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WO2013041347A1 - Rouleau de guidage de fil pour scies à fil doté d'un système de détection de données - Google Patents

Rouleau de guidage de fil pour scies à fil doté d'un système de détection de données Download PDF

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Publication number
WO2013041347A1
WO2013041347A1 PCT/EP2012/067058 EP2012067058W WO2013041347A1 WO 2013041347 A1 WO2013041347 A1 WO 2013041347A1 EP 2012067058 W EP2012067058 W EP 2012067058W WO 2013041347 A1 WO2013041347 A1 WO 2013041347A1
Authority
WO
WIPO (PCT)
Prior art keywords
wire guide
guide roller
wire
sensor
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2012/067058
Other languages
German (de)
English (en)
Inventor
Thomas Maurer
Andrew Wenger
Sebastian Dienst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Voith Patent GmbH
Original Assignee
Voith Patent GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Voith Patent GmbH filed Critical Voith Patent GmbH
Publication of WO2013041347A1 publication Critical patent/WO2013041347A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0061—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of devices for guiding or feeding saw wires

Definitions

  • the present invention relates to a wire guide roller for use in wire saws for producing semiconductor wafers for the photovoltaic and semiconductor industries by simultaneously separating a plurality of semiconductor wafers from a single or polycrystalline semiconductor ingot.
  • the semiconductor wafers usually have a thickness of between 50 ⁇ and 400 ⁇ and in particular of 100 ⁇ and 350 ⁇ on.
  • a wire saw has a so-called wire gate consisting of at least one wire section (also referred to as a wire field), which is spanned between at least two rotatably mounted wire guide rollers. Often, the wire gate is formed by a plurality (up to more than 1000) parallel wire sections which are stretched between the wire guide rollers.
  • wire guide rollers are used.
  • the respective axes of rotation of the wire guide rollers are arranged parallel to each other in the rule.
  • One or more or all of the wire guide rollers may be driven.
  • a single finite wire is often spirally guided around a roller system formed by the wire guide rollers and thereby unwound from a supply roll onto a take-up roll.
  • the wire guide rollers may have on their lateral surface in each case a plurality of groove-shaped depressions, which surround the circumferential surface annularly and in which the wire is guided.
  • the wire is energized between the supply spool and the take-up spool.
  • the wire is usually made of metal and generally has a thickness of between 50 ⁇ and 200 ⁇ and in particular of between 100 ⁇ and 140 ⁇ on.
  • the semiconductor blank and the wire gate are moved relative to each other, and at the same time, the wire is rewound at high speed via the wire guide rollers from the supply roll to the take-up reel.
  • the wire is filled with a liquid (such as Glycol or oil) to cool the wire and remove any removed sawdust.
  • the liquid may also contain a cutting grain such as diamond or silicon carbide of suitable granularity to form a suspension.
  • the cutting operation is often effected by the cutting grain dissolved in the liquid and not by the wire itself, so that the wire often serves only to transport the liquid with the cutting grain. If the wire itself is coated with a suitable cutting grain, the provision of cutting grain in the liquid can also be dispensed with.
  • the wire is exposed to some wear. It should be noted that the wire due to the spiral guide on the wire guide rollers repeatedly cuts into the semiconductor blank. Therefore, the wire can often be used only once.
  • the wire guide rollers are subject to a certain wear.
  • wire guide rollers are largely responsible, since they determine the position of the wire gate forming wire sections.
  • a defective wire guide roller often has the consequence that all cut with the wire gate semiconductor wafers must be discarded. Therefore, the functionality of the wire guide rollers regularly and preferably continuously checked visually.
  • Wire guide rollers may be solid or hollow and formed of metal or plastic.
  • the lateral surface has a coating, which makes contact with the wire, so that the wire guide roller in the radial direction may have a multilayer structure.
  • a wire saw with wire guide rollers is known for example from DE 10 2007 019 566. To increase the durability of the wire guide rollers, a special coating is proposed here.
  • Another wire guide roller of the prior art is known from DE 103 49 287.
  • Embodiments of the present invention provide a wire guide roller for wire saws for producing semiconductor wafers, a system comprising these wire guide rollers, and a method in which a malfunction of the wire guide roller can be detected particularly quickly and reliably.
  • a wire guide roll for use in wire saws for producing semiconductor wafers comprising a cylindrical roll body, at least one sensor, and at least one transmitter.
  • the cylindrical roller body is designed to be rotatable about a rotation axis.
  • the at least one sensor is disposed in the wire guide roller and configured to detect instantaneous states of the wire guide roller.
  • the at least one transmitter is also arranged in the wire guide roller and connected to the at least one sensor and configured to output measured values generated by the sensor to the outside of the wire guide roller.
  • the transmitter may also be designed to receive control commands. It is possible to use a common transmitter for multiple sensors, or to use separate transmitters for each sensor or group of sensors.
  • the at least one sensor is at least one strain gauge, which is arranged adjacent to the lateral surface in the cylindrical roller body.
  • the strain gauges can be arranged distributed over the entire longitudinal and / or circumferential direction of the cylindrical roller body adjacent to the lateral surface in the cylindrical roller body,
  • the at least one strain gage can be oriented such that it has a circumferential expansion and / or An elongation that changes abruptly with time and / or between adjacent strain gauges can be attributed to a defective guidance or tension of a guided wire, for example as a result of a too large wear use of the wire guide roller, indicate.
  • the at least one sensor is at least one temperature sensor, which is arranged in the cylindrical roller body in particular adjacent to the lateral surface. Too high or too high a rise in temperature may indicate poor guidance or tension of a guided wire due, for example, to excessive wear of the wire guide roller, as well as detachment of the cover.
  • the at least one sensor is at least one vibration sensor, which is arranged in particular in the cylindrical roller body.
  • vibration sensors are capacitive or piezoelectric acceleration sensors.
