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WO2013041348A1 - Rouleau de guidage de fil pour scies à fil comprenant un système de détection de données - Google Patents

Rouleau de guidage de fil pour scies à fil comprenant un système de détection de données Download PDF

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Publication number
WO2013041348A1
WO2013041348A1 PCT/EP2012/067062 EP2012067062W WO2013041348A1 WO 2013041348 A1 WO2013041348 A1 WO 2013041348A1 EP 2012067062 W EP2012067062 W EP 2012067062W WO 2013041348 A1 WO2013041348 A1 WO 2013041348A1
Authority
WO
WIPO (PCT)
Prior art keywords
outer tube
wire guide
guide roller
wire
fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2012/067062
Other languages
German (de)
English (en)
Inventor
Thomas Maurer
Martin BASSMANN
Peter Kroll
Andrew Wenger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Voith Patent GmbH
Original Assignee
Voith Patent GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Voith Patent GmbH filed Critical Voith Patent GmbH
Publication of WO2013041348A1 publication Critical patent/WO2013041348A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels

Definitions

  • the present invention relates to a wire guide roller for use in wire saws for producing semiconductor wafers for the photovoltaic and semiconductor industries by simultaneously separating a plurality of semiconductor wafers from a single or polycrystalline semiconductor ingot.
  • Semiconductor wafers usually have a thickness of between 50 ym and 400 ym and in particular of 100 ym and 350 ym.
  • a wire saw has a so-called wire gate consisting of at least one wire section (also referred to as a wire field), which is spanned between at least two rotatably mounted wire guide rollers.
  • the wire gate is formed by a plurality (up to more than 100) parallel wire sections which are stretched between the wire guide rollers.
  • more than two and in particular three or four rotatably mounted wire guide rollers are used.
  • the respective axes of rotation of the wire guide rollers are arranged parallel to each other in the rule.
  • One or more or all of the wire guide rollers may be driven by one or more drives.
  • a single finite wire is often spirally guided around a roller system formed by the wire guide rollers and thereby unwound from a supply roll onto a take-up roll.
  • the wire guide rollers may have on their lateral surface in each case a plurality of groove-shaped depressions, which surround the circumferential surface annularly spiraled and in which the wire is guided.
  • the wire is energized between the supply spool and the take-up spool.
  • the wire is usually made of metal or plastic and generally has a thickness of between 50 ⁇ and 200 ⁇ and in particular of between 100 ⁇ and 140 ⁇ .
  • the semiconductor blank and the wire gate are moved relative to each other, and at the same time, the wire is rewound at high speed via the wire guide rollers from the supply roll to the take-up reel.
  • the wire is wetted with a liquid (such as glycol or oil) to cool the wire and remove removed sawing material.
  • the liquid may also contain a cutting grain such as diamond or silicon carbide of suitable granularity to form a suspension. This suspension is also referred to as slurry.
  • the cutting operation is often effected by the cutting grain dissolved in the liquid and not by the wire itself, so that the wire often serves only to transport the liquid with the cutting grain. If the wire itself is coated with a suitable cutting grain, the provision of cutting grain in the liquid can also be dispensed with.
  • the wire is exposed to some wear. It should be noted that the wire due to the spiral guide on the wire guide rollers repeatedly cuts into the semiconductor blank. Therefore, the wire can often be used only once.
  • the wire guide rollers are subject to a certain wear.
  • each semiconductor wafer has two flat surfaces lying parallel to each other.
  • the wire guide rollers are largely responsible, as they determine the position of the wire gate forming wire sections. A faulty routing of the wire through a wire guide roller often has the consequence that all cut with the wire gate semiconductor wafers must be discarded.
  • Wire guide rollers may be solid or hollow and formed of metal or (fiber) reinforced plastic. Frequently, the lateral surface has a coating, which makes contact with the wire, so that the wire guide roller in the radial direction may have a multilayer structure. The groove-shaped depressions leading to the wire are then formed in the coating.
  • a wire guide roller according to the prior art is shown schematically in cross section.
  • the wire guide roller 11 of the prior art has a metallic inner tube 12 which is connected via likewise metallic support rings 13 with an outer tube 14 made of carbon fiber reinforced plastic (CFRP).
  • CFRP carbon fiber reinforced plastic
  • metallic force introduction elements 15 are glued or pressed from the outside, which produce a non-positive / positive connection between the inner tube 12 and the outer tube 14.
  • the outer surface of the outer tube 14 carries a polyurethane coating 17, commonly referred to as a cover, which has groove-shaped recesses for guiding the wire (not shown).
  • a wire saw with wire guide rollers is known for example from DE 10 2007 019 566. To increase the durability of the wire guide rollers, a special coating is proposed here.
  • Another wire guide roller of the prior art is known from DE 103 49 287.
  • This previously known wire guide roller is composed in several parts of a base body and a detachable coating carrier, and has a cooling channel for cooling air.
  • Embodiments of the present invention provide a wire guide roll for wire saws for making semiconductor wafers that at least partially overcomes the disadvantages of the prior art described above.
  • embodiments of the present invention provide wire guide rollers having a higher differential temperature stability in the longitudinal direction and a smaller overall mass.
  • Embodiments provide a wire guide roll for use in wire saws for making semiconductor wafers comprising an inner tube of metal or fiber reinforced plastic, an outer tube of fiber reinforced plastic, and two
  • the outer tube concentrically surrounds the inner tube.
  • the two force introduction elements are arranged on the end faces of the inner tube and the outer tube, and connect the inner tube and the outer tube a force fit.
