JP2014235779A - Anisotropic conductive member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an anisotropic conductive member capable of fine-pitch IC inspection.SOLUTION: A first sliding part 134 is included which enables a first movable member 130 and a second movable member 140 to vary relative positions while maintaining electrical contact. The second movable member comprises a substrate contact part 141 and a second sliding part 144. The substrate contact part 141 includes an end which is positioned in a portion protruding from a through hole of an elastic socket 110 and opposes a substrate for inspection of an inspection device during use, and is configured for contacting to the substrate for inspection. The second sliding part 144 forms a sliding contact structure together with the first sliding part. A first arm part 133 and the first sliding part are shaped by working one plate material, and the second sliding part is also shaped by working a plate material. The first arm part is capable of pressing one principal surface of the elastic socket so as to generate, in the elastic socket, an elastic restoration force in such a direction that an electrode contact part 131 and the substrate contact part are separated when an external force is applied which makes these contact parts closer in a thickness direction of the elastic socket.

Description

  The present invention relates to an anisotropic conductive member used for IC inspection and the like.

  When inspecting an IC having a large number of terminals, an inspection connected to each terminal of the IC and an inspection device (IC tester) for inspecting the IC while suppressing electrical connection between adjacent terminals in the IC. An anisotropic conductive member is used for electrically connecting the electrodes corresponding to the terminals on the circuit board.

  The anisotropic conductive member is generally plate-shaped as a whole, and its electrical conductivity in the normal direction of its main surface is sufficiently high so that an electric signal can pass through it, but it is insulated in the in-plane direction of the main surface. And has the property of not conducting electricity. Based on this characteristic, the anisotropic conductive member has a structure including a large number of portions through which current passes in the normal direction of the main surface corresponding to the terminals of the IC to be inspected. In the present specification, a portion through which a current passes in the normal direction of the main surface corresponding to the terminal of the IC is referred to as an electric through portion.

  The specific structure of the electric through-hole is arbitrary, a structure including conductive thin wires such as metal embedded in the member so as to be exposed from both main surfaces of the anisotropic conductive member, and between the two main surfaces. A structure comprising a group of filled conductive fine particles, a tubular body that is opened while being partially closed at both ends, a coil spring disposed inside the tubular body, and the above-mentioned partial while being urged by the coil spring Examples thereof include a probe pin composed of two contact members partially protruding from the tubular body in a state of being locked to a closed portion.

  In use of the electric through-portion in use, the terminal of the IC and the inspection substrate and the end portion on the main surface of the electric through-hole portion of the anisotropic conductive member are in a predetermined state in order to stabilize the electrical contact between them. Contact with pressure. In many cases, a structure for generating a contact pressure using an elastic restoring force is provided in the electric through-hole so that the contact pressure is generated to such an extent that the electrical contact is stabilized.

  For example, the electrical penetration part using the above-mentioned conductive thin wires and the electrical penetration part using a group of conductive fine particles have a structure in which these members are embedded in an elastic body. The contact pressure with the substrate is generated. In the probe pin, the coil spring urges the two contact members so as to separate the contact members, thereby generating contact pressure between the contact members and the IC terminals and the inspection substrate.

  In addition to the above example, Patent Document 1 discloses that an elastic plate made of a nonconductive material having a through hole formed at a position corresponding to a contact terminal of an inspection object; A plunger composed of a plunger head part elastically supported by a plate and a plunger main body extending from the center of the lower surface of the plunger head part; and a receiving part contacting the plunger main body is depressed in the central part And a contact pin formed and coupled to the lower side of the through-hole.

JP 2008-180689 A

  In the probe device for semiconductor chip inspection (corresponding to “an anisotropic conductive member” in the present specification) disclosed in Patent Document 1, a movable member including a plunger and a contact pin as shown in FIG. The electric through-hole constituted by the elastic plate is variable in the thickness direction of the elastic plate by using an elastic restoring force of an elastic plate made of an insulating material (also referred to as “elastic socket” in this specification, the definition will be described later). Is arranged.

  Such an anisotropic conductive member has a complicated structure of the through-hole provided in the elastic socket and is difficult to process, and the inner diameter of the through-hole is larger than the maximum outer diameter of the movable member, making it difficult to miniaturize it. There's a problem.

  In a structure in which the movable member is variably arranged in the thickness direction of the elastic plate, the maximum outer diameter portion of the movable member that is larger than the inner diameter of the through hole of the elastic plate compresses the peripheral portion of the opening of the through hole and is elastic. Although restoring force has been obtained, if the maximum outer diameter portion of the movable member is not large enough relative to the inner diameter of the through hole, the maximum outer diameter portion of the movable member is buried in the through hole when compressed and is movable There is a risk that the member may malfunction. In this specification, the shape formed by the maximum outer shape of the movable member when viewed from the direction parallel to the central axis of the through hole is also referred to as “maximum outer shape”.

  However, when the maximum outer shape of the movable member is a perfect circle like the anisotropic conductive member disclosed in Patent Document 1, if the maximum outer shape is enlarged, the adjacent electric through-holes when arranged in a fine pitch Therefore, the maximum outer shape cannot be increased beyond a certain level with respect to the pitch.

  Therefore, in an anisotropic conductive member having a structure in which an elastic socket having a through hole and two movable members are provided and at least one of the two movable members penetrates the through hole, when the electric through portions are arranged at a fine pitch, A movable member having a structure that does not come into contact with an adjacent movable member and is not easily buried in the through hole of the elastic socket is desired.

  The present invention solves the above problems and provides an anisotropic conductive member capable of inspecting a fine pitch IC.

  The present invention provided to solve the above problems is as follows.

  In one aspect, the present invention provided to solve the above-described problems is a plate-shaped elastic socket made of an insulating and elastic material and having a plurality of through holes penetrating the main surface, and a plurality of elastic sockets. An anisotropic conductive member that is provided corresponding to each of the through holes and has a plurality of electric through portions that have portions arranged in the through holes and allow current to pass in the thickness direction of the elastic socket. Each of the electric through-holes includes a first movable member and a second movable member that are electrically connected and can change a relative position in the thickness direction of the elastic socket. An electrode contact portion that is located at a portion protruding from the through hole of the elastic socket in one movable member, includes an end portion that faces the inspection object during use, and is in contact with an electrode attached to the inspection object; Of elastic members A second arm provided in the first arm portion provided at a portion protruding from the electrode side opening of the through-hole of the socket and provided with a portion in contact with one main surface of the elastic socket, and a second movable member The first sliding portion which is configured to have a sliding contact structure with the first sliding member and allows the first movable member and the second movable member to change relative positions while maintaining electrical contact. The second movable member is located at a portion protruding from the through hole of the elastic socket in the second movable member, and includes an end portion that faces the inspection substrate of the inspection device when in use. A substrate contact portion for contacting, and a second sliding portion constituting a sliding contact structure with the first sliding portion, wherein the first arm portion and the first sliding portion are made of one plate material. The shape obtained by processing, and the shape obtained by processing the plate material for the second sliding part The first arm portion has an elastic restoring force in the direction in which the electrode contact portion and the substrate contact portion are separated from each other when an external force is applied to bring the electrode contact portion and the substrate contact portion closer to the thickness direction of the elastic socket. An anisotropic conductive member characterized in that a part of an elastic socket can be compressed in the thickness direction of the elastic socket.

  The above invention may further include one or more of the following features (i) to (xv).

  (I) The sliding contact structure comprised by the 1st sliding part and the 2nd sliding part has a part located in the through-hole of an elastic socket.

  (Ii) The sliding contact structure constituted by the first sliding portion and the second sliding portion has a portion located outside the through hole of the elastic socket.

  (Iii) The sliding contact structure is configured by arranging the main surfaces of the two plate members so as to face each other. Furthermore, the arrangement of the portion of the first arm portion that contacts one main surface of the elastic socket with respect to the through hole of the elastic socket is such that the first movable member is inclined with respect to the central axis of the through hole of the elastic socket. The sliding contact structure may be set so as to be prevented from being maintained. Further, the first arm portion includes a portion that is orthogonal to the main surface of the first sliding portion and extends in the same direction with respect to the main surface, and the direction in which the portion extends extends in the first sliding direction. The main surface of the part may be oriented to face the main surface of the second sliding part.

  (Iv) The sliding contact structure is configured by arranging the main surfaces of the two plate members so as to be orthogonal to each other. Further, in the sliding contact structure, the other part of the first movable member and the second movable member is placed in a slit provided in at least one part of the first movable member and the second movable member. You may be comprised by arrange | positioning so that it may enter, sliding. Further, the other of the first movable member and the second movable member, a part of which is disposed in the slit, may be suppressed from rotating by the slit. The slit may have a shape obtained by bending a part of one plate material.

  (V) The first arm portion has a shape obtained by bending a part of one plate material.

  (Vi) The first arm portion has a linear shape parallel to the main surface of the first sliding portion, and the adjacent first arm portions are arranged so as to be orthogonal to each other.

  (Vii) In the first arm portion, the distance from the center of the through hole of the elastic socket to the farthest end of the first arm portion is the center of the through hole of the elastic socket and the center of the through hole adjacent thereto. Is larger than the distance obtained by subtracting 25 μm from ½ of the distance between

  (Viii) The anisotropic conductive member is made of an insulating and rigid material, has a plurality of through holes corresponding to the through holes of the elastic socket, and is formed from the elastic socket on the main surface on the electrode contact portion side of the elastic socket. The plate-shaped rigid socket further disposed to be spaced apart to prevent the sliding contact structure from being maintained, and the first arm portion is at least a part of the surface opposite to the surface facing the elastic socket. The rigid socket can be locked to the main surface on the side facing the elastic socket.

  In the case where the rigid socket is provided, the through hole of the rigid socket may further have a tapered structure whose diameter decreases from the opening proximal to the elastic socket toward the distal opening.

  In any of the above cases where the rigid socket is provided, the first arm portion and the electrode contact portion are made of different members, and maintain the electrical connection therebetween while being relatively relative to each other in the main surface direction of the elastic socket. The position of the electrode contact portion can be changed, and a locking projection that protrudes in a direction parallel to the in-plane direction of the rigid socket is formed on the portion of the through hole of the rigid socket that protrudes from the end on the elastic socket side. Movement of the electrode contact portion in the direction away from the first arm portion in the thickness direction of the rigid socket is limited by the locking protrusion, and the first arm portion is connected via the locking protrusion, The rigid socket may be lockable with respect to the main surface on the side facing the elastic socket. Furthermore, the electrode contact portion may have a shape other than the shape formed by processing one plate material.

  (Ix) The second sliding part includes a guide part formed by bending one plate material, and a part of the first sliding part is disposed in the guide part. The first arm portion may be prevented from rotating by the guide portion. Furthermore, the first arm portion may be prevented from being detached from the guide portion by locking the guide portion with the guide portion.

  (X) The first arm portion is prevented from rotating with respect to the through hole of the elastic socket.

  (Xi) A 1st arm part and an electrode contact part consist of one member.

  (Xii) a second arm located at a portion protruding from the inspection substrate side opening of the through hole of the elastic socket in the second movable member and having a portion in contact with the other main surface of the elastic socket And the second arm part and the second sliding part have a shape obtained by processing one plate material, and the second arm part has an electrode contact part and a board contact part of the elastic socket. When an external force that approaches the thickness direction is applied, the other main surface of the elastic socket can be pressed so that an elastic restoring force is generated in the elastic socket in a direction to separate them.

  (Xiii) The electrode contact portion has a shape formed by processing one plate material. At this time, an electrode contact part may be provided with the slit which comprises a sliding contact structure.

  (Xiv) The inspection substrate of the inspection apparatus has a through hole, and the substrate contact portion is soldered to the through hole.

