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WO2011104083A1 - Accélérateur de particules chargées - Google Patents

Accélérateur de particules chargées Download PDF

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Publication number
WO2011104083A1
WO2011104083A1 PCT/EP2011/051469 EP2011051469W WO2011104083A1 WO 2011104083 A1 WO2011104083 A1 WO 2011104083A1 EP 2011051469 W EP2011051469 W EP 2011051469W WO 2011104083 A1 WO2011104083 A1 WO 2011104083A1
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WO
WIPO (PCT)
Prior art keywords
electrode
electrodes
accelerator
potential
capacitor stack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2011/051469
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German (de)
English (en)
Inventor
Oliver Heid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of WO2011104083A1 publication Critical patent/WO2011104083A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H5/00—Direct voltage accelerators; Accelerators using single pulses
    • H05H5/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H5/00—Direct voltage accelerators; Accelerators using single pulses
    • H05H5/04—Direct voltage accelerators; Accelerators using single pulses energised by electrostatic generators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H5/00—Direct voltage accelerators; Accelerators using single pulses
    • H05H5/06—Multistage accelerators

Definitions

  • the invention relates to a charged particle accelerator having a capacitor stack of concentrically arranged electrodes.
  • Particle accelerators serve to accelerate charged particles to high energies. In addition to their importance to the
  • Walton accelerator in which a high DC voltage is generated by multiplication and rectification of an AC voltage by means of a Greinacher circuit, which is switched (cascaded) several times in succession. This provides a strong electric field.
  • the invention has for its object to provide an accelerator for the acceleration of charged particles, which allows a particularly efficient particle acceleration to high particle energies in a compact design.
  • the invention is solved by the features of the independent claims. Advantageous developments can be found in the features of the dependent claims.
  • the accelerator according to the invention for accelerating charged particles has:
  • At least one intermediate electrode which is arranged concentrically between the first electrode and the second electrode, and which can be brought to an intermediate potential, which is located between the first potential and the second potential.
  • the accelerator has a switching device with which the electrodes of the capacitor stack-ie, the first electrode, the second electrode and the intermediate electrodes-are connected and which is designed such that, when the switching device is in operation, the electrodes of the capacitor stack arranged concentrically with one another grow Potential levels are brought.
  • the accelerator has a first accelerating channel is formed by first openings in the electrodes of the capacitor stack, so that charged particles can be ⁇ ACCEL ⁇ nigt along the first Accelerati supply channel through the electrodes.
  • the accelerator has a second acceleration channel, which is formed by second openings in the electrodes of the capacitor stack, so that particles charged along the second acceleration channel can be accelerated by the electrodes. It is
  • a charge conversion device is present in the center of the capacitor stack.
  • the capacitor stack may in particular comprise a plurality of concentrically arranged intermediate electrodes, which are connected by the switching device, such that during operation of the switching device, the intermediate electrodes are brought to a sequence of increasing potential levels between the first potential and the second potential.
  • the polyvinyl tentialmen of the electrodes of the capacitor stack are increasing in accordance with the order of concentric Anord ⁇ voltage.
  • the high-voltage electrode may be the electrode lying furthest in the concentric arrangement, while the outermost electrode may be a ground electrode, for example.
  • An accelerating potential is formed between the first and second electrodes.
  • the capacitor stack and the switching device thus represent a DC high voltage source, since the central electrode can be brought to a high potential.
  • the provided by the high voltage source Potentialdiffe ⁇ ence allows the device to ben operators as an accelerator.
  • the electric potential energy is in kinetic
  • the energy of the particles is converted by applying the high potential between the particle source and the target.
  • the concentric electrode stack is pierced by two rows of holes. Charged particles are accelerated toward the central electrode through the first acceleration channel and then, after charge conversion, accelerated further away from the central electrode through the second acceleration channel. This makes it possible to achieve a particle energy in the MV range with a compact design and to provide a continuous beam.
  • a source that may be at substantially ground potential may provide negatively charged particles that are injected as an ion beam and accelerated through the first acceleration channel toward the center electrode.