  • the force introduction elements are each formed by an annular base body made of metal and a disk-shaped connecting body made of metal or fiber-reinforced plastic connected thereto.
  • the disk-shaped connecting body establishes the frictional connection between the inner tube and the annular base body and is thus arranged between the inner tube and the annular base body.
  • the annular base body establishes the frictional connection between the disc-shaped connecting body and the outer tube.
  • the force introduction element is composed of two sub-elements with different functions, it is possible to design the sub-elements specifically for their respective function with optimum wall thicknesses and of optimal materials. Overall, the force introduction element can be formed with smaller wall thicknesses and with smaller amounts of metal.
  • At least 90%, and preferably at least 95%, and more preferably 100%, of the mass of each annular body of the force introduction elements from the inner wall of the outer tube is less than 50% and preferably less than 40% and more preferably less than 35%. the radius of the inner wall of the outer tube spaced.
  • each disk-shaped connecting body of the force introduction elements has a mass which is less than 40% and in particular less than 30% and more particularly less than 20% of the mass of the annular basic body of the force introduction element.
  • this sub-element has only a minor proportion of the total mass of the force introduction element. This is possible because this sub-element only serves a non-positive connection to the inner tube and the sealing of an interior of the wire guide roller.
  • the two annular basic bodies of the force introduction elements extend in each case by less than 25% and in particular by less than 15% of the axial length of the outer tube into the outer tube. Because of this comparatively small penetration of the force introduction elements into the outer tube, the region in which the outer tube behaves everywhere approximately the same with respect to temperature-induced changes in length is comparatively large. As a result, the temperature stability in the axial direction of the
  • the inner tube, the Outer tube and the force introduction elements in total to less than 40% of the mass of metal and more than 60% of the mass of (fiber) reinforced plastic and in particular less than 35% of the mass of metal and more than 65% of the mass of (fiber ) reinforced plastic.
  • This comparatively high proportion of fiber-reinforced plastic on the wire guide roller leads to a considerable mass reduction of
  • the outer tube has an outer diameter of between 150 mm and 400 mm and in particular of 350 mm ⁇ 25 mm and an axial length of between 750 mm and 1500 mm and in particular of 1000 mm ⁇ 150 mm.
  • the outer tube is formed of a quasi-isotropic laminate of a fiber-plastic composite and in particular of carbon fiber-reinforced plastic in the cross-wound composite. As a result, an improved rigidity of the outer tube can be achieved.
  • the outer tube radially outside a coating and in particular a polyurethane coating and a lying between the outer tube and the coating coupling layer of a quasi-isotropic laminate of a fiber plastic material and in particular from a carbon fiber reinforced plastic in cross-wound compound with 45 ° cross-layers.
  • This coupling layer establishes a secure connection to the coating, and thus also facilitates an optionally required recoating of the wire guide roller.
  • FIG. 1 shows schematically a cross-sectional view through a
  • Wire guide roller according to an embodiment shows.
  • a wire guide roller according to an embodiment is shown schematically in cross section.
  • the wire guide roller 1 has an inner tube 2, which is made of fiber-reinforced plastic in the embodiment shown.
  • the wire guide roller 1 an outer tube 3 made of carbon fiber reinforced plastic in the cross-wound composite, which surrounds the inner tube 2 concentrically.
  • force introduction elements 4, 4 ' are arranged, which produce a frictional connection between the inner tube 2 and the outer tube 3 and seal an inner space 7 of the wire guide roller 1 to the outside.
  • the force introduction elements 4, 4 ' are formed from two sub-elements and each consist of an annular base body 41, 41' made of metal and a connected to this disc-shaped connecting body 42, 42 'made of fiber-reinforced plastic.
  • the annular base body 41, 41 ' takes a radial thickness of the annular base body 41, 41 'starting from the end faces of the outer tube 3 in the direction of the opposite end face in a ramp. Due to the material concentration achieved in the region of the end faces of the outer tube 3 by means of the annular base body 41, 41 'good power transmission to (not shown in the figure) bearings and / or drives possible, which via threaded holes 43, 43' with the annular base bodies 41, 41 'are connectable.
  • the disk-shaped connecting body 42, 42 'of the force introduction elements 4, 4' are with their radially outer surface each with the radially inner surface of the annular base body 41, 41 'and me their radially inner surface each with the radially outer surface of the inner tube 2 glued.
  • the disc-shaped connecting bodies 42, 42 'each have a mass which amounts to less than 20% of the mass of the associated annular basic body 41, 41'. Such a low mass is sufficient because the disc-shaped connecting body 42, 42 'only for establishing a frictional connection between the inner tube 2 and the annular base 41, 41' and for making a seal of the inner space 7 of the wire guide roller 1 to the outside.
  • the frictional connection between the disc-shaped connecting body 42, 42 'and the Outer tube 3 is made by the annular base 41, 41 '.
  • the outer tube 3 has radially outside a coupling layer 6 made of a fiber-reinforced plastic in Wienwickelverbund with 45 ° cross-layers, which coupling layer 6 carries a coating 5 made of polyurethane.
  • a coupling layer 6 made of a fiber-reinforced plastic in Wienwickelverbund with 45 ° cross-layers, which coupling layer 6 carries a coating 5 made of polyurethane.
  • a coating 5 of polyurethane grooved recesses for guiding a wire of a wire saw are introduced, which are not shown in the figure 2 specifically.
  • Wire guide roller 1 has an outer diameter of 350 mm, a length of 1,020 mm and a weight of 120 kg.
  • a ratio of fiber-reinforced plastic to metal is 68/22, the rest is attributable to the coating 5 made of polyurethane.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

