WO2013191075A1 - 非晶質無機陰イオン交換体、電子部品封止用樹脂組成物および非晶質ビスマス化合物の製造方法 - Google Patents
非晶質無機陰イオン交換体、電子部品封止用樹脂組成物および非晶質ビスマス化合物の製造方法 Download PDFInfo
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- B01J41/08—Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/12—Macromolecular compounds
- B01J41/14—Macromolecular compounds obtained by reactions only involving unsaturated carbon-to-carbon bonds
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- B01J47/00—Ion-exchange processes in general; Apparatus therefor
- B01J47/02—Column or bed processes
- B01J47/04—Mixed-bed processes
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- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
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- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
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- C09J201/00—Adhesives based on unspecified macromolecular compounds
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- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2264/00—Composition or properties of particles which form a particulate layer or are present as additives
- B32B2264/10—Inorganic particles
- B32B2264/102—Oxide or hydroxide
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B2457/00—Electrical equipment
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- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
- C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
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- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/23—Sheet including cover or casing
- Y10T428/239—Complete cover or casing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
Definitions
- the present invention relates to an amorphous inorganic anion exchanger, an electronic component sealing resin composition containing the amorphous inorganic anion exchanger, an electronic component sealing resin, an electronic component, a varnish, an adhesive, and a paste And a method for producing an amorphous bismuth compound.
- the resin composition for encapsulating electronic components uses an epoxy resin that has good adhesion to metal wiring and semiconductor chips and has high heat resistance, and the encapsulating resin composition is composed of an epoxy compound as a main component. In addition, it is often composed of an epoxy compound curing agent, a curing accelerator, an inorganic filler, a flame retardant, a pigment, and a silane coupling agent.
- Epoxy resin is an excellent sealing resin, but it has been known that it contains a small amount of ionic impurities, and ionic impurities can corrode metal wiring such as aluminum used in the wiring circuit of semiconductor chips. It was also known to have sex.
- the sealing material includes antimony oxide, brominated epoxy resin,
- a large amount of a flame retardant such as an inorganic hydroxide is blended, and corrosion of metal wiring such as aluminum wiring is more likely to occur due to these flame retardant components. This corrosion is mainly promoted by moisture that has penetrated into the epoxy resin used as the sealing material.
- Patent Document 1 discloses a bismuth compound represented by the following formula [3] as an inorganic anion exchanger, and discloses that it can be used for adsorbing and fixing impurity ions in a solid material related to the electric and electronic field.
- Patent Document 1 discloses a method of adding an equivalent amount of alkali to bismuth nitrate in excess of nitric acid over about 2 hours. Further, the subscript in formula [3] is disclosed. In order to increase the value of x by 1, a method of further adding about 1 mol of alkali is disclosed, and a more preferable reaction temperature is disclosed to be in the range of 20 to 50 ° C.
- Patent Document 2 discloses a bismuth compound represented by the following formula [4], which discloses that it is excellent as an inorganic ion exchanger for removing chloride ions. With respect to ions (NO 3 ) 4-2x, there is a definition that ⁇ 0.18 ⁇ x ⁇ 0.29 is essential. Therefore, when converted as a mass ratio of NO 3 , 8.4 to 10.5% In this case, a high content of nitrate ions is essential. Bi 10 O 13 + x (NO 3 ) 4-2x [4] Patent Document 2 discloses that a crystalline bismuth compound represented by the above formula [4] is obtained by thermally decomposing a bismuth compound having a ratio of (NO 3 ) to Bi of more than 4:10 as a raw material. It is described that when pyrolysis is performed up to 630 ° C., it becomes crystallized Bi 2 O 3 .
- the bismuth nitrate can be obtained by hydrolyzing an alkali solution with bismuth nitrate.
- this method can obtain only columnar crystals having an average particle size of 5 to 10 ⁇ m. This was also known (see Patent Document 3).
- Patent Document 3 an equimolar or more monocarboxylic acid is added to an aqueous solution containing trivalent bismuth ions and having a pH of 1.0 or less to form a bismuth-monocarboxylic acid complex, and then an alkali is added.
- a method is disclosed in which the complex is precipitated and calcined to obtain fine crystalline bismuth oxide (III) (Bi 2 O 3 ).
- III fine crystalline bismuth oxide
- bismuth hydroxide or bismuth oxide hydrate precipitates in the following strongly acidic region, and the bismuth-monocarboxylic acid complex becomes spherical fine bismuth oxide crystals at 340 ° C., and is bismuth hydroxide or bismuth oxide water. It is disclosed that when a hydrate is heated to 550 ° C., the particle diameters are irregular and become rod-shaped bismuth oxide crystals.
- JP 63-60112 A Japanese Patent Laid-Open No. 07-267643 Japanese Patent Laid-Open No. 01-246140
- the semiconductor encapsulating resin composition described in Patent Document 3 called a liquid encapsulating material has a maximum particle size of 1 ⁇ m as the particle size of the filler. It is known that particles having a large particle size of 10 ⁇ m or less are used, but such an inorganic ion exchanger having a large particle size may impede penetration into a narrow portion in the chip.
- the use of bismuth oxide described in Patent Document 3 is a raw material for a sintered material, but crystalline bismuth oxide is inferior to an amorphous one having an ion exchange rate and an exchange capacity that are amorphous.
- Patent Document 3 discloses a method for producing bismuth-monocarboxylic acid complex precipitation and fine-particle bismuth oxide crystals (III) (Bi 2 O 3 ), It did not disclose an amorphous fine particle bismuth compound (BiO (OH)) preferable as an inorganic anion exchanger and a method for producing the same. Further, the production method of the present invention can produce an amorphous bismuth compound having fine particles and high ion exchange performance, and it has not been known in the past to perform a precipitation reaction at an extremely high pH of pH 12. It has not been known that the bismuth compound obtained in (1) is an unprecedented fine particle with high ion exchange performance.
- inorganic anion exchangers that have smaller particle size and superior performance such as ion exchange capacity and exchange rate than bismuth compounds, which are conventional inorganic anion exchangers. . It is a problem to realize such an inorganic anion exchanger and to obtain a more reliable resin composition for sealing an electronic component by using the inorganic anion exchanger. It is another object of the present invention to provide a method for producing an amorphous bismuth compound that can be used as such an inorganic anion exchanger.
- the above object is achieved by the means described in ⁇ 1>, ⁇ 8>, ⁇ 10> to ⁇ 12>, ⁇ 14>, ⁇ 15>, ⁇ 17>, ⁇ 18>, ⁇ 20> and ⁇ 21> below. It was done.
- the preferred embodiments are shown below together with ⁇ 2> to ⁇ 7>, ⁇ 9>, ⁇ 13>, ⁇ 16>, ⁇ 19>, and ⁇ 22> to ⁇ 26>.
- ⁇ 1> The average primary particle diameter observed with an electron microscope is 1 nm or more and 500 nm or less, the NO 3 content is 1% by weight or less of the whole, and is represented by the formula [1].
- Crystalline inorganic anion exchanger, BiO (OH) [1] ⁇ 2> The amorphous inorganic anion exchanger according to ⁇ 1>, wherein the BET specific surface area is 10 m 2 / g or more, ⁇ 3>
- ⁇ 4> The amorphous inorganic anion exchanger according to any one of ⁇ 1> to ⁇ 3>, wherein the maximum particle size measured with a laser diffraction particle size distribution analyzer is 20 ⁇ m or less, ⁇ 5>
- amorphous bismuth compound obtained by including a precipitation generation step in which an acidic aqueous solution containing trivalent Bi ions has a temperature range of higher than 0 ° C. and lower than 20 ° C., and has a pH of 12 or more, to form a precipitate A method for producing an amorphous bismuth compound represented by the formula [1] and having a NO 3 content of 1% by weight or less, BiO (OH) [1]
- Method for producing amorphous bismuth compound ⁇ 25> The method for producing an amorphous bismuth compound according to any one of ⁇ 21> to ⁇ 24>, wherein an organic acid or an amine coexists in the acidic aqueous solution in the precipitation generation step, ⁇ 26> The method for producing an amorphous bismuth compound according to ⁇ 25>, wherein hydroxydicarboxylic acid is used as the organic acid or amine.
- an amorphous inorganic anion exchanger having excellent anion exchange properties and less corrosiveness to metals.
- a production method capable of producing an amorphous bismuth compound having excellent anion exchange properties and low corrosiveness to metals was possible to provide.
- % Means “% by weight” unless otherwise specified, “parts” means “parts by weight”, and “ppm” means “weight ppm”.
- the description of “lower limit to upper limit” representing a numerical range represents “lower limit to upper limit” and the description of “upper limit to lower limit” represents “upper limit, lower limit”. That is, it represents a numerical range including an upper limit and a lower limit.
- the combination of 2 or more of the preferable aspect mentioned later is also a preferable aspect.
- the amorphous inorganic anion exchanger of the present invention exhibits an amorphous structure in a powder X-ray diffraction pattern, and an average primary particle size by electron microscope observation is 1 nm or more and 500 nm.
- the NO 3 content is 1% or less.
- Patent Document 2 conventionally, a bismuth compound having a low nitrate ion concentration as in the present invention has not been considered as an anion exchanger having a low ion exchange rate and inferior water resistance. It can be said that.
- the amorphous inorganic anion exchanger of the present invention is a fine particle and has high anion exchange performance.
- the amorphous inorganic anion exchanger when used as a sealant composition, is in the form of an electronic component having a narrow pitch wiring or a thin film or film.
- the amorphous inorganic anion exchanger can be applied to various uses such as sealing, coating and insulation of electronic parts or electrical parts in a wide range, It has the effect of preventing corrosion and improving reliability. It can also be used as a stabilizer for a resin such as polyvinyl chloride, a rust inhibitor, and the like.
- the method for producing an amorphous bismuth compound of the present invention includes a precipitation generation step in which an acidic aqueous solution containing trivalent Bi ions is generated at a temperature range of higher than 0 ° C. and lower than 20 ° C. and a pH of 12 or higher.
- the obtained amorphous bismuth compound is represented by the formula [1], and the content of NO 3 is 1% or less.
- the production method of the present invention can easily provide a bismuth compound having an amorphous structure in a powder X-ray diffraction pattern, an average primary particle diameter of 500 nm or less, and an NO 3 content of 1% or less. .
- the amorphous bismuth compound obtained by the method for producing an amorphous bismuth compound of the present invention can be suitably used as the amorphous inorganic anion exchanger of the present invention.
- the amorphous inorganic anion exchanger of the present invention is preferably produced by the method for producing an amorphous bismuth compound of the present invention.
- the amorphous bismuth compound production method of the present invention and the preferred embodiments of the amorphous bismuth compound obtained by the production method are each described below, unless otherwise specified. And the preferred embodiment of the amorphous inorganic anion exchanger of the present invention.
- the method for producing an amorphous bismuth compound of the present invention preferably further includes a washing step for washing the precipitate until the filtrate has a conductivity of 300 ⁇ S / cm or less following the precipitation generation step. More preferably, the method further includes a step of drying the precipitate until the water content of the precipitate becomes 5% by weight or less.
- the powder X-ray diffraction analysis can be performed in accordance with, for example, JIS K0131-1996.
- the JIS standard does not define the voltage applied to the X-ray tube, but X-ray diffraction measurement is performed using the generated CuK ⁇ ray at an applied voltage of 50 kV and current value of 120 mA applied to the X-ray tube using a Cu target. The standard measurement method is used. If the sample contains a crystalline substance, a diffraction peak having an acute angle appears in the X-ray diffraction pattern.
- the diffraction angle 2 ⁇ of the diffraction peak is determined.
- ⁇ 2 d sin ⁇
- the crystal face spacing d can be calculated to identify the crystal system. Note that ⁇ of the CuK ⁇ line is 1.5405 ⁇ .
- the basic composition of the amorphous inorganic anion exchanger in the present invention is represented by the formula [1].