  • the at least one vibration sensor may be arranged adjacent to an end face of the cylindrical roller body.
  • adjacent to the end face is understood to mean a region which is spaced from the end face of the cylindrical roll body by not more than 1/5 and in particular not more than 1/10 of the maximum axial length of the cylindrical roll body. Too high or uneven vibrations may be due to poor guidance or Stress of a guided wire, for example, as a result of excessive wear of the wire guide roller, and / or indicate a defective bearing of the wire guide roller.
  • the wire guide roller further comprises at least one energy store, which is arranged in the cylindrical roller body and connected to at least one of the at least one sensor and the at least one transmitter and is adapted to supply it with electrical energy.
  • the energy store can also be connected to all sensors and / or transmitters of the wire guide roller in order to supply them with electrical energy.
  • energy storage for example, a battery and / or an accumulator and / or a capacitor can be used.
  • the wire guide roller further comprises at least one arranged in an edge region of the cylindrical roller body coil, which is designed to allow upon rotation of the wire guide roller inductive coupling of electrical energy.
  • the coil may also allow reception of control signals for at least one of the at least one sensor and the at least one transmitter.
  • the "edge region of the cylindrical roller body” is understood to mean a region which comprises the regions "adjacent to the lateral surface” and "adjacent to the end surface”.
  • the at least one transmitter is designed to output the measured values generated by the at least one sensor to outside of the wire guide roller via at least one of a sliding contact and an air interface such as infrared or radio (for example Bluetooth or WLAN).
  • the at least one transmitter can be designed to store the measured values generated by the at least one sensor in a memory assigned to the at least one transmitter.
  • Each transmitter can have its own memory, or a central memory for several or all transmitters can be provided.
  • the wire guide roller further comprises at least one bearing, which is arranged coaxially on an end face of the cylindrical roller body.
  • the wire guide roller on two bearings, which are arranged on the two end faces of the cylindrical roller body.
  • the at least one bearing may be interchangeable to allow continued operation of the wire guide roller with defective bearing after replacement of the bearing.
  • the at least one bearing may be configured to allow rotation of the cylindrical roller body about its axis of symmetry.
  • Embodiments relate to a system which has at least one wire guide roller as described above and at least one receiver arranged outside the wire guide roller.
  • the receiver is designed to receive measured values output by the transmitter arranged in the wire guide roller outside the wire guide roller via a sliding contact and / or an air interface.
  • the receiver may be configured to send control commands to the transmitter located in the wire guide roller. These control commands can, for example, cause the output of measured values by the transmitter.
  • the system further comprises at least one arranged in the region of at least one end face and / or in the region of the lateral surface of the at least one wire guide roller outside of the wire guide roller coil, which is connected to a power source and formed, electrical energy inductively in a in an edge region of the coupling cylindrical roller body arranged in the wire guide roller coil.
  • information such as control commands and / or measured values can also be transmitted via these coils between the transmitter arranged in the wire guide roller and the receiver arranged outside the wire guide roller.
  • the system further comprises at least one arranged in the region of at least one end face and / or lateral surface of the at least one wire guide roller outside the wire guide roller arrangement of permanent magnets, which are formed upon rotation of the wire guide roller electrical energy in inductively to couple in a arranged in an edge region of the cylindrical roller body in the wire guide roller coil.
  • the system further comprises a machine control and at least one drive, which drive is mechanically connected to at least one wire guide roller and / or a supply roll and / or a take-up roll receptacle and is controlled by the machine control.
  • the at least one drive is configured to rotate the at least one wire guide roller and / or a supply roll carried by the receptacle and / or a take-up roll carried by the receptacle in response to the machine control.
  • the receiver is connected to the machine control and outputs measured values received from the transmitter to the machine control.
  • the machine controller is designed to stop the at least one and in particular all drives when the received measured value of the at least one wire guide roller is outside a predefinable tolerance range.
  • Embodiments relate to a method for functional monitoring of wire saws for producing semiconductor wafers, which can be used in particular in the system described above using the wire guide rollers described above.
  • the method comprises the steps of continuously monitoring the operation of at least one wire guide roller of the wire saw by means of sensors arranged in the wire guide roller and configured to generate measurements relating to instantaneous states of the at least one wire guide roller, outputting the measurements generated by the sensors to outside of the at least one a wire guide roller, comparing the output measured values with a predeterminable tolerance range and the automatic stopping of the wire saw when at least one received measured value is outside the tolerance range.
  • control' is used synonymously with the term 'regulate' throughout and deviating from the German usage. This also applies to all grammatical modifications of both terms. In this document, therefore, the term 'control' may also include a feedback of a controlled variable, as the term 'control' may refer to a simple timing chain.
  • Figure 1A shows schematically a perspective view of a wire guide roller according to a first embodiment
  • Figure 1 B schematically shows a perspective view of a wire guide roller according to a second embodiment
  • Figure 2 shows schematically a perspective view of a system according to a first embodiment
  • FIG. 3 shows a flow chart of a method according to an embodiment.
  • FIG. 1A schematically shows a perspective view of a wire guide roller 1 according to a first embodiment.
  • the wire guide roller 1 consists of a cylindrical roller body 2 which is rotatably mounted about a rotation axis A.
  • the cylindrical roller body 2 at its two end faces each interchangeable bearing 9, which allows rotation of the cylindrical roller body 2 about its axis of symmetry.