  (Xv) At least one of the first sliding portion and the second sliding portion has a stepped portion, and the stepped portion is provided in the peripheral portion of the opening of the through hole of the elastic socket or in the through hole. By engaging with the stepped portion, at least one of the first sliding portion and the second sliding portion is prevented from being detached from the through hole of the elastic socket.

Said invention relates to a sliding contact structure, and may have either of the following characteristics.
The sliding contact structure is a structure in which the surfaces are in sliding contact.
The sliding contact structure is a structure in which a surface and a point are in sliding contact. Furthermore, the sliding contact structure may be a structure in which a plurality of points are in sliding contact with one surface.

Said invention may have either of the following characteristics regarding the 1st arm part.
The first arm portion includes a portion that is orthogonal to the main surface of the first sliding portion and extends in opposite directions with respect to the main surface.
The first arm portion includes a portion that is orthogonal to the main surface of the first sliding portion and extends in the same direction with respect to the main surface.

  In the above invention, the shape of the through hole of the elastic socket viewed from the thickness direction of the elastic socket may be a rectangle or a cross.

  In the above invention, the electrode contact portion may have a cylindrical shape.

  In the above invention, the rigid socket may be movable in the thickness direction of the elastic socket in conjunction with the electrode contact portion.

According to the present invention, since the portion that compresses the elastic socket included in the first movable member has a shape obtained by processing the plate material, the first movable member is located at a position distal from the opening of the through hole of the elastic socket. The member can press the elastic socket. Therefore, even if the arrangement pitch of the electric through-holes becomes narrow, the movable member is avoided from being buried in the elastic socket.
Moreover, since the part which compresses the elastic socket with which a 1st movable member is equipped is suppressed with respect to the through-hole of an elastic socket, it is avoided that the electrical penetration part which adjoins contacts and is conducted. The

In the anisotropic conductive member according to the first embodiment of the present invention, the center in the thickness direction of the first sliding portion with the plane parallel to the main surface of the plate material constituting the first sliding portion as the cut surface It is a figure which shows notionally a part of the cross section (it is a surface containing the cutting line BB in FIG. 1b) obtained by cut | disconnecting in a part. The anisotropic conductive member according to the first embodiment of the present invention shown in FIG. 1a has a cut surface that includes the plate thickness direction of the plate material constituting the first sliding portion and the thickness direction of the elastic socket. A part of a cross section (a surface including a cutting line AA in FIG. 1A) obtained by cutting at a central portion in the plate width direction of the plate-like member constituting the first sliding portion is conceptually shown. FIG. It is a figure which shows notionally a part of cross section obtained by cut | disconnecting the use condition of the anisotropically conductive member which concerns on 1st embodiment of this invention shown by FIG. 1a by the same cut surface as FIG. 1a. FIG. 1A conceptually shows a state in which the first movable member and the second movable member of the anisotropic conductive member according to the first embodiment of the present invention shown in FIG. FIG. 2A is a front view, FIG. 2B is a side view, and FIG. 3C is a cross-sectional view including a cutting line CC (upper) and a cross-sectional view including a cutting line DD (lower). The anisotropic conductive member according to the first embodiment of the present invention shown in FIG. 1a is obtained by cutting along a cutting plane parallel to the in-plane direction of the elastic socket indicated by the cutting line EE in FIG. 1a. It is a figure which shows a part of cross section obtained conceptually. (A) About one of the modifications of the anisotropically conductive member according to the first embodiment of the present invention shown in FIG. 1a, cut along a cutting line similar to the cutting line EE shown in FIG. 1a. A cross section obtained by cutting, and (b) an anisotropic conductive member having the same maximum outer shape as the anisotropic conductive member disclosed in Patent Document 1, including a cutting line EE shown in FIG. It is a figure which shows notionally a part of cross section obtained by cut | disconnecting in the surface similar to a surface. A cross-section obtained by cutting along a plane similar to the cut plane including the cutting line EE shown in FIG. 1a for another one of the modified examples of the anisotropic conductive member according to the first embodiment of the present invention. It is a figure which shows a part of no. The first movable member and the second movable member of the anisotropic conductive member according to another modification of the first embodiment of the present invention shown in FIG. 1g are assembled as an electric through portion in the elastic socket. (A) Front view, (b) Side view and (c) Cross-sectional view including cutting line FF (top) and cross-sectional view including cutting line GG (bottom) is there. In another one of the modified examples of the anisotropic conductive member according to the first embodiment of the present invention, the first movable member and the second movable member are assembled as an electrical through portion in the elastic socket. It is the (a) front view and (b) side view which show the state which was notionally. Still another one of the modified examples of the anisotropic conductive member according to the first embodiment of the present invention includes the thickness direction of the plate material and the thickness direction of the elastic socket constituting the first sliding portion. A part of a cross section (similar to the cross section in FIG. 1b) obtained by cutting at the central portion in the plate width direction of the plate-like member constituting the first sliding portion, with the plane including the cut surface being conceptual. FIG. It is a figure which shows a part of section of an anisotropic conductive member concerning a 2nd embodiment of the present invention conceptually, Comprising: The 1st sliding of one electric penetration part of an electric penetration part arranged alternately A cross section (similar to the cross section in FIG. 1 a) obtained by cutting at a central portion in the thickness direction of the first sliding portion with a plane parallel to the main surface of the plate material constituting the section as a cut surface. This cut surface is parallel to the plane including the plate thickness direction of the plate material and the thickness direction of the elastic socket constituting the first sliding portion in the other electric through-holes arranged alternately. There is shown a cross section (similar to the cross section in FIG. 1b) cut at the center in the plate width direction of the plate-like member constituting the first sliding portion. 2a is obtained by cutting the anisotropic conductive member according to the second embodiment of the present invention shown in FIG. 2a at a cutting plane parallel to the in-plane direction of the elastic socket indicated by the cutting line HH in FIG. 2a. It is a figure which shows a part of cross section obtained conceptually. In the anisotropic conductive member according to the third embodiment of the present invention, the center in the thickness direction of the first sliding portion is a plane parallel to the main surface of the plate material constituting the first sliding portion. It is a figure which shows notionally a part of the cross section (similar to the cross section in FIG. 1a) obtained by cut | disconnecting in a part. 3A conceptually shows a state in which the first movable member and the second movable member of the anisotropic conductive member according to the third embodiment of the present invention shown in FIG. FIG. 2A is a front view, FIG. 2B is a side view, and FIG. 3C is a cross-sectional view including the cutting line II (upper) and a cross-sectional view including the cutting line JJ (lower). Concept of a state in which the first movable member and the second movable member are assembled as an electric through-hole in the elastic socket in one of the modified examples of the anisotropic conductive member according to the third embodiment of the present invention. FIG. 2 is a sectional view including (a) a front view and (b) a side view and (c) a cutting line KK. The state in which the first movable member and the second movable member are assembled as an electrical through portion in the elastic socket in another one of the modified examples of the anisotropic conductive member according to the third embodiment of the present invention. (A) Front view and (b) Side view and (c) Cross-sectional view including the cutting line K2-K2 (top), Cross-sectional view including the cutting line K3-K3 (middle) and the cutting line K4 It is sectional drawing (lower) containing -K4. In another one of the modified examples of the anisotropic conductive member according to the third embodiment of the present invention, the first movable member and the second movable member are assembled as an electrical through portion in the elastic socket. It is the (a) front view and (b) side view which show the state which was notionally. The anisotropic conductive member which concerns on 4th embodiment of this invention WHEREIN: The 1st movable member and the 2nd movable member show notionally the state assembled as an electrical penetration part in an elastic socket, (a 1) A front view and (b) a side view. Concept of a state in which the first movable member and the second movable member are assembled as an electric through-hole in the elastic socket in one of the modified examples of the anisotropic conductive member according to the fourth embodiment of the present invention. FIG. 2A is a front view and FIG. In the anisotropic conductive member according to the fifth embodiment of the present invention, the center in the thickness direction of the first sliding portion is a plane parallel to the main surface of the plate material constituting the first sliding portion. It is a figure which shows notionally a part of the cross section (similar to the cross section in FIG. 1a) obtained by cut | disconnecting in a part. One of the modified examples of the anisotropic conductive member according to the fifth embodiment of the present invention is the first sliding with a plane parallel to the main surface of the plate material constituting the first sliding portion as the cut surface. It is a figure which shows notionally a part of the cross section (similar to the cross section in FIG. 1a) obtained by cut | disconnecting in the plate | board thickness direction center part of a part. In the anisotropic conductive member according to the sixth embodiment of the present invention, the center in the thickness direction of the first sliding portion with the plane parallel to the main surface of the plate material constituting the first sliding portion as the cut surface It is a figure which shows notionally a part of the cross section (similar to the cross section in FIG. 1a) obtained by cut | disconnecting in a part. The anisotropic conductive member according to the sixth embodiment of the present invention shown in FIG. 6a has a plane including the plate thickness direction of the plate material constituting the first sliding portion and the thickness direction of the elastic socket as a cut surface. FIG. 2 is a diagram conceptually showing a part of a cross section (similar to the cross section in FIG. 1 b) obtained by cutting at the central portion in the plate width direction of the plate-like member constituting the first sliding portion. It is a figure which shows notionally a part of cross section obtained by cut | disconnecting the use condition of the anisotropically conductive member which concerns on 6th embodiment of this invention shown by FIG. 6a by the same cut surface as FIG. 6a. It is a figure which shows notionally one part of one cross section of the modification of the anisotropically conductive member which concerns on 6th embodiment of this invention, Comprising: Of one electrical penetration part of the electrical penetration part arrange | positioned alternately A cross section obtained by cutting a plane parallel to the principal surface of the plate material constituting the first sliding portion at the central portion in the thickness direction of the first sliding portion (similar to the cross section in FIG. 1a) In the other electric through-holes arranged alternately, this cut surface shows the thickness direction of the plate material constituting the first sliding portion and the thickness direction of the elastic socket. A cross-section (similar to the cross-section in FIG. 1 b) cut at the center in the plate width direction of the plate-like member constituting the first sliding portion is shown. The anisotropic conductive member according to the seventh embodiment of the present invention has a plane parallel to the main surface of the plate material constituting the first sliding portion as a cut surface, and the center in the thickness direction of the first sliding portion. It is a figure which shows notionally a part of the cross section (similar to the cross section in FIG. 1a) obtained by cut | disconnecting in a part. It is a figure which shows a part of section of an anisotropic conductive member concerning an 8th embodiment of the present invention conceptually, Comprising: The 1st sliding of one electric penetration part of an electric penetration part arranged alternately A cross section obtained by cutting a plane parallel to the main surface of the plate material constituting the section at the central portion in the thickness direction of the first sliding portion (of the other electric penetration portion described next) This is a cross section including the cutting line L-L.), And the cutting plane is the thickness direction of the plate material constituting the first sliding portion in the other electric through-holes arranged alternately. And a cross section (similar to the cross section in FIG. 1b) that is parallel to the plane including the thickness direction of the elastic socket and is cut at the central portion in the plate width direction of the plate member constituting the first sliding portion. )It is shown. In the anisotropic conductive member according to the eighth embodiment of the present invention, when the center points of the electrode contact portions of the adjacent electric through portions are arranged on a straight line, as shown in FIG. The plate material constituting the second sliding portion of one electric penetration portion (left side in the figure) is not located on the cut surface shown in the drawing. 8A conceptually shows a state in which the first movable member and the second movable member of the anisotropic conductive member according to the third embodiment of the present invention shown in FIG. It is sectional drawing containing (a) front view, (b) side view, and (c) cutting line MM shown. The anisotropic conductive member according to the ninth embodiment of the present invention has a first sliding surface with a plane including the plate thickness direction of the plate member constituting the first sliding portion and the thickness direction of the elastic socket as a cut surface. It is a figure which shows notionally a part of the cross section (similar to the cross section in FIG. 1b) obtained by cut | disconnecting in the plate width direction center part of the plate-shaped member which comprises a moving part. In the anisotropic conductive member according to the tenth embodiment of the present invention, the center in the thickness direction of the first sliding portion is a plane parallel to the main surface of the plate material constituting the first sliding portion. It is a figure which shows notionally a part of the cross section (similar to the cross section in FIG. 1a) obtained by cut | disconnecting in a part. Another one of the anisotropically conductive members according to the tenth embodiment of the present invention uses a plane including the plate thickness direction of the plate material constituting the first sliding portion and the thickness direction of the elastic socket as a cut surface. FIG. 2 is a diagram conceptually showing a part of a cross section (similar to the cross section in FIG. 1 b) obtained by cutting at the central portion in the plate width direction of the plate-like member constituting the first sliding portion. In the anisotropic conductive member according to the eleventh embodiment of the present invention, the surface including the plate thickness direction of the plate material constituting the first sliding portion and the thickness direction of the elastic socket is used as the cut surface. It is a figure which shows notionally a part of the cross section (similar to the cross section in FIG. 1b) obtained by cut | disconnecting in the plate width direction center part of the plate-shaped member which comprises a sliding part. It is sectional drawing which shows notionally the structure of the anisotropically conductive member disclosed by patent document 1. FIG.