L'invention concerne un rouleau de guidage de fil (1) destiné à être utilisé dans des scies à fil destinées à fabriquer des tranches de semi-conducteurs. Ledit rouleau de guidage de fil comporte un tube intérieur (2) en métal ou en matière plastique renforcée par des fibres, un tube extérieur (3) en matière plastique renforcée par des fibres et entourant le tube intérieur (2) de manière concentrique, et deux éléments d'introduction de force (4, 4') disposés sur les faces frontales du tube intérieur (2) et du tube extérieur (3) et reliant le tube intérieur (2) et le tube extérieur (3) à force. Les éléments d'introduction de force (4, 4') sont composés respectivement d'un corps de base annulaire (41, 41') en métal et d'un corps de liaison (42, 42') en métal ou en matière plastique renforcée par des fibres, en forme de disque et relié au dit corps de base. Le corps de liaison en forme de disque (42, 42') établit la liaison à force entre le tube intérieur (2) et le corps de base annulaire (41, 41'), et le corps de base annulaire (41, 41') établit la liaison à force entre le corps de liaison en forme de disque (42, 42') et le tube extérieur (3).
PCT/EP2012/067062 2011-09-22 2012-09-03 Rouleau de guidage de fil pour scies à fil comprenant un système de détection de données Ceased WO2013041348A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011083175.4 2011-09-22
DE201110083175 DE102011083175A1 (de) 2011-09-22 2011-09-22 Drahtführungsrolle für Drahtsägen mit Datenerfassungssystem

