole.

  The electrical contact portion 36 is disposed on the opening 21b side (one end) above the through-hole 21, and the electrical contact portion 36 is a contact portion 36a formed in a crown shape in which triangular uneven portions are continuous. The contact portion 36a comes into contact with the connection terminal 22a of the object 22 to be inspected.

  Further, the electrical contact portion 36 is formed with a flange portion 36b, and the upper end of the coil spring 16 is in contact with the flange portion 36b.

  The electrical contact portion 38 is disposed on the side of the opening 21a below (the other end of) the through-hole 21, and the electrical contact portion 38 is formed with a conical contact portion 38a. Reference numeral 38a is in contact with the connection terminal 23a of the printed wiring board 23 which is an inspection device.

  Further, the cylinder portion 37 is formed with a flange portion 37b, and the lower end of the coil spring 16 is in contact with the flange portion 37b.

  The first conductive member 33 that frequently contacts and separates from the connection terminal 22a of the object 22 to be inspected is a hard metal material having high conductivity and high wear resistance, such as titanium (Ti) -based metal and carbon steel (SK). The second conductive member 34 that contacts the connection terminal 23a of the printed wiring board 23 is not required to be as hard as the first conductive member 33. For example, a copper-based material such as phosphor bronze, brass, beryllium copper, etc. Made of metal.

  The first conductive member 33 and the second conductive member 34 can be easily turned by using a material having free-cutting properties. Further, the first conductive member 33 and the second conductive member 34 are subjected to plating treatment on the surfaces after the cutting process.

  On the other hand, the plunger 35 is curved, and when the plunger 35 is inserted into the insertion hole 37a of the cylinder portion 37, the plunger 35 is elastically deformed so as to return to the original bent state, so that the plunger 35 is inserted. The inner periphery of the hole 37a is pressed and brought into contact. That is, the plunger 35 of the present embodiment has an elastic pressing force so as to contact the inner peripheral portion of the insertion hole 37a. The plunger 35 may be bent instead of curved.

  In the present embodiment, the inspection socket 31 includes the socket body 13 in which the through hole 21 in which the contact probe 32 is accommodated is formed, and the electrical contact portion 38 is provided on the opening 21 a side at the lower end of the through hole 21. Since the electrical contact portion 36 is disposed on the opening 21 b side of the upper end of the through hole 21 and the plunger 35 slidably inserted into the insertion hole 37 a of the cylinder portion 37 is curved, the cylinder portion 37 is arranged. When the plunger 35 is inserted into the insertion hole 37a, the plunger 35 is elastically deformed so as to return to the original bent state, so that the plunger 35 is pressed and brought into contact with the inner peripheral portion of the insertion hole 37a. it can.

  For this reason, the first conductive member 33 and the second conductive member 34 are cut by reducing the necessity of strictly managing the clearance between the plunger 35 and the inner peripheral portion of the insertion hole 37a of the cylinder portion 37 and reducing the clearance. When the surface treatment is performed, the processing of the plunger 35 and the insertion hole 37a can be facilitated, the sliding resistance between the first conductive member 33 and the second conductive member 34 can be reduced, and the first conductive member 33 and the first conductive member 33 can be reduced. The electric resistance of the two conductive members 34 can be stabilized. As a result, the yield of the contact probes 32 can be improved and the productivity of the contact probes 32 can be improved.

  Further, when attaching the contact probe 32 to the socket main body 13, it is not necessary to incline the first conductive member 33 and the second conductive member 34 as in the prior art, so that the contact probe 32 is inclined and stored in the socket main body 13. It is not necessary to increase the clearance between the through hole 21 and the contact probe 32, and it is possible to prevent the plunger 35 from contacting the inner peripheral portion of the insertion hole 37a in an oblique state. The electric resistance of the conductive member 34 can be stabilized.

  Further, when the contact probe 32 is attached to the socket body 13, it is not necessary to incline the first conductive member 33 and the second conductive member 34. Therefore, when the contact probe 32 is operated, that is, the conduction of the object 22 to be inspected. When performing the inspection, the electrical contact portions 36, 38 and the openings 21a, 21b at both ends of the through-hole 21 are prevented from contacting in a biased state, and the openings 21a, 21b are unevenly worn. Can be prevented.