Hereinafter, embodiments of the present invention will be described.
1a, 1b and 1c are views conceptually showing a part of a cross section in the thickness direction of an elastic socket 110 of an anisotropic conductive member 100 according to a first embodiment of the present invention. FIGS. 1a and 1b conceptually show cross sections in different directions orthogonal to each other, and FIG. 1c shows an anisotropic conductive member in use when the anisotropic conductive member 100 is used, that is, an IC to be inspected is being inspected. A cross section of 100 is shown conceptually.

  An anisotropic conductive member 100 according to the first embodiment of the present invention includes a plate-like elastic socket 110 made of an insulator and having elasticity. The material of the elastic socket 110 is not particularly limited. Examples of the material include an insulating material having elasticity such as silicone rubber, fluororubber, or acrylic elastomer.

  The elastic socket 110 includes a plurality of through holes 111. Here, the hole shape of the through hole 111 of the elastic socket 110 provided in the anisotropic conductive member 100 according to the first embodiment of the present invention is not particularly limited, but the through hole 111 is the first movable member 130 as described later. In the case of providing the function of preventing rotation, the shape is a rectangle including a square or a cross shape. The method of forming the through-hole 111 is not particularly limited, but it is assumed that the elastic socket 110 is molded by a mold in order to form a rectangular or cross-shaped through-hole 111 including a square. If it is the circular through-hole 111, you may form the through-hole 111 using a micro drill etc. in a plate-shaped elastic member. In addition, when forming the through-hole 111 in a rectangle or a cross shape, it is assumed that a corner | angular part becomes round from the restrictions on manufacture. In this specification, a rectangle including a square or a cross shape includes a shape having round corners.

  Furthermore, the anisotropic conductive member 100 according to the first embodiment of the present invention is provided corresponding to each of the plurality of through holes 111 provided in the elastic socket 110 and has a portion penetrating the through hole 111. A plurality of electric through-holes 120 that allow current to pass in the thickness direction of the elastic socket 110 are provided.

  The electric through-hole 120 includes a first movable member 130 and a second movable member 140 that are electrically connected to each other and can change the relative position in the thickness direction of the elastic socket 110. Among these movable members, the first movable member 130 is exemplified by electrodes (specifically, solder balls and metal bumps) attached to the inspection object (specifically, an IC is exemplified). ) Is provided at the end (on the upper side in FIG. 1a) facing the object to be inspected, and the second movable member 140 is a substrate for contacting the inspection substrate of the inspection apparatus. The contact portion 141 is provided at the end portion on the side facing the inspection substrate (the lower side in FIG. 1a).

  Here, in the anisotropic conductive member 100 according to the first embodiment of the present invention, the first movable member 130, the second movable member 140, and the elastic socket 110 are arranged to satisfy the following relationship. That is, when an external force is applied to bring the electrode contact portion 131 and the substrate contact portion 141 close to each other in the thickness direction of the elastic socket 110 (specifically, anisotropic conductivity placed on the inspection substrate in the use state). For example, the electrode contact portion 131 of the conductive member 100 is in contact with an electrode of an IC such as a solder ball while being applied with a force that comes close to the inspection substrate. The first movable member 130 and the second movable member 140 are arranged so that a part of the elastic socket 110 can be compressed so that an elastic restoring force is generated in the elastic socket 110 in a direction to separate the 131 and the substrate contact portion 141. .

  Furthermore, in the movable members 130 and 140 provided in the anisotropic conductive member 100 according to the first embodiment of the present invention, at least a portion that compresses the elastic socket 110 of the movable members 130 and 140 is formed of a plate-like body. In some embodiments, the plate has a bent portion. Such a plate-like body is assumed to be manufactured by press working. Alternatively, the entire plate-like body may be manufactured by etching, and the bent portion may be pressed. Note that the movable members 130 and 140 shown in FIG. 1a are provided with cut portions 132 and 142 above and below the bent portion, which are cut portions for enabling bending.

  Hereinafter, the structure of the electric through-hole 120 included in the anisotropic conductive member 100 according to the first embodiment of the present invention shown in FIGS. 1a to 1c will be described in detail with reference to FIG. 1d. FIG. 1 d shows a state in which the first movable member 130 and the second movable member 140 of the anisotropic conductive member 100 according to the first embodiment of the present invention are assembled as the electric through-hole 120 in the elastic socket 110. It is a figure shown notionally.

  In the anisotropic conductive member 100 according to the first embodiment of the present invention, the electric through-hole portion 120 includes a first movable member 130 including an electrode contact portion 131 and a second movable member 140 including a substrate contact portion 141. The first movable member 130 and the second movable member 140 are all plate-like bodies. The first movable member 130 is located at a portion of the first movable member 130 that protrudes from the opening on the electrode contact portion 131 side of the through hole 111 of the elastic socket 110, and a portion that contacts one main surface 110 </ b> A of the elastic socket 110. A first arm portion 133 provided to have the first arm portion 133. The second movable member 140 is located at a portion of the second movable member 140 that protrudes from the opening on the substrate contact portion 141 side of the through hole 111 of the elastic socket 110, and a portion that contacts the other main surface 110B of the elastic socket 110. A second arm portion 143 provided to include the second arm portion 143.

  The first movable member 130 forms a sliding contact structure with the second sliding portion 144 included in the second movable member 140, and the first movable member 130 and the second movable member 140 are electrically connected. A first sliding portion 134 is provided that allows the relative position to be changed while maintaining contact. The second movable member 140 includes a second sliding portion 144 that constitutes a sliding contact structure with the first sliding portion 134.

  The first movable member 130 and the second movable member 140 are arranged such that one main surface 134A of the first sliding portion 134 and one main surface 144A of the second sliding portion 144 face each other. It is disposed in a through hole 111 formed in the elastic socket 110. These two opposing surfaces serve as sliding surfaces to form a sliding contact structure. With this sliding contact structure, the first movable member 130 and the second movable member 140 can change the relative positions in the thickness direction of the elastic socket 110 while maintaining an electrical connection.

  In the first movable member 130 according to the first embodiment of the present invention, the first arm portion 133 and the first sliding portion 134 have a shape obtained by processing one plate material, and are electrode contact portions. 131 also has a shape obtained by processing this one plate material. Moreover, in the 2nd movable member 140 which concerns on 1st embodiment of this invention, the 2nd arm part 143 and the 2nd sliding part 144 have a shape obtained by processing another board | plate material. The substrate contact portion 141 also has a shape obtained by processing this another plate material.

  In the anisotropic conductive member 100 according to the first embodiment of the present invention, as shown in FIG. 1d, the first arm portion 133 provided in the first movable member 130 bends a part of one plate material. It has a shape obtained by processing. The first arm portion 133 includes a portion that is orthogonal to the main surface of the first sliding portion 134 and extends in opposite directions with respect to the main surface. That is, as shown in FIG. 1d (c), the first arm portion 133 and the first slide are formed so as to form a crank shape when viewed from a direction parallel to the normal line of the main surface of the elastic socket 110. The shape of the moving part 134 is configured.

  In the anisotropic conductive member 100 according to the first embodiment of the present invention, as shown in FIG. 1d, the second arm portion 143 provided in the second movable member 140 is a part of another plate material. Has a shape obtained by bending. The second arm portion 143 includes a portion that is orthogonal to the main surface of the second sliding portion 144 and extends in opposite directions with respect to the main surface. That is, as shown in FIG. 1d (c), the second arm portion 143 and the second sliding member are formed so as to form a crank shape when viewed from a direction parallel to the normal line of the main surface of the elastic socket 110. The shape of the moving part 144 is configured.

  Here, in the anisotropic conductive member 100 according to the first embodiment of the present invention, the first arm portion 133 and the second arm portion 143 are suppressed from rotating with respect to the through hole 111 of the elastic socket 110. ing. In the anisotropic conductive member 100 according to the first embodiment of the present invention, the electrode contact portion 131 is integral with the first arm portion 133, and the electrode contact portion 131 is also formed of a plate-like body. The shape when the through-hole 111 of the elastic socket 110 is viewed from a direction parallel to the central axis of the through-hole 111 (referred to as “the cross-sectional shape of the through-hole” in this specification. The same applies to the through-holes of other members. ) To be rectangular, the rotation of the first arm portion 133 and the second arm portion 143 may be suppressed, or the electrode contact portion side plate member (rigid socket) 150 to be described later may penetrate. You may suppress that the 1st arm part 133 rotates by making the cross-sectional shape of the hole 151 into a rectangle.

  Furthermore, in the anisotropic conductive member 100 according to the first embodiment of the present invention, the sliding surface 134A of the first sliding portion 134 and the second arm portion 143 connected to the first arm portion 133 are provided. Since the sliding surface 144A of the second sliding portion 144 to be coupled is opposed, both the first movable member 130 and the second movable member 140 are arm portions (the first arm portion 133 and the second movable portion 140). In the case where the arm portion 143) is provided, if the rotation of at least one arm portion is suppressed, the rotation of the other arm portion is also suppressed, but by making the cross-sectional shape of the through hole 111 of the elastic socket 110 rectangular. If the rotation of the arm portion is suppressed, it is preferable because both the arm portions are more reliably suppressed from rotating. In the following description of the shape of the arm portion (first arm portion 133 and / or second arm portion 143), as an example, the case where the cross-sectional shape of the through hole 111 of the elastic socket 110 is rectangular will be described. In the anisotropic conductive member 100 according to the first embodiment of the present invention, since the second arm portion 143 has the same shape as the first arm portion 133, the first arm portion 133 is described as an example. To do. In addition, in 1st embodiment of this invention shown by FIG. 1a to 1c, while the cross-sectional shape of the through-hole 111 of the elastic socket 110 is a rectangle, the electrode contact part which has the through-hole 151 whose cross-sectional shape is a rectangle. A side plate member (rigid socket) 150 is also provided.