Publications (1)

Publication Number Publication Date
WO2013041348A1 true WO2013041348A1 (fr) 2013-03-28

Family

ID=46799235

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/067062 Ceased WO2013041348A1 (fr) 2011-09-22 2012-09-03 Rouleau de guidage de fil pour scies à fil comprenant un système de détection de données

Country Status (2)

Country Link
DE (1) DE102011083175A1 (fr)
WO (1) WO2013041348A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105834875A (zh) * 2016-06-01 2016-08-10 安庆石化联盟铸管厂 一种简易的金属管抛光设备

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015207401A1 (de) 2015-04-23 2016-10-27 Voith Patent Gmbh Drahtführungsrolle für eine Drahtsäge
CN109571184B (zh) * 2019-01-11 2020-01-10 浙江江山博奥电气有限公司 一种光伏组件边角打磨装置
CN110802755B (zh) * 2019-10-27 2022-03-15 无锡怀恩精密机械有限公司 一种金刚线多线切割主辊

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7308102A (fr) * 1973-06-12 1974-12-16
EP0689891A1 (fr) * 1994-06-28 1996-01-03 Shin-Etsu Handotai Company Limited Un rouleau
US5758633A (en) * 1996-02-06 1998-06-02 Hauser; Charles Wire sawing device
JP2000117614A (ja) * 1998-10-13 2000-04-25 Toyo Advanced Technologies Co Ltd ワイヤソーのガイドローラ
JP2000317805A (ja) * 1999-05-10 2000-11-21 Toyo Advanced Technologies Co Ltd ワイヤソー用ボビン
DE10349287A1 (de) 2003-10-23 2005-06-16 Siltronic Ag Drahtführungsrolle mit demontierbarem Beschichtungsträger
DE102007019566A1 (de) 2007-04-25 2008-10-30 Siltronic Ag Drahtführungsrolle für Drahtsäge
DE102008041268A1 (de) * 2008-08-14 2010-02-18 Voith Patent Gmbh Walze für Auftragseinrichtung und Verfahren zum Auswuchten einer Walze
WO2010115406A1 (fr) * 2009-04-06 2010-10-14 Xperion Gmbh Galet de guidage pour fils

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7308102A (fr) * 1973-06-12 1974-12-16
EP0689891A1 (fr) * 1994-06-28 1996-01-03 Shin-Etsu Handotai Company Limited Un rouleau
US5758633A (en) * 1996-02-06 1998-06-02 Hauser; Charles Wire sawing device
JP2000117614A (ja) * 1998-10-13 2000-04-25 Toyo Advanced Technologies Co Ltd ワイヤソーのガイドローラ
JP2000317805A (ja) * 1999-05-10 2000-11-21 Toyo Advanced Technologies Co Ltd ワイヤソー用ボビン
DE10349287A1 (de) 2003-10-23 2005-06-16 Siltronic Ag Drahtführungsrolle mit demontierbarem Beschichtungsträger
DE102007019566A1 (de) 2007-04-25 2008-10-30 Siltronic Ag Drahtführungsrolle für Drahtsäge
DE102008041268A1 (de) * 2008-08-14 2010-02-18 Voith Patent Gmbh Walze für Auftragseinrichtung und Verfahren zum Auswuchten einer Walze
WO2010115406A1 (fr) * 2009-04-06 2010-10-14 Xperion Gmbh Galet de guidage pour fils

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105834875A (zh) * 2016-06-01 2016-08-10 安庆石化联盟铸管厂 一种简易的金属管抛光设备

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Publication number Publication date
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