- What can be used in combination with the amorphous inorganic anion exchanger of the present invention is an inorganic compound having anion exchange ability other than BiO (OH), preferably not containing nitrate ions, specifically Examples thereof include hydrotalcite, hydrous bismuth oxide, hydrous magnesium oxide, hydrous aluminum oxide and the like. Of these, hydrous bismuth oxide is preferred, and the preferred amount when used in combination is 50% or less, more preferably 30% or less, and even more preferably 5% or less of the entire inorganic anion exchanger.
- the content of NO 3 (nitrate ions, NO 3 ⁇ ) contained in the amorphous inorganic anion exchanger of the present invention is 1% or less.
- NO 3 nitrate ions, NO 3 ⁇
- the main component of the amorphous inorganic anion exchanger of the present invention is a compound represented by the formula [1], and NO 3 is contained if it is 1% or less. May be defined as a good impurity.
- the content of NO 3 is more preferably 0.5% or less, still more preferably 0.2% or less, and most preferably 0. If the NO 3 content exceeds 1%, it may adversely affect electronic components, which is not preferable.
- Another impurity that may be contained is H 2 O, and the preferred content is 5% or less, more preferably 3% or less, still more preferably 1% or less, and particularly preferably 0.5% or less.
- Bi (OH) 3 may also be included, and the preferable content is 3% or less, more preferably 1% or less, and still more preferably 0.5% or less.
- the amorphous inorganic anion exchanger of the present invention contains 50% by weight or more, preferably 70% by weight or more, preferably 95% by weight or more of the compound represented by the formula [1]. More preferred.
- the specific surface area of the amorphous inorganic anion exchanger of the present invention can be measured by a known method such as the BET method, and the preferred specific surface area when measured by the BET method by nitrogen adsorption is 10 to 100 m 2 / g. More preferably, it is 10 to 50 m 2 / g.
- the specific surface area is 10 m 2 / g or more, the ion trapping performance is excellent.
- the specific surface area is 100 m 2 / g or less, secondary aggregation can be suppressed and occurrence of defects can be prevented.
- the raw materials for obtaining the amorphous inorganic anion exchanger of the present invention are those conventionally used as raw materials for obtaining bismuth compounds such as bismuth oxide and bismuth oxyhydroxide by reaction in an aqueous solution. Either can be used. That is, it produces trivalent bismuth ions in an aqueous solution.
- bismuth chloride oxide bismuth citrate, bismuth oxyacetate, bismuth oxyperchlorate, bismuth oxysalicylate, bismuth trichloride, triodor Bismuth iodide, bismuth hydroxide, dibismuth oxycarbonate, bismuth oxynitrate, bismuth sulfate, bismuth nitrate, etc.
- bismuth nitrate which is industrially available and has good solubility in water.
- an aqueous solution of these raw materials is kept acidic by adding a mineral acid or the like to prevent precipitation of hydroxides and oxides.
- Preferred mineral acids include hydrochloric acid and nitric acid, more preferably nitric acid.
- the method for producing an amorphous bismuth compound of the present invention includes a precipitation generation step in which an acidic aqueous solution containing trivalent Bi ions is generated at a temperature range of higher than 0 ° C. and lower than 20 ° C. and a pH of 12 or higher. .
- the amorphous inorganic anion exchanger of the present invention is obtained by a production method including a step of producing an acidic aqueous solution containing trivalent Bi ions at a pH of 12 or more in a temperature range of 0 to 20 ° C. be able to.
- the pH at which the precipitate is generated is preferably 12 or more, more preferably pH 12 to 14, still more preferably pH 12.3 to 13.5, and particularly preferably pH 12.7 to 13.3.
- the pH can be measured using a pH meter using a general glass electrode.
- the temperature of the solution when forming this precipitate is preferably higher than 0 ° C. and lower than 20 ° C., more preferably higher than 0 ° C. and lower than 15 ° C., further preferably higher than 0 ° C. and lower than 10 ° C. is there.
- the temperature is higher than 0 ° C., it is possible to suppress the formation of ice and inhibition of the reaction, and conversely, when the temperature is lower than 20 ° C., an appropriate particle size can be easily obtained.
- the amorphous inorganic anion exchanger of the present invention is a basic substance used for realizing the above pH of 12 or more, and an alkali metal hydroxide, an alkali metal carbonate, an alkali metal bicarbonate , Ammonia, and a compound capable of generating ammonia by heating (for example, urea, hexamethylenetetramine, etc.) can be illustrated as preferred examples, more preferably an alkali metal hydroxide, and sodium and potassium are preferred as the contained alkali metals. .
- These basic substances are preferably in the form of an aqueous solution in order to quickly mix with the bismuth raw material, and the higher concentration in that case is preferable in that the reaction liquid is not diluted too much.
- a preferred concentration is 1% to a saturated concentration, and more preferably 3% to 20%.
- the method of adjusting the pH to 12 or more includes a method of adding an acidic aqueous solution containing trivalent bismuth ions to a basic substance solution, and conversely trivalent bismuth ions.
- a method of adding a solution of a basic substance to an acidic aqueous solution containing bismuth can be adopted, but since trivalent bismuth ions are stably present only in the strongly acidic region, the pH of the acidic aqueous solution containing trivalent bismuth ions is 3 or less. It is preferable that there is, more preferably 1 or less, particularly preferably 0.5 or less.
- the acidic aqueous solution containing trivalent bismuth ions has a pH of 12 or more.
- the acidic aqueous solution containing trivalent bismuth ions, the basic substance solution Using a method in which the pH is adjusted to 12 or higher when mixed, or a method in which an acidic aqueous solution containing trivalent bismuth ions is dropped into a solution having a pH of 12 or higher. it can. Among these, a method in which an acidic aqueous solution containing trivalent bismuth ions is rapidly put into a solution having a pH of 12 or more and mixed is preferred.
- the time for adding and mixing is preferably within 30 minutes, more preferably within 10 minutes, and even more preferably within 1 minute. All of these methods are methods in which the pH of an acidic aqueous solution containing trivalent bismuth ions quickly passes through the neutral region and reaches a pH of 12 or more, and Bi that may be generated in the acidic to neutral range. Formation of (OH) 3 or the like can be prevented, and an amorphous inorganic anion exchanger having a small particle size can be obtained.
- Additives can be used when forming the precipitate.
- organic acids and amines can be used.
- Preferred are dicarboxylic acids, tricarboxylic acids, and polyamines. Specific examples include oxalic acid, tartaric acid, malic acid, succinic acid, citric acid, ethylenediamine, diethylenetriamine, and triethylenetetramine. And the like, which react with amines.
- dicarboxylic acids are more preferable, hydroxy acids are more preferable among dicarboxylic acids, and tartaric acid and malic acid are particularly preferable.
- a preferred addition amount of the additive is 1 to 100 parts, more preferably 3 to 50 parts, per 100 parts of trivalent bismuth.
- an acidic aqueous solution containing trivalent Bi ions is produced at a temperature range of higher than 0 ° C. and lower than 20 ° C., and at a pH of 12 or more to produce a precipitate. It is preferable to include a washing step for washing the precipitate until the conductivity of the filtrate is 300 ⁇ S / cm or less within one hour following the precipitation generation step. The reason for this is that the generated precipitate gradually matures and crystallizes in the solution, so that the higher the solution temperature, the faster the crystallization proceeds, and the ions that are the raw materials for the precipitation components are dissolved in the atmosphere.
- the temperature of deionized water used for washing is preferably higher than 0 ° C and not higher than 40 ° C. More preferably, it is higher than 0 degreeC and 25 degrees C or less, More preferably, it is higher than 0 degreeC and 15 degrees C or less.
- the washing is preferably performed until the filtrate has an electric conductivity of 300 ⁇ S / cm or less, and more preferably 50 ⁇ S / cm or less. Further, the time from the formation of the precipitate until the completion of the washing and the drying is preferably within 1 hour, more preferably within 45 minutes, and further preferably within 30 minutes.
- the precipitate that has been washed can be further dried to prevent crystallization by removing moisture. Drying may be performed at room temperature or by heating in a drying furnace. That is, any treatment may be performed as long as excess water is removed from the precipitate.
- the drying temperature in the present invention is preferably ⁇ 20 to 250 ° C., more preferably 100 to 230 ° C.
- the drying method is not particularly limited, but the amorphous bismuth compound in the present invention is fine particles and easily aggregates. Therefore, preferred drying methods include freeze drying and spray drying. Drying is preferably performed until the amount of water contained in the entire precipitate is 5% or less, more preferably 3% or less, and even more preferably 1% or less.
- the method for producing an amorphous inorganic anion exchanger of the present invention preferably further includes a drying step after the washing step until the water content of the precipitate becomes 5% or less.
- the amorphous inorganic anion exchanger of the present invention obtained as described above can be pulverized according to the purpose to obtain a desired secondary particle size.
- the secondary particle diameter of the amorphous inorganic anion exchanger of the present invention is not particularly limited.
- an ultrasonic dispersion in deionized water is measured with a laser diffraction particle size distribution meter, and the volume-based median diameter is 2. It can employ
- the preferred secondary particle diameter is 0.01 to 20 ⁇ m, more preferably 0.05 to 20 ⁇ m, and still more preferably 0.1 to 10.0 ⁇ m.
- the secondary particle diameter is 0.01 ⁇ m or more, reaggregation can be suppressed, and when it is 20 ⁇ m or less, occurrence of troubles such as bumps and clogging can be suppressed when used as a thin film or film when added to the resin.
- the maximum particle size of the amorphous inorganic anion exchanger that can be measured with a laser diffraction particle size distribution analyzer is also important, and the preferable maximum particle size is 20 ⁇ m or less, more preferably 10 ⁇ m or less, and still more preferably Is 5 ⁇ m or less. A preferable lower limit is 0.01 ⁇ m or more. If the maximum particle size is 20 ⁇ m or less, it is possible to suppress the occurrence of troubles such as bumps and clogging when used as a thin film or film when added to the resin.
- the primary particle size of the amorphous inorganic anion exchanger of the present invention affects the specific surface area and is an important parameter that affects the ion exchange rate, while the size is determined by the precipitation reaction from the solution and is pulverized. Some values cannot be changed.
- the primary particle size can be determined by magnifying and observing the particles with a scanning or transmission electron microscope, selecting, for example, 100 particles in the field of view, measuring the major axis, and calculating the number average. .
- the average primary particle size obtained in this way is essential to be 1 nm or more and 500 nm or less, preferably 10 nm or more and 300 nm or less, more preferably 30 nm or more and 200 nm or less.
- the average primary particle diameter of the amorphous bismuth compound obtained by the method for producing an amorphous bismuth compound of the present invention is preferably 1 nm to 500 nm, more preferably 10 nm to 300 nm, and still more preferably 30 nm. It is 200 nm or less.
- Anion exchange capacity of the amorphous inorganic anion exchanger of the present invention can be measured using hydrochloric acid.
- hydrochloric acid As a specific measurement example, 1 g of an inorganic anion exchanger and 50 ml of 0.1 mol / liter hydrochloric acid are placed in a 100 ml polyethylene bottle and shaken at 40 ° C. for 24 hours. Chlorine ion concentration was measured by ion chromatography, the same operation was performed without adding an inorganic anion exchanger, and the chlorine ion concentration was measured as a blank value, and the difference was determined as an anion per gram of inorganic anion exchanger. It can be an ion exchange capacity.
- the anion exchange capacity of the amorphous inorganic anion exchanger of the present invention is preferably 2.0 meq / g or more, more preferably 2.5 meq / g or more, and further preferably 3.0 meq / g or more. Yes, and a preferable upper limit is 10 meq / g or less. The reason why this range is preferable is that a sufficient effect can be obtained with a small addition amount as an electronic component sealant.
- the anion exchange rate of the amorphous inorganic anion exchanger of the present invention refers to the ion exchange during 10 minutes of shaking instead of shaking for 24 hours in the measurement of the above anion exchange capacity.