  As shown in FIG. 1d, the first arm portion 133 includes a portion that is orthogonal to the main surface of the first sliding portion 134 and extends in opposite directions with respect to the main surface. Here, referring to FIG. 1e, the first arm portion 133 and the through hole 111 formed in the elastic socket 110 provided in the anisotropic conductive member 100 according to the first embodiment of the present invention shown in FIG. This will be described in more detail. FIG. 1e shows the anisotropic conductive member 100 according to the first embodiment of the present invention shown in FIG. 1a cut parallel to the in-plane direction of the elastic socket 110 indicated by the cutting line EE in FIG. 1a. It is a figure which shows notionally a part of cross section obtained by cut | disconnecting in a surface. As shown in FIG. 1e, the cross-sectional shape of the through hole 111 of the elastic socket 110 is a rectangle, and the first arm portion 133 is orthogonal to the main surface of the first sliding portion 134 and is mutually opposite to the main surface. By providing a portion extending in the opposite direction, the arm portion has a portion that greatly protrudes from the peripheral edge portion of the opening of the through hole 111. As a result, when the anisotropic conductive member is used, the risk that the arm portion is buried in the through-hole 111 is greatly reduced, and when the electric through-hole 120 is disposed in the through-hole 111 of the elastic socket 110, it is adjacent. It becomes possible to arrange with a narrow pitch without contacting the arm portion. Further, since the plate-like first sliding portion 134 is enclosed in the through hole 111 having a rectangular cross-sectional shape, the first arm portion 133 formed integrally with the first sliding portion 134 is Since rotation with respect to the through-hole 111 is suppressed, contact between adjacent first arm parts 133 due to rotation of the first arm part 133 is also avoided.

  Here, the shape disclosed in Patent Document 1, that is, the case where the maximum outer diameter portion of the cylindrical movable member is a portion that compresses the elastic socket, and the first movable member 130 according to the first embodiment of the present invention. The case where the 1st arm part 133 with which it is equipped is a site | part which compresses the elastic socket 110 is compared by a figure. FIG. 1f is an enlarged view in the case where the pitch of the through holes is 0.3 mm as an example of the fine pitch.

  First, in the shape disclosed in Patent Document 1, the small-diameter portion of the movable member is a cylinder, and considering the strength, the diameter of the small-diameter portion needs to be about φ0.1 mm. In consideration of slidability, it is desirable that there is a slight clearance between the outer periphery of the small diameter portion and the inner diameter of the through hole. Furthermore, in order to avoid that the adjacent maximum outer diameter portions contact when moving, the distance between the maximum outer diameters needs to be about 0.05 mm. Considering these, in FIG. 1 f (b), the diameter of the through hole is φ0.11 mm and the maximum outer diameter is φ0.25 mm. In this case, the distance from the opening edge of the through hole to the maximum outer diameter is 0.07 mm.

  On the other hand, since the 1st sliding part 134 with which the 1st movable member 130 which concerns on 1st embodiment of this invention is provided consists of a plate-shaped object, if the plate | board thickness is 0.05 mm, it will be strong. Is sufficient. In FIG. 1 f (a), the plate thickness is 0.05 mm and the plate width is 0.15 mm. Similarly, it is desirable that there is a slight clearance between the outer side surface of the first sliding portion 134 made of a plate-like body and the inner side surface of the through-hole 111. Therefore, in FIG. The hole 111 had a short side of 0.11 mm and a long side of 0.16 mm. Similarly, the interval between the first arm parts 133 was set to 0.05 mm. In this case, as shown in FIG. 1 f (a), the first arm portion 133 is almost further outside the peripheral edge of the opening of the through hole 111, so that the first arm portion 133 extends from the opening edge of the through hole 111. The distance to the end is the length of the first arm 133, that is, 0.25 mm. Compared with the shape disclosed in Patent Document 1, the length is about 3.6 times. Further, if the distance from the opening edge of the through hole 111 to the end of the first arm part 133 is 0.25 mm with respect to the length of the short side of the through hole 111 of 0.11 mm, the first arm part 133 penetrates. There is almost no risk of being buried in the hole 111.

  Here, if the above difference is described mathematically, in the anisotropic conductive member disclosed in Patent Document 1, the portion that compresses the elastic socket 110 is the maximum outer diameter portion, and the through hole of the elastic socket 110 is formed. The distance from the center of 111 to the maximum outer diameter portion is ½ of 0.05 mm which is an interval for stably avoiding the risk of contact from ½ of the adjacent pitch of the electric penetration portion 120 at the maximum. In contrast to the subtracted value, in the anisotropic conductive member 100 according to the first embodiment of the present invention, the portion that compresses the elastic socket 110 is prevented from rotating from the first arm portion 133. The distance from the center of the through-hole 111 of the elastic socket 110 to the tip of the first arm portion 133 is the maximum, and the risk of contact with 1/2 of the plate thickness of the first arm portion 133 from the adjacent pitch is stable. In Becomes a value obtained by subtracting the 0.05mm is the distance to avoid, it is realized that the first movable member 130 can be greatly reduced risk of buried in the through hole 111 of the elastic socket 110.

Subsequently, as another modified example of the anisotropic conductive member 100 according to the first embodiment of the present invention, an anisotropic conductive member having a different shape of the first arm portion is used with reference to FIG. explain. The first arm portion 133 illustrated in FIGS. 1 a to 1 e includes a portion that is orthogonal to the main surface of the first sliding portion 134 and extends in opposite directions with respect to the main surface. On the other hand, the first arm portion 135 shown in FIG. 1g includes a portion that is orthogonal to the main surface of the first sliding portion 134 and extends in the same direction with respect to the main surface. Even if these parts are extended in the same direction, the length can be made to be approximately the same as the part of the first arm portion 133 shown in FIG.

  Here, when the first arm portion 135 shown in FIG. 1g has a portion extending in the same direction, when the anisotropic conductive member is used, that is, the first arm portion 135 is the main surface of the elastic socket 110. In a state where 110A is compressed, the first arm portion 135 and the first sliding portion 134 connected to the first arm portion 135 tend to incline in one direction due to the elastic restoring force of the elastic socket 110. Power is added. Therefore, when the first arm part 135 has a portion extending in the same direction, the sliding surface provided on the first sliding part 134 when an elastic restoring force is applied to the first arm part 135. The first sliding portion 134 and the second sliding portion are inclined such that 134A is inclined in a direction approaching the sliding surface 144A of the second sliding portion 144 disposed so as to be opposed to the second sliding portion 144. It is desirable to arrange 144. A state in which the first sliding portion 134 and the second sliding portion 144 are arranged in this manner is shown in FIG. 1h. FIG. 1 h shows that the first movable member 130 and the second movable member 140 of the anisotropic conductive member 100 according to another modification of the first embodiment of the present invention shown in FIG. It is a figure which shows notionally the state assembled as the electric penetration part 120.

  As shown in FIG. 1h, by arranging the first arm portion 135 in the direction extending in the plate thickness direction sliding surface side of the first sliding portion 134, the first arm portion 135 has an elastic restoring force. When it is added, the sliding surface 134A of the first sliding portion 134 tends to incline in a direction close to the sliding surface 144A of the second sliding portion 144. Therefore, when the anisotropic conductive member 100 is used, It is possible to prevent the sliding surfaces 134A and 144A from separating. At this time, the contact pressure due to the elastic restoring force is applied to the sliding surfaces 134A and 144A. Therefore, when external vibration is applied when the anisotropic conductive member 100 is used, the electric through-hole 120 due to external vibration. It is also possible to avoid a momentary interruption. In FIG. 1h, the end portion of the first sliding portion 134 and the second sliding portion are arranged so that the first sliding portion 134 and the second sliding portion 144 can be easily arranged in a predetermined direction. The tapered portions 136 and 146 are provided at the end portions of the 144, respectively, but the tapered portions 136 and 146 may not be provided.

  Moreover, the protrusion parts 137 and 147 may be provided on the sliding surfaces 134A and 144A provided in the anisotropic conductive member 100 according to the first embodiment of the present invention. By providing the projecting portions 137 and 147 on the sliding surfaces 134A and 144A, the sliding surfaces 134A and 144A are in point contact with the tip of the projecting portion and the plane of the other sliding surfaces 134A and 144A. 144A, even if dust or the like adheres to 144A, contact failure can be prevented. The protrusions 137 and 147 may be provided on one or both of the sliding surfaces 134A and 144A. If the protrusions 137 and 147 are provided on both sliding surfaces 134A and 144A, the sliding surfaces 134A and 144A are in point contact at two locations, so that the electrical connection is more stable and preferable. As an example, FIG. 1 i shows the appearance of the electric through-hole 120 including protrusions 137 and 147 on both the sliding surface 134A of the first sliding portion 134 and the sliding surface 144A of the second sliding portion 144.

  Furthermore, in the anisotropic conductive member 100 according to the first embodiment of the present invention, it is parallel to the plate thickness direction of the sliding portion of the through hole 111 of the elastic socket 110 in which the first sliding portion 134 is disposed. The hole length in the direction may be reduced. FIG. 1 j shows a case where the hole length in the plate thickness direction in the through hole 111 of the elastic socket 110 is reduced for the anisotropic conductive member illustrated in FIG. For the portion where the first sliding portion 134 is disposed, the hole length in the plate thickness direction of the through hole 111 of the elastic socket 110 is set to be approximately equal to the plate thickness of the first sliding portion 134, thereby providing elasticity. The shape of the opening on the first arm portion 133 side of the through-hole 111 of the socket 110 is reduced, and the risk that the first arm portion 133 is buried in the through-hole 111 is further reduced.

  In addition, the anisotropic conductive member 100 according to the first embodiment of the present invention has one of the main surfaces thereof facing the electrode contact portion 131 side main surface 110A of the elastic socket 110 and the through hole 111 of the elastic socket 110. You may provide the electrode contact part side plate-shaped member (rigid socket) 150 which consists of a rigid body provided with the through-hole 151 in the corresponding position. By providing the electrode contact portion side plate-like member (rigid socket) 150, the first movable member 130 is prevented from detaching the first arm portion 133, and the first movable member 130 is used when the anisotropic conductive member 100 is used. Is prevented from being detached from the elastic socket 110. At this time, as described above, the first arm portion 133 can be prevented from rotating by making the cross-sectional shape of the through hole 151 of the electrode contact portion side plate member (rigid socket) 150 rectangular. As described above, FIGS. 1 a to 1 c illustrate the case where the electrode contact portion side plate member (rigid socket) 150 having the through hole 151 having a rectangular cross-sectional shape is provided. An anisotropic conductive member 100 according to another embodiment described below may also include an electrode contact portion side plate member (rigid socket) 150.

  Subsequently, an anisotropic conductive member 200 according to a second embodiment of the present invention is shown in FIG. 2a. FIG. 2A is a diagram conceptually showing a part of a cross section in the thickness direction of the elastic socket of the anisotropic conductive member 200 according to the second embodiment of the present invention. The first movable member 230 included in the anisotropic conductive member 200 according to the second embodiment of the present invention has a portion where the first arm portion 233 extends in the plate width direction without being bent, and is electrically penetrated. When the parts are arranged, the adjacent electric penetration parts are arranged while being rotated by 90 degrees so that the portions extending in the plate width direction of the first arm part 233 do not contact each other. In the anisotropic conductive member 200 according to the second embodiment of the present invention, the second arm portion 243 provided in the second movable member 240 has the same configuration. Other structures in the anisotropic conductive member 200 according to the second embodiment of the present invention are the same as the structures of the anisotropic conductive member 100 according to the first embodiment of the present invention.

  Here, also in the anisotropic conductive member 200 according to the second embodiment of the present invention, the electrode contact portion is integral with the arm portion, and the electrode contact portion is also formed of a plate-like body. It is possible to prevent the first arm portion 233 from rotating by making the cross-sectional shape of the through hole of the rigid socket) rectangular, or by making the cross-sectional shape of the through hole of the elastic socket rectangular. The arm portion 233 may be prevented from rotating. When the cross-sectional shape of the through hole of the elastic socket is a rectangle, the cross-sectional shape of the adjacent through holes is preferably provided so as to be a rectangle rotated 90 degrees with respect to each other. As in the anisotropic conductive member according to the first embodiment of the present invention, the anisotropic conductive member shown in FIG. 2a has a rectangular cross section of the through hole of the elastic socket and a cross sectional shape. An electrode contact portion side plate member (rigid socket) having a rectangular through hole is also provided.