  For this reason, it can prevent that position shift with the connecting terminal 22a of the test object 22 and the connection terminal 23a of the printed wiring board 23, and the electrical contact parts 36 and 38 arises, and the test object 22 The inspection can be performed stably.

  In this embodiment, the diameter of the plunger 35 is the same in the axial direction. However, as shown in FIG. 5, even if the throttle portion 35 a is formed at the substantially central portion in the axial direction of the plunger 35. Good. The throttle portion 35a is a portion whose diameter is narrower than other portions of the plunger 35.

  In this way, when the plunger 35 is inserted into the insertion hole 37a of the cylinder portion 37, the plunger 35 can be further elastically deformed so that the plunger 35 returns to the original curved state. Further, by adjusting the diameter of the throttle portion 35a, the elastic deformation amount of the plunger 35 can be finely adjusted, and the sliding resistance of the first conductive member 33 and the second conductive member 34 can be adjusted.

  As described above, the contact probe and the inspection socket according to the present invention can stabilize the slidability and electric resistance of the contact probe, and can improve productivity, and can be inspected. It is useful as a contact probe and an inspection socket for inspecting IC packages, integrated circuit elements, and the like.

It is a figure which shows 1st Embodiment of the contact probe and inspection socket which concern on this invention, and is front sectional drawing of an inspection socket. It is a figure which shows 1st Embodiment of the contact probe and test | inspection socket which concern on this invention, and is front sectional drawing of the test | inspection socket which shows the operation state at the time of a test. It is a figure which shows 1st Embodiment of the contact probe and inspection socket which concern on this invention, and is front sectional drawing of the inspection socket which has a contact probe of another structure. It is a figure which shows 2nd Embodiment of the contact probe and test | inspection socket which concern on this invention, and is front sectional drawing of a test | inspection socket. It is a figure which shows 1st Embodiment of the contact probe and inspection socket which concern on this invention, and is front sectional drawing of the inspection socket which has a contact probe of another structure. It is front sectional drawing of the conventional socket for a test | inspection.

Explanation of symbols

11, 31 Inspection socket 12, 32 Contact probe 13 Socket body 14, 33 First conductive member 15, 34 Second conductive member 16 Coil spring (biasing member)
17, 35 Plunger (first electrical terminal)
17a, 35a Restriction part 18, 36 Electrical contact part (first electrical contact part)
19, 37 Cylinder part (second electrical terminal part)
19a, 37a Insertion hole 20, 38 Electrical contact portion (second electrical contact portion)
21 Through-hole 21a, 21b Opening 22 Object to be inspected 22a Connection terminal 23 Printed wiring board (inspection device)
23a connection terminal

Claims (3)

A first conductive member having a first electrical contact portion and a rod-shaped first electrical terminal portion provided integrally with the first electrical contact portion; a second electrical contact portion; and the second electrical contact portion. A hollow second electrical terminal portion provided integrally with the contact portion and having an insertion hole through which the first electrical terminal portion is slidably inserted; and the first conductive member and the second conductive member. When the first electrical terminal portion slides in the insertion hole so that the first electrical contact portion and the second electrical contact portion are close to each other. A biasing member that biases the contact portion in a direction separating the second electrical contact portion;
The first electrical contact portion is brought into contact with either the connection terminal of the inspection object or the connection terminal of the inspection device, and the second electrical contact portion is connected to the connection terminal of the inspection object or the inspection device. In a contact probe that is in contact with either one of the terminals,
A contact probe, wherein the first electrical terminal portion is bent or bent. The contact probe according to claim 1, wherein a throttle portion is formed at a predetermined position in the axial direction of the first electrical terminal portion. An inspection socket comprising the contact probe according to claim 1 or 2,
Having a socket body in which at least one or more through-holes for accommodating the contact probes are formed;
The first electrical contact portion is disposed on the opening side of one end of the through hole, and the second electrical contact portion is disposed on the opening side of the other end of the through hole. Inspection socket.

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