- the measured amount is used as an index of the ion exchange rate.
- the higher ion exchange rate is preferred, preferably 2.5 meq / g or more, more preferably 3.0 meq / g or more, still more preferably 3.2 meq / g or more, and a preferred upper limit is 5 meq / g or less.
- the conductivity of the supernatant obtained by placing the amorphous inorganic anion exchanger of the present invention in deionized water, stirring, and allowing the precipitate to stand still is defined as the conductivity in the present invention.
- the conductivity shows a large value it means that the ionic substance is eluted, so that the conductivity is preferably small.
- 0.5 g of an inorganic anion exchanger and 50 ml of deionized water are placed in a polypropylene bottle with a capacity of 100 ml, held at 95 ° C. for 20 hours, and then the conductivity of the supernatant is made conductive. It can be determined by measuring with a rate meter.
- the preferred conductivity of the amorphous inorganic anion exchanger of the present invention is 50 ⁇ S / cm or less, more preferably 40 ⁇ S / cm or less, still more preferably 30 ⁇ S / cm or less, and the preferred lower limit is 0.1 ⁇ S. / Cm or more.
- the anion exchanger of the present invention if the electrical conductivity is in the above-described range, a sufficient effect can be obtained with a small addition amount for applications such as electronic component sealing.
- an anion exchange capacity of 2.0 meq / g or more and a conductivity of 50 ⁇ S / cm or less are used. It is expected to be excellent in the effect of preventing wiring corrosion.
- the resin composition for electronic component sealing of this invention is a resin composition containing the amorphous inorganic anion exchanger of this invention.
- the resin used in the resin composition for encapsulating electronic components containing the amorphous inorganic anion exchanger of the present invention include thermosetting such as phenol resin, urea resin, melanin resin, unsaturated polyester resin, and epoxy resin.
- the resin may be a thermoplastic resin such as polyethylene, polystyrene, vinyl chloride, and polypropylene, and a room temperature-curing silicone resin may be used, but a thermosetting resin is preferred.
- thermosetting resin used in the resin composition for encapsulating electronic parts of the present invention a phenol resin or an epoxy resin is preferable, and an epoxy resin is particularly preferable.
- the epoxy resin composition for encapsulating electronic parts is called. .
- the epoxy resin used for the electronic component sealing epoxy resin composition can be used without limitation as long as it is used for the electronic component sealing resin.
- any type can be used as long as it has two or more epoxy groups in one molecule and can be cured.
- Any material used as a molding material such as an epoxy resin can be used.
- the epoxy resin composition for electronic component sealing contains a hardening
- curing agent any known curing agent for epoxy resin compositions can be used, and preferred specific examples include acid anhydrides, amine-based curing agents, and novolak-based curing agents.
- curing accelerator any of those known as curing accelerators for epoxy resin compositions can be used, and preferred specific examples include amine-based, phosphorus-based, and imidazole-based accelerators. .
- the resin composition for encapsulating electronic components of the present invention can be blended with what is known as a component to be blended with the molding resin as necessary.
- this component include inorganic fillers, flame retardants, coupling agents for inorganic fillers, colorants, and release agents. All of these components are known as components to be blended in the molding epoxy resin.
- the inorganic filler include crystalline silica powder, quartz glass powder, fused silica powder, alumina powder, and talc. Among them, crystalline silica powder, quartz glass powder, and fused silica powder are preferable because they are inexpensive.
- flame retardants include antimony oxide, halogenated epoxy resin, magnesium hydroxide, aluminum hydroxide, red phosphorus compound, phosphate ester compound, etc.
- coupling agents include silane and titanium
- mold release agents include waxes such as aliphatic paraffins and higher aliphatic alcohols.
- a reactive diluent a solvent, a thixotropic agent, and the like can also be contained.
- a reactive diluent a solvent, a thixotropic agent, and the like
- butyl phenyl glycidyl ether can be exemplified as the reactive diluent, methyl ethyl ketone as the solvent, and organic modified bentonite as the thixotropic agent.
- a preferable blending ratio of the amorphous inorganic anion exchanger of the present invention in the resin composition for encapsulating electronic parts is 0.1 to 10 parts, more preferably 1 per 100 parts of the resin composition for encapsulating electronic parts. ⁇ 5 parts. When it is 0.1 part or more, it is excellent in the effect of enhancing the anion removability and moisture resistance reliability, and when it is 10 parts or less, a sufficient effect is obtained and the cost is also excellent.
- the amorphous inorganic anion exchanger of the present invention is an inorganic anion exchanger
- the inorganic anion of the amorphous inorganic anion exchanger of the present invention can be obtained by using an inorganic cation exchanger in combination.
- the anion trapping ability as an exchanger can be increased, and a cationic ion trapping effect can also be expected.
- An inorganic cation exchanger is an inorganic substance and has a cation exchange property. Specific examples thereof include antimonic acid (antimony pentoxide hydrate), niobic acid (niobium pentoxide hydrate), and manganese oxidation.
- zirconium phosphate titanium phosphate, tin phosphate, cerium phosphate, zeolite, clay mineral and the like, and antimonic acid (antimony pentoxide hydrate), zirconium phosphate, and titanium phosphate are preferable.
- the compounding ratio when the amorphous inorganic anion exchanger and the inorganic cation exchanger of the present invention are used in combination is not particularly limited, but is preferably 100: 0 to 20:80 by weight.
- the amorphous inorganic anion exchanger and inorganic cation exchanger according to the present invention may be blended separately when preparing a resin composition for encapsulating electronic components, and these are mixed uniformly in advance. You can do it later. Preferably, a mixture is used. By doing so, the effect of using these components in combination can be further exhibited.
- the resin composition for encapsulating an electronic component of the present invention can be easily obtained by mixing the above raw materials by a known method. For example, each of the above raw materials is appropriately blended, and the blend is heated in a kneader. Kneaded in a semi-cured resin composition, cooled to room temperature, pulverized by known means, and tableted as necessary to obtain a solid composition called a molding compound. Can be exemplified, or can be obtained as a liquid sealant.
- the amorphous inorganic anion exchanger of the present invention can be used for various applications such as sealing, coating and insulation of electronic parts or electric parts. Furthermore, the amorphous inorganic anion exchanger of the present invention can also be used as a stabilizer for a resin such as vinyl chloride, a rust inhibitor, and the like.
- the resin composition for encapsulating an electronic component containing the amorphous inorganic anion exchanger of the present invention is formed on a support member such as a lead frame, a wired tape carrier, a wiring board, glass, a silicon wafer, a semiconductor chip, a transistor. It can be used for an active element such as a diode or a thyristor, or a passive element such as a capacitor, resistor or coil. Moreover, the resin composition for sealing an electronic component of the present invention can also be used effectively for a printed circuit board. An epoxy resin composition for encapsulating an electronic component containing the amorphous inorganic anion exchanger of the present invention can be used in the same manner.
- a low-pressure transfer molding method is the most common, but an injection molding method, a compression method is used. A molding method or the like may be used. An inorganic cation exchanger may be contained therein.
- a printed wiring board is made using thermosetting properties such as epoxy resin, and a copper foil is bonded to this, and this is etched to produce a circuit to produce a wiring board.
- thermosetting properties such as epoxy resin
- a copper foil is bonded to this, and this is etched to produce a circuit to produce a wiring board.
- corrosion and insulation defects have become a problem due to high density of circuits, lamination of circuits, and thinning of insulating layers.
- Such corrosion can be prevented by adding the amorphous inorganic anion exchanger of the present invention when producing a wiring board.
- corrosion of the wiring board can be prevented by adding the amorphous inorganic anion exchanger of the present invention to the insulating layer for the wiring board.
- the wiring board containing the amorphous inorganic anion exchanger of the present invention can suppress the generation of defective products due to corrosion or the like. It is preferable to add 0.1 to 5 parts of the amorphous inorganic anion exchanger of the present invention to 100 parts of the resin solid content in the wiring board and the insulating layer for the wiring board. An inorganic cation exchanger may be contained therein.
- ⁇ Blending into adhesives Electronic components are mounted on substrates such as wiring boards using adhesives.
- the amorphous inorganic anion exchanger of the present invention By adding the amorphous inorganic anion exchanger of the present invention to the adhesive used at this time, it is possible to suppress the occurrence of defective products due to metal corrosion or the like. It is preferable to add 0.1 to 5 parts of the amorphous inorganic anion exchanger of the present invention to 100 parts of resin solids in this adhesive.
- the conductive adhesive include those containing a conductive metal such as silver. It is preferable to add 0.1 to 5 parts of the amorphous inorganic anion exchanger of the present invention to 100 parts of the resin solid content in the conductive adhesive.
- An inorganic cation exchanger may be contained therein.
- An electrical product, a printed wiring board, or an electronic component can be produced using the varnish containing the amorphous inorganic anion exchanger of the present invention.
- this varnish what has thermosetting resins, such as an epoxy resin, as a main component can be illustrated. It is preferable to add 0.1 to 5 parts of the amorphous inorganic anion exchanger of the present invention to 100 parts of the resin solid content. An inorganic cation exchanger may be contained therein.
- the amorphous inorganic anion exchanger of the present invention can be added to a paste containing silver powder or the like.
- the paste is used to improve the adhesion between connecting metals as an auxiliary agent such as soldering. Thereby, generation
- the paste include conductive pastes such as solder paste, silver paste, and copper paste. It is preferable to add 0.1 to 5 parts of the amorphous inorganic anion exchanger of the present invention to 100 parts of the resin solid content in the paste. An inorganic cation exchanger may be contained therein.
- the composition of the inorganic anion exchanger was determined by the following method. (1) The inorganic anion exchanger was dissolved in nitric acid, and the bismuth content was measured by ICP (inductively coupled plasma emission spectroscopic analyzer). (2) 50 ml of 0.1N sodium hydroxide aqueous solution was added to 0.5 g of the inorganic anion exchanger and treated at 95 ° C. for 20 hours. The nitrate ion concentration in the liquid after the treatment was measured by ion chromatography to determine the nitrate ion content. From these two measurement results, the composition of the inorganic anion exchanger was calculated.
- the powder X-ray diffraction (XRD) measurement was performed using a RINT2400V type manufactured by Rigaku Corporation, using a Cu target X-ray tube, and an X-ray diffraction pattern was obtained using CuK ⁇ generated at an applied voltage of 50 kV and a current value of 120 mA. . Then, it was confirmed that the produced inorganic ion exchanger had a sharp peak or a broad peak with no diffraction intensity of 10,000 cps or more. Further, using a TG-DTA thermal analyzer (differential thermal-thermogravimetric simultaneous measurement device), a change in weight was measured when the temperature was increased to 1,000 ° C. at 20 ° C./min in air.
- TG-DTA thermal analyzer differential thermal-thermogravimetric simultaneous measurement device
- the resulting precipitate was immediately filtered, and the precipitate was washed with deionized water at 10 ° C. until the filtrate had a conductivity of 50 ⁇ S / cm or less. Filtration and washing were completed in 30 minutes.
- the precipitate was dried at 120 ° C. for 24 hours. Then, it grind
- the volume-based median diameter and the maximum value of the measured values were taken as the secondary particle diameter and the maximum particle diameter, respectively. The results are shown in Table 1.
- the resulting precipitate was immediately filtered and washed with deionized water at 10 ° C. until the filtrate had a conductivity of 50 ⁇ S / cm or less. Filtration and washing were completed in 30 minutes. The precipitate was dried at 120 ° C. for 24 hours. Then, it grind
- Powder X-ray diffraction (XRD) measurement of the amorphous inorganic anion exchanger 2 was performed. This diffraction pattern is shown in FIG. Here, no sharp peak based on the crystalline substance was observed, and it was confirmed to be amorphous.