  FIG. 2b shows the first arm portion 233 provided in the anisotropic conductive member 200 according to the second embodiment of the present invention and the opening shapes of the plurality of through holes formed in the elastic socket. FIG. 2b shows the anisotropic conductive member 200 according to the second embodiment of the present invention shown in FIG. 2a with a cutting plane parallel to the in-plane direction of the elastic socket indicated by the cutting line H-H in FIG. 2a. It is a figure which shows notionally a part of cross section obtained by cut | disconnecting. As shown in FIG. 2b, also in the anisotropic conductive member 200 according to the second embodiment of the present invention, the first arm portion 233 protrudes greatly from the peripheral edge of the opening of the through hole, and the anisotropic conductive member 200 In use, the risk of the first arm portion 233 being buried in the through hole is greatly reduced, and when the electric through portion is disposed in the through hole of the elastic socket, the adjacent first arm portions 233 are in contact with each other. It is possible to arrange with a narrow pitch without doing.

  Here, as can be seen by comparing FIG. 1e and FIG. 2b, the range in which the rotation of the arm portion is allowed, that is, the angle at which the arm portion does not contact with the adjacent arm portion is greater for the arm shape of FIG. It is larger than the arm shape of FIG. Therefore, in the anisotropic conductive member 200 according to the second embodiment of the present invention, even if the arm portions 233 and 243 rotate to some extent, the risk that adjacent arm portions contact each other is sufficiently reduced.

  Further, in the anisotropic conductive member 200 according to the second embodiment of the present invention, similarly to the anisotropic conductive member according to the first embodiment of the present invention, a protrusion may be provided on the sliding surface. Alternatively, the hole length in the plate thickness direction of the through hole may be reduced in the portion where the first sliding portion is disposed.

  Subsequently, an anisotropic conductive member 300 according to a third embodiment of the present invention is shown in FIG. FIG. 3 a is a view conceptually showing a part of a cross section in the thickness direction of an elastic socket of an anisotropic conductive member 300 according to the third embodiment of the present invention. The movable member included in the anisotropic conductive member 300 according to the third embodiment of the present invention includes an electrode contact portion or a substrate contact portion on one of the first sliding portion and the second sliding portion. A slit 310 having a certain length is provided at the opposite end. Here, the width of the slit 310 is set to be slightly larger than the plate thickness of the other sliding portion not provided with the slit 310.

  Further, the first movable member and the second movable member are disposed in a through-hole formed in the elastic socket so that the first sliding portion and the second sliding portion are orthogonal to each other, Sliding between two inner surfaces parallel to the thickness direction of the elastic socket in the slit 310 provided in one of the one sliding portion and the second sliding portion and the main surface of the other sliding portion A sliding contact structure as a surface is provided. With this sliding contact structure, the first movable member and the second movable member can change the relative position in the thickness direction of the elastic socket while maintaining electrical connection. The external appearance and cross section of the electric penetration part with which the anisotropic conductive member 300 which concerns on 3rd embodiment of this invention is provided in FIG. 3b are shown.

  Here, also in the anisotropic conductive member 300 according to the third embodiment of the present invention, the cross-sectional shape of the through hole formed in the elastic socket is arbitrary, but the arm portion is rotated by the through hole of the elastic socket. In order to suppress this, it is desirable that the cross-sectional shape of the through hole is a cross shape. Moreover, similarly to the arm part of the anisotropic conductive member 100 according to the first embodiment of the present invention, the arm part may have parts extending in opposite directions, or parts extending in the same direction. You may have. Alternatively, like the arm portion of the anisotropic conductive member 200 according to the second embodiment of the present invention, the arm portion has a portion extending in the plate width direction, while rotating the adjacent electric penetration portion by 90 degrees. You may arrange. Even when the through hole of the elastic socket has a cross shape, the electric through portions can be arranged while being rotated 90 degrees. Further, the first sliding portion and the second sliding portion are arranged so as to be orthogonal to each other, and two inner side surfaces parallel to the thickness direction of the elastic socket in the slit 310 provided on one side become the sliding surfaces. Therefore, even if one of the first sliding part or the second sliding part is inclined with respect to the other sliding part, there is a low risk that the sliding surface constituting the sliding contact structure is separated, In that respect, the shape of the arm portion can be arbitrarily selected. 3A and 3B illustrate, as an example, an anisotropic conductive member 300 in which a slit 310 is provided in the first sliding portion and the arm portions have portions extending in opposite directions. You may provide a slit in the 2nd sliding part side.

  Furthermore, in order to suppress the rotation of the arm portion in the anisotropic conductive member 300 according to the third embodiment of the present invention, as shown in FIG. 3c, the thickness of the sliding portion 330 including the slit 320 is increased. Then, the rotation of the other sliding portion may be suppressed by the parallel inner surfaces of the slit 320. In particular, when the arm portion has a portion extending in the plate width direction and the adjacent electric penetration portions are arranged while being rotated by 90 degrees, as described above, the arm portion contacts the adjacent arm portion even if it is rotated to some extent. Therefore, if the rotation of the other sliding portion is suppressed by the parallel inner surfaces of the slit 320, the risk of contact between adjacent arm portions is sufficiently avoided. be able to. The slit 320 may be in either the first sliding portion or the second sliding portion, but the plate thickness of the electrode contact portion is thinner from the viewpoint of increasing the contact pressure to the electrode attached to the inspection object. Therefore, the slit 320 is preferably provided on the second sliding portion side. As an example, FIG. 3 c illustrates an embodiment in which the second sliding portion 330 includes a slit 320 and the second sliding portion 330 is thickened to suppress the rotation of the first sliding portion. ing. FIG. 3 c illustrates a case where the arm portion has a portion extending in the plate width direction and the adjacent electric through portions are arranged while being rotated by 90 degrees. As shown in FIG. 3c, the cross section of the sliding portion in the electric through portion is rectangular, and the rotation of the arm portion can be suppressed without making the through hole of the elastic socket into a cross shape.

  Alternatively, as in the second movable member 340 shown in FIG. 3d, the slit 321 may be formed by bending a part of the plate so that one main surface of the one plate has a facing portion. Good. In this case, the 2nd sliding part 341 has two sliding surfaces which consist of the part which the main surface opposes. Here, in the second movable member 340 illustrated in FIG. 3D, the substrate contact portion 342 and the second arm portion 343 are formed integrally with the second sliding portion 341, so that the second arm portion 343 is The detailed structure of the movable member including the slits formed by bending a part of one plate member is provided with four portions that do not include the bent point of the bent plate member and should contact the main surface of the elastic socket. It is not limited to. For example, as in a fifth embodiment of the present invention to be described later, the electrode contact portion is a separate member from the first arm portion, and the first arm portion and the first sliding portion are one member. When it consists of, you may bend | fold so that a 1st arm part may include the bending point of a board | plate material.

  Also in the anisotropic conductive member 300 according to the third embodiment of the present invention, a protrusion may be provided on the sliding surface provided in the anisotropic conductive member. In the anisotropic conductive member 300 according to the third embodiment of the present invention, when the protrusion is provided on the sliding surface, the slit provided in one of the first sliding portion and the second sliding portion. A protrusion may be provided in the vicinity of the opening ends of the two inner side surfaces parallel to the thickness direction of the elastic socket. The protrusion may be provided on one inner surface, but on each of the two inner surfaces of the slit so as to be in point contact with the two principal surfaces of the sliding portion which is the sliding surface of the other sliding portion. It is desirable to provide it. As an example, FIG. 3e shows the external appearance of an electrical penetration portion in which protrusions 350 and 351 are provided on each of two inner surfaces of the slit.

  Subsequently, an electric penetration portion 410 of an anisotropic conductive member according to the fourth embodiment of the present invention is shown in FIG. 4a. FIG. 4A is a diagram illustrating an external appearance of the electric penetration portion 410 of the anisotropic conductive member according to the fourth embodiment of the present invention.

  In the anisotropic conductive member according to the fourth embodiment of the present invention, both the first sliding portion and the second sliding portion are fixed at the end opposite to the electrode contact portion and the substrate contact portion. With a slit of length. Similar to the anisotropic conductive member 300 according to the third embodiment of the present invention, the width of the slit is set slightly larger than the plate thickness of the other sliding portion.

  Furthermore, the first movable member and the second movable member are the same as the anisotropic conductive member 300 according to the third embodiment of the present invention, and the first sliding portion and the second sliding portion. Are disposed in the through holes formed in the elastic socket so as to be orthogonal to each other, and a part of the other movable member slides in each slit provided in the first sliding portion and the second sliding portion. By being arranged so as to enter while moving, two sliding contact structures are provided in which the two inner side surfaces of each slit and the main surface of the other sliding portion are sliding surfaces. With these sliding contact structures, the relative position of the first movable member and the second movable member can be varied in the thickness direction of the elastic socket while maintaining electrical connection. As described above, since the anisotropic conductive member according to the fourth embodiment of the present invention includes two sliding contact structures, the sliding surface related to one sliding contact structure is momentarily separated by, for example, external vibration. However, it is possible to maintain conduction. The other structure of the anisotropic conductive member according to the fourth embodiment of the present invention is the same as the structure of the anisotropic conductive member 300 according to the third embodiment of the present invention.

  Here, also in the anisotropic conductive member according to the fourth embodiment of the present invention, the shape of the through hole of the elastic socket is arbitrary, but with the anisotropic conductive member 300 according to the third embodiment of the present invention, Similarly, when the arm portion is prevented from rotating by the through hole of the elastic socket, it is desirable that the shape of the through hole is a cross shape. Moreover, similarly to the arm part of the anisotropic conductive member 100 according to the first embodiment of the present invention, the arm part may have parts extending in opposite directions, or parts extending in the same direction. You may have. Alternatively, like the arm portion of the anisotropic conductive member 200 according to the second embodiment of the present invention, the arm portion has a portion extending in the plate width direction, while rotating the adjacent electric penetration portion by 90 degrees. You may arrange. FIG. 4 a illustrates, as an example, an electrical penetration portion of an anisotropic conductive member having portions where the arm portions extend in directions opposite to each other.

  Furthermore, in the anisotropic conductive member according to the fourth embodiment of the present invention, a protrusion may be provided in the vicinity of the opening end portions of the two inner side surfaces of the slit. The protrusions may be provided in any one of the slits, but are preferably provided in both slits in order to obtain stable sliding contact. As an example, FIG. 4B shows an external appearance of the electric through-hole 410 provided with protrusions 420, 421, 423, and 424 in the vicinity of the opening ends of the two inner side surfaces of both slits.

  Subsequently, an anisotropic conductive member 500 according to a fifth embodiment of the present invention is shown in FIG. 5a. FIG. 5a is a view conceptually showing a part of a cross section in the thickness direction of an elastic socket of an anisotropic conductive member 500 according to a fifth embodiment of the present invention.

  In the anisotropic conductive member 500 according to the fifth embodiment of the present invention, the electrode contact portion of the first movable member 510 is a member different from the first arm portion. The first arm portion is made of the same member as the first sliding portion. Therefore, the first movable member according to the fifth embodiment of the present invention includes a member 511 constituting the electrode contact portion (also referred to as an “electrode contact member” in this specification) 511 and other members 512. Consists of two members. The configuration according to the fifth embodiment of the present invention can be applied as a modification in any of the first embodiment, the second embodiment, the third embodiment, and the fourth embodiment of the present invention. It is. FIG. 5 a shows, as an example, a case where the first movable member 510 of the anisotropic conductive member according to the first embodiment of the present invention is composed of the two members 511 and 512 described above.