  • a plurality of sensors 31, 32 are arranged, which determine instantaneous states of the wire guide roller 1. In the instantaneous state, properties are understood which are characteristic of operating states of the wire guide roller 1.
  • the sensors 31, 32 are two temperature sensors 31 arranged adjacent to a lateral surface of the cylindrical roller body 2, which measure a temperature of the wire guide roller 1 in the area of the lateral surface, and several distributed in the longitudinal direction of the cylindrical roller body 2 Dehnungsmess ⁇ strip 32, which are also disposed adjacent to the lateral surface of the cylindrical roller body 2.
  • a coating forming the lateral surface of the wire guide roller is partially removed in order to expose the sensors 31 and 32. In this coating provided guide grooves for the wire are not shown in the figure for the sake of clarity.
  • the wire guide roller 1 shown in FIG. 1A has two transmitters 4, each having an internal memory 8.
  • One of the transmitters 4 is connected to the temperature sensors 31 and the other to the strain gauges 32.
  • a separate transmitter 4 is provided for each type of sensor.
  • measured values of the sensors 31 and 32 received by the transmitter 4 can be temporarily stored for later reading.
  • the transmitters 4 are each designed to output measured values generated by the associated sensors 31, 32 to the outside of the wire guide roller 2 via an air interface.
  • the air interface in the present case is a radio interface according to the Bluetooth standard.
  • the air interface but also work on a different standard, such. B. the W-LAN standard.
  • the air interface also optically z. B. by using infrared radiation.
  • a coil 6 is arranged on an end face of the cylindrical roller body 2, via which an inductive coupling of electrical energy is possible.
  • the coil 6 can also serve as an antenna for the transmitter 4 at the same time.
  • the wire guide roller 1 'shown schematically in perspective in FIG. 1B in accordance with the second embodiment is very similar to the above-described wire guide roller 1 according to the first embodiment, so that in the following particular attention is drawn to differences between the embodiments and otherwise to the first embodiment.
  • the wire guide roller 1 'according to the second embodiment likewise has a cylindrical roller body 2' rotatably mounted about a rotation axis A and sensors 31, 32 ', 33 integrated therewith and a transmitter 4 connected to the sensors 31, 32', 33.
  • the second embodiment differs from the first embodiment described above particularly in that the strain gauges 32 'according to the second embodiment are arranged not distributed in the longitudinal direction of the cylindrical roller body 2' but circumferentially of the cylindrical roller body 2 'adjacent to the lateral surface of the cylindrical roller body 2' , It is emphasized that the first and second embodiments can also be combined, so that the strain gauges can be distributed both in the circumferential direction and in the longitudinal direction of the cylindrical roller body. Furthermore, alternatively, instead of an arrangement of a plurality of strain gauges, only one strain gauge can be used.
  • the coil 6 'for energy coupling according to the second embodiment is not a single on a front side of the cylindrical roller body 2' arranged coil, but is formed by an arrangement which consists of a plurality of in the circumferential direction of the cylindrical roller body 2 'distributed in the region of the lateral surface consists of the cylindrical Walzengropers 2 'arranged coils.
  • an energy store 5 is provided in the form of an accumulator and connected to the coils 6'.
  • the energy coupling can also take place optically or by means of slip rings.
  • the wire guide roller 1 additionally has vibration sensors 33, which are arranged on both end sides of the cylindrical roller body 2' in the region of the bearings 9.
  • FIG. 2 shows a system consisting of a wire guide roller 1 with a construction as shown in FIGS. 1A or 1B and a receiver 1 1 arranged outside the wire guide roller 1, shown schematically in perspective.
  • the receiver 11 is designed to receive measured values of the sensors 31, 32, 33 output by the transmitter 4 via the air interface or sliding contact 7 and to output them to a machine controller 15 connected to the receiver 11.
  • the system shown in Figure 2 further comprises a arranged in the region of a front side of the wire guide roller 1 coil 12, which is connected to a power source 13 and inductively transfers energy to the arranged in the wire guide roller 1 coil 6.
  • the coil 12 can also serve as an antenna for wireless transmission of information between the receiver 1 1 and arranged in the wire guide roller transmitters 4.
  • permanent magnets 14 are additionally provided, which cause inductive energy generation in the coils 6 'arranged in the wire guide roller V when the wire guide roller rotates.
  • the machine controller 15 is connected to a drive 16 for forcibly rotating the wire guide roller 1.
  • the engine controller 15 determines that a reading of the one of the sensors 31, 32, 33 disposed in the wire guide roller 1 is outside a predetermined tolerance range, the engine controller 15 automatically stops rotating the wire guide roller 1 via the driver 16.
  • a functioning of at least one wire guide roller of the wire saw is monitored continuously by means of sensors arranged in the wire guide roller.
  • the sensors are designed to generate measured values which relate to instantaneous states of the at least one wire guide roller.
  • the measured values may be a temperature, an elongation or a vibration of the wire guide roller and, in particular, a circumferential surface of the wire guide roller, which allow conclusions to be drawn about a current state of the (rotating) wire guide roller in operation.
  • the measured values generated by the sensors are output to the outside of the at least one wire guide roller in step S2. This can be wired or via an air interface.
  • step S3 a comparison is made as to whether the measured values lie within a tolerance range. If so, the process returns to step S1. If this is not the case, since at least one measured value is outside the associated tolerance range, the wire saw is automatically stopped in step S4, since then a lack of functionality of at least one wire guide roller is assumed.
  • the wire saw is automatically stopped in step S4, since then a lack of functionality of at least one wire guide roller is assumed.
  • steps S3 a comparison is made as to whether the measured values lie within a tolerance range. If so, the process returns to step S1. If this is not the case, since at least one measured value is outside the associated tolerance range, the wire saw is automatically stopped in step S4, since then a lack of functionality of at least one wire guide roller is assumed.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