  • the concentric arrangement allows a total kompak ⁇ te construction and thereby a convenient way to isolate the central Elekt ⁇ rode.
  • one or more intermediate concentric electrodes on geeig ⁇ designated potentials are accommodated.
  • the potential steps are successively rising and can be chosen in such a way that there is at home the entire insulation volume Neren a largely ⁇ moderate field strength.
  • the inserted intermediate electrode (s) increase the punch-through field strength limit so that higher DC voltages can be generated than without intermediate electrodes. This is based on the fact that the breakdown field strength in vacuum is approximately inversely proportional to the square root of the electrode spacings .
  • the introduced / n intermediate electrode / n with which the electric field in the interior of the DC voltage high-voltage source is uniform, at the same time contribute to an advantageous increase in the possible achievable field strength.
  • the electrodes of the capacitor stack are insulated from each other by vacuum insulation.
  • the insulation volume consequently has a high vacuum.
  • the use of insulating materials would have the disadvantage that the materials, when subjected to a direct electrical field, tend to interfere with internal charges, which are caused in particular by ionizing radiation during operation of the accelerator.
  • the coupled, migrating charges cause a strong inhomogeneous electric field strength in all physical isolators, which then leads to the local transgression of the breakdown limit and thus the formation of spark channels. Isolation by high vacuum avoids such disadvantages.
  • the len operation exploitable electric field strength can be because ⁇ enlarge.
  • the arrangement is thus essentially - except for a few components such as the suspension of the electrodes - free of insulator materials.
  • the switching device comprises a high-voltage cascade, in particular a greyscale cascade or a Cockcroft-Walton cascade.
  • a high-voltage cascade in particular a greyscale cascade or a Cockcroft-Walton cascade.
  • the first electrode, the second electrode and the intermediate electrodes for generating the DC voltage can be charged by means of a comparatively low AC voltage.
  • This embodiment is based on the idea of high-voltage generation, as is made possible by a Greinacher rectifier cascade, for example.
  • the capacitor stack is divided into two separate capacitor chains through a gap extending through the electrodes.
  • the two capacitor chains can be advantageously used for the formation of a cascaded switching device such as a Greiner or Cockcroft-Walton cascade.
  • Each capacitor chain thereby represents an arrangement in turn kon ⁇ concentrically arranged to each other (partial) electrodes.
  • the separation can be effected, for example, by a section along the equator, which then leads to two hemisphere stacks.
  • the individual capacitors of the chains can be loaded in such a circuit respectively to the peak-to-peak voltage of the primary AC input voltage, which is used for charging the high voltage source.
  • the above-mentioned potential equilibration, a uniform electric field distribution and thus optimum utilization of the insulation distance can be achieved in a simple manner.
  • the switching device which comprises a high-voltage cascade, connect the two separate capacitor chains to each other and in particular be arranged in the gap.
  • the input change ⁇ voltage for the high-voltage cascade can be applied between the ⁇ at the outermost electrodes of the capacitor chains, as these can be accessible for example from the outside.
  • the diode pads of a rectifier circuit can then be mounted in the equatorial gap, thereby saving space.
  • the charge conversion device may be a charge stripper capable of converting negatively charged ions into positively charged ions, e.g. when passing through the stripper. It can e.g. a thin plastic film can be used. As the ions pass through, at least two electrons can be torn away, which are then reloaded into positive ions. The snatched electron current represents the
  • the electrodes of the capacitor stack may be shaped to lie on an ellipsoidal surface, in particular a spherical surface, or lie on a cylinder surface. These forms are physically cheap. Particularly favorable is the choice of the shape of the electrodes as in a hollow sphere or the ball capacitor. Similar shapes such as in a cylinder are also possible, however, the latter usually has a comparatively inhomogeneous electric field ⁇ distribution.
  • the low inductance of the shell-like potential electrodes allows the use of high operating frequencies, so that the voltage drop remains limited when current is drawn despite the relatively small capacitance of the individual capacitors.
  • Fig. 1 is a schematic representation of a Greinacherschal- device, as it is known from the prior art.