- XRD Powder X-ray diffraction
- the resulting precipitate was immediately filtered and washed with deionized water at 10 ° C. until the filtrate had a conductivity of 50 ⁇ S / cm or less. Filtration and washing were completed in 30 minutes. The precipitate was dried at 120 ° C. for 24 hours. Then, it grind
- the powder X-ray diffraction (XRD) measurement of the amorphous inorganic anion exchanger 3 was performed. As in Examples 1 and 2, no sharp peak based on the crystalline substance was observed, and it was confirmed that the amorphous inorganic anion exchanger 3 was amorphous. It was. As in Example 1, measurement of the primary particle size, secondary particle size, maximum particle size, specific surface area, ion exchange capacity, ion exchange rate, and supernatant conductivity of the amorphous inorganic anion exchanger 3 These results are shown in Table 1.
- the precipitate was dried at 120 ° C. for 24 hours. Then, it grind
- the precipitate was dried at 120 ° C. for 24 hours. Then, it grind
- the pH of the slurry after dropping was 13.1.
- the resulting precipitate was immediately filtered and washed with deionized water at 10 ° C. until the filtrate had a conductivity of 50 ⁇ S / cm or less. Filtration and washing were completed in 30 minutes.
- the precipitate was dried at 120 ° C. for 24 hours. Then, it grind
- Example 7 In a 1 L beaker, 200 g of deionized water and 40.0 g of polyethyleneimine (molecular weight 600) were added and dissolved, and the temperature was adjusted to 15 ° C. On the other hand, 200 g of deionized water and 10.0 g of 71% -HNO 3 were added to a 500 ml beaker, and then 20.83 g of 50% -Bi (NO 3 ) 3 ⁇ 5H 2 O manufactured by Nippon Chemical Industry Co., Ltd. was slowly added. The mixture was stirred uniformly to bring the liquid temperature to 15 ° C. Also, 500 g of 10% aqueous potassium hydroxide solution was prepared and brought to 15 ° C.
- the polyethyleneimine aqueous solution in the 1 L beaker was stirred at 400 rpm, and the bismuth nitrate aqueous solution was added dropwise thereto at 20 ml / min using a roller pump.
- a 10% potassium hydroxide aqueous solution was added dropwise while adjusting the flow rate so that the pH of the inner solution of the 1 L beaker was 12.5.
- the dropping of the 10% aqueous potassium hydroxide solution was also completed.
- ⁇ Comparative Example 1> 530 g of 5% aqueous sodium hydroxide solution was adjusted to 25 ° C. In addition, 60 g of 50% bismuth nitrate aqueous solution was diluted with 200 g of 5% nitric acid to 25 ° C. The prepared sodium hydroxide aqueous solution was put into a 1 L beaker and stirred at 25 ° C. and 400 rpm (pH 14). Thereto, the entire amount of the bismuth aqueous solution was added within 1 minute using a funnel. The pH of the slurry after dropping was 13.0. The obtained precipitate was stored at 25 ° C. for 24 hours, filtered, and washed with deionized water at 25 ° C.
- Powder X-ray diffraction (XRD) measurement of Comparative Compound 1 was performed. This diffraction pattern is shown in FIG. The powder X-ray diffraction pattern of Comparative Compound 1 coincided with the known ⁇ -Bi 2 O 3 diffraction pattern peak.
- the primary particle size, secondary particle size, maximum particle size, specific surface area, ion exchange capacity, ion exchange rate, and supernatant conductivity of Comparative Compound 1 were measured. Are listed in Table 2.
- ⁇ Comparative example 2> Dilute 180 g of 50% aqueous bismuth nitrate solution with 420 g of 5% nitric acid and maintain the temperature at 25 ° C. while stirring, using a roller pump with a 10% aqueous sodium hydroxide solution, the pH becomes 13.0 at a rate of 20 ml / min. When the solution was added dropwise, precipitation started to form at a pH around 1.0. The resulting precipitate was immediately filtered and washed with deionized water at 25 ° C. until the filtrate had a conductivity of 50 ⁇ S / cm or less. Filtration and washing were completed in 30 minutes. The precipitate was dried at 120 ° C. for 24 hours.
- the powder X-ray diffraction pattern of Comparative Compound 3 is almost amorphous and has a small peak of less than 10,000 cps, but there is a diffraction peak at a peak position different from ⁇ -Bi 2 O 3 . Crystals were formed.
- the primary particle size, secondary particle size, maximum particle size, specific surface area, ion exchange capacity, ion exchange rate, and supernatant conductivity of Comparative Compound 3 were measured. Are listed in Table 2.
- the precipitate was dried at 120 ° C. for 24 hours. Then, it grind
- Powder X-ray diffraction (XRD) measurement of Comparative Compound 4 was performed. This diffraction pattern is shown in FIG.
- the powder X-ray diffraction pattern of Comparative Compound 4 was a small peak of less than 10,000 cps, but had a diffraction peak at the peak position of the ⁇ -Bi 2 O 3 crystal.
- the primary particle size, secondary particle size, maximum particle size, specific surface area, ion exchange capacity, ion exchange rate, and supernatant conductivity of Comparative Compound 4 were measured. Are listed in Table 2.
- the bismuth compounds obtained in Comparative Examples 1 to 8 are all crystalline and have a large maximum particle size, so that they are not suitable for use in applications such as a semiconductor sealing agent having a fine structure. .
- the amorphous inorganic anion exchangers of the examples all have higher ion exchange rates than those obtained in Comparative Examples 1 to 5 or Comparative Example 8 having the same NO 3 content. It was excellent in that.
- the product obtained in Comparative Example 6 or 7 has a high ion exchange rate, but the content of NO 3 is remarkably large, and elution of NO 3 ions is concerned. Therefore, it is also suitable for applications such as a semiconductor sealant. There is nothing.
- the amorphous inorganic anion exchanger of the present invention has a high ion exchange rate although the content of NO 3 is as small as 1% or less. Further, according to the method for producing an amorphous bismuth compound of the present invention, an amorphous bismuth compound having a high ion exchange rate and a small maximum particle diameter can be obtained although the content of NO 3 is as small as 1% or less. Thus, it can be said that such an amorphous bismuth compound is preferable for use as a sealing agent for a semiconductor having a fine structure.
- Example 8> ⁇ Corrosion test for aluminum wiring ⁇ Sample preparation> 72 parts bisphenol epoxy resin (epoxy equivalent 190), 28 parts amine curing agent (Nippon Kayaku Kayahard AA: molecular weight 252), 100 parts fused silica, 1 part epoxy silane coupling agent, and 0.2 part of amorphous inorganic anion exchanger 1 was blended, and this was mixed well with a spatula and further mixed with three rolls. Furthermore, this mixture was put into a vacuum dryer and vacuum deaerated at 35 ° C. for 1 hour.
- Example 9 An aluminum wiring sample 2 was produced in the same manner as in Example 8 except that the amorphous inorganic anion exchanger 2 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 10 An aluminum wiring sample 3 was produced in the same manner as in Example 8 except that the amorphous inorganic anion exchanger 3 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 11 An aluminum wiring sample 4 was produced in the same manner as in Example 8 except that the amorphous inorganic anion exchanger 4 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 12 An aluminum wiring sample 5 was produced in the same manner as in Example 8 except that the amorphous inorganic anion exchanger 5 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 13 An aluminum wiring sample 6 was produced in the same manner as in Example 8 except that the amorphous inorganic anion exchanger 6 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 14 An aluminum wiring sample 7 was produced in the same manner as in Example 8 except that the amorphous inorganic anion exchanger 7 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 15 Amorphous inorganic anion exchanger 1 and ⁇ -zirconium phosphate (volume-based median diameter by laser particle size distribution meter is 1 ⁇ m) were uniformly mixed at a weight ratio of 7: 3 to obtain inorganic anion exchanger 8.
- An aluminum wiring sample 8 was produced in the same manner as in Example 8 except that this was used, and a corrosion test was performed. The results are shown in Table 3.
- Example 16 Amorphous inorganic anion exchanger 2 and ⁇ -zirconium phosphate (volume-based median diameter by laser particle size distribution meter is 1 ⁇ m) were uniformly mixed at a weight ratio of 7: 3 to obtain inorganic anion exchanger 9.
- An aluminum wiring sample 9 was produced in the same manner as in Example 8 except that this was used, and a corrosion test was performed. The results are shown in Table 3.
- Example 17 Amorphous inorganic anion exchanger 3 and ⁇ -zirconium phosphate (volume-based median diameter by laser particle size distribution meter is 1 ⁇ m) are uniformly mixed at a mass ratio of 7: 3 to obtain inorganic anion exchanger 10 and did.
- An aluminum wiring sample 10 was produced in the same manner as in Example 8 except that this was used, and a corrosion test was performed. The results are shown in Table 3.
- Example 18 Amorphous inorganic anion exchanger 4 and ⁇ -zirconium phosphate (volume-based median diameter by laser particle size distribution meter is 1 ⁇ m) were uniformly mixed at a weight ratio of 7: 3 to obtain inorganic anion exchanger 11.
- An aluminum wiring sample 11 was produced in the same manner as in Example 8 except that this was used, and a corrosion test was performed. The results are shown in Table 3.
- Example 19 Inorganic anion exchanger 5 and ⁇ -zirconium phosphate (volume basis median diameter by laser particle size distribution meter is 1 ⁇ m) were uniformly mixed at a weight ratio of 7: 3 to obtain inorganic anion exchanger 12.
- An aluminum wiring sample 12 was produced in the same manner as in Example 8 except that this was used, and a corrosion test was performed. The results are shown in Table 3.
- Example 20 Inorganic anion exchanger 6 and ⁇ -zirconium phosphate (particle diameter: 1 ⁇ m) were uniformly mixed at a weight ratio of 7: 3 to obtain inorganic anion exchanger 13.
- An aluminum wiring sample 13 was produced in the same manner as in Example 8 except that this was used, and a corrosion test was performed. The results are shown in Table 3.
- Example 21 Inorganic anion exchanger 7 and ⁇ -zirconium phosphate (particle diameter 1 ⁇ m) were uniformly mixed at a weight ratio of 7: 3 to obtain inorganic anion exchanger 14.
- An aluminum wiring sample 14 was produced in the same manner as in Example 8 except that this was used, and a corrosion test was performed. The results are shown in Table 3.
- Example 7 A comparative reference aluminum wiring sample was prepared in the same manner as in Example 8 except that the inorganic anion exchanger 1 was not used, and a corrosion test was performed. The results are shown in Table 3.
- Example 9 A comparative aluminum wiring sample 1 was produced in the same manner as in Example 8 except that the comparative compound 1 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 10 A comparative aluminum wiring sample 2 was produced in the same manner as in Example 8 except that the comparative compound 2 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 11 A comparative aluminum wiring sample 3 was produced in the same manner as in Example 8 except that the comparative compound 3 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 12 A comparative aluminum wiring sample 4 was produced in the same manner as in Example 8 except that the comparative compound 4 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 13 A comparative aluminum wiring sample 5 was prepared in the same manner as in Example 8 except that the comparative compound 5 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 14 A comparative aluminum wiring sample 6 was produced in the same manner as in Example 8 except that the comparative compound 6 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 15 A comparative aluminum wiring sample 7 was produced in the same manner as in Example 8 except that the comparative compound 7 was used instead of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- Example 16 A comparative aluminum wiring sample 8 was produced in the same manner as in Example 8 except that the comparative compound 8 was used in place of the amorphous inorganic anion exchanger 1, and a corrosion test was performed. The results are shown in Table 3.
- the amorphous inorganic anion exchanger of the present invention has a high effect of suppressing corrosion of aluminum wiring when used in a resin composition for encapsulating electronic components. Thereby, it is possible to provide a resin composition for encapsulating an electronic component that increases the reliability of the electronic component over a wide range.