L'invention concerne un rouleau de guidage de fil (1) destiné à être utilisé dans des scies à fil destinées à la fabrication de tranches de semi-conducteurs, ledit rouleau comportant un corps de cylindre (2) cylindrique, au moins un capteur (31, 32, 33; 32') et au moins un émetteur (4). Le corps de cylindre cylindrique est réalisé de manière à pouvoir tourner autour d'un axe de rotation (A). Le ou les capteurs (31, 32, 33; 32') sont disposés dans le rouleau de guidage de fil et conçus pour déterminer des états momentanés tels que par exemple la température, la vibration ou l'extension du rouleau de guidage de fil. Le ou les émetteurs (4) sont également disposés dans le rouleau de guidage de fil, sont reliés au(x) capteur(s) (31, 32, 33; 32') et sont conçus pour délivrer des valeurs de mesure produites par le capteur (31, 32, 33; 32') à l'extérieur du rouleau de guidage de fil. L'invention concerne en outre un système comportant, en plus d'au moins un tel rouleau de guidage de fil, au moins un récepteur disposé à l'extérieur du rouleau de guidage de fil. Le récepteur est conçu pour recevoir de l'émetteur (4) des valeurs de mesure délivrées à l'extérieur du rouleau de guidage de fil par l'intermédiaire d'un contact glissant et/ou d'une interface aérienne et pour les analyser de manière appropriée. Enfin, l'invention concerne un procédé de surveillance du fonctionnement de scies à fil destinées à la fabrication de tranches de semi-conducteurs.
PCT/EP2012/067058 2011-09-23 2012-09-03 Rouleau de guidage de fil pour scies à fil doté d'un système de détection de données Ceased WO2013041347A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011083261.0 2011-09-23
DE201110083261 DE102011083261A1 (de) 2011-09-23 2011-09-23 Drahtführungsrolle für Drahtsägen mit Datenerfassungssystem