  • Fig. 2 is a schematic representation of a section through ei ⁇ ne DC high voltage source with a part ⁇ chenetti in the center
  • Fig. 3 is a schematic representation of a section through ei ⁇ ne DC high voltage source which is designed as a tan ⁇ dembelix,
  • FIG. 4 shows a schematic representation of the electrode structure with a stack of cylindrically arranged electrodes
  • FIG. 5 is a schematic representation of a section through ei ⁇ ne DC voltage high voltage source of FIG. 2 with decreasing towards the center electrode gap
  • Fig. 6 is an illustration of the diodes of the switching device, which are formed as vacuum piston-free electron tubes
  • Figure 7 is a diagram showing the charging process in response to pump cycles
  • Fig. 8 shows the advantageous Kirchhoff shape of the electrode ends. Identical parts are provided in the figures with the same reference numerals.
  • Fig. 1 An AC voltage U is applied.
  • the first half-wave charges the capacitor 15 to the voltage U via the diode 13.
  • the voltage U from the capacitor 13 is added to the voltage U at the input 11, so that the capacitor 17 is now charged via the diode 19 to the voltage 2U.
  • This process is repeated in the subsequent diodes and capacitors, so that in the circuit shown in Fig. 1 total of the output 21, the voltage 6U is achieved.
  • the Fig. 2 also clearly shows how a first capacitor chain and the second set 25 of Kon ⁇ capacitors forms a second capacitor chain through the Darge ⁇ set circuit of each of the first set 23 of capacitors.
  • FIG. Fig. 2 shows a schematic section through a high voltage source 31 with a central electrode 37, a äuße ⁇ ren electrode 39 and a row of intermediate electrodes 33 by a high-voltage cascade 35, whose principle in Fig. 1, are interconnected and can be charged by this high voltage ⁇ cascade 35.
  • the electrodes 39, 37, 33 are hollow-spherical and arranged concentrically with each other.
  • the maximum electric field strength that can be applied is proportional to the curvature of the electrodes. Therefore, a spherical shell geometry is particularly favorable.
  • the outermost electrode 39 may be a ground electrode.
  • the electrodes 37, 39, 33 are in two spaced, separate hemisphere stack ge ⁇ divided by a gap.
  • the first hemisphere stack forms a first condensation torkette 41
  • the second hemisphere stack a second Kondensa ⁇ torkette 43rd
  • the voltage U of an AC voltage source 45 is applied to the outermost electrode shell halves 39 ', 39 ".
  • the diodes 49 for forming the circuit are arranged in the region of the great circle of the semi-hollow spheres, d. H. in the equatorial section 47 of the respective hollow balls.
  • the diodes 49 form the transverse connections between the two capacitor chains 41, 43, which correspond to the two sets 23, 25 on capacitors from FIG. 1.
  • an acceleration channel 51 which is accessible from a, e.g. lying inside the particle source 52 and allows extraction of the particle stream.
  • the particle of charged particles experiences a high Accelerati ⁇ supply voltage of the hollow-spherical high-voltage electrode 37th
  • the high voltage source 31 and the particle accelerator have the advantage that the high voltage generator and the particle accelerator are integrated with each other, since then all electrodes and intermediate electrodes can be accommodated in the smallest possible volume.
  • the entire electrode assembly is isolated by vacuum insulation.
  • particularly high voltages of the high voltage electrode 37 can be generated, resulting in a particularly high particle energy result.
  • vacuum as an insulator and the use of an inter-electrode distance of the order of 1 cm make it possible to achieve electric field strengths of values above 20 MV / m.
  • the use of vacuum has the advantage that the accelerator during loading ⁇ drive must not be loaded because the occurring in the Be ⁇ acceleration radiation at insulator materials can cause problems. This allows the construction of smaller and more compact machines.
  • FIG. 3 shows a development of the high-voltage source shown in FIG. 2 for the tandem accelerator 61.
  • the switching device 35 from FIG. 2 is not shown for the sake of clarity, but is identical in the high-voltage source shown in FIG.