- the amorphous inorganic anion exchanger of the present invention and the amorphous bismuth compound obtained by the method for producing an amorphous bismuth compound of the present invention have excellent anion exchange properties. And, when the amorphous inorganic anion exchanger of the present invention or the amorphous bismuth compound obtained by the method for producing the amorphous bismuth compound of the present invention is added to the resin, the effect of suppressing anion elution from the resin is obtained. is there. Therefore, the amorphous inorganic anion exchanger of the present invention and the amorphous bismuth compound obtained by the method for producing the amorphous bismuth compound of the present invention are highly reliable electronic parts or electric parts in a wide range.
- the amorphous inorganic anion exchanger of the present invention and the amorphous bismuth compound obtained by the method for producing the amorphous bismuth compound of the present invention can be used as a stabilizer for a resin such as vinyl chloride, a rust inhibitor, and the like. Can also be used.
- the vertical axis represents the X-ray diffraction intensity (unit: cps). 1 to 10 indicates the diffraction angle 2 ⁇ (unit: °).
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Abstract
Description
Bi6O6(OH)x(NO3)6-x・nH2O 〔3〕
また、従来のビスマス化合物の製造方法として、特許文献1には、硝酸過剰の硝酸ビスマスに、当量のアルカリを2時間程度かけて添加する方法が開示されており、さらに式〔3〕における添え字xの値を1大きくするためには約1モルのアルカリをさらに添加する方法が開示されており、より好ましい反応温度は20~50℃の範囲であることが開示されている。
Bi10O13+x(NO3)4-2x 〔4〕
また、特許文献2には、好ましくは(NO3)のBiに対する割合が4:10より大きいビスマス化合物を原料として熱分解することによって前記式〔4〕で表される結晶性のビスマス化合物が得られることが開示されており、熱分解を630℃まで行うと、結晶化したBi2O3になることが記載されている。
また、特許文献3に記載された酸化ビスマスの用途は、焼結材料の原料であるが、結晶質の酸化ビスマスは無機イオン交換体としてはイオン交換速度も交換容量も非晶質のものに劣ることが知られているから、特許文献3に開示されているのは、ビスマス-モノカルボン酸錯体沈殿と、微粒子の酸化ビスマス結晶(III)(Bi2O3)を製造する方法であって、無機陰イオン交換体として好ましい非晶質微粒子のビスマス化合物(BiO(OH))およびその製造方法について開示するものではなかった。
また、本発明の製造方法は、微粒子でイオン交換性能が高い非晶質ビスマス化合物を製造できるものであり、pH12という極めて高いpHで沈殿生成反応を行うことは従来知られておらず、この製法で得られるビスマス化合物が、従来にない微粒子でイオン交換性能が高いものであることも知られていなかった。
また、そのような無機陰イオン交換体として用いることのできる非晶質ビスマス化合物の製造方法を提供することが本発明の他の課題である。
<1>電子顕微鏡で観察される平均1次粒子径が1nm以上500nm以下であり、NO3含有量が全体の1重量%以下であり、式〔1〕で表されることを特徴とする非晶質無機陰イオン交換体、
BiO(OH) 〔1〕
<2>BET法比表面積が10m2/g以上である、<1>に記載の非晶質無機陰イオン交換体、
<3>レーザー回折式粒度分布計で測定した体積基準のメジアン径が0.01μm~20μmの範囲内である、<1>または<2>に記載の非晶質無機陰イオン交換体、
<4>レーザー回折式粒度分布計で測定した最大粒子径が20μm以下である、<1>~<3>のいずれかに記載の非晶質無機陰イオン交換体、
<5>陰イオン交換容量が2.0meq/g以上である、<1>~<4>のいずれかに記載の非晶質無機陰イオン交換体、
<6>25℃、10分間での陰イオン交換速度が2.5meq/g以上である、<1>~<5>のいずれかに記載の非晶質無機陰イオン交換体、
<7>脱イオン水に懸濁させたものの上澄の導電率が50μS/cm以下である、<1>~<6>のいずれかに記載の非晶質無機陰イオン交換体、
<8><1>~<7>のいずれかに記載の非晶質無機陰イオン交換体を含有する、電子部品封止用樹脂組成物、
<9>さらに無機陽イオン交換体を含有する、<8>に記載の電子部品封止用樹脂組成物、
<10><8>または<9>に記載の電子部品封止用樹脂組成物を硬化させてなる、電子部品封止用樹脂、
<11><8>または<9>に記載の電子部品封止用樹脂組成物により素子を封止してなる、電子部品、
<12><1>~<7>のいずれかに記載の非晶質無機陰イオン交換体を含有する、ワニス、
<13>さらに無機陽イオン交換体を含有する、<12>に記載のワニス、
<14><12>または<13>に記載のワニスを含有する物品、
<15><1>~<7>のいずれかに記載の非晶質無機陰イオン交換体を含有する、接着剤、
<16>さらに無機陽イオン交換体を含有する、<15>に記載の接着剤、
<17><15>または<16>に記載の接着剤により接着された物品、
<18><1>~<7>のいずれかに記載の非晶質無機陰イオン交換体を含有する、ペースト、
<19>さらに無機陽イオン交換体を含有する、<18>に記載のペースト、
<20><18>または<19>に記載のペーストを含有する物品、
BiO(OH) 〔1〕
<22>前記沈澱生成工程に引き続き、ろ液の導電率が300μS/cm以下になるまで沈殿を洗浄する洗浄工程を更に含む、<21>に記載の非晶質ビスマス化合物の製造方法、
<23>前記洗浄工程の後、沈殿の水分量を5重量%以下になるまで乾燥させる工程を更に含む、<22>に記載の非晶質ビスマス化合物の製造方法、
<24>前記沈澱生成工程が、pH12以上の水溶液の中に、3価Biイオンを含む酸性水溶液を投入して混合する方法で実施される、<21>~<23>のいずれかに記載の非晶質ビスマス化合物の製造方法、
<25>前記沈澱生成工程において、前記酸性水溶液中に有機酸またはアミン類を共存させる、<21>~<24>のいずれかに記載の非晶質ビスマス化合物の製造方法、
<26>前記有機酸またはアミン類として、ヒドロキシジカルボン酸を用いる、<25>に記載の非晶質ビスマス化合物の製造方法。
また、本発明によれば、優れた陰イオン交換性を有し、金属への腐食性が少ない非晶質ビスマス化合物を製造することができる製造方法を提供することができた。
本発明の非晶質無機陰イオン交換体は、粉末X線回折図形において非晶質の構造を示し、なおかつ電子顕微鏡観察による平均1次粒子径が1nm以上500nm以下であり、NO3含有量が1%以下である。
特許文献2に示されているように、従来、本発明のように硝酸イオン濃度の低いビスマス化合物は、陰イオン交換体としてはイオン交換速度が遅く、耐水性に劣るものとして、顧みられていなかったということができる。
本発明の非晶質無機陰イオン交換体は、微粒子であり、なおかつ陰イオン交換性能が高いので、封止剤組成物に用いれば、狭いピッチの配線を有する電子部品や薄い膜やフィルムの形態での封止に適し、金属配線の腐食防止の効果を発揮することができる他、幅広い範囲で電子部品または電気部品の封止、被覆、および絶縁等の様々な用途に適用することができ、腐食を防いで信頼性を高める効果がある。また、ポリ塩化ビニルなどの樹脂の安定剤、防錆剤などにも使用することができる。
BiO(OH) 〔1〕
本発明の製造方法は、粉末X線回折図形において非晶質の構造を示し、なおかつ平均1次粒子径が500nm以下であり、NO3含有量が1%以下であるビスマス化合物が容易に得られる。
本発明の非晶質ビスマス化合物の製造方法によって得られる非晶質ビスマス化合物は、本発明の非晶質無機陰イオン交換体として好適に用いることができる。
また、本発明の非晶質無機陰イオン交換体は、本発明の非晶質ビスマス化合物の製造方法により好適に製造される。
本発明の非晶質ビスマス化合物の製造方法、及び、当該製造方法によって得られる非晶質ビスマス化合物の好ましい態様はそれぞれ、特に断りのない限り、後述する本発明の非晶質無機陰イオン交換体の製造方法、及び、本発明の非晶質無機陰イオン交換体の好ましい態様と同様である。
また、本発明の非晶質ビスマス化合物の製造方法は、前記沈澱生成工程に引き続き、ろ液の導電率が300μS/cm以下になるまで沈殿を洗浄する洗浄工程を更に含むことが好ましく、前記洗浄工程の後、沈殿の水分量を5重量%以下になるまで乾燥させる工程を更に含むことがより好ましい。
本発明の無機陰イオン交換体が非晶質であることは、粉末X線回折分析によって確認することができる。粉末X線回折分析は、例えばJIS K0131-1996の規定に従って行うことができる。JISの規定にはX線管球の印加電圧の定めはないが、Cuターゲットを用いたX線管球への印加電圧50kV、電流値120mAで、発生するCuKα線を用いてX線回折測定を行うのが標準的な測定方法である。もし試料に結晶質の物質が含まれていた場合は、X線回折図に鋭角の形状を有する回折ピークが表れるので、得られた粉末X線回折図から、回折ピークの回折角2θを決定し、λ=2dsinθの関係に基づいて結晶の面間隔dを算出し、結晶系の同定をすることができる。なお、CuKα線のλは1.5405オングストロームである。
回折角2θ=20°~40°の間に鋭角なピークが混在したり、ブロードなピークであっても10,000cps以上であると、結晶質のものが含まれることを意味する。本発明の非晶質無機陰イオン交換体においては、イオン交換性能の観点から、結晶質のものが含まれない方が好ましい。
BiO(OH) 〔1〕
本発明の非晶質無機陰イオン交換体と併用してよいものとしては、BiO(OH)以外の陰イオン交換能を有する無機化合物であり、硝酸イオンを含まないものが好ましく、具体的にはハイドロタルサイト、含水酸化ビスマス、含水酸化マグネシウム、および含水酸化アルミニウムなどを挙げることができる。このうち好ましいのは、含水酸化ビスマスであり、また、併用するときの好ましい量としては、無機陰イオン交換体全体の50%以下、より好ましくは30%以下、さらに好ましくは5%以下である。
他に含まれても良い不純物としてはH2Oがあり、好ましい含有量は5%以下であり、より好ましくは3%以下、さらに好ましくは1%以下、特に好ましくは0.5%以下である。Bi(OH)3も含まれてもよく、好ましい含有量は3%以下であり、より好ましくは1%以下、さらに好ましくは0.5%以下である。
BiO(OH)x(NO3)1-x 〔2〕
また、本発明の非晶質無機陰イオン交換体は、式〔1〕で表される化合物を50重量%以上含有し、70重量%以上含有することが好ましく、95重量%以上含有することがより好ましい。
本発明の非晶質無機陰イオン交換体は、3価Biイオンを含む酸性水溶液を、温度範囲0~20℃の間で、pHを12以上にして沈澱を生成させる工程を含む製造方法で得ることができる。