  The manufacturing method of the elastic socket provided in the anisotropic conductive member 500 according to the fifth embodiment of the present invention is arbitrary, but when the elastic socket is molded by a mold, the shrinkage rate when the elastic body is molded is Since it is larger than resin, it is difficult to mold with high accuracy compared to resin. On the other hand, the electrode contact portion side plate member (rigid socket) 520 can be processed with high precision, and the through hole of the electrode contact portion side plate member (rigid socket) 520 faces the electrode attached to the inspection object. Can be arranged with high accuracy.

  The anisotropic conductive member 500 according to the fifth embodiment of the present invention includes the first conductive member 500 disposed in the through hole even when pitch deviation occurs in the through hole of the elastic socket for reasons such as processing accuracy during manufacturing. Since the sliding portion and the first arm portion (other member 512) coupled thereto and the electrode contact member 511 are separated, the electrode contact member 511 is in the in-plane direction of the elastic socket with respect to the first arm portion. The end of the electrode contact member 511 contacting the electrode attached to the inspection object can be arranged with high accuracy at a position facing the electrode.

  In order to prevent the separated electrode contact member 511 from being separated from the other members 512 including the first arm portion, the anisotropic conductive member is an electrode contact portion side plate-like member (as shown in FIG. 5a). It is desirable that the electrode contact member 511 is provided with a locking projection 513 for locking to the periphery of the opening of the through hole of the electrode contact portion side plate member (rigid socket) 520. Specifically, in the electrode contact member 511 forming the electrode contact portion, the electrode contact portion side plate-like member (rigidity) is protruded from the end portion of the through hole of the electrode contact portion side plate-like member (rigid socket) 520 on the elastic socket side. Socket) 520 has a locking projection 513 protruding in a direction parallel to the in-plane direction of the main surface. In this case, the other member 512 including the first arm portion is an opening of the through hole on the main surface on the side facing the elastic socket in the electrode-side contact portion plate member (rigid socket) 520 through the locking protrusion 513. It is latched by the peripheral part.

  In the anisotropic conductive member 500 according to the fifth embodiment of the present invention, the other member including the first sliding portion disposed in the through hole of the elastic socket and the first arm portion connected thereto. Since 512 and the electrode contact member 511 are separated, rotation of the first arm portion cannot be suppressed even if the through hole of the electrode contact portion side plate member (rigid socket) 520 is rectangular. Therefore, it is preferable to prevent the first arm portion from rotating by making the through hole of the elastic socket rectangular or cross-shaped. Alternatively, when the configuration according to the fifth embodiment of the present invention is applied as a modification of the third embodiment of the present invention, the thickness of the second sliding portion provided with the slit is increased, and the slit The rotation of the first arm portion may be suppressed by the parallel inner surfaces facing each other.

  Further, in the anisotropic conductive member 500 according to the fifth embodiment of the present invention, since the electrode contact member 511 is separated from the first arm portion, the electrode contact member 511 is not a plate body but a cylindrical body. It may be. In the case of a cylindrical body, a portion of the electrode contact member 511 that comes into contact with the electrode attached to the inspection object can be formed into a three-dimensionally processed shape called a crown cut. Since the crown cut is a multi-point contact, it is suitable when a high reliability is required for the portion in contact with the electrode. In the anisotropic conductive member 500 according to the fifth embodiment of the present invention, the first arm portion is rotated by the through hole of the elastic socket or the inner surface of the slit provided in the second sliding portion. Therefore, there is no problem even if the cylindrical electrode contact member 511 freely rotates in the through hole of the electrode contact portion side plate member (rigid socket) 520.

  Further, the anisotropic conductive member according to another modification of the first embodiment of the present invention shown in FIG. 1h, that is, the arm part 135 has a portion extending in the same direction, and the arm part 135 has an elastic socket. In the anisotropic conductive member in which the movable member is disposed in the through hole of the elastic socket so that the sliding portion is inclined in the direction in which the sliding surface approaches when compressed, the first sliding portion and the first sliding portion connected thereto When the arm part 135 and the electrode contact member 511 are separated and the electrode contact member 511 is a cylindrical body, the central part of the first arm part 135, that is, the end of the electrode contact member 511 side other than the bent part is provided. A protruding portion 514 may be provided in part, and a gap may be provided between the bent portion of the first arm portion 135 and the end surface of the electrode contact member 511 on the arm portion side. In this way, when the gap is provided between the bent portion of the first arm portion 135 and the end surface of the electrode contact member 511 on the first arm portion side, the electrode contact member 511 is subjected to an external force, that is, when an anisotropic conductive member is used. The first arm 135 is not obstructed to incline in a predetermined direction by the elastic restoring force of the elastic socket, even if it is inclined in any direction by contacting with the electrode attached to the inspection object. Since the sliding surface of one sliding part is inclined in the direction approaching the sliding surface of the second sliding part, the risk of the sliding surface separating when using an anisotropic conductive member is reduced. Can do. FIG. 5b illustrates an anisotropic conductive member 501 according to a modification of the fifth embodiment of the present invention in which a protrusion 514 is provided at the center of the first arm portion. The protruding portion 514 may be provided near the center of the end surface on the first arm portion 135 side of the electrode contact member 511.

  Here, in the anisotropic conductive member 500 according to the fifth embodiment of the present invention, the electrode contact member 511 is separated from the other members 512 constituting the first movable member. The other member 512 constituting the first sliding portion and the second sliding portion are inserted into the through-hole of the elastic socket, and the electrode contact member 511 is separated from the electrode contact portion side plate member (rigid socket). In the state where the electrode contact portion 511 is directed downward in the vertical direction so that the electrode contact member 511 does not fall out of the through hole of the electrode contact portion side plate member (rigid socket) during assembly. It is assumed that the elastic socket into which the first sliding portion and the second sliding portion are inserted is combined with the electrode contact portion side plate member (rigid socket).

  Subsequently, an anisotropic conductive member 600 according to a sixth embodiment of the present invention is shown in FIGS. 6a, 6b and 6c. 6a, 6b and 6c are diagrams conceptually showing a part of a cross section in the thickness direction of an elastic socket of an anisotropic conductive member 600 according to a sixth embodiment of the present invention. 6a and 6b show cross sections in different directions orthogonal to each other, and FIG. 6c shows a cross section of the anisotropic conductive member 600 when the anisotropic conductive member 600 is used, that is, in the state where the IC to be inspected is being inspected. Is shown.

  The electric through-hole included in the anisotropic conductive member 600 according to the sixth embodiment of the present invention includes a slit in one movable member 620, and the first movable member 610 and the second movable member 620 are orthogonal to each other. It is similar to the anisotropic conductive member 300 according to the third embodiment of the present invention in that it is arranged as described above. In the anisotropic conductive member 600 according to the sixth embodiment of the present invention, the first sliding portion 611 provided in the first movable member 610 is integrated with the first arm portion 612 and the electrode contact portion 613. Yes. That is, the first sliding portion 611 of the first movable member 610 has a sliding surface 611 </ b> A constituted by the main surface of the plate material that forms the first arm portion 612 and the electrode contact portion 613. The first movable member included in the anisotropic conductive member 600 according to the sixth embodiment of the present invention includes the anisotropic conductive members 100 to 500 according to the first to fifth embodiments of the present invention. Since the configuration is different from that of the first movable member provided, it will be described in detail below.

  First, the purpose of the structure of the anisotropic conductive member 600 according to the sixth embodiment of the present invention will be described. As described above, the first and second sliding portions are arranged in the through holes of the elastic socket so as to be orthogonal to each other, and the anisotropic embodiments according to the third and fourth embodiments of the present invention In the conductive members 300 and 400, it is desirable that the through hole of the elastic socket has a cross shape. However, in order to manufacture such an elastic socket with a mold, it is necessary to process the mold into a cross shape, and in order to process into a fine pitch, a high-precision processing machine is required, and the mold production cost is high. Become.

  Therefore, the anisotropic conductive member 600 according to the sixth embodiment of the present invention includes an electric through-hole portion in which the first sliding portion 611 and the second sliding portion 621 are arranged so as to be orthogonal to each other. By exposing one sliding portion 611 from the through hole of the elastic socket, only the second sliding portion 621 can be disposed in the through hole of the elastic socket, and the through hole of the elastic socket can be rectangular. It is a thing.

  An anisotropic conductive member 600 according to the sixth embodiment of the present invention will be described in detail with reference to FIGS. 6a, 6b and 6c. Here, also in the anisotropic conductive member 600 according to the sixth embodiment of the present invention, the slit may be provided in either the first movable member 610 or the second movable member 620, but FIGS. In the anisotropic conductive member shown by 6c, the case where the slit was provided in the 2nd movable member 620 is illustrated.

  As shown in FIGS. 6a, 6b, and 6c, also in the anisotropic conductive member 600 according to the sixth embodiment of the present invention, the second movable member 620 includes the second sliding portion 621, and the substrate contact portion. A second arm portion is provided at the end of the second sliding portion 621 side. Further, the end of the second sliding portion 621 is provided with a slit having a certain length. Here, the width of the slit is set to be slightly larger than the thickness of the plate material constituting the electrode contact portion 613 and the first arm portion 612. On the other hand, as described above, the first movable member 610 includes the electrode contact portion 613 and the first arm portion 612 provided at one end thereof, and the first sliding portion 611 includes the electrode contact portion. The unit 613 and the first arm unit 612 are integrated.

  Further, the first movable member 610 and the second movable member 620 are configured such that the electrode contact portion 613 of the first movable member 610 and the second sliding portion 621 of the second movable member 620 are orthogonal to each other. In addition, the electrode contact portion 613 is disposed in a through hole formed in the electrode contact portion side plate member (rigid socket), and the second sliding portion 621 is disposed in a through hole formed in the elastic socket. A sliding contact structure is provided by the two inner side surfaces 621A and 621B of the slit provided in the sliding portion 621 and a sliding surface having a part thereof as the main surface of the electrode contact portion 613. With such a sliding contact structure, the first movable member 610 and the second movable member 620 can change the relative position in the thickness direction of the elastic socket while maintaining electrical connection.

  Here, the first movable member 610 provided with the electrode contact portion 613 is separated from the elastic socket in the same manner as the first movable member 510 of the anisotropic conductive member 500 according to the fifth embodiment of the present invention. As with the anisotropic conductive member 500 according to the fifth embodiment of the present invention, the second sliding part 620 is inserted into the through hole of the elastic socket, and the electrode contact part 613 is separately provided. It is assumed that the elastic socket into which the second sliding portion 621 is inserted is combined with the electrode contact portion side plate member (rigid socket) by being inserted into the through hole of the electrode contact portion side plate member (rigid socket). At this time, in order to facilitate the combination, a tapered portion is provided in the opening of the slit provided in the second sliding portion 621 shown in FIG. 6B, but this tapered portion may not be provided.

  In addition, since the first movable member 610 including the electrode contact portion 613 is separated from the elastic socket, the rotation of the first arm portion 612 is not suppressed even if the through hole of the elastic socket is rectangular. It is preferable that the through hole of the contact portion side plate-like member (rigid socket) is rectangular. Or the plate | board thickness of the 2nd sliding part 621 provided with a slit may be thickened, and rotation of the 1st arm part 612 may be suppressed by the inner surface which faces the slit in parallel.