  • the first capacitor chain 41 also has an acceleration channel 53 which leads through the electrodes 33, 37, 39.
  • a carbon foil 55 for charge stripping is arranged inside the central high-voltage electrode 37. It can then negatively charged ions are generated outside of the high voltage source 61, along the acceleration passage 53 be ⁇ be accelerated through the first condensate ⁇ sator chain 41 to the central high voltage electrode 37, it passes through the carbon film 55 in positively charged ions are converted and then further accelerated by the acceleration channel 51 of the second Kondensatorket ⁇ te 43 and exit from the high voltage source 31 again.
  • the outermost spherical shell 39 can be largely closed lead ⁇ ben and thus take over the function of a grounded housing.
  • the hemispherical shell immediately below can then be the capacity of an LC resonant circuit and part of the drive connection of the switching device.
  • Such a tandem accelerator uses negatively charged particles.
  • the negatively charged particles are accelerated by the first acceleration path 53 from the outer electrode 39 toward the central high-voltage electrode 37.
  • a charge conversion process takes place at the central high voltage electrode 37.
  • the tandem accelerator provides to produce ei ⁇ NEN proton beam intensity of 1 mA at an energy of 20 MeV. For this purpose, a continuous stream of particles from a H ⁇ -Pumbleuze is introduced into the first Accelerati ⁇ transmission link 53 and to the central +10 MV electrode in accelerated. The particle hit one
  • N 50 stages on ⁇ , ie a total of 100 diodes and capacitors.
  • the outer radius is 0.55 m. In each hemisphere find 50 spaces at a distance of 1 cm between adjacent spherical shells.
  • a smaller number of stages reduces the number of charge cycles and the effective internal source impedance, but increases the pump charge voltage requirements.
  • the diodes arranged in the equatorial gap, which connect the two hemispheres to one another, can be arranged, for example, in a spiral pattern.
  • the total capacity can be 74 pF according to equation (3.4) and the stored energy 3.7 kJ.
  • a charging current of 2 mA requires an operating frequency of approximately 100 kHz.
  • films with a film thickness of t ⁇ 15 ... 30 ⁇ g / cm 2 can be used. This thickness represents a good compromise between particle transparency and effectiveness of the charge stripping.
  • Carbon foils produced by decomposing ethylene by means of glow discharge have a thickness-dependent constant viscosity of kfoil ⁇ (0.44 t - 0.60) C / Vm 2 , where the thickness is given in yg / cm 2 .
  • a lifetime of 10 to 50 days can be expected. Longer lifetimes can be achieved by increasing the area effectively radiated, e.g. by scanning a rotating disk or a film having a linear band structure.
  • FIG. 4 illustrates an electrode mold in which hollow-cylindrical electrodes 33, 37, 39 are arranged concentrically with one another. Through a gap, the electrode stack is divided into two separate capacitor chains, which can be connected to a switching device constructed analogously to FIG.
  • the electrode shape shown in FIG. 4 can also be applied to a tandem accelerator as shown in FIG. Acceleration ducts 51, 53 are then formed by for centering ⁇ rum introduced through openings in the electrodes (not shown here).
  • FIG. 5 shows a development of the high-voltage source shown in FIG. 2, in which the distance of the electrodes 39, 37, 33 from the center decreases.
  • the decrease in the voltage applied to the electrode 39 externa ⁇ ßeren pumping AC voltage toward the center so that nevertheless there is a substantially equal field strength between adjacent pairs of electrodes.
  • a largely constant field strength along the acceleration channel 51 can be achieved.
  • Fig. 6 shows an embodiment of the diodes of the switching device shown.
  • the concentric arranged, hemispherical Shawl-like electrodes 39, 37, 33 are shown only for the sake of clarity.
  • the cathodes can be designed as thermal electron emitters, for example with radiation heating through the equatorial gap or as photocathodes. The latter allow by modulation of the exposure, for example by laser radiation, a control of the current in each diode. The charging current and thus indirectly the high voltage can be controlled.