沈澱を生成させる際のpHとしては12以上が好ましく、より好ましくはpH12~14であり、さらに好ましくはpH12.3~13.5であり、特に好ましくはpH12.7~13.3である。pHが12以上であると、NO3の残存を防ぐことができる。pHは一般的なガラス電極を用いたpHメーターを用いて測定することができる。この沈澱を生成させるときの溶液の温度としては、0℃より高く20℃未満であることが好ましく、より好ましくは0℃より高く15℃未満であり、さらに好ましくは0℃より高く10℃未満である。当該温度が0℃より高いと、氷ができて反応が阻害されることを抑制でき、逆に20℃未満であると、粒子径の適度なものが容易に得られる。
本発明の非晶質無機陰イオン交換体の製造方法は、前記洗浄工程の後、沈殿の水分量を5%以下になるまで乾燥させる乾燥工程を更に含むことが好ましい。
本発明の非晶質無機陰イオン交換体の2次粒子径はとくに限定しないが、例えば脱イオン水に超音波分散したものをレーザー回折式粒度分布計で測定し、体積基準のメジアン径を2次粒子径の代表値として採用することができる。好ましい2次粒子径としては0.01~20μm、より好ましくは0.05~20μm、さらに好ましくは0.1~10.0μmである。2次粒子径が0.01μm以上であると再凝集を抑制でき、20μm以下であると、樹脂に添加して薄いフィルムや膜状として用いるときにブツやつまりなどのトラブルの発生を抑制できる。
また、本発明の非晶質ビスマス化合物の製造方法によって得られる非晶質ビスマス化合物の平均1次粒子径は、好ましくは1nm以上500nm以下であり、より好ましくは10nm以上300nm以下、さらに好ましくは30nm以上200nm以下である。
本発明の非晶質無機陰イオン交換体の陰イオン交換容量は、塩酸を用いて測定することができる。具体的な測定例としては、1gの無機陰イオン交換体と50mlの0.1mol/リットル濃度の塩酸とを100mlのポリエチレン製の瓶に入れ、40℃で24時間振盪し、その後、上澄の塩素イオン濃度をイオンクロマトグラフィーで測定し、無機陰イオン交換体を入れないで同様の操作を行って塩素イオン濃度を測定したものをブランク値として、その差を無機陰イオン交換体1gあたりの陰イオン交換容量とすることができる。
本発明の非晶質無機陰イオン交換体の陰イオン交換速度とは、上記の陰イオン交換容量の測定において、24時間振盪する代わりに、10分間の振盪の間にイオン交換した量を測定することによってイオン交換速度の指標にするものである。イオン交換速度は大きい方が好ましく、2.5meq/g以上が好ましく、より好ましくは3.0meq/g以上、さらに好ましくは3.2meq/g以上であり、好ましい上限は5meq/g以下である。
本発明の非晶質無機陰イオン交換体を脱イオン水に入れて撹拌し、静置沈殿させた上澄の導電率を測定したものを本発明における導電率と定義する。導電率が大きい値を示すときは、イオン性物質が溶出していることを意味するから導電率は小さい方が好ましい。具体的には、容量100mlのポリプロピレン製の瓶に、0.5gの無機陰イオン交換体と50mlの脱イオン水とを入れ、95℃で20時間保持し、その後、上澄の導電率を導電率計で測定することによって決定することができる。
本発明の非晶質無機陰イオン交換体について好ましい導電率は、50μS/cm以下であり、より好ましくは40μS/cm以下であり、さらに好ましくは30μS/cm以下であり、好ましい下限は0.1μS/cm以上である。
本発明の陰イオン交換体としては、導電率が上記記載の範囲であると電子部品封止等の用途として、少量の添加量で充分な効果が得られるからである。
例えば、本発明の非晶質無機陰イオン交換体を電子部品封止剤に用いる場合は、陰イオン交換容量が2.0meq/g以上であり、なおかつ導電率が50μS/cm以下のものを用いると配線腐食を防止する効果に優れることが期待できる。
本発明の電子部品封止用樹脂組成物は、本発明の非晶質無機陰イオン交換体を含有する樹脂組成物である。
本発明の非晶質無機陰イオン交換体を配合する電子部品封止用樹脂組成物に用いられる樹脂としては、フェノール樹脂、ユリア樹脂、メラニン樹脂、不飽和ポリエステル樹脂、およびエポキシ樹脂等の熱硬化性樹脂であっても、ポリエチレン、ポリスチレン、塩化ビニル、およびポリプロピレン等の熱可塑性樹脂であってもよく、常温硬化のシリコーン系樹脂も用いることができるが、好ましくは熱硬化性樹脂である。本発明の電子部品封止用樹脂組成物に用いる熱硬化性樹脂としては、フェノール樹脂またはエポキシ樹脂が好ましく、特に好ましくはエポキシ樹脂であり、その場合は電子部品封止用エポキシ樹脂組成物と呼ぶ。
電子部品封止用エポキシ樹脂組成物に用いるエポキシ樹脂は、電子部品封止用樹脂に用いられているものであれば限定なく用いることができる。例えば、1分子中に2個以上のエポキシ基を有し、硬化可能なものであれば特に種類は問わず、フェノール・ノボラック型エポキシ樹脂、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、脂環式エポキシ樹脂等、成形材料として用いられているものをいずれも使用できる。また、本発明の組成物の耐湿性を高めるためには、エポキシ樹脂として、塩化物イオン含有量が10ppm以下、加水分解性塩素含有量が1,000ppm以下のものを用いることが好ましい。
本発明に用いる硬化剤はエポキシ樹脂組成物の硬化剤として知られているものをいずれも使用可能であり、好ましい具体例として、酸無水物、アミン系硬化剤およびノボラック系硬化剤等がある。
本発明に用いる硬化促進剤はエポキシ樹脂組成物の硬化促進剤として知られているものをいずれも使用可能であり、好ましい具体例として、アミン系、リン系、およびイミダゾール系の促進剤等がある。
本発明の電子部品封止用樹脂組成物または電子部品封止用エポキシ樹脂組成物を用いて素子を封止する方法としては、低圧トランスファ成形法が最も一般的であるが、インジェクション成形法、圧縮成形法等を用いてもよい。ここに無機陽イオン交換体を含有させても良い。
エポキシ樹脂等の熱硬化性を用いてプリント配線基板とし、これに銅箔等を接着し、これをエッチング加工等して回路を作製して配線板を作製している。しかし近年、回路の高密度化、回路の積層化および絶縁層の薄膜化等により腐食や絶縁不良が問題となっている。配線板を作製するときに本発明の非晶質無機陰イオン交換体を添加することによりこのような腐食を防止することができる。また、配線板用の絶縁層にも本発明の非晶質無機陰イオン交換体を添加することにより、配線板の腐食等を防止することができる。このようなことから本発明の非晶質無機陰イオン交換体を含有する配線板は、腐食等に起因する不良品発生を抑制することができる。この配線板や配線板用の絶縁層中の樹脂固形分100部に対し、0.1~5部の本発明の非晶質無機陰イオン交換体を添加することが好ましい。ここに無機陽イオン交換体を含有させても良い。
配線板等の基板に接着剤を用いて電子部品等を実装している。このとき用いる接着剤に本発明の非晶質無機陰イオン交換体を添加することにより、金属の腐食等に起因する不良品発生を抑制することができる。この接着剤中の樹脂固形分100部に対し、0.1~5部の本発明の非晶質無機陰イオン交換体を添加することが好ましい。
配線板に電子部品等を接続するまたは配線するときに用いる伝導性接着剤等に本発明の非晶質無機陰イオン交換体を添加することにより腐食等に起因する不良を抑制することができる。この伝導性接着剤とは、銀等の伝導性金属を含むものが例示できる。この伝導性接着剤中の樹脂固形分100部に対し0.1~5部の本発明の非晶質無機陰イオン交換体を添加することが好ましい。ここに無機陽イオン交換体を含有させても良い。
本発明の非晶質無機陰イオン交換体を含有したワニスを用いて電気製品、プリント配線板、または電子部品等を作製することができる。このワニスとしては、エポキシ樹脂等の熱硬化性樹脂を主成分とするものが例示できる。この樹脂固形分100部に対し0.1~5部の本発明の非晶質無機陰イオン交換体を添加することが好ましい。ここに無機陽イオン交換体を含有させても良い。
銀粉等を含有させたペーストに本発明の非晶質無機陰イオン交換体を添加することができる。ペーストとは、ハンダ付け等の補助剤として接続金属同士の接着を良くするために用いられるものである。このことにより、ペーストから発生する腐食性物の発生を抑制することができる。ペーストとしては、例えば、ハンダペースト、銀ペースト及び銅ペーストなどの導電性ペーストが例示できる。このペースト中の樹脂固形分100部に対し0.1~5部の本発明の非晶質無機陰イオン交換体を添加することが好ましい。ここに無機陽イオン交換体を含有させても良い。
(1)無機陰イオン交換体を硝酸で溶解し、ICP(誘導結合プラズマ式発光分光分析装置)によりビスマス含有量を測定した。(2)無機陰イオン交換体0.5gに0.1N水酸化ナトリウム水溶液50mlを加え、95℃で20時間処理した。処理後の液中の硝酸イオン濃度をイオンクロマトグラフィーで測定し、硝酸イオン含有量を求めた。この2つの測定結果から、無機陰イオン交換体の組成を算出した。
2BiO(OH)→Bi2O3+H2O 〔5〕
熱分析の結果は、どれも付着水の蒸発と思われる110℃以下での重量減少が見られたが、実施例では250℃~350℃にかけて階段状の重量減少があった。そこで、110℃~1,000℃の間での重量減少が、付着水を除く固体全体の3.7%付近(3.2~4.2%)であり、加熱前が非晶質で、1,000℃で加熱した後は粉末X栓回折でα-Bi2O3結晶であることが確かめられたものは式〔1〕または式〔2〕で規定されるBiO(OH)であると結論付けた。下記の実施例1~実施例7はすべてこの条件に当てはまった。
5%水酸化ナトリウム水溶液530gを冷却して5℃とした。また、50%硝酸ビスマス水溶液60gを5%硝酸200gで希釈し、冷却して5℃とした。
用意した水酸化ナトリウム水溶液を1Lビーカーに入れ、5℃に冷却しながら400rpmで撹拌した(pH=14)。そこへ、冷却したビスマス水溶液を漏斗を使用して、1分以内に全量添加した。滴下後のスラリーのpHは13.0であった。
得られた非晶質無機陰イオン交換体1を(株)日立製作所製S-4800型走査電子顕微鏡(SEM)で観察し、無作為に選んだ100個の粒子の長径を測定した。その数平均値を平均1次粒子径とした。この結果を表1に示す。
得られた非晶質無機陰イオン交換体1の0.1gをマルバーン社製「AUTOSORB-1」によりBET比表面積を測定した。この結果を表1に示す。
得られた非晶質無機陰イオン交換体1の0.1gを10mlの脱イオン水に分散させ、70Wの超音波で30秒分散させた。そのスラリーを、マルバーン社製レーザー回折式粒度分布計、マスターサイザー2000により粒度分布を測定した。この測定値の体積基準のメジアン径、および最大値をそれぞれ2次粒子径、および最大粒子径とした。この結果を表1に示す。
1.0gの非晶質無機陰イオン交換体1を100mlのポリエチレン製の瓶に入れ、更に50mlの0.1mol/リットル濃度の塩酸を投入し、密栓して25℃で24時間振とうした。その後、ポアサイズ0.1μmのメンブレンフィルターでこの溶液を濾過し、ろ液中の塩素イオン濃度をイオンクロマトグラフィーで測定した。何も固形分を入れないで同様の操作を行って塩素イオン濃度を測定したものと比較して陰イオン交換容量を求めた。この結果を表1に示す。
1.0gの非晶質無機陰イオン交換体1を100mlのポリエチレン製の瓶に入れ、更に50mlの0.1mol/リットル濃度の塩酸を投入し、密栓して25℃で10分振とうした。その後直ぐに、ポアサイズ0.1μmのメンブレンフィルターでこの溶液を濾過し、ろ液中の塩素イオン濃度をイオンクロマトグラフィーで測定した。何も固形分を入れないで同様の操作を行って塩素イオン濃度を測定したものと比較してイオン交換容量を求め、この値を陰イオン交換速度とした。この結果を表1に示す。
0.5gの非晶質無機陰イオン交換体1を100mlのポリプロピレン製の瓶に入れ、更に50mlの脱イオン水を投入し、栓をして、95℃で20時間保持した(破裂防止のため、瓶には小さな穴をあけてある。)。20時間後、冷却し、デカンテーションで上澄を取り出し、0.1μmのメンブレンフィルターでろ過後、ろ液の導電率を測定して上澄の導電率とした。この結果を表1に示す。
10%水酸化ナトリウム水溶液530gを冷却して5℃とした。また、50%硝酸ビスマス水溶液180gを5%硝酸420gで希釈した。そこへ酒石酸2.8gを添加して溶解し、冷却して5℃とした。用意した水酸化ナトリウム水溶液を2Lビーカーに入れ、5℃に冷却しながら400rpmで撹拌した(pH=14)。そこへ、冷却したビスマス水溶液を漏斗を使用して、1分以内に全量添加した。滴下後のスラリーのpHは13.2であった。得られた沈殿物をただちにろ過し、10℃の脱イオン水でろ液の導電率が50μS/cm以下になるまで洗浄した。ろ過と洗浄とは30分で終了した。この沈殿物を120℃で24時間乾燥した。その後、粉砕し、非晶質無機陰イオン交換体(非晶質ビスマス化合物)2を得た。この化合物の分析を行ったところ、BiO(OH)であり、NO3含有量は0.2%であった。
