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WO2012033284A3 - 연속공정이 가능한 챔버 시스템 - Google Patents

연속공정이 가능한 챔버 시스템 Download PDF

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Publication number
WO2012033284A3
WO2012033284A3 PCT/KR2011/005700 KR2011005700W WO2012033284A3 WO 2012033284 A3 WO2012033284 A3 WO 2012033284A3 KR 2011005700 W KR2011005700 W KR 2011005700W WO 2012033284 A3 WO2012033284 A3 WO 2012033284A3
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
supercritical
supply part
pure water
chemical solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2011/005700
Other languages
English (en)
French (fr)
Other versions
WO2012033284A2 (ko
Inventor
김재달
이강열
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AND Corp
Original Assignee
AND Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AND Corp filed Critical AND Corp
Publication of WO2012033284A2 publication Critical patent/WO2012033284A2/ko
Publication of WO2012033284A3 publication Critical patent/WO2012033284A3/ko
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H10P70/80—
    • H10P72/0406—

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)

Abstract

본 발명은 연속공정이 가능한 챔버 시스템에 관한 것으로, 본 발명은 챔버와, 상기 챔버에 초순수와 세정약액을 선택적으로 공급하는 초순수공급부 및 세정약액 공급부와, 상기 챔버의 초순수와 세정약액을 배출하는 제1배출부와, 상기 챔버의 상부측에 초임계상태 가스를 공급하는 초임계공급부와, 상기 챔버의 상부측에 이소프로필알코올을 선택적으로 공급하는 IPA공급부와, 상기 초임계상태 가스를 배출하는 제2배출부를 포함한다. 이와 같은 구성의 본 발명은 하나의 챔버에서 습식세정, 초임계 세정 및 건조공정을 연속으로 처리할 수 있게 됨에 따라 보다 고집적 반도체의 효과적인 세정이 가능하며, 습식과 초임계 세정과정에서 웨이퍼를 이동시킬 필요가 없기 때문에 공정불량의 발생을 방지할 수 있는 효과가 있다.
PCT/KR2011/005700 2010-09-06 2011-08-03 연속공정이 가능한 챔버 시스템 Ceased WO2012033284A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0086982 2010-09-06
KR1020100086982A KR101156742B1 (ko) 2010-09-06 2010-09-06 연속공정이 가능한 챔버 시스템

Publications (2)

Publication Number Publication Date
WO2012033284A2 WO2012033284A2 (ko) 2012-03-15
WO2012033284A3 true WO2012033284A3 (ko) 2012-05-03

Family

ID=45811032

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/005700 Ceased WO2012033284A2 (ko) 2010-09-06 2011-08-03 연속공정이 가능한 챔버 시스템

Country Status (2)

Country Link
KR (1) KR101156742B1 (ko)
WO (1) WO2012033284A2 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180084692A (ko) 2018-06-04 2018-07-25 주식회사 유닉 피세정물의 세정 및 건조 방법
KR102636979B1 (ko) 2019-04-26 2024-02-14 삼성전자주식회사 멀티 챔버 장치
CN113908581A (zh) * 2021-09-30 2022-01-11 北京北方华创微电子装备有限公司 半导体设备及其排液装置
CN117505437A (zh) * 2023-11-21 2024-02-06 北京晶亦精微科技股份有限公司 一种自清洁干燥腔室、干燥腔室自清洁系统及自清洁方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040074632A (ko) * 2003-02-19 2004-08-25 소니 가부시끼 가이샤 세정방법
KR100713209B1 (ko) * 2007-02-06 2007-05-02 서강대학교산학협력단 세정장치에 사용되는 고압세정기
KR100766343B1 (ko) * 2006-05-24 2007-10-11 세메스 주식회사 기판 세정 건조 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101109075B1 (ko) * 2009-07-24 2012-01-31 세메스 주식회사 기판 처리 장치 및 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040074632A (ko) * 2003-02-19 2004-08-25 소니 가부시끼 가이샤 세정방법
KR100766343B1 (ko) * 2006-05-24 2007-10-11 세메스 주식회사 기판 세정 건조 방법
KR100713209B1 (ko) * 2007-02-06 2007-05-02 서강대학교산학협력단 세정장치에 사용되는 고압세정기

Also Published As

Publication number Publication date
KR101156742B1 (ko) 2012-06-14
WO2012033284A2 (ko) 2012-03-15
KR20120024213A (ko) 2012-03-14

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