  • the diodes are shown here as electron tubes 63 having a cathode 65 and an opposing anode 67. Since the switching device is disposed in the vacuum insulation, the vacuum tube of the electron tubes that would otherwise be required to operate the electrons is eliminated.
  • the arrangement follows the principle shown in Fig. 1, to arrange the high voltage electrode inside the accelerator and the concentric ground electrode on the outside of the accelerator.
  • a ball capacitor with inner radius r and outer radius R has the capacity rR
  • Modern avalanche semiconductor diodes (“soft avalanche semiconductor diodes”) have very low parasitic capacitances and have short recovery times.
  • a series circuit does not need resistors for potential equilibration.
  • the operating frequency can be set comparatively high in order to use the relatively small interelectrode capacitances of the two Greinacher capacitor stacks.
  • a voltage of Uin ⁇ lOOkV, ie 70 kV eff can be used.
  • the diodes must withstand voltages of 200 kV. This can be achieved by using chains of diodes with a lower tolerance. For example, ten 20 kV diodes can be used. Diodes can be, for example, diodes from the company Philips with the designation BY724, diodes from the company EDAL with the designation BR757-200A or diodes from the company Fuji with the designation ESJA5320A.
  • the dimension of the BY724 diode of 2.5mm x 12.5mm allows all 1000 diodes for the switching device to be accommodated in a single equatorial plane for the spherical tandem accelerator specified below.
  • the chain of diodes may be formed by a plurality of mesh-like electrodes of the electron tubes connected to the hemispherical shells. Each electrode acts on the one hand as a cathode, on the other hand as an anode.
  • Discrete capacitor stack The central idea is to cut through the concentric electrodes arranged one after the other on an equatorial plane.
  • the two resulting electrode stacks represent the cascade capacitors. It is only necessary to connect the string of diodes to opposite electrodes across the cutting plane. It should be noted that the rectifier automatically stabilizes the potential differences of the successively arranged electrodes to about 2 Uin, suggesting constant electrode spacings.
  • the drive voltage is applied between the two outer hemispheres. Ideal capacity distribution
  • the steady state operation provides an operating frequency f a charge
  • Each de pair of capacitors C 2 k and C2k + i thus transfer a charge (k + l) Q.
  • the charge pump provides a generator source impedance This reduces a load current I out according to the DC output voltage
  • the rectifier diodes essentially pick up the AC voltage, turn it into DC voltage, and accumulate it to a high DC output voltage.
  • the AC voltage is conducted from the two capacitor columns to the high voltage electrode and attenuated by the rectifier currents and stray capacitances between the two columns.
  • this discrete structure can be approximated by a continuous transmission line structure.
  • the capacitor structure represents a longitudinal digital impedance with a length-specific impedance 3. Stray capacitances between the two columns introduce a length-specific shunt admittance V. The voltage stacking the rectifier diode causes an additional specific current load 3, which is proportional to the DC load current I out and the density of the taps along the transmission line.
  • the general equation is an extended telegraph equation
  • the peak-to-peak ripple at the DC output is equal to the difference in AC voltage amplitude at both ends of the transmission line
  • the boundary condition for a concentrated terminal AC impedance Zi between the columns is
  • the optimum electrode spacing ensures a constant DC electric field strength 2 E at the planned DC Load current.
  • the specific AC load current along the transmission line is position dependent
  • the AC voltage follows
  • a reduction of the load always increases the voltages between the electrodes, therefore operation with little or no load may exceed the allowable E and the maximum loadability of the rectifier columns. It may therefore be advisable to optimize the design for unloaded operation.
  • the diodes essentially tap the AC voltage, direct it and accumulate it along the transmission line.
  • the average DC output voltage is thus or - explicitly - tanh / d tan / d N 2 ,
  • the DC output voltage is a
  • a compact machine requires maximizing the electrical breakdown field strength.
  • Generally smooth surfaces with low curvature should be chosen for the capacitor electrodes.
  • the breakdown electric field strength E roughly scales with the inverse square root of the interelectrode distance, leaving a large number of scarce
  • the optimum edge shape is known as the KIRCHHOFF shape (see below),
  • the electrode shape is shown in FIG. 8.