10%水酸化ナトリウム水溶液530gを冷却して10℃とした。また、50%硝酸ビスマス水溶液180gを5%硝酸420gで希釈した。そこへ酒石酸2.8gを添加して溶解し、冷却して10℃とした。用意した水酸化ナトリウム水溶液を2Lビーカーに入れ、10℃に冷却しながら400rpmで撹拌した(pH=14)。そこへ、冷却したビスマス水溶液を漏斗を使用して、1分以内に全量添加した。滴下後のスラリーのpHは13.2であった。得られた沈殿物をただちにろ過し、10℃の脱イオン水でろ液の導電率が50μS/cm以下になるまで洗浄した。ろ過と洗浄とは30分で終了した。この沈殿物を120℃で24時間乾燥した。その後、粉砕し、非晶質無機陰イオン交換体(非晶質ビスマス化合物)3を得た。この化合物の分析を行ったところ、BiO(OH)であり、NO3含有量は0.2%であった。
10%水酸化ナトリウム水溶液530gを冷却して10℃とした。また、50%硝酸ビスマス水溶液180gを5%硝酸420gで希釈した。そこへ酒石酸2.8gを添加して溶解し、冷却して10℃とした。用意した水酸化ナトリウム水溶液を2Lビーカーに入れ、10℃に冷却しながら400rpmで撹拌した(pH=14)。そこへ、冷却したビスマス水溶液をローラーポンプを使用して、20ml/minの速度で約30分かけて全量添加した。滴下後のスラリーのpHは13.2であった。得られた沈殿物をただちにろ過し、10℃の脱イオン水でろ液の導電率が50μS/cm以下になるまで洗浄した。ろ過と洗浄とは30分で終了した。
10%水酸化ナトリウム水溶液530gを冷却して17℃とした。また、50%硝酸ビスマス水溶液180gを5%硝酸420gで希釈した。そこへ酒石酸2.8gを添加して溶解し、冷却して10℃とした。用意した水酸化ナトリウム水溶液を2Lビーカーに入れ、17℃に冷却しながら400rpmで撹拌した(pH=14)。そこへ、冷却したビスマス水溶液をローラーポンプを使用して、20ml/minの速度で約30分かけて全量添加した。滴下後のスラリーのpHは13.2であった。得られた沈殿物をただちにろ過し、10℃の脱イオン水でろ液の導電率が50μS/cm以下になるまで洗浄した。ろ過と洗浄とは30分で終了した。
10%水酸化ナトリウム水溶液530gを冷却して10℃とした。また、50%硝酸ビスマス水溶液180gを5%硝酸420gで希釈した。そこへシュウ酸2水和物2.35gを添加して溶解し、冷却して10℃とした。用意した水酸化ナトリウム水溶液を2Lビーカーに入れ、10℃に冷却しながら400rpmで撹拌した(pH=14)。そこへ、冷却したビスマス水溶液をローラーポンプを使用して、20ml/minの速度で約30分かけて全量添加した。滴下後のスラリーのpHは13.1であった。得られた沈殿物をただちにろ過し、10℃の脱イオン水でろ液の導電率が50μS/cm以下になるまで洗浄した。ろ過と洗浄とは30分で終了した。
1Lビーカーに脱イオン水200g、ポリエチレンイミン(分子量600)を40.0g入れ、溶解させ、15℃にした。一方、500mlビーカーに脱イオン水200g、71%-HNO3を10.0g添加し、さらに日本化学産業(株)製50%-Bi(NO3)3・5H2Oを20.83gゆっくりと添加し、均一に撹拌して液温を15℃にした。また、10%水酸化カリウム水溶液を500g用意し、15℃にした。1Lビーカー中のポリエチレンイミン水溶液を400rpmで撹拌し、そこへ硝酸ビスマス水溶液をローラーポンプを使用して20ml/minで滴下した。同時に10%水酸化カリウム水溶液を1Lビーカーの内溶液のpHが12.5になるように流量調節しながら滴下した。硝酸ビスマス水溶液がなくなったところで10%水酸化カリウム水溶液の滴下も終了した。こうして、得られた1Lビーカーの混合液には沈殿物ができていたので、速やかにろ過し、15℃の脱イオン水でろ液の導電率が50μS/cm以下になるまで洗浄した。ろ過と洗浄とは30分で終了した。こうして得られた沈殿物を120℃で24時間乾燥した。その後、粉砕し、非晶質無機陰イオン交換体(非晶質ビスマス化合物)7を得た。この化合物の分析を行ったところ、BiO(OH)であり、NO3含有量は0.7%であった。非晶質無機陰イオン交換体7の粉末X線回折(XRD)測定を行ったが、実施例1,2と同じく20°~40°のところにブロードなピークがあるだけで、結晶質に基づく鋭いピークは認められず、非晶質であることが確かめられた。実施例1と同様に、非晶質無機陰イオン交換体7の1次粒子径、2次粒子径、最大粒子径、比表面積、イオン交換容量、イオン交換速度、上澄の導電率等の測定を行い、これらの結果を表1に記載した
5%水酸化ナトリウム水溶液530gを25℃とした。また、50%硝酸ビスマス水溶液60gを5%硝酸200gで希釈し、25℃とした。用意した水酸化ナトリウム水溶液を1Lビーカーに入れ、25℃で400rpmで撹拌した(pH=14)。そこへ、ビスマス水溶液を、漏斗を使用して1分以内に全量添加した。滴下後のスラリーのpHは13.0であった。得られた沈殿物を25℃で24時間保存後、ろ過し、25℃の脱イオン水でろ液の導電率が50μS/cm以下になるまで洗浄した。この沈殿物を120℃で24時間乾燥した。その後、粉砕し、比較化合物1を得た。この化合物の分析を行ったところ、Bi2O3であり、NO3含有量は0.6%であった。
50%硝酸ビスマス水溶液180gを5%硝酸420gで希釈し、25℃に保ち撹拌しながら、10%水酸化ナトリウム水溶液をローラーポンプを使用して、20ml/minの速度でpHが13.0になるまで滴下しところ、pHが1.0付近から沈殿が生成し始めた。得られた沈殿物を直ちにろ過し、25℃の脱イオン水でろ液の導電率が50μS/cm以下になるまで洗浄した。ろ過と洗浄とは30分で終了した。この沈殿物を120℃で24時間乾燥した。その後、粉砕し、比較化合物2を得た。この化合物の分析を行ったところ、組成はBi2O3であり、NO3含有量は0.4%であった。
比較化合物2の粉末X線回折(XRD)測定を行った。この回折図形を図4に示す。比較化合物2の粉末X線回折図形は、公知のα-Bi2O3の回折図形とピーク位置が一致した。実施例1と同様に、比較化合物2の1次粒子径、2次粒子径、最大粒子径、比表面積、イオン交換容量、イオン交換速度、上澄の導電率等の測定を行い、これらの結果を表2に記載した。
50%硝酸ビスマス水溶液180gを5%硝酸420gで希釈し、さらに酒石酸2.8gを添加して溶解し、冷却して5℃とした。5℃に保ち撹拌しながら、10%水酸化ナトリウム水溶液をローラーポンプを使用して、20ml/minの速度でpHが13.0になるまで滴下したところ、pHが1.0付近から沈殿が生成し始めた。
10%水酸化ナトリウム水溶液530gを25℃とした。また、50%硝酸ビスマス水溶液60gを5%硝酸200gで希釈し、さらに酒石酸2.8gを添加し溶解し、25℃とした。用意した水酸化ナトリウム水溶液を1Lビーカーに入れ、25℃に保ちながら400rpmで撹拌した。そこへ、ビスマス水溶液をローラーポンプを使用して、20ml/minの速度で全量添加したところ、pHが1.0付近から沈殿が生成し始めた。滴下後のスラリーのpHは13.2であった。得られた沈殿物を直ちにろ過し、10℃の脱イオン水でろ液の導電率が50μS/cm以下になるまで洗浄した。ろ過と洗浄とは30分で終了した。
50%硝酸ビスマス水溶液180gを5%硝酸420gで希釈し、さらに酒石酸2.8gを添加して溶解し、25℃とした。25℃に保ち撹拌しながら、10%水酸化ナトリウム530gを漏斗を使用して、1分以内に全量添加した。滴下後のスラリーのpHは13.2であった。得られた沈殿物を直ちにろ過し、10℃の脱イオン水でろ液の導電率が50μS/cm以下になるまで洗浄した。ろ過と洗浄とは30分で終了した。この沈殿物を120℃で24時間乾燥した。その後、粉砕し、比較化合物5を得た。この化合物の分析を行ったところ、NO3含有量は0.2%であった。比較化合物5の粉末X線回折(XRD)測定を行った。この回折図形を図7に示す。比較化合物5の粉末X線回折図形は、10,000cps未満の小さなピークではあるが、α-Bi2O3とは異なるピーク位置に回折ピークがあったことから不明相の結晶が生成していた。実施例1と同様に、比較化合物5の1次粒子径、2次粒子径、最大粒子径、比表面積、イオン交換容量、イオン交換速度、上澄の導電率等の測定を行い、これらの結果を表2に記載した。
50%硝酸ビスマス水溶液を25℃に保ち攪拌しながら、15%水酸化ナトリウム水溶液を滴下して30分かけてpHを8まで上げた。このとき、pH1付近から沈殿が生成し始めた。その後さらに30分かけて2%水酸化ナトリウム水溶液を滴下して溶液のpHを10に調整した。そして、生じた沈殿物を濾過し、脱イオン水で洗浄した。ろ過と洗浄とは30分で終了した。この沈殿物を120℃で24時間乾燥した。その後、粉砕し、比較化合物6を得た。この化合物の分析を行ったところ、Bi(OH)2.65(NO3)0.35であった。また、この化合物の粉末X線回折(XRD)測定を行い、この回折図形を図8に示す。この結果、2θ=28°のピーク強度が1,100cpsであり、2θ=8.5°のピーク強度が380cpsであり、2θ=7.4°のピーク強度が400cpsのものであった。すなわち、α-Bi2O3ではない不明相の結晶が生成していた。
実施例1と同様に、比較化合物6の1次粒子径、2次粒子径、最大粒子径、比表面積、イオン交換容量、イオン交換速度、上澄の導電率等の測定を行い、これらの結果を表2に記載した。
試薬の水酸化ビスマスBi(OH)3を比較化合物7として用いた。XRD回折図形を図9に示す。また、この水酸化ビスマスのXRD回折における2θ=28℃のピーク強度は2,800cpsで、2θ=8.5°のピーク強度は900cpsで、2θ=7.4°のピークは検出されなかった。すなわち、α-Bi2O3ではない不明相の結晶が生成していた。
実施例1と同様に、比較化合物7の1次粒子径、2次粒子径、最大粒子径、比表面積、イオン交換容量、イオン交換速度、上澄の導電率等の測定を行い、これらの結果を表2に記載した。
試薬の酸化ビスマスBi2O3を比較化合物8として用いた。XRD回折図形を図10に示す。
実施例1と同様に、比較化合物8の1次粒子径、2次粒子径、最大粒子径、比表面積、イオン交換容量、イオン交換速度、上澄の導電率等の測定を行い、これらの結果を表2に記載した。
○アルミニウム配線の腐食試験
<サンプルの作製>
72部のビスフェノールエポキシ樹脂(エポキシ当量190)、28部のアミン系硬化剤(日本化薬(株)製カヤハードAA:分子量252)、100部の溶融シリカ、エポキシ系シランカップリング剤1部、および0.2部の非晶質無機陰イオン交換体1を配合し、これをスパーテルでよく混合し、更に3本ロールで混合した。更にこの混合物を真空乾燥機に入れ、35℃で1時間真空脱気した。
混合した樹脂組成物(電子部品封止用樹脂組成物)を、ガラス板に印刷された2本のアルミ配線(線幅20μm、膜厚0.15μm、長さ1,000mm、線間隔20μm、抵抗値・約9kΩ)上に厚さ1mmで塗布し、120℃で硬化させた(アルミ配線サンプル1)。
<腐食試験>