  Here, also in the anisotropic conductive member 600 according to the sixth embodiment of the present invention, the shape of the first arm portion 612 and the shape of the second arm portion can be arbitrarily selected. Further, similarly to the anisotropic conductive member 300 according to the third embodiment of the present invention, a protrusion is provided on the sliding surface composed of the two inner side surfaces 621A and 621B of the slit provided in the second sliding portion 621. It may be done.

  Next, a case where a slit is provided in the first movable member, which is one of modifications of the sixth embodiment of the present invention, will be described with reference to FIG. 6d. FIG. 6d is a diagram conceptually showing a part of a cross section in the thickness direction of the elastic socket of the anisotropic conductive member 601 according to one of the modifications of the sixth embodiment of the present invention.

  Also in the anisotropic conductive member 600 according to the sixth embodiment of the present invention, the shape of the first arm portion 612 and the shape of the second arm portion can be arbitrarily selected, but the electrode contact portion is slit. In the case where the first arm portion is bent at the electrode contact portion (the notch 614 provided on the first arm portion 612 in the electrode contact portion 613 shown in FIG. 6a). ), The plate width of the portion is narrowed, and the plate width may be insufficient to provide the slit. In such a case, similarly to the anisotropic conductive member 200 according to the second embodiment of the present invention, the arm portion has a portion extending in the plate width direction, and the adjacent electric penetration portion is rotated by 90 degrees. While arranging. Furthermore, if the adjacent electric through-holes are arranged while being rotated by 90 degrees, the electrode contact portions 613 are also arranged while being rotated by 90 degrees, so that the plate width direction of the electrode contact parts 613 can be increased. It becomes easier to provide a slit in the contact portion 613. FIG. 6d illustrates the anisotropic conductive member 601 when the first arm portion has a portion extending in the plate width direction and the electrode contact portions 613 are arranged while being rotated by 90 degrees.

  Since it is possible to provide a slit in the first movable member 610 as described above, as shown in FIG. 6d, the two inner side surfaces 611B and 611C of the slit provided in the first movable member 610 are connected to one of the slits. The first movable member 610 and the second movable member 620 can change the relative position in the thickness direction of the elastic socket while maintaining electrical connection by the sliding contact structure as the sliding surface. It is. In addition, the taper part is provided also in opening of the slit with which the 1st movable member 610 shown in FIG. Further, a protrusion may be provided on the sliding surface of the slit provided in the first movable member 610.

  Subsequently, an anisotropic conductive member 700 according to a seventh embodiment of the present invention is shown in FIG. FIG. 7 is a view conceptually showing a part of the cross section in the thickness direction of the elastic socket of the anisotropic conductive member 700 according to the seventh embodiment of the present invention.

  In the anisotropic conductive member 700 according to the seventh embodiment of the present invention, the first movable member includes the electrode contact portion and the arm portion of the anisotropic conductive member 600 according to the sixth embodiment of the present invention. A first arm portion provided at one end thereof, and the first sliding portion is integrated with the electrode contact portion and the first arm portion. The anisotropic conductive member 700 according to the seventh embodiment of the present invention includes a slit in the plate material constituting the first movable member, and the second movable member slits in the plate material constituting the second sliding portion. The first movable member and the second movable member include the first movable member and the second sliding portion, similarly to the anisotropic conductive member 600 according to the sixth embodiment of the present invention. The electrode contact part is placed in the through hole formed in the electrode contact part side plate member (rigid socket) and a part of the second sliding part is placed in the through hole formed in the elastic socket so as to be orthogonal to each other. And a part of the other movable member is arranged to slide into each slit provided in the plate member constituting the first movable member and the plate member constituting the second sliding portion. By sliding the two inner side surfaces of each slit and the main surface of the other plate material With two sliding contact structures.

  With these sliding contact structures, the relative position of the first movable member and the second movable member can be changed in the thickness direction of the elastic socket while maintaining electrical connection. The anisotropic conductive member 700 according to the seventh embodiment of the present invention has two sliding contact structures like the anisotropic conductive member 400 according to the fourth embodiment of the present invention. Even if the sliding surface of one sliding contact structure is momentarily separated due to vibration or the like, it is possible to maintain conduction. Also in the anisotropic conductive member 700 according to the seventh embodiment of the present invention, the shape of the first arm portion and the shape of the second arm portion can be arbitrarily selected. FIG. 7 shows a structure in which slits are easily provided in the first movable member, and the first arm portion has a portion extending in the plate width direction, and the anisotropic conductivity when the electrode contact portions are arranged while being rotated by 90 degrees. The sex member is illustrated. Further, similarly to the anisotropic conductive member 400 according to the fourth embodiment of the present invention, the sliding surface of the slit provided in the first movable member and the sliding surface of the slit provided in the second sliding portion are provided. A protrusion may be provided. Similar to the anisotropic conductive member 600 according to the sixth embodiment of the present invention, the opening of the slit illustrated in FIG. 7 is provided with a tapered portion.

  Here, in the anisotropic conductive member 700 according to the seventh embodiment, as shown in FIG. 7, a part of the second sliding portion is disposed in the through hole of the elastic socket, The portion of the sliding portion provided with the slit protrudes from the electrode contact portion side main surface of the elastic socket, and a part thereof is included in the through hole of the electrode contact portion side plate member (rigid socket). Therefore, in the anisotropic conductive member 700 according to the seventh embodiment of the present invention, the through hole of the elastic socket can be rectangular. On the other hand, it is preferable that the through hole of the electrode contact portion side plate-like member (rigid socket) has a cross shape or has a countersink portion for enclosing a part of the second sliding portion.

  Subsequently, an anisotropic conductive member 800 according to an eighth embodiment of the present invention is shown in FIGS. 8a and 8b. FIG. 8A is a view conceptually showing a part of a cross section in the thickness direction of the elastic socket of the anisotropic conductive member 800 according to the eighth embodiment of the present invention, and FIG. It is the figure which showed a part of cross section.

  As shown in FIGS. 8a and 8b, also in the anisotropic conductive member 800 according to the eighth embodiment of the present invention, the first movable member 810 is exposed from the through hole of the elastic socket, and the first movable member 810 is exposed. Includes an electrode contact portion 811 and a first arm portion 812 provided at one end thereof, and the first sliding portion 813 is integrated with the electrode contact portion 811 and the first arm portion 812. ing. Therefore, only the second sliding portion 821 is disposed in the through hole of the elastic socket.

  Here, the first sliding portion 813 and the second sliding portion 821 are one main surface of the first sliding portion 813 in the same manner as the anisotropic conductive member according to the first embodiment of the present invention. 813A and one main surface 821A of the second sliding portion 821 are arranged to face each other. Thus, when the 1st sliding part 813 and the 2nd sliding part 821 are arrange | positioned, an anisotropically conductive member is equipped with the electrode contact part side plate-shaped member (rigid socket), and in the through-hole Even if the electrode contact portion 811 is disposed, the electrode contact portion 811 can be slightly inclined in the through hole, and it is difficult to prevent the first sliding portion 813 and the second sliding portion 821 from separating. is there.

  Therefore, in the anisotropic conductive member 800 according to the eighth embodiment of the present invention, the second sliding portion 821 is provided with a guide portion 822, and a part of the first sliding portion 813 is included in the guide portion 822. As described above, the first sliding portion 813 and the second sliding portion 821 are arranged. With such a configuration, even when the electrode contact portion 811 is inclined, the first sliding portion 813 and the second sliding portion 821 are prevented from being separated.

  As shown in FIG. 8b, the guide portion 822 is prepared in a state where the plate material constituting the second sliding portion 821 is extended in the plate width direction from the other portions, and the extended portion is It is formed by bending. Specifically, the cross section of the second sliding portion 821 including the guide portion 822 has an approximately box shape (C shape) as shown in FIG. Since the inner side surfaces 822A, 822B, 822C, and 822D of the guide part 822 are also part of the second sliding part 821, even if the electrode contact part 811 is inclined, the first sliding part 813 and the second sliding part The sliding contact structure of the moving part 821 is maintained.

  Furthermore, the first arm portion 812 is prevented from rotating with respect to the second sliding portion 821 by the guide portion 822 provided in the second sliding portion 821 and the first arm portion 812 is used. Is arranged so that the end on the electrode contact portion 811 side faces the end on the substrate contact portion side of the guide portion 822 provided on the second sliding portion 821, and thus the first arm portion 812. Is locked to the guide portion 822, and the guide portion 822 prevents the first movable member 810 from being detached from the elastic socket. Therefore, the anisotropic conductive member 800 according to the eighth embodiment of the present invention may not include the electrode contact portion side plate member (rigid socket). FIG. 8a illustrates a case where the electrode contact portion side plate member (rigid socket) is not provided.

  Here, the second movable member 820 in which the guide portion 822 is provided in the second sliding portion 821 and the first movable member 810 in which the first arm portion 812 is locked to the guide portion 822 are referred to as an elastic socket. In order to assemble, the first movable member 810 is first inserted into the guide portion 822 from the electrode contact portion 811 side, and then the second sliding portion 821 is inserted into the through hole of the elastic socket from the substrate contact portion side. Is assumed. Accordingly, if the second movable member 820 includes the second arm portion, it is difficult to place the second sliding portion 821 in the through hole of the elastic socket. It is preferable that the second arm portion is not provided. Specifically, it may be a structure in which the substrate contact portion is soldered to the through hole of the inspection substrate, as in an anisotropic conductive member 900 according to a ninth embodiment of the present invention described later.

  Further, the shape of the first arm portion 812 can be arbitrarily selected as in the other embodiments. However, the guide portion 822 is considerably small at a fine pitch, and it is difficult to bend accurately. The box shape of the portion 822 is assumed to be slightly deformed, and the first movable member 810 may rotate to some extent within the guide portion 822. Therefore, the first arm portion 812 is an anisotropic conductive member according to the second embodiment of the present invention so that adjacent arm portions do not contact each other even if the first arm portion 812 rotates to some extent. As in the case of 200, it is desirable that the arm portion has a portion extending in the plate width direction and that the adjacent electric through-hole portions are arranged while being rotated by 90 degrees. 8a and 8b, the first arm portion 812 has a portion extending in the plate width direction, the electrode contact portions 811 are arranged while being rotated by 90 degrees, and the second movable member 820 has the second arm portion. An anisotropic conductive member is illustrated when the substrate contact portion is soldered to a through hole provided in the inspection substrate without being provided.

  Next, anisotropic conductive members 900 to 1100 according to the ninth embodiment to the eleventh embodiment of the present invention will be described. These embodiments can be applied as modifications to all of the first to eighth embodiments of the present invention. In the following description, the first embodiment of the present invention is taken as an example. The case where it applies to an anisotropic conductive member is demonstrated.

  First, an anisotropic conductive member 900 according to a ninth embodiment of the present invention is shown in FIG. FIG. 9 is a view conceptually showing a part of the cross section in the thickness direction of the elastic socket of the anisotropic conductive member 900 according to the ninth embodiment of the present invention.

  In the anisotropic conductive member 900 according to the ninth embodiment of the present invention, the inspection substrate has a through hole, and the substrate contact portion is soldered to the through hole.

  In the inspection of the IC in which the anisotropic conductive member 900 according to the ninth embodiment of the present invention is used, in addition to the function test for inspecting the function of the IC, by continuously operating the IC at a constant high temperature, There is a burn-in test that screens initial defects in ICs. Since the burn-in test requires a long inspection time, a large number of anisotropic conductive members are generally used to select a large number of ICs in a single inspection. In order to attach a large number of anisotropic conductive members to one inspection substrate, it is desirable that the anisotropic conductive members can be soldered. The anisotropic conductive member 900 according to the ninth embodiment of the present invention is such that the substrate contact portion can be soldered to the through hole of the inspection substrate in order to cope with such a burn-in test. Since the function test has a short inspection time and the anisotropic conductive member is used many times in a short time, it is desirable that the function test can be easily replaced when the anisotropic conductive member deteriorates. The anisotropic conductive members 100 to 700 according to the first to seventh embodiments of the present invention can be easily replaced because the board contact portions are not soldered.