  • the electrodes have a normalized unit spacing and an asymptotic thickness 1 - A far away from the edge, which is frontally to a vertical edge with the height
  • the parameter 0 ⁇ A ⁇ 1 also represents the inverse E field peak due to the presence of the electrodes.
  • the thickness of the electrodes can be arbitrarily small without introducing noticeable E field distortions.
  • a negative curvature, z At the orifices along the beam path, further reduce the E-field amplitude.
  • the drive voltage generator must provide high AC voltage at high frequency.
  • the usual approach is to boost an average AC voltage through a high isolation output transformer.
  • An alternative may be a charge pump, i. be a periodically operated semiconductor Marx generator.
  • a charge pump i. be a periodically operated semiconductor Marx generator.
  • Such a circuit provides an output voltage with a change between ground and a high voltage of a single polarity, and efficiently charges the first capacitor of the capacitor chain.
  • the dielectric SCHWAIGER efficiency factor ⁇ is defined as the inverse of the local E field peak due to field inhomogeneities, i. the ratio of the E field of an ideal flat electrode arrangement and the peak surface E field of the geometry, considering the same reference voltages and distances.
  • the front sides are flat.
  • An electrode surface represents an aquipotential line of the electric field analogous to a free surface of a flowing liquid.
  • a stress-free electrode follows the flow field line.
  • the size of the derivative on the electrode surface can be normalized to one, and the height DE can be referred to as A in comparison to AF (see Fig. 6).
  • the curve CD then maps to arc i 1 on the unit circle.
  • Source of the flow lines is 1 / A, the sink 1.
  • the potential function ⁇ is thus defined by four sources on v-positions + A, -A, 1 / A, -1 / A and two sinks of magnitude 2 to ⁇ 1.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Particle Accelerators (AREA)

Abstract

L'invention concerne un accélérateur de particules chargées, présentant un empilage de condensateurs comprenant une première électrode apte à être amenée à un premier potentiel, une deuxième électrode de disposition concentrique par rapport à la première électrode et apte à être amenée à un deuxième potentiel différent du premier potentiel, au moins une électrode intermédiaire de disposition concentrique entre la première et la deuxième électrode et apte à être amenée à un potentiel intermédiaire compris entre le premier potentiel et le deuxième potentiel; un dispositif de commutation auquel sont reliées les électrodes de l'empilage de condensateurs et qui est conçu de façon que, lorsque le dispositif de commutation est en mode de fonctionnement, les électrodes de l'empilage de condensateurs, de disposition mutuellement concentrique, puissent être amenées à des niveaux de potentiels croissants; un premier et un deuxième canaux d'accélération qui sont formés par des premiers et des deuxièmes orifices pratiqués dans les électrodes de l'empilage de condensateurs, de façon que, le long des premier et deuxième canaux d'accélération, des particules chargées puissent être accélérées par les électrodes; un dispositif de transformation de charge disposé au centre de l'empilage de condensateurs.
PCT/EP2011/051469 2010-02-24 2011-02-02 Accélérateur de particules chargées Ceased WO2011104083A1 (fr)

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Publication number Priority date Publication date Assignee Title
WO2013182219A1 (fr) * 2012-06-04 2013-12-12 Siemens Aktiengesellschaft Dispositif et procédé de collecte de particules électriquement chargées
CN104350812A (zh) * 2012-06-04 2015-02-11 西门子公司 用于收集经充电粒子的装置和方法
JP2015519000A (ja) * 2012-06-04 2015-07-06 シーメンス アクチエンゲゼルシヤフトＳｉｅｍｅｎｓ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ 荷電粒子収集装置及び荷電粒子収集方法
US9253869B2 (en) 2012-06-04 2016-02-02 Siemens Aktiengesellschaft Device and method for collecting electrically charged particles
RU2608577C1 (ru) * 2012-06-04 2017-01-23 Сименс Акциенгезелльшафт Устройство и способ для сбора электрически заряженных частиц

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