作製したアルミ配線サンプル1についてプレッシャークッカーテスト(PCT試験)を行った。(使用機器:楠本化成(株)製PLAMOUNT-PM220、130℃±2℃、85%RH(±5%)、印加電圧40V、時間40時間)PCT試験前と後で、陽極のアルミ配線の抵抗値を測定し、抵抗値の変化率を、(PCT試験後の抵抗値/PCT試験前の抵抗値)×100(%)として評価した。また、アルミ配線の腐食度合いを裏面から顕微鏡で観察した。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに非晶質無機陰イオン交換体2を用いた以外は実施例8と同様に操作してアルミ配線サンプル2を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに非晶質無機陰イオン交換体3を用いた以外は実施例8と同様に操作してアルミ配線サンプル3を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに非晶質無機陰イオン交換体4を用いた以外は実施例8と同様に操作してアルミ配線サンプル4を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに非晶質無機陰イオン交換体5を用いた以外は実施例8と同様に操作してアルミ配線サンプル5を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに非晶質無機陰イオン交換体6を用いた以外は実施例8と同様に操作してアルミ配線サンプル6を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに非晶質無機陰イオン交換体7を用いた以外は実施例8と同様に操作してアルミ配線サンプル7を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1とαリン酸ジルコニウム(レーザー粒度分布計による体積基準メジアン径が1μm)を重量比7:3で均一に混合して、無機陰イオン交換体8とした。これを用いた以外は実施例8と同様に操作してアルミ配線サンプル8を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体2とαリン酸ジルコニウム(レーザー粒度分布計による体積基準メジアン径が1μm)を重量比7:3で均一に混合して、無機陰イオン交換体9とした。これを用いた以外は実施例8と同様に操作してアルミ配線サンプル9を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体3とαリン酸ジルコニウム(レーザー粒度分布計による体積基準メジアン径が1μm)を重量比7:3の質量比で均一に混合して、無機陰イオン交換体10とした。これを用いた以外は実施例8と同様に操作してアルミ配線サンプル10を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体4とαリン酸ジルコニウム(レーザー粒度分布計による体積基準メジアン径が1μm)を重量比7:3で均一に混合して、無機陰イオン交換体11とした。これを用いた以外は実施例8と同様に操作してアルミ配線サンプル11を作製し、腐食試験を行った。結果を表3に示す。
無機陰イオン交換体5とαリン酸ジルコニウム(レーザー粒度分布計による体積基準メジアン径が1μm)を重量比7:3で均一に混合して、無機陰イオン交換体12とした。これを用いた以外は実施例8と同様に操作してアルミ配線サンプル12を作製し、腐食試験を行った。結果を表3に示す。
無機陰イオン交換体6とαリン酸ジルコニウム(粒子径1μm)を重量比7:3で均一に混合して、無機陰イオン交換体13とした。これを用いた以外は実施例8と同様に操作してアルミ配線サンプル13を作製し、腐食試験を行った。結果を表3に示す。
無機陰イオン交換体7とαリン酸ジルコニウム(粒子径1μm)を重量比7:3で均一に混合して、無機陰イオン交換体14とした。これを用いた以外は実施例8と同様に操作してアルミ配線サンプル14を作製し、腐食試験を行った。結果を表3に示す。
無機陰イオン交換体1を使用しない以外は実施例8と同様に操作して比較参考アルミ配線サンプルを作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに比較化合物1を用いた以外は実施例8と同様に操作して比較アルミ配線サンプル1を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに比較化合物2を用いた以外は実施例8と同様に操作して比較アルミ配線サンプル2を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに比較化合物3を用いた以外は実施例8と同様に操作して比較アルミ配線サンプル3を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに比較化合物4を用いた以外は実施例8と同様に操作して比較アルミ配線サンプル4を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに比較化合物5を用いた以外は実施例8と同様に操作して比較アルミ配線サンプル5を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに比較化合物6を用いた以外は実施例8と同様に操作して比較アルミ配線サンプル6を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに比較化合物7を用いた以外は実施例8と同様に操作して比較アルミ配線サンプル7を作製し、腐食試験を行った。結果を表3に示す。
非晶質無機陰イオン交換体1の代わりに比較化合物8を用いた以外は実施例8と同様に操作して比較アルミ配線サンプル8を作製し、腐食試験を行った。結果を表3に示す。
図1~10の横軸は、回折角度2θ(単位°)を示す。
Claims (26)
- 電子顕微鏡で観察される平均1次粒子径が1nm以上500nm以下であり、
NO3含有量が全体の1重量%以下であり、
式〔1〕で表されることを特徴とする
非晶質無機陰イオン交換体。
BiO(OH) 〔1〕 - BET法比表面積が10m2/g以上である、請求項1に記載の非晶質無機陰イオン交換体。
- レーザー回折式粒度分布計で測定した体積基準のメジアン径が0.01μm~20μmの範囲内である、請求項1または2に記載の非晶質無機陰イオン交換体。
- レーザー回折式粒度分布計で測定した最大粒子径が20μm以下である、請求項1~3のいずれかに記載の非晶質無機陰イオン交換体。
- 陰イオン交換容量が2.0meq/g以上である、請求項1~4のいずれかに記載の非晶質無機陰イオン交換体。
- 25℃、10分間での陰イオン交換速度が2.5meq/g以上である、請求項1~5のいずれかに記載の非晶質無機陰イオン交換体。
- 脱イオン水に懸濁させたものの上澄の導電率が50μS/cm以下である、請求項1~6のいずれかに記載の非晶質無機陰イオン交換体。
- 請求項1~7のいずれかに記載の非晶質無機陰イオン交換体を含有する、電子部品封止用樹脂組成物。
- さらに無機陽イオン交換体を含有する、請求項8に記載の電子部品封止用樹脂組成物。
- 請求項8または9に記載の電子部品封止用樹脂組成物を硬化させてなる、電子部品封止用樹脂。
- 請求項8または9に記載の電子部品封止用樹脂組成物により素子を封止してなる、電子部品。
- 請求項1~7のいずれかに記載の非晶質無機陰イオン交換体を含有する、ワニス。
- さらに無機陽イオン交換体を含有する、請求項12に記載のワニス。
- 請求項12または13に記載のワニスを含有する物品。
- 請求項1~7のいずれかに記載の非晶質無機陰イオン交換体を含有する、接着剤。
- さらに無機陽イオン交換体を含有する、請求項15に記載の接着剤。
- 請求項15または16に記載の接着剤により接着された物品。
- 請求項1~7のいずれかに記載の非晶質無機陰イオン交換体を含有する、ペースト。
- さらに無機陽イオン交換体を含有する、請求項18に記載のペースト。
- 請求項18または19に記載のペーストを含有する物品。
- 3価Biイオンを含む酸性水溶液を、温度範囲が0℃より高く20℃未満で、pHを12以上にして沈澱を生成させる沈澱生成工程を含み、
得られる非晶質ビスマス化合物が、式〔1〕で表され、かつNO3の含有量が1重量%以下であることを特徴とする
非晶質ビスマス化合物の製造方法。
BiO(OH) 〔1〕 - 前記沈澱生成工程に引き続き、ろ液の導電率が300μS/cm以下になるまで沈殿を洗浄する洗浄工程を更に含む、請求項21に記載の非晶質ビスマス化合物の製造方法。
- 前記洗浄工程の後、沈殿の水分量を5重量%以下になるまで乾燥させる乾燥工程を更に含む、請求項22に記載の非晶質ビスマス化合物の製造方法。
- 前記沈澱生成工程が、pH12以上の水溶液の中に、3価Biイオンを含む酸性水溶液を投入して混合する方法で実施される、請求項21~23のいずれかに記載の非晶質ビスマス化合物の製造方法。
- 前記沈澱生成工程において、前記酸性水溶液中に有機酸またはアミン類を共存させる、請求項21~24のいずれかに記載の非晶質ビスマス化合物の製造方法。
- 前記有機酸またはアミン類として、ヒドロキシジカルボン酸を用いる、請求項25に記載の非晶質ビスマス化合物の製造方法。
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| CN201380032643.8A CN104487169B (zh) | 2012-06-21 | 2013-06-13 | 非晶质无机阴离子交换体、电子零件封装用树脂组合物及非晶质铋化合物的制造方法 |
| US14/410,256 US9849449B2 (en) | 2012-06-21 | 2013-06-13 | Amorphous inorganic anion exchanger, resin composition for electronic component sealing, and process for producing amorphous bismuth compound |
| KR1020157001436A KR102040351B1 (ko) | 2012-06-21 | 2013-06-13 | 비정질 무기 음이온 교환체, 전자 부품 밀봉용 수지 조성물 및 비정질 비스무트 화합물의 제조 방법 |
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| US20170369747A1 (en) * | 2016-06-24 | 2017-12-28 | Zhen Ding Technology Co., Ltd. | Resin composition, adhesive film, and circuit board using the same |
| JP2018188578A (ja) * | 2017-05-10 | 2018-11-29 | 信越化学工業株式会社 | エポキシ樹脂組成物及び半導体装置 |
| WO2019216388A1 (ja) * | 2018-05-10 | 2019-11-14 | 積水化学工業株式会社 | 硬化性組成物、半導体素子保護用材料、及び半導体装置 |
| JP2021087903A (ja) * | 2019-12-02 | 2021-06-10 | 株式会社東芝 | 浄化装置 |
| JP2022523304A (ja) * | 2019-01-25 | 2022-04-22 | セラミック パウダー テクノロジー エーエス | セラミック複合酸化物 |
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| US20170369747A1 (en) * | 2016-06-24 | 2017-12-28 | Zhen Ding Technology Co., Ltd. | Resin composition, adhesive film, and circuit board using the same |
| JP2018188578A (ja) * | 2017-05-10 | 2018-11-29 | 信越化学工業株式会社 | エポキシ樹脂組成物及び半導体装置 |
| WO2019216388A1 (ja) * | 2018-05-10 | 2019-11-14 | 積水化学工業株式会社 | 硬化性組成物、半導体素子保護用材料、及び半導体装置 |
| JP2022523304A (ja) * | 2019-01-25 | 2022-04-22 | セラミック パウダー テクノロジー エーエス | セラミック複合酸化物 |
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| JP7282661B2 (ja) | 2019-12-02 | 2023-05-29 | 株式会社東芝 | 浄化装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104487169B (zh) | 2017-03-15 |
| US20150321189A1 (en) | 2015-11-12 |
| US9849449B2 (en) | 2017-12-26 |
| CN104487169A (zh) | 2015-04-01 |
| JP5943223B2 (ja) | 2016-06-29 |
| KR20150023041A (ko) | 2015-03-04 |
| TW201402209A (zh) | 2014-01-16 |
| JPWO2013191075A1 (ja) | 2016-05-26 |
| TW201708118A (zh) | 2017-03-01 |
| TWI574736B (zh) | 2017-03-21 |
| TWI589528B (zh) | 2017-07-01 |
| KR102040351B1 (ko) | 2019-11-04 |
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