  Here, in the anisotropic conductive member 900 according to the ninth embodiment of the present invention in which the substrate contact portion is soldered to the through hole, the substrate contact portion is aligned so that the substrate contact portion can be easily inserted into the through hole. For this purpose, a board contact portion side plate-like member 910 made of a rigid body may be provided, one of the main faces facing the board contact portion side main face of the elastic socket and a through hole at a position facing the board contact portion. . FIG. 9 illustrates, as an example, a case where the substrate contact portion side plate member 910 is provided. Further, since the substrate contact portion does not need to be pressed against the electrode of the inspection substrate by the elastic restoring force of the elastic socket, the second arm portion may not be provided. In that case, when the anisotropic conductive member is used, the portion for compressing the elastic socket is the first arm portion and the substrate contact portion side plate-like member 910 or the first arm portion. A pressing force is applied between the arm portion and the inspection substrate.

  Subsequently, an anisotropic conductive member according to a tenth embodiment of the present invention is shown in FIG. 10a. FIG. 10 a is a view conceptually showing a part of a cross section in the thickness direction of an elastic socket of an anisotropic conductive member according to a tenth embodiment of the present invention.

  As shown in FIG. 10a, the anisotropic conductive member according to the tenth embodiment of the present invention includes a step portion inside a through hole formed in the elastic socket, and is disposed in the through hole. A part of the sliding part is also provided with a step part, and the two step parts are arranged to be locked with each other. Since the elastic socket is made of an elastic body, the inner side surface of the through hole of the elastic socket can be temporarily deformed by contact with the second sliding portion. For this reason, the second sliding portion passes through the through hole while deforming the inner surface of the through hole, and is disposed in the through hole beyond the stepped portion. The anisotropic conductive member having such a stepped portion is unlikely to fall off from the elastic socket because the second sliding portion having the stepped portion is locked with the stepped portion of the through hole. Therefore, the movable member provided with the stepped portion is difficult to drop off from the elastic socket when the anisotropic conductive member is assembled, and the anisotropic conductive member can be easily assembled.

  In the anisotropic conductive member shown in FIG. 10a, a step portion is provided in the vicinity of the opening on the side where the second movable member is inserted in the through hole of the elastic socket. If the dropout of the first movable member is also prevented, the stepped portion may be provided in the vicinity of the opening of the through hole on the side where the first sliding portion and the first movable member are inserted. If it is difficult to provide a step in the through hole of the elastic socket due to restrictions in manufacturing the elastic socket, the elastic socket is divided into two in the main surface direction, and through holes with different hole diameters are formed respectively. You may utilize the connection part of a through-hole as a level | step difference part by superimposing two elastic sockets.

  Further, in the anisotropic conductive member 600 according to the sixth embodiment of the present invention, the anisotropic conductive member 700 according to the seventh embodiment, and the anisotropic conductive member 800 according to the eighth embodiment. Since a part of the second sliding portion protrudes from the through hole, no step portion is provided in the through hole of the elastic socket, and one of the second sliding portions protruding from the through hole of the elastic socket. A step part may be provided in the part, and the second sliding part provided with the step part may be engaged with the peripheral part of the opening of the through hole of the elastic socket. FIG. 10b illustrates a case where such a step portion is provided in the anisotropic conductive member 600 according to the sixth embodiment of the present invention.

  Next, an anisotropic conductive member according to the eleventh embodiment of the present invention is shown in FIG. FIG. 11 is a diagram conceptually showing a part of a cross section in the thickness direction of the elastic socket of the anisotropic conductive member according to the eleventh embodiment of the present invention.

  As shown in FIG. 11, the anisotropic conductive member according to the eleventh embodiment of the present invention includes a tapered portion in the through hole of the electrode contact portion side plate member (rigid socket). When the electrode contact portion included in the first movable member is a plate-like member, the electrode contact portion side plate-like member when the electrode contact portion is inclined because there is a certain width particularly in the plate width direction of the electrode contact portion. There is a risk of poor sliding between the through hole of the (rigid socket) and the electrode contact portion. As a countermeasure, a tapered portion as shown in FIG. 11 may be provided in the through hole of the electrode contact portion side plate member (rigid socket). Since the electrode contact portion side plate-like member (rigid socket) needs a certain thickness to ensure rigidity, by providing a tapered portion, the electrode contact portion side plate-like member (rigid socket) has a through-hole. The area in contact with can be reduced.

  Here, the electrode contact portion side plate member (rigid socket) may be fixed to the elastic socket, or may be movable in the movable direction of the first movable member in conjunction with the first movable member. By interlocking with the first movable member, the range in which the through hole of the electrode contact portion and the electrode contact portion side plate member (rigid socket) slides is reduced, thereby reducing the risk of causing a sliding failure. it can.

  The configuration according to the ninth embodiment to the eleventh embodiment of the present invention may be used alone, or a plurality of configurations according to these embodiments may be used simultaneously.

  The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Anisotropic conductive member 110 ... Elastic socket 120 ... Electric penetration part 130 ... 1st movable member 140 ... 2nd movable member 150 ... Electrode contact part side plate-shaped member (rigid socket)

Claims (20)

A plate-like elastic socket made of an insulating and elastic material and having a plurality of through-holes penetrating the main surface, and provided in correspondence with each of the plurality of through-holes of the elastic socket and disposed in the through-hole An anisotropic conductive member comprising a plurality of electric through-holes that have a portion to be passed and allow current to pass in the thickness direction of the elastic socket,
Each of the electric through-holes includes a first movable member and a second movable member that are electrically connected and can change a relative position in the thickness direction of the elastic socket.
The first movable member is
An electrode contact that is located in a portion protruding from the through hole of the elastic socket in the first movable member, includes an end portion that faces the inspection object during use, and contacts an electrode attached to the inspection object Part,
A first arm portion located at a portion protruding from the electrode side opening of the through hole of the elastic socket in the first movable member and provided with a portion in contact with one main surface of the elastic socket; and The second movable member includes a second sliding portion and a sliding contact structure, and the first movable member and the second movable member change their relative positions while maintaining electrical contact. Comprising a first sliding part that makes it possible to
The second movable member is
A substrate contact portion that is located at a portion protruding from the through hole of the elastic socket in the second movable member, includes an end portion that faces the inspection substrate of the inspection device when in use, and is in contact with the inspection substrate; and,
The second sliding portion constituting the sliding contact structure with the first sliding portion,
The first arm part and the first sliding part have a shape obtained by processing one plate material,
Furthermore, the second sliding portion also has a shape obtained by processing a plate material,
The first arm portion may generate an elastic restoring force in the elastic socket in a direction to separate the electrode contact portion and the substrate contact portion when an external force is applied to bring the electrode contact portion and the substrate contact portion closer to the thickness direction of the elastic socket. Further, the anisotropic conductive member, wherein a part of the elastic socket can be compressed in the thickness direction of the elastic socket.   2. The anisotropic conductive member according to claim 1, wherein the sliding contact structure constituted by the first sliding portion and the second sliding portion has a portion located in the through hole of the elastic socket. .   The anisotropic conductive structure according to claim 1 or 2, wherein the sliding contact structure constituted by the first sliding portion and the second sliding portion has a portion located outside the through hole of the elastic socket. Sexual member.   The anisotropic conductive member according to claim 1, wherein the sliding contact structure is configured such that main surfaces of two plate members are arranged to face each other.   The portion of the first arm portion that contacts one main surface of the elastic socket with respect to the through hole of the elastic socket is arranged such that the first movable member is inclined with respect to the central axis of the through hole of the elastic socket. The anisotropic conductive member according to claim 4, wherein the anisotropic conductive member is set to prevent the sliding contact structure from being maintained when the sliding contact structure is not maintained.   The anisotropic conductive member according to claim 1, wherein the sliding contact structure is configured so that main surfaces of two plate members are orthogonal to each other.   The sliding contact structure has a slit provided in a part of at least one of the first movable member and the second movable member, and the other of the first movable member and the second movable member. The anisotropic conductive member according to claim 4 or 6, wherein a part of the anisotropic conductive member is arranged so as to be slid into the part.   The anisotropic conductive member according to claim 7, wherein the slit has a shape obtained by bending a part of the one plate material.   The anisotropic conductive member according to claim 1, wherein the first arm portion has a shape obtained by bending a part of the one plate member.   The first arm portion has a linear shape parallel to the main surface of the first sliding portion, and the adjacent first arm portions are arranged to be orthogonal to each other. The anisotropic conductive member as described.   The first arm portion has a distance from the center of the through hole of the elastic socket to the farthest end of the first arm portion, and the center of the through hole of the elastic socket and the center of the through hole adjacent thereto. The anisotropic conductive member according to claim 1, wherein the anisotropic conductive member is larger than a distance obtained by subtracting 25 μm from ½ of the distance. The anisotropic conductive member is made of an insulating and rigid material and has a plurality of through holes corresponding to the through holes of the elastic socket. The elastic conductive member is formed on the main surface of the elastic socket on the electrode contact portion side. A plate-shaped rigid socket that is disposed away from the socket and prevents the sliding contact structure from being maintained;
The first arm portion can be locked to a main surface of the rigid socket on the side facing the elastic socket in at least a part of a surface opposite to the surface facing the elastic socket. Item 4. An anisotropic conductive member according to Item 1. The first arm part and the electrode contact part are made of different members, and while maintaining their electrical connection, their relative positions can be changed in the main surface direction of the elastic socket,
The electrode contact portion has a locking projection protruding in a direction parallel to the main surface inward direction of the rigid socket at a portion protruding from the end of the through hole of the rigid socket on the elastic socket side. The movement of the electrode contact portion in a direction away from the first arm portion in the thickness direction of the rigid socket is restricted by the locking protrusion, and the first arm portion is interposed via the locking protrusion. The rigid socket can be locked to the main surface on the side facing the elastic socket.
The anisotropic conductive member according to claim 12.   The anisotropic conductive member according to claim 13, wherein the electrode contact portion has a shape other than a shape formed by processing one plate material.   The second sliding part has a guide part obtained by bending one plate material, and the first sliding part is arranged so that a part thereof is included in the guide part. The anisotropic conductive member according to claim 1.   The anisotropic conductive member according to claim 1, wherein the first arm portion is suppressed from rotating with respect to the through hole of the elastic socket.   The anisotropic conductive member according to claim 1, wherein the first arm portion and the electrode contact portion are formed of one member. A second arm provided at a portion protruding from the inspection substrate side opening of the through hole of the elastic socket in the second movable member and having a portion in contact with the other main surface of the elastic socket Further comprising
The second arm part and the second sliding part have a shape obtained by processing one plate material,
The second arm portion is configured to generate an elastic restoring force in the elastic socket in a direction to separate the electrode contact portion and the substrate contact portion when an external force is applied to bring the electrode contact portion and the substrate contact portion close to the thickness direction of the elastic socket. In addition, it is possible to press the other main surface of the elastic socket,
The anisotropic conductive member according to claim 1.   The anisotropic conductive member according to claim 1, wherein the inspection substrate of the inspection apparatus has a through hole, and the substrate contact portion is soldered to the through hole.   At least one of the first sliding portion and the second sliding portion has a stepped portion, and the stepped portion is provided in a peripheral portion of the opening of the through hole of the elastic socket or in the through hole. The engagement with the stepped portion prevents at least one of the first sliding portion and the second sliding portion from being detached from the through hole of the elastic socket. An anisotropic conductive member as described in 1.

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