Publications (1)

Publication Number Publication Date
WO2013041347A1 true WO2013041347A1 (fr) 2013-03-28

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/067058 Ceased WO2013041347A1 (fr) 2011-09-23 2012-09-03 Rouleau de guidage de fil pour scies à fil doté d'un système de détection de données

Country Status (2)

Country Link
DE (1) DE102011083261A1 (fr)
WO (1) WO2013041347A1 (fr)

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07276219A (ja) * 1994-04-11 1995-10-24 Tokyo Seimitsu Co Ltd ワイヤソーの溝付きローラ温度制御装置
JPH0970824A (ja) * 1995-09-08 1997-03-18 Tokyo Seimitsu Co Ltd ワイヤソーのワイヤ脱線検出装置
JPH09248822A (ja) * 1996-03-18 1997-09-22 Tokyo Seimitsu Co Ltd ワイヤソーのガイドローラ磨耗検出構造
EP0827822A1 (fr) * 1996-02-28 1998-03-11 Tokyo Rope Mfg. Co., Ltd. Appareil et procede d'usinage a fil coupant
JPH11114799A (ja) * 1997-10-07 1999-04-27 Hitachi Ltd 切断方法および装置
EP1004383A1 (fr) * 1998-11-25 2000-05-31 Meyer & Burger AG Rouleau de guidage du fil de sciage dans une scie à fil à système de refroidissement
DE10349287A1 (de) 2003-10-23 2005-06-16 Siltronic Ag Drahtführungsrolle mit demontierbarem Beschichtungsträger
DE102006033699A1 (de) * 2006-07-20 2008-01-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Drahtsäge mit kontrollierbarem Drahtfeld
DE102007008124A1 (de) * 2007-02-19 2008-08-21 Cedima Diamantwerkzeug- Und Maschinenbaugesellschaft Mbh Seilsägesystem für den Natursteinbereich
DE102007019566A1 (de) 2007-04-25 2008-10-30 Siltronic Ag Drahtführungsrolle für Drahtsäge
WO2011032601A1 (fr) * 2009-09-18 2011-03-24 Applied Materials, Inc. Dispositif de scie à fil comportant un arbre expansible et procédé de sciage

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07276219A (ja) * 1994-04-11 1995-10-24 Tokyo Seimitsu Co Ltd ワイヤソーの溝付きローラ温度制御装置
JPH0970824A (ja) * 1995-09-08 1997-03-18 Tokyo Seimitsu Co Ltd ワイヤソーのワイヤ脱線検出装置
EP0827822A1 (fr) * 1996-02-28 1998-03-11 Tokyo Rope Mfg. Co., Ltd. Appareil et procede d'usinage a fil coupant
JPH09248822A (ja) * 1996-03-18 1997-09-22 Tokyo Seimitsu Co Ltd ワイヤソーのガイドローラ磨耗検出構造
JPH11114799A (ja) * 1997-10-07 1999-04-27 Hitachi Ltd 切断方法および装置
EP1004383A1 (fr) * 1998-11-25 2000-05-31 Meyer & Burger AG Rouleau de guidage du fil de sciage dans une scie à fil à système de refroidissement
DE10349287A1 (de) 2003-10-23 2005-06-16 Siltronic Ag Drahtführungsrolle mit demontierbarem Beschichtungsträger
DE102006033699A1 (de) * 2006-07-20 2008-01-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Drahtsäge mit kontrollierbarem Drahtfeld
DE102007008124A1 (de) * 2007-02-19 2008-08-21 Cedima Diamantwerkzeug- Und Maschinenbaugesellschaft Mbh Seilsägesystem für den Natursteinbereich
DE102007019566A1 (de) 2007-04-25 2008-10-30 Siltronic Ag Drahtführungsrolle für Drahtsäge
WO2011032601A1 (fr) * 2009-09-18 2011-03-24 Applied Materials, Inc. Dispositif de scie à fil comportant un arbre expansible et procédé